Rotating cathode magnetic bar deformation supporting plate structure

Abstract

The utility model discloses a rotating cathode magnetic bar deformation supporting plate structure which comprises a deformation supporting plate, a plurality of sets of magnetic strips are installed on the front face of the deformation supporting plate, and a plurality of sets of online adjusting assemblies are installed on the back face of the deformation supporting plate at intervals. And under the action of any group of online adjusting assemblies, the deformation supporting plate in the area is driven to deform, so that the distance between the magnetic strip and the target material in the area is independently adjusted. The front surface of the deformation supporting plate is provided with first deformation grooves which are staggered with the mounting positions of a plurality of on-line adjusting assemblies, and the back surface of the deformation supporting plate is provided with second deformation grooves which are formed in two sides of the mounting positions of the on-line adjusting assemblies in pairs; therefore, the deformation supporting plate at each adjusting point position can deform more easily under the action of the online adjusting assembly, and the purpose of accurately adjusting the rotating cathode magnetic bar is achieved.

Description

Technical Field

[0001] This utility model relates to the field of rotating cathode magnetic rod technology, and in particular to a rotating cathode magnetic rod deformation support plate structure. Background Technology

[0002] Vacuum sputtering coating technology has been widely used in semiconductor, solar energy, optics, and aerospace fields. Among them, magnetron sputtering coating has the advantages of fast sputtering speed, simple equipment, and easy control, making it suitable for long-term mass production. Magnetron sputtering coating refers to a coating technology that uses the coating material as the target cathode, and uses argon ions to bombard the target material to generate cathode sputtering, which sputters the target material atoms onto the workpiece to form a deposition layer.

[0003] Currently, the coating industry has increasingly stringent requirements for film uniformity, long-term stability, and the repeatability and precision of magnetic field adjustment. While the uniformity of thin film deposition is influenced by factors such as the uniformity of the process gas and the electric field in the coating equipment, the most critical factor is the uniformity of the magnetic field of the rotating cathode magnetic rod. Therefore, the rotating cathode magnetic rod not only requires excellent magnetic field uniformity in its initial state of use, but also needs to continuously adjust the magnetic field strength during the continuous coating process to ensure the continuity and uniformity of thin film deposition.

[0004] When adjusting the magnetic field strength, it is usually necessary to adjust the distance between the magnetic strip and the target material at a specific point. However, the magnetic strip in the existing magnetic rod structure is usually installed on a metal plate. When the adjustment force is small, the metal plate cannot deform. When the adjustment force is large, the deformation of the magnetic strip at that point exceeds the adjustment range. This makes single-point adjustment quite difficult. Utility Model Content

[0005] The purpose of this invention is to provide a rotating cathode magnetic rod deformation support plate structure to solve the problems in the prior art.

[0006] To solve the above technical problems, this utility model provides a rotating cathode magnetic rod deformation support plate structure, including a deformation support plate, wherein multiple sets of magnetic strips are installed on the front side of the deformation support plate and multiple sets of online adjustment components are installed at intervals on the back side;

[0007] Under the action of any one of the online adjustment components, the deformation support plate in that area is deformed, thereby adjusting the distance between the magnetic strip and the target material in that area individually.

[0008] Preferably, the deformation support plate is equipped with three sets of magnetic strips, two of which are N-pole magnetic strips installed on both sides of the deformation support plate respectively; the other set is an S-pole magnetic strip installed between the two sets of N-pole magnetic strips.

[0009] Preferably, each set of magnetic strips is composed of several magnetic blocks arranged sequentially along the length of the deformation support plate.

[0010] Preferably, the mounting surface of the online adjustment component of the deformation support plate is provided with a plurality of first deformation grooves spaced apart, and the plurality of first deformation grooves are staggered with the mounting positions of the plurality of online adjustment components.

[0011] Preferably, the magnetic strip mounting surface of the deformation support plate is provided with a plurality of second deformation grooves spaced apart.

[0012] Preferably, multiple second deformation grooves are arranged in pairs on both sides of the mounting position of the online adjustment component.

[0013] Preferably, the deformation support plate has end plate slots machined at both ends for installing sealing end plates.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] The deformation support plate disclosed in this utility model has a first deformation groove on the front side that is staggered with the mounting positions of multiple online adjustment components, and a second deformation groove on both sides of the mounting positions of the online adjustment components in pairs on the back side. This allows the deformation support plate at each adjustment point to deform more easily under the action of the online adjustment components, thus achieving the purpose of precise adjustment of the rotating cathode magnet. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the rotating cathode magnetic rod using the deformation support plate provided by this utility model;

[0017] Figure 2 This is a structural schematic diagram of the deformation support plate provided by this utility model;

[0018] In the figure: 1. Deformation support plate; 2. Magnetic strip; 3. Online adjustment component; 101. First deformation groove; 102. Mounting position; 103. Second deformation groove; 4. Sealing end plate. Detailed Implementation

[0019] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description and claims. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0020] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0021] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Example

[0022] This utility model provides a rotating cathode magnetic rod deformation support plate structure. Please refer to [link / reference]. Figure 1 and Figure 2 It includes a deformation support plate 1, on the front of which multiple sets of magnetic strips 2 are installed, and on the back which multiple sets of online adjustment components 3 are installed at intervals; under the action of any set of online adjustment components 3, the deformation support plate 1 in that area is deformed, thereby adjusting the distance between the magnetic strips 2 and the target material in that area individually.

[0023] Specifically, the deformation support plate 1 is equipped with three sets of magnetic strips, two of which are N-pole magnetic strips, which are installed on both sides of the deformation support plate 1 respectively; the other set is an S-pole magnetic strip, which is installed between the two sets of N-pole magnetic strips.

[0024] Specifically, each set of magnetic strips 2 is composed of several magnetic blocks arranged sequentially along the length of the deformation support plate 1.

[0025] Furthermore, the mounting surface of the online adjustment component 3 of the deformation support plate 1 is provided with a plurality of first deformation grooves 101 spaced apart, and the plurality of first deformation grooves 101 and the mounting positions 102 of the plurality of online adjustment components 3 are staggered, making the deformation support plates 1 on both sides of the online adjustment component 3 easier to deform.

[0026] Furthermore, a plurality of second deformation grooves 103 are spaced apart on the mounting surface of the magnetic strip 2 of the deformation support plate 1, making it easier for the deformation support plates 1 on both sides of the online adjustment component 3 to deform.

[0027] Furthermore, multiple second deformation grooves 103 are arranged in pairs on both sides of the mounting position 102 of the online adjustment component 3.

[0028] Furthermore, the deformation support plate 1 has end plate slots machined at both ends for installing sealing end plates 4.

[0029] The deformation support plate 1 disclosed in this utility model has a first deformation groove 101 on the front side that is staggered with the mounting positions of multiple online adjustment components, and a second deformation groove 103 on both sides of the mounting positions of the online adjustment components in pairs on the back side. This allows the deformation support plate 1 at each adjustment point to deform more easily under the action of the online adjustment component 3, thereby achieving the purpose of precise adjustment of the rotating cathode magnetic rod.

[0030] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A rotating cathode magnetic rod deformation support plate structure, characterized in that, Includes a deformation support plate (1), wherein multiple sets of magnetic strips (2) are installed on the front side of the deformation support plate (1), and multiple sets of online adjustment components (3) are installed at intervals on the back side; Under the action of any one of the online adjustment components (3), the deformation support plate (1) of the corresponding area is deformed, thereby adjusting the distance between the magnetic strip (2) and the target material in that area.

2. The rotating cathode magnetic rod deformation support plate structure as described in claim 1, characterized in that, Three sets of magnetic strips are installed on the deformation support plate (1), two of which are N-pole magnetic strips, which are installed on both sides of the deformation support plate (1); the other set is an S-pole magnetic strip, which is installed between the two sets of N-pole magnetic strips.

3. The rotating cathode magnetic rod deformation support plate structure as described in claim 2, characterized in that, Each set of magnetic strips (2) is composed of several magnetic blocks arranged sequentially along the length of the deformation support plate (1).

4. The rotating cathode magnetic rod deformation support plate structure as described in claim 1, characterized in that, The online adjustment component (3) of the deformation support plate (1) is provided with a plurality of first deformation grooves (101) spaced apart on its mounting surface, and the plurality of first deformation grooves (101) are staggered with the mounting positions (102) of the plurality of online adjustment components (3).

5. The rotating cathode magnetic rod deformation support plate structure as described in claim 4, characterized in that, The deformation support plate (1) has multiple second deformation grooves (103) spaced apart on the mounting surface of the magnetic strip (2).

6. The rotating cathode magnetic rod deformation support plate structure as described in claim 5, characterized in that, Multiple second deformation grooves (103) are arranged in pairs on both sides of the mounting position (102) of the online adjustment component (3).

7. The rotating cathode magnetic rod deformation support plate structure as described in claim 1, characterized in that, The deformation support plate (1) has end plate slots at both ends for installing sealing end plates (4).

Images