Laser cladding device and laser cladding head

Abstract

The utility model relates to the field of laser cladding equipment, in particular to a laser cladding device and a laser cladding head. The utility model provides a laser cladding device which comprises a laser cladding head, a cladding walking mechanism of a three-axis motion module, a positioner mechanism and an independent powder feeder. And a plurality of process parameters do not need to be input to determine the moving paths of the laser cladding nozzle head and the cutting teeth, so that the equipment adjusting time is saved, and the processing efficiency is improved. And the laser cladding nozzle head is always perpendicular to the machining surface of the cutting tooth, mutual interference is avoided in the machining process, powder can be uniformly cladded on the cutting tooth, and the single-channel width of the cutting tooth is ensured to be consistent as much as possible.

Description

Technical Field

[0001] This patent relates to the field of laser cladding equipment, and in particular to a dual-station laser cladding device and a laser cladding head. Background Technology

[0002] A mask is a patterning substrate used in photolithography processes for micro- and nano-fabrication. The patterning substrate contains the circuit information structure of the chip design, which can be transferred onto a wafer through exposure. Masks have a wide range of applications; they are required in all fields involving photolithography processes, such as flat panel displays (FPDs), printed circuit boards (PCBs), microelectromechanical systems (MEMS), and integrated circuits (ICs).

[0003] Existing photomasks typically use metallic chromium (Cr) as the mask material, with a thickness ranging from 100 nm to 150 nm. At this thickness, strong interactions occur between the wave and the material, easily leading to three-dimensional effects on the mask. These three-dimensional effects tend to cause trapezoidal sidewalls in the mask pattern, hindering subsequent processes such as etching to handle micro- and nano-patterns, severely impacting the photolithography quality of the product. To address this, current technologies have reduced the thickness of Cr-based photomasks to the limit of opacity, making further thinning impossible.

[0004] Therefore, traditional metallic materials such as Cr can no longer meet the increasingly higher resolution of photolithography patterns and the gradually shrinking wavelength of light sources, and a new mask structure is urgently needed to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this invention is to provide a laser cladding device and a laser cladding head to alleviate the problems of three-dimensional effects of masks and the lithographic quality of mask plates. To address the problems and shortcomings of existing technologies, this invention provides a reflective mask and its fabrication method. The laser cladding device provided by this invention includes:

[0006] Laser cladding head,

[0007] A cladding travel mechanism, which is a three-axis motion module, is used to mount the laser cladding head;

[0008] The positioner mechanism includes an L-shaped reducer, a chuck mechanism, a variable angle structure, and a drive control box module.

[0009] The powder feeder is an independent powder feeder.

[0010] Optionally, the laser cladding device further includes a detection device disposed inside the laser cladding head to monitor the molten pool formed by cladding.

[0011] Optionally, there are at least two positioner mechanisms.

[0012] Optionally, the laser cladding device further includes a worktable made of metal for mounting the cladding traveling mechanism.

[0013] Optionally, the laser cladding device further includes a display module connected to the worktable. (Rotable, dual-mechanism connecting rod)

[0014] Optionally, the laser cladding device further includes a control cabinet module, which includes a PLC control circuit module, a laser module, an industrial computer module, a three-axis motion mechanism servo driver, and a position control box module. Optionally, the laser cladding device further includes an operation unit for performing point alignment and calibration before cladding.

[0015] Furthermore, this utility model also provides a laser cladding head, applicable to the laser cladding device described in any of the above claims, characterized in that the laser cladding head comprises:

[0016] An optical fiber insertion module, which has a QBH interface, is used to connect the laser cladding head and the optical fiber;

[0017] The upper protective mirror and cooling module are located below the optical fiber insertion module;

[0018] A collimating lens mounting optical module is provided, which is connected to the lower part of the upper protective lens and the cooling module, and a powder separator module and a laser head mounting module are provided on one side of the collimating lens mounting optical module;

[0019] A focusing lens optical module, which is connected to the collimating lens mounting optical module and is located below the collimating lens mounting optical module;

[0020] A protective lens module, which is connected to the focusing lens optical module;

[0021] A coaxial adjustment module for photosensitive materials, which is connected to the focusing lens optical module, is used to;

[0022] The laser head nozzle is connected to the coaxial adjustment module for the photosensitive powder.

[0023] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0024] (1) It is not necessary to input multiple process parameters to determine the movement path of the laser cladding nozzle and the cutting teeth, which saves equipment adjustment time and improves processing efficiency. In addition, the laser cladding nozzle and the cutting teeth always remain perpendicular to each other during processing, and they will not interfere with each other. The powder can be uniformly clad on the cutting teeth, and the single-pass width of the cutting teeth can be kept as consistent as possible.

[0025] (2) The dual-station design avoids the conflict between the upper and lower cutting time and the cladding time. The upper and lower cutting and cladding cutting can be carried out in an alternating manner, which significantly improves the cladding efficiency and reduces costs.

[0026] (3) Self-adjusting, dual-station laser cladding equipment for cutting teeth, featuring a five-axis operating mechanism, CNC operating system, visual programming control, and a control cabinet and system with a reserved open serial port for connecting to external robotic arms to achieve automated loading and unloading. The dual-station positioner is suitable for cladding various types of cutting teeth, and the user interface is flexible and easy to operate.

[0027] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0028] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0029] Figure 1 This is a schematic diagram of the cladding device according to an embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the structure of a three-axis motion module according to an embodiment of the present invention;

[0031] Figure 3 This is a schematic diagram of the structure of a laser cladding head according to an embodiment of the present invention.

[0032] In the diagram: 10-Laser cladding head, 11-Fiber optic insertion module, 12-Upper protective mirror and cooling module, 13-Collimating mirror mounting optical module, 14-Focusing mirror optical module, 15-Protective mirror module, 16-Coaxial adjustment module for photopowder, 17-Laser head nozzle; 20-Polymer mechanism, 21-L-type reducer, 22-Chuck mechanism, 23-Variable angle structure, 24-Drive control box module; 30-Clad cladding walking mechanism, 31-X-axis motion module, 32-Y-axis motion module, 33-Z-axis motion module, 34-Laser cladding head connection and mounting module; 40-Powder feeder; 50-Worktable; 60-Display module; 70-Control cabinet module; 80-Operating unit. Detailed Implementation

[0033] The following reference Figures 1 to 3 This invention describes a laser cladding apparatus according to an embodiment of the present invention. In this description, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of the present invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically described, this indicates that other features are not excluded and may be further included.

[0034] In the description of this embodiment, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0035] Figure 1 This is a schematic diagram of a laser cladding device according to an embodiment of the present invention. Figure 1 As shown, this utility model provides a laser cladding device, which includes a laser cladding head, a cladding traveling mechanism, a positioner mechanism, and a powder feeder. The cladding traveling mechanism is a three-axis motion module used to mount the laser cladding head; the positioner mechanism includes an L-shaped reducer, a chuck mechanism, a variable angle structure, and a drive control box module; the powder feeder is an independent powder feeder.

[0036] The specific working process includes: First, clamping the cutting teeth to be clad onto the positioner mechanism and adjusting the positioner mechanism so that the surface of the cutting teeth to be clad is perpendicular to the axis of the laser cladding head. Second, moving the nozzle of the laser cladding head above the cutting teeth, and taking two points on the plane of the surface of the cutting teeth to be clad as the start and stop points for the nozzle's reciprocating movement, saving them in the program. Third, the positioner mechanism clamping the cutting teeth rotates automatically before the instruction in the pre-saved program. The laser cladding nozzle moves to the cladding starting position, the protective gas and powder feeding are automatically turned on, the laser is activated, and the three-axis motion mechanism carries the nozzle along the direction of the cutting tooth axis, making reciprocating cyclic movements between the start and stop points to perform cladding. Finally, a complete clad wear-resistant ring is formed on the area of ​​the cutting teeth to be clad.

[0037] It should be noted that the number of laser cladding nozzle cycles is determined by factors such as the time it takes for the cutting teeth to rotate once, the cladding length per cycle, and process parameters.

[0038] In this embodiment, it is not necessary to input multiple process parameters to determine the movement path of the laser cladding nozzle and the cutting teeth, saving equipment adjustment time and improving processing efficiency. Furthermore, the laser cladding nozzle and the cutting teeth processing surface remain perpendicular at all times, preventing interference during processing. This allows the powder to be uniformly clad onto the cutting teeth, ensuring consistent width of each single pass. The cladding pass is high and narrow with a small overlap rate, exhibiting an approximately W-shaped appearance. The simplified processing path further enhances cladding accuracy and efficiency.

[0039] In some embodiments of this utility model, the laser cladding device further includes a detection device disposed inside the laser cladding head to monitor the molten pool formed by cladding.

[0040] In this embodiment, the detection device monitors the molten pool formed by cladding and can provide real-time feedback on the state of the molten pool during cladding.

[0041] In some embodiments of this utility model, there are two positioner mechanisms.

[0042] In the specific operation, before cladding the cutting teeth, the start and stop points of the nozzles are determined on both positioner mechanisms and saved in the program. During the cladding process, after cladding one cutting tooth, the laser cladding nozzle head will automatically move to another positioner equipped with cutting teeth to clad the next cutting tooth. At the same time, the positioner mechanism that has just finished cladding the cutting tooth stops rotating, and the operator loads and unloads the cutting teeth, performs cutting tooth cladding calibration, writes the cutting tooth cladding cycle program, and inputs pre-process parameters, among other preparatory work before cladding. This cycle is repeated to complete the batch cladding of the cutting teeth.

[0043] In this embodiment, two positioner mechanisms are provided. While one positioner mechanism is performing the cladding work, the other can be used for installing cutting teeth and / or unloading materials. This improves the working efficiency of the cladding device during batch cladding.

[0044] In some other embodiments of this utility model, the positioner mechanism may be three or more.

[0045] In some embodiments of this invention, the laser cladding apparatus further includes a worktable. The worktable is made of metal and is used to mount the cladding traveling mechanism. In this embodiment, the worktable is made of metal.

[0046] In some embodiments of this utility model, the workbench is made of stainless steel plate with a thickness of 8-12mm. A cross beam structure is designed under the workbench, four directional support columns are designed to be installed above the workbench, and sheet metal mounting structures are designed at the four corners. Specifically, the thickness of the stainless steel plate can be any value in the range of 8-12mm, such as 8mm, 9mm, or 10.5mm.

[0047] In this embodiment, a crossbeam support is designed under the worktable to ensure its rigidity and stability during the operation of the cladding device. The directional support facilitates the installation of the cladding traveling mechanism. The corner brackets enhance the overall aesthetics.

[0048] In some embodiments of this invention, the laser cladding device further includes an operation unit. The operation unit performs point alignment and calibration before cladding.

[0049] In some embodiments of this invention, the laser cladding device further includes a control cabinet module. The control cabinet module includes a PLC control circuit module, a laser module, an industrial computer module, a three-axis motion mechanism servo driver, and a displacement control box module.

[0050] Specifically, the PLC control circuit module connects the PLC microcontroller unit modules in series to achieve linkage and control functions; the laser is an important source of energy output during the cladding process and adopts a domestic brand; the display module is then connected to the industrial computer and operation module unit to realize linkage operation, control, cladding process monitoring, and feedback functions.

[0051] In this embodiment, the operation of the equipment is visually controlled via an industrial computer module. The laser is connected to the cladding laser head, providing the energy required for the cladding laser head to operate.

[0052] In some embodiments of this invention, the laser cladding apparatus further includes a display module. The display module is connected to the worktable.

[0053] In this embodiment, the display module is easy to view, making the cladding process visible.

[0054] In some embodiments of this invention, the display is rotatably connected to the worktable. In this embodiment, the rotatable connection allows different operators to rotate the display and view the interface according to their own habits. Specifically, the connecting mechanism can be a dual-mechanism connecting rod.

[0055] This utility model also provides a laser cladding head, applicable to the laser cladding device in any of the above embodiments. The laser cladding head includes an optical fiber insertion module, an upper protective mirror and cooling module, a collimating lens mounting optical module, a focusing lens optical module, a protective mirror module, a toner coaxial adjustment module, and a laser head nozzle. The optical fiber insertion module has a QBH interface for connecting the laser cladding head and the optical fiber. The upper protective mirror and cooling module is located below the optical fiber insertion module. The collimating lens mounting optical module is connected below the upper protective mirror and cooling module, and a toner separator module and a laser head mounting module are provided on one side of the collimating lens mounting optical module. The focusing lens optical module is connected to the collimating lens mounting optical module and is located below the collimating lens mounting optical module. The protective mirror module is connected to the focusing lens optical module. The toner coaxial adjustment module is connected to the focusing lens optical module. The laser head nozzle is connected to the toner coaxial adjustment module.

[0056] In this embodiment, the laser cladding head has a collimation adjustment function, which facilitates spot adjustment, process debugging and other tasks.

[0057] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A laser cladding device, characterized in that, The laser cladding device includes: Laser cladding head, A cladding travel mechanism, which is a three-axis motion module, is used to mount the laser cladding head; The positioner mechanism includes an L-shaped reducer, a chuck mechanism, a variable angle structure, and a drive control box module. The powder feeder is an independent powder feeder.

2. The laser cladding apparatus according to claim 1, characterized in that, The laser cladding device also includes a detection device, which is located inside the laser cladding head to monitor the molten pool formed by cladding.

3. The laser cladding apparatus according to claim 1 or 2, characterized in that, The positioner mechanism comprises at least two parts.

4. The laser cladding apparatus according to claim 1 or 2, characterized in that, The laser cladding device also includes a worktable made of metal for mounting the cladding traveling mechanism.

5. The laser cladding apparatus according to claim 4, characterized in that, The laser cladding device also includes a display module, which is connected to the worktable.

6. The laser cladding apparatus according to claim 1 or 2, characterized in that, The laser cladding device also includes a control cabinet module, which includes a PLC control circuit module, a laser module, an industrial computer module, a three-axis motion mechanism servo driver, and a displacement control box module.

7. The laser cladding apparatus according to claim 6, characterized in that, The laser cladding device also includes an operation unit, which is used to perform point alignment and calibration before cladding.

8. A laser cladding head, applicable to the laser cladding apparatus according to any one of claims 1-7, characterized in that, The laser cladding head includes: An optical fiber insertion module, which has a QBH interface, is used to connect the laser cladding head and the optical fiber; The upper protective mirror and cooling module are located below the optical fiber insertion module; A collimating lens mounting optical module is provided, which is connected to the lower part of the upper protective lens and the cooling module, and a powder separator module and a laser head mounting module are provided on one side of the collimating lens mounting optical module; A focusing lens optical module, which is connected to the collimating lens mounting optical module and is located below the collimating lens mounting optical module; A protective lens module is connected to the focusing lens optical module to protect the focusing lens optical module from splashes and contamination. A photosensitive powder coaxial adjustment module is connected to the focusing lens optical module to ensure that the photosensitive powder focal point and the laser beam are concentric and coaxial. The laser head nozzle is connected to the coaxial adjustment module for the photosensitive powder.

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