Nozzle mounting device and semiconductor etching equipment

Abstract

The utility model discloses a nozzle mounting device and semiconductor etching equipment. The nozzle mounting device is used for mounting a nozzle on a medium window, the medium window is arranged on a top cover of a cavity, and the nozzle mounting device comprises a mounting piece; the medium window is provided with a first matching part and a first mounting hole penetrating in the axial direction, the nozzle is provided with a first abutting part and a second matching part, and the mounting piece is provided with a second abutting part; the mounting piece is connected with the top cover, the second abutting part abuts against the second matching part, and the first matching part abuts against the first abutting part, so that at least part of the nozzle is limited in the first mounting hole. When the nozzle installation device is applied, friction is not prone to being generated between the installation part and the medium window in the nozzle installation process, particles are not prone to being generated, and the medium window is not prone to being damaged when the installation part is installed.

Description

Technical Field

[0001] This application relates to the field of semiconductor fabrication technology, specifically to a nozzle mounting device and a semiconductor etching apparatus. Background Technology

[0002] In the semiconductor industry, semiconductor etching equipment such as ICP (Inductively Coupled Plasma) typically uses nozzles to introduce reactive gases, and the nozzles play a crucial role in the etching process. Specifically, taking the ICP process as an example, the reactive gases enter the etching chamber through the nozzle. Under the excitation of the magnetic field generated by the coil above the chamber, plasma is produced, etching the wafer inside the chamber. The centering of the nozzle has a significant impact on the uniformity of the etching process. If the nozzle is not centered during installation, the gas entry into the chamber may not match the design, potentially leading to uneven etching rate distribution and affecting the etching effect. Therefore, appropriate fixing methods are needed to ensure the nozzle's centering.

[0003] Currently, nozzles are primarily fixed using two methods: sealing and fixing. In the sealing method, the seal is sandwiched between the nozzle and the media window, serving both a sealing and nozzle-fixing function. Specifically, the nozzle needs to be inserted into the sealing hole, and a downward force is applied to press both the seal and nozzle into the media window's mounting hole. If the verticality of the pressure is insufficient, significant friction can occur between the seal and the media window, potentially generating particles that affect product performance or even damage the media window. The fixing method places the nozzle in the media window's mounting hole and places several fixing components in specific mounting grooves above the nozzle within the media window. Screws are then used to secure the fixing components to the media window's screw holes, pressing the nozzle firmly against the media window. Uneven tightening force can damage the mounting grooves or screw holes, leading to damage or even rendering the media window unusable. Therefore, both of these fixing methods directly fix the nozzle mounting components to the media window, which can easily damage the media window.

[0004] Therefore, how to provide a solution to overcome or alleviate the above-mentioned defects remains a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] The purpose of this application is to provide a nozzle mounting device that prevents damage to the media window during nozzle installation. Another purpose of this application is to provide a semiconductor etching apparatus.

[0006] To solve the above-mentioned technical problems, this application provides a nozzle mounting device for mounting a nozzle on a medium window, the medium window being disposed on the top cover of a chamber, and the nozzle mounting device including a mounting component;

[0007] The medium window has a first mating part and a first mounting hole that extends axially; the nozzle has a first abutting part and a second mating part; and the mounting component has a second abutting part.

[0008] The mounting component is connected to the top cover, the second abutting portion and the second mating portion abut against each other, and the first mating portion and the first abutting portion abut against each other, so as to limit the nozzle at least partially within the first mounting hole.

[0009] The nozzle mounting device provided in this application, by setting up a mounting component and connecting the mounting component to the top cover of the chamber, and by providing a first mating part for the medium window, a first abutting part and a second mating part for the nozzle, and a second abutting part for the mounting component, with the second abutting part and the second mating part abutting against each other, and the first mating part and the first abutting part abutting against each other, can at least partially confine the nozzle to the first mounting hole on the medium window. In use, the nozzle can be installed on the medium window by the abutting between the mounting component and the nozzle. Moreover, the mounting component is not directly fixed to the medium window, but is fixed to the top cover where the medium window is located, so that friction is less likely to occur between the mounting component and the medium window during the nozzle installation process, thereby reducing the generation of particles and helping to ensure the stability of product performance. It also makes the installation of the mounting component less likely to damage the medium window, which helps to extend the service life of the medium window.

[0010] Optionally, a heating element is provided on the top surface of the medium window;

[0011] The heating element is connected to the top cover, and the mounting component is connected to the heating element.

[0012] Optionally, the nozzle mounting device may further include several connectors;

[0013] One end of the connector is connected to the top cover, and the other end of the connector is connected to the heating element.

[0014] Optionally, there are multiple connectors, and the multiple connectors are evenly spaced along the circumference of the medium window; and / or,

[0015] Of the connector and the top cover, one is provided with a first positioning element, and the other is provided with a first positioning hole, the first positioning element being inserted into the first positioning hole; and / or

[0016] Of the connector and the heating element, one is provided with a second positioning element, and the other is provided with a second positioning hole, the second positioning element being inserted into the second positioning hole; and / or,

[0017] The connector and the top cover are connected by screws.

[0018] Optionally, one of the mounting component and the heating component is provided with a third positioning component, and the other is provided with a third positioning hole, wherein the third positioning component is inserted into the third positioning hole; and / or,

[0019] The mounting component and the heating component are connected by screws.

[0020] Optionally, the heating element includes at least one heating element body and a plurality of heating bars;

[0021] The heating element body is partially or completely annular, and a plurality of heating strips are disposed on the inner circumferential surface of the heating element body and extend radially along the heating element body. A clearance space is formed between the end faces of the plurality of heating strips. The mounting member is at least partially located above the clearance space, and the mounting member is connected to at least one end face of the heating strip.

[0022] Optionally, an air inlet block is provided at the top of the nozzle;

[0023] The air intake block has a third mating part and a third abutting part, the second abutting part and the third mating part abutting, and the third abutting part and the second mating part abutting.

[0024] Optionally, the bottom surface of the mounting component forms the second abutment portion, the top surface of the air intake block forms the third mating portion, the bottom surface of the air intake block forms the third abutment portion, and the top surface of the nozzle forms the second mating portion; and / or,

[0025] Of the mounting component and the air intake block, one is provided with a fourth positioning component, and the other is provided with a fourth positioning hole, the fourth positioning component being inserted into the fourth positioning hole; and / or,

[0026] Of the air intake block and the nozzle, one is provided with a fifth positioning element, and the other is provided with a fifth positioning hole, the fifth positioning element being inserted into the fifth positioning hole; and / or,

[0027] The bottom surface of the mounting component is provided with at least one guide member, which extends circumferentially along the mounting component, and the inner circumferential surface of the guide member is in contact with the outer circumferential surface of the air intake block.

[0028] Optionally, the first mounting hole includes a first stepped hole and a first inner hole. The first stepped hole has an upward-facing first stepped surface, which forms the first mating part. The outer peripheral wall of the nozzle is provided with a step, and the step has a downward-facing second stepped surface, which forms the first abutting part.

[0029] This application also provides a semiconductor etching apparatus, including the top cover, the dielectric window, and the nozzle mounting device.

[0030] The semiconductor etching apparatus provided in this application includes the aforementioned nozzle mounting device and also possesses all the beneficial effects of the aforementioned nozzle mounting device, which will not be elaborated further here. Attached Figure Description

[0031] Figure 1 This is an exploded structural diagram of the nozzle mounting device provided in the embodiments of this application;

[0032] Figure 2 for Figure 1 A magnified view of a portion at point A;

[0033] Figure 3 for Figure 1 Top view of the nozzle mounting device shown;

[0034] Figure 4 for Figure 3 BB-direction sectional view;

[0035] Figure 5 for Figure 3 CC-direction sectional view;

[0036] Figure 6 for Figure 3 DD section view.

[0037] The reference numerals in the above figures are explained as follows:

[0038] 1- Nozzle, 1a- First abutment part, 1b- Second mating part, 1c- Fifth positioning hole, 1d- Step, 1e- Air jet channel, 1f- Sealing groove;

[0039] 2-Top cover, 2a-First positioning hole, 2b-Second threaded hole, 2c-Fourth mating part, 2d-Second mounting hole, 2d1-Second stepped hole, 2d2-Second inner hole;

[0040] 3-Media window, 3a-First mounting hole, 3a1-First stepped hole, 3a2-First inner hole, 3b-First mating part, 3c-Fourth abutment part;

[0041] 4-Intake block, 4a-Third mating part, 4b-Third abutting part, 4c-Fourth positioning hole, 4d-Outer peripheral surface, 4e-Intake channel, 41-Fifth positioning component;

[0042] 5-Mounting component, 5a-Second abutment part, 5b-Third threaded hole, 5c-Inner circumferential surface, 5d-Allowing hole, 51-Fourth positioning component, 52-Guide component;

[0043] 6-Heating element, 6a-Second positioning hole, 6b-Third positioning hole, 6c-Allowing space, 6d-Fourth threaded hole, 61-Heating element body, 62-Heating strip;

[0044] 7-Connector, 7a-First threaded hole, 71-First positioning element, 72-Second positioning element;

[0045] 8-Intake pipe. Detailed Implementation

[0046] To enable those skilled in the art to better understand the present application, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0047] It should be noted that the terms "first" and "second" used in this application are only for the convenience of describing two or more structures or components that are the same or similar in structure and / or function, and do not indicate any special limitation on order and / or importance.

[0048] In this application, the term "several" refers to a number of uncertain quantities, usually two or more; and when "several" is used to indicate the quantity of certain components, it does not indicate the quantitative relationship between these components.

[0049] In this application, unless otherwise expressly specified and limited, the term "connection" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0050] In this application, the term "offset" can refer to direct offset or indirect offset. Those skilled in the art can understand the specific meaning of the above term in this application according to the specific circumstances.

[0051] Please refer to Figure 1 and Figure 2 , Figure 1 This is an exploded view of the nozzle mounting device provided in the embodiments of this application. Figure 2 for Figure 1 A magnified view of a portion at point A.

[0052] In the embodiments provided in this application, the nozzle mounting device is used to mount the nozzle 1 to the medium window 3, the medium window 3 being disposed on the top cover 2 of the chamber; the nozzle mounting device includes a mounting member 5; the medium window 3 has a first mating part 3b and a first mounting hole 3a extending axially, the nozzle 1 has a first abutting part 1a and a second mating part 1b, and the mounting member 5 has a second abutting part 5a; the mounting member 5 is connected to the top cover 2, the second abutting part 5a and the second mating part 1b abut against each other, and the first mating part 3b and the first abutting part 1a abut against each other, so as to limit the nozzle 1 at least partially to the first mounting hole 3a.

[0053] It is easy to understand that the nozzle 1 can be connected to the air inlet pipe 8 to communicate with the external air source. Process gas can be supplied to the nozzle 1 through the air inlet pipe 8, and the nozzle 1 sprays the process gas into the chamber for etching. By connecting the mounting part 5 and the top cover 2, the mounting part 5 can be positioned and installed with the help of the top cover 2. Then, the first abutting part 1a of the nozzle 1 abuts against the first mating part 3b of the medium window 3, and the second abutting part 5a of the mounting part 5 abuts against the second mating part 1b of the nozzle 1, so that the nozzle 1 is pressed and limited to the first mounting hole 3a of the medium window 3, realizing the centering installation of the nozzle 1 on the medium window 3.

[0054] Thus, compared to the sealing method in related technologies that uses a tight fit between the seal and the medium window to fix the nozzle, which easily leads to friction between the seal and the medium window, thus easily generating particles and damaging the medium window, and the fixing method that uses screws to install the fixing part to the medium window and uses the fixing part to press the nozzle to install the nozzle on the medium window, the nozzle installation device provided in the above embodiment of this application can realize the installation of the nozzle 1 on the medium window 3 by the contact between the mounting part 5 and the nozzle 1. Moreover, the mounting part 5 is not directly fixed to the medium window 3, but fixed to the top cover 2 where the medium window 3 is located. This makes it less likely for friction to occur between the mounting part 5 and the medium window 3 during the installation of the nozzle 1, thus making it less likely for particles to be generated. This is beneficial to ensuring the stability of product quality, and the installation process of the mounting part 5 is less likely to damage the medium window 3, which is beneficial to extending the service life of the medium window 3.

[0055] Moreover, compared to the sealing methods in related technologies that rely solely on the frictional force generated by the deformation of the sealing element to fix the nozzle, which can easily cause the nozzle to tilt in the vertical direction when the gas pipe connected to the nozzle is stretched, affecting the centering of the nozzle, the nozzle mounting device provided in the above embodiments of this application fixes the nozzle 1 by the positioning and fixing effect of the top cover 2 on the mounting part 5 and the pressing effect of the mounting part 5 on the nozzle 1. This can relatively ensure the centering of the nozzle 1 after it is installed on the medium window 3, and the installation of the nozzle 1 is relatively stable. Even if the air inlet pipe 8 connected to the nozzle 1 is stretched, the nozzle 1 is not easy to tilt in the vertical direction. This can relatively ensure the consistency between the actual situation of the process gas entering the chamber and the design situation, thereby ensuring the uniformity of the etching rate distribution.

[0056] Furthermore, compared to the screw tightening force in the fixing method of related technologies, which can easily cause the nozzle to break and leak when the screw is tightened too much, the nozzle mounting device provided in the above embodiment of this application is not directly fixed to the medium window 3. The force applied during the fixing of the mounting component 5 is less likely to cause the nozzle 1 to break, thus making it less prone to leakage and helping to ensure the smooth progress of the etching process.

[0057] Please refer to this as well. Figure 3 and Figure 4 , Figure 3 for Figure 1 The top view of the nozzle mounting device shown. Figure 4 for Figure 3 BB-direction sectional view.

[0058] In actual installation, the mounting component 5 can be directly fixed to the top cover 2, or it can be fixed to the top cover 2 through other components; there are no specific restrictions.

[0059] In the embodiments provided in this application, such as Figures 1 to 4 As shown, a heating element 6 is provided on the top surface of the medium window 3; the heating element 6 is connected to the top cover 2, and the mounting part 5 is connected to the heating element 6.

[0060] It is understandable that by fixing the heating element 6 to the top cover 2, the top cover 2 can be used to position the heating element 6, and by fixing the mounting part 5 to the heating element 6, the heating element 6 can be used to center the mounting part 5.

[0061] In use, the first abutting part 1a of the nozzle 1 and the first mating part 3b of the medium window 3 abut against each other, which can achieve the initial centering and positioning of the nozzle 1. Since the top cover 2 centers and positions the mounting part 5 through the heating element 6, the second abutting part 5a of the mounting part 5 and the second mating part 1b of the nozzle 1 abut against each other, which can achieve the further centering and positioning of the nozzle 1, thereby improving the centering accuracy of the nozzle 1 installation. Moreover, the medium window 3 generally needs to be equipped with a heating structure. This application cleverly utilizes the heating element 6 provided on the top surface of the medium window 3 to connect the mounting part 5 and the top cover 2. This not only allows the medium window 3 to be heated as needed, but also allows the mounting part 5 to be set with a smaller size, without occupying a lot of space above the medium window 3. This makes the structure of the entire nozzle installation device simpler and more compact. At the same time, it also makes the installation process of the mounting part 5 less likely to damage the medium window 3.

[0062] Specifically, the connection method between the heating element 6 and the top cover 2 is not limited.

[0063] like Figure 1 and Figure 3 As shown in the embodiment of this application, the nozzle mounting device further includes several connectors 7; one end of the connector 7 is connected to the top cover 2, and the other end of the connector 7 is connected to the heating element 6. In use, the connection between the heating element 6 and the top cover 2 is achieved through the connectors 7. This not only allows the top cover 2 to position the connectors 7, thereby positioning the heating element 6, which improves the positioning effect of the mounting element 5 and helps to further improve the centering of the nozzle 1 installation, but also allows the heating element 6 to be located only above the medium window 3, without the need to be additionally placed above the top cover 2. As a result, the structure of the heating element 6 is relatively simple and compact.

[0064] Furthermore, the number of connectors 7 is unlimited.

[0065] like Figure 3 As shown, multiple connectors 7 can be set, that is, more than three, which can improve the positioning accuracy of the medium window 3 on the heating element 6.

[0066] Furthermore, the arrangement of connector 7 is not limited.

[0067] like Figure 3 As shown, the connectors 7 can be evenly spaced along the circumference of the medium window 3. In this way, the multiple connectors 7 evenly distributed around the circumference of the medium window 3 can improve the more precise positioning of the heating element 6, thereby improving the positioning accuracy of the mounting element 5 and further improving the centering of the nozzle 1 installation.

[0068] Furthermore, positioning structures can be provided between the connector 7 and the top cover 2, as well as between the connector 7 and the heating element 6, to improve positioning accuracy. The specific form of the positioning structure is not limited.

[0069] Please refer to this as well. Figure 5 and Figure 6 , Figure 5 for Figure 3 CC-direction sectional view, Figure 6 for Figure 3 DD section view.

[0070] In this embodiment of the application, the connector 7 is provided with a first positioning member 71, and the top cover 2 is provided with a first positioning hole 2a. The first positioning member 71 is inserted into the first positioning hole 2a. Through the cooperation between the first positioning member 71 and the corresponding side wall portion of the first positioning hole 2a, the top cover 2 can quickly position and install the connector 7, and the positioning accuracy can be improved.

[0071] In this embodiment, the connector 7 is provided with a second positioning member 72, and the heating member 6 is provided with a second positioning hole 6a. The second positioning member 72 is inserted into the second positioning hole 6a. Through the cooperation of the side wall portion corresponding to the second positioning member 72 and the second positioning hole 6a, the connector 7 can quickly position and install the heating member 6, and the positioning accuracy can be improved.

[0072] It is not difficult to understand that the first positioning element 71 and the second positioning element 72 mentioned above can be used as follows: Figure 6 The above configurations can be set simultaneously to enhance positioning stability and accuracy, or one of them can be selected for configuration without limitation. The first positioning element 71 can also be located on the top cover 2, and the first positioning hole 2a can be correspondingly located on the connecting element 7. The second positioning element 72 can also be located on the heating element 6, and the second positioning hole 6a can be correspondingly located on the connecting element 7 without limitation.

[0073] In this embodiment, the connector 7 and the top cover 2 are connected by screws (not shown in the figure), specifically, as follows: Figure 1 and Figure 6As shown, the connector 7 can be provided with a first threaded hole 7a at one end near the top cover 2, and the top cover 2 can be provided with a second threaded hole 2b. Screws can be tightened into the first threaded hole 7a and the second threaded hole 2b. In use, the connector 7 can be positioned first using the first positioning member 71 to quickly find the installation position of the connector 7, and then the connector 7 and the top cover 2 can be precisely fixed with screws. In this way, under the dual action of the positioning connection of the first positioning member 71 and the screw connection, the positioning accuracy of the connector 7 on the top cover 2 is higher, the installation is more stable, and it is more conducive to ensuring the centering of the nozzle 1 installation.

[0074] It is easy to understand that the above embodiments of this application use the first positioning member 71 to position and connect the connector 7 and the top cover 2, and fix the connector 7 and the top cover 2 with screws. The second positioning member 72 is used to position and connect the connector 7 and the heating member 6, which can work together to ensure the installation accuracy of the heating member 6, so as to ensure the installation accuracy of the mounting member 5.

[0075] Of course, only the first positioning element 71 and the second positioning element 72 can be provided, without the first threaded hole 7a and the second threaded hole 2b mentioned above. The positioning and connection function of the two positioning elements can be used to realize the positioning and installation of the heating element 6. There are no specific restrictions. The connecting element 7 and the top cover 2 can also be connected by other fixing methods other than screw connection. There are no specific restrictions. The connecting element 7 and the heating element 6 can also be connected by fixing methods such as screw connection to further improve the stability of the connection between the two. There are no specific restrictions.

[0076] It is worth mentioning that the center of the first positioning hole 2a and the center of the second threaded hole 2b on the top cover 2 can be collinear with the projection of the center of the medium window 3 on the horizontal plane, so that the positioning and installation of the connector 7 on the top cover 2 can be more accurate.

[0077] In specific settings, the connection method between mounting component 5 and heating component 6 is not limited.

[0078] In the embodiments provided in this application, such as Figure 3 and Figure 6 As shown, the mounting component 5 is provided with a third positioning component (not shown in the figure), and the heating component 6 is provided with a third positioning hole 6b. The third positioning component is inserted into the third positioning hole 6b. Through the cooperation of the third positioning component and the corresponding side wall portion of the third positioning hole 6b, the heating component 6 can quickly position and install the mounting component 5, and the positioning accuracy can be improved.

[0079] The number of third positioning components is unlimited; for example, more than three can be set, such as... Figure 3 As shown, more than three third positioning holes 6b can be set, which helps to improve the positioning accuracy of the mounting part 5.

[0080] In this embodiment, the mounting component 5 and the heating component 6 can also be connected by screws. Specifically, the mounting component 5 can be provided with a plurality of third threaded holes 5b, and the heating component 6 can be provided with a plurality of fourth threaded holes 6d. The number of fourth threaded holes 6d can be the same as the number of third threaded holes 5b and they correspond one-to-one. The corresponding screws can be tightened into the third threaded holes 5b and the fourth threaded holes 6d. In use, the mounting component 5 can be positioned first using the third positioning component to quickly find the installation position of the mounting component 5, and then the screws can be used to achieve precise fixing of the mounting component 5. In this way, under the dual effect of the positioning connection of the third positioning component and the screw connection, the installation accuracy of the mounting component 5 on the heating component 6 can be higher and the installation can be more stable, which is more conducive to ensuring the centering of the nozzle 1 installation. Moreover, the screw tightening can make the mounting component 5 apply a stable clamping force to the nozzle 1, making the installation of the nozzle 1 on the medium window 3 more stable.

[0081] Of course, the above-mentioned positioning component connection method and screw connection method between the mounting component 5 and the heating component 6 can not be used at the same time. Instead, one of them can be selected, or it can be a combination of other fixed connection methods other than positioning component connection method and screw connection. There are no specific restrictions.

[0082] It is easy to understand that the heating element 6 can form a clearance space 6c to provide space for the contact between the mounting element 5 and the nozzle 1.

[0083] In specific configuration, the mounting component 5 can be located above the aforementioned clearance space 6c or inside the aforementioned clearance space 6c. The configuration can be determined according to the structure of the nozzle 1, and this application does not impose any restrictions on this.

[0084] In the embodiments provided in this application, such as Figure 2 , Figure 3 and Figure 6 As shown, the heating element 6 includes at least one heating element body 61 and a plurality of heating strips 62. The heating element body 61 is partially or completely annular. The plurality of heating strips 62 are disposed on the inner circumferential surface of the heating element body 61 and extend radially along the heating element body 61. A clearance space 6c is formed between the end faces of the plurality of heating strips 62. The mounting element 5 is at least partially located above the clearance space 6c. The mounting element 5 is connected to the end face of at least one heating strip 62. In this way, the mounting element 5 is relatively far away from the medium window 3 and will not contact the medium window 3, so that no friction will occur between the two during installation, thereby preventing the generation of particles. Moreover, the mounting element 5 can be connected to the heating element 6 only by screws. The heating element 6 can be placed only on the top surface of the medium window 3. That is, there is no direct connection between the mounting element 5 and the medium window 3, or between the heating element 6 and the medium window 3, so that the medium window 3 is not easily damaged when the screws are tightened to fix the mounting element 5.

[0085] There may be one heating element body 61, which is in the shape of a complete ring. In this case, three or more connecting parts 7 can be evenly spaced along the circumference of the heating element body 61 to achieve precise positioning of the heating element 6.

[0086] Of course, the heating element body 61 can also be as follows Figure 3 As shown, there are two or more heating elements arranged in a partially annular shape. In this case, the heating element 6 is divided into two parts, each part including a heating element body 61 and several heating strips 62 extending radially inward from the inner circumferential surface of the heating element body 61. At this time, three or more connecting elements 7 can be evenly spaced along the circumference of each heating element body 61 to achieve precise positioning of each heating element body 61. Furthermore, the second positioning hole 6a for positioning and connecting with the connecting element 7 can be located at the edge of the heating element body 61, and the fourth threaded hole 6d for screw connection with the mounting element 5 and the third positioning hole 6b for positioning and connecting with the mounting element 5 can be located at the end of the heating strips 62. The fourth threaded hole 6d can be provided on some of the heating strips 62, and these fourth threaded holes 6d can be symmetrically arranged. The third positioning holes 6b can also be provided on other heating strips 62, and these third positioning holes 6b can also be symmetrically arranged. Thus, precise positioning and stable installation of the mounting element 5 can be achieved.

[0087] In actual setup, the structural form of mounting component 5 is not limited.

[0088] like Figure 1 As shown, the mounting component 5 can be plate-shaped and circular. This not only simplifies the structure of the mounting component 5 and makes it easy to manufacture, but also makes it easier to ensure the centering of the mounting component 5 after the nozzle 1 is installed. In this case, each third positioning component and each third threaded hole 5b can be arranged at the edge of the mounting component 5 and can be spaced apart along the circumference of the mounting component 5.

[0089] In actual installation, the mounting part 5 can directly abut against the nozzle 1 or indirectly abut against the nozzle 1, depending on whether the nozzle 1 is equipped with an air intake structure.

[0090] In the embodiments provided in this application, such as Figure 1 and Figure 4 As shown, the nozzle 1 has an air inlet block 4 at its top; the air inlet block 4 has a third mating part 4a and a third abutting part 4b, the second abutting part 5a and the third mating part 4a abut against each other, and the third abutting part 4b and the second mating part 1b abut against each other. In this way, the mounting member 5 achieves indirect contact with the nozzle 1 by abutting against the air inlet block 4.

[0091] It is not difficult to understand that the aforementioned clearance space 6c formed by the heating element 6 can cleverly avoid the air intake block 4, that is, the air intake block 4 can be at least partially located within the clearance space 6c, such as... Figure 5As shown, the nozzle 1 can be provided with at least one jet channel 1e, the air intake block 4 can be provided with at least one air intake channel 4e, the air intake block 4 can be connected to at least one air intake pipe 8, the air intake pipe 8 can be connected to the air intake channel 4e, the air intake channel 4e can be connected to the jet channel 1e, air can be introduced from an external air source to the air intake block 4 through the air intake pipe 8, and air can be introduced to the nozzle 1 through the air intake block 4.

[0092] Specifically, such as Figure 2 and Figure 5 As shown, the mounting component 5 can be provided with a clearance hole 5d for the air intake pipe 8 to pass through. The form of the clearance hole 5d is not limited; for example, it can be an opening facing one side as shown in the figure.

[0093] In specific configurations, the structural forms of the second mating part 1b of the nozzle 1, the second abutting part 5a of the mounting part 5, and the third mating part 4a and the third abutting part 4b of the air intake block 4 are not limited.

[0094] In the embodiments provided in this application, such as Figure 1 and Figure 5 As shown, the bottom surface of the mounting component 5 forms a second abutment portion 5a, the top surface of the air intake block 4 forms a third mating portion 4a, the bottom surface of the air intake block 4 forms a third abutment portion 4b, and the top surface of the nozzle 1 forms a second mating portion 1b.

[0095] Thus, the mounting component 5 abuts against the air intake block 4 from top to bottom, and the air intake block 4 abuts against the nozzle 1 from top to bottom, thereby pressing the nozzle 1 tightly against the first mounting hole 3a of the medium window 3. This is more conducive to ensuring the centering of the nozzle 1 during installation. Moreover, the surface contact between the mounting component 5 and the air intake block 4, as well as between the air intake block 4 and the nozzle 1, reduces wear during contact, making the nozzle 1 less prone to breakage after installation.

[0096] Please combine Figure 4 Understood, in this embodiment of the application, the mounting component 5 is provided with a fourth positioning component 51, and the air intake block 4 is provided with a fourth positioning hole 4c. The fourth positioning component 51 is inserted into the fourth positioning hole 4c. By cooperating with the side wall portion corresponding to the fourth positioning component 51 and the fourth positioning hole 4c, the positioning accuracy between the mounting component 5 and the air intake block 4 can be relatively guaranteed.

[0097] In this embodiment, the air intake block 4 is provided with a fifth positioning member 41, and the nozzle 1 is provided with a fifth positioning hole 1c. The fifth positioning member 41 is inserted into the fifth positioning hole 1c. By cooperating with the side wall portion corresponding to the fifth positioning member 41 and the fifth positioning hole 1c, the positioning accuracy between the air intake block 4 and the nozzle 1 can be relatively guaranteed.

[0098] As set up above, with the top cover 2 centering the mounting component 5 through the connector 7 and the heating component 6, the fourth positioning component 51 and the fifth positioning component 41 are positioned layer by layer from top to bottom, making the clamping force of the mounting component 5 on the nozzle 1 more uniform and more centered, which can further ensure the centering of the nozzle 1 installation.

[0099] It is easy to understand that the air intake block 4 and the nozzle 1 can also be fixed with screws to ensure the stability of their connection. In this case, a groove can be provided on the bottom surface of the mounting part 5 to avoid the screw head.

[0100] Furthermore, in this embodiment, as Figure 2 and Figure 4 As shown, the bottom surface of the mounting component 5 is provided with at least one guide member 52. The guide member 52 extends circumferentially along the mounting component 5, and the inner circumferential surface 5c of the guide member 52 fits against the outer circumferential surface 4d of the air intake block 4. In use, the inner circumferential surface 5c of the guide member 52 can provide guidance for the installation of the mounting component 5 on the air intake block 4 and can play a certain positioning role to improve the installation accuracy.

[0101] It is worth noting that the specific locations of the aforementioned positioning components and positioning holes are not limited, such as Figure 1 and Figure 6 As shown, in this embodiment, the first positioning member 71 and the second positioning member 72 can be specifically disposed on the bottom surface of the connector 7, the first positioning hole 2a can be specifically disposed on the top surface of the top cover 2, the second positioning hole 6a and the third positioning hole 6b can be specifically disposed on the top surface of the heating member 6, the third positioning member and the fourth positioning member 51 can be specifically disposed on the bottom surface of the mounting member 5 and can be located inside the guide member 52, the fourth positioning hole 4c can be specifically disposed on the top surface of the air intake block 4, the fifth positioning member 41 can be specifically disposed on the bottom surface of the air intake block 4, and the fifth positioning hole 1c can be specifically disposed on the top surface of the nozzle 1.

[0102] Furthermore, the specific structure of each positioning component is not limited. For example, it can be a protrusion formed by the corresponding component extending upward or downward on the corresponding surface, or it can be a positioning pin set on the corresponding surface of the corresponding component.

[0103] In actual installation, the installation form of nozzle 1 on medium window 3 is not limited, that is, the structural form of the first abutting part 1a of nozzle 1 and the first mating part 3b of medium window 3 is not limited.

[0104] like Figure 1 , Figure 2 and Figure 5As shown, in the embodiment provided in this application, the first mounting hole 3a includes a first stepped hole 3a1 and a first inner hole 3a2. The first stepped hole 3a1 has an upward-facing first stepped surface, which forms a first mating part 3b. The outer peripheral wall of the nozzle 1 is provided with a step 1d, which has a downward-facing second stepped surface, forming a first abutting part 1a. In this way, the first stepped surface of the medium window 3 can position the nozzle 1 for installation, which can relatively ensure the installation accuracy of the nozzle 1 on the medium window 3 and is conducive to further improving the centering of the nozzle 1 after installation.

[0105] In this embodiment, it can be as follows: Figure 5 As shown, a sealing groove 1f is provided on the outer peripheral wall of the nozzle 1, and a sealing ring (not shown in the figure) can be provided in the sealing groove 1f to seal the space between the outer peripheral wall of the nozzle 1 and the inner peripheral wall corresponding to the first mounting hole 3a, so as to ensure the airtightness of the nozzle 1.

[0106] Furthermore, the method of mounting the medium window 3 on the top cover 2 is not limited; for example, such as... Figure 1 and Figure 5 As shown, the top cover 2 may have a fourth mating part 2c, and the medium window 3 may have a fourth abutting part 3c. The fourth abutting part 3c can abut against the fourth mating part 2c to position the top cover 2 on the medium window 3. Specifically, a second mounting hole 2d may be provided in the middle of the top cover 2. The second mounting hole 2d may include a second stepped hole 2d1 and a second inner hole 2d2. The second stepped hole 2d1 has an upward-facing third stepped surface, which forms the aforementioned fourth mating part 2c. The bottom surface of the medium window 3 may form the aforementioned fourth abutting part 3c. In this way, the third stepped surface can be used to position the medium window 3 on the top cover 2, ensuring the installation accuracy of the medium window 3. In addition, by linking and fixing the nozzle 1 with the mounting part 5, the heating element 6 on the medium window 3, and the top cover 2, the centering of the nozzle 1 after installation can be ensured, so that even if the air inlet pipe 8 connected to the nozzle 1 is pulled, the nozzle 1 is not easily displaced.

[0107] The working principle of the nozzle mounting device provided in the above embodiments of this application is explained below with reference to the accompanying drawings:

[0108] When in use, the nozzle 1 can be vertically inserted into the first mounting hole 3a of the medium window 3;

[0109] Then, the heating element 6 can be placed above the medium window 3;

[0110] Subsequently, the first positioning member 71 of each connector 7 can be inserted into the corresponding first positioning hole 2a on the top cover 2, and the second positioning member 72 can be inserted into the corresponding second positioning hole 6a on the heating element 6. By fixing the connector 7 and the top cover 2 with screws, the heating element 6 can be completely fixed on the top cover 2.

[0111] Next, the fifth positioning member 41 in the air intake block 4 can be inserted into the corresponding fifth positioning hole 1c on the nozzle 1, and the air intake block 4 and the nozzle 1 can be fixedly connected with screws;

[0112] Finally, under the guidance of the guide 52 on the mounting part 5, the mounting part 5 is installed downward on the top of the air intake block 4, so that the fourth positioning part 51 of the mounting part 5 is inserted into the corresponding fourth positioning hole 4c on the air intake block 4, realizing the centering installation of the mounting part 5 and the air intake block 4, and the third positioning part of the mounting part 5 is inserted into the third positioning hole 6b of the heating element 6, and the mounting part 5 and the heating element 6 are connected by screws. At this time, the nozzle 1 is fixedly connected to the heating element 6 through the mounting part 5 above the air intake block 4, and the heating element 6 is fixedly connected to the top cover 2 through the connector 7, realizing the linkage locking of the nozzle 1 and the top cover 2, so that the position of the nozzle 1 is completely fixed and rigidly fixed, especially the nozzle 1 is fixed in the radial direction, so that the nozzle 1 will not be offset due to the pulling of the air intake pipe 8, thus making the nozzle 1 have a high centering after installation, which can ensure the stability of the semiconductor etching process.

[0113] During the installation process described above, since the mounting component 5 does not directly contact the medium window 3, and the screws used for installing the mounting component 5 are only directly installed on the heating element 6 and do not contact the medium window 3, the mounting component 5 will not rub against the medium window 3, thus preventing the generation of particles. This can relatively ensure the stability of product quality. Moreover, the installation process of the mounting component 5 is less likely to damage the medium window 3, giving the medium window 3 a longer service life. It is also less likely to cause the nozzle 1 to break, thus preventing leakage and relatively ensuring the smooth progress of the semiconductor etching process.

[0114] In the embodiments provided in this application, a semiconductor etching apparatus is also provided, including a top cover 2, a dielectric window 3, and a nozzle mounting device as described in all the above embodiments. Because the semiconductor etching apparatus provided in this application has the nozzle mounting device as described in all the above embodiments, it possesses all the beneficial effects of the nozzle mounting device as described in all the above embodiments, which will not be elaborated upon here.

[0115] This document uses specific examples to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are only for the purpose of helping to understand the apparatus and core ideas of this application. It should be noted that those skilled in the art can make several improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

Claims

1. A nozzle mounting device for mounting a nozzle (1) to a medium window (3), said medium window (3) being disposed on the top cover (2) of a chamber, characterized in that, The nozzle mounting device includes a mounting component (5); The medium window (3) has a first mating part (3b) and a first mounting hole (3a) that extends through the axial direction; the nozzle (1) has a first abutting part (1a) and a second mating part (1b); and the mounting member (5) has a second abutting part (5a). The mounting member (5) is connected to the top cover (2), the second abutment (5a) and the second mating part (1b) abut against each other, and the first mating part (3b) and the first abutment (1a) abut against each other, so as to limit the nozzle (1) at least partially to the first mounting hole (3a).

2. The nozzle mounting device according to claim 1, characterized in that, The top surface of the medium window (3) is provided with a heating element (6); The heating element (6) is connected to the top cover (2), and the mounting element (5) is connected to the heating element (6).

3. The nozzle mounting device according to claim 2, characterized in that, The nozzle mounting device also includes several connectors (7). One end of the connector (7) is connected to the top cover (2), and the other end of the connector (7) is connected to the heating element (6).

4. The nozzle mounting device according to claim 3, characterized in that, There are multiple connectors (7), and the multiple connectors (7) are evenly spaced along the circumference of the medium window (3); and / or, Of the connector (7) and the top cover (2), one is provided with a first positioning member (71), and the other is provided with a first positioning hole (2a), wherein the first positioning member (71) is inserted into the first positioning hole (2a); and / or, Of the connector (7) and the heating element (6), one is provided with a second positioning element (72), and the other is provided with a second positioning hole (6a), wherein the second positioning element (72) is inserted into the second positioning hole (6a); and / or, The connector (7) and the top cover (2) are connected by screws.

5. The nozzle mounting device according to claim 2, characterized in that, Of the mounting component (5) and the heating component (6), one is provided with a third positioning component, and the other is provided with a third positioning hole (6b), wherein the third positioning component is inserted into the third positioning hole (6b); and / or, The mounting component (5) and the heating component (6) are connected by screws.

6. The nozzle mounting device according to claim 2, characterized in that, The heating element (6) includes at least one heating element body (61) and a plurality of heating bars (62). The heating element body (61) is partially or completely annular, and a plurality of heating strips (62) are disposed on the inner circumferential surface of the heating element body (61) and extend radially along the heating element body (61). A clearance space (6c) is formed between the end faces of the plurality of heating strips (62). The mounting member (5) is at least partially located above the clearance space (6c). The mounting member (5) is connected to the end face of at least one of the heating strips (62).

7. The nozzle mounting device according to any one of claims 1 to 6, characterized in that, The nozzle (1) is provided with an air inlet block (4) at the top. The air intake block (4) has a third mating part (4a) and a third abutting part (4b), the second abutting part (5a) and the third mating part (4a) abut against each other, and the third abutting part (4b) and the second mating part (1b) abut against each other.

8. The nozzle mounting device according to claim 7, characterized in that, The bottom surface of the mounting component (5) forms the second abutment portion (5a), the top surface of the air intake block (4) forms the third mating portion (4a), the bottom surface of the air intake block (4) forms the third abutment portion (4b), and the top surface of the nozzle (1) forms the second mating portion (1b); and / or, Of the mounting component (5) and the air intake block (4), one is provided with a fourth positioning component (51), and the other is provided with a fourth positioning hole (4c), wherein the fourth positioning component (51) is inserted into the fourth positioning hole (4c); and / or, Of the air intake block (4) and the nozzle (1), one is provided with a fifth positioning element (41), and the other is provided with a fifth positioning hole (1c), wherein the fifth positioning element (41) is inserted into the fifth positioning hole (1c); and / or, The bottom surface of the mounting component (5) is provided with at least one guide (52), the guide (52) extends circumferentially along the mounting component (5), and the inner circumferential surface (5c) of the guide (52) and the outer circumferential surface (4d) of the air intake block (4) are in contact.

9. The nozzle mounting device according to any one of claims 1 to 6, characterized in that, The first mounting hole (3a) includes a first stepped hole (3a1) and a first inner hole (3a2). The first stepped hole (3a1) has an upward-facing first stepped surface, which forms the first mating part (3b). The outer peripheral wall of the nozzle (1) is provided with a step (1d), which has a downward-facing second stepped surface, which forms the first abutting part (1a).

10. A semiconductor etching apparatus, characterized in that, It includes the top cover (2), the medium window (3), and the nozzle mounting device according to any one of claims 1 to 9.

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