Fixing tool for semiconductor gluing machine

Abstract

The utility model relates to a fixing tool for a semiconductor gluing machine, which relates to the technical field of semiconductor gluing and comprises a base, a transverse lower seat is detachably arranged at the top of the base, a transverse upper seat is slidably arranged at the top of the transverse lower seat, and a longitudinal lower seat is detachably arranged at the top of the transverse upper seat. A longitudinal upper seat is slidably arranged at the top of the longitudinal lower seat, a top seat is detachably arranged at the top of the longitudinal upper seat, a longitudinal clamping groove is formed in the top of the top seat, a forward lead screw and a reverse lead screw are rotatably arranged in the longitudinal clamping groove, and the opposite faces of the forward lead screw and the reverse lead screw are fixedly connected. The forward screw rod and the reverse screw rod are both in threaded connection with clamping longitudinal blocks, the clamping longitudinal blocks are arranged in the clamping longitudinal grooves in a sliding mode, clamping longitudinal pieces are fixedly arranged on the tops of the clamping longitudinal blocks, and the clamping longitudinal pieces are oppositely arranged. The semiconductor gluing device has the effect of improving the semiconductor gluing accuracy.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor coating technology, and in particular to a fixed fixture for a semiconductor coating machine. Background Technology

[0002] With the development of production and technology in the semiconductor industry, the requirements for automation of production equipment are getting higher and higher. At present, semiconductor coating is an indispensable link in the semiconductor industry. In recent years, with the continuous research of technicians, coating machines have been widely used in the semiconductor industry.

[0003] A related technology, Chinese Patent No. CN221157405U, discloses a semiconductor adhesive coating mechanism, which includes a worktable, a guide rod above the worktable, a first threaded sleeve slidably mounted on the guide rod, a dispensing nozzle mounted on the first threaded sleeve, the dispensing nozzle facing the worktable, a flexible tube connected to the dispensing nozzle, and a mixing chamber connected to the flexible tube. Adhesive is stored in the mixing chamber. When it is necessary to coat the semiconductor, a tray containing the semiconductor is placed on the worktable, the dispensing nozzle moves along the guide rod to a designated position, the adhesive in the mixing chamber enters the dispensing nozzle along the flexible tube, and the dispensing nozzle sprays the adhesive onto the semiconductor.

[0004] In the process of developing this application, the inventors discovered that the technology has at least the following problems: when the tray containing the semiconductor is placed on the workbench, the tray is prone to displacement during the process of applying adhesive from the dispensing nozzle to the semiconductor nozzle, resulting in uneven or misaligned distribution of adhesive on the semiconductor, which reduces the accuracy of semiconductor coating. Utility Model Content

[0005] To improve the accuracy of semiconductor coating, this application provides a fixed fixture for a semiconductor coating machine.

[0006] This application provides a fixed fixture for a semiconductor coating machine, which adopts the following technical solution:

[0007] A fixture for a semiconductor coating machine includes a base, a detachable lower transverse seat on the top of the base, a slidably mounted upper transverse seat on the top of the lower transverse seat, a detachable lower longitudinal seat on the top of the upper transverse seat, a slidably mounted upper longitudinal seat on the top of the lower longitudinal seat, and a detachable top seat on the top of the upper longitudinal seat. A clamping groove is formed on the top of the top seat. A forward lead screw and a reverse lead screw are rotatably mounted within the clamping groove. The opposing surfaces of the forward and reverse lead screws are fixedly connected. Clamping blocks are threaded onto both the forward and reverse lead screws. The clamping blocks are slidably mounted within the clamping groove. A clamping plate is fixedly mounted on the top of each clamping block, and the clamping plates are arranged opposite each other.

[0008] By adopting the above technical solution, the top seat is installed below the dispensing nozzle, and the semiconductor tray is placed in the gap between the clamping longitudinal plates. The forward and reverse screws are rotated synchronously, causing the clamping longitudinal blocks to move synchronously towards the semiconductor tray. When the clamping longitudinal blocks move the clamping longitudinal plates to press the semiconductor tray against them, the semiconductor tray is fixed on the top seat, making it less likely for the tray to shift. This reduces uneven or misaligned distribution of adhesive on the semiconductor, improving the accuracy of semiconductor coating. After the semiconductor tray is fixed on the top seat, when it is necessary to move the semiconductor tray and the dispensing nozzle laterally, the lower and upper lateral seats are moved relative to each other. When it is necessary to move the semiconductor tray and the dispensing nozzle longitudinally, the lower and upper longitudinal seats are moved relative to each other. This improves the flexibility of the fixing fixture and makes the top seat compatible with various models of dispensing machines.

[0009] Preferably, a set of clamping transverse grooves is formed on the top of the top seat. The clamping transverse grooves are symmetrically arranged on both sides of the clamping longitudinal groove. The clamping transverse grooves are perpendicular to each other. A clamping transverse block is slidably arranged in the clamping transverse groove. A transverse spring is fixedly arranged between the clamping transverse block and the inner wall of the clamping transverse groove. A clamping transverse piece is fixedly arranged on the top of the clamping transverse block. The clamping transverse pieces are arranged opposite to each other.

[0010] By adopting the above technical solution, the semiconductor is placed in the gap between the clamping horizontal piece and the clamping vertical piece. The horizontal spring applies a force to the clamping horizontal piece, causing the clamping horizontal piece to abut against the semiconductor tray, thereby quickly positioning the semiconductor tray.

[0011] Preferably, a longitudinal groove is formed at the top of the longitudinal lower seat, a longitudinal block is slidably arranged in the longitudinal groove, the longitudinal block is fixedly connected to the longitudinal upper seat, a longitudinal screw is rotatably arranged in the longitudinal groove, the longitudinal screw is threadedly connected to the longitudinal block, a longitudinal motor is fixedly arranged in the longitudinal groove, and one end of the longitudinal screw is fixedly connected to the output shaft of the longitudinal motor.

[0012] By adopting the above technical solution, the longitudinal motor starts and drives the longitudinal screw to rotate. The rotation of the longitudinal screw drives the longitudinal block to move along the longitudinal groove, thereby the longitudinal block drives the longitudinal upper seat to move, achieving the effect of relative movement between the longitudinal lower seat and the longitudinal upper seat.

[0013] Preferably, a transverse groove is formed at the top of the transverse lower seat, a transverse block is slidably arranged in the transverse groove, the transverse block is fixedly connected to the transverse upper seat, a transverse screw is rotatably arranged in the transverse groove, the transverse screw is threadedly connected to the transverse block, a transverse motor is fixedly arranged in the transverse groove, and one end of the transverse screw is fixedly connected to the output shaft of the transverse motor.

[0014] By adopting the above technical solution, the horizontal motor starts and drives the horizontal screw to rotate. The rotation of the horizontal screw drives the horizontal block to move along the horizontal groove, thereby the horizontal block drives the horizontal upper seat to move, achieving the effect of relative movement between the horizontal lower seat and the horizontal upper seat.

[0015] Preferably, a plurality of first positioning holes are formed through the top seat, and a first positioning bolt is inserted into the first positioning hole. A plurality of first positioning grooves are formed on the top of the base, the top of the transverse upper seat, and the top of the longitudinal upper seat. The first positioning grooves are used for threaded connection with the first positioning bolts.

[0016] By adopting the above technical solution, when the first positioning bolt passes through the first positioning hole and is threadedly connected to the first positioning groove on the base, the top seat is installed on the base. At this time, the top seat is not easy to move relative to the base. When the first positioning bolt passes through the first positioning hole and is threadedly connected to the first positioning groove on the transverse upper seat, the top seat is installed on the transverse upper seat. At this time, the top seat and the transverse lower seat can move relative to each other laterally. When the first positioning bolt passes through the first positioning hole and is threadedly connected to the first positioning groove on the longitudinal upper seat, the top seat is installed on the longitudinal upper seat. At this time, the top seat and the longitudinal lower seat can move relative to each other longitudinally. This makes it convenient to use the top seat, base, transverse upper seat and longitudinal upper seat in combination according to the actual site conditions.

[0017] Preferably, a plurality of second positioning holes are formed through the longitudinal lower seat, and a second positioning bolt is inserted into the second positioning hole. A plurality of second positioning grooves are formed on the top of the base and the top of the transverse upper seat, and the second positioning grooves are used for threaded connection with the second positioning bolts.

[0018] By adopting the above technical solution, when the second positioning bolt passes through the second positioning hole and is threadedly connected to the second positioning groove on the base, the longitudinal lower seat is installed on the base. At this time, the longitudinal lower seat is not easy to move relative to the base. When the second positioning bolt passes through the second positioning hole and is threadedly connected to the second positioning groove on the transverse upper seat, the longitudinal lower seat is installed on the transverse upper seat. At this time, the longitudinal lower seat and the transverse lower seat can move relative to each other in the transverse direction. This makes it convenient to use the longitudinal upper seat, the base, and the transverse upper seat together according to the actual site conditions.

[0019] Preferably, a plurality of third positioning holes are formed through the transverse lower base, and third positioning bolts are inserted into the third positioning holes. A plurality of third positioning grooves are formed on the top of the base, and the third positioning grooves are used for threaded connection with the third positioning bolts.

[0020] By adopting the above technical solution, when the third positioning bolt passes through the third positioning hole and is threadedly connected to the third positioning groove on the base, the horizontal lower seat is fixedly installed on the base.

[0021] Preferably, the base, the horizontal lower seat, the vertical lower seat, and the top seat sidewalls are all fixedly provided with a number of mounting seats, and mounting holes are opened on the mounting seats, and mounting bolts are inserted into the mounting holes.

[0022] By adopting the above technical solution, when the mounting bolt passes through the mounting hole and is threaded into the mounting groove on the mounting surface, the mounting seat is installed on the mounting surface, thereby achieving the effect of fixing the base, the horizontal lower seat, the vertical lower seat and the top seat on the mounting surface.

[0023] In summary, this application includes at least one of the following beneficial technical effects:

[0024] 1. By setting up a base, a horizontal lower seat, a horizontal upper seat, a vertical lower seat, a vertical upper seat, a top seat, a clamping groove, a forward lead screw, a reverse lead screw, a clamping vertical block, and a clamping vertical piece, the tray is less likely to shift, reducing uneven or misaligned distribution of adhesive on the semiconductor and improving the accuracy of semiconductor adhesive coating.

[0025] 2. By setting longitudinal slots, longitudinal blocks, longitudinal screws, and longitudinal motors, the effect of relative movement between the lower longitudinal seat and the upper longitudinal seat is achieved;

[0026] 3. By setting up a transverse groove, transverse block, transverse screw and transverse motor, the effect of relative movement between the transverse lower seat and the transverse upper seat can be achieved. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of a fixed fixture structure for a semiconductor coating machine according to an embodiment of this application.

[0028] Figure 2 This is a cross-sectional view of a fixture for a semiconductor coating machine according to an embodiment of this application.

[0029] Figure 3 This is a cross-sectional view illustrating the connection relationship between the clamping crossbar and the top seat in the embodiments of this application.

[0030] Figure 4 This is a cross-sectional view illustrating the connection relationship between the longitudinal lower seat and the longitudinal upper seat in the embodiments of this application.

[0031] Figure 5 This is a cross-sectional view illustrating the connection relationship between the horizontal lower seat and the horizontal upper seat in the embodiments of this application.

[0032] Figure 6 This is a cross-sectional view illustrating the connection between the base and the mounting bracket in the embodiments of this application.

[0033] Explanation of reference numerals in the attached drawings: 1. Base; 11. Top seat; 2. Clamping horizontal piece; 21. Clamping horizontal groove; 22. Clamping horizontal block; 23. Horizontal spring; 3. Clamping vertical piece; 31. Clamping vertical groove; 32. Clamping vertical block; 33. Forward lead screw; 34. Reverse lead screw; 4. Horizontal motor; 41. Horizontal lower seat; 42. Horizontal upper seat; 43. Horizontal groove; 44. Horizontal block; 45. Horizontal screw; 5. Longitudinal motor; 51. Longitudinal lower seat; 52. Longitudinal upper seat; 53. Longitudinal groove; 54. Longitudinal block; 55. Longitudinal screw; 6. First positioning bolt; 61. First positioning hole; 62. First positioning groove; 7. Second positioning bolt; 71. Second positioning hole; 72. Second positioning groove; 8. Third positioning bolt; 81. Third positioning hole; 82. Third positioning groove; 9. Mounting bolt; 91. Mounting seat; 92. Mounting hole. Detailed Implementation

[0034] The following is in conjunction with the appendix Figure 1-6 This application will be described in further detail.

[0035] This application discloses a fixture for a semiconductor coating machine. (Refer to...) Figures 1 to 6 The fixture includes a base 1, a horizontal lower seat 41 mounted on top of the base 1, which is detachably connected to the base 1. A horizontal upper seat 42 is slidably mounted on top of the horizontal lower seat 41. A vertical lower seat 51 is mounted on top of the horizontal upper seat 42, which is detachably connected to the horizontal upper seat 42. A vertical upper seat 52 is slidably mounted on top of the vertical lower seat 51. A top seat 11 is mounted on top of the vertical upper seat 52, which is detachably connected to the vertical upper seat 52. Because the base 1, horizontal lower seat 41, horizontal upper seat 42, vertical lower seat 51, vertical upper seat 52, and top seat 11 are designed to be separate and detachable, they can be flexibly combined and used, thereby improving the applicability of the fixture and making it suitable for various models of glue applicators.

[0036] Reference Figures 1 to 6A plurality of first positioning holes 61 are formed through the top seat 11, and a first positioning bolt 6 is fitted into each of the first positioning holes 61. A plurality of first positioning grooves 62 are formed on the top of the base 1, the top of the transverse upper seat 42, and the top of the longitudinal upper seat 52, and the first positioning grooves 62 are used for threaded connection with the first positioning bolts 6. When the first positioning bolt 6 passes through the first positioning hole 61 and is threadedly connected to the first positioning groove 62 on the base 1, the top seat 11 is mounted on the base 1, and the top seat 11 is not easily moved relative to the base 1. When the first positioning bolt 6 passes through the first positioning hole 61 and is threadedly connected to the first positioning groove 62 on the transverse upper seat 42, the top seat 11 is mounted on the transverse upper seat 42, and the top seat 11 and the transverse lower seat 41 can move laterally relative to each other. When the first positioning bolt 6 passes through the first positioning hole 61 and is threadedly connected to the first positioning groove 62 on the longitudinal upper seat 52, the top seat 11 is mounted on the longitudinal upper seat 52, and the top seat 11 and the longitudinal lower seat 51 can move longitudinally relative to each other.

[0037] Reference Figures 1 to 6 A plurality of second positioning holes 71 are formed through the longitudinal lower seat 51, and second positioning bolts 7 are fitted into the second positioning holes 71. A plurality of second positioning grooves 72 are formed on the top of the base 1 and the top of the transverse upper seat 42, and the second positioning grooves 72 are used for threaded connection with the second positioning bolts 7. When the second positioning bolts 7 pass through the second positioning holes 71 and are threadedly connected to the second positioning grooves 72 on the base 1, the longitudinal lower seat 51 is mounted on the base 1, and at this time the longitudinal lower seat 51 is not easily moved relative to the base 1. When the second positioning bolts 7 pass through the second positioning holes 71 and are threadedly connected to the second positioning grooves 72 on the transverse upper seat 42, the longitudinal lower seat 51 is mounted on the transverse upper seat 42, and at this time the longitudinal lower seat 51 and the transverse lower seat 42 can move laterally relative to each other.

[0038] Reference Figures 1 to 6 A plurality of third positioning holes 81 are formed through the transverse lower seat 41, and a third positioning bolt 8 is fitted in the third positioning hole 81. A plurality of third positioning grooves 82 are formed on the top of the base 1, and the third positioning grooves 82 are used for threaded connection with the third positioning bolts 8. When the third positioning bolts 8 pass through the third positioning holes 81 and are threadedly connected to the third positioning grooves 82 on the base 1, the transverse lower seat 41 is fixedly installed on the base 1.

[0039] Reference Figures 1 to 6 Several mounting seats 91 are welded to the side walls of the base 1, the horizontal lower seat 41, the vertical lower seat 51, and the top seat 11. Mounting holes 92 are formed on the mounting seats 91, and mounting bolts 9 are installed in the mounting holes 92. When the mounting bolts 9 pass through the mounting holes 92 and are threaded into the mounting grooves on the mounting surface, the mounting seats 91 are installed on the mounting surface, thereby achieving the effect of fixing the base 1, the horizontal lower seat 41, the vertical lower seat 51, and the top seat 11 to the mounting surface as needed.

[0040] To prevent the pallet from shifting, refer to Figures 1 to 3 The top seat 11 has a clamping longitudinal groove 31 and a set of clamping transverse grooves 21 on its top. The clamping transverse grooves 21 are symmetrically arranged on both sides of the clamping longitudinal groove 31 and are perpendicular to each other. A forward lead screw 33 and a reverse lead screw 34 rotate within the clamping longitudinal groove 31. The forward lead screw 33 and the reverse lead screw 34 are coaxially aligned and welded to their opposite faces. Clamping longitudinal blocks 32 are threadedly connected to both the forward lead screw 33 and the reverse lead screw 34, and the clamping longitudinal blocks 32 are slidably disposed within the clamping longitudinal groove 31. A clamping longitudinal piece 3 is fixedly mounted on the top of the clamping longitudinal block 32, and the clamping longitudinal pieces 3 are arranged opposite each other. A clamping transverse block 22 slides within the clamping transverse groove 21, and a transverse spring 23 is installed between the clamping transverse block 22 and the inner wall of the clamping transverse groove 21. A clamping transverse piece 2 is mounted on the top of the clamping transverse block 22, and the clamping transverse piece 2 is arranged opposite each other. The top seat 11 is installed below the dispensing nozzle, and the semiconductor tray is placed in the gap between the clamping horizontal piece 2 and the clamping vertical piece 3. The horizontal spring 23 applies force to the clamping horizontal block 22, causing the clamping horizontal piece 2 to abut against the semiconductor tray, thereby quickly positioning the semiconductor tray. Then, the forward screw 33 and the reverse screw 34 are rotated synchronously, causing the clamping vertical block 32 to move synchronously towards the semiconductor tray. When the clamping vertical block 32 moves the clamping vertical piece 3 to press against the semiconductor tray, the semiconductor tray is fixed on the top seat 11. This prevents the tray from shifting, reduces uneven or misaligned glue distribution on the semiconductor, and improves the accuracy of semiconductor glue application.

[0041] To enable longitudinal movement between the semiconductor tray and the dispensing nozzle, refer to... Figure 2 and Figure 4 A longitudinal groove 53 is formed at the top of the lower longitudinal seat 51. A longitudinal block 54 is slidably disposed within the longitudinal groove 53 and welded to the upper longitudinal seat 52. A longitudinal screw 55 is rotatably disposed within the longitudinal groove 53 and threadedly connected to the longitudinal block 54. A longitudinal motor 5 is installed within the longitudinal groove 53, and one end of the longitudinal screw 55 is welded to the output shaft of the longitudinal motor 5. When the semiconductor tray is fixed on the top seat 11, and longitudinal movement between the semiconductor tray and the dispensing nozzle is required, the longitudinal motor 5 is activated. The activation of the longitudinal motor 5 drives the longitudinal screw 55 to rotate, which in turn drives the longitudinal block 54 to move along the longitudinal groove 53. This causes the longitudinal block 54 to move the upper longitudinal seat 52, resulting in relative movement between the lower longitudinal seat 51 and the upper longitudinal seat 52. Consequently, the upper longitudinal seat 52 drives the top seat 11 to move.

[0042] To enable lateral movement between the semiconductor tray and the dispensing nozzle, refer to... Figure 2 and Figure 5A transverse groove 43 is formed at the top of the lower transverse seat 41. A transverse block 44 is slidably disposed within the transverse groove 43 and welded to the upper transverse seat 42. A transverse screw 45 is rotatably disposed within the transverse groove 43 and threadedly connected to the transverse block 44. A transverse motor 4 is installed within the transverse groove 43, and one end of the transverse screw 45 is welded to the output shaft of the transverse motor 4. When the semiconductor tray is fixed on the top seat 11, and lateral movement between the semiconductor tray and the dispensing nozzle is required, the transverse motor 4 is activated. The activation of the transverse motor 4 drives the transverse screw 45 to rotate, which in turn drives the transverse block 44 to move along the transverse groove 43. This movement of the transverse block 44 then moves the upper transverse seat 42, causing relative movement between the lower transverse seat 41 and the upper transverse seat 42. Consequently, the upper transverse seat 42 moves the top seat 11.

[0043] The implementation principle of a fixing fixture for a semiconductor coating machine according to an embodiment of this application is as follows: A top seat 11 is installed below the dispensing nozzle, and a semiconductor tray is placed in the gap between the clamping horizontal piece 2 and the clamping vertical piece 3. A horizontal spring 23 applies force to the clamping horizontal piece 22, causing the clamping horizontal piece 2 to abut against the semiconductor tray, thereby quickly positioning the semiconductor tray. Then, the forward lead screw 33 and the reverse lead screw 34 are rotated synchronously, causing the clamping vertical piece 32 to move synchronously towards the semiconductor tray. When the clamping vertical piece 32 moves the clamping vertical piece 3 to press against the semiconductor tray, the semiconductor tray is fixed to the top seat 11. This prevents the tray from shifting, reduces uneven or misaligned adhesive distribution on the semiconductor, and improves the accuracy of semiconductor coating. Because the base 1, the horizontal lower seat 41, the horizontal upper seat 42, the vertical lower seat 51, the vertical upper seat 52 and the top seat 11 are separated and detachable, the base 1, the horizontal lower seat 41, the horizontal upper seat 42, the vertical lower seat 51, the vertical upper seat 52 and the top seat 11 can be flexibly matched and used, thereby improving the applicability of the fixed fixture and making it easy for the fixed fixture to be adapted to various models of glue applicators.

[0044] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A fixture for a semiconductor coating machine, comprising a base (1), characterized in that: The base (1) is detachably provided with a horizontal lower seat (41) at the top. A horizontal upper seat (42) is slidably provided at the top of the horizontal lower seat (41). A vertical lower seat (51) is detachably provided at the top of the horizontal upper seat (42). A vertical upper seat (52) is slidably provided at the top of the vertical lower seat (51). A top seat (11) is detachably provided at the top of the vertical upper seat (52). A clamping groove (31) is provided at the top of the top seat (11). A forward lead screw (33) and a reverse lead screw (34) are rotatably provided in the clamping groove (31). The forward lead screw (33) and the reverse lead screw (34) are fixedly connected to each other. A clamping vertical block (32) is threadedly connected to both the forward lead screw (33) and the reverse lead screw (34). The clamping vertical block (32) is slidably provided in the clamping groove (31). A clamping vertical piece (3) is fixedly provided at the top of the clamping vertical block (32). The clamping vertical pieces (3) are arranged opposite to each other.

2. The fixture for a semiconductor coating machine according to claim 1, characterized in that: A set of clamping transverse grooves (21) are provided on the top of the top seat (11). The clamping transverse grooves (21) are symmetrically arranged on both sides of the clamping longitudinal groove (31). The clamping transverse grooves (21) and the clamping longitudinal groove (31) are perpendicular to each other. A clamping transverse block (22) is slidably arranged in the clamping transverse groove (21). A transverse spring (23) is fixedly arranged between the clamping transverse block (22) and the inner wall of the clamping transverse groove (21). A clamping transverse piece (2) is fixedly arranged on the top of the clamping transverse block (22). The clamping transverse pieces (2) are arranged opposite to each other.

3. The fixture for a semiconductor coating machine according to claim 1, characterized in that: The top of the longitudinal lower seat (51) has a longitudinal groove (53), and a longitudinal block (54) is slidably arranged in the longitudinal groove (53). The longitudinal block (54) is fixedly connected to the longitudinal upper seat (52). A longitudinal screw (55) is rotatably arranged in the longitudinal groove (53). The longitudinal screw (55) is threadedly connected to the longitudinal block (54). A longitudinal motor (5) is fixedly arranged in the longitudinal groove (53). One end of the longitudinal screw (55) is fixedly connected to the output shaft of the longitudinal motor (5).

4. The fixture for a semiconductor coating machine according to claim 1, characterized in that: A transverse groove (43) is provided on the top of the transverse lower seat (41). A transverse block (44) is slidably arranged in the transverse groove (43). The transverse block (44) is fixedly connected to the transverse upper seat (42). A transverse screw (45) is rotatably arranged in the transverse groove (43). The transverse screw (45) is threadedly connected to the transverse block (44). A transverse motor (4) is fixedly arranged in the transverse groove (43). One end of the transverse screw (45) is fixedly connected to the output shaft of the transverse motor (4).

5. The fixture for a semiconductor coating machine according to claim 1, characterized in that: A plurality of first positioning holes (61) are provided through the top seat (11), and a first positioning bolt (6) is inserted into the first positioning hole (61). A plurality of first positioning grooves (62) are provided on the top of the base (1), the top of the transverse upper seat (42) and the top of the longitudinal upper seat (52), and the first positioning grooves (62) are used to be threadedly connected to the first positioning bolts (6).

6. The fixture for a semiconductor coating machine according to claim 1, characterized in that: A plurality of second positioning holes (71) are provided through the longitudinal lower seat (51), and a second positioning bolt (7) is inserted into the second positioning hole (71). A plurality of second positioning grooves (72) are provided on the top of the base (1) and the top of the transverse upper seat (42), and the second positioning grooves (72) are used to be threadedly connected with the second positioning bolts (7).

7. The fixture for a semiconductor coating machine according to claim 1, characterized in that: A plurality of third positioning holes (81) are provided through the horizontal lower seat (41), and a third positioning bolt (8) is inserted into the third positioning hole (81). A plurality of third positioning grooves (82) are provided on the top of the base (1), and the third positioning grooves (82) are used to be threadedly connected with the third positioning bolts (8).

8. The fixture for a semiconductor coating machine according to claim 1, characterized in that: The base (1), the horizontal lower seat (41), the vertical lower seat (51) and the top seat (11) are all fixedly provided with a number of mounting seats (91). Mounting holes (92) are opened on the mounting seats (91), and mounting bolts (9) are inserted into the mounting holes (92).

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