Lamination maintenance device and reinspection bagging equipment

Abstract

The utility model discloses a lamination maintenance device and reinspection bagging equipment, and the lamination maintenance device comprises a first conveying mechanism, a first detection mechanism, a first carrying mechanism and a second conveying mechanism, wherein the first detection mechanism is configured to perform a first type of detection on the laminated sheets which are conveyed to the first detection station by the first conveying mechanism in a stepping manner; the first carrying mechanism is configured to pick up the laminations located at the discharging station and carry the laminations which are detected to be qualified in the first type to the next procedure or carry the laminations which are detected to be unqualified in the first type to the second conveying mechanism. The second conveying mechanism is configured to receive the unqualified laminations carried by the first carrying mechanism and convey the unqualified laminations to a maintenance station for maintenance; and the first carrying mechanism is further configured to pick up the overhauled qualified laminations on the second conveying mechanism and carry the qualified laminations to the next process. According to the invention, the problem of low lamination production efficiency is solved.

Description

Technical Field

[0001] This application relates to the field of silicon wafer production technology, and in particular to a wafer stacking inspection and repair device and a re-inspection bagging equipment. Background Technology

[0002] After the silicon wafers are sorted and tested by the sorting machine, the qualified silicon wafers are stacked in the material box. The silicon wafers are stacked into stacks in the material box. Then, the stacks in the material box are taken out and transported to the stack inspection device for appearance inspection. If the stack inspection is qualified, the qualified stacks will be sent to the next process for bagging and packaging by the conveying mechanism.

[0003] If the stacking detection device detects a defective stack, the transport mechanism will send the defective stack to the repair station for manual repair. Then the transport mechanism needs to wait for the stacking detection device to complete the detection of the next stack. If the next stack is qualified, the transport mechanism can send the qualified stack to the next process. Therefore, when there is no qualified stack to send to the next process, the equipment in the next process can only stop and wait, resulting in low production efficiency. Utility Model Content

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a stacking inspection and repair device and a re-inspection bagging equipment to solve the problem of low stacking production efficiency.

[0005] In a first aspect, this application provides a laminated sheet inspection device, comprising a first conveying mechanism, a first detection mechanism, a first handling mechanism, and a second conveying mechanism, wherein:

[0006] A first inspection station is provided on the first conveying mechanism. The first inspection mechanism is located at the first inspection station and is configured to perform a first type of inspection on the stacked pieces that are conveyed to the first inspection station by the first conveying mechanism in a stepping manner.

[0007] The first conveying mechanism is also configured to convey the stacked pieces after inspection at the first inspection station to the discharge station in a step-by-step manner.

[0008] The first conveying mechanism is configured to pick up the stacked pieces located at the discharge station and convey the stacked pieces that pass the first type of inspection to the next process or convey the stacked pieces that fail the first type of inspection to the second conveying mechanism.

[0009] The second conveying mechanism is configured to receive the defective stacks transported by the first conveying mechanism and transport the defective stacks to the repair station for repair. The second conveying mechanism is also configured to receive the qualified stacks after repair at the repair station and transport the qualified stacks to the picking range of the first conveying mechanism.

[0010] The first conveying mechanism is also configured to pick up the qualified stacked pieces after inspection from the second conveying mechanism and transport the qualified stacked pieces to the next process.

[0011] The stacking and repair device of this application sends unqualified stacks to a second conveying mechanism via a first conveying mechanism, and picks up the previously qualified stacks from the second conveying mechanism and sends them to the next process. The stacking, bagging and packaging equipment in the next process does not need to stop and wait, and the repaired stacks do not need to enter the testing mechanism for re-inspection, which effectively improves production efficiency.

[0012] Optionally, the second conveying mechanism includes a first conveying component and a second conveying component;

[0013] The first conveying assembly is configured to receive defective stacks of sheets transported by the first handling mechanism via a hopper and to transport the defective stacks of sheets to the maintenance station.

[0014] The second conveying assembly is configured to receive qualified stacked pieces after maintenance at the maintenance station via a material box and convey the qualified stacked pieces to the picking range of the first handling mechanism.

[0015] By setting up the second conveying mechanism, defective stacks and repaired qualified stacks can be transported separately through different conveying lines. This allows the first handling mechanism to select the corresponding conveying component to place defective stacks or pick up repaired qualified stacks according to handling needs, without stopping the machine to wait. This provides a conveying mechanism that can simultaneously transport defective stacks and repaired qualified stacks, with high transport efficiency, ensuring the handling efficiency of the first handling mechanism, thereby further improving production efficiency.

[0016] Optionally, the first conveying component and the second conveying component are arranged in the same vertical direction and the conveying directions are opposite. The second conveying mechanism further includes a first lifting conveying component. The first lifting conveying component includes a first driving member and a first conveying member. The driving end of the first driving member is connected to the first conveying member. The first driving member is configured to drive the first conveying member to move alternately to a first position or a second position.

[0017] The first position is close to the discharge end of the second conveying assembly. The first conveying component at the first position is configured to receive and temporarily store defective stacks transported by the first handling mechanism via a material box, or to receive and transport qualified stacks after repair from the second conveying assembly to the picking range of the first handling mechanism.

[0018] The second position is close to the feed end of the first conveying assembly, and the first conveyor in the second position is configured to convey temporarily stored defective stacks to the first conveying assembly.

[0019] By arranging the first and second conveying components in the same vertical direction, a compact and space-saving conveying mechanism is provided. Through the cooperation of the first lifting conveying component, the first conveying component, and the second conveying component, the first handling mechanism can place defective stacked pieces and pick up qualified stacked pieces after inspection at the same position, which is beneficial to improving the handling accuracy and efficiency of the first handling mechanism. At the same time, by setting the first lifting conveying component, the defective stacked pieces received at the first position are transported to the first conveying component at the second position height, so that the defective stacked pieces can be smoothly transported to the inspection station for inspection. A lifting conveying component that combines receiving and feeding is provided, which is compact in structure, occupies little space, and effectively improves the conveying efficiency of the entire second conveying mechanism.

[0020] Optionally, the stacking inspection device may also include a third conveying mechanism;

[0021] The first conveyor located in the second position is also configured to convey the cassette containing the qualified stacked pieces taken by the first conveying mechanism to the third conveying mechanism;

[0022] The third conveying mechanism is configured to receive the tin boxes conveyed by the first conveyor and transport the tin boxes to the tin box recycling process.

[0023] The cooperation of the first lifting and conveying component and the third conveying mechanism enables the recycling and circulation of empty material boxes after the stacked pieces have been removed, which is beneficial for the subsequent recycling and reuse of empty material boxes.

[0024] Optionally, the second conveying mechanism further includes a second lifting and conveying assembly, which includes a second driving member and a second conveying member. The driving end of the second driving member is connected to the second conveying member, and the second driving member is configured to drive the second conveying member to move alternately to a third position or a fourth position.

[0025] The third position is close to the discharge end of the first conveying component, and the second conveying component located in the third position is configured to receive and temporarily store the defective stacked pieces conveyed by the first conveying component.

[0026] The fourth position is close to the feed end of the second conveying assembly. The second conveyor at the fourth position is configured to convey temporarily stored defective stacks to the maintenance station or to receive defective stacks and then qualified stacks after maintenance via a material box and convey the qualified stacks to the second conveying assembly.

[0027] By configuring the second lifting and conveying component, it is possible to receive the defective stacked pieces conveyed by the first conveying component at the third position height and send the defective stacked pieces to the fourth position height. At the same time, through the cooperation of the second lifting and conveying component, the first conveying component, and the second conveying component, it is possible to receive the qualified stacked pieces after inspection and to supply the defective stacked pieces to the inspection station at the same position. This makes it convenient for manual or equipment personnel to pick up and place stacked pieces at the same position height, which helps to improve the inspection efficiency of defective stacked pieces and the efficiency of conveying qualified stacked pieces after inspection.

[0028] Optionally, the stacked lamination repair device includes a transfer mechanism, and the first handling mechanism includes a first handling component and a second handling component;

[0029] The first conveying component is configured to pick up the stacked sheets located at the discharge station and convey the stacked sheets that pass the first type of inspection to the next process or convey the stacked sheets that fail the first type of inspection to the receiving station.

[0030] The transfer station is configured to receive stacks of wafers that fail the first type of inspection at the receiving station or to receive stacks of wafers that pass the inspection after repairing the defective stacks.

[0031] The second handling component is configured to pick up defective stacks on the transfer mechanism and transport them to the second conveyor mechanism, or to pick up qualified stacks on the second conveyor mechanism after repair and transport them to the transfer mechanism located at the receiving station.

[0032] The first handling unit is also configured to pick up the inspected and qualified stacked pieces located on the transfer mechanism at the receiving station and transport the qualified stacked pieces to the next process.

[0033] Through the cooperation of the first handling component, the second handling component, and the transfer mechanism, the alternating handling of stacked sheets that failed the first inspection and stacked sheets that passed the repair is realized. The first handling component can directly pick up the stacked sheets that passed the repair and are being handled by the second handling component from the transfer mechanism and send them to the next process. The stacked sheet bagging and packaging equipment in the next process does not need to stop and wait, and the stacked sheets that have passed the repair do not need to enter the inspection mechanism for re-inspection, which effectively improves production efficiency. At the same time, the second handling component can directly pick up the stacked sheets that failed the inspection and are being handled by the first handling component from the transfer mechanism and send them to the second conveying mechanism, without the need for manual removal of the stacked sheets, which helps to improve repair efficiency. The transfer mechanism realizes the transfer and temporary storage of stacked sheets that fail the inspection and are passing the repair, and provides a simple transfer mechanism that is easy for the handling mechanism to pick up the stacked sheets.

[0034] Optionally, the transfer mechanism includes a first drive component, a first transfer platform, and a second transfer platform, with the first transfer platform and the second transfer platform located at the receiving station and the temporary storage station, respectively.

[0035] The first transport component is configured to place the defective stacks on a first transfer platform located at the receiving station, and the second transport component is configured to pick up the defective stacks located on the first transfer platform at the receiving station.

[0036] The first drive component is configured to drive the first transfer platform and the second transfer platform to move synchronously, so that while the first transfer platform leaves the receiving station, the second transfer platform moves from the temporary storage station to the receiving station. The second transport component is configured to place the repaired stacked pieces on the second transfer platform located at the receiving station. The first transport component is configured to pick up the repaired stacked pieces on the second transfer platform located at the receiving station.

[0037] By designing a transfer mechanism, stacked sheets can be moved between the temporary storage station and the receiving station, facilitating the first and second handling components to pick up or place the stacked sheets required for the corresponding process. This provides a compact transfer mechanism that can stably support stacked sheets. Through the cooperation of the first transfer platform, the second transfer platform, the first handling component, and the second handling component, the efficiency of feeding qualified stacked sheets to the stacked sheet bagging and packaging equipment for the next process is improved, eliminating the need for the stacked sheet bagging and packaging equipment to stop and wait. At the same time, it improves the transportation efficiency of unqualified stacked sheets to the maintenance station, which is beneficial to improving maintenance efficiency.

[0038] Optionally, the lamination overhaul device may also include a second overhaul mechanism;

[0039] A second inspection station is provided on the first conveying mechanism. The second inspection station is located in front of the first inspection station. A second maintenance mechanism is located at the second maintenance station. The second maintenance mechanism is configured to perform a second type of inspection on the stacked pieces that are conveyed to the second inspection station by the first conveying mechanism in a step-by-step manner.

[0040] The first conveying mechanism is also configured to convey stacked pieces that pass the second type of inspection to the first inspection station or to convey stacked pieces that fail the second type of inspection to the second conveying mechanism;

[0041] The second conveying mechanism is configured to receive the second type of defective stacked pieces conveyed by the first conveying mechanism and transport the defective stacked pieces to the repair station for repair. The second conveying mechanism is also configured to receive the defective stacked pieces that have been repaired and are now qualified at the repair station and transport the qualified stacked pieces to the picking range of the first handling mechanism.

[0042] The second inspection mechanism first performs a second type of inspection on the stacked sheets, such as a neatness inspection. A portion of the unqualified stacked sheets are removed. The unqualified stacked sheets are then quickly transported to the inspection station for repair via the second conveyor mechanism. This avoids the situation where, after the first type of inspection and subsequent procedures, it is discovered during packaging that the stacked sheets are not neat enough to be packaged, thus affecting production efficiency. At the same time, the second conveyor mechanism directly transports the stacked sheets that have passed the second type of inspection to the picking range of the first handling mechanism, allowing them to be directly sent to the next process without having to re-inspect them in the inspection mechanism, effectively improving production efficiency.

[0043] Optionally, the stacking inspection device also includes a second conveying mechanism; the first conveying mechanism includes a third conveying component and a fourth conveying component;

[0044] The third conveying assembly is configured to receive a cassette containing stacked pieces and convey the cassette and stacked pieces to the second inspection station for the second type of inspection;

[0045] The second conveying mechanism is configured to pick up the second type of qualified stacked pieces in the material box and convey the second type of qualified stacked pieces to the fourth conveying assembly;

[0046] The fourth conveying assembly is configured to receive the second-type qualified stacked sheets transported by the second conveying mechanism and convey the second-type qualified stacked sheets to the first inspection station for first-type inspection;

[0047] The third conveying assembly is also configured to convey the cassette containing the second-type qualified stacked pieces taken away by the second conveying mechanism to the cassette recycling process, or to convey the cassette containing the second-type unqualified stacked pieces to the second conveying mechanism.

[0048] By cooperating with the second conveying mechanism, the third conveying component, and the fourth conveying component, the stacked pieces with different test results after the second type of test are transported, and the empty material box is also transferred. The overall structure is compact and occupies little space, providing a stacked piece inspection device that can perform both types of tests.

[0049] Optionally, the stacking inspection device also includes a third lifting and conveying assembly, which includes a third driving member and a third conveying member. The driving end of the third driving member is connected to the third conveying member, and the third driving member is configured to drive the third conveying member to move alternately to the fifth position, the sixth position, or the seventh position.

[0050] The fifth position is close to the discharge end of the third conveying component. The third conveying component at the fifth position is configured to receive and temporarily store the material box that has taken away the stacked pieces that have passed the second type of inspection or the material box that contains the stacked pieces that have failed the second type of inspection.

[0051] The height of the sixth position is the same as the height of the conveying surface of the second conveying mechanism. The third conveying component located at the sixth position is configured to convey the temporarily stored material box containing the stack of second-class defective test pieces to the second conveying mechanism.

[0052] The height of the seventh position is lower than that of the sixth position. The third conveyor located at the seventh position is configured to transport the temporarily stored cassette containing the second-class qualified stacked pieces to the cassette recycling process.

[0053] By setting up a third lifting and conveying component, empty boxes or boxes of defective stacked pieces received at the discharge end of the third conveying component are transported to the next process at different height positions. This provides a compact lifting and conveying component that facilitates the flow of defective stacked pieces and empty boxes.

[0054] Optionally, the second conveying mechanism is also configured to transport the cassettes of the second-class defective stacked pieces that have been repaired and passed inspection by the first handling mechanism to the cassette recycling process.

[0055] By setting up the second conveying mechanism, the recycling of the material boxes flowing from the third conveying component is realized, which is conducive to the reuse of the material boxes.

[0056] In a second aspect, this application provides a re-inspection bagging device, which includes a bagging mechanism and a stacking inspection device as described in any of the first aspects, wherein:

[0057] The bagging mechanism is located at the next process step. The bagging mechanism is configured to receive qualified stacks of sheets transported by the first handling mechanism and bag the stacks of sheets.

[0058] The re-inspection bagging equipment of this application uses a stacking repair device to transport qualified stacked sheets after first-class repair to the bagging mechanism for bagging via a first transport mechanism, or to send unqualified stacked sheets to a second transport mechanism via the first transport mechanism, and then pick up the previously qualified stacked sheets from the second transport mechanism and send them to the bagging mechanism. This realizes multi-source material supply to the bagging mechanism, and the bagging mechanism does not need to stop and wait. The repaired stacked sheets do not need to enter the inspection mechanism for re-inspection, which effectively improves production efficiency. Attached Figure Description

[0059] The disclosure of this application will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the drawings are used to denote similar components, wherein:

[0060] Figure 1 This is a three-dimensional structural schematic diagram of a lamination repair device according to one embodiment of this application;

[0061] Figure 2This is a three-dimensional structural schematic diagram of the second conveying mechanism according to one embodiment of this application;

[0062] Figure 3 This is a three-dimensional structural schematic diagram of the second and third conveying mechanisms according to one embodiment of this application;

[0063] Figure 4 This is a three-dimensional structural diagram of the first conveying mechanism, the transfer mechanism, and the first lifting and conveying assembly according to one embodiment of this application;

[0064] Figure 5 This is a three-dimensional structural diagram of a first transport component, a second transport component, and a transfer mechanism according to one embodiment of this application;

[0065] Figure 6 This is a three-dimensional structural schematic diagram of a lamination repair device with second-type detection according to one embodiment of this application;

[0066] Figure 7 This is a three-dimensional structural diagram of the conveyor line from another perspective of one embodiment of the stacked lamination inspection device of this application;

[0067] Figure 8 This is a three-dimensional structural diagram of a lifting and conveying assembly according to one embodiment of this application.

[0068] Figures 1 to 8 The following reference numerals are included:

[0069] 10. First conveying mechanism; 11. Third conveying assembly; 12. Fourth conveying assembly; 13. Third lifting and conveying assembly; 131. Third driving component; 132. Third conveying component;

[0070] 20. The first testing institution;

[0071] 30. First conveying mechanism; 31. First conveying assembly; 32. Second conveying assembly; 33. Lateral drive assembly;

[0072] 40. Second conveying mechanism; 41. First conveying assembly; 42. Second conveying assembly; 43. First lifting conveying assembly; 431. First driving component; 432. First conveying component; 44. Second lifting conveying assembly; 441. Second driving component; 442. Second conveying component; 45. Fifth conveying assembly;

[0073] 50. Third conveying mechanism;

[0074] 60. Transfer mechanism; 61. First drive assembly; 62. First transfer platform; 63. Second transfer platform; 64. Sliding seat;

[0075] 70. Second conveying mechanism; 81. Lifting drive module; 82. Mounting base; 831. First pulley assembly; 832. Second pulley assembly. Detailed Implementation

[0076] Some embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application.

[0077] As described in the background art, if the wafer stacking inspection device detects a defective wafer stack, the transport mechanism will send the defective wafer stack to the repair station for manual repair. Then, the transport mechanism needs to wait for the wafer stacking inspection device to complete the inspection of the next wafer stack. Only if the next wafer stack is qualified can the transport mechanism send the qualified wafer stack to the next process. Therefore, when there are no qualified wafer stacks to send to the next process, the equipment in the next process can only be stopped and wait, resulting in low production efficiency. Based on this, this application proposes a wafer stacking repair device to solve the problem of low wafer stacking production efficiency.

[0078] See appendix Figure 1 , Figure 1 This is a schematic diagram of a lamination inspection device according to one embodiment of this application. Figure 1 As shown, in one or more embodiments, the stacked lamination repair device of this application includes a first conveying mechanism 10, a first detection mechanism 20, a first handling mechanism 30, and a second conveying mechanism 40, wherein: a first detection station is provided on the first conveying mechanism 10, the first detection mechanism 20 is located at the first detection station, and the first detection mechanism 20 is configured to perform a first type of detection on the stacked laminations that are conveyed stepwise to the first detection station by the first conveying mechanism 10; the first conveying mechanism 10 is also configured to convey the stacked laminations that have been detected at the first detection station stepwise to the discharge station; the first handling mechanism 30 is configured to pick up the stacked laminations located at the discharge station. The stacked sheets at the material handling station are transported to the next process if they pass the first type of inspection, or to the second conveying mechanism 40 if they fail the first type of inspection. The second conveying mechanism 40 is configured to receive the defective stacked sheets transported by the first handling mechanism 30 and transport them to the repair station for repair. The second conveying mechanism 40 is also configured to receive the repaired and qualified stacked sheets at the repair station and transport them to the picking range of the first handling mechanism 30. The first handling mechanism 30 is also configured to pick up the repaired and qualified stacked sheets from the second conveying mechanism 40 and transport them to the next process. Specifically, the first type of inspection can be an inspection of the appearance of the stacked sheets.

[0079] The stacking repair device of this application embodiment delivers unqualified stacked sheets to the second conveying mechanism 40 through the first conveying mechanism 30, and picks up the previously qualified stacked sheets from the second conveying mechanism 40 and delivers them to the next process. The stacking bagging and packaging equipment in the next process does not need to stop and wait, and the repaired stacked sheets do not need to enter the testing mechanism for re-inspection, which effectively improves production efficiency.

[0080] In one implementation, see Figure 1 and Figure 2 The second conveying mechanism 40 includes a first conveying component 41 and a second conveying component 42;

[0081] The first conveying assembly 41 is configured to receive defective stacks transported by the first handling mechanism 30 via a material box and transport the defective stacks to the maintenance station.

[0082] The second conveying assembly 42 is configured to receive qualified stacked pieces after maintenance at the maintenance station via a material box and convey the qualified stacked pieces to the picking range of the first handling mechanism 30.

[0083] Specifically, the first conveying component 41 and the second conveying component 42 can be configured according to the actual picking range of the first handling mechanism 30 and the location of the maintenance station. The first conveying component 41 conveys the defective stacked sheets to the maintenance station for manual or equipment removal and maintenance. The second conveying component 42 conveys the qualified stacked sheets after maintenance to the picking range of the first handling mechanism 30, allowing the first handling mechanism 30 to pick up the qualified stacked sheets and transport them to the bagging equipment for bagging, thereby improving production efficiency. Furthermore, both the first conveying component 41 and the second conveying component 42 use material boxes to carry and transport the stacked sheets. The material boxes provide stability to the stacked sheets, effectively preventing displacement and damage during transportation.

[0084] By configuring the second conveying mechanism 40, defective stacks and qualified stacks after maintenance can be conveyed separately through different conveying lines. This allows the first handling mechanism 30 to select the corresponding conveying component to place defective stacks or pick up qualified stacks after maintenance according to handling requirements, without having to stop and wait. This provides a conveying mechanism that can simultaneously convey defective stacks and qualified stacks after maintenance, resulting in high transportation efficiency and ensuring the handling efficiency of the first handling mechanism, thereby further improving production efficiency.

[0085] In one possible implementation, see Figure 1 and Figure 2The first conveying component 41 and the second conveying component 42 are arranged in the same vertical direction and have opposite conveying directions. The second conveying mechanism 40 also includes a first lifting conveying component 43. The first lifting conveying component 43 includes a first driving member 431 and a first conveying member 432. The driving end of the first driving member 431 is connected to the first conveying member 432. The first driving member 431 is configured to drive the first conveying member 432 to move alternately to a first position or a second position.

[0086] The first position is close to the discharge end of the second conveying assembly 42. The first conveying component 432 located at the first position is configured to receive and temporarily store unqualified stacked pieces transported by the first handling mechanism 30 through a material box, or to receive qualified stacked pieces after repair transported by the second conveying assembly 42 and transport them to the picking range of the first handling mechanism 30.

[0087] The second position is close to the feed end of the first conveying assembly 41. The first conveyor 432 located in the second position is configured to convey the temporarily stored defective stack to the first conveying assembly 41.

[0088] Specifically, the first conveying component 41 and the second conveying component 42 are arranged in an upper and lower layer structure in the Z direction to save space. The first conveying component 41 conveys unqualified stacked pieces along the X1 direction, and the second conveying component 42 conveys qualified stacked pieces after repair along the X2 direction. The X1 and X2 directions are opposite to and perpendicular to the Z direction to ensure stable transportation of the stacked pieces. The first conveying component 41 is located below the second conveying component 42. The height of the second conveying component 42 is set according to the height of the repair station. This height needs to facilitate manual or equipment handling of the stacked pieces. Since the second conveying component 42 conveys qualified stacked pieces after repair, the second conveying component 42 is set at this height. During the transportation distance between the qualified stacked pieces after repair and the first handling mechanism 30, there is no need to adjust the height position, avoiding the shaking problem of qualified stacked pieces after repair due to height adjustment.

[0089] Specifically, the first driving component 431 can be a linear module, which drives the first conveying component 432 to move vertically up and down in the Z direction, so that the first conveying component 432 alternately moves to the first position or the second position. The first conveying component 432 can be a pulley assembly, and the conveying direction of the pulley assembly is the same as that of the first conveying component 41 and the second conveying component 42. It can receive qualified stacked pieces after maintenance from the second conveying component 42, and can also convey unqualified stacked pieces to the first conveying component 41.

[0090] By arranging the first conveying component 41 and the second conveying component 42 in the same vertical direction, a compact and space-saving conveying mechanism is provided. Through the cooperation of the first lifting conveying component 43, the first conveying component 41, and the second conveying component 42, the first handling mechanism 30 can place defective stacked pieces and pick up qualified stacked pieces after inspection at the same position, which is beneficial to improving the handling accuracy and efficiency of the first handling mechanism 30. At the same time, by setting the first lifting conveying component 43, the defective stacked pieces received at the first position are conveyed to the first conveying component 41 located at the second position height, so that the defective stacked pieces can be smoothly transported to the inspection station for inspection. A lifting conveying component that can both receive and feed materials is provided, which is compact in structure, occupies little space, and effectively improves the conveying efficiency of the entire second conveying mechanism 40.

[0091] In one possible implementation, see [reference] Figures 1-3 As shown, the lamination repair device also includes a third conveying mechanism 50;

[0092] The first conveyor 432, located in the second position, is also configured to convey the cassette of qualified stacked pieces taken by the first conveying mechanism 30 to the third conveying mechanism 50;

[0093] The third conveying mechanism 50 is configured to receive the tin box conveyed by the first conveyor 432 and convey the tin box to the tin box recycling process.

[0094] Specifically, the receiving end of the third conveying mechanism 50 is positioned close to the second position so that the first conveying member 432 can transport empty boxes to the third conveying mechanism 50. The specific conveying direction and path of the third conveying mechanism 50 can be set according to the actual location of the box recycling station, and this application does not impose specific restrictions on them. The first conveying member 432 can use multiple sets of pulley assemblies with different conveying directions to achieve feeding in different directions. It should be understood that the third conveying mechanism 50 can also be set at any height reachable by the first conveying member 432 along the Z direction, and can be set according to the actual box recycling process.

[0095] Through the cooperation of the first lifting and conveying component 43 and the third conveying mechanism 50, the empty material box with the stacked pieces removed is recycled and transferred, which is beneficial for the subsequent recycling and reuse of the empty material box.

[0096] In one possible implementation, see [reference] Figures 1-3 The second conveying mechanism 40 also includes a second lifting and conveying assembly 44, which includes a second driving member 441 and a second conveying member 442. The driving end of the second driving member 441 is connected to the second conveying member 442. The second driving member 441 is configured to drive the second conveying member 442 to move alternately to a third position or a fourth position.

[0097] The third position is close to the discharge end of the first conveying assembly 41. The second conveying member 442 located in the third position is configured to receive and temporarily store the defective stacked pieces conveyed by the first conveying assembly 41.

[0098] The fourth position is close to the feed end of the second conveying assembly 42. The second conveyor 442 located at the fourth position is configured to convey temporarily stored defective stacks to the maintenance station or to receive defective stacks and then qualified stacks after maintenance through the material box and convey the qualified stacks to the second conveying assembly 42.

[0099] Specifically, the second drive unit 441 can be a linear module, which drives the second conveyor 442 to move vertically up and down in the Z direction, so that the second conveyor 442 alternately moves to the third position or the fourth position. The second conveyor 442 can be a pulley assembly, and the conveying direction of the pulley assembly is the same as that of the first conveyor assembly 41 and the second conveyor assembly 42. It can receive unqualified stacked pieces conveyed by the first conveyor assembly 41, and can also convey qualified stacked pieces after inspection to the second conveyor assembly 42.

[0100] An optional working process of the second conveying mechanism 40 in this embodiment of the application: The first driving member 431 drives the first conveying member 432 to move to the first position. The first conveying member 432 receives and temporarily stores the defective stacked pieces transported by the first handling mechanism 30 through the material box. After receiving the defective stacked pieces, the first driving member 431 drives the first conveying member 432 to descend to the second position along the Z direction. The first conveying member 432 transports the temporarily stored defective stacked pieces to the first conveying assembly 41. The first conveying assembly 41 transports the received defective stacked pieces along the X1 direction to the second conveying member 442 located at the third position. After the second conveying member 442 receives the defective stacked pieces at the third position, the second driving member 441 drives the second conveying member 442 to rise along the Z direction to the fourth position, so that the defective stacked pieces on the second conveying member 442 are at the fourth position. The second conveying member 442 transports the temporarily stored defective stacked pieces to the maintenance station at the fourth position, where the stacked pieces are removed manually or by equipment for maintenance.

[0101] Another optional working process of the second conveying mechanism 40 in this embodiment: the second conveyor 442 receives the qualified stacked pieces after inspection through the material box at the fourth position and conveys the qualified stacked pieces to the second conveying assembly 42 at the fourth position; after receiving the qualified stacked pieces after inspection, the second conveying assembly 42 transports the qualified stacked pieces along the X2 direction to the first conveyor 432 located at the first position; after receiving the qualified stacked pieces from the second conveying assembly 42, the first conveyor 432 conveys the qualified stacked pieces to the picking range of the first handling mechanism 30.

[0102] By configuring the second lifting and conveying component 44, it is possible to receive the defective stacked pieces conveyed by the first conveying component 41 at the third position height and send the defective stacked pieces to the fourth position height. At the same time, through the cooperation of the second lifting and conveying component 44, the first conveying component 41 and the second conveying component 42, it is possible to receive the qualified stacked pieces after inspection and to supply the defective stacked pieces to the inspection station at the same position. This makes it convenient for manual or equipment personnel to pick up and place stacked pieces at the same position height, which helps to improve the inspection efficiency of defective stacked pieces and the efficiency of conveying qualified stacked pieces after inspection.

[0103] In one implementation, see [reference] Figures 1-4 The stacking repair device includes a transfer mechanism 60, and the first handling mechanism 30 includes a first handling component 31 and a second handling component 32.

[0104] The first conveying component 31 is configured to pick up the stacked sheets located at the discharge station and convey the stacked sheets that pass the first type of inspection to the next process or convey the stacked sheets that fail the first type of inspection to the receiving station.

[0105] The transfer station 60 is configured to carry stacks of wafers that fail the first type of inspection at the receiving station or to receive stacks of wafers that pass the inspection after repairing the defective stacks.

[0106] The second conveying component 32 is configured to pick up defective stacks on the transfer mechanism 60 and convey them to the second conveying mechanism 40, or to pick up qualified stacks on the second conveying mechanism 40 after repair and convey them to the transfer mechanism 60 located at the receiving station.

[0107] The first handling assembly 31 is also configured to pick up the inspected and qualified stacked pieces located on the transfer mechanism 60 at the receiving station and transport the qualified stacked pieces to the next process.

[0108] Specifically, the first conveying mechanism 30 also includes a transverse drive component 33. The drive end of the transverse drive component 33 is connected to the first conveying component 31 and the second conveying component 32. The transverse drive component 33 can drive the first conveying component 31 and the second conveying component 32 to move in the X direction, so that the first conveying component 31 can move laterally to the corresponding discharge station, the transfer mechanism 60, or the next process located at M. At the same time, it can move the second conveying component 32 laterally to the corresponding transfer mechanism 60 or the first lifting and conveying component 43. Both the first conveying component 31 and the second conveying component 32 can move up and down in the Z direction to pick up or place the corresponding stacked pieces.

[0109] An optional working process of the stacked sheet repair device in this application embodiment is as follows: The first conveying component 31 picks up the stacked sheets conveyed by the first conveying mechanism 10 to its discharge station. If the stacked sheets are qualified in the first type of inspection, they are conveyed to the corresponding position of the next process located at M. If the stacked sheets are unqualified in the first type of inspection, they are conveyed to the transfer mechanism 60 located at the receiving station. The second conveying component 32 picks up the unqualified stacked sheets on the transfer mechanism 60 at the receiving station and conveys the stacked sheets to the first conveyor 432 of the second conveying mechanism 40. The first conveyor 432 conveys the unqualified stacked sheets to the repair station through the first conveying component 41. The unqualified stacked sheets are then removed by personnel or equipment for repair.

[0110] Another optional working process of the stacked lamination repair device in this application embodiment: the first conveyor 432 receives the repaired and qualified stacked laminations conveyed by the second conveyor assembly 42 and conveys the stacked laminations to the picking range of the second transport assembly 32; the second transport assembly 32 picks up the repaired and qualified stacked laminations on the first conveyor 432 and places the stacked laminations on the transfer mechanism 60 located at the receiving station; the first transport assembly 31 picks up the repaired and qualified stacked laminations on the transfer mechanism 60 located at the receiving station and directly transports the stacked laminations to the corresponding position of the next process located at M.

[0111] Through the cooperation of the first handling component 31, the second handling component 32, and the transfer mechanism 60, the alternating handling of the first type of defective stacked sheets and the repaired stacked sheets is realized. The first handling component 31 can directly pick up the repaired and qualified stacked sheets carried by the second handling component 32 from the transfer mechanism 60 and send them to the next process. The stacked sheet bagging and packaging equipment in the next process does not need to stop and wait, and the repaired stacked sheets do not need to enter the testing mechanism for re-inspection, which effectively improves production efficiency. At the same time, the second handling component 32 can directly pick up the defective stacked sheets carried by the first handling component 31 from the transfer mechanism 60 and send them to the second conveying mechanism 40 without manual removal of the transported stacked sheets, which is conducive to improving maintenance efficiency. Through the setting of the transfer mechanism 60, the transfer and temporary storage of defective and qualified stacked sheets are realized, providing a simple transfer mechanism 60 that is convenient for the handling mechanism to pick up stacked sheets.

[0112] In one possible implementation, see [reference] Figures 1-5 The transfer mechanism 60 includes a first drive component 61, a first transfer platform 62, and a second transfer platform 63, with the first transfer platform 62 and the second transfer platform 63 located at the receiving station H and the temporary storage station G, respectively.

[0113] The first transport assembly 31 is configured to place the defective stack of sheets on the first transfer platform 62 located at the receiving station H, and the second transport assembly 32 is configured to pick up the defective stack of sheets located on the first transfer platform 62 located at the receiving station H.

[0114] The first drive assembly 61 is configured to drive the first transfer platform 62 and the second transfer platform 63 to move synchronously, so that while the first transfer platform 62 leaves the receiving station H, the second transfer platform 63 moves from the temporary storage station G to the receiving station H. The second transport assembly 32 is configured to place the repaired stacked pieces on the second transfer platform 63 located at the receiving station H. The first transport assembly 31 is configured to pick up the repaired stacked pieces on the second transfer platform 63 located at the receiving station H.

[0115] Specifically, the first drive component 61 can be a linear module with the linear guide rail set in the Y direction. The first drive component 61 drives the first transfer platform 62 and the second transfer platform 63 to move along the Y direction, so as to realize the alternating movement of the first transfer platform 62 and the second transfer platform 63 between the temporary storage station G and the carrying station H.

[0116] Specifically, the transfer mechanism 60 also includes a sliding seat 64, which is slidably mounted on the linear guide rail of the first drive assembly 61. The first transfer platform 62 and the second transfer platform 63 are both mounted on the sliding seat 64. The first drive assembly 61 drives the sliding seat 64 to move along the Y direction, thereby causing the first transfer platform 62 and the second transfer platform 63 on the sliding seat 64 to move synchronously.

[0117] An optional operating process of the stacked lamination repair device in this embodiment is as follows: the first conveying component 31 picks up the defective stacked laminations from the discharge station of the first conveying mechanism 10 and transports the defective stacked laminations to the first transfer platform 62 at the receiving station H; the second conveying component 32 picks up the defective stacked laminations located on the first transfer platform 62 at the receiving station H and transports them to the second conveying mechanism 40, which then delivers the defective stacked laminations to the repair station for repair; the first driving component 61 drives the first transfer platform 62 and the second transfer platform 63 to move synchronously, so that the first transfer platform 62... As platform 62 detaches from receiving station H, second transfer platform 63 moves from temporary storage station G to receiving station H. At this time, the second handling component 32 picks up the qualified stacked pieces after maintenance from the second conveying mechanism 40 and places them on the second transfer platform 63 located at receiving station H, thereby facilitating the first handling component 31 to pick up and handle the qualified stacked pieces on the second transfer platform 63 at receiving station H. The first handling component 31 picks up the qualified stacked pieces after maintenance on the second transfer platform 63 at receiving station H and transports the qualified stacked pieces to the corresponding position of the next process located at M.

[0118] By setting up the transfer mechanism 60, the stacked pieces can be moved between the temporary storage station G and the receiving station H, which facilitates the first handling component 31 and the second handling component 32 to pick up or place the stacked pieces required for the corresponding process. This provides a transfer mechanism 60 with a compact structure and stable stacking capacity. Through the cooperation of the first transfer platform 62, the second transfer platform 63, the first handling component 31 and the second handling component 32, the efficiency of feeding qualified stacked pieces to the stacked piece bagging and packaging equipment for the next process is improved, so that the stacked piece bagging and packaging equipment does not need to stop and wait. At the same time, the transportation efficiency of unqualified stacked pieces to the maintenance station is improved, which is conducive to improving maintenance efficiency.

[0119] In one implementation, see Figures 1-6 The lamination repair device also includes a second repair mechanism;

[0120] The first conveying mechanism 10 is provided with a second inspection station N, which is located in front of the first inspection station. The second maintenance mechanism is located at the second maintenance station N and is configured to perform a second type of inspection on the stacked pieces that are conveyed to the second inspection station N by the first conveying mechanism 10 in a step-by-step manner.

[0121] The first conveying mechanism 10 is also configured to convey stacked pieces that pass the second type of inspection to the first inspection station or to convey stacked pieces that fail the second type of inspection to the second conveying mechanism 40;

[0122] The second conveying mechanism 40 is configured to receive the second type of defective stacked pieces conveyed by the first conveying mechanism 10 and convey the defective stacked pieces to the repair station for repair. The second conveying mechanism 40 is also configured to receive the defective stacked pieces that have been repaired and are now qualified at the repair station and convey the qualified stacked pieces to the picking range of the first handling mechanism 30.

[0123] Specifically, the second type of inspection can be to check the neatness of the stacked sheets. By checking the neatness, some unqualified stacked sheets are first removed. The unqualified stacked sheets are repaired as soon as possible to avoid discovering that they cannot be packaged smoothly when they are about to be packaged after subsequent procedures such as appearance inspection. Checking the stacked sheets from the side before appearance inspection can effectively improve production efficiency.

[0124] Specifically, the second conveying mechanism 40 also includes a fifth conveying component 45. The fifth conveying component 45 receives the second type of defective stacked pieces conveyed by the first conveying mechanism 10 along the Y direction and conveys the stacked pieces sequentially along the Y direction, X1 direction and Y direction to the second lifting conveying component 44. The second lifting conveying component 44 then sends the defective stacked pieces to the maintenance station where they are removed by personnel and equipment for maintenance. It should be understood that the conveying directions and paths shown in the figure are only schematic and are not specific limitations. The conveying direction and path design of the conveying components can be designed according to the actual conveying needs of the equipment, as long as it can transport the second type of defective stacked pieces from the second inspection station N to the maintenance station.

[0125] An optional working process of the stacked sheet repair device in this embodiment is as follows: The first conveying mechanism 10 conveys the stacked sheets in a step-by-step manner along the Y direction to the second inspection station N for second-type inspection through the material box, and conveys the stacked sheets that fail the second-type inspection to the fifth conveying component 45; the fifth conveying component 45 conveys the received stacked sheets that fail the second-type inspection sequentially along the Y direction, the X1 direction and the Y direction to the repair station for repair; after the stacked sheets that fail the second-type inspection pass the repair, they are placed on the second lifting conveying component 44 and conveyed by the second lifting conveying component 44 to the second conveying component 42; the second conveying component 42 receives the stacked sheets that pass the repair after the second-type inspection failure and conveys the qualified stacked sheets along the X2 direction to the first lifting conveying component 43, and the first lifting conveying component 43 conveys the qualified stacked sheets to the picking range of the first handling mechanism 30.

[0126] The second conveying mechanism 40 directly transports the qualified stacked pieces that failed the second-class inspection to the picking range of the first handling mechanism 30, so that the first handling mechanism 30 can directly send them to the next process without having to enter the inspection mechanism for re-inspection, which effectively improves production efficiency.

[0127] In one possible implementation, see Figures 1-7 The stacking and repair device also includes a second conveying mechanism 70; the first conveying mechanism 10 includes a third conveying component 11 and a fourth conveying component 12;

[0128] The third conveying assembly 11 is configured to receive a cassette containing stacked pieces and convey the cassette and stacked pieces to the second inspection station for a second type of inspection;

[0129] The second conveying mechanism 70 is configured to pick up the second type of qualified stacked pieces in the material box and convey the second type of qualified stacked pieces to the fourth conveying assembly 12;

[0130] The fourth conveying assembly 12 is configured to receive the second-type qualified stacked sheets transported by the second conveying mechanism 70 and convey the second-type qualified stacked sheets to the first inspection station for first-type inspection;

[0131] The third conveying assembly 11 is also configured to convey the cassette containing the second-type qualified stacked pieces taken away by the second conveying mechanism 70 to the cassette recycling process, or to convey the cassette containing the second-type unqualified stacked pieces to the second conveying mechanism 40.

[0132] Specifically, the second conveying mechanism 70 can be set between the discharge end of the third conveying component 11 and the feed end of the fourth conveying component 12 to facilitate the picking up of the second type of qualified stacked pieces from the material box on the third conveying component 11 and placing the stacked pieces on the fourth conveying component 12, which then conveys them to the first inspection station for further inspection.

[0133] Specifically, the third conveying component 11 conveys the material box containing the stacked pieces that failed the second type of inspection to the feed end of the fifth conveying component 45, and the fifth conveying component 45 conveys the stacked pieces that failed the inspection to the maintenance station.

[0134] Specifically, the conveying height of the fifth conveying component 45 is slightly lower than that of the third conveying component 11, and the conveying height of the fifth conveying component 45 is the same as that of the second conveying component 42, so as to match the subsequent manual or equipment handling and facilitate the picking and placing of stacked pieces.

[0135] Through the cooperation of the second conveying mechanism 70, the third conveying component 11 and the fourth conveying component 12, the stacked pieces with different test results after the second type of test are transported, and the empty material box is also transferred. The overall structure is compact and occupies little space, providing a stacked piece inspection device that can perform both types of tests.

[0136] In one possible implementation, see [reference] Figures 1-7 The stacking repair device also includes a third lifting and conveying assembly 13, which includes a third driving member 131 and a third conveying member 132. The driving end of the third driving member 131 is connected to the third conveying member 132. The third driving member 131 is configured to drive the third conveying member 132 to move alternately to the fifth position, the sixth position or the seventh position.

[0137] The fifth position is close to the discharge end of the third conveying assembly 11. The third conveying component 132 located at the fifth position is configured to receive and temporarily store the material box conveyed by the third conveying assembly 11 that has taken away the stacked pieces that have passed the second type of inspection or the material box containing the stacked pieces that have failed the second type of inspection.

[0138] The height of the sixth position is the same as the height of the conveying surface of the second conveying mechanism 40. The third conveying member 132 located at the sixth position is configured to convey the temporarily stored material box containing the stack of second-class defective test pieces to the second conveying mechanism 40.

[0139] The height of the seventh position is lower than that of the sixth position. The third conveyor 132 located at the seventh position is configured to convey the temporarily stored cassette containing the second-class qualified stacked pieces to the cassette recycling process.

[0140] Specifically, the third drive unit 131 can be a linear module, which drives the third conveyor 132 to move vertically up and down in the Z direction, so that the third conveyor 132 alternately moves to the fifth position, the sixth position or the seventh position; the third conveyor 132 can be a pulley assembly with multiple sets of different conveying directions, so as to convey empty boxes or boxes containing stacked pieces that fail the second type of inspection to the corresponding process.

[0141] By setting the third lifting and conveying component 13, the empty material box or the material box of the second type of unqualified stacked pieces received at the discharge end of the third conveying component 11 can be conveyed to the next process at different height positions, providing a lifting and conveying component with a compact structure that facilitates the flow of unqualified stacked pieces and empty material boxes.

[0142] In one possible implementation, see [reference] Figures 1-8 The first lifting and conveying assembly 43, the second lifting and conveying assembly 44, and the third lifting and conveying assembly 13 can all adopt the following... Figure 8 The lifting and conveying assembly structure shown includes a lifting drive module 81, a mounting base 82, a first pulley assembly 831, and a second pulley assembly 832. The drive end of the lifting drive module 81 is connected to the mounting base 82. The lifting drive module 81 can drive the mounting base 82 to move up and down along the Z direction to various height positions, thereby moving each lifting and conveying assembly to its corresponding position. The first pulley assembly 831 and the second pulley assembly 832 are mounted on the mounting base 82. The belt conveying directions of the first pulley assembly 831 and the second pulley assembly 832 are different and can be set according to the direction of the actual connected conveying assembly, thereby realizing the receiving or conveying of stacked pieces or boxes at each corresponding position.

[0143] In one possible implementation, participants Figures 1-8 The second conveying mechanism 40 is also configured to transport the cassettes of the second-class defective stacked pieces that have been repaired and are now qualified, which were taken away by the first handling mechanism 30, to the cassette recycling process.

[0144] Specifically, the first conveyor 432 of the first lifting and conveying assembly 43 receives the box containing the qualified stacked pieces after inspection from the second conveying assembly 42 at the first position and sends it to the picking range of the first handling mechanism 30; the first handling mechanism 30 removes the qualified stacked pieces from the box; the first driving member 431 drives the first conveyor 432 to the second position to convey the empty box with the stacked pieces removed to the third conveying mechanism 50, and the third conveying mechanism 50 conveys the empty box to the box recycling process.

[0145] By setting up the second conveying mechanism 40, the recycling of the material box flowing from the third conveying component 11 is realized, which is conducive to the reuse of the material box.

[0146] Further reading Figures 1-8 This application provides a re-inspection bagging device, which includes a bagging mechanism and a stacked sheet inspection device as described above, wherein:

[0147] The bagging mechanism is located at the next process step. The bagging mechanism is configured to receive qualified stacks of sheets transported by the first transport mechanism 30 and bag the stacks of sheets.

[0148] Specifically, the bagging mechanism is located at M. The first handling component 31 can pick up the stacked pieces that have passed the first type of inspection and are conveyed by the first conveying mechanism 10 and place them on the bagging mechanism for bagging. Alternatively, the first handling component 31 can pick up the stacked pieces that have passed inspection and are placed on the transfer mechanism 60 by the second handling component 32 and transport the qualified stacked pieces to the bagging mechanism for bagging, thereby achieving multi-party material supply to the bagging mechanism.

[0149] See Figures 1-8 An optional working process of the re-inspection bagging device in this application embodiment is as follows:

[0150] The third conveying assembly 11 receives the cassette containing stacked pieces from the external conveying mechanism and conveys the cassette and stacked pieces to the second inspection station N for the second type of inspection;

[0151] For stacked films that pass the second category of testing:

[0152] The second conveying mechanism 70 picks up the stacked pieces from the material box and transports the stacked pieces to the fourth conveying assembly 12;

[0153] The fourth conveying assembly 12 receives the qualified stacked sheets transported by the second conveying mechanism 70 and conveys the qualified stacked sheets to the first inspection station for the first type of inspection.

[0154] If the stacked pieces pass the first type of inspection, they are directly transported by the first handling component 31 to the bagging mechanism for bagging.

[0155] If the stacked pieces fail the first type of inspection, they are transferred by the first handling component 31 to the transfer mechanism 60.

[0156] The second transport component 32 picks up the defective stacked pieces on the transfer mechanism 60 and transports them to the first conveyor 432 located in the first position;

[0157] The first driving member 431 drives the first conveying member 432 to descend from the first position to the second position, and the first conveying member 432 conveys the defective stacked pieces to the first conveying assembly 41 at the second position;

[0158] The first conveying assembly 41 conveys the defective stacked pieces to the second conveying member 442 located in the third position;

[0159] The second drive unit 441 drives the second conveyor 442 to rise from the third position to the fourth position. The second conveyor 442 transports the defective stacked pieces to the maintenance station at the fourth position, where the stacked pieces are removed manually or by equipment for maintenance.

[0160] The second conveyor 442 continues to receive the qualified stacked pieces after inspection at the fourth position, and directly conveys the stacked pieces to the second conveyor assembly 42 at the fourth position;

[0161] The second conveying component 42 conveys the qualified stacked pieces after inspection back to the first conveying component 432 located in the first position, and the first conveying component 432 delivers the qualified stacked pieces to the picking range of the second handling component 32.

[0162] The second transport component 32 picks up the qualified stacked pieces and places them on the transfer mechanism 60;

[0163] The first handling component 31 picks up qualified stacked pieces from the transfer mechanism 60 and transports them to the bagging mechanism for bagging;

[0164] In this process, after the second conveying mechanism 70 removes the qualified stacked pieces from the material box, the third conveying component 11 conveys the empty material box to the third conveyor 132 located at the fifth position; the third driving component 131 drives the third conveyor 132 to descend to the seventh position, and at the seventh position, the third conveyor 132 conveys the empty material box to the material box recycling process.

[0165] See Figures 1-8 Another optional working process of the re-inspection bagging device in this application embodiment is as follows:

[0166] The third conveying assembly 11 receives the cassette containing stacked pieces from the external conveying mechanism and conveys the cassette and stacked pieces to the second inspection station N for the second type of inspection;

[0167] For stacked films that fail the second category of testing:

[0168] The third conveying assembly 11 conveys the cassette containing the stacked pieces that failed the second type of inspection to the third conveying member 132 located at the fifth position;

[0169] The third drive unit 131 drives the third conveyor 132 to descend from the fifth position to the sixth position, and the third conveyor 132 conveys the cassette containing the defective stacked pieces to the fifth conveyor assembly 45 at the sixth position.

[0170] The fifth conveying component 45 conveys the box containing the defective stacked pieces to the second conveyor 442 located at the fourth position. The second conveyor 442 conveys the box containing the defective stacked pieces to the maintenance station at the fourth position, where the stacked pieces are removed manually or by equipment for maintenance.

[0171] The second conveyor 442 continues to receive the qualified stacked pieces after inspection through the material box at the fourth position, and directly conveys the material box containing the qualified stacked pieces to the second conveyor assembly 42 at the fourth position.

[0172] The second conveying component 42 conveys the box containing the qualified stacked pieces back to the first conveying component 432 located at the first position, and the first conveying component 432 delivers the box containing the qualified stacked pieces to the picking range of the second conveying component 32.

[0173] The second handling component 32 picks up qualified stacked pieces from the material box and places the stacked pieces on the transfer mechanism 60;

[0174] The first handling component 31 picks up qualified stacked pieces from the transfer mechanism 60 and transports them to the bagging mechanism for bagging;

[0175] In this process, after the second conveying component 32 removes the qualified stacked pieces from the material box, the first driving component 431 drives the first conveying component 432 to descend to the second position. At the second position, the first conveying component 432 conveys the empty material box to the third conveying mechanism 50, and the third conveying mechanism 50 conveys the empty material box to the material box recycling process.

[0176] The re-inspection bagging equipment of this application allows the stacked sheet repair device to transport qualified stacked sheets after first-class repair to the bagging mechanism for bagging via the first transport mechanism 30, or to send unqualified stacked sheets to the second transport mechanism 40 via the first transport mechanism 30, and then pick up the previously qualified stacked sheets from the second transport mechanism 40 and send them to the bagging mechanism. This realizes multi-source material supply to the bagging mechanism, and the bagging mechanism does not need to stop and wait. The repaired stacked sheets also do not need to enter the inspection mechanism for re-inspection, which effectively improves production efficiency.

[0177] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0178] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0179] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A laminated plate inspection device, characterized in that, The stacked lamination repair device includes a first conveying mechanism, a first detection mechanism, a first handling mechanism, and a second conveying mechanism, wherein: The first conveying mechanism is provided with a first inspection station, the first inspection mechanism is located at the first inspection station, and the first inspection mechanism is configured to perform a first type of inspection on the stacked pieces that are conveyed to the first inspection station by the first conveying mechanism in a stepping manner; The first conveying mechanism is also configured to convey the stacked pieces after inspection at the first inspection station to the discharge station in a step-by-step manner; The first conveying mechanism is configured to pick up the stacked sheets located at the discharge station and convey the stacked sheets that pass the first type of inspection to the next process or convey the stacked sheets that fail the first type of inspection to the second conveying mechanism. The second conveying mechanism is configured to receive defective stacks transported by the first conveying mechanism and convey the defective stacks to the repair station for repair. The second conveying mechanism is also configured to receive qualified stacks after repair at the repair station and convey the qualified stacks to the picking range of the first conveying mechanism. The first conveying mechanism is also configured to pick up the inspected and qualified stacked pieces from the second conveying mechanism and convey the qualified stacked pieces to the next process.

2. The lamination inspection device according to claim 1, characterized in that, The second conveying mechanism includes a first conveying component and a second conveying component; The first conveying assembly is configured to receive defective stacks of sheets transported by the first handling mechanism via a hopper and to transport the defective stacks of sheets to the inspection station; The second conveying assembly is configured to receive qualified stacked pieces after maintenance at the maintenance station via a material box and convey the qualified stacked pieces to the picking range of the first handling mechanism.

3. The lamination inspection device according to claim 2, characterized in that, The first conveying component and the second conveying component are arranged in the same vertical direction and have opposite conveying directions. The second conveying mechanism further includes a first lifting conveying component. The first lifting conveying component includes a first driving member and a first conveying member. The driving end of the first driving member is connected to the first conveying member. The first driving member is configured to drive the first conveying member to move alternately to a first position or a second position. The first position is close to the discharge end of the second conveying component. The first conveying component at the first position is configured to receive and temporarily store defective stacks transported by the first handling mechanism via a material box, or to receive and transport qualified stacks after repair from the second conveying component to the picking range of the first handling mechanism. The second position is close to the feed end of the first conveying assembly, and the first conveyor located at the second position is configured to convey the temporarily stored defective stack to the first conveying assembly.

4. The lamination inspection device according to claim 3, characterized in that, The stacked plate repair device also includes a third conveying mechanism; The first conveyor located in the second position is also configured to convey the hopper from which the first handling mechanism takes away qualified stacked pieces to the third conveyor. The third conveying mechanism is configured to receive the cassettes conveyed by the first conveyor and convey the cassettes to the cassette recycling process.

5. The lamination inspection device according to claim 2, characterized in that, The second conveying mechanism further includes a second lifting and conveying assembly, which includes a second driving member and a second conveying member. The driving end of the second driving member is connected to the second conveying member, and the second driving member is configured to drive the second conveying member to move alternately to a third position or a fourth position. The third position is close to the discharge end of the first conveying component, and the second conveying component located at the third position is configured to receive and temporarily store the defective stacked pieces conveyed by the first conveying component. The fourth position is close to the feed end of the second conveying component. The second conveying component located at the fourth position is configured to convey the temporarily stored defective stack to the repair station or to receive the defective stack and then repair the qualified stack through the material box and convey the qualified stack to the second conveying component.

6. The lamination inspection device according to claim 1, characterized in that, The stacked plate repair device includes a transfer mechanism, and the first handling mechanism includes a first handling component and a second handling component. The first conveying component is configured to pick up the stacked sheets located at the discharge station and convey the stacked sheets that pass the first type of inspection to the next process or convey the stacked sheets that fail the first type of inspection to the receiving station; The transfer mechanism is configured to carry stacked wafers that fail the first type of inspection at the receiving station or to receive stacked wafers that pass inspection after repairing the defective stacked wafers. The second transport component is configured to pick up defective stacks from the transfer mechanism and transport them to the second conveyor mechanism, or to pick up qualified stacks from the second conveyor mechanism after repair and transport them to the transfer mechanism located at the receiving station. The first transport component is also configured to pick up the inspected and qualified stacked pieces located on the transfer mechanism at the receiving station and transport the qualified stacked pieces to the next process.

7. The lamination inspection device according to claim 6, characterized in that, The transfer mechanism includes a first drive component, a first transfer platform, and a second transfer platform, with the first transfer platform and the second transfer platform located at the receiving station and the temporary storage station, respectively. The first transport component is configured to place defective stacks on the first transfer platform located at the receiving station, and the second transport component is configured to pick up the defective stacks located on the first transfer platform located at the receiving station. The first driving component is configured to drive the first transfer platform and the second transfer platform to move synchronously, so that while the first transfer platform leaves the receiving station, the second transfer platform moves from the temporary storage station to the receiving station. The second handling component is configured to place the repaired stacked pieces on the second transfer platform located at the receiving station. The first handling component is configured to pick up the repaired stacked pieces on the second transfer platform located at the receiving station.

8. The lamination inspection device according to any one of claims 1-7, characterized in that, The lamination inspection device also includes a second inspection mechanism; The first conveying mechanism is provided with a second inspection station, which is located in front of the first inspection station. The second maintenance mechanism is located at the second maintenance station and is configured to perform a second type of inspection on the stacked pieces that are conveyed to the second inspection station by the first conveying mechanism in a step-by-step manner. The first conveying mechanism is also configured to convey the second type of qualified stacked sheets to the first inspection station or to convey the second type of unqualified stacked sheets to the second conveying mechanism; The second conveying mechanism is configured to receive the second type of defective stacked pieces conveyed by the first conveying mechanism and convey the defective stacked pieces to the repair station for repair. The second conveying mechanism is also configured to receive the stacked pieces that have passed the repair at the repair station and convey the passed stacked pieces to the picking range of the first handling mechanism.

9. The lamination inspection device according to claim 8, characterized in that, The stacked plate inspection device further includes a second transport mechanism; the first transport mechanism includes a third transport component and a fourth transport component; The third conveying assembly is configured to receive a cassette containing stacked pieces and convey the cassette and stacked pieces to the second inspection station for a second type of inspection; The second conveying mechanism is configured to pick up the second type of qualified stacked pieces in the material box and convey the second type of qualified stacked pieces to the fourth conveying assembly; The fourth conveying component is configured to receive the second type of qualified stacked sheets transported by the second conveying mechanism and convey the second type of qualified stacked sheets to the first inspection station for first type of inspection; The third conveying component is further configured to convey the cassette containing the second type of qualified stacked pieces taken away by the second conveying mechanism to the cassette recycling process, or to convey the cassette containing the second type of unqualified stacked pieces to the second conveying mechanism.

10. The lamination inspection device according to claim 9, characterized in that, The stacked plate repair device also includes a third lifting and conveying assembly, which includes a third driving member and a third conveying member. The driving end of the third driving member is connected to the third conveying member, and the third driving member is configured to drive the third conveying member to move alternately to the fifth position, the sixth position, or the seventh position. The fifth position is close to the discharge end of the third conveying component. The third conveying component located at the fifth position is configured to receive and temporarily store the material box conveyed by the third conveying component that has taken away the stacked pieces that have passed the second type of inspection or the material box containing the stacked pieces that have failed the second type of inspection. The height of the sixth position is the same as the height of the conveying surface of the second conveying mechanism. The third conveying component located at the sixth position is configured to convey the temporarily stored material box containing the stack of second-type defective pieces to the second conveying mechanism. The height of the seventh position is lower than the height of the sixth position, and the third conveyor located at the seventh position is configured to convey the temporarily stored cassette containing the second-type qualified stacked pieces to the cassette recycling process.

11. The lamination inspection device according to claim 9, characterized in that, The second conveying mechanism is also configured to transport the cassettes of the second type of defective stacked sheets that have been repaired and are now in good condition, taken away by the first conveying mechanism, to the cassette recycling process.

12. A re-inspection bagging device, characterized in that, The re-inspection bagging equipment includes a bagging mechanism and a stacked sheet inspection device as described in any one of claims 1-11, wherein: The bagging mechanism is located at the next step and is configured to receive qualified stacks of sheets transported by the first transport mechanism and bag the stacks of sheets.

Images