Integrated circuit support plate stock bin and integrated circuit support plate detection equipment

Abstract

The utility model discloses an integrated circuit carrier plate stock bin and integrated circuit carrier plate detection equipment. The integrated circuit carrier plate stock bin comprises a stock bin main body, the bearing table is arranged in the stock bin main body in a liftable mode, and the bearing table is suitable for placing a carrier plate; the lifting driving device is arranged on the stock bin main body and is in transmission connection with the bearing table; and the carrier plate in-place detection device is arranged on the stock bin main body and constructed to be suitable for being triggered by the carrier plate reaching the preset position height, and the carrier plate in-place detection device is electrically connected with the lifting driving device. The integrated circuit carrier plate stock bin has the advantages of being high in automation degree, high in reliability and the like.

Description

Technical Field

[0001] This utility model relates to the field of integrated circuit manufacturing technology, and more specifically, to an integrated circuit carrier hopper and an integrated circuit carrier testing device having the integrated circuit carrier hopper. Background Technology

[0002] In the manufacturing process of IC (integrated circuit) substrates, it is necessary to accurately and quickly detect and identify scratches, dents, and other defects on the substrate surface and other areas, and promptly screen out defective products. As an indispensable and important component of electronic products, IC substrates are gradually developing towards miniaturization, densification, and integration. Manual inspection can no longer meet the needs of IC substrate production.

[0003] In the related technology, the integrated circuit substrate testing equipment stacks substrates in a hopper, and the gripping device continuously grabs substrates from the hopper. As the number of substrates in the hopper decreases, the height of the top substrate in the hopper decreases, making gripping increasingly difficult. Utility Model Content

[0004] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes an integrated circuit substrate hopper, which has advantages such as high automation and high reliability.

[0005] This utility model also proposes an integrated circuit carrier board testing device having the aforementioned integrated circuit carrier board hopper.

[0006] To achieve the above objectives, an integrated circuit carrier hopper is provided according to an embodiment of the first aspect of this utility model. The integrated circuit carrier hopper includes: a hopper body; a support platform, which is vertically and movably disposed within the hopper body and is adapted to place carriers on the support platform; a lifting drive device, which is disposed on the hopper body and is drively connected to the support platform; and a carrier arrival detection device, which is disposed on the hopper body and configured to be triggered by a carrier reaching a predetermined height, and is electrically connected to the lifting drive device.

[0007] The integrated circuit carrier hopper according to an embodiment of the present invention

[0008] In addition, the integrated circuit carrier hopper according to the above embodiments of this utility model may also have the following additional technical features:

[0009] According to one embodiment of the present invention, the carrier plate positioning detection device is a through-beam sensor and is located at the upper end of the opposite side walls of the silo body.

[0010] According to one embodiment of the present invention, the hopper body is provided with a lifting guide rail, and the support platform is provided with a lifting slider, which is slidably mounted on the lifting guide rail.

[0011] According to one embodiment of the present invention, the integrated circuit carrier hopper further includes a plurality of carrier limiting rods. Each carrier limiting rod is movably disposed on the main body of the hopper and is adapted to stop the carrier on the support platform in the horizontal direction. The support platform is provided with a plurality of clearance grooves for avoiding the carrier limiting rods.

[0012] According to one embodiment of the present invention, the inner bottom surface of the silo body is provided with a plurality of damping guide rails, and the lower end of each of the carrier plate limiting rods is provided with a damping slider, and the plurality of damping sliders are slidably disposed on the plurality of damping guide rails respectively.

[0013] According to one embodiment of the present invention, the plurality of carrier plate limiting rods include: a plurality of front limiting rods, the front limiting rods being disposed at the front of the hopper body and adapted to stop the front edge of the carrier plate, the front limiting rods being movable in the front-back direction; a plurality of rear limiting rods, the rear limiting rods being disposed at the rear of the hopper body and adapted to stop the rear edge of the carrier plate, the rear limiting rods being movable in the front-back direction; a plurality of left limiting rods, the left limiting rods being disposed at the left side of the hopper body and adapted to stop the left edge of the carrier plate, the left limiting rods being movable in the front-back direction; and a plurality of right limiting rods, the right limiting rods being disposed at the right side of the hopper body and adapted to stop the right edge of the carrier plate, the right limiting rods being movable in the left-right direction.

[0014] According to one embodiment of the present invention, the integrated circuit carrier hopper further includes a double partition, which is detachably installed inside the hopper body and is adapted to divide the space inside the hopper body into a front compartment and a rear compartment.

[0015] According to one embodiment of the present invention, the integrated circuit carrier board hopper further includes a hopper seat, the hopper body is disposed in the hopper seat in a push-pull manner, and a handle is provided on the rear surface of the hopper body.

[0016] According to one embodiment of the present invention, the integrated circuit carrier hopper further includes a hopper closure detection device and a hopper closure limiting device. The hopper closure detection device is disposed on the hopper seat. When the hopper body is pushed into the hopper seat, it is adapted to trigger the hopper closure detection device. The hopper closure detection device is electrically connected to the hopper closure limiting device. The hopper closure limiting device includes a limiting block and a limiting drive device. The limiting block can move up and down between a limiting position and a clearance position. When the limiting position is in the limiting position, the limiting block abuts against the lower surface of the hopper body to restrict the forward and backward movement of the hopper body. When the clearance position is in the clearance position, the limiting block disengages from the hopper body to allow the hopper body to move forward and backward. The limiting drive device is disposed on the hopper seat and is drively connected to the limiting block.

[0017] According to a second aspect of the present invention, an integrated circuit substrate testing device is provided, the integrated circuit substrate testing device including the integrated circuit substrate hopper described in the first aspect of the present invention.

[0018] The integrated circuit carrier board testing equipment according to the embodiments of the present invention has the advantages of high automation and high reliability by utilizing the integrated circuit carrier board hopper described in the first aspect of the present invention.

[0019] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0020] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0021] Figure 1 This is a structural schematic diagram of the integrated circuit carrier hopper according to an embodiment of the present utility model.

[0022] Figure 2 This is a structural schematic diagram of the integrated circuit carrier hopper according to an embodiment of the present utility model.

[0023] Figure 3 This is a partial structural schematic diagram of the integrated circuit carrier hopper according to an embodiment of the present utility model.

[0024] Reference numerals in the attached drawings: 1. Integrated circuit carrier board hopper; 10. Hopper body; 11. Lifting guide rail; 12. Handle; 20. Support platform; 21. Lifting slider; 22. Damping guide rail; 23. Clearance groove; 30. Lifting drive device; 40. Carrier board arrival detection device; 50. Carrier board limiting rod; 51. Damping slider; 52. Front limiting rod; 53. Rear limiting rod; 54. Left limiting rod; 55. Right limiting rod; 60. Double partition; 70. Hopper seat; 80. Closing limiting device. Detailed Implementation

[0025] This application is based on the inventor's discoveries and understanding of the following facts and problems:

[0026] In the related technology, the integrated circuit substrate testing equipment stacks substrates in a hopper, and the gripping device continuously grabs substrates from the hopper. As the number of substrates in the hopper decreases, the height of the top substrate in the hopper decreases, making gripping increasingly difficult.

[0027] Therefore, some integrated circuit carrier hoppers in related technologies are equipped with lifting mechanisms to drive the carriers to rise. However, the coordination between the lifting mechanism and the gripping device is difficult, the control logic is complex, and the carriers are easily damaged due to improper coordination between the lifting mechanism and the gripping device.

[0028] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0029] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0031] The integrated circuit carrier hopper 1 according to an embodiment of the present invention is described below with reference to the accompanying drawings.

[0032] like Figures 1-3 As shown, the integrated circuit carrier hopper 1 according to an embodiment of the present invention includes a hopper body 10, a support platform 20, a lifting drive device 30, and a carrier placement detection device 40 (the up-down, left-right, and front-back directions are shown by arrows in the figure).

[0033] A support platform 20 is vertically mounted inside the hopper body 10, and is suitable for placing a carrier plate on the support platform 20. A lifting drive device 30 is mounted on the hopper body 10 and is connected to the support platform 20 in a transmission manner. A carrier plate arrival detection device 40 is mounted on the hopper body 10 and is configured to be triggered by a carrier plate reaching a predetermined height, and the carrier plate arrival detection device 40 is electrically connected to the lifting drive device 30.

[0034] Specifically, the lifting drive device 30 can drive the support platform 20 to rise and fall. The lifting drive device 30 can determine the amount of the support platform 20 based on the detection result of the support platform position detection device 40, so as to control the rise and fall of the support platform 20.

[0035] Taking the integrated circuit substrate hopper 1 as an example, the lifting drive device 30 drives the support platform 20 to rise. When the substrate placed on the support platform 20 rises to a certain height, it triggers the substrate positioning detection device 40, and the lifting drive device 30 stops driving the support platform 20 to rise. The gripping device of the integrated circuit substrate inspection equipment then begins to pick up the substrate. After the gripping device removes a substrate, the substrate positioning detection device 40 is no longer triggered, and the lifting drive device 30 continues to drive the support platform 20 to rise. When a substrate placed on the support platform 20 triggers the substrate positioning detection device 40, the lifting drive device 30 stops driving the support platform 20 to rise, and the gripping device begins to pick up the substrate again. This cycle continues continuously.

[0036] When the integrated circuit substrate hopper 1 is used as a feeding hopper, the control logic can be reversed.

[0037] According to the integrated circuit carrier hopper 1 of this utility model embodiment, by setting up a lifting drive device 30, the lifting drive device 30 is connected to the carrier platform 20 for transmission. The lifting drive device 30 can drive the carrier platform 20 to rise and fall. Compared with the integrated circuit carrier hopper in the related technology, the height of the uppermost carrier plate on the carrier platform 20 can be controlled by lifting the carrier platform 20, which can facilitate the gripping device to pick up and put down the carrier plate.

[0038] Furthermore, by setting up a carrier plate positioning detection device 40, the device can detect whether the carrier plate is in position. The detection result of the carrier plate positioning detection device 40 controls the operation of the lifting drive device 30. After the carrier plate on the carrier platform 20 is removed, the carrier platform 20 is driven to rise, or after a carrier plate is placed on the carrier platform 20, the carrier platform 20 is driven to fall, so that the uppermost carrier plate on the carrier platform 20 maintains the same height. This makes it easier for the gripping device to pick up and place the carrier plate at the same height, and allows the carrier platform 20 to automatically rise and fall to a position suitable for loading and unloading the carrier plate, improving the automation level of loading and unloading. On the one hand, it can further facilitate the gripping device to pick up and place the carrier plate, and on the other hand, it can simplify the control logic of the gripping device, making it easier to cooperate with the gripping device and avoiding damage to the carrier plate due to improper cooperation with the gripping device, thus improving the reliability of loading and unloading.

[0039] Therefore, the integrated circuit carrier hopper 1 according to the present invention has the advantages of high automation and high reliability.

[0040] The integrated circuit carrier hopper 1 according to a specific embodiment of the present invention is described below with reference to the accompanying drawings.

[0041] In some specific embodiments of this utility model, such as Figures 1-3 As shown, the integrated circuit carrier hopper 1 according to an embodiment of the present utility model includes a hopper body 10, a support platform 20, a lifting drive device 30, and a carrier placement detection device 40.

[0042] Specifically, such as Figures 1-3 As shown, the carrier board arrival detection device 40 is a through-beam sensor and is located on the upper ends of opposite side walls of the hopper body 10. Specifically, there can be multiple carrier board arrival detection devices 40, spaced apart along the front-to-back direction. Each carrier board arrival detection device 40 can include a transmitter and a receiver, which are respectively located on the upper ends of opposite side walls of the hopper body 10. Preferably, they are located on the left and right side walls, respectively. Taking the integrated circuit carrier board hopper 1 as an example of a loading hopper, the lifting drive device 30 is configured to drive the support platform 20 upward when the carrier board arrival detection device 40 is not triggered, and to stop driving the support platform 20 upward when the carrier board arrival detection device 40 is triggered. When the integrated circuit carrier board hopper 1 is a unloading hopper, the control logic can be reversed compared to the loading hopper. This allows for a non-contact detection method, which not only avoids interference with the loading and unloading of carrier boards but also prevents damage to the carrier boards.

[0043] Specifically, the carrier board arrival detection device 40 can also be connected to an empty bin reminder device. When the carrier platform 20 rises to the highest position and the carrier board arrival detection device 40 is still not triggered, it means that there are no carrier boards on the carrier platform 20. The empty bin reminder device can issue a reminder to remind the operator to replenish the integrated circuit carrier board hopper 1.

[0044] More specifically, such as Figures 1-3 As shown, the hopper body 10 is equipped with a lifting guide rail 11, and the support platform 20 is equipped with a lifting slider 21, which is slidably mounted on the lifting guide rail 11. In this way, the lifting guide rail 11 and the lifting slider 21 can be used to position and guide the lifting of the support platform 20, thereby improving the stability and reliability of the support platform 20 during lifting.

[0045] Figures 1-3 An integrated circuit substrate hopper 1 according to some examples of the present invention is shown. For example... Figures 1-3 As shown, the integrated circuit carrier hopper 1 also includes multiple carrier plate limiting rods 50. Each carrier plate limiting rod 50 is movably mounted on the hopper body 10, and is adapted to stop the carrier plate on the support platform 20 in the horizontal direction. The support platform 20 is provided with multiple clearance grooves 23 for avoiding the carrier plate limiting rods 50. In this way, the carrier plate limiting rods 50 can be used to stop the carrier plate and limit its position, preventing the carrier plate from swinging randomly on the support platform 20, and improving the accuracy of the gripping device when picking up and placing the carrier plate. The position of the carrier plate limiting rods 50 can be adjusted by moving them, so that the carrier plate limiting rods 50 can be compatible with carrier plates of different sizes, improving the applicability of the integrated circuit carrier hopper 1.

[0046] Advantageously, such as Figure 1 and Figure 2 As shown, the inner bottom surface of the hopper body 10 is provided with multiple damping guide rails 22, and the lower end of each carrier plate limiting rod 50 is provided with a damping slider 51. The multiple damping sliders 51 are slidably disposed on the multiple damping guide rails 22. In this way, not only can the movement of the carrier plate limiting rod 50 be positioned and guided by the damping guide rails 22 and the damping sliders 51, but the damping effect of the damping guide rails 22 and the damping sliders 51 can also be used to restrict the free movement of the carrier plate limiting rod 50, thereby improving the limiting effect of the carrier plate limiting rod 50 on the carrier plate.

[0047] Specifically, such as Figure 3As shown, the multiple carrier plate limiting rods 50 include multiple front limiting rods 52, multiple rear limiting rods 53, multiple left limiting rods 54, and multiple right limiting rods 55. The front limiting rods 52 are located at the front of the hopper body 10 and are adapted to stop the front edge of the carrier plate; the front limiting rods 52 can move in the front-back direction. The rear limiting rods 53 are located at the rear of the hopper body 10 and are adapted to stop the rear edge of the carrier plate; the rear limiting rods 53 can move in the front-back direction. The left limiting rods 54 are located at the left side of the hopper body 10 and are adapted to stop the left edge of the carrier plate; the left limiting rods 54 can move in the front-back direction. The right limiting rods 55 are located at the right side of the hopper body 10 and are adapted to stop the right edge of the carrier plate; the right limiting rods 55 can move in the left-right direction. This not only allows the front limit rod 52, rear limit rod 53, left limit rod 54, and right limit rod 55 to restrict the displacement of the carrier plate in four directions respectively, but also allows the carrier plate limiting rod 50 to be moved to adjust the distance between the front limit rod 52 and the rear limit rod 53, the distance between the left limit rod 54 and the right limit rod 55, and the position of the left limit rod 54 in the front-back direction. This enables the carrier plate limiting rod 50 to restrict carrier plates of different sizes, improving the applicability of the integrated circuit carrier plate hopper 1.

[0048] More advantageously, such as Figures 1-3 As shown, the integrated circuit carrier hopper 1 also includes a double-panel partition 60, which is detachably installed inside the hopper body 10 and is suitable for dividing the space inside the hopper body 10 into a front compartment and a rear compartment. This allows the double-panel partition 60 to be installed inside the hopper body 10 when the carrier size is less than half the size of the support platform 20, dividing the hopper body 10 into a front compartment and a rear compartment, so that carriers can be placed in both the front and rear compartments, increasing the number of carriers that the integrated circuit carrier hopper 1 can hold. When the carrier size is larger, the double-panel partition 60 can be removed, and the carriers can be stacked using the entire support platform 20, making it suitable for larger carriers and improving the applicability of the integrated circuit carrier hopper 1.

[0049] Figure 1 and Figure 2 An integrated circuit substrate hopper 1 according to some examples of the utility model is shown. For example... Figure 1 and Figure 2 As shown, the integrated circuit carrier substrate hopper 1 also includes a hopper base 70. The hopper body 10 is disposed in the hopper base 70 in a push-pull manner, and a handle 12 is provided on the rear surface of the hopper body 10. This allows the hopper body 10 to be pulled out from the hopper base 70 during loading and unloading, and then pushed back into the hopper base 70 after the carrier substrate is placed or removed, thus facilitating the loading and unloading of the carrier substrate.

[0050] Specifically, the integrated circuit substrate hopper 1 further includes a hopper closure detection device and a hopper closure limiting device 80. The hopper closure detection device is mounted on the hopper base 70 and is triggered when the hopper body 10 is pushed into the hopper base 70. The hopper closure detection device is electrically connected to the hopper closure limiting device 80. The hopper closure limiting device 80 includes a limiting block and a limiting drive device. The limiting block can move up and down between a limiting position and a clearance position. In the limiting position, the limiting block abuts against the lower surface of the hopper body 10 to restrict the forward and backward movement of the hopper body 10. In the clearance position, the limiting block disengages from the hopper body 10 to allow the hopper body 10 to move forward and backward. The limiting drive device is mounted on the hopper base and is drively connected to the limiting block. Specifically, the limiting drive device can be a cylinder. This allows the hopper body 10 to be locked in place after the operator pushes it back into the hopper seat 70. Upon detection, the hopper closing detection device then controls the hopper closing limit device 80 to raise the limit block, locking the hopper body 10 and preventing it from moving arbitrarily. This ensures the accuracy of the gripping device's position when picking up or placing the loading plate. When loading or unloading is required, the hopper closing limit device 80 lowers the limit block, allowing the hopper body 10 to be pulled out.

[0051] The following describes an integrated circuit carrier board testing device according to an embodiment of the present invention. The integrated circuit carrier board testing device according to an embodiment of the present invention includes an integrated circuit carrier board hopper 1 according to the above embodiment of the present invention.

[0052] The integrated circuit carrier board testing equipment according to the embodiments of the present invention has the advantages of high automation and high reliability by utilizing the integrated circuit carrier board hopper 1 according to the above embodiments of the present invention.

[0053] Other components and operations of the integrated circuit carrier board testing equipment according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0054] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0055] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An integrated circuit substrate hopper, characterized in that, include: Main body of the silo; A support platform is provided, which can be raised and lowered within the main body of the silo, and the support platform is suitable for placing a carrier plate; A lifting drive device is mounted on the main body of the silo and is connected to the support platform in a transmission manner. A plate arrival detection device is provided on the main body of the silo and is configured to be triggered by a plate that has reached a predetermined height. The plate arrival detection device is electrically connected to the lifting drive device. A hopper seat, wherein the hopper body is disposed in the hopper seat in a way that can be pushed and pulled back and forth, and a handle is provided on the rear surface of the hopper body; A silo closing detection device and a silo closing limit device are provided. The silo closing detection device is mounted on the silo base. When the silo body is pushed into the silo base, the silo closing detection device is triggered. The silo closing detection device is electrically connected to the silo closing limit device. The silo closing limit device includes a limit block and a limit drive device. The limit block can move up and down between a limit position and a clearance position. When the limit block is in the limit position, it abuts against the lower surface of the silo body to restrict the forward and backward movement of the silo body. When the clearance position is in the clearance position, the limit block disengages from the silo body to allow the silo body to move forward and backward. The limit drive device is mounted on the silo base and is drivenly connected to the limit block.

2. The integrated circuit carrier hopper according to claim 1, characterized in that, The carrier plate positioning detection device is a through-beam sensor and is located at the upper end of the opposite two side walls of the silo body.

3. The integrated circuit carrier hopper according to claim 2, characterized in that, The hopper body is equipped with a lifting guide rail, and the support platform is equipped with a lifting slider, which is slidably mounted on the lifting guide rail.

4. The integrated circuit carrier hopper according to claim 1, characterized in that, It also includes multiple plate limiting rods, each of which is movable left and right or back and forth on the main body of the hopper and is adapted to stop the plate on the support platform in the horizontal direction. The support platform is provided with multiple clearance grooves for avoiding the plate limiting rods.

5. The integrated circuit substrate hopper according to claim 4, characterized in that, The inner bottom surface of the silo body is provided with multiple damping guide rails, and the lower end of each of the carrier plate limiting rods is provided with a damping slider. The multiple damping sliders are slidably disposed on the multiple damping guide rails.

6. The integrated circuit substrate hopper according to claim 4, characterized in that, The plurality of said carrier plate limiting rods include: Multiple front limit rods are provided at the front of the hopper body and are adapted to stop the front edge of the carrier plate. The front limit rods can move in the front-back direction. Multiple rear limiting rods are provided at the rear of the hopper body and are adapted to stop the rear edge of the loading plate. The rear limiting rods can move in the front-back direction. Multiple left limiting rods are provided on the left side of the main body of the hopper and are adapted to the left edge of the stop plate. The left limiting rods can move in the front-back direction. Multiple right limit rods are provided, which are located on the right side of the hopper body and are adapted to the right edge of the stop plate. The right limit rods can move in the left and right directions.

7. The integrated circuit carrier hopper according to claim 1, characterized in that, It also includes a double partition, which is detachably installed inside the silo body and is suitable for dividing the space inside the silo body into a front compartment and a rear compartment.

8. An integrated circuit substrate testing device, characterized in that, Includes an integrated circuit carrier hopper according to any one of claims 1-7.

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