Bushing ring for accurately adjusting cover distance

Abstract

The utility model discloses a bushing ring capable of accurately adjusting a cover distance, which comprises a bushing ring main body, an adjusting ring is arranged at the bottom of the bushing ring main body, the inner part of the bushing ring main body is fixedly connected through a bolt, the adjusting ring is arranged at the bottom of the bushing ring main body, and adjusting screw rods are arranged in the bushing ring main body in an annular array manner. An adjusting assembly is arranged at the bottom of the adjusting screw rod, heat dissipation holes are formed in the lining ring body in an annular array mode, a connecting block is arranged on the outer side of the adjusting screw rod, an embedding groove is formed in the bottom of the connecting block, an embedding ring is arranged above the adjusting ring, and accurate cover distance adjustment can be achieved through combination of the adjusting screw rod and the adjusting assembly. The thermal field uniformity is guaranteed, the requirements of different applications are met, the distance between the device and the cover can be adjusted on the premise that the height of the thermal field is not changed, the adjusting ring and the embedded ring are connected in a nested mode, the connecting block and the embedded groove are matched, stable combination of all components is guaranteed, and possible looseness or deviation in the adjusting process is reduced.

Description

Technical Field

[0001] This utility model belongs to the technical field of single crystal furnaces, specifically relating to a bushing for precisely adjusting the gap between the cover and the furnace cover. Background Technology

[0002] A single crystal furnace is a device used to produce single crystal materials, mainly for manufacturing single crystal silicon. These materials are very important in the semiconductor industry. By controlling conditions such as temperature and atmosphere, the single crystal furnace allows raw materials to gradually crystallize into a single crystal structure within the furnace. The Czochralski method is currently a commonly used method for growing single crystals. Its working principle is to place the raw materials that make up the crystal in a crucible and heat them to melt. A seed crystal is attached to the surface of the melt and the melt is pulled up. Under controlled conditions, the atoms or molecules of the seed crystal and the melt are continuously rearranged at the interface. As the temperature drops, the melt gradually solidifies and grows into a single crystal. The purpose of this invention is to increase the uniformity of the thermal field.

[0003] However, the existing method of adjusting the furnace cover distance of a single crystal furnace mainly involves adjusting the number of layers of insulation felt to achieve a suitable furnace cover distance. However, this method can easily cause changes in the overall height of the thermal field, leading to abnormal growth of the internal single crystal and affecting product quality. Utility Model Content

[0004] The purpose of this invention is to provide a bushing for precisely adjusting the cover-plate distance, in order to solve the problem mentioned in the background art that the existing single crystal furnace cover-plate distance adjustment is mainly achieved by adjusting the number of layers of insulation felt to obtain a suitable cover-plate distance. However, this operation is prone to causing changes in the overall height of the thermal field, resulting in abnormal growth of the internal single crystal and affecting product quality.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a bushing for precisely adjusting the distance between the cover and the insert, comprising a bushing body;

[0006] An adjusting ring is provided at the bottom of the main body of the liner ring. The main body of the liner ring has a circular structure and is fixedly connected to the inside of the main body of the liner ring by bolts.

[0007] An adjusting ring is provided at the bottom of the main body of the bushing, and an adjusting screw is arranged in a ring array inside the main body of the bushing. An adjusting component is provided at the bottom of the adjusting screw.

[0008] Preferably, the inner ring body is provided with a ring array of heat dissipation holes, a connecting block is provided at the outer position of the adjusting screw, and a groove is provided at the bottom position of the connecting block.

[0009] Preferably, an insert ring is provided above the adjusting ring, the insert ring is nested and connected to the groove, and a bottom ring is provided at the bottom of the adjusting ring, the diameter of the bottom ring corresponding to the main body of the liner ring.

[0010] Preferably, an outer cylinder is provided at the outer side of the adjusting component, and the outer cylinder is bolted to the adjusting screw.

[0011] Preferably, a connecting component is provided at the bottom of the adjusting component, and an embedded ball is provided at the bottom of the connecting component.

[0012] Preferably, a buffer groove is provided at the outer position of the embedded ball, and an inner cavity corresponding to the embedded ball is opened inside the embedded ring, and the embedded ball and the embedded ring are rotatably connected.

[0013] Preferably, the main body of the adjusting ring and the liner ring is made of ceramic material, and the outer cylinder and the adjusting screw are made of steel material.

[0014] Compared with the prior art, the present invention provides a bushing for precisely adjusting the distance between the cover and the device, which has the following advantages:

[0015] 1. Through the arrangement of adjusting rings, adjusting screws, adjusting components, heat dissipation holes, connecting blocks, grooves, insert rings, bottom rings, and outer cylinders, precise cover distance adjustment can be achieved through the combination of adjusting screws and adjusting components, meeting the needs of different applications. The nested connection between the adjusting ring and the insert ring, as well as the cooperation between the connecting block and the groove, ensures a stable connection of each component, reducing possible loosening or deviation during adjustment. The heat dissipation holes inside the inner ring body effectively improve heat dissipation, preventing performance degradation or damage due to overheating. The bolted connection between the outer cylinder and the adjusting screw makes the overall structure compact and stable, reducing vibration and displacement. The design of the adjusting screw and adjusting components makes the adjustment process convenient, flexible, and easy to maintain. Fine adjustments can be achieved through simple rotation. The diameter of the bottom ring in the structure corresponds to that of the inner ring body, ensuring a perfect match and improving overall durability and stability. The heat dissipation holes not only improve heat dissipation efficiency but are also integrated into the inner ring body, avoiding the need for additional heat dissipation devices and simplifying design and installation.

[0016] 2. Through the design of the connecting components, embedded balls, and buffer grooves, the rotational connection between the embedded balls and the rings reduces friction and wear, making the adjustment components operate more smoothly. This design helps improve the accuracy and stability of the adjustment. The buffer groove on the outside of the embedded balls acts as a buffer, reducing the impact force generated during the adjustment process and minimizing the impact on other components, thereby improving the durability and long-term reliability of the system. The cooperation between the embedded balls and the rings makes the positioning of the adjustment components more accurate and enhances the stability of the overall structure. This design can effectively reduce errors caused by positional deviations during the adjustment process. The rotational connection design and the buffer function of the buffer grooves help reduce noise and vibration during the adjustment process and improve the smoothness of system operation. The contact surfaces of the embedded balls and rings are designed and optimized to help reduce wear and extend service life. The design of the buffer grooves and embedded balls makes the adjustment process smoother, reduces resistance during adjustment, and makes adjustment easier and more accurate. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this utility model.

[0018] Figure 2 This is a schematic diagram of the structure of the liner ring when it is open in this utility model.

[0019] Figure 3 This is a schematic diagram of the structure of the main body of the liner ring in this utility model.

[0020] Figure 4 This is a schematic diagram of the adjusting ring in this utility model.

[0021] Figure 5 This is a schematic diagram of the connecting component in this utility model.

[0022] In the diagram: 1. Liner ring body; 2. Adjusting ring; 3. Heat dissipation hole; 4. Adjusting screw; 5. Connecting block; 6. Adjusting component; 7. Insert groove; 8. Connecting component; 9. Insert ring; 10. Bottom ring; 11. Insert ball; 12. Soft groove; 13. Outer cylinder. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] This utility model provides, for example Figure 1-5 A bushing for a precise adjuster cover distance is shown, comprising a bushing body 1;

[0025] An adjusting ring 2 is provided at the bottom of the main body 1 of the liner ring. The main body 1 of the liner ring is a circular structure and is fixedly connected by bolts at the internal position of the main body 1 of the liner ring.

[0026] An adjusting ring 2 is provided at the bottom of the main body 1 of the bushing ring, and an adjusting screw 4 is arranged in a ring array inside the main body 1 of the bushing ring. An adjusting component 6 is provided at the bottom of the adjusting screw 4.

[0027] The inner ring body 1 has a ring array of heat dissipation holes 3, and a connecting block 5 is provided at the outer side of the adjusting screw 4. A groove 7 is provided at the bottom of the connecting block 5.

[0028] An insert ring 9 is provided at the upper position of the adjusting ring 2, and the insert ring 9 is nested and connected with the insert groove 7. A bottom ring 10 is provided at the bottom position of the adjusting ring 2, and the diameter of the bottom ring 10 corresponds to that of the liner ring body 1.

[0029] An outer cylinder 13 is provided on the outer side of the adjusting component 6, and the outer cylinder 13 is bolted to the adjusting screw 4.

[0030] A connecting component 8 is provided at the bottom of the adjusting component 6, and an embedded ball 11 is provided at the bottom of the connecting component 8.

[0031] A buffer groove 12 is provided on the outer side of the ball 11, and an inner cavity corresponding to the ball 11 is opened inside the ring 9. The ball 11 and the ring 9 are rotatably connected.

[0032] The adjusting ring 2 and the main body 1 of the liner ring are made of ceramic material, while the outer cylinder 13 and the adjusting screw 4 are made of steel material.

[0033] In this embodiment, the specific implementation steps of a bushing for precisely adjusting the cover distance are as follows: The adjusting screw 4 is installed into the connecting block 5 inside the bushing body 1. The bottom of the adjusting screw 4 is connected to the adjusting assembly 6. Ensure that the outer connecting block 5 of the adjusting screw 4 is installed and bolted to the adjusting assembly 6. The bottom connecting assembly 8 of the adjusting assembly 6 must ensure good fit with the ball 11, and the ball 11 must move smoothly within the buffer groove 12. The adjusting ring 2 is installed at the bottom of the bushing body 1. The upper ring 9 of the adjusting ring 2 is nested with the groove 7 to ensure stability. A bottom ring 10 is installed at the bottom of the adjusting ring 2, and the diameter of the bottom ring 10 should match that of the bushing body 1. The cover distance is precisely adjusted using the adjusting screw 4. Adjustments are made by rotating the adjusting screw according to the required cover distance. Confirm that all components are securely installed, and that the movement of the adjusting assembly and the rotation of the ball and ring are smooth. Ensure that the heat dissipation hole 3 is properly positioned to effectively dissipate heat. Conduct preliminary testing to check the adjustment effect and stability, ensuring that the adjuster can operate normally under actual working conditions.

[0034] like Figure 1-4As shown, an adjusting ring 2 is provided at the bottom of the bushing body 1. An adjusting screw 4 is arranged in a ring array inside the bushing body 1. An adjusting component 6 is provided at the bottom of the adjusting screw 4. A heat dissipation hole 3 is arranged in a ring array inside the bushing body 1. A connecting block 5 is provided at the outside of the adjusting screw 4. A groove 7 is provided at the bottom of the connecting block 5. An embedded ring 9 is provided above the adjusting ring 2. The embedded ring 9 and the groove 7 are nested together. A bottom ring 10 is provided at the bottom of the adjusting ring 2. The diameter of the bottom ring 10 corresponds to that of the bushing body 1. An outer cylinder 13 is provided at the outside of the adjusting component 6. The outer cylinder 13 is bolted to the adjusting screw 4.

[0035] Preferably, the combination of adjusting screw 4 and adjusting component 6 enables precise adjustment of the cover distance to meet the needs of different applications. The nested connection between adjusting ring 2 and insert ring 9, and the cooperation between connecting block 5 and groove 7, ensure a stable connection of each component, reducing possible loosening or deviation during adjustment. The heat dissipation holes 3 inside the liner ring body 1 effectively improve heat dissipation and prevent performance degradation or damage due to overheating. The bolted connection between the outer cylinder 13 and adjusting screw 4 makes the overall structure compact and stable, reducing vibration and displacement. The design of adjusting screw 4 and adjusting component 6 makes the adjustment process convenient, flexible, and easy to maintain. Fine adjustment can be achieved through simple rotation. The diameter of bottom ring 10 in the structure corresponds to that of liner ring body 1, ensuring a perfect match with liner ring body 1 and improving overall durability and stability. The setting of heat dissipation holes 3 not only improves heat dissipation efficiency but is also integrated into the liner ring body 1, avoiding additional heat dissipation devices and simplifying design and installation.

[0036] like Figure 4 and Figure 5 As shown, a connecting component 8 is provided at the bottom of the adjusting component 6, a ball 11 is provided at the bottom of the connecting component 8, a buffer groove 12 is provided on the outer side of the ball 11, and an inner cavity corresponding to the ball 11 is opened inside the ring 9. The ball 11 and the ring 9 are rotatably connected.

[0037] Preferably, the rotary connection between the ball 11 and the ring 9 reduces friction and wear, making the adjustment component 6 operate more smoothly. This design helps improve the accuracy and stability of the adjustment. The buffer groove 12 on the outside of the ball 11 acts as a buffer, reducing the impact force generated during the adjustment process and reducing the impact on other components, thereby improving the durability and long-term reliability of the system. The cooperation between the ball 11 and the ring 9 makes the positioning of the adjustment component more accurate and enhances the stability of the overall structure. This design can effectively reduce the error caused by positional offset during the adjustment process. The rotary connection design and the buffer function of the buffer groove 12 help reduce noise and vibration during the adjustment process and improve the smoothness of system operation. The contact surfaces of the ball 11 and the ring 9 are designed and optimized to help reduce wear and extend service life. The design of the buffer groove 12 and the ball 11 makes the adjustment process smoother, reduces the resistance during adjustment, and makes the adjustment easier and more accurate.

[0038] like Figure 1-5 As shown, the adjusting ring 2 and the main body 1 of the liner ring are made of ceramic material, while the outer cylinder 13 and the adjusting screw 4 are made of steel material.

[0039] Optionally, the wear resistance and high-temperature properties of ceramic materials complement the high strength and rigidity of steel materials, enabling the regulating components to perform well under various operating conditions. Combining the advantages of ceramic and steel materials can provide higher system stability and durability, making it suitable for complex operating environments. The combination of ceramic and steel improves the overall performance of the regulating components, including wear resistance, thermal stability and mechanical strength, ensuring regulating accuracy and long-term reliability.

[0040] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A bushing for a precise adjuster cover distance, comprising a bushing body (1); An adjusting ring (2) is provided at the bottom of the main body (1). The main body (1) is circular. The inner part of the main body (1) is fixedly connected by bolts. Its features are: An adjusting ring (2) is provided at the bottom of the main body (1) of the liner ring, and an adjusting screw (4) is arranged in a ring array inside the main body (1). An adjusting component (6) is provided at the bottom of the adjusting screw (4).

2. The bushing for a precise adjuster cover distance according to claim 1, characterized in that: The inner ring body (1) is provided with heat dissipation holes (3) in an annular array. A connecting block (5) is provided at the outer side of the adjusting screw (4). A groove (7) is provided at the bottom of the connecting block (5).

3. The bushing for a precise adjuster cover distance according to claim 2, characterized in that: An insert ring (9) is provided above the adjusting ring (2), and the insert ring (9) is nested and connected to the groove (7). A bottom ring (10) is provided at the bottom of the adjusting ring (2), and the diameter of the bottom ring (10) corresponds to that of the liner ring body (1).

4. The bushing for a precise adjuster cover distance according to claim 3, characterized in that: An outer cylinder (13) is provided on the outer side of the adjustment component (6), and the outer cylinder (13) is bolted to the adjustment screw (4).

5. The bushing for a precise adjuster cover distance according to claim 4, characterized in that: A connecting component (8) is provided at the bottom of the adjusting component (6), and a ball (11) is provided at the bottom of the connecting component (8).

6. The bushing for a precise adjuster cover distance according to claim 5, characterized in that: A buffer groove (12) is provided on the outer side of the ball (11), and an inner cavity corresponding to the ball (11) is opened inside the ring (9). The ball (11) and the ring (9) are rotatably connected.

7. A bushing for a precise adjuster cover distance according to claim 6, characterized in that: The adjusting ring (2) and the liner ring body (1) are made of ceramic material, and the outer cylinder (13) and the adjusting screw (4) are made of steel material.

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