Tool for oxidation

Abstract

The tool for oxidation comprises a containing body, a containing groove is formed in the containing body, and the containing groove is used for containing raw materials for oxidation; a ventilation protrusion is formed in the containing body and located at the bottom of the containing groove, the ventilation protrusion is provided with a ventilation channel, the ventilation channel penetrates through the ventilation protrusion in the extending direction of the containing body and further communicates with the two sides, in the extending direction of the containing body, of the containing body, and a plurality of ventilation holes communicating with the containing groove are formed in the ventilation protrusion. The vent holes are further communicated with the ventilation channel. Through the arrangement, the oxidation rate and the oxidation effect of the tool for oxidation can be improved, and the problem that raw materials for oxidation are difficult to fully oxidize is solved.

Description

Technical Field

[0001] This application relates to the field of powder oxidation, and in particular to tooling for oxidation. Background Technology

[0002] The silicon carbide crystal growth process includes high-purity SiC powder synthesis, seed crystal development, crystal growth, cutting, grinding and polishing, and cleaning and inspection. The quality of high-purity SiC powder synthesis affects the quality of silicon carbide crystal growth. The high-purity SiC powder synthesis process includes a raw material synthesis stage and a raw material oxidation stage. After the raw material synthesis stage, the silicon carbide powder may have excessive carbon content, which can cause carbon encapsulation defects in the grown crystal. Therefore, after the raw material synthesis stage, raw material oxidation is required to remove excess carbon atoms from the silicon carbide powder. However, silicon carbide powder has poor permeability, and the oxidizing gas introduced from the silicon carbide distribution surface usually cannot reach the silicon carbide powder at the bottom. Therefore, existing oxidation tooling is difficult to achieve complete oxidation of the silicon carbide powder at the bottom, making it difficult to fully oxidize the silicon carbide powder. Utility Model Content

[0003] In order to overcome the shortcomings of the prior art, the purpose of this application is to provide an oxidation tooling that can fully oxidize the raw materials used for oxidation.

[0004] To achieve the above objectives, this application adopts the following technical solution:

[0005] An oxidation fixture includes a holding body with a receiving groove for holding raw materials for oxidation; a venting protrusion is formed within the holding body and is located at the bottom of the receiving groove; the venting protrusion has a venting channel extending through it along the extension direction of the holding body; the venting channel is also connected to both sides of the holding body along its extension direction; and the venting protrusion has a plurality of venting holes communicating with the receiving groove and the venting holes are also connected to the venting channel.

[0006] Furthermore, multiple vent holes are evenly distributed on the vent protrusion.

[0007] Furthermore, the outer surface of the venting protrusion is a curved surface that protrudes towards the opening of the receiving groove.

[0008] Furthermore, the inner wall of the airway is shaped to match the outer surface of the airway protrusion.

[0009] Furthermore, the bottom surface of the receiving tank is a concave curved surface that extends away from the opening of the receiving tank, and the bottom surface of the holding body is a concave curved surface that extends away from the opening of the receiving tank. The radius of curvature of the bottom surface of the receiving tank and the radius of curvature of the bottom surface of the holding body are the same.

[0010] Furthermore, the holding body includes a receiving part and two closed parts, with a receiving groove opened in the receiving part; the two closed parts are distributed on both sides of the receiving part along the extension direction of the holding body, and both closed parts are integrally formed or fixedly connected to the receiving part.

[0011] Furthermore, the two ends of the ventilation duct are respectively inserted into the two sealed parts so that the ventilation duct is connected to the two sealed parts.

[0012] Furthermore, each of the two closed sections is provided with at least one connecting hole, and each connecting hole connects the receiving groove to the outside of the containing body.

[0013] Furthermore, the tooling for oxidation also includes: a holding cover, which covers the opening of the receiving tank and is connected to the holding body; the holding cover forms a cover groove, which is used to hold the raw materials for oxidation.

[0014] Furthermore, the bottom surface of the cover tank is flat to hold crystalline oxidation raw materials; or the bottom surface of the cover tank is a curved surface that is concave towards the holding body to hold powdered oxidation raw materials; both the holding body and the holding cover are made of quartz.

[0015] The aforementioned oxidation fixture has a venting protrusion at the bottom of the receiving tank, and venting holes are evenly distributed on the surface of the venting protrusion. By utilizing the venting protrusion and venting holes, the oxidizing gas is transmitted to the bottom of the raw material for oxidation throughout the entire receiving tank to the maximum extent possible. This allows for rapid oxidation of the raw material, improving the oxidation rate and effect of the oxidation fixture, and solving the problem of insufficient oxidation of the raw material. Attached Figure Description

[0016] Figure 1 This is an overall structural diagram of the holding section provided in an embodiment of this application.

[0017] Figure 2 This is a partial view of the oxidation fixture provided in the embodiments of this application placed in the oxidation furnace.

[0018] Figure 3 This is an overall structural diagram of the oxidation tooling provided in the embodiments of this application.

[0019] Figure 4 This is an overall structural diagram of the closure portion provided in an embodiment of this application.

[0020] Figure 5 This is an overall structural diagram of the container cover provided in an embodiment of this application.

[0021] Explanation of reference numerals in the attached drawings: 100, tooling for oxidation; 11, container body; 111, receiving part; 1111, receiving groove; 1112, venting protrusion; 1112a, vent hole; 1112b, venting channel; 112, sealing part; 1121, connecting hole; 12, container cover; 121, cover groove; 200, oxidation furnace. Detailed Implementation

[0022] To enable those skilled in the art to better understand the present application, the technical solutions in specific embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. It should be noted that the terms "first," "second," and similar terms used in this specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, "a" or "one," and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. "A plurality" or "several" indicates at least two. Unless otherwise stated, terms such as "front," "back," "left," "right," "lower," and / or "upper" are for ease of explanation only and are not limited to a location or spatial orientation. Terms such as "comprising" or "including" indicate that the elements or objects preceding "comprising" encompass the elements or objects listed following "comprising" or "including" and their equivalents, and do not exclude other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect.

[0023] The singular forms “a,” “the,” and “the” used in this application specification and appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0024] like Figure 1 and Figure 2 As shown, this application provides an oxidation fixture 100 for holding oxidation raw materials and capable of being placed inside an oxidation furnace 200 so that the oxidation raw materials can be oxidized. The oxidation fixture 100 includes a holding body 11, which constitutes the basic body of the oxidation fixture 100 and serves as an oxidation container for the oxidation raw materials. In use, the holding body 11 containing the oxidation raw materials is placed inside the oxidation furnace 200 so that the oxidation raw materials in the holding body 11 undergo an oxidation reaction and impurities are removed. The oxidation raw materials can be SiC powder, etc.

[0025] To clearly illustrate the technical solution of this application, the following are also defined: Figure 1The front, back, left, right, top, and bottom directions are shown to indicate the front, back, left, right, top, and bottom of the oxidation fixture 100.

[0026] Specifically, the container body 11 has a receiving tank 1111 for holding the raw material for oxidation. A venting protrusion 1112 is formed inside the container body 11, located at the bottom of the receiving tank 1111, and is capable of conveying oxidizing gas into the receiving tank 1111. Through this arrangement, the venting protrusion 1112 at the bottom of the receiving tank 1111 guides the oxidizing gas into the bottom of the receiving tank 1111, causing the oxidizing gas to react with the raw material for oxidation at the bottom of the receiving tank 1111, thus solving the problem of insufficient oxidation of the raw material.

[0027] More specifically, the venting protrusion 1112 has a venting channel 1112b, which extends through the venting protrusion 1112 along the extending direction of the containing body 11, and is also connected to both sides of the containing body 11 along its extending direction. Through this arrangement, oxidizing gas can be transported from the outside into the venting protrusion 1112, allowing the oxidizing raw material to undergo an oxidation reaction with the oxidizing gas. In this application, the extending direction of the containing body 11 is the front-rear direction of the oxidation tooling 100.

[0028] In this embodiment, the venting protrusion 1112 has multiple vent holes 1112a communicating with the receiving groove 1111, and the vent holes 1112a also communicate with the venting channel 1112b. The vent holes 1112a are used to connect the venting channel 1112b and the receiving groove 1111, thereby transferring the oxidizing gas in the venting channel 1112b to the receiving groove 1111. Specifically, the above arrangement allows the oxidizing gas to be transported to the bottom of the receiving groove 1111, thereby allowing the oxidizing raw material located at the bottom of the receiving groove 1111 to react fully. The arrangement of multiple vent holes 1112a on the venting protrusion 1112 allows for more thorough contact between the oxidizing gas and the oxidizing raw material contained in the receiving groove 1111, improving the oxidation efficiency and effect of the oxidizing raw material.

[0029] As one implementation, multiple vent holes 1112a are evenly distributed on the vent protrusion 1112. Through the above arrangement, the evenly distributed vent holes 1112a transmit the oxidizing gas flowing in the vent 1112b to various points at the bottom of the receiving tank 1111, so that the oxidizing gas can evenly contact and react with the oxidizing raw materials at various points at the bottom of the receiving tank 1111, thereby avoiding the occurrence of insufficient oxidation of local oxidizing materials.

[0030] As one implementation, the outer surface of the vent protrusion 1112 is a curved surface that protrudes towards the opening of the receiving tank 1111. This configuration increases the contact area with the oxidation material held at the bottom of the receiving tank 1111, thereby increasing the contact area between the vent 1112a and the oxidation material, achieving more thorough contact between the oxidizing gas and the oxidation material, and improving the oxidation efficiency of the oxidation material. In this application, the surface of the vent protrusion 1112 protrudes upwards towards the opening of the receiving tank 1111.

[0031] As one implementation, the inner wall of the vent 1112b has the same shape as the outer surface of the vent protrusion 1112. The vent 1112b is located inside the vent protrusion 1112. By setting the inner wall of the vent 1112b to have the same shape as the outer surface of the vent protrusion 1112, the volume of the vent 1112b can be increased, thereby increasing the volume of oxidizing gas transported by the vent 1112b per unit time. This allows more oxidizing gas to come into contact with the raw material for oxidation through the vent hole 1112a, improving the oxidation efficiency of the raw material per unit time.

[0032] As one implementation, the bottom surface of the receiving tank 1111 is a curved surface concave towards the opening of the receiving tank 1111, and the bottom surface of the holding body 11 is also a curved surface concave towards the opening of the receiving tank 1111. The radius of curvature of the bottom surface of the receiving tank 1111 and the radius of curvature of the bottom surface of the holding body 11 are the same. First, in this application, since the oxidation furnace 200 is cylindrical, the bottom shape of the holding body 11 is curved, which can better fit the shape of the oxidation furnace 200. In particular, when the oxidation tooling 100 is placed in the oxidation furnace 200, the contact area between the holding body 11, whose outer surface is curved, and the oxidation furnace 200 is larger, improving the stability of the holding body 11 placed in the oxidation furnace 200. Second, the above configuration can also increase the volume of the receiving tank 1111, allowing the receiving tank 1111 to hold more oxidation raw materials.

[0033] like Figure 3 and Figure 4 As shown, in one implementation, the holding body 11 includes a receiving portion 111 and two closing portions 112. A receiving groove 1111 is formed in the receiving portion 111, and the two closing portions 112 are distributed on both sides of the receiving portion 111 along the extending direction of the holding body 11. Both closing portions 112 are integrally formed or fixedly connected to the receiving portion 111. This arrangement improves the sealing performance of the receiving groove 1111, allowing the oxidation raw material to be placed more stably within the receiving groove 1111. Simultaneously, the integral forming or fixed connection between the receiving portion 111 and the closing portions 112 ensures the connection strength or structural strength of the holding body 11, thereby reducing the probability of breakage or shaking during the use of the oxidation tooling 100, thus balancing the stability and portability of the holding body 11.

[0034] Specifically, the two ends of the ventilation duct 1112b are respectively inserted into the two sealing parts 112, so that the ventilation duct 1112b is connected to the two sealing parts 112. Through the above arrangement, the oxidizing gas can be transmitted into the ventilation duct 1112b.

[0035] For example, in actual use, the connection between one sealed part 112 and the vent 1112b is designated as an air inlet. The connection between the other sealed part 112 and the vent 1112b is designated as an air outlet. The oxidizing gas is transported within the vent 1112b. After passing through the vent holes 1112a arranged on the vent 1112b, the flowing oxidizing gas comes into contact with the oxidizing raw material located at the bottom of the receiving tank 1111 and undergoes a sufficient reaction. This increases the contact area between the oxidizing gas and the oxidizing raw material at the bottom of the receiving tank 1111, thereby improving the oxidation quality and efficiency of the oxidizing raw material at the bottom of the receiving tank 1111.

[0036] More specifically, each of the two closed sections 112 is provided with at least one connecting hole 1121, and each connecting hole 1121 connects the receiving tank 1111 to the outside of the holding body 11. The connecting hole 1121 is provided on the closed section 112 (for example, near the top of the closed section 112). The connecting hole 1121 on one closed section 112 is used to input oxidizing gas, and the connecting hole 1121 on the other closed section 112 is used to discharge oxidizing gas. The oxidizing gas enters the holding body 11 from the outside of the holding section through the connecting hole 1121, and then exits from the holding body 11 to the external environment. With the above arrangement, the oxidizing gas can flow on the upper side of the holding body 11 and react with the oxidizing raw material located at the top of the receiving tank 1111. The connecting hole 1121 on the closed part 112 and the vent protrusion 1112 at the bottom of the receiving tank 1111 cooperate with each other to allow the oxidizing gas to come into contact with the oxidizing raw material in the receiving tank 1111 from the upper and lower sides, thereby increasing the contact area between the oxidizing gas and the oxidizing raw material and improving the reaction efficiency of the oxidizing raw material.

[0037] like Figure 2 and Figure 5 As shown, in one implementation, the oxidation fixture 100 also includes a container cover 12. The container cover 12 covers the opening of the receiving tank 1111 and is connected to the receiving body 11, used to seal the receiving body 11. The container cover 12 covers the opening of the receiving tank 1111, forming a reaction space for the oxidation raw material with the receiving tank 1111. Through the above arrangement, the oxidizing gas can stably enter from one side of the receiving body 11 and exit from the other side, reducing the possibility of the oxidizing gas escaping from the opening of the receiving tank 1111 after entering the receiving body 11, ensuring the stability of the oxidizing gas flow, and improving the efficiency of the oxidation raw material reaction.

[0038] In this embodiment, the holding cover 12 has a cover groove 121 for holding the raw materials for oxidation. The cover groove 121 allows the holding cover 12 to also hold the raw materials for oxidation, increasing the amount of raw materials that can be held in the holding body 11. The oxidation fixture 100 is placed inside the oxidation furnace 200, and oxidizing gas flows above the holding cover 12. Through this arrangement, the utilization rate of the oxidizing gas is improved, and the amount of raw materials that the oxidation fixture 100 can process at one time is increased, thereby improving the oxidation efficiency of the raw materials.

[0039] In one implementation, the bottom surface of the cover tank 121 is flat to hold crystalline oxidizing materials. The internal friction and cohesive force between the crystalline oxidizing materials are low, as is the friction between them and the bottom surface of the cover tank 121. The flat bottom surface of the cover tank 121 prevents the crystalline oxidizing materials from rolling or sliding within it, allowing them to be spread evenly and smoothly within the cover tank 121. This ensures sufficient contact between the oxidizing materials and the oxidizing gas flowing above the cover tank 121, improving the reaction efficiency of the oxidizing materials. It should be noted that when the bottom surface of the cover tank 121 is flat, it can also be used to hold powdered oxidizing materials.

[0040] As another implementation, the bottom surface of the cover tank 121 is a curved surface that is recessed towards the holding body 11 to hold powdered oxidation raw materials. When the bottom surface of the cover tank 121 is set as a curved surface that is recessed towards the holding body 11, a larger volume of powdered oxidation raw materials can be held, increasing the amount of oxidation raw materials that the cover tank 121 can process in a single batch.

[0041] Specifically, both the container body 11 and the container cover 12 are made of quartz. Quartz has the advantage of high temperature resistance, and in this embodiment, the high temperature resistance range of the quartz material is greater than the ambient temperature of the oxidation furnace 200. Using quartz for the container body 11 and the container cover 12 will not contaminate the raw materials when they are used for oxidation and will reduce the influence of external factors on the reaction results of the raw materials.

[0042] It should be understood that those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims. The technical solutions described herein are clearly and completely presented.

Claims

1. An oxidation fixture (100) for holding raw materials for oxidation, characterized in that, The oxidation tooling (100) includes: A holding body (11) is formed with a receiving tank (1111) for holding raw materials for oxidation; A ventilation protrusion (1112) is formed inside the holding body (11). The ventilation protrusion (1112) is located at the bottom of the receiving groove (1111). The ventilation protrusion (1112) has a ventilation channel (1112b). The ventilation channel (1112b) extends through the ventilation protrusion (1112) along the extension direction of the holding body (11). The ventilation channel (1112b) is also connected to both sides of the holding body (11) along its extension direction. The ventilation protrusion (1112) has a plurality of ventilation holes (1112a) that communicate with the receiving groove (1111). The ventilation holes (1112a) are also connected to the ventilation channel (1112b).

2. The tooling (100) for oxidation according to claim 1, characterized in that, Multiple ventilation holes (1112a) are evenly distributed on the ventilation protrusion (1112).

3. The tooling (100) for oxidation according to claim 1, characterized in that, The outer surface of the ventilation protrusion (1112) is a curved surface that protrudes toward the opening of the receiving groove (1111).

4. The tooling (100) for oxidation according to claim 3, characterized in that, The inner wall of the ventilation channel (1112b) has the same shape as the outer surface of the ventilation protrusion (1112).

5. The tooling (100) for oxidation according to claim 1, characterized in that, The bottom surface of the receiving groove (1111) is a curved surface that is concave away from the opening of the receiving groove (1111), and the bottom surface of the holding body (11) is a curved surface that is concave away from the opening of the receiving groove (1111). The radius of curvature of the bottom surface of the receiving groove (1111) is the same as the radius of curvature of the bottom surface of the holding body (11).

6. The tooling (100) for oxidation according to claim 1, characterized in that, The container body (11) includes: A receiving portion (111), wherein the receiving groove (1111) is formed in the receiving portion (111); Two closures (112) are distributed on both sides of the receiving part (111) along the extension direction of the holding body (11), and both closures (112) are integrally formed or fixedly connected to the receiving part (111).

7. The tooling (100) for oxidation according to claim 6, characterized in that, The two ends of the ventilation channel (1112b) are respectively inserted into the two sealing parts (112) so that the ventilation channel (1112b) is connected to the two sealing parts (112).

8. The tooling (100) for oxidation according to claim 6, characterized in that, Each of the two enclosures (112) is provided with at least one connecting hole (1121), and each connecting hole (1121) connects the receiving groove (1111) to the outside of the holding body (11).

9. The tooling (100) for oxidation according to claim 1, characterized in that, The oxidation tooling (100) also includes: A holding cover (12) covers the opening of the receiving groove (1111) and is connected to the holding body (11); The container cover (12) has a cover groove (121) for holding raw materials for oxidation.

10. The tooling (100) for oxidation according to claim 9, characterized in that, The bottom surface of the cover groove (121) is flat, so as to hold crystalline raw materials for oxidation; Alternatively, the bottom surface of the cover groove (121) may be a curved surface that is recessed into the holding body (11) to hold powdered oxidation raw materials; both the holding body (11) and the holding cover (12) are made of quartz material.

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