Cavity measuring tool of semiconductor growth equipment

Abstract

The utility model discloses a cavity measuring tool of semiconductor growth equipment, which comprises a base, and a second flexible buffer block is arranged at the abutting part of the base; a first flexible buffer block is arranged at the free end of the toggle clamp mechanism, and the free end of the toggle clamp mechanism drives the first flexible buffer block to move towards or away from the second flexible buffer block by operating the toggle clamp mechanism; the adjusting bracket is arranged on the base; the detection piece is movably arranged on the first adjusting piece so as to adjust the relative position with the first adjusting piece, the detection piece can be fixed on the cavity without being limited by the material of the cavity, the concentricity, the flatness and the like of the base in the cavity can be detected, the measurement point position can be flexibly adjusted on the cavity according to the measurement requirement through simple operation, and the measurement accuracy is improved. And the surface of the cavity is prevented from being damaged by collision.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor measurement equipment technology, and in particular to a cavity measurement fixture for a semiconductor growth equipment. Background Technology

[0002] Semiconductor growth equipment, such as MOCVD vapor deposition equipment, uses toxic, harmful, flammable, and explosive gases, such as group III organometallic compounds and group V compounds, as the source gases for the process growth. These source gases can easily remain inside the chamber. For safety reasons, the chamber needs to be disassembled and maintained inside a glove box.

[0003] Since the levelness and eccentricity of the substrate carrier used to support the substrate in the cavity are important factors affecting the quality of thin film growth, it is necessary to strictly control and measure whether the levelness and eccentricity of the substrate carrier installed in the cavity meet the requirements during the assembly of the cavity.

[0004] Operators disassemble and maintain the cavity through a glove box. After assembly, they operate a measuring fixture inside the glove box to measure the concentricity and levelness of the substrate carrier relative to the cavity. When the cavity material is mainly stainless steel or aluminum, magnetic measuring fixtures are difficult or even impossible to fix on the cavity. Vacuum chuck measuring fixtures are limited by the flat area of ​​the cavity surface, making it difficult to find a suitable point of application. Furthermore, since the measuring fixture is operated through the glove box, it is inconvenient to move the measuring fixture to change the measurement point, and it is easy to bump and damage the cavity surface.

[0005] Therefore, it is necessary to provide a new measurement fixture for semiconductor growth equipment to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0006] The purpose of this utility model is to provide a cavity measurement fixture for semiconductor growth equipment, which can be fixed on the cavity without being limited by the cavity material, and realize the detection of the concentricity, flatness and other properties of the substrate carrier in the cavity. Moreover, the measurement points can be flexibly adjusted on the cavity according to the measurement requirements through simple operation, and the cavity surface should be avoided from being damaged by bumps.

[0007] To achieve the above objectives, the technical solution of this utility model is as follows:

[0008] A cavity measurement fixture for a semiconductor growth apparatus, comprising:

[0009] The base includes an abutment portion, wherein the abutment portion is provided with a second flexible buffer block;

[0010] At least one elbow clamping mechanism is disposed on the top of the base. The free end of the elbow clamping mechanism is provided with a first flexible buffer block. The first flexible buffer block and the second flexible buffer block are opposite to each other and form a clamping space to accommodate the clamped part on the semiconductor growth equipment. By operating the elbow clamping mechanism, the free end of the elbow clamping mechanism drives the first flexible buffer block to move toward or away from the second flexible buffer block.

[0011] An adjustment bracket is disposed on the base. The adjustment bracket includes a first adjustment member and a second adjustment member that are rotatably connected to each other. The second adjustment member is movably disposed on the base to adjust its relative position with the base.

[0012] The detection element is movably disposed on the first adjusting element to adjust its relative position with the first adjusting element.

[0013] By adopting the above technical solution, since the base has a second flexible buffer block at the abutment part, the elbow clamp mechanism is located on the top of the base, and the free end of the elbow clamp mechanism has a first flexible buffer block, the first flexible buffer block and the second flexible buffer block are opposite to each other and form a clamping space for accommodating the clamped part on the semiconductor growth equipment, and the first flexible buffer block and the second flexible buffer block contact the clamped part to avoid bumping and damaging the cavity surface. The elbow clamp mechanism makes it easy to adjust the measurement point by operating the elbow clamp mechanism so that its free end can drive the first flexible buffer block toward or away from the second flexible buffer block to change the clamped part; the adjustment bracket is located on the base, and the adjustment bracket includes a first adjustment member and a second adjustment member that are rotatably connected to each other. The second adjustment member is movably located on the base to adjust the relative position with the base, and the detection member is movably located on the first adjustment member to adjust the relative position with the first adjustment member. This allows the measurement point to be flexibly adjusted by adjusting the relative positional relationship between the first adjustment member and the second adjustment member, and by adjusting the relative positional relationship between the detection member and the first adjustment member.

[0014] Optionally, the base includes a support body and an abutment portion. The support body is connected to one side wall of the abutment portion and extends in a direction away from the abutment portion. The elbow clamp mechanism is disposed on the top of the support body, and the free end of the elbow clamp mechanism is opposite to the abutment portion.

[0015] Optionally, the elbow clamp mechanism includes:

[0016] The support portion is fixedly installed on the top of the support body;

[0017] The abutting component includes a first connecting end and an abutting end, one end of the first connecting end is rotatably disposed at a first position on the top of the support portion, and the abutting end is provided with the first flexible buffer block;

[0018] The control handle includes a second connecting end, a protruding end, and a gripping end. The protruding end is located between the second connecting end and the gripping end. The second connecting end is rotatably disposed at the other end of the first connecting end. One end of the first connecting end and the other end of the first connecting end are radially opposite to each other along the first connecting end.

[0019] The locking member has one end rotatably disposed at a second position on the top of the support portion away from the abutment component, and the other end rotatably disposed at the protruding end of the control handle. The first position on the top of the support portion and the second position on the top of the support portion are radially opposite to each other along the support portion.

[0020] Optionally, the abutting component includes a first clamping member and a second clamping member. One end of the first clamping member includes the first connecting end and is disposed opposite to the abutting portion. The second clamping member is disposed on the first clamping member, and the free end of the second clamping member includes the abutting end.

[0021] Optionally, the second clamping member is slidably disposed along the extending direction of the first clamping member.

[0022] Optionally, the second flexible buffer block is provided with a plurality of buffer grooves for enhancing friction.

[0023] Optionally, the adjusting bracket further includes a positioning member, one end of the second adjusting member is disposed on the base, and the other end is connected to the first adjusting member; the positioning member passes through the second adjusting member and is movably disposed on the first adjusting member, so that the first adjusting member rotates relative to the second adjusting member around the positioning member.

[0024] Optionally, the second adjusting member is rotatably disposed on the base to rotate about the axial direction of the base, and to adjust the angle between the adjusting member and the base.

[0025] Optionally, at least one of the second adjusting member and the first adjusting member is a telescopic adjusting member with adjustable length.

[0026] Optionally, the first adjusting member is provided with a steering member to rotate around the first adjusting member, and the detection member includes a data display section and a roller probe fixedly arranged with each other, the roller probe being rotatably arranged on the steering member. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of a cavity measuring tool according to an embodiment of the present utility model;

[0028] Figure 2 for Figure 1Side view of the cavity measuring fixture shown;

[0029] Figure 3 for Figure 2 Enlarged view of section A in the middle;

[0030] Figure 4 This is a schematic diagram of another cavity measuring fixture according to an embodiment of the present invention;

[0031] Figure 5 This is a schematic diagram showing the assembly relationship between the cavity measuring tool and the cavity in an embodiment of this utility model.

[0032] Figure label:

[0033] 100. Base; 110. Support body; 120. Abutment part; 121. Second flexible buffer block; 122. Buffer groove; 200. Elbow clamping mechanism; 210. Support part; 211. First position; 212. Second position; 220. Abutment assembly; 221. First clamping member; 222. Second clamping member; 223. First flexible buffer block; 224. First connecting end; 225. Abutment end; 230. Control handle; 231. Second connecting end; 232. Protruding end; 233. Grip end; 240. Locking member; 300. Adjusting bracket; 310. First adjusting member; 320. Steering member; 330. Second adjusting member; 331. Fixed section; 332. Extension section; 340. Positioning member; 400. Detection member; 410. Data display part; 420. Roller probe; 500. Cavity; 510. Top edge. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0035] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings.

[0036] This invention provides a cavity measurement fixture for a semiconductor growth apparatus, wherein the semiconductor growth apparatus has a cavity 500. In some embodiments, the cavity 500 is a process cavity, and the cavity measurement fixture is used to detect the concentricity and levelness of components within the cavity 500, such as substrate carriers used to place wafers.

[0037] Reference Figure 1 , Figure 2 , Figure 3 and Figure 5 The cavity measuring fixture includes a base 100, which includes an abutment portion 120 and a second flexible buffer block 121. In some embodiments, the base 100 is used to clamp a protruding area at the top edge of the cavity 500, thereby fixing it to the cavity 500.

[0038] In some embodiments, a second flexible buffer block 121 is fixedly provided on the abutment portion 120. The fixing method can be adhesive, snap-fit ​​or bolt fixing, etc. There is no limitation in this embodiment, as long as the position of the second flexible buffer block 121 does not shift during the positioning process of the base 100.

[0039] The cavity measuring fixture further includes at least one elbow clamp mechanism 200, disposed on the top of the base 100. The free end of the elbow clamp mechanism 200 is provided with a first flexible buffer block 223. The first flexible buffer block 223 and a second flexible buffer block 121 are opposite to each other and form a clamping space to accommodate the clamped portion on the semiconductor growth equipment. By operating the elbow clamp mechanism 200, the free end of the elbow clamp mechanism 200 drives the first flexible buffer block 223 to move towards or away from the second flexible buffer block 121. In some embodiments, one or more elbow clamp mechanisms 200 may be provided. In this embodiment, two elbow clamp mechanisms 200 are selected, and their specific arrangement will be described later. The elbow clamp mechanism 200 is mainly used to adjust the relative position between the base 100 and the clamped portion, such as... Figure 5 The top edge 510 of the cavity 500 is shown. In some embodiments, under the action of the elbow clamping mechanism 200, the elbow clamping mechanism 200 clamps at different positions on the cavity 500, for example... Figure 5 Different positions of the top edge 510 are shown. Figure 5 The cavity 500 shown contains a substrate carrier (not shown in the figure). By adjusting the position of the elbow clamp mechanism 200 at the top edge 510 and in combination with the adjustment bracket 300, it can be fixed on the cavity 500 without being limited by the material of the cavity 500. This allows for the detection of the concentricity, flatness, etc. of the substrate carrier inside the cavity 500. Moreover, the measurement points can be flexibly adjusted on the cavity 500 according to the measurement requirements through simple operation.

[0040] The cavity measuring fixture also includes an adjusting bracket 300, which is disposed on the base 100. The adjusting bracket 300 includes a first adjusting member 310 and a second adjusting member 330 that are rotatably connected to each other. The second adjusting member 330 is movably disposed on the base 100 to adjust its relative position with the base 100.

[0041] The first adjusting member 310 is provided with a steering member 320 to rotate around the first adjusting member 310.

[0042] In some embodiments, the first adjusting member 310 can be rod-shaped, plate-shaped, or block-shaped, etc. In this embodiment, the first adjusting member 310 is selected to be rod-shaped. In some specific embodiments, the first adjusting member 310 is a round rod.

[0043] In some embodiments, the steering member 320 can be rod-shaped, plate-shaped, or block-shaped, etc. Specifically, in this embodiment, the steering member 320 is selected to be rod-shaped and round. The first adjusting member 310 and the steering member 320 are coaxially arranged, and the first adjusting member 310 and the steering member 320 are rotatably connected through a rotating shaft, so that the first adjusting member 310 and the steering member 320 can rotate relative to each other around the rotating shaft of the first adjusting member 310. The first adjusting member 310 is rotatably connected to the base 100 through a rotating shaft.

[0044] The cavity measuring fixture also includes a detection element 400, which is movably disposed on the first adjusting element 310 to adjust its relative position with the first adjusting element 310.

[0045] In some embodiments, a detection element 400 is rotatably mounted on one end of the steering member 320 away from the first adjusting member 310 via a rotating shaft. The detection element 400 is used to detect the component to be tested inside the cavity 500, such as a substrate carrier. The adjusting bracket 300 is used to adjust the position of the detection element 400.

[0046] In some more specific embodiments, the steering member 320 can rotate at the end of the first adjusting member 310. Specifically, the steering member 320 can rotate about the axis of the first adjusting member 310. The detection member 400 can rotate on the steering member 320. Specifically, the detection member 400 can rotate about the axis of the detection member 400 on the steering member 320, so that the detection member 400 can be displaced relative to the base 100 at different angles and in different directions, thereby detecting different positions of the component to be detected, such as the substrate carrier, in the cavity 500, and realizing the function of universal adjustment.

[0047] In some embodiments, the detection element 400 includes a data display section 410 and a roller probe 420 fixedly disposed together, with the roller probe 420 rotatably disposed on the steering element 320.

[0048] In some embodiments, refer to Figure 1 , Figure 2 and Figure 3 The detection component 400 includes a data display unit 410 and a roller probe 420. The data display unit 410 is fixed to the roller probe 420, and the roller probe 420 is rotatably mounted on the end of the steering component 320 away from the first adjusting component 310 via a rotating shaft. The roller probe 420 and the data display unit 410 cooperate to detect the flatness of the components in the detection cavity 500, and the data display unit 410 is used to display the detection data.

[0049] More specifically, the data display unit 410 is selected as a dial indicator, and the roller probe 420 is selected as a dial indicator roller. In actual use, different positions are detected through the cooperation of the second adjusting component 330, the first adjusting component 310, the steering component 320 and the dial indicator.

[0050] The base 100 includes a support body 110 and an abutment portion 120. The support body 110 is connected to one side wall of the abutment portion 120 and extends in a direction away from the abutment portion 120. An elbow clamping mechanism 200 is disposed on the top of the support body 110, and the free end of the elbow clamping mechanism 200 is opposite to the abutment portion 120.

[0051] In some embodiments, the support body 110 and the abutment portion 120 are fixedly connected by integral molding, wherein both the support body 110 and the abutment portion 120 are plate-shaped.

[0052] In some embodiments, an installation member is fixedly provided at one end of the support body 110 away from the abutment portion 120 by integral molding. The installation member is also plate-shaped. The installation member, the support body 110 and the abutment portion 120 make the main body shape of the base 100 into a "C" shape.

[0053] In some embodiments, the width of the mounting member is smaller than the width of the support body 110, that is, the mounting member is fixedly disposed in the middle of the support body 110.

[0054] More specifically, two elbow clamping mechanisms 200 are selected. Both elbow clamping mechanisms 200 are fixedly mounted on the support body 110, and the two elbow clamping mechanisms 200 are respectively placed on both sides of the mounting component. In the working state, the abutment part 120 and the elbow clamping mechanism 200 are respectively on both sides of the clamping area of ​​the cavity 500 and respectively contact the two sides of the clamping area, thereby fixing the base 100 on the clamping area of ​​the cavity 500.

[0055] The elbow clamping mechanism 200 includes a support portion 210, which is fixedly disposed on the top of the support body 110. In some embodiments, the support portion 210 is fixedly disposed on the support body 110, and the fixing method can be welding or bolt fixing, etc. In this embodiment, it is preferred to fix the support portion 210 to the support body 110 by bolt fixing.

[0056] The abutting component 220 includes a first connecting end 224 and an abutting end 225. One end of the first connecting end 224 is rotatably disposed at a first position 211 on the top of the support portion 210, and the abutting end 225 is provided with a first flexible buffer block 223.

[0057] In some embodiments, the abutment component 220 includes a first clamping member 221 and a second clamping member 222, wherein the first connecting end 224 is the end of the first clamping member 221 that is movably connected to the support portion 210, and the abutment end 225 is the end of the second clamping member 222 that is away from the first clamping member 221.

[0058] In some embodiments, the abutment component 220 is rotatably disposed on the support portion 210 via a pivot, wherein one end of the first connecting end 224 is rotatably disposed at a first position 211 on the top of the support portion 210 via a pivot.

[0059] The first clamping member 221 has a first connecting end 224 at one end, which is disposed opposite to the abutting part 120. The second clamping member 222 is disposed on the first clamping member 221, and the free end of the second clamping member 222 includes the abutting end 225.

[0060] The second clamping member 222 is slidably disposed along the extending direction of the first clamping member 221. In some embodiments, the first clamping member 221 is rotatably disposed on the support portion 210 via a pivot, and the second clamping member 222 is slidably disposed on the first clamping member 221.

[0061] In some more specific embodiments, a transfer member is slidably disposed on the first clamping member 221. The transfer member is hollow and can slide along the length direction of the first clamping member 221. The second clamping member 222 is inserted into the transfer member, and the length direction of the second clamping member 222 is perpendicular to the length direction of the first clamping member 221. The second clamping member 222 is rod-shaped and has two nuts threadedly connected to it. The two nuts are respectively placed on both sides of the transfer member. During use, the position of the second clamping member 222 in the length direction of the first clamping member 221 is adjusted by sliding the transfer member. The position of the end of the second clamping member 222 is adjusted by rotating the nuts, so as to adapt to clamping areas of different thicknesses. The abutting end 225 of the second clamping member 222 is the end of the second clamping member 222 away from the first clamping member 221.

[0062] The abutting end 225 is provided with a first flexible buffer block 223.

[0063] In some embodiments, the fixing method can be bonding, snap-fitting or interference fit, etc. In this embodiment, the end of the first flexible buffer block 223 is provided with a hole, the abutting end 225 of the second clamping member 222 passes through the hole and is connected to the first flexible buffer block 223 by interference fit.

[0064] More specifically, the first flexible buffer block 223 and the second flexible buffer block 121 are made of the same material, such as silicone, rubber or nylon.

[0065] In some embodiments, both the first flexible buffer block 223 and the second flexible buffer block 121 are made of nylon.

[0066] The second flexible buffer block 121 has a plurality of buffer grooves 122 for enhancing friction. In some embodiments, the second flexible buffer block 121 has buffer grooves 122 on the end face away from the abutment portion 120.

[0067] In some embodiments, multiple buffer grooves 122 are provided, and the multiple buffer grooves 122 are evenly distributed on the end face of the second flexible buffer block 121. The opening of the buffer grooves 122 increases the surface roughness of the second flexible buffer block 121, improves the friction with the contact surface, and prevents slippage or displacement. At the same time, the groove structure enables the rubber buffer block to have better elastic deformation ability when subjected to pressure or impact, thereby improving its shock absorption and buffering effect. In addition, the buffer grooves 122 can reduce the pressure concentration on the end face of the rubber buffer block, distribute the load, thereby reducing local stress and improving the durability and service life of the buffer block.

[0068] The control handle 230 includes a second connecting end 231, a protruding end 232 and a gripping end 233. The protruding end 232 is located between the second connecting end 231 and the gripping end 233. The second connecting end 231 is rotatably disposed at the other end of the first connecting end 224. One end of the first connecting end 224 and the other end of the first connecting end 224 are radially opposite to each other along the first connecting end 224.

[0069] In some embodiments, the control handle 230 is rotatably mounted on the support portion 210 via a pivot. Specifically, the second connecting end 231 of the control handle 230 is rotatably mounted on the support portion 210 via a pivot. More specifically, the second connecting end 231 is rotatably mounted on the other end of the first connecting end 224, with one end of the first connecting end 224 and the other end of the first connecting end 224 radially opposite each other.

[0070] The locking member 240 has one end rotatably disposed at a second position 212 away from the abutment component 220 on the top of the support portion 210, and the other end rotatably disposed at a protruding end 232 of the control handle 230. The first position 211 on the top of the support portion 210 and the second position 212 on the top of the support portion 210 are radially opposite to each other along the support portion 210.

[0071] In some embodiments, one end of the locking member 240 is rotatably disposed on the support portion 210 via a pivot, and the other end is rotatably disposed on the middle portion of the control handle 230 via a pivot. Specifically, one end of the locking member 240 is rotatably disposed on the second position 212 of the support portion 210 via a pivot; the other end of the locking member 240 is rotatably disposed on the protruding end 232 of the control handle 230 via a pivot. More specifically, the first position 211 and the second position 212 on the top of the support portion 210 are radially opposite to each other along the support portion 210.

[0072] In some embodiments, the pivot of the first connecting end 224 of the abutment component 220 at the first position 211 of the support 210 is defined as the first pivot, the pivot of the second connecting end 231 of the control handle 230 at the abutment component 220 is defined as the second pivot, the pivot of the locking member 240 at the second position 212 of the support 210 is defined as the third pivot, and the pivot of the locking member 240 at the protruding end 232 of the control handle 230 is defined as the fourth pivot.

[0073] When the control handle 230 and the abutment component 220 are in a relative position, the locking member 240 remains locked to the support 210 and the control handle 230, so that the relative position of the abutment component 220 and the control handle 230 remains stable. That is, when the second rotating shaft, the third rotating shaft and the fourth rotating shaft are on the same plane, the elbow clamping mechanism 200 is in a dead point state. At this time, the abutment component 220 abuts against the side wall of the clamping area in the cavity 500, and the control handle 230 and the abutment component 220 remain relatively stationary, thereby fixing the base 100 on the clamping area in the cavity 500.

[0074] The adjustment bracket 300 also includes a positioning member 340. One end of the second adjustment member 330 is disposed on the base 100, and the other end is connected to the first adjustment member 310. The positioning member 340 passes through the second adjustment member 330 and is movably disposed on the first adjustment member 310 so that the first adjustment member 310 rotates relative to the second adjustment member 330 around the positioning member 340.

[0075] In some embodiments, the second adjusting member 330 can be rod-shaped, plate-shaped, or block-shaped, etc. In this embodiment, the second adjusting member 330 is selected to be rod-shaped. Specifically, the second adjusting member 330 is a round rod, one end of which is disposed on the base 100, and the second adjusting member 330 extends along the height direction of the cavity 500 on the base 100. The first adjusting member 310 is rotatably disposed at the end of the second adjusting member 330 away from the base 100. This arrangement increases the height of the first adjusting member 310 and the steering member 320, so that the detection member 400 can adapt to components of different heights during the detection process.

[0076] In some embodiments, the end of the first adjusting member 310 away from the turning member 320 is fixedly provided with a first connecting member by integral molding. The first connecting member is cylindrical, and the axial direction of the first connecting member is perpendicular to the axial direction of the first adjusting member 310. The end of the second adjusting member 330 away from the base 100 is fixedly provided with a second connecting member by integral molding. The second connecting member is cylindrical, and the axial direction of the second connecting member is perpendicular to the axial direction of the second adjusting member 330. At the same time, the first connecting member and the second connecting member are coaxially arranged, and the end face of the first connecting member contacts the end face of the second connecting member. A connecting hole is provided on the second connecting member. The positioning member 340 passes through the connecting hole on the second adjusting member 330 and is movably disposed on the first connecting member at the end of the first adjusting member 310. By controlling the position of the positioning member 340, the angle between the first adjusting member 310 and the second adjusting member 330 can be adjusted.

[0077] In some more specific embodiments, the positioning member 340 is threadedly connected to the first connecting member at the end of the first adjusting member 310. By rotating the positioning member 340, the positioning member 340 moves along the axial direction of the first connecting member, pressing the first connecting member and the second connecting member together, so that the first adjusting member 310 and the second adjusting member 330 will not rotate relative to each other, thereby fixing the angle between the first adjusting member 310 and the second adjusting member 330.

[0078] The second adjusting member 330 is rotatably mounted on the base 100 to rotate about the axial direction of the base 100 and to adjust the angle between it and the base 100.

[0079] In some embodiments, the second adjusting member 330 can be fixedly disposed on the base 100 or rotatably disposed on the base 100. In this embodiment, it is preferred that the second adjusting member 330 is rotatably disposed on the base 100. As long as the second adjusting member 330, the first adjusting member 310, the steering member 320 and the detection member 400 cooperate to detect the components in the cavity 500, it is acceptable.

[0080] Reference Figure 4At least one of the second adjusting member 330 and the first adjusting member 310 is a telescopic adjusting member with adjustable length.

[0081] In some embodiments, the first adjusting member 310 is a length-adjustable telescopic adjusting member.

[0082] In some embodiments, the second adjusting member 330 is a length-adjustable telescopic adjusting member.

[0083] In some embodiments, both the second adjusting member 330 and the first adjusting member 310 are telescopic adjusting members with adjustable length.

[0084] As long as the second adjusting member 330, the first adjusting member 310, the steering member 320 and the detection member 400 are coordinated, the components inside the cavity 500 can be detected.

[0085] More specifically, taking the second adjusting member 330 as an example of a length-adjustable telescopic adjusting member; when the second adjusting member 330 is telescopically adjustable, the second adjusting member 330 includes a fixed section 331 and an extension section 332. One end of the fixed end is disposed on the base 100, and the other end has an extension hole. The axial direction of the extension hole is parallel to the axial direction of the fixed section 331. The extension section 332 passes through the extension hole and is movably disposed inside the extension hole. Specifically, the extension section 332 can extend or retract along the axial direction of the extension hole inside the extension hole, thereby adjusting the height of the second adjusting member 330 to adapt to different detection positions; wherein the extension section 332 can be interference-fitted with the inner wall of the extension hole to fix the relative position of the extension section 332 and the fixed section 331, or bolts can be provided on the fixed section 331 to fix the relative position of the extension section 332 and the fixed section 331.

[0086] In some embodiments, refer to Figure 5The first flexible buffer block 223 and the second flexible buffer block 121 contact the upper and lower surfaces of the top edge 510, respectively, thereby fixing the cavity measuring fixture onto the cavity 500. When the position of the cavity measuring fixture needs to be changed, the control handle 230 is rotated. At this time, the distance between the first flexible buffer block 223 and the second flexible buffer block 121 increases, that is, the height of the clamping space formed between them increases. At least one of the first flexible buffer block 223 and the second flexible buffer block 121 disengages from the top edge 510, allowing the cavity measuring fixture to move and adjust its position on the top edge 510. Continuing to rotate the control handle 230 reduces the distance between the first flexible buffer block 223 and the second flexible buffer block 121, that is, the height of the clamping space formed between them decreases, thereby fixing the position of the cavity measuring fixture and completing the position adjustment of the cavity measuring fixture. At the same time, since the first flexible buffer block 223 and the second flexible buffer block 121 are both made of flexible material, the surface of the cavity 500 will not be damaged after the cavity measuring fixture is clamped.

[0087] The implementation principle of the cavity measurement fixture of the semiconductor growth equipment in this application embodiment is as follows: the base 100 is placed in the clamping area inside the cavity 500, that is, the base 100 is placed on the top edge 510 of the cavity 500, so that the abutment part 120 and the elbow clamping mechanism 200 on the base 100 are respectively placed on both sides of the clamping area, and the first clamping member 221 and the second clamping member 222 on the abutment assembly 220 are adjusted so that the first clamping member 221 and the second clamping member 222 are in a suitable position.

[0088] Specifically, during the clamping process, the first flexible buffer block 223 and the second flexible buffer block 121 contact the upper and lower surfaces of the top edge 510, respectively, thereby fixing the cavity measuring fixture onto the cavity 500. When it is necessary to change the position of the cavity measuring fixture, the control handle 230 is rotated. At this time, the distance between the first flexible buffer block 223 and the second flexible buffer block 121 increases, that is, the height of the clamping space formed between them increases. At least one of the first flexible buffer block 223 and the second flexible buffer block 121 disengages from the top edge 510, allowing the cavity measuring fixture to move and adjust its position on the top edge 510. The control handle 230 is then rotated again, causing the distance between the first flexible buffer block 223 and the second flexible buffer block 121 to decrease, that is, the height of the clamping space formed between them decreases, thereby fixing the position of the cavity measuring fixture and completing the position adjustment of the cavity measuring fixture. Adjust the positions of the first adjusting component 310, the steering component 320, and the detection component 400 so that the roller probe 420 contacts the position to be detected, which facilitates the detection process. During the measurement process, the detection component 400 can be adjusted to any measurement angle. The operation is simple and convenient. In addition, this fixture is small in size, light in weight, and easy to operate.

[0089] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A cavity measurement fixture for a semiconductor growth apparatus, characterized in that, include: The base (100) includes an abutment portion (120), wherein the abutment portion is provided with a second flexible buffer block (121); At least one elbow clamping mechanism (200) is disposed on the top of the base (100). The free end of the elbow clamping mechanism (200) is provided with a first flexible buffer block (223). The first flexible buffer block (223) and the second flexible buffer block (121) are opposite to each other and form a clamping space to accommodate the clamped part on the semiconductor growth device. By operating the elbow clamping mechanism (200), the free end of the elbow clamping mechanism (200) drives the first flexible buffer block (223) to move toward or away from the second flexible buffer block (121). An adjustment bracket (300) is disposed on the base (100). The adjustment bracket (300) includes a first adjustment member (310) and a second adjustment member (330) that are rotatably connected to each other. The second adjustment member (330) is movably disposed on the base (100) to adjust its relative position with respect to the base (100). The detection element (400) is movably disposed on the first adjustment element (310) to adjust its relative position with respect to the first adjustment element (310).

2. The cavity measuring fixture according to claim 1, characterized in that, The base (100) includes a support body (110) and an abutment portion (120). The support body (110) is connected to one side wall of the abutment portion (120) and extends in a direction away from the abutment portion (120). The elbow clamp mechanism (200) is disposed on the top of the support body (110), and the free end of the elbow clamp mechanism (200) is opposite to the abutment portion (120).

3. The cavity measuring fixture according to claim 2, characterized in that, The elbow clamp mechanism (200) includes: A support part (210) is fixedly disposed on the top of the support body (110); The abutting component (220) includes a first connecting end (224) and an abutting end (225). One end of the first connecting end (224) is rotatably disposed at a first position (211) on the top of the support part (210). The abutting end (225) is provided with the first flexible buffer block (223). The control handle (230) includes a second connecting end (231), a protruding end (232), and a gripping end (233). The protruding end (232) is located between the second connecting end (231) and the gripping end (233). The second connecting end (231) is rotatably disposed at the other end of the first connecting end (224). One end of the first connecting end (224) and the other end of the first connecting end (224) are radially opposite to each other along the first connecting end (224). The locking member (240) has one end rotatably disposed at a second position (212) on the top of the support (210) away from the abutment component (220), and the other end rotatably disposed at the protruding end (232) of the control handle (230). The first position (211) on the top of the support (210) and the second position (212) on the top of the support (210) are radially opposite to each other along the support (210).

4. The cavity measuring fixture according to claim 3, characterized in that, The abutment component (220) includes a first clamping member (221) and a second clamping member (222). One end of the first clamping member (221) includes the first connecting end (224) and is disposed opposite to the abutment portion (120). The second clamping member (222) is disposed on the first clamping member (221), and the free end of the second clamping member (222) includes the abutment end (225).

5. The cavity measuring fixture according to claim 4, characterized in that, The second clamping member (222) is slidably disposed along the extending direction of the first clamping member (221).

6. The cavity measuring fixture according to claim 1, characterized in that, The second flexible buffer block (121) has several buffer grooves (122) for enhancing friction.

7. The cavity measuring fixture according to claim 1, characterized in that, The adjusting bracket (300) further includes a positioning member (340). One end of the second adjusting member (330) is disposed on the base (100), and the other end is connected to the first adjusting member (310). The positioning member (340) passes through the second adjusting member (330) and is movably disposed on the first adjusting member (310) so that the first adjusting member (310) rotates relative to the second adjusting member (330) around the positioning member (340).

8. The cavity measuring fixture according to claim 1, characterized in that, The second adjusting member (330) is rotatably disposed on the base (100) to rotate about the axial direction of the base (100) and to adjust the angle between it and the base (100).

9. The cavity measuring fixture according to claim 1, characterized in that, At least one of the second adjusting member (330) and the first adjusting member (310) is a telescopic adjusting member with adjustable length.

10. The cavity measuring fixture according to claim 1, characterized in that, The first adjusting member (310) is provided with a steering member (320) to rotate around the first adjusting member (310). The detection member (400) includes a data display section (410) and a roller probe (420) fixedly arranged with each other. The roller probe (420) is rotatably arranged on the steering member (320).

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