Quantitative testing device for surface hydrophilicity of silicon wafer

Abstract

The utility model provides a quantitative testing device for the surface hydrophilicity of a silicon wafer. The quantitative testing device comprises a slide holder base, an automatic titration device base, a vertical device structure, a horizontal metal rod, a movable titration module, a quantitative dropper, a silicon wafer slide holder, a movable hub and a connecting hub, a first sliding groove parallel to the automatic titration device base is formed in the upward end of the vertical device structure; one end of the horizontal metal rod is movably connected into the first sliding groove. A second sliding chute and a sliding block matched with the second sliding chute are arranged in the movable titration module; the quantitative dropper is vertically, downwards and detachably arranged on the sliding block; according to the utility model, the quantitative dropper is fixed on the movable titration module, the movable titration module can move up and down, and the quantitative dropper can move in the movable titration module through the sliding block, so that water drops can drop on the silicon wafer carrying table at a more accurate position, and the titration uniformity and accuracy are improved; and the accuracy of the quantitative test of the surface hydrophilicity of the silicon wafer is improved.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic solar cell testing technology, specifically to a device for quantitative testing of the hydrophilicity of silicon wafer surface. Background Technology

[0002] In the manufacturing process of photovoltaic cells, a thin oxide film is typically deposited on the surface of crystalline silicon solar cells (silicon wafers). This oxide film is crucial for the crystalline silicon solar cell manufacturing process. The biggest advantage of crystalline silicon solar cells compared to PERC cells lies in the tunneling oxide layer and polysilicon layer on the back of the cell. The contact passivation effect provided by the tunneling oxide layer and polysilicon layer effectively improves the efficient recombination of majority carriers within the crystalline silicon solar cell. The presence of a mask layer effectively protects this contact passivation effect and prevents contaminants from entering the silicon wafer during subsequent processes and wafer transportation.

[0003] In daily production at the workshop, it is essential to determine the presence of a mask layer on the silicon wafer surface. Since the main component of the mask layer is silicon dioxide, and the surface of silicon dioxide contains hydrocarbon groups, these groups can temporarily bind water upon contact with it. Therefore, silicon wafers with a normal silicon dioxide surface layer will exhibit hydrophilic characteristics. Thus, the results of hydrophilicity tests can be used to determine the presence of a silicon dioxide mask layer on the silicon wafer surface.

[0004] Currently, when measuring the hydrophilicity of silicon wafer surfaces in the workshop, the process generally involves directly dripping the solution onto the wafer surface using a dropper. The entire process is manually controlled, and there may be deviations in the height and angle of each drop, which can easily lead to uneven dripping and inaccurate quantitative testing of the hydrophilicity of the silicon wafer surface. Utility Model Content

[0005] To address the aforementioned problems in the existing technology, this utility model provides a device for quantitatively testing the hydrophilicity of silicon wafer surfaces.

[0006] The technical problem to be solved by this utility model is achieved through the following technical solution:

[0007] This utility model provides a device for quantitative testing of the hydrophilicity of silicon wafer surface, including: a wafer stage base, an automatic titration device base, a vertical device structure, a horizontal metal rod, a movable titration module, a quantitative dropper, a silicon wafer stage, a movable hub, and a connecting hub.

[0008] The vertical device structure is vertically connected to one end of the automatic titration apparatus base; the slide stage base is vertically connected to the other end of the automatic titration apparatus base.

[0009] The vertical device structure has a first groove parallel to the base of the automatic titration device at one of its upward-facing ends; one end of the horizontal metal rod is movably connected to the first groove.

[0010] The movable titration module is positioned opposite the slide stage base at the other end of a horizontal metal rod; the movable titration module contains a second slide groove and a slider that matches the second slide groove; the quantitative dropper is detachably mounted vertically downwards on the slider;

[0011] One end of the movable hub and the connecting hub are vertically connected to the upper surface of the wafer stage base; the other end of the movable hub and the connecting hub are connected to the wafer stage for placing the silicon wafer to be tested; the sliding area of ​​the quantitative dropper overlaps with the area of ​​the wafer stage.

[0012] Optionally, the device for quantifying the hydrophilicity of silicon wafer surfaces also includes: a pressure sensing device and a camera;

[0013] Wireless connection between the pressure sensor and the camera;

[0014] The pressure sensor is positioned between the silicon wafer stage and the movable hub; the camera is positioned at the end of the moving titration module furthest from the vertical device structure.

[0015] The pressure sensor is used to acquire pressure data from the silicon wafer stage and send the pressure data to the camera, which is then used to control the camera's image capture action.

[0016] Optionally, the horizontal metal bar includes: bolts and a horizontal bar;

[0017] The horizontal bar has a threaded hole; the bolt passes through the first groove and is connected to the threaded hole to fix the horizontal bar to the vertical device structure.

[0018] Optionally, the length of the first groove is 10cm-30cm.

[0019] Optionally, the distance between the base of the automatic titration device and the silicon wafer stage is less than the distance difference between the height of the lower boundary of the first chute and the length of the quantitative dropper.

[0020] Optionally, the second groove is a grid-shaped groove.

[0021] Optionally, the slider is provided with a vertically downward insertion hole; the metering dropper is pluggably connected to the insertion hole.

[0022] Optionally, the upper surface of the silicon wafer stage near the movable hub is provided with a raised fixing strap to prevent the silicon wafer under test from slipping off.

[0023] Optionally, the movable hub is provided with a hinged connection structure to allow the wafer stage to be tilted and adjusted.

[0024] Optionally, the main body of the slide stage base, the automatic titration device base, the vertical device structure, and the horizontal metal rod is made of steel.

[0025] This invention provides a device for quantitatively testing the hydrophilicity of silicon wafer surfaces, comprising: a wafer stage base, an automatic titration device base, a vertical device structure, a horizontal metal rod, a movable titration module, a quantitative dropper, a silicon wafer stage, a movable hub, and a connecting hub; the vertical device structure is vertically connected upward to one end of the automatic titration device base; the wafer stage base is vertically connected upward to the other end of the automatic titration device base; the upward end of the vertical device structure is provided with a first groove parallel to the automatic titration device base; one end of the horizontal metal rod is movably connected within the first groove; the movable titration module is positioned opposite the wafer stage base at the other end of the horizontal metal rod; the movable titration module is provided with a second groove and a slider matching the second groove; the quantitative dropper is detachably mounted vertically downward on the slider; one end of the movable hub and the connecting hub is vertically connected to the upper surface of the wafer stage base; the other end of the movable hub and the connecting hub is connected to the silicon wafer stage for placing the silicon wafer to be tested; the sliding area of ​​the quantitative dropper overlaps with the area of ​​the silicon wafer stage. In this invention, by fixing the quantitative dropper to the moving titration module, and since the moving titration module can move up and down, and the quantitative dropper can move within the moving titration module via a slider, the water droplets can be dropped onto the silicon wafer stage at a more precise position, thereby improving the uniformity and accuracy of the titration; and thus improving the accuracy of the quantitative test of the hydrophilicity of the silicon wafer surface.

[0026] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0027] Figure 1 A schematic diagram of the structure of a silicon wafer surface hydrophilicity quantification testing device provided in this embodiment of the present invention;

[0028] Figure 2 This is a top view of the movable titration module provided in an embodiment of the present invention.

[0029] Figure 3 This is a top view of the silicon wafer carrier stage 8 provided in an embodiment of the present invention. Detailed Implementation

[0030] The present invention will be further described in detail below with reference to specific embodiments, but the implementation of the present invention is not limited thereto.

[0031] To improve the accuracy of quantitative testing of hydrophilicity on silicon wafer surfaces, this invention provides a device for quantitative testing of hydrophilicity on silicon wafer surfaces. Figure 1 This is a schematic diagram of a silicon wafer surface hydrophilicity quantification testing device provided in an embodiment of the present invention. Figure 1As shown, it includes: a wafer stage base 1, an automatic titration device base 2, a vertical device structure 3, a horizontal metal rod 4, a movable titration module 5, a quantitative dropper 7, a silicon wafer stage 8, a movable hub 10, and a connecting hub 11.

[0032] The vertical device structure 3 is vertically connected to one end of the automatic titration device base 2; the slide stage base 1 is vertically connected to the other end of the automatic titration device base 2.

[0033] The vertical device structure 3 has a first groove parallel to the automatic titration device base 2 at one end; one end of the horizontal metal rod 4 is movably connected in the first groove.

[0034] The movable titration module 5 is positioned opposite the slide stage base 1 at the other end of the horizontal metal rod 4; the movable titration module 5 is provided with a second slide groove and a slider that matches the second slide groove; the quantitative dropper 7 is detachably mounted vertically downwards on the slider;

[0035] One end of the movable hub 10 and the connecting hub 11 is vertically connected to the upper surface of the wafer stage base 1; the other end of the movable hub 10 and the connecting hub 11 is connected to the wafer stage 8 for placing the silicon wafer to be tested; the sliding area of ​​the quantitative dropper 7 overlaps with the area of ​​the wafer stage 8.

[0036] It should be noted that, in this embodiment of the invention, the length of the vertical device structure 3 is greater than the length of the slide stage base 1. The connection between the slide stage base 1, the automatic titration device base 2, and the vertical device structure 3 can be achieved by welding or by screws; this embodiment of the invention does not limit this method.

[0037] This utility model provides a device for quantitatively testing the hydrophilicity of silicon wafer surfaces. By fixing the quantitative dropper 7 on the moving titration module 5, and since the moving titration module 5 can move up and down, and the quantitative dropper 7 can move within the moving titration module 5 via a slider, the water droplets can be dropped onto the silicon wafer stage 8 at a more precise position, improving the uniformity and accuracy of the titration; thereby improving the accuracy of the quantitative testing of the hydrophilicity of silicon wafer surfaces.

[0038] Optionally, the device for quantifying the hydrophilicity of silicon wafer surfaces also includes: a pressure sensing device 9 and a camera 6;

[0039] The pressure sensor 9 and the camera 6 are wirelessly connected.

[0040] Pressure sensing device 9 is located between silicon wafer stage 8 and movable hub 10; camera 6 is located at the end of moving titration module 5 away from vertical device structure 3.

[0041] The pressure sensor 9 is used to acquire pressure data of the silicon wafer stage 8 and send the pressure data to the camera 6. The pressure data is used to control the camera 6 to take pictures.

[0042] In this embodiment of the invention, the pressure sensing device 9 is used to acquire pressure data on the silicon wafer stage 8. When a water droplet from the metering dropper 7 falls onto the silicon wafer stage 8, the pressure sensing device 9 sends the pressure data to the camera. Upon receiving the pressure data and determining that it exceeds a preset threshold, the camera starts a countdown and, after a preset time, takes a picture and sends the result to an external processing device. The processing device can determine whether the water droplet shape is OK or NG based on the water contact angle in the picture.

[0043] It is understood that, in this embodiment of the invention, by using a camera to photograph the titration results and by using external equipment to detect the water contact angle, the accuracy of the detection is improved compared to the visual judgment by employees on the production line.

[0044] Optionally, the horizontal metal rod 4 includes: bolts and a horizontal bar;

[0045] The horizontal bar has a threaded hole; the bolt passes through the first groove and is connected to the threaded hole to fix the horizontal bar to the vertical device structure 3.

[0046] Optionally, the length of the first groove is 10cm-30cm.

[0047] Alternatively, in another possible implementation, continuous holes can be provided at the location of the first chute, and the horizontal rod can be fixed to the vertical device structure 3 by fixing the bolts and the horizontal rod in the corresponding holes.

[0048] It is understood that, in this embodiment of the present invention, by providing a first sliding groove on the vertical device structure 3, the horizontal metal rod 4 can drive the metering dropper 7 to complete the vertical movement.

[0049] Optionally, the distance between the automatic titration device base 2 and the silicon wafer stage 8 is less than the distance difference between the height of the lower boundary of the first chute and the length of the quantitative dropper 7.

[0050] It is understood that, in this utility model, the above-mentioned height setting can ensure that the quantitative dropper 7 can slide freely up and down within the height range of the first groove, thus avoiding collision between the quantitative dropper 7 and the silicon wafer stage 8.

[0051] Optionally, the second groove is a grid-shaped groove.

[0052] For example, Figure 2 This is a top view of the movable titration module provided in an embodiment of the present invention. Figure 2As shown, except for the four raised parts in the middle, the movable titration module 5 consists of the second slide groove, and the slider can move within the second slide groove to complete the titration at the corresponding position.

[0053] Optionally, the slider is provided with a vertically downward insertion hole; the metering dropper 7 is pluggably connected to the insertion hole.

[0054] It should be noted that when water needs to be dispensed, the operator can remove the metering dropper 7 from the socket, and reinstall it on the socket after the water is dispensed.

[0055] Optionally, the upper surface of the wafer stage 8 near the movable hub 10 is provided with a raised fixing strap to prevent the silicon wafer under test from slipping off.

[0056] Figure 3 This is a top view of the silicon wafer carrier stage 8 provided in this embodiment of the utility model. By providing a raised fixing band on the upper surface of the silicon wafer carrier stage 8 near the movable hub 10, the silicon wafer to be tested can be prevented from slipping off the silicon wafer carrier stage 8.

[0057] Optionally, the movable hub 10 is provided with a hinged connection structure to allow the silicon wafer stage 8 to be tilted and adjusted.

[0058] It should be noted that by setting a hinged connection structure on the movable hub 10, when it is necessary to tilt the silicon wafer stage 8 to one side, the movable hub 10 can be pulled outward, causing it to bend and ultimately allowing the silicon wafer stage 8 to complete the tilt adjustment. It can be understood that by setting a hinged connection structure on the movable hub 10, not only can titration at a preset position and height be performed on the silicon wafer under test, but also titration at a preset angle can be performed, improving the accuracy and flexibility of the titration.

[0059] Furthermore, in this embodiment of the invention, the angle adjustment range of the active hub 10 can be between 0 and 30°.

[0060] Optionally, the main body of the slide stage base 1, the automatic titration device base 2, the vertical device structure 3, and the horizontal metal rod 4 is made of steel.

[0061] It should be noted that the slide stage base 1, the automatic titration device base 2, the vertical device structure 3, and the horizontal metal rod 4 can be made of steel or plastic. As long as the purpose of this utility model can be achieved, they are all within the protection scope of this utility model embodiment.

[0062] It should be noted that the terms "first," "second," etc., are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the present invention described herein can be implemented in orders other than those illustrated or described herein. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatuses and methods consistent with some aspects of the present invention.

[0063] Although the present invention has been described herein in conjunction with various embodiments, those skilled in the art, by reviewing the accompanying drawings and the disclosure, will understand and implement other variations of the disclosed embodiments in carrying out the claimed invention. In the description of the present invention, the word "comprising" does not exclude other components or steps, "a" or "an" does not exclude a plurality, and "a plurality" means two or more, unless otherwise explicitly specified. Furthermore, while different embodiments may describe certain measures, this does not mean that these measures cannot be combined to produce good results.

[0064] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the protection scope of the present invention.

Claims

1. A device for quantitatively testing the hydrophilicity of silicon wafer surfaces, characterized in that, include: The wafer stage base (1), the automatic titration device base (2), the vertical device structure (3), the horizontal metal rod (4), the moving titration module (5), the quantitative dropper (7), the silicon wafer stage (8), the moving hub (10), and the connecting hub (11). The vertical device structure (3) is vertically connected upward to one end of the automatic titration device base (2); the slide stage base (1) is vertically connected upward to the other end of the automatic titration device base (2); The vertical device structure (3) has a first groove parallel to the base (2) of the automatic titration device at one end; one end of the horizontal metal rod (4) is movably connected to the first groove. The movable titration module (5) is positioned opposite the slide stage base (1) at the other end of the horizontal metal rod (4); the movable titration module (5) is provided with a second slide groove and a slider that matches the second slide groove; the quantitative dropper (7) is detachably mounted vertically downwards on the slider; One end of the movable hub (10) and the connecting hub (11) are vertically connected to the upper surface of the wafer stage base (1); the other end of the movable hub (10) and the connecting hub (11) are connected to the wafer stage (8) for placing the silicon wafer to be tested; the sliding area of ​​the quantitative dropper (7) overlaps with the area of ​​the wafer stage (8) to a certain extent.

2. The device for quantitatively testing the hydrophilicity of silicon wafer surfaces according to claim 1, characterized in that, The silicon wafer surface hydrophilicity quantification testing device also includes: a pressure sensing device (9) and a camera (6); The pressure sensing device (9) and the camera (6) are wirelessly connected; The pressure sensing device (9) is disposed between the silicon wafer stage (8) and the movable hub (10); the camera (6) is disposed at the end of the moving titration module (5) away from the vertical device structure (3); The pressure sensing device (9) is used to acquire the pressure data of the silicon wafer stage (8) and send the pressure data to the camera (6). The pressure data is used to control the camera (6) to take pictures.

3. The device for quantitatively testing the hydrophilicity of silicon wafer surfaces according to claim 1, characterized in that, The horizontal metal rod (4) includes: bolts and a horizontal rod; The horizontal bar has a threaded hole; the bolt passes through the first groove and is connected to the threaded hole to fix the horizontal bar to the vertical device structure (3).

4. The device for quantitatively testing the hydrophilicity of silicon wafer surfaces according to claim 1, characterized in that, The length of the first groove is 10cm-30cm.

5. The device for quantitatively testing the hydrophilicity of silicon wafer surfaces according to claim 1, characterized in that, The distance between the automatic titration device base (2) and the silicon wafer stage (8) is less than the distance difference between the height of the lower boundary of the first chute and the length of the quantitative dropper (7).

6. The device for quantitatively testing the hydrophilicity of silicon wafer surfaces according to claim 1, characterized in that, The second groove is a grid-shaped groove.

7. The device for quantitatively testing the hydrophilicity of silicon wafer surfaces according to claim 1, characterized in that, The slider is provided with a vertically downward insertion hole; the metering dropper (7) is pluggably connected to the insertion hole.

8. The device for quantitatively testing the hydrophilicity of silicon wafer surfaces according to claim 1, characterized in that, The silicon wafer stage (8) has a raised fixing strap on its upper surface near the movable hub (10) to prevent the silicon wafer to be tested from slipping off.

9. The device for quantitatively testing the hydrophilicity of silicon wafer surfaces according to claim 1, characterized in that, The movable hub (10) is provided with a hinged connection structure to allow the silicon wafer carrier stage (8) to be tilted and adjusted.

10. The device for quantitatively testing the hydrophilicity of a silicon wafer surface according to claim 1, characterized in that, The main body of the slide stage base (1), the automatic titration device base (2), the vertical device structure (3), and the horizontal metal rod (4) is a steel structure.

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