Tail gas condensation and collection device in germanium elementary substance preparation process

Abstract

The utility model relates to the technical field of gas condensation and collection, and discloses a tail gas condensation and collection device in a germanium elementary substance preparation process, which comprises a barrel body, a condensation unit connected in the barrel body, a gas inlet pipe arranged on the barrel body and connected with external reaction equipment, a drain pipe positioned on one side of the barrel body, and an exhaust pipe connected to the top of the barrel body, the water inlet end of the water drainage pipe is higher than the gas outlet end of the gas inlet pipe, the water inlet end of the water drainage pipe is lower than the water drainage end of the water drainage pipe, and the water inlet end of the water drainage pipe faces the bottom of the barrel body, so that when liquid in the barrel body is at the lowest liquid level height, the liquid is not lower than the water inlet end of the water drainage pipe to prevent tail gas from being discharged from the water drainage pipe. The exhaust pipe is simple in structure and beneficial to improvement of safety.

Description

TECHNICAL FIELD

[0001] The utility model relates to gas condensation collection technical field, concretely is a tail gas condensation collection device in germanium single element preparation process. BACKGROUND

[0002] In the semiconductor manufacturing process, it is an important link to prepare germanium single element by using hydrogen gas to reduce germania, and the specific chemical reaction equation is: GeO2+2H2=Ge+2H2O, and the reaction temperature is: 700 DEG C~750 DEG C, in the germania reduction process, a large amount of tail gas containing hydrogen gas, water vapor, germanium and some impurity volatiles dusts and the like are generated, especially, since the germania is usually made by hydrolysis of germanium tetrachloride, so part of the germania is mixed with chloride ions, therefore, in the above reaction, impurity tail gas with chloride ions can be generated, so it is needed to collect and treat this kind of tail gas, prevent the tail gas from being directly discharged to pollute the environment, and cause the waste of resources.

[0003] In the prior art, the invention patent (CN116116161A) discloses a germania hydrogen reduction exhaust treatment system including a gas connection pipe, a collection barrel, a connecting pipe and a water tank, one end of the gas connection pipe is used for connecting the exhaust port of the germania hydrogen reduction device, the collection barrel has a barrel body, the barrel body is provided with a first port and a second port, the barrel body is empty before starting work, the first port is used for the other end of the gas connection pipe to enter the barrel body, one end of the connecting pipe is connected to the second port of the collection barrel, the water tank has a shell, a cover plate, a condenser pipe and a partition plate, the shell is provided with a first water inlet and a second water inlet, the cover plate is provided with a first interface, a second interface, a third interface and a fourth interface, the partition plate divides the interior of the shell into a first cavity and a second cavity, an overflow groove is arranged at the upper portion, the first cavity is used for containing water reaching the bottom surface of the overflow groove and being at room temperature before starting work, the second cavity is empty before starting work, the condenser pipe is used for being arranged in the water contained in the first cavity, the third interface is used for the connecting pipe to enter the first cavity, and the fourth interface is communicated with the second cavity, this scheme uses three containers connected in series to settle the tail gas and collect hydrogen gas in the tail gas, but the treatment system has a complex structure, when the collection barrel is empty, the reaction is high temperature, and the empty backflow to the upper container and the high temperature hydrogen gas combination can cause empty explosion or explosion.

[0004] Based on this, the technical problem to be solved by the case is: how to optimize the structure and prevent gas leakage. UTILITY MODEL CONTENTS

[0005] To solve the above technical problems, the utility model provides a kind of tail gas condensation collection device in germanium single preparation process, liquid is added to the water inlet end of overflow drain pipe before starting, so that when the reaction equipment of external preparation germanium single, the tail gas generated from the air inlet pipe into bucket body, and separate by condensing unit, part of liquid in bucket body, separated hydrogen can be collected at exhaust pipe, and by the design of water inlet end and drain end of drain pipe, can effectively prevent the whole tail gas condensation collection process, tail gas is discharged from drain pipe, to facilitate the separation of tail gas and prevent tail gas pollution atmosphere, also facilitate the concentration recovery hydrogen in tail gas.

[0006] The technical scheme of the utility model is:

[0007] A kind of tail gas condensation collection device in germanium single preparation process, including bucket body, condensing unit being connected in bucket body, bucket body is equipped with the air inlet pipe being connected with the reaction equipment of external, drain pipe located at one side of bucket body, exhaust pipe being connected in the top of bucket body, the water inlet end of drain pipe is higher than the air outlet end of air inlet pipe, the water inlet end of drain pipe is lower than the drain end of drain pipe, and the water inlet end of drain pipe is towards the bottom of bucket body, so that the liquid in bucket body is not lower than the water inlet end of drain pipe at the lowest liquid level to prevent tail gas from drain pipe.

[0008] In the above-mentioned tail gas condensation collection device in germanium single preparation process, drain pipe is designed as L-shaped structure, the water inlet end of drain pipe is located on the vertical part of drain pipe, and the drain end of drain pipe is located on the horizontal part.

[0009] In the above-mentioned tail gas condensation collection device in germanium single preparation process, bucket body is equipped with detachable bucket cover, air inlet pipe and exhaust pipe are connected on box cover, and condensing unit is detachably connected on bucket cover.

[0010] In the above-mentioned tail gas condensation collection device in germanium single preparation process, sealing ring is arranged between bucket body and bucket cover.

[0011] In the above-mentioned tail gas condensation collection device in germanium single preparation process, condensing unit includes spiral condensing pipe, water inlet pipe and water outlet pipe, water inlet pipe is connected to one end of condensing pipe, water outlet pipe is connected to the other end of condensing pipe, water inlet pipe and water outlet pipe are detachably connected on bucket cover, water inlet pipe is connected with the water supply end of external cooling liquid conveying equipment, water outlet pipe is connected with the return end of cooling liquid conveying equipment, and water inlet pipe and water outlet pipe are used to make external cooling liquid circulate in condensing pipe.

[0012] In the above-mentioned tail gas condensation collection device in germanium single preparation process, bucket body is equipped with liquid level meter assembly for showing the liquid level height inside bucket body, and liquid level meter assembly is U-shaped connecting pipe, both ends of connecting pipe are communicated with bucket body, and the water inlet end of drain pipe is higher than the liquid inlet end of connecting pipe.

[0013] The first limiting block and the second limiting block are in contact with the barrel cover.

[0014] The stop valve is located on the horizontal part of the drain pipe.

[0015] The material of the air inlet pipe and the air outlet pipe is polytetrafluoroethylene.

[0016] The material of the barrel body and the barrel cover is PPR.

[0017] The above technical solution of the utility model has at least one of the following advantages or beneficial effects:

[0018] The liquid is added to the water inlet end of the overflow drain pipe before starting, so that when the reaction equipment outside the barrel body is used to prepare germanium, the tail gas generated from the air inlet pipe enters the barrel body and is separated by the condensing unit, part of the liquid in the barrel body is dissolved, and the separated hydrogen gas can be collected at the air outlet pipe. BRIEF DESCRIPTION OF DRAWINGS

[0019] Fig. 1 It is a sectional view of the utility model embodiment 1;

[0020] Fig. 2 It is a working schematic diagram of the utility model embodiment 1.

[0021] Wherein, the reference signs of each drawing are as follows: 1, barrel body; 2, condensing unit; 3, sealing ring; 4, connecting pipe; 11, air inlet pipe; 12, air outlet pipe; 13, drain pipe; 14, barrel cover; 21, condensing pipe; 22, water inlet pipe; 23, water outlet pipe; 111, air outlet end; 112, first limiting block; 121, second limiting block; 131, water inlet end; 132, drain end; 133, stop valve. DETAILED DESCRIPTION

[0022] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0023] Embodiment 1

[0024] Please refer to Figs. 1-2 The application discloses a tail gas condensation and collection device in a germanium single-element preparation process, which comprises a barrel body 1, a condensation unit 2 connected in the barrel body 1, an air inlet pipe 11 connected with an external reaction equipment on the barrel body 1, a drain pipe 13 located on one side of the barrel body 1, an exhaust pipe 12 connected on the top of the barrel body 1, wherein the water inlet end 131 of the drain pipe 13 is higher than the air outlet end 111 of the air inlet pipe 11, the water inlet end 131 of the drain pipe 13 is lower than the water outlet end 132 of the drain pipe 13, and the water inlet end 131 of the drain pipe 13 faces the bottom of the barrel body 1, so that the liquid in the barrel body 1 is not lower than the water inlet end 131 of the drain pipe 13 at the lowest liquid level to prevent the tail gas from being discharged from the drain pipe 13.

[0025] It should be noted that the germanium single-element preparation process mentioned in the embodiment is a reaction process of reducing germanium dioxide by hydrogen, and the germanium dioxide is prepared by germanium tetrachloride, so the germanium dioxide in the embodiment contains chloride ion impurities, therefore, the main components of the tail gas mentioned in the embodiment include hydrogen, water vapor and chlorine, and a small amount of germanium-containing fine particles and impurities carried by the germanium dioxide, in addition, the liquid in the barrel body 1 is taken as water as an example.

[0026] In actual application, during preparation, the staff adds water into the barrel body 1, and the liquid level is higher than the water inlet end 131 of the drain pipe 13, so that when the tail gas enters the barrel body 1, the tail gas is prevented from being discharged from the drain pipe 13, thereby preventing the chlorine in the tail gas from polluting the atmosphere, or preventing the hydrogen from leaking from the exhaust pipe 12, and reducing the collection efficiency of hydrogen due to the failure to collect the hydrogen, on the other hand, the tail gas enters the water under the action of the condensation unit 2, so that the water vapor in the tail gas is condensed as liquid water to supplement the water in the barrel body 1, the chlorine in the tail gas is dissolved in the water, and the hydrogen in the tail gas is difficult to dissolve in the water and is collected in the gas phase from the exhaust pipe 12, so that the main components in the tail gas are separated, the hydrogen can be collected in the exhaust pipe 12, and the chlorine can be prevented from polluting the atmosphere.

[0027] In addition, as the reaction time increases, the water level in the barrel 1 will increase as water vapor is condensed by the condensing unit 2 to form liquid water to supplement the barrel 1. If the water level is too high, the pressure of the outlet end 111 of the air inlet pipe 11 will increase, causing the reaction equipment to exhaust incompletely. As the reaction proceeds, the concentration of water vapor will increase and the concentration of hydrogen will decrease, causing the reaction between germanium dioxide and hydrogen to be insufficient, which ultimately affects the quality of the product. Therefore, the water level in the barrel 1 can be controlled by the drain pipe 13, which is beneficial to ensure that germanium dioxide and hydrogen can fully react.

[0028] Preferably, the drain pipe 13 is designed in an L-shaped structure, and the water inlet end 131 of the drain pipe 13 is located on the vertical portion of the drain pipe 13, and the water outlet end 132 of the drain pipe 13 is located on the horizontal portion.

[0029] In this embodiment, the drain pipe 13 is in an L-shaped structure, which can ensure that the water level is always higher than the water inlet end 131 of the drain pipe 13 when the drain pipe 13 is draining water, thereby preventing gas in the barrel 1 from being discharged from the drain pipe 13. It should be noted that the drain pipe 13 of the present embodiment is not limited to an L-shaped structure, and other structures that can achieve liquid sealing are also possible, such as a U-shaped drain pipe 13 that can also achieve the purpose of liquid sealing.

[0030] More preferably, the barrel 1 is provided with a detachable barrel cover 14, the air inlet pipe 11 and the exhaust pipe 12 are connected to the barrel cover, and the condensing unit 2 is detachably connected to the barrel cover 14.

[0031] Through the above design, the detachable barrel cover 14 is beneficial to the centralized treatment of the liquid in the barrel 1. Specifically, during the hydrogen reduction of germanium single element, germanium dioxide is in a powder state, and the flow of the reaction gas is relatively large, which can cause some of the powder-like germanium dioxide to enter the collection barrel along with the tail gas and deposit at the bottom of the water. Therefore, the powder that enters the barrel 1 along with the tail gas can be recycled with the water by the detachable barrel cover 14, and the detachable barrel cover 14 can be beneficial to the maintenance of the barrel 1 by the staff.

[0032] More preferably, a sealing ring 3 is provided between the barrel 1 and the barrel cover 14.

[0033] In this embodiment, the sealing ring 3 between the barrel 1 and the barrel cover 14 can improve the sealing performance of the barrel 1 to prevent gas from overflowing.

[0034] More preferably, the condensing unit 2 comprises a spiral condensing pipe 21, a water inlet pipe 22 and a water outlet pipe 23, the water inlet pipe 22 is connected to one end of the condensing pipe 21, the water outlet pipe 23 is connected to the other end of the condensing pipe 21, the water inlet pipe 22 and the water outlet pipe 23 are detachably connected to the bucket cover 14, the water inlet pipe 22 is connected to the water supply end of the external cooling liquid conveying device, the water outlet pipe 23 is connected to the water return end of the cooling liquid conveying device, and the water inlet pipe 22 and the water outlet pipe 23 are used to circulate the external cooling liquid in the condensing pipe 21.

[0035] In the above design, the condensing pipe 21 can circulate the condensing liquid in the condensing pipe 21 through the water inlet pipe 22 and the water outlet pipe 23, thereby ensuring the condensing effect of the condensing pipe 21, on the other hand, the spiral condensing pipe 21 can increase the condensing area, so that the condensing is more sufficient, and the detachable connection of the water inlet pipe 22 and the water outlet pipe 23 to the bucket cover 14 can also facilitate the maintenance of the condensing pipe 21.

[0036] More preferably, the bucket body 1 is provided with a liquid level meter assembly for displaying the liquid level in the bucket body 1, and the liquid level meter assembly is a U-shaped connecting pipe 4, both ends of the connecting pipe 4 are in communication with the bucket body 1, and the water inlet end 131 of the drain pipe 13 is higher than the liquid inlet end of the connecting pipe 4.

[0037] Through the above design, the connecting pipe 4 can facilitate the staff to observe the liquid level in the bucket body 1, thereby preventing the liquid level of the water in the bucket body 1 from being too high to cause the pressure of the air inlet pipe 11 to be too large, thereby causing the reaction of germanium dioxide and hydrogen to be insufficient, and the water outlet end 132 of the drain pipe 13 being higher than the liquid inlet end of the connecting pipe 4 can ensure that the liquid level in the bucket body 1 can be observed at all times in the working state.

[0038] More preferably, the air inlet pipe 11 is provided with a first limiting block 112, and the air outlet pipe 12 is provided with a second limiting block 121, and the first limiting block 112 and the second limiting block 121 are in contact with the bucket cover 14.

[0039] In this embodiment, the first limiting block 112 can limit the height position of the air outlet end 111 of the air inlet pipe 11, thereby ensuring that the water inlet end 131 of the drain pipe 13 is higher than the air outlet end 111 of the air inlet pipe 11, and thereby ensuring that the water in the bucket body 1 is always located at the water inlet end 131 of the drain pipe 13, which is conducive to preventing the tail gas from being discharged from the drain pipe 13 during the entire working process.

[0040] More preferably, the drain pipe 13 is provided with a stop valve 133, and the stop valve 133 is located on the horizontal portion of the drain pipe 13.

[0041] Through the above design, the stop valve 133 can facilitate the staff to control the liquid level of the water, control the time point of drainage, and collect the water discharged from the drain pipe 13.

[0042] More preferably, the material of the gas inlet pipe 11 and the gas exhaust pipe 12 is polytetrafluoroethylene.

[0043] In the embodiment, the polytetrafluoroethylene is a high-temperature resistant material. Since the reaction temperature of the hydrogen reduction of germanium dioxide is 700-750 DEG C, the gas inlet pipe 11 needs a high-temperature resistant material, and the gas exhaust pipe 12 needs a high-temperature resistant material to avoid that the uncondensed water vapor passes through the gas exhaust pipe 12.

[0044] More preferably, the material of the barrel body 1 and the barrel cover 14 is PPR.

[0045] In the embodiment, the material of the barrel body 1 and the barrel cover 14 is PPR, and the barrel body 1 is made by the fusion technology, so that the barrel body 1 and the barrel cover 14 have good sealing property and corrosion resistance, thereby prolonging the service life of the barrel body 1 and the barrel cover 14.

[0046] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. A tail gas condensation and collection device in a germanium single element preparation process, comprising a barrel, a condensation unit connected in the barrel, an air inlet pipe connected with an external reaction equipment on the barrel, a drain pipe located on one side of the barrel, and an exhaust pipe connected on the top of the barrel, characterized in that, The water inlet end of the drain pipe is higher than the air outlet end of the air inlet pipe, the water inlet end of the drain pipe is lower than the water outlet end of the drain pipe, and the water inlet end of the drain pipe is towards the bottom of the barrel, so that the liquid in the barrel is not lower than the water inlet end of the drain pipe at the lowest liquid level to prevent tail gas from being discharged from the drain pipe.

2. The device according to claim 1, wherein, The drain pipe is designed in an L shape, the water inlet end of the drain pipe is located on the vertical part of the drain pipe, and the water outlet end of the drain pipe is located on the horizontal part.

3. The device according to claim 1, wherein, The barrel is provided with a detachable barrel cover, the air inlet pipe and the air outlet pipe are connected to the barrel cover, and the condensing unit is detachably connected to the barrel cover.

4. The device according to claim 3, wherein, A sealing ring is arranged between the barrel and the barrel cover.

5. The device according to claim 3, wherein the device is characterized by: The condensing unit comprises a spiral condensing pipe, a water inlet pipe and a water outlet pipe, the water inlet pipe is connected to one end of the condensing pipe, the water outlet pipe is connected to the other end of the condensing pipe, the water inlet pipe and the water outlet pipe are detachably connected to the barrel cover, the water inlet pipe is connected to the water supply end of an external cooling liquid conveying device, the water outlet pipe is connected to the water return end of the cooling liquid conveying device, and the water inlet pipe and the water outlet pipe are used to circulate the external cooling liquid in the condensing pipe.

6. The device according to claim 1, wherein, A liquid level meter assembly for displaying the liquid level in the barrel is arranged on the barrel, the liquid level meter assembly is a U-shaped connecting pipe, both ends of the connecting pipe are in communication with the barrel, and the water inlet end of the drain pipe is higher than the liquid inlet end of the connecting pipe.

7. The device according to claim 3, wherein, A first limiting block is arranged on the air inlet pipe, and a second limiting block is arranged on the air outlet pipe, both the first limiting block and the second limiting block are in contact with the barrel cover.

8. The device according to claim 2, wherein, A stop valve is arranged on the drain pipe, and the stop valve is located on the horizontal part of the drain pipe.

9. The device according to claim 1, wherein, The air inlet pipe and the air outlet pipe are made of polytetrafluoroethylene material.

10. The device according to claim 3, wherein, The barrel and the barrel cover are made of PPR material.

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