Boat structure, bearing structure and machining equipment

Abstract

The utility model provides a boat structure, a bearing structure and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that a handle is easy to upwarp and deform. The boat structure comprises: a main body; the connecting part extends in the first direction, the first direction is crossed with the horizontal direction, the first end of the connecting part is connected with the main body, and the vertical height of the first end of the connecting part is larger than that of the second end of the connecting part; and the extending direction of the supporting part is the horizontal direction, the supporting part is connected with the second end of the corresponding connecting part, and the supporting part is configured to be capable of making contact with the boat support. Due to the fact that the connecting part is obliquely arranged, the force, perpendicular to the extending direction of the connecting part, borne by the connecting part is small, the connecting part is not prone to deformation, the size of the supporting part in the horizontal direction is small, the force arm of the supporting part in the horizontal direction is shorter, and the deformation risk of the supporting part is small.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, in particular to a boat structure, a bearing structure and a processing equipment. BACKGROUND

[0002] In the semiconductor or photovoltaic industry, various quartz components and tools are often used, and the quartz boat structure in the chemical vapor deposition (CVD) furnace is a core component for carrying silicon wafers. Due to its low price, high purity, excellent high-temperature performance, good processing performance and other advantages, it is widely used in various equipment such as plasma enhanced chemical vapor deposition (PECVD), low pressure chemical vapor deposition (LPCVD), atmospheric pressure chemical vapor deposition (APCVD), phosphorus diffusion, boron diffusion, etc.

[0003] Generally, high-purity quartz has better temperature resistance and mechanical properties, but the price is 3-10 times that of ordinary quartz. Although the performance of ordinary purity quartz is also excellent, it is also prone to deformation when used at a temperature of 900-1100℃ for a long time. Deformation of the quartz boat structure can easily cause damage to the product, resulting in economic losses. At the same time, the deformed boat structure cannot be used continuously and needs to be replaced with a new one, which is costly.

[0004] The deformation problem of the boat structure is not only related to the material, but also the mechanical design. The traditional boat structure includes two rectangular panels arranged opposite to each other, and four columns with notches (also called slot rods) arranged between the two panels to connect the two panels, so that the boat structure forms a hollow rectangular box, and the silicon wafer can be inserted horizontally into the notches. In addition, the traditional boat structure also has a handle and a crossbeam. Specifically, two adjacent columns are respectively connected to two ends of a crossbeam extending in the horizontal direction, and the distance between the connection between the column and the top first panel and the connection between the column and the crossbeam is about 1 / 3 of the length of the column. The handle is a rectangular structure extending in the horizontal direction, one end of the handle is connected to the crossbeam, and the handle is used to contact the boat holder to support the entire boat structure. However, due to the long structure of the handle extending in the horizontal direction, the handle is subjected to a large force perpendicular to the extension direction of the handle, which makes the handle easily warped and deformed, resulting in damage to the product, causing economic losses, and the boat structure needs to be replaced after deformation, which is costly. CONTENT OF THE UTILITY MODEL

[0005] To solve the above technical problems, the present application is proposed. Embodiments of the present application provide a boat structure, a bearing structure and a processing equipment.

[0006] In a first aspect, an embodiment of the present application provides a boat structure, comprising: a main body, the main body having a containing space configured to contain a product; at least one connecting part, the connecting part extending along a first direction, the first direction intersecting a horizontal direction, the connecting part having a first end and a second end in the extension direction of the connecting part, the first end of the connecting part being connected to the main body, the vertical height of the first end of the connecting part being greater than the vertical height of the second end of the connecting part; and at least one supporting part, the extension direction of the supporting part being a horizontal direction, the supporting part being arranged one-to-one with the connecting part, the supporting part being connected to the second end of the corresponding connecting part, the supporting part being configured to be capable of contacting a boat holder.

[0007] In some embodiments, the main body comprises: a top plate; a bottom plate arranged opposite to the top plate in a vertical direction; and a plurality of slot rods, the slot rods extending along the vertical direction, two ends of the slot rods in the vertical direction being connected to the top plate and the bottom plate respectively, wherein the first end of the connecting part is arranged at the intersection of the top plate and at least two slot rods.

[0008] In some embodiments, the main body further comprises: at least one cross beam, the cross beam being connected to the side of the top end of the at least two slot rods, the first end of the connecting part being connected to the side wall of the cross beam and the side edge of the top plate.

[0009] In some embodiments, the first end of the connecting part is connected to the side of the top end of the at least two slot rods and the side edge of the top plate.

[0010] In some embodiments, at least part of the connecting part has a dimension in a second direction greater than a dimension of the supporting part in the second direction, the second direction being a horizontal direction perpendicular to the first direction.

[0011] In some embodiments, the connecting part comprises: a first sub-connecting part connected to the main body; a second sub-connecting part connected to the first sub-connecting part; and a third sub-connecting part, two ends of the third sub-connecting part in the first direction being connected to the second sub-connecting part and the supporting part respectively; wherein the third sub-connecting part has a dimension in the second direction same as that of the supporting part in the second direction, one end of the second sub-connecting part close to the third sub-connecting part has a dimension in the second direction same as that of the third sub-connecting part in the second direction, the dimension of the second sub-connecting part in the second direction gradually increases from close to the third sub-connecting part to close to the first sub-connecting part, and the dimension of the first sub-connecting part in the second direction is same as that of the one end of the second sub-connecting part close to the first sub-connecting part in the second direction.

[0012] In some embodiments, the connecting portion has a dimension in a direction perpendicular to the first direction ranging from 11 mm to 16 mm; and / or, the supporting portion has a dimension in the vertical direction ranging from 11 mm to 16 mm.

[0013] In some embodiments, an angle between the first direction and the horizontal direction ranges from 30 degrees to 70 degrees.

[0014] In the second aspect, an embodiment of the present application provides a bearing structure, comprising: a boat support, an upper surface of the boat support having at least one groove; the boat structure of any one of the preceding claims, the supporting portion of the boat structure being capable of being at least partially placed in the groove, the boat structure being configured to bear a product.

[0015] In the third aspect, an embodiment of the present application provides a processing device, comprising: a reaction furnace having a process chamber, configured to process a product; the bearing structure of the second aspect, configured to bear the product; a boat pushing device, configured to bear the bearing structure and send the bearing structure into and out of the process chamber.

[0016] The boat structure, the bearing structure and the processing device provided by the embodiments of the present application have the following advantages. The connecting portion extends along the first direction, the first direction intersects the horizontal direction, the vertical height of the first end of the connecting portion is greater than the vertical height of the second end of the connecting portion, that is, the connecting portion is inclined downwardly, the connecting portion and the supporting portion constitute a handle of the boat structure, because the connecting portion is inclined, the angle between the direction of the force received by the connecting portion and the extension direction of the connecting portion is small, that is, the force perpendicular to the extension direction of the connecting portion received by the connecting portion is small, so the connecting portion is not easy to deform, and in the case that the size of the handle of the boat structure of the embodiments of the present application in the horizontal direction is the same as that of the conventional boat structure, although the supporting portion still extends along the horizontal direction, the size of the supporting portion in the horizontal direction is smaller than the size of the entire handle of the conventional boat structure in the horizontal direction, so in the case that the supporting portion and the handle of the conventional boat structure receive the same force, because the force arm of the supporting portion in the horizontal direction is shorter, the supporting portion is less likely to deform, so the damage of the product caused by the deformation of the handle can be reduced, and the replacement frequency of the boat structure can be reduced, thereby reducing the cost. BRIEF DESCRIPTION OF DRAWINGS

[0017] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which:

[0018] Figure 1Fig. 1 shows a front view of a boat structure.

[0019] Figure 2 Fig. 2 shows a perspective view of a boat structure according to an example embodiment of the present application.

[0020] Figure 3 Fig. 3 shows a front view of a boat structure according to an example embodiment of the present application.

[0021] Figure 4 Fig. 4 shows a perspective view of a boat structure according to an example embodiment of the present application. Figure 3 Fig. 5 shows a partial enlarged view of the boat structure in area A.

[0022] Figure 5 Fig. 6 shows a side view of a boat structure according to an example embodiment of the present application.

[0023] Figure 6 Fig. 7 shows a structural schematic view of a bearing structure according to an example embodiment of the present application.

[0024] Figure 7 Fig. 8 shows a structural schematic view of a processing device according to an example embodiment of the present application.

[0025] Figure 8 Fig. 9 shows a perspective view of a boat structure according to an example embodiment of the present application. Figure 3 Fig. 10 shows a partial enlarged view of the boat structure in area B.

[0026] Reference signs:

[0027] 100, conventional boat structure; 110, first panel; 120, second panel; 130, stand; 140, handle; 200, boat structure; 210, main body; 211, top plate; 212, bottom plate; 213, slot bar; 2131, slot tooth; 214, cross beam; 220, connecting part; 221, first sub connecting part; 222, second sub connecting part; 223, third sub connecting part; 230, supporting part; 300, boat holder; 400, bearing structure; 500, processing device; 600, reaction furnace; 700, boat pushing device. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0029] Summary of the application

[0030] Figure 1The image shown is a front view of a boat structure.

[0031] like Figure 1 As shown, a conventional boat structure 100 typically includes: a first panel 110, a second panel 120, four columns 130, two crossbeams, and two handles 140. The first panel 110 and the second panel 120 are arranged vertically opposite each other. The four columns 130 are arranged in two rows and two columns, extending vertically. The first end of each column 130 is connected to the first panel 110, and the second end of each column 130 is connected to the second panel 120. Each crossbeam connects two adjacent columns 130, and each handle 140 is connected to a crossbeam.

[0032] Specifically, the weight of the boat structure 100 is F1 = mg, where m is the mass of the boat structure 100 and g is the proportionality constant. If the force on each handle 140 is F2, and the angle between the direction of F2 and the vertical direction is x, It remains unchanged. Since the deformation of the handle 140 is mainly due to the force perpendicular to the extension direction of the handle 140, and since the handle 140 extends horizontally and has a relatively long length, the lever arm of the handle 140 is relatively long, and the handle 140 is easy to deform and bend upward.

[0033] In view of this, this application proposes a boat structure, a load-bearing structure, and a processing device. The connecting part extends along a first direction, which intersects with the horizontal direction. The vertical height of the first end of the connecting part is greater than the vertical height of the second end of the connecting part, that is, the connecting part is inclined downwards. The downwardly inclined connecting part and the support part constitute the handle of the boat structure. Because the connecting part is inclined, the angle between the direction of the force on the connecting part and the extension direction of the connecting part is small, that is, the force perpendicular to the extension direction of the connecting part is small. Therefore, the connecting part is not easily deformed. Furthermore, when the handle of the boat structure in this application embodiment has the same horizontal dimension as the handle of the conventional boat structure, although the support part still extends along the horizontal direction, the horizontal dimension of the support part is smaller than the horizontal dimension of the entire handle of the conventional boat structure. Therefore, when the support part and the handle of the conventional boat structure are subjected to the same magnitude of force, the horizontal lever arm of the support part is shorter, the risk of deformation of the support part is smaller, thereby reducing the occurrence of product damage due to handle deformation and reducing the replacement frequency of the boat structure, thus reducing costs.

[0034] Exemplary device

[0035] Figure 2 The image shown is a perspective view of a boat structure provided in an exemplary embodiment of this application. Figure 3The image shown is a front view of a boat structure provided in an exemplary embodiment of this application. Figure 4 The image shown is an exemplary embodiment of this application. Figure 3 The image shown is a magnified view of a portion of the boat structure in region A. Figure 5 The image shown is a side view of a boat structure provided in an exemplary embodiment of this application.

[0036] like Figures 2-5 As shown, this application embodiment provides a boat structure 200, which includes: a main body 210, at least one connecting portion 220, and at least one supporting portion 230. The main body 210 has a receiving space configured to receive a product. The connecting portion 220 is along a first direction (e.g., Figure 3 The first direction (X-direction) extends, intersecting the horizontal direction. The connecting part 220 has a first end and a second end in its extending direction. The first end of the connecting part 220 is connected to the main body 210. The vertical height of the first end of the connecting part 220 is greater than the vertical height of the second end of the connecting part 220, that is, the connecting part 220 is inclined downwards. The supporting part 230 extends in the horizontal direction. The supporting part 230 is provided in a one-to-one correspondence with the connecting part 220. The supporting part 230 is connected to the second end of the corresponding connecting part 220. The supporting part 230 is configured to contact the boat support 300.

[0037] For example, the boat structure 200 includes two connecting parts 220 and two supporting parts 230. The two connecting parts 220 are respectively connected to both sides of the main body 210, and each supporting part 230 is connected to the second end of the corresponding connecting part.

[0038] For example, each connecting part 220 and the corresponding supporting part 230 are integrally formed.

[0039] For example, the product is a silicon wafer, a glass substrate, a crystal wafer, etc.

[0040] For example, the first end of the connecting portion 220 is connected to the connecting surface of the main body 210 near the main body 210.

[0041] In the above embodiment, the connection portion 220 and the support portion 230 form the handle of the boat structure 200. Since the connection portion 220 is inclined, the angle between the direction of the force received by the connection portion 220 and the extension direction of the connection portion 220 is small, i.e., the force perpendicular to the extension direction of the connection portion 220 received by the connection portion 220 is small, so the connection portion 220 is not easily deformed. In the case where the size of the handle of the boat structure 200 of the embodiment of the present application in the horizontal direction is the same as that of the handle 140 of the conventional boat structure 100, although the support portion 230 still extends in the horizontal direction, the size of the support portion 230 in the horizontal direction is smaller than the size of the entire handle 140 of the conventional boat structure 100 in the horizontal direction. Therefore, in the case where the support portion 230 receives the same force as the handle 140 of the conventional boat structure 100, since the force arm of the support portion 230 in the horizontal direction is shorter, the support portion 230 is less likely to be deformed, so the product damage caused by deformation of the handle can be reduced, and the replacement frequency of the boat structure 200 can be reduced, thereby reducing the cost.

[0042] In some embodiments, as shown in Figure 2 , Figure 3 and Figure 5 , the main body 210 includes a top plate 211, a bottom plate 212, and a plurality of slot rods 213. The bottom plate 212 is arranged opposite to the top plate 211 in the vertical direction. The slot rods 213 extend in the vertical direction, and the two ends of the slot rods 213 in the vertical direction are connected to the top plate 211 and the bottom plate 212, respectively. The first end of the connection portion 220 is arranged at the junction of the top plate 211 and at least two slot rods 213.

[0043] Exemplarily, as shown in Figure 4 , the slot rod 213 has a plurality of slot teeth 2131, and the upper surfaces of the slot teeth 2131 can support the edge region of the product.

[0044] In the conventional boat structure 100, the force F3=sin(x)F2 perpendicular to the extension direction of the column 130 applied to the column 130 by the handle 140 mainly causes the deformation of the column 130. In the conventional boat structure 100, the distance between the connection between the column 130 and the first panel 110 and the connection between the column 130 and the cross beam is about This is because the closer the connection between the cross beam and the column 130 to the center of the column 130, the longer the force arm of the column 130, which causes the column 130 to be more easily deformed.

[0045] In the above embodiment, by arranging the first end of the connecting portion 220 at the junction of the top plate 211 and the at least two channel bars 213, the force applied by the connecting portion 220 to the channel bars 213 can act on the top of the channel bars 213, thereby shortening the force arm of the channel bars 213 compared to the uprights 130 of the conventional boat structure 100, and thus reducing the risk of deformation of the channel bars 213.

[0046] In some embodiments, the first end of the connecting portion 220 is connected to the side of the top end of the at least two channel bars 213 and the side of the top plate 211.

[0047] In the above embodiment, since the first end of the connecting portion 220 is connected to the side of the top plate 211 and the side of the top end of the channel bars 213, the horizontal force applied by the connecting portion 220 can be borne by the top plate 211 and the channel bars 213 at the same time, thereby reducing the magnitude of the force borne by the channel bars 213 compared to the conventional boat structure 100 in which the horizontal force applied by the handle 140 is borne by the uprights 130 only.

[0048] In some embodiments, as shown in Figure 5 the body 210 further comprises at least one cross beam 214 connected to the side of the top end of the at least two channel bars 213, and the first end of the connecting portion 220 is connected to the side wall of the cross beam 214 and the side of the top plate 211.

[0049] Specifically, the connecting surface can be connected to the side of the top plate 211 and the side wall of the cross beam 214 at the same time.

[0050] Exemplarily, the connecting surface can be connected to the side of the top plate 211 and the side wall of the cross beam 214 by welding.

[0051] Exemplarily, the number of channel bars 213 is four, and the number of cross beams 214 is two, the four channel bars 213 are arranged in two rows and two columns, the first cross beam 214 is connected to the side of the top end of the two channel bars 213 in the first row, and the second cross beam 214 is connected to the side of the top end of the two channel bars 213 in the second row.

[0052] In the above embodiment, since the first end of the connecting portion 220 is connected to the side of the top plate 211 and the side of the top end of the channel bars 213 through the cross beam 214, the horizontal force applied by the connecting portion 220 can be borne by the top plate 211 and the channel bars 213 at the same time, thereby reducing the magnitude of the force borne by the channel bars 213 compared to the conventional boat structure 100 in which the horizontal force applied by the handle 140 is borne by the uprights 130 only.

[0053] In some embodiments, as shown in Figure 2 and Figure 3 the top plate 211 extends in the horizontal direction.

[0054] Exemplarily, the top plate 211 extends along a third direction (i.e., the Z direction in the coordinate system shown in FIG. 2), and the third direction is a horizontal direction. The direction of the horizontal force applied by the connecting portion 220 to the slot bar 213 and the top plate 211 is also the third direction. Figure 3

[0055] In the above embodiment, by extending the top plate 211 along the horizontal direction, the horizontal force applied by the first end of the connecting portion 220 to the side edge of the top plate 211 is the same as the extending direction of the top plate 211, thereby reducing the deformation of the top plate 211.

[0056] In some embodiments, as shown in FIGS. 1A and 1B, at least part of the connecting portion 220 has a dimension in the second direction (i.e., the Y direction in the coordinate system shown in FIG. 2) that is greater than the dimension of the supporting portion 230 in the second direction. Figure 2 Figure 5 In some embodiments, as shown in FIGS. 1A and 1B, at least part of the connecting portion 220 has a dimension in the second direction (i.e., the Y direction in the coordinate system shown in FIG. 2) that is greater than the dimension of the supporting portion 230 in the second direction. Figure 5

[0057] Generally, the boat support 300 is provided with a groove, and the handle 140 of the conventional boat structure 100 has a cuboid structure, and the end of the handle 140 close to the boat support 300 is placed in the groove. In the embodiment of the present application, the dimension of the supporting portion 230 in the second direction is not changed, so that the supporting portion 230 can still be placed in the groove. The dimension of at least part of the connecting portion 220 in the second direction is increased, thereby reducing the force per unit volume of the connecting portion 220 and reducing the risk of deformation of the connecting portion 220.

[0058] In some embodiments, the dimension of the connecting portion 220 in the second direction gradually increases from the second end to the first end, and the dimension of the second end of the connecting portion 220 in the second direction is the same as the dimension of the supporting portion 230 in the second direction.

[0059] In the above embodiment, by this structure, the dimension of part of the connecting portion 220 in the second direction is greater than the dimension of the supporting portion 230, thereby reducing the force per unit volume of the part of the connecting portion 220. In addition, since the dimension of the first end of the connecting portion 220 in the second direction is increased compared with the dimension of the handle 140 of the conventional boat structure 100 in the second direction, i.e., the dimension of the above connecting surface is increased, the force per unit area of the connecting surface can be reduced, and the risk of deformation of the connecting portion 220 is further reduced.

[0060] In some embodiments, the connecting portion 220 has a cuboid structure, the dimension of the connecting portion 220 in the second direction remains unchanged from the second end to the first end, and the dimension of the connecting portion 220 in the second direction is greater than the dimension of the supporting portion 230 in the second direction.

[0061] ​​​In the above embodiment, the part of the connecting portion 220 in the second direction is larger than the supporting portion 230, so that the stress per unit volume of the part of the connecting portion 220 is reduced. In addition, the first end of the connecting portion 220 in the second direction is larger than the handle 140 of the conventional boat structure 100 in the second direction, i.e., the size of the connecting surface is increased, so that the stress per unit area of the connecting surface is reduced, and the deformation risk of the connecting portion 220 is further reduced.

[0062] In some embodiments, as shown in Figure 2 and Figure 5 The connecting portion 220 includes a first sub-connecting portion 221, a second sub-connecting portion 222, and a third sub-connecting portion 223. The first sub-connecting portion 221 is connected to the main body 210. The second sub-connecting portion 222 is connected to the first sub-connecting portion 221. The two ends of the third sub-connecting portion 223 in the first direction are connected to the second sub-connecting portion 222 and the supporting portion 230, respectively. The size of the third sub-connecting portion 223 in the second direction is the same as the size of the supporting portion 230 in the second direction. The size of the end of the second sub-connecting portion 222 close to the third sub-connecting portion 223 in the second direction is the same as the size of the third sub-connecting portion 223 in the second direction. The size of the second sub-connecting portion 222 in the second direction gradually increases from the end close to the third sub-connecting portion 223 to the end close to the first sub-connecting portion 221. The size of the first sub-connecting portion 221 in the second direction is the same as the size of the end of the second sub-connecting portion 222 close to the first sub-connecting portion 221 in the second direction.

[0063] In the above embodiment, the part of the connecting portion 220 in the second direction is larger than the supporting portion 230, so that the stress per unit volume of the part of the connecting portion 220 is reduced. In addition, the first sub-connecting portion 221 in the second direction is larger than the handle 140 of the conventional boat structure 100 in the second direction, i.e., the size of the connecting surface is increased, so that the stress per unit area of the connecting surface is reduced, and the deformation risk of the connecting portion 220 is further reduced. In addition, the size of the second sub-connecting portion 222 in the second direction gradually increases from one end to the other end to a predetermined size. Compared with the case where the size of the second sub-connecting portion 222 in the second direction is always the predetermined size from one end to the other end, the volume is reduced, the use of materials for manufacturing the second sub-connecting portion 222 is reduced, the resistance to process gas during product processing is reduced, and the process quality is improved.

[0064] Figure 8 The boat structure provided by the exemplary embodiment of the present application is shown in Figure 3 The local enlarged view of the boat structure in the B area is shown.

[0065] In some embodiments, as shown in FIG. 2A, the size (i.e. thickness, as shown by size d in FIG. 2A) of the connecting portion 220 in the direction perpendicular to the first direction ranges from 11 mm to 16 mm, and / or the size (i.e. thickness) of the supporting portion 230 in the vertical direction ranges from 11 mm to 16 mm. Figure 8 In some embodiments, as shown in FIG. 2A, the size (i.e. thickness, as shown by size d in FIG. 2A) of the connecting portion 220 in the direction perpendicular to the first direction ranges from 11 mm to 16 mm, and / or the size (i.e. thickness) of the supporting portion 230 in the vertical direction ranges from 11 mm to 16 mm. Figure 3 In some embodiments, as shown in FIG. 2A, the size (i.e. thickness, as shown by size d in FIG. 2A) of the connecting portion 220 in the direction perpendicular to the first direction ranges from 11 mm to 16 mm, and / or the size (i.e. thickness) of the supporting portion 230 in the vertical direction ranges from 11 mm to 16 mm.

[0066] In the above embodiments, by making the thickness of the connecting portion 220 and / or the supporting portion 230 greater than or equal to 11 mm, the structural strength of the connecting portion 220 and / or the supporting portion 230 can be improved, and the risk of deformation of the connecting portion 220 and / or the supporting portion 230 can be reduced. Moreover, by making the thickness of the connecting portion 220 and / or the supporting portion 230 less than 16 mm, the weight of the connecting portion 220 and / or the supporting portion 230 can be reduced, and the use of materials for manufacturing the connecting portion 220 and / or the supporting portion 230 can be reduced.

[0067] In some embodiments, the angle between the first direction and the horizontal direction ranges from 30 degrees to 70 degrees.

[0068] The boat support 300 generally has two side plates oppositely arranged in the horizontal direction, and each of the two side plates has a groove, and the two supporting portions 230 of the boat structure 200 can be respectively placed in the grooves of the two side plates, and the main body 210 is located between the two side plates. In the case that the size of the boat support 300 does not change, if the angle between the first direction and the horizontal direction is small, the force of the connecting portion 220 on the groove bar 213 in the horizontal direction is large, which can easily cause the groove bar 213 to deform. If the angle between the first direction and the horizontal direction is large, the supporting portion 230 needs to be elongated so that the two supporting portions 230 can be at least partially placed in the grooves of the two side plates, which can easily cause the supporting portion 230 to deform. In the above embodiments, by making the angle between the first direction and the horizontal direction range from 30 degrees to 70 degrees, the force of the connecting portion 220 on the groove bar 213 in the horizontal direction can be small enough, and the risk of deformation of the groove bar 213 can be small, and the supporting portion 230 does not need to be set too long, and the risk of deformation of the supporting portion 230 can be reduced.

[0069] In some embodiments, the material of the connecting portion 220 is quartz, and / or the material of the supporting portion 230 is quartz.

[0070] Quartz has the properties of high temperature resistance and high strength. In the above embodiments, by making the material of the connecting portion 220 and / or the supporting portion 230 be quartz, the connecting portion 220 and / or the supporting portion 230 can not easily deform in the high temperature environment of the reaction furnace 600.

[0071] Figure 6 FIG. 2A shows a structure schematic diagram of a bearing structure provided by an exemplary embodiment of the present application.

[0072] Based on the same concept, as shown in Figure 6 The boat support 300 has at least one recess on the upper surface. The support part 230 of the boat structure 200 can be at least partially placed in the recess, and the boat structure 200 is configured to carry the product.

[0073] Exemplarily, the boat support 300 includes two side plates and two connecting plates. The two side plates are oppositely arranged, and each side plate extends along the horizontal direction. One connecting plate is connected between the first ends of the two side plates, and the other connecting plate is connected between the second ends of the two side plates. The upper end of each side plate has at least one recess. The boat structure 200 has two support parts 230, and the two support parts 230 can be at least partially placed in the recesses of the two side plates, respectively.

[0074] Figure 7 Fig. 1 shows a structural schematic diagram of a processing apparatus provided by an exemplary embodiment of the present application.

[0075] Based on the same concept, as shown in Figure 7 The processing apparatus 500 includes a reaction furnace 600, the carrying structure 400 in the above embodiments, and a boat pushing device 700. The reaction furnace 600 has a process chamber and is configured to process the product. The carrying structure 400 is configured to carry the product. The boat pushing device 700 is configured to carry the carrying structure 400 and send the carrying structure 400 into and out of the process chamber.

[0076] The above describes the basic principles of the present application in combination with specific embodiments. However, it should be pointed out that the advantages, benefits, effects and the like mentioned in the present application are only examples and are not limiting, and these advantages, benefits, effects and the like cannot be considered as necessary for each embodiment of the present application. In addition, the above specific details are only for the purpose of example and understanding, and are not limiting, and the above details do not limit the present application to the above specific details.

[0077] The block diagrams of the devices, apparatuses, equipment, systems involved in the present application are only illustrative examples and are not intended to require or imply that the connection, arrangement, configuration must be as shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have" and the like are open-ended words, which mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0078] It is also important to note that the devices, apparatuses and methods described in the present application can be embodied in a variety of other forms, modi fications and alt ernatives, some of which have been discussed above and some of which are gathe red as wi ll be apparent to those reasonably skilled in the art. The described aspects and embodiments are to be considered in a descriptive sense only and not for purposes of limitation. Therefore, the scope of the present application is not to be determined strictly by the description contained herein but by the appended claims and their equivalents.

[0079] The above description of disclosed aspects is intended to be illustrative, and not restrictive. Other aspects, including modifications and alternative forms, will be apparent upon reading this disclosure. The various aspects of the present application are defined in the appended claims, and the equivalents thereof.

[0080] The above description has been presented for the purpose of illustration and description. It is not intended to be exhaustive or to limit the embodiments of the present application to the precise forms disclosed. Although various example aspects and embodiments have been discussed above, those of ordinary skill in the art will appreciate a variety of modifications, alternatives, permutations, additions, and omissions based on the teachings of the present application.

Claims

1. A boat structure, characterized in that, include: The main body has a receiving space configured to receive a product; At least one connecting portion extends along a first direction, which intersects a horizontal direction. The connecting portion has a first end and a second end in the extending direction of the connecting portion. The first end of the connecting portion is connected to the main body, and the vertical height of the first end of the connecting portion is greater than the vertical height of the second end of the connecting portion. At least one support portion extends horizontally, and the support portion is provided in a one-to-one correspondence with the connecting portion. The support portion is connected to the second end of the corresponding connecting portion, and the support portion is configured to contact the boat support.

2. The boat structure according to claim 1, characterized in that, The subject includes: roof; The base plate is vertically opposite to the top plate; Multiple slotted bars extend vertically, and the two ends of the slotted bars in the vertical direction are respectively connected to the top plate and the bottom plate. The first end of the connecting part is located at the junction of the top plate and at least two of the slotted bars.

3. The boat structure according to claim 2, characterized in that, The subject also includes: At least one crossbeam is connected to the side of the top end of at least two of the grooved bars, and the first end of the connection is connected to the side wall of the crossbeam and the side edge of the top plate.

4. The boat structure according to claim 2, characterized in that, The first end of the connecting part is connected to the side of the top of at least two of the grooved bars and the side of the top plate.

5. The boat structure according to any one of claims 1 to 3, characterized in that, At least a portion of the connecting portion has a larger dimension in a second direction than the supporting portion in the second direction, where the second direction is a horizontal direction perpendicular to the first direction.

6. The boat structure according to claim 5, characterized in that, The connecting part includes: The first sub-connecting part is connected to the main body; The second sub-connecting part is connected to the first sub-connecting part; The third sub-connecting part is connected to the second sub-connecting part and the supporting part at its two ends in the first direction, respectively; Wherein, the dimension of the third sub-connecting part in the second direction is the same as the dimension of the supporting part in the second direction, the dimension of the end of the second sub-connecting part near the third sub-connecting part in the second direction is the same as the dimension of the third sub-connecting part in the second direction, the dimension of the second sub-connecting part in the second direction gradually increases from near the third sub-connecting part to near the first sub-connecting part, and the dimension of the first sub-connecting part in the second direction is the same as the dimension of the end of the second sub-connecting part near the first sub-connecting part in the second direction.

7. The boat structure according to any one of claims 1 to 3, characterized in that, The dimensions of the connecting portion in the direction perpendicular to the first direction range from 11 mm to 16 mm; And / or, the dimensions of the support portion in the vertical direction range from 11 mm to 16 mm.

8. The boat structure according to any one of claims 1 to 3, characterized in that, The angle between the first direction and the horizontal direction is 30 degrees to 70 degrees.

9. A load-bearing structure, characterized in that, include: A boat support, wherein the upper surface of the boat support has at least one groove; The boat structure according to any one of claims 1 to 8, wherein the support portion of the boat structure can be at least partially placed in the groove, and the boat structure is configured to carry a product.

10. A processing device, characterized in that, include: A reactor, having a process chamber, is configured to process products; The support structure according to claim 9 is configured to support the product; A boat-pushing device is configured to carry the supporting structure and to feed the supporting structure into and out of the process chamber.

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