Seed chuck

Abstract

The seed crystal chuck comprises a main body and a plurality of screws, and the main body is provided with an axial threaded hole, a seed crystal cap accommodating cavity, a seed crystal rod accommodating cavity and a plurality of radial threaded holes; the axial threaded hole is used for being in threaded connection with an external thread of a lifting rod; the seed crystal cap accommodating cavity is adjacent to the axial threaded hole and is used for accommodating a cap part of a seed crystal and supporting the cap part of the seed crystal in a contact manner from a lower plane, and a small-size convex part, adjacent to the external thread, of the lifting rod extends into the seed crystal cap accommodating cavity and is pressed against the cap part of the seed crystal in a contact manner from an axial upper plane; the seed crystal rod accommodating cavity is axially positioned below the seed crystal cap accommodating cavity and is communicated with the seed crystal cap accommodating cavity; the seed crystal rod accommodating cavity is used for accommodating a rod part of a seed crystal in a clearance fit manner and enabling a seeding end of the rod part of the seed crystal to be downwards exposed; the multiple radial threaded holes are located in the same circumference and arranged at equal intervals. Each screw is used for being matched with the radial threaded hole, each screw is provided with a round head located at the tail end, and the round heads are used for pressing and abutting against the circumferential side face of the cap part of the seed crystal in the radial direction on the horizontal plane.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of crystal growth, and more particularly to a seed crystal chuck. BACKGROUND

[0002] In the growth of crystals by the Czochralski method, a seed crystal is usually used for seeding.

[0003] Patent document CN213835624U discloses a single crystal seed clamping mechanism, which comprises a seed clamping device. The seed clamping device is in the form of an integral single piece. The seed crystal is T-shaped with a rectangular cross-section cap portion and a rectangular cross-section rod portion. After the cap portion is placed in the rectangular cross-section clamping groove of the seed clamping device, a pin is used to press the cap portion from above by passing through the pin hole of the seed clamping device.

[0004] In this patent document, although the cap portion and the clamping groove are fixed by shape and assembly tolerance, there is still a problem that the clamping groove does not provide sufficient stability for the seed crystal in the horizontal plane. During pulling, the seed crystal shakes left and right due to crystal rotation, resulting in poor crystal transverse resistivity uniformity.

[0005] In this patent document, although the pin presses the cap portion from above, the pin does not press the cap portion directly downward along the axial direction but radially. Because the axial dimension of the pin is much larger than the radial dimension, this pressing method of the pin will result in insufficient centration and stability of the seed crystal in the vertical direction, causing the seed crystal to shake up and down due to buoyancy and air flow during fusion, resulting in large thermal shock and dislocation multiplication.

[0006] In addition, the way of pressing the cap portion from above by the pin makes the pressure applied by radial extrusion fixed and unable to be adjusted. CONTENT OF THE UTILITY MODEL

[0007] In view of the problems in the background art, an object of the present disclosure is to provide a seed crystal chuck that can keep the cap portion of the seed crystal in a stable state in the horizontal plane.

[0008] Another object of the present disclosure is to provide a seed crystal chuck that can improve the accuracy and stability of positioning the cap portion in the horizontal plane.

[0009] Another object of the present disclosure is to provide a seed crystal chuck that can provide sufficient centration and stability of the seed crystal in the vertical direction.

[0010] Still another object of the present disclosure is to provide a seed crystal chuck that can adjust the force applied to the cap portion of the seed crystal.

[0011] Thus, a seed chuck is provided, the seed chuck comprising a main body and a plurality of screws, the main body being provided with an axial threaded hole, a seed cap accommodating cavity, a seed rod accommodating cavity, and a plurality of radial threaded holes; the axial threaded hole is used for screwing with an outer thread of a pulling rod; the seed cap accommodating cavity is adjacent to the axial threaded hole, a circumferential shape of the seed cap accommodating cavity is set to be complementary to a cap part of a seed, an axial depth of the seed cap accommodating cavity is set to be greater than a thickness of the cap part of the seed, the seed cap accommodating cavity is used for accommodating the cap part of the seed, supporting the cap part of the seed from below in a planar contact manner, and allowing a small-size protrusion adjacent to the outer thread of the pulling rod to extend into and press against the cap part of the seed from above in an axial planar contact manner; the seed rod accommodating cavity is located below the seed cap accommodating cavity in an axial direction and is communicated with the seed cap accommodating cavity, the seed rod accommodating cavity is used for gap-fittingly accommodating a rod part of the seed and exposing a seed crystal leading end of the rod part downward; the plurality of radial threaded holes are located on the same circumference and are arranged at equal intervals; each screw is used for cooperating with a radial threaded hole, and each screw has a round head at a terminal end, the round head being used for pressing against a peripheral side surface of the cap part of the seed in a radial direction on a horizontal plane.

[0012] The beneficial effects of the present disclosure are as follows.

[0013] In the seed chuck according to the present disclosure, on the basis of the cooperation between the seed cap accommodating cavity and the cap part of the seed, the round heads of the plurality of screws are used for pressing against the peripheral side surface of the cap part of the seed in a radial direction on a horizontal plane, so that the cap part of the seed can be kept in a stable state on the horizontal plane even if there is an assembly tolerance between the seed cap accommodating cavity and the cap part of the seed, and further, the seed crystal will not shake left and right during pulling, and thus the crystal transverse resistivity uniformity will not be affected.

[0014] In the seed chuck according to the present disclosure, the round head at the terminal end of each screw is conducive to accurately determining the contact position of each screw and the cap part of the seed, and improving the accuracy and stability of positioning the cap part on the horizontal plane. In addition, the round head avoids scratching the cap part of the seed.

[0015] In the seed chuck according to the present disclosure, the axial depth of the seed cap accommodating cavity is set to be greater than the thickness of the cap part of the seed, so that the small-size protrusion adjacent to the outer thread of the pulling rod can extend into and press against the cap part of the seed from above in an axial planar contact manner, so that the cap part of the seed is directly pressed downward in the axial direction of the pulling rod, and the pressing direction is the same as the axial direction, so that the centering and stability of the seed in the up-down direction (i.e. the axial direction) are sufficient, and further, the seed will not shake up and down due to buoyancy and air flow during fusion, will not cause large thermal shock, and will not cause dislocation growth.

[0016] In the seed holder according to the present disclosure, because the axial threaded hole is used to be screwed with the outer thread of the pull rod, the force applied by the small-sized protrusion of the pull rod adjacent to the outer thread to the cap portion of the seed crystal in contact with the axial upper plane is controllable, so that the protrusion of the pull rod can adjust the force applied to the cap portion 300a of the seed crystal. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a sectional view of a seed holder according to the present disclosure.

[0018] Figure 2 is Figure 1 an exploded view of

[0019] Figure 3 is Figure 2 a perspective view of

[0020] Figure 4 is a perspective view of the main body, in which only one slit is shown.

[0021] Figure 5 is an example of a seed crystal, the left side view is a top perspective view, the middle view is a bottom perspective view, and the right side view is a top view.

[0022] Figure 6 is another example of a seed crystal, the left side view is a top perspective view, the middle view is a bottom perspective view, and the right side view is a top view.

[0023] Figure 7 is yet another example of a seed crystal, the left side view is a top perspective view, the middle view is a bottom perspective view, and the right side view is a top view.

[0024] In which the reference signs are as follows.

[0025] 100 seed holder 200 pull rod

[0026] 1 main body 200a outer thread

[0027] 11 axial threaded hole 200b protrusion

[0028] 12 seed crystal cap receiving cavity 300 seed crystal

[0029] 13 seed rod receiving cavity 300a cap portion

[0030] 14 radial threaded hole 300b rod portion

[0031] 15 slit 300c seeding end

[0032] 2 screw D axial DETAILED DESCRIPTION

[0033] The accompanying drawings illustrate embodiments of the present disclosure and it is to be understood that the disclosed embodiments are merely examples of the present disclosure, the present disclosure can be implemented in various forms, therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as a basis for the claims and as a basis for teaching a person of ordinary skill in the art to implement the present disclosure in various ways.

[0034] Referring to Figures 1 to 7 According to the seed holder 100 of the present disclosure, the seed holder 100 comprises a main body 1 and a plurality of screws 2.

[0035] The main body 1 is provided with an axial threaded hole 11, a seed cap accommodating cavity 12, a seed rod accommodating cavity 13, and a plurality of radial threaded holes 14. The axial threaded hole 11 is used for screwing with the external thread 200a of the pulling rod 200. The seed cap accommodating cavity 12 is adjacent to the axial threaded hole 11, the circumferential shape of the seed cap accommodating cavity 12 is set to be complementary to the cap part 300a of the seed 300, the axial D depth of the seed cap accommodating cavity 12 is set to be greater than the thickness of the cap part 300a of the seed 300, the seed cap accommodating cavity 12 is used for accommodating the cap part 300a of the seed 300, supporting the cap part 300a of the seed 300 from the lower plane, and allowing the small size protrusion 200b adjacent to the external thread 200a of the pulling rod 200 to extend into and press against the cap part 300a of the seed 300 from the upper plane in the axial D. The seed rod accommodating cavity 13 is located below the seed cap accommodating cavity 12 in the axial D and communicates with the seed cap accommodating cavity 12, the seed rod accommodating cavity 13 is used for gap fittingly accommodating the rod part 300b of the seed 300 and exposing the seed end 300c of the rod part 300b downward. The plurality of radial threaded holes 14 are located on the same circumference and are arranged at equal intervals. Each screw 2 is used for cooperating with the radial threaded hole 14, each screw 2 has a round head 51 at the end, and the round head 51 is used for pressing against the circumferential side surface of the cap part 300a of the seed 300 in the horizontal plane in the radial direction.

[0036] In the seed holder 100 according to the present disclosure, on the basis of the cooperation between the seed cap accommodating cavity 12 and the cap part 300a of the seed 300, the round head 51 of the plurality of screws 2 is used for pressing against the circumferential side surface of the cap part 300a of the seed 300 in the horizontal plane in the radial direction, even if there is an assembly tolerance between the seed cap accommodating cavity 12 and the cap part 300a of the seed 300, the cap part 300a of the seed 300 can be in a stable state in the horizontal plane, further, during pulling, the crystal transfer will not cause the seed 300 to shake left and right, and further will not affect the crystal transverse resistivity uniformity.

[0037] In the seed holder 100 according to the present disclosure, the round head 51 of each screw 2 at the end facilitates accurate determination of the contact position of each screw 2 with the cap portion 300a of the seed 300, improving the accuracy and stability of positioning the cap portion 300a in the horizontal plane. In addition, the round head 51 avoids scratching the cap portion 300a of the seed 300.

[0038] In the seed holder 100 according to the present disclosure, the depth of the axial direction D of the seed cap receiving cavity 12 is set to be greater than the thickness of the cap portion 300a of the seed 300, so that the small size protrusion 200b of the pull rod 200 adjacent to the external thread 200a can extend into and press against the cap portion 300a of the seed 300 from the plane above the axial direction D, so that the cap portion 300a of the seed 300 is directly pressed downward along the axial direction of the pull rod 200, and the pressing direction is the same as the axial direction, so that the centering and stability of the seed 300 in the up-down direction (i.e. the axial direction D) is sufficient, further, the seed 300 will not sway up and down during fusion due to buoyancy and air flow, which will not cause thermal shock and dislocation growth.

[0039] In the seed holder 100 according to the present disclosure, because the axial threaded hole 11 is used for screwing with the external thread 200a of the pull rod 200, the force applied by the small size protrusion 200b of the pull rod 200 adjacent to the external thread 200a pressing against the cap portion 300a of the seed 300 from the plane above the axial direction D is controllable, so that the force applied by the protrusion 200b of the pull rod 200 to the cap portion 300a of the seed 300 can be adjusted.

[0040] For example, the seed cap receiving cavity 12 is set to be complementary to the cap portion 300a of the seed 300 of a constant cross-section rectangular (see Figure 5 the square and Figure 6 the long rectangle) or circular (see Figure 7 ) and a constant cross-section rectangular or circular that does not interfere with the protrusion 200b of the pull rod 200 when the external thread 200a of the pull rod 200 is threadedly engaged with the axial threaded hole 11.

[0041] As shown in Figures 1 to 3 and in combination with Figures 5 to 7 , in an example, the seed rod receiving cavity 13 is cylindrical and complementary to the circumferential surface of the cylindrical rod portion 300b of the seed 300.

[0042] Referring to Figure 3 and in combination with Figure 5 and Figure 6 , the number of the plurality of radial threaded holes 14 is four corresponding to the cap portion 300a of the seed 300 of a constant cross-section rectangular, and each radial threaded hole 14 corresponds to one circumferential side surface of the cap portion 300a of the seed 300. In another example, in combination withFigure 7 The number of radial threaded holes 14 is at least three corresponding to the cap 300a of the seed crystal 300 with a constant cross-section.

[0043] like Figure 4 As shown, the part of the main body 1 corresponding to the axial threaded hole 11 and the seed crystal cap receiving cavity 12 has a cylindrical shape; the part of the main body 1 corresponding to the seed crystal rod receiving cavity 13 has an inverted frustum shape.

[0044] Reference Figures 1 to 4 The portion of the main body 1 corresponding to the seed crystal rod receiving cavity 13 has a radially formed slit 15 extending from the outer surface to the seed crystal rod receiving cavity 13. During the pulling process, the airflow of the atmosphere in the pulling furnace (e.g., the airflow of hydrogen introduced into the pulling furnace during germanium crystal pulling) flows through the slit 15 into the gap between the seed crystal rod receiving cavity 13 and the rod portion 300b of the seed crystal chuck 100. This prevents the connection between the seed crystal 300 and the seed crystal chuck 100 (i.e., the part where the cap portion 300a of the seed crystal 300 connects to the rod portion 300b) from being in a dead zone of airflow, and prevents oxidation of the upper end of the rod portion 300b of the seed crystal 300, thereby ensuring the structural strength of the seed crystal 300 and the quality of the crystal rod grown by pulling.

[0045] Furthermore, such as Figures 1 to 4 As shown, the slit 15 extends upward from the end of the main body 1 opposite to the seed crystal cap cavity 12 of the seed crystal rod cavity 13, extending beyond half of the seed crystal rod cavity 13. More specifically, the slit 15 extends upward from the end of the main body 1 opposite to the seed crystal cap cavity 12 of the seed crystal rod cavity 13, extending to two-thirds of the seed crystal rod cavity 13.

[0046] In one example, there are multiple slits 15, which divide the 360-degree circumference into equal parts.

[0047] Similar to the background technology patent documents, the main body 1 is a single, integrated piece.

[0048] It should be noted that the seed crystal chuck 100 is applicable not only to seed crystals of germanium grown by the Czochralski method, but also to seed crystals of other materials with the same or similar shapes.

[0049] Several exemplary embodiments have been described in detail above, but this document is not intended to limit itself to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined to form several other combinations, which are not shown for simplicity.

Claims

1. A seed holder, characterized in that, the seed holder (100) comprises a main body (1) and a plurality of screws (2), the main body (1) is provided with an axial threaded hole (11), a seed cap accommodating cavity (12), a seed rod accommodating cavity (13), and a plurality of radial threaded holes (14); the axial threaded hole (11) is used for screwing with an external thread (200a) of a pulling rod (200); the seed cap accommodating cavity (12) is adjacent to the axial threaded hole (11), a circumferential shape of the seed cap accommodating cavity (12) is set to be complementary to a cap portion (300a) of a seed (300), an axial direction (D) of the seed cap accommodating cavity (12) is set to be greater than a thickness of the cap portion (300a) of the seed (300), the seed cap accommodating cavity (12) is used for accommodating the cap portion (300a) of the seed (300), supporting the cap portion (300a) of the seed (300) from below in a planar contact manner, and allowing a small protrusion (200b) adjacent to the external thread (200a) of the pulling rod (200) to extend into and press against the cap portion (300a) of the seed (300) from above in a planar contact manner; the seed rod accommodating cavity (13) is located below the seed cap accommodating cavity (12) along the axial direction (D) and is communicated with the seed cap accommodating cavity (12), the seed rod accommodating cavity (13) is used for gap-fittingly accommodating a rod portion (300b) of the seed (300) and exposing a seed leading end (300c) of the rod portion (300b) of the seed (300) downward; the plurality of radial threaded holes (14) are located on the same circumference and are arranged at equal intervals; each screw (2) is used for cooperating with the radial threaded hole (14), and each screw (2) has a round head (51) located at a terminal end, the round head (51) is used for pressing against a circumferential side surface of the cap portion (300a) of the seed (300) in a radial direction on a horizontal plane. 2.The seed holder according to claim 1, characterized in that, the seed cap accommodating cavity (12) is set to be a cross-section constant rectangle or a cross-section constant circle which is gap-complementary to the cap portion (300a) of the seed (300) with a constant cross-section and does not interfere with the protrusion (200b) of the pulling rod (200) when the external thread (200a) of the pulling rod (200) is threadedly engaged with the axial threaded hole (11). 3.The seed holder according to claim 1, characterized in that, the seed rod accommodating cavity (13) is a cylinder which is complementary to a cylindrical circumferential surface of the rod portion (300b) of the seed (300). 4.The seed holder according to claim 1, characterized in that, the number of the plurality of radial threaded holes (14) is four corresponding to the cap portion (300a) of the seed (300) with a constant cross-section rectangle, and each radial threaded hole (14) corresponds to one circumferential side surface of the cap portion (300a) of the seed (300); or the number of the plurality of radial threaded holes (14) is at least three corresponding to the cap portion (300a) of the seed (300) with a constant cross-section circle. 5.The seed holder according to claim 1, characterized in that, The shape of the portion of the main body (1) corresponding to the axial threaded hole (11) and the seed cap accommodating cavity (12) is cylindrical; The shape of the portion of the main body (1) corresponding to the seed rod accommodating cavity (13) is reverse circular truncated cone.

6. The seed chuck of claim 5, wherein, The portion of the main body (1) corresponding to the seed rod accommodating cavity (13) is radially provided with slits (15) extending from the outer surface to the seed rod accommodating cavity (13).

7. The seed chuck of claim 6, wherein, The slits (15) extend upward from the end of the main body (1) corresponding to the seed rod accommodating cavity (13) away from the seed cap accommodating cavity (12) to more than half of the seed rod accommodating cavity (13).

8. The seed chuck of claim 7, wherein, The slits (15) extend upward from the end of the main body (1) corresponding to the seed rod accommodating cavity (13) away from the seed cap accommodating cavity (12) to two-thirds of the seed rod accommodating cavity (13).

9. The seed chuck of claim 6, wherein, The slits (15) are multiple, and the multiple slits (15) equally divide the 360-degree circumference.

10. The seed chuck of claim 1, wherein, The main body (1) is a one-piece integral.

Images