Atmosphere furnace and quartz tube assembly

Abstract

The utility model relates to the technical field of atmosphere furnaces, and discloses a quartz tube assembly of an atmosphere furnace, which comprises a tube body, an end cover and a sealing assembly, a first inner cavity is arranged in the tube body, an air inlet tube communicated with the first inner cavity is arranged on the tube body, the end cover is detachably connected to the tube body through a connecting piece, and the sealing assembly is positioned between the end cover and the tube body; a convex part is arranged on one side of the end cover, a second inner cavity matched with the first inner cavity in cavity diameter is formed in the convex part, an air outlet pipe communicated with the second inner cavity is arranged on the end cover, and a reduction cavity is formed by the first inner cavity and the second inner cavity. Meanwhile, the utility model further discloses an atmosphere furnace. One side of the end cover is provided with the convex part which is concavely formed from the other side, and the second inner cavity which is matched with the cavity diameter of the first inner cavity is formed in the convex part, so that the contact area between the end cover and the outside is increased, heat dissipation is better, and after the convex part is arranged, the position of the sealing assembly is relatively close to the back, heat transfer is reduced, and overheating deformation of the sealing assembly is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of atmosphere furnace, concretely relates to an atmosphere furnace and quartz tube assembly. BACKGROUND

[0002] Atmosphere furnace is an industrial equipment that can heat and heat treatment under specific atmosphere conditions, usually used for processing of materials such as metal, ceramic and glass. The biggest feature of atmosphere furnace is that it can create a controlled environment, so that the material can avoid oxidation, reduction or other unwanted chemical reactions when treated at high temperature. Atmosphere furnace usually uses nitrogen, hydrogen, helium or other inert gases as protective atmosphere, so as to ensure the purity and performance of the material.

[0003] CN208440296U discloses a low-temperature horizontal atmosphere synthesis furnace, which comprises: an evaporator for providing reaction gas and protective gas; a tubular resistance furnace in which solid materials are placed, and the tubular resistance furnace is connected to the evaporator through a gas pipe to receive reaction gas and protective gas; and a condensing device connected to the tubular resistance furnace through a gas pipe to receive and condense the remaining gas after reaction, wherein the tubular resistance furnace comprises: a furnace body, a quartz tube, a resistance furnace heating device, a graphite boat and a control device.

[0004] The above technical solution uses a transparent quartz tube as a gas sealing tank for the graphite boat, so that the operator can observe the reaction of the materials in the graphite boat during the reaction; the graphite boat is placed at the central position of the quartz tube, and is uniformly heated, so that the test data is stable, the product is uniform, and the experimental period can be shortened. The above technical solution is described in the specification as "the two ends of the quartz tube 22 are sealed by the flange cover plates 28 to avoid environmental pollution caused by gas leakage", but because the gas is input from one end of the flange cover plate to the other end of the flange cover plate, more heat will be concentrated on the flange cover plate, causing the sealing gasket between the flange cover plate and the quartz tube to deform due to overheating, affecting the sealing of the quartz tube. UTILITY MODEL CONTENTS

[0005] The utility model discloses a quartz tube assembly of atmosphere furnace, the convex part recessed from the other side is formed on the one side of the end cover, and the second inner cavity matched with the cavity diameter of the first inner cavity is formed in the convex part, the contact area of the end cover with the outside is improved, heat dissipation is better, and after the convex part is arranged, the position of the sealing assembly is relatively rear, heat transfer is reduced, and overheating deformation of the sealing assembly is avoided. Meanwhile, the application also discloses an atmosphere furnace.

[0006] To achieve the above object, the application provides the following technical scheme:

[0007] The quartz tube assembly of the atmosphere furnace comprises a tube body, an end cover, and a sealing assembly, the tube body is internally provided with a first inner cavity, the tube body is provided with an air inlet pipe in communication with the first inner cavity, the end cover is detachably connected to the tube body through a connecting piece, and the sealing assembly is located between the end cover and the tube body.

[0008] One side of the end cover is provided with a protruding part recessed from the other side, a second inner cavity matched with the cavity diameter of the first inner cavity is formed in the protruding part, the end cover is provided with an air outlet pipe in communication with the second inner cavity, and the first inner cavity and the second inner cavity form a reduction chamber.

[0009] Preferably, the end of the protruding part is hemispherical, the shape of the second inner cavity is matched with the shape of the end cover, and the axis of the air outlet pipe is perpendicular to the axis of the air inlet pipe.

[0010] Preferably, the sealing assembly is a sealing ring, the cross section of the sealing ring is a T-shaped structure, and the sealing ring is a polytetrafluoroethylene sealing ring.

[0011] Preferably, the connecting piece comprises a first ring plate and a second ring plate, one end of the tube body is provided with a first flange, and one end of the end cover is provided with a second flange; the first ring plate is sleeved on the tube body, and the second ring plate is sleeved on the end cover.

[0012] The first ring plate and the second ring plate are matched through externally provided bolts and nuts to clamp the first flange and the second flange between the first ring plate and the second ring plate; and the first ring plate is provided with a fixing part for fixing the tube body on an externally provided atmosphere furnace.

[0013] Preferably, a silica gel gasket is arranged between the first ring plate and the first flange and between the second ring plate and the second flange.

[0014] Preferably, a corrugated section is arranged on each of the air inlet pipe and the air outlet pipe.

[0015] Preferably, the first ring plate and the second ring plate are both made of stainless steel.

[0016] Preferably, the tube body and the end cover are both made of quartz.

[0017] Meanwhile, the application also provides an atmosphere furnace, which comprises a furnace frame, a furnace cover, a fixing module, a heating module, and the above quartz tube assembly, the furnace cover, the fixing module, and the heating module are all connected to the furnace frame, and the tube body is connected to the fixing module.

[0018] Preferably, the fixing module comprises a heat insulation base connected to the furnace frame and a fixing table connected to the heat insulation base, the tube body is connected to the fixing table, and the heating module is a heater.

[0019] Compared with the prior art, the application has the following beneficial effects:

[0020] The application sets a convex part on one side of the end cover, which is recessed from the other side, and a second inner cavity matching the cavity diameter of the first inner cavity is formed in the convex part, which improves the contact area of the end cover with the outside, and the heat dissipation is better. Moreover, after setting the convex part, the position of the sealing assembly is relatively rear, which reduces the heat transfer and avoids the deformation of the sealing assembly due to overheating. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a front view of the quartz tube assembly of example 1;

[0022] Figure 2 is Figure 1 an enlarged view of A of figure

[0023] Figure 3 is a structural schematic view of the pot body of the quartz tube assembly of example 1;

[0024] Figure 4 is a structural schematic view of the atmosphere furnace of example 2;

[0025] Wherein, each reference numeral is as follows:

[0026] Pipe body 1;End cover 2;Sealing assembly 3;Connecting piece 4;Furnace frame 5;Furnace cover 6;Fixing module 7;Heating module 8;Air inlet pipe 11;First inner cavity 12;First flange 13;Air outlet pipe 21;Convex part 22;Second inner cavity 23;Second flange 24;First ring plate 41;Second ring plate 42;Bolt 43;Nut 44;Heat insulation base 71;Fixing table 72;Corrugated section 101;Fixed part 411. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the application.

[0028] Example 1

[0029] Referring to Figures 1 to 3 , a quartz tube assembly of an atmosphere furnace includes a pipe body 1, an end cover 2, and a sealing assembly 3. The pipe body 1 is provided with a first inner cavity 12, and an air inlet pipe 11 communicating with the first inner cavity 12 is arranged on the pipe body 1. The end cover 2 is detachably connected to the pipe body 1 through a connecting piece 4, and the sealing assembly 3 is located between the end cover 2 and the pipe body 1.

[0030] The end cover 2 is provided with a protrusion 22 formed by recessing from the other side, and a second inner cavity 23 matching the cavity diameter of the first inner cavity 12 is formed in the protrusion 22. The end cover 2 is provided with a gas outlet pipe 21 communicating with the second inner cavity 23, and the first inner cavity 12 and the second inner cavity 23 form a reduction chamber.

[0031] In this design, the operator places the quartz boat containing the material in the pipe body 1, then fixes the pipe body 1 on the externally provided atmosphere furnace, connects the end cover 2 to the pipe body 1 through the connecting piece 4, seals one end of the pipe body 1 through the cooperation of the end cover 2 and the sealing assembly 3, connects the gas inlet pipe 11 on the pipe body 1 to the externally provided gas input device to provide a specific atmosphere environment in the pipe body 1, connects the gas outlet pipe 21 to the externally provided gas recovery device, and starts the heating device in the atmosphere furnace to perform the reaction. Taking germanium dioxide as an example, the gas input through the gas inlet pipe 11 is hydrogen, and the reaction is a reduction reaction.

[0032] During the reaction, the heat of the gas is concentrated on the protrusion 22 of the end cover 2, and because the sealing assembly 3 is located more rearward, the heat on the protrusion 22 is not easily transferred to the sealing assembly 3, and the protrusion 22 increases the contact area of the end cover 2 with the outside, improves the heat dissipation effect, and avoids overheating and deformation of the sealing assembly 3.

[0033] It should be noted that before the reaction, inert gas needs to be input to discharge oxygen in the pipe body 1.

[0034] Preferably, the end of the protrusion 22 is hemispherical, the shape of the second inner cavity 23 matches the shape of the end cover 2, and the axis of the gas outlet pipe 21 is perpendicular to the axis of the gas inlet pipe 11.

[0035] Specifically, the end of the protrusion 22 adopts a hemispherical shape, that is, the end of the second inner cavity 23 is also hemispherical. In use, the hemispherical structure can guide the gas, guiding the gas hitting the protrusion 22 to the middle position of the pipe body 1, so that the material is more uniformly contacted with the gas. Further, the axis of the gas outlet pipe 21 is arranged to be perpendicular to the axis of the gas inlet pipe 11, avoiding the gas being directly output after being input in a straight line.

[0036] In this embodiment, the sealing assembly 3 is a sealing ring, and the cross section of the sealing ring is a T-shaped structure. The sealing ring is a polytetrafluoroethylene sealing ring.

[0037] By adopting the T-shaped sealing ring, in connection, the vertical part of the T-shaped structure is located between the end cover 2 and the pipe body 1, and the horizontal parts of the T-shaped structure respectively contact one side of the end cover 2 and one side of the pipe body 1, improving the sealing performance.

[0038] Preferably, the connecting piece 4 comprises a first ring plate 41 and a second ring plate 42, one end of the pipe body 1 is provided with a first flange 13, and one end of the end cover 2 is provided with a second flange 24; the first ring plate 41 is sleeved on the pipe body 1, and the second ring plate 42 is sleeved on the end cover 2;

[0039] The first ring plate 41 and the second ring plate 42 are matched by externally provided bolts 43 and nuts 44 to clamp the first flange 13 and the second flange 24 between the first ring plate 41 and the second ring plate 42; the first ring plate 41 is provided with a fixing part 411 for fixing the pipe body 1 on an externally provided atmosphere furnace.

[0040] Specifically, the first flange 13 and the second flange 24 are clamped by the first ring plate 41 and the second ring plate 42, without the need for reprocessing of the first flange 13 and the second flange 24, while the stability and sealing of the connection are ensured. In use, the second ring plate 42 is initially located on the end cover 2, and the first ring plate 41 and the second ring plate 42 are connected by the operator, and then the first ring plate 41 is fixed on the externally provided atmosphere furnace by the fixing part 411 on the first ring plate 41.

[0041] Further, a silica gel gasket is arranged between the first ring plate 41 and the first flange 13 and between the second ring plate 42 and the second flange 24. The silica gel gasket can adapt to uneven places on the surface of the first flange 13 and the second flange 24, ensure the stability of the connection, and avoid direct friction between the first ring plate 41 and the second ring plate 42 and the first flange 13 and the second flange 24.

[0042] As a further optimization of the present embodiment, corrugated sections 101 are arranged on the gas inlet pipe 11 and the gas outlet pipe 21. Specifically, because the gas inlet pipe 11 and the gas outlet pipe 21 are connected to corresponding hoses of the gas input device and the gas recovery device, the arrangement of the corrugated sections 101 on the gas inlet pipe 11 and the gas outlet pipe 21 can improve the stability and sealing of the connection between the gas inlet pipe 11, the gas outlet pipe 21 and the hoses, while the corrugated sections 101 can optimize the gas flow during gas inlet, ensuring that the reducing gas can uniformly and sufficiently contact the material and improving the efficiency and uniformity of the reduction reaction.

[0043] In the present embodiment, the first ring plate 41 and the second ring plate 42 are both made of stainless steel. Stainless steel can resist corrosion by water, air and various chemicals, has high mechanical strength and can withstand great loads. It is not easy to deform or break, and is therefore very durable.

[0044] In the present embodiment, the pipe body 1 and the end cover 2 are both made of quartz. Quartz has the advantages of high temperature resistance, corrosion resistance and low expansion coefficient.

[0045] Embodiment 2

[0046] ReferenceFigure 4 An atmosphere furnace comprises a furnace frame 5, a furnace cover 6, a fixing module 7, a heating module 8 and the quartz tube assembly as above, the furnace cover 6, the fixing module 7 and the heating module 8 are all connected on the furnace frame 5, and the tube body 1 is connected on the fixing module 7.

[0047] It should be noted that the heating module 8 does not completely cover the whole tube body 1, and the specific arrangement can refer to the technical solution disclosed in Chinese patent CN105890351A. As a result, the gas input into the tube body 1 passes through the heating position of the heating module 8, and then the gas is heated. The heated gas impacts on the other end of the quartz tube, that is, one end of the end cover 2. By arranging the convex part 22 which is recessed from the other side on the end cover 2, and forming the second inner cavity 23 which matches the cavity diameter of the first inner cavity 12 in the convex part 22, the contact area of the end cover 2 with the outside is improved, and the heat dissipation is better. Moreover, after the convex part 22 is arranged, the position of the sealing assembly 3 is relatively rearward, the heat transfer is reduced, and the sealing assembly 3 is prevented from overheating and deforming.

[0048] In the embodiment, the fixing module 7 comprises a heat insulation base 71 connected on the furnace frame 5, and a fixing table 72 connected on the heat insulation base 71, and the tube body 1 is connected on the fixing table 72. The heating module 8 is a heater. Specifically, the heat insulation base 71 can avoid heat transfer to the furnace frame 5.

[0049] The above is only the preferred embodiment of the present application, and it should be noted that for ordinary skilled in the art, without departing from the principles of the present application, several improvements or modifications can be made, and these improvements or modifications should be considered as the protection scope of the present application.

Claims

1. A quartz tube assembly for an atmosphere furnace, comprising a tube body, end caps, and a sealing assembly, characterized in that, The tube body has a first inner cavity, and the tube body has an air inlet pipe communicating with the first inner cavity. The end cap is detachably connected to the tube body via a connector, and the sealing assembly is located between the end cap and the tube body. One side of the end cap is provided with a protrusion that is recessed from the other side, and a second inner cavity matching the diameter of the first inner cavity is formed in the protrusion. The end cap is provided with an air outlet pipe that communicates with the second inner cavity. The first inner cavity and the second inner cavity form a reduction chamber.

2. The quartz tube assembly of the atmosphere furnace according to claim 1, characterized in that, The end of the protrusion is hemispherical, the shape of the second inner cavity matches the shape of the end cap, and the axis of the air outlet is perpendicular to the axis of the air inlet.

3. The quartz tube assembly of the atmosphere furnace according to claim 1, characterized in that, The sealing component is a sealing ring, the sealing ring has a T-shaped cross-section, and the sealing ring is made of polytetrafluoroethylene.

4. The quartz tube assembly of the atmosphere furnace according to claim 1, characterized in that, The connector includes a first ring plate and a second ring plate. One end of the tube body is provided with a first flange, and one end of the end cap is provided with a second flange. The first ring plate is sleeved on the tube body, and the second ring plate is sleeved on the end cap. The first ring plate and the second ring plate are engaged by external bolts and nuts to clamp the first flange and the second flange between the first ring plate and the second ring plate; the first ring plate is provided with a fixing part for fixing the tube body to the external atmosphere furnace.

5. The quartz tube assembly of the atmosphere furnace according to claim 4, characterized in that, Silicone gaskets are provided between the first ring plate and the first flange, and between the second ring plate and the second flange.

6. The quartz tube assembly of the atmosphere furnace according to claim 1, characterized in that, Both the air inlet pipe and the air outlet pipe are provided with corrugated sections.

7. The quartz tube assembly of the atmosphere furnace according to claim 4, characterized in that, Both the first ring plate and the second ring plate are made of stainless steel.

8. The quartz tube assembly of the atmosphere furnace according to claim 1, characterized in that, Both the tube body and the end cap are made of quartz.

9. An atmosphere furnace, characterized in that, It includes a furnace frame, a furnace cover, a fixing module, a heating module, and a quartz tube assembly as described in any one of claims 1 to 8, wherein the furnace cover, the fixing module, and the heating module are all connected to the furnace frame, and the tube body is connected to the fixing module.

10. The atmosphere furnace according to claim 9, characterized in that, The fixing module includes a heat-insulating base connected to the furnace frame and a fixing platform connected to the heat-insulating base. The tube body is connected to the fixing platform, and the heating module is a heater.

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