Pure water flow monitoring device

Abstract

The utility model relates to the technical field of flow control, in particular to a pure water flow monitoring device which comprises a flushing pipeline, a flow sensor and a monitoring equipment end, a shroud ring is connected to the flushing pipeline, the shroud ring is arranged in the circumferential direction of the flushing pipeline, a mounting base is connected to the shroud ring, the flow sensor is rotationally clamped to the mounting base, and the monitoring equipment end is connected to the flow sensor. The flow sensor is electrically connected to a monitoring equipment end, a sealing assembly is further arranged in the mounting base, and the flow sensor is an ultrasonic flow sensor. The method has the effect of solving the problem that the cleanliness of the surface of the wafer is affected by too large or too small pure water flow.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of flow control technology especially relates to a pure water flow monitoring device. BACKGROUND

[0002] In the process of wafer surface planarization, the wafer is first taken out from the wafer carrier by a wafer taking arm, placed on the import and export platform of the machine table, then sent to the grinding head from the platform for subsequent process processing, and after the processing is completed, the wafer is placed on the import and export platform of the machine table and put back into the wafer carrier by the wafer taking arm.

[0003] In the above two taking and placing processes, pure water flushing is needed, and too large or too small pure water flow will affect the wafer surface cleanliness, and at present, there is a lack of related monitoring system for the pure water flow of the machine table. UTILITY MODEL CONTENTS

[0004] In order to improve the problem that too large or too small pure water flow will affect the wafer surface cleanliness, the application provides a pure water flow monitoring device.

[0005] The pure water flow monitoring device provided by the application adopts the following technical scheme:

[0006] A pure water flow monitoring device, comprising a flushing pipeline, a flow sensor and a monitoring device end, a hoop is connected to the flushing pipeline, the hoop is arranged along the circumference of the flushing pipeline, a mounting seat is connected to the hoop, the flow sensor is rotatably clamped on the mounting seat, the flow sensor is electrically connected to the monitoring device end, a sealing assembly is further arranged in the mounting seat, and the flow sensor is an ultrasonic flow sensor.

[0007] Preferably, a fixing rod is connected to the flow sensor, the fixing rod is arranged in a direction perpendicular to the flow sensor, one fixing rod is arranged on each of the opposite sides of the flow sensor, a clamping groove is formed in the mounting seat for downward clamping and rotating of the fixing rod, and the clamping groove is arranged in an "L" shape.

[0008] Preferably, the sealing assembly comprises a sealing ring and a pressing ring, the inner wall of the mounting seat is arranged in a stepped manner, the sealing ring is arranged on the smaller diameter inner wall in the mounting seat, a first groove is formed in the mounting seat for clamping of the sealing ring, and the pressing ring is arranged on the step in the mounting seat, and a second groove is formed in the mounting seat for clamping of the pressing ring.

[0009] Preferably, the monitoring device end is further connected with a buzzer alarm.

[0010] In summary, the application has the following beneficial technical effects:

[0011] The utility model provides a pure water flow monitoring device, including flush pipeline, hoop, flow sensor, monitoring device end, mounting seat and sealing assembly, through setting up hoop and mounting seat on flush pipeline, and being equipped with sealing assembly in mounting seat, it is convenient for flow sensor to install on flush pipeline, in the pure water flushing process, can under the condition of not destroying the pipe wall and influencing water flow, utilize ultrasonic flow sensor real time monitoring the flow of pure water in flush pipeline, and the flow data of pure water can be fed back to monitoring device end, thereby reached the effect of improving the problem that pure water flow is too big or too small and will influence wafer surface cleanliness. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is the structure schematic diagram of pure water flow monitoring device in the embodiment of the application.

[0013] Figure 2 It is the schematic diagram for embodying sealing assembly in the embodiment of the application.

[0014] Mark explanation: 1, flush pipeline, 11, hoop, 2, flow sensor, 21, fixed link, 3, monitoring device end, 31, buzzer, 4, mounting seat, 41, clamping groove, 5, sealing assembly, 51, sealing ring, 52, extrusion ring. DETAILED DESCRIPTION

[0015] In order to make the personnel of the prior art better understand the utility model scheme, the scheme in the embodiment of the utility model will be described clearly and completely below to the drawings, obviously, the described embodiment only is the embodiment of a part of the utility model, is not all the embodiment, based on the embodiment in the utility model, all other embodiments that the ordinary skill in the art personnel obtains under the premise of not making creative labor should belong to the range of the utility model protection.

[0016] In the description of the utility model, it is necessary to explain that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "internal", "external" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model; the terms "first", "second" and "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance, in addition, unless otherwise explicitly specified and limited, the terms "mounting", "connection" and "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, and it can be the communication between two elements. For ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0017] The utility model discloses a pure water flow monitoring device. Referring to Figure 1 And Figure 2 , the pure water flow monitoring device comprises a flushing pipeline 1, a flow sensor 2 and a monitoring device end 3, the flushing pipeline 1 is connected with a hoop 11, the hoop 11 is arranged along the circumference of the flushing pipeline 1, the hoop 11 is connected with a mounting seat 4, the flow sensor 2 is rotationally clamped on the mounting seat 4, the flow sensor 2 is electrically connected to the monitoring device end 3, and the mounting seat 4 is also provided with a sealing assembly 5, wherein the monitoring device end 3 can be a conventional computer or a specific controller.

[0018] By arranging the hoop 11 and the mounting seat 4 on the flushing pipeline 1 and arranging the sealing assembly 5 in the mounting seat 4, the flow sensor 2 can be installed on the flushing pipeline 1, in the pure water flushing process, the flow sensor 2 can monitor the flow of pure water in the flushing pipeline 1 in real time without damaging the pipe wall and affecting the water flow, and the flow data of pure water can be fed back to the monitoring device end 3 for technical personnel to check, so that the problem that the flow of pure water is too large or too small and affects the wafer surface cleanliness is improved.

[0019] The flow sensor 2 is connected with a fixing rod 21, the fixing rod 21 is arranged along the direction perpendicular to the flow sensor 2, the fixing rod 21 is arranged on the opposite sides of the flow sensor 2 respectively, the mounting seat 4 is provided with a clamping groove 41 for the fixing rod 21 to be clamped downward and rotated, the clamping groove 41 is arranged in an L shape, when the flow sensor 2 is installed, the flow sensor 2 is inserted into the mounting seat 4, and the fixing rod 21 is vertically slid into the clamping groove 41, then the flow sensor 2 is rotated along the horizontal direction of the clamping groove 41, so that the fixing rod 21 is clamped into the clamping groove 41, and the installation is completed, so that the flow sensor 2 is convenient to disassemble and maintain.

[0020] The sealing assembly 5 comprises a sealing ring 51 and a pressing ring 52, the inner wall of the mounting seat 4 is arranged in a stepped manner, the sealing ring 51 is arranged on the inner wall with a smaller diameter in the mounting seat 4, the mounting seat 4 is provided with a first groove for the sealing ring 51 to be clamped, the pressing ring 52 is arranged on the step in the mounting seat 4, the mounting seat 4 is provided with a second groove for the pressing ring 52 to be clamped, when the flow sensor 2 is inserted into the mounting seat 4, the sealing ring 51 ensures the sealing between the mounting seat 4 and the flow sensor 2, and the flow sensor 2 presses the pressing ring 52, the elastic force generated by the pressing ring 52 can push the fixing rod 21 on the flow sensor 2 to be clamped in the clamping groove 41.

[0021] The monitoring device end 3 is further connected with a buzzer alarm 31, when the monitoring device end 3 monitors that the pure water flow in the flushing pipeline 1 is too large or too small, the monitoring device end 3 controls the buzzer alarm 31 to alarm, so as to remind the nearby technicians, which is beneficial to ensure the yield of wafer production.

[0022] It should be noted that: the above is only the preferred embodiment of the present application, the protection scope of the present application is not limited to the above-mentioned embodiments, any technical solution belonging to the idea of the present application is within the protection scope of the present application. It should be pointed out that, for the ordinary skilled in the art, some improvements and decorations without departing from the principle of the present application can also be considered as the protection scope of the present application.

Claims

1. A pure water flow monitoring device, characterized by: Including flush pipeline (1), flow sensor (2) and monitoring device end (3), the hoop (11) is connected on the flush pipeline (1), the hoop (11) is arranged along the circumference of flush pipeline (1), the mounting seat (4) is connected on the hoop (11), the flow sensor (2) is rotationally clamped on the mounting seat (4), the flow sensor (2) is electrically connected to monitoring device end (3), the sealing assembly (5) is further provided in the mounting seat (4), the flow sensor (2) is ultrasonic flow sensor.

2. The pure water flow monitoring device according to claim 1, wherein: The fixed rod (21) is connected on the flow sensor (2), the fixed rod (21) is arranged in the direction perpendicular to the flow sensor (2), one is respectively arranged on the opposite sides of the flow sensor (2), the clamping groove (41) is formed in the mounting seat (4) for the downward clamping and rotation of the fixed rod (21), the clamping groove (41) is arranged in the form of "L".

3. The pure water flow monitoring device according to claim 1, wherein: The sealing assembly (5) includes sealing ring (51) and extrusion ring (52), the inner wall of the mounting seat (4) is arranged in the form of step, the sealing ring (51) is arranged on the inner wall with smaller diameter in the mounting seat (4), the first recess is formed in the mounting seat (4) for the clamping of the sealing ring (51), the extrusion ring (52) is arranged on the step in the mounting seat (4), the second recess is formed in the mounting seat (4) for the clamping of the extrusion ring (52).

4. The pure water flow monitoring device of claim 1, wherein: The monitoring device end (3) is further connected with the buzzer alarm (31).

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