Sealing ring detection device

Abstract

The utility model discloses a sealing ring detection device, which relates to the technical field of metal sealing ring detection and comprises a base, a mounting assembly, a heating assembly and a detection assembly. The installation assembly is arranged on the base, and an installation cavity used for containing the sealing ring is defined by the installation assembly. The heating assembly is connected to the base and used for heating the sealing ring in the mounting cavity; the detection assembly comprises a test valve and a connecting valve, the test valve and the connecting valve are arranged on the base at intervals, and an inner cavity of the test valve and an inner cavity of the connecting valve are both communicated with the mounting cavity and control on-off of gas introduced into the mounting cavity.

Description

TECHNICAL FIELD

[0001] The utility model relates to metal seal ring detection technical field, especially seal ring detection device. BACKGROUND

[0002] In the semiconductor manufacturing process, it is necessary to maintain ultra-high vacuum conditions and environmental purity to ensure that the process gas does not pollute the environment, and at the same time prevent leakage in the gas pipeline conveying highly reactive and toxic gases, to ensure safety and process integrity. The application of metal sealing ring in this field includes sealing of vacuum chamber, process gas delivery system and high temperature furnace, etc., which must be able to withstand high temperature required by processes such as oxidation and diffusion, and maintain the integrity of the sealing element in the thermal cycle. Therefore, in the semiconductor industry, high temperature and high pressure detection of metal sealing ring is very important.

[0003] In the process of collecting relevant data for testing, high temperature and high pressure cycle test is a complex process, and the operation is complicated, time-consuming and laborious. The sealing ring needs to be repeatedly disassembled and assembled during testing, which is labor-intensive and can easily affect the accuracy of the test. UTILITY MODEL CONTENT

[0004] The main purpose of the utility model is to provide a sealing ring detection device, which aims to improve the efficiency and stability of metal sealing ring detection.

[0005] To achieve the above purpose, the sealing ring detection device provided by the utility model comprises:

[0006] A base;

[0007] An installation assembly is arranged on the base, and the installation assembly is enclosed to form an installation cavity for accommodating a sealing ring;

[0008] A heating assembly is connected to the base to heat the sealing ring in the installation cavity; and

[0009] A detection assembly comprises a test valve and a connecting valve, which are arranged on the base, and the inner cavities of the test valve and the connecting valve are in communication with the installation cavity and control the on-off of the gas entering the installation cavity.

[0010] In an embodiment, the connecting valve comprises a first valve body and a second valve body, which are arranged on opposite sides of the installation assembly, and the inner cavities of the first valve body and the second valve body are in communication with the installation cavity respectively.

[0011] In an embodiment, a bellows is arranged between the installation assembly and the first / second valve body.

[0012] In an embodiment, the sealing ring detection device further comprises a first connecting pipe and a second connecting pipe, one end of the first connecting pipe is communicated with the first valve body, the other end of the first connecting pipe is provided with a VCR interface; one end of the second connecting pipe is communicated with the second valve body, the other end of the second connecting pipe is provided with a vacuum joint.

[0013] In an embodiment, the sealing ring detection device comprises a plurality of detection units, one of the mounting assemblies, one of the heating assemblies and one of the detection assemblies constitute one of the detection units, each of the detection units is connected in parallel to the first connecting pipe and the second connecting pipe.

[0014] In an embodiment, the mounting assembly comprises a mounting seat and a temperature signal feedback bottom plate, the temperature signal feedback bottom plate is arranged above the heating assembly, the mounting seat is arranged above the mounting seat and encloses the temperature signal feedback bottom plate to form the mounting cavity, and the test valve is arranged above the mounting seat.

[0015] In an embodiment, the sealing ring detection device further comprises a temperature sensor, the temperature sensor is connected to the bottom of the temperature signal feedback bottom plate to detect the temperature of the temperature signal feedback bottom plate and feed back to the controller.

[0016] In an embodiment, the heating assembly comprises an insulating fixed plate, a fixed seat and a heating pipe, the insulating fixed plate is connected to the bottom of the base, the insulating fixed plate is formed with a stepped hole penetrating in the vertical direction, the fixed seat is clamped in the stepped hole and partially penetrates the insulating fixed plate, the heating pipe is connected to the bottom end of the fixed seat, and the temperature signal feedback bottom plate is connected to the fixed seat.

[0017] In an embodiment, the sealing ring detection device further comprises an insulating assembly, the insulating assembly comprises an insulating pad plate and an insulating cover plate, the insulating pad plate is arranged above the base and encloses the mounting assembly, and the insulating cover plate is arranged above the insulating pad plate.

[0018] In an embodiment, the base comprises a base plate and a plurality of support columns, each of the support columns is arranged at the periphery of the bottom of the base plate, the mounting assembly, the heating assembly and the detection assembly are arranged on the base plate.

[0019] The utility model discloses a sealing ring detection device, including base, installation component, heating assembly and detection component, and the base is as the support foundation of whole device, guarantees the stability and the security of operation of device, installation component is enclosed and forms the installation cavity to place the sealing ring of detection, and heating assembly provides necessary temperature condition for high temperature detection of sealing ring, simulates the high temperature environment that sealing ring possibly meets in actual use. Detection component is by test valve and connecting valve and is composed, and they control the passage of the gas that sealing ring detection needs to enter installation cavity, and through the on-off of control gas realizes the high pressure resistance and sealing performance of detection sealing ring. This design makes the detection process can simulate the sealing effect of sealing ring under actual working condition, thereby ensures the accuracy and reliability of detection result. In addition, the compact structure design of sealing ring detection device in this scheme is simple to operate, and it is possible to realize the demand of a plurality of performance tests without repeatedly disassembling sealing ring, guarantees the accuracy of test and improves the convenience of test. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme in the embodiment of the utility model or prior art, the following will be briefly introduced the drawing needed to be used in the embodiment or prior art description, obviously, the drawing in the following description only some embodiments of the utility model, for ordinary skilled person in the art, under the premise of not paying creative labor, other drawings can also be obtained according to the structure shown in these drawings.

[0021] Figure 1 The structural schematic diagram of sealing ring detection device one embodiment of the utility model provides;

[0022] Figure 2 For Figure 1 The structural schematic diagram of sealing ring detection device another view of the utility model provides;

[0023] Figure 3 For Figure 1 The sectional view of sealing ring detection device of the utility model provides;

[0024] Figure 4 For Figure 3 The local enlarged schematic view of A in the utility model provides.

[0025] Explanation of the attached drawing:

[0026] 100, sealing ring detection device; 1, base; 11, base plate; 12, support column; 2, mounting assembly; 21, mounting seat; 22, temperature signal feedback bottom plate; 3, heating assembly; 31, heat insulation fixed plate; 32, fixed seat; 33, heating pipe; 4, detection assembly; 41, test valve; 42, connecting valve; 421, first valve body; 422, second valve body; 43, bellows; 5, first connecting pipe; 51, VCR interface; 6, second connecting pipe; 61, vacuum joint; 7, temperature sensor; 8, heat insulation assembly; 81, heat insulation pad; 82, heat insulation cover plate; 200, sealing ring.

[0027] The realization, functional features and advantages of the utility model will be further described in combination with embodiments with reference to the drawings. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the utility model will be clearly and completely described below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0029] It should be noted that if the embodiments of the utility model involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement condition, etc. between the components in a certain posture, and if the certain posture changes, the directional indications also change accordingly.

[0030] In addition, if the embodiments of the utility model involve the description of "first", "second", etc., the description of "first", "second", etc. is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include at least one of the features. In addition, "and / or" or "and / or" appearing throughout the text means that the three parallel schemes are included, for example, "A and / or B" includes A scheme, or B scheme, or A and B simultaneously satisfy the scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of the ordinary skilled in the art, and when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the utility model.

[0031] In the semiconductor manufacturing process, it is necessary to maintain ultra-high vacuum conditions and environmental purity to ensure that the process gas does not contaminate the environment, while preventing leaks in the gas pipeline that transports highly reactive and toxic gases, ensuring safety and process integrity. The application of metal sealing rings in this field includes the sealing of vacuum chambers, process gas delivery systems, and high-temperature furnaces, which must be able to withstand high temperatures required by processes such as oxidation and diffusion, maintaining the integrity of the seal in thermal cycling. Therefore, in the semiconductor industry, high-temperature and high-pressure testing of metal sealing rings is crucial.

[0032] In the process of collecting relevant data for testing, high-temperature and high-pressure cycle testing is a complex process that is both tedious and time-consuming. During testing, the sealing ring needs to be repeatedly disassembled, which is a large workload and can easily affect the accuracy of the test.

[0033] To solve the above problems, please refer to Figures 1 to 4 The utility model provides a sealing ring detection device 100, including base 1, installation component 2, heating component 3 and detection component 4, installation component 2 is located in base 1, and installation component 2 is enclosed and is formed with the installation cavity for accommodating sealing ring 200, heating component 3 is connected to base 1, and sealing ring 200 in installation cavity is heated, and detection component 4 includes test valve 41 and connecting valve 42, test valve 41 and connecting valve 42 are spaced apart in base 1, and the inner cavity of test valve 41 and the inner cavity of connecting valve 42 are communicated with installation cavity, and the on-off of the gas into installation cavity is controlled.

[0034] The utility model discloses a sealing ring detection device 100, including base 1, installation component 2, heating component 3 and detection component 4, base 1 is as the support foundation of whole device, guarantees the stability of device and the safety of operation, installation component 2 is enclosed and is formed with the installation cavity to place the sealing ring 200 to be detected, and heating component 3 provides necessary temperature condition for high-temperature detection of sealing ring 200, simulates the high-temperature environment that sealing ring 200 can encounter in actual use. Detection component 4 is composed of test valve 41 and connecting valve 42, and they control the passage of the gas required for sealing ring 200 detection into installation cavity, and the on-off of the gas is controlled to realize the high-pressure resistance and sealing performance of sealing ring 200. This design makes the detection process can simulate the sealing effect of sealing ring 200 under actual working conditions, thereby ensuring the accuracy and reliability of the test results. In addition, the sealing ring detection device 100 in the scheme is compact in structure design, easy to operate, and can realize the demand of multiple performance tests without repeatedly disassembling the sealing ring 200, which not only guarantees the accuracy of the test but also improves the convenience of the test.

[0035] In an optional embodiment, in order to facilitate different types of testing on the metal sealing ring 200, please refer to Figure 1The connecting valve 42 includes a first valve body 421 and a second valve body 422, which are respectively arranged on opposite sides of the mounting assembly 2, and the inner cavities of the first valve body 421 and the second valve body 422 are respectively connected with the mounting cavity. This design allows the gas in the mounting cavity to be controlled from two different directions, increasing the flexibility of operation and the accuracy of control. The arrangement of the first valve body 421 and the second valve body 422 allows the gas to flow in and out of the mounting cavity more uniformly, providing more accurate test results. In addition, this design also allows independent control of gas flow during different test stages, such as different gas flow patterns required during heating and cooling stages. This double-valve body design improves the adaptability of the device, enabling it to cope with more complex testing requirements. By precisely controlling the gas flow, the performance of the sealing ring 200 can be better evaluated under simulated working conditions. This helps to improve the repeatability and consistency of the test, as the two valve bodies can be operated independently to ensure that the conditions for each test are the same.

[0036] Further, please refer to Figure 1 and Figure 2 The mounting assembly 2 is connected with the first valve body 421 / second valve body 422 through a bellows 43. The use of the bellows 43 is to provide a flexible connection to adapt to possible thermal expansion or mechanical vibration, so as to ensure the stability and sealing of the connection. During the detection of the sealing ring 200, the mounting assembly 2 may expand due to the heating effect of the heating assembly 3, and the flexible nature of the bellows 43 can absorb this expansion to avoid stress concentration at the connection, thereby reducing the risk of leakage. In addition, the bellows 43 can also reduce the fatigue damage of the connection due to mechanical vibration, improving the durability and reliability of the entire device. The flexible connection of the bellows 43 also helps to reduce the complexity of installation and maintenance. It can provide a certain tolerance for installation errors, making the connection between the mounting assembly 2 and the valve body more convenient. This design allows the sealing ring detection device 100 to maintain stable performance in the face of temperature changes and mechanical vibrations, ensuring the accuracy and reliability of the test results.

[0037] In an optional embodiment, please refer to Figure 1 and Figure 2The sealing ring detection device 100 further comprises a first connecting pipe 5 and a second connecting pipe 6. One end of the first connecting pipe 5 is connected to the first valve body 421, and the other end of the first connecting pipe 5 is provided with a VCR interface 51. One end of the second connecting pipe 6 is connected to the second valve body 422, and the other end of the second connecting pipe 6 is provided with a vacuum joint 61. This design allows the device to quickly and stably connect with external gas supply systems or vacuum systems. The use of VCR interface 51 and vacuum joint 61 provides a standardized connection method, allowing the device to adapt to different testing environments and requirements. The design of the first connecting pipe 5 and the second connecting pipe 6 allows the device to simultaneously input and output gas, improving testing efficiency and flexibility. Through the VCR interface 51, high-pressure gas can be easily accessed to simulate the working state of the sealing ring 200 in a high-pressure environment; while the vacuum joint 61 can be used to extract air from the installation cavity for sealing performance testing. This design allows the device to adapt to various testing scenarios, whether it needs high-pressure gas supply or a vacuum environment, and can quickly adapt, thereby improving the efficiency and convenience of detection. In addition, this design helps to reduce gas leakage during the connection process, ensuring the stability of the test environment, thereby improving the accuracy of test results.

[0038] In an optional embodiment, referring to Figure 1 and Figure 2 To facilitate simultaneous testing of multiple sealing rings 200, the sealing ring detection device 100 comprises multiple detection units, one installation assembly 2, one heating assembly 3, and one detection assembly 4 form a detection unit, and each detection unit is connected in parallel to the first connecting pipe 5 and the second connecting pipe 6. This design allows simultaneous testing of multiple sealing rings 200, significantly improving production efficiency and testing capacity. Through parallel processing, a large amount of test data can be obtained in a short time, which is very valuable for mass production and quality control. The independence of each detection unit means that different sealing rings 200 or tests under different test conditions can be performed without interfering with each other, such as by controlling the conditions of the heating assembly 3 and the detection assembly 4 on each detection unit, such as temperature and air pressure values, to test the sealing ring 200 under different environmental conditions. This modular design also helps to improve the flexibility and scalability of the device, allowing the number of detection units to be increased or decreased as needed. In addition, the independent connection of each detection unit to the first connecting pipe 5 and the second connecting pipe 6 ensures independent control of the gas supply and vacuum system, thereby improving the accuracy and repeatability of the test. This design allows the device to adapt to different testing requirements, whether it is single testing or batch testing, and can provide efficient and accurate test results.

[0039] In an optional embodiment, to facilitate the installation of the sealing ring 200, referring to Figures 1 to 4The mounting assembly 2 includes a mounting base 21 and a temperature signal feedback base plate 22. The temperature signal feedback base plate 22 is arranged above the heat generating assembly, and the mounting base 21 is arranged above the temperature signal feedback base plate 22 and forms a mounting cavity with the temperature signal feedback base plate 22. The test valve 41 is arranged above the mounting base 21. This design provides a stable installation environment that can feedback temperature signals. The temperature signal feedback base plate 22 allows real-time monitoring of temperature changes in the mounting cavity. The combination of the mounting base 21 and the temperature signal feedback base plate 22 forms a closed test space, ensuring the stability and safety of the sealing ring 200 during testing. The test valve 41 is arranged above the mounting base 21, which facilitates the control of the gas in the mounting cavity, thereby testing the sealing performance. The position of the test valve 41 facilitates the operation and monitoring of the operator, and also helps to improve the operational convenience of the device. By precisely controlling the temperature in the mounting cavity, the working state of the sealing ring 200 under different temperature conditions can be simulated, thereby providing a more comprehensive evaluation of its performance.

[0040] Further, the sealing ring detection device 100 also includes a temperature sensor 7 connected to the bottom of the temperature signal feedback base plate to detect the temperature of the temperature signal feedback base plate and feedback to the controller. The temperature sensor 7 is arranged to accurately measure and adjust the temperature in the mounting cavity. By integrating the temperature sensor 7 into the bottom of the base plate, the accuracy and real-time nature of temperature measurement can be ensured, thereby providing more accurate test results. The feedback signal of the temperature sensor 7 can be used to automatically adjust the output of the heat generating assembly 3 to maintain the temperature stability in the mounting cavity, thereby ensuring the stability of the test device. This design also helps to improve the automation level of the sealing ring detection device 100, and helps to automatically adjust the test conditions according to the real-time temperature data, thereby improving the efficiency and accuracy of the test.

[0041] In an optional embodiment, in order to facilitate the heating of the sealing ring 200 in the mounting cavity, please refer to Figure 2 and Figure 3The heating assembly 3 includes an insulating fixed plate 31, a fixed seat 32, and a heating pipe 33. The insulating fixed plate 31 is connected to the bottom of the base 1, and the insulating fixed plate 31 is formed with a through stepped hole in the vertical direction. The fixed seat 32 is clamped in the stepped hole and partially penetrates the insulating fixed plate 31. The heating pipe 33 is connected to the bottom end of the fixed seat 32, and the temperature signal feedback bottom plate 22 is connected to the fixed seat 32. The use of the insulating fixed plate 31 can effectively isolate the heat generated by the heating pipe 33, prevent damage to other components, and also protect the safety of the operator. The design of the stepped hole allows the fixed seat 32 to be stably clamped in the insulating fixed plate 31, providing a stable support structure. The heating pipe 33 is arranged at the bottom end of the fixed seat 32, which can provide concentrated heat output to ensure that the sealing ring 200 in the installation cavity is uniformly heated. The arrangement of the temperature signal feedback bottom plate 22 allows real-time monitoring of the temperature of the heating assembly 3, thereby accurately controlling the heating process. This design also helps to improve the heating efficiency and ensure that the heat is concentrated on the sealing ring 200. By accurately controlling the structure and position of the heating assembly 3, it is convenient to simulate different temperature conditions and more comprehensively evaluate the performance of the sealing ring 200.

[0042] In an optional embodiment, in order to improve the safety of the sealing ring detection device 100, please refer to Figure 1 and Figure 3 The sealing ring detection device 100 further comprises an insulating assembly 8, which comprises an insulating pad plate 81 and an insulating cover plate 82. The insulating pad plate 81 is arranged above the base 1 and surrounds the installation assembly 2, and the insulating cover plate 82 is arranged on the insulating pad plate 81. This design provides additional thermal insulation protection to prevent heat loss and impact on the surrounding environment. The use of the insulating pad plate 81 and the insulating cover plate 82 can effectively isolate the heat generated by the installation assembly 2, reduce the impact of heat on the surrounding environment, and also protect the safety of the operator. The arrangement of the insulating pad plate 81 and the insulating cover plate 82 can reduce heat loss, improve the thermal efficiency of the sealing ring detection device 100, ensure more accurate temperature control of the test environment, and also protect the installation assembly 2 from external environmental influences. This design helps to improve the stability and durability of the sealing ring detection device 100, reduces material expansion and contraction caused by temperature changes, and thus reduces fatigue damage to components. By providing additional thermal insulation protection, this design ensures that the device can operate stably in various environments, improving the adaptability and reliability of the sealing ring detection device 100.

[0043] In an optional embodiment, please refer to Figure 1, the base 1 includes a base plate 11 and a plurality of support columns 12, each support column 12 is arranged at the periphery of the bottom of the base plate 11, and the mounting assembly 2, the heating assembly 3 and the detection assembly 4 are arranged on the base plate 11. This design provides a stable support platform to bear the weight and operation of the entire detection device. The design of the base plate 11 allows the weight of the device to be evenly distributed, reducing the pressure on the base plate 11, thereby improving the carrying capacity and service life of the device. The support columns 12 arranged at the periphery of the bottom of the base plate 11 can provide additional support force to ensure the stability and anti-vibration performance of the device. This design also helps to improve the installation convenience of the device, as the support columns 12 can provide multiple mounting points, allowing the device to be easily installed on different workbenches. By arranging the mounting assembly 2, the heating assembly 3 and the detection assembly 4 on the base plate 11, an integrated testing environment can be provided, making the performance test of the sealing ring 200 more efficient and accurate. This design also helps to improve the maintenance convenience of the device, as all components are concentrated on the base plate 11, making it easy to maintain and replace.

[0044] The above description is only an exemplary embodiment of the present application, and does not limit the patent scope of the present application. Any equivalent structural transformation or direct / indirect application in other related technical fields within the technical concept of the present application, as described in the present application and the drawings, is included in the patent protection scope of the present application.

Claims

1. A seal ring detection device, characterized by, The application relates to a sealing ring detection device. The sealing ring detection device comprises a base, a mounting assembly arranged on the base, a heating assembly connected to the base, and a detection assembly. The detection assembly comprises a test valve and a connecting valve, and the inner cavities of the test valve and the connecting valve are communicated with the mounting cavity. The connecting valve comprises a first valve body and a second valve body, and the inner cavities of the first valve body and the second valve body are communicated with the mounting cavity. The mounting assembly and the first / second valve body are connected by bellows.

2. The seal inspection apparatus of claim 1, wherein The sealing ring detection device further comprises a first connecting pipe and a second connecting pipe.

3. The seal inspection apparatus of claim 2, wherein The sealing ring detection device comprises a plurality of detection units, and each detection unit comprises a mounting assembly, a heating assembly and a detection assembly.

4. The seal inspection apparatus of any one of claims 2 to 3, wherein The mounting assembly comprises a mounting seat and a temperature signal feedback bottom plate.

5. The seal inspection apparatus of claim 4, wherein The temperature signal feedback bottom plate is arranged above the heating assembly, and the mounting seat is arranged above the temperature signal feedback bottom plate and forms the mounting cavity together with the temperature signal feedback bottom plate.

6. The seal inspection apparatus of claim 5, wherein The test valve is arranged above the mounting seat.

7. The seal inspection apparatus of claim 6, wherein The sealing ring detection device further comprises a temperature sensor connected to the bottom of the temperature signal feedback bottom plate.

8. The seal inspection apparatus of claim 7, wherein The sealing ring detection device further comprises a heat insulation assembly.

9. The seal inspection apparatus of claim 1, wherein The base comprises a base plate and a plurality of supporting columns.

10. The seal inspection apparatus of claim 1, wherein The mounting assembly, the heating assembly and the detection assembly are arranged on the base plate.

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