Four-probe testing device

Abstract

The utility model relates to a four-probe testing device. The testing device comprises a shell, a mounting block is arranged in the shell, a first probe, a second probe, a third probe and a fourth probe are arranged on the mounting block, and a mounting block driving mechanism is arranged on the shell. Each probe comprises a probe body and a mounting cylinder which is in contact with the probe body for conductive communication, the mounting cylinder is used for being connected with a cable, and a central cavity of the mounting cylinder can be movably mounted by the end part of the probe body along the length direction of the probe body. The installation cylinder is provided with a screw hole, and a locking screw is installed in the screw hole to lock and fix the probe body. When the probe is faced with probes with different lengths or the length of the probe needs to be adjusted, the position relationship between the probe body of the corresponding probe and the mounting cylinder can be adjusted, and then the probe is fixed through the locking screw, so that the adjustment is relatively convenient. Compared with the prior art, the probe length adjusting device can be suitable for probes with different lengths, and when the length of the probe needs to be adjusted, the probe length adjusting device can be conveniently adjusted.

Description

TECHNICAL FIELD

[0001] The utility model relates to test device field, concretely relates to a four-probe test device. BACKGROUND

[0002] Four-probe test device is often used for the resistivity test of semiconductor and the measurement of film thickness, and can test semiconductor under normal temperature environment, high temperature environment and low temperature environment. The existing four-probe test device is generally provided with four probes on the mounting block, and drives the mounting block to drive the four probes to move up and down. However, due to the different surface shapes of test objects, different length probes need to be used, and the probes will be worn out after long-term use, so the height position of the probes needs to be adjusted to ensure the contact pressure and contact stability between the lower ends of the four probes and the test objects, and to ensure the accuracy and repeatability of the measurement data. However, the existing probes are batch collected, and the lengths of the probes are consistent. The length of the probe is manually shaped and then installed, which is not only time-consuming and laborious, but also easy to damage the probe during the shaping process, and the accuracy and precision of the test results cannot be guaranteed. Therefore, a four-probe test device that can adapt to different length probes is needed. SUMMARY

[0003] The utility model aims at providing a four-probe test assembly to solve the technical problem that the existing technology cannot be applied to different length probes.

[0004] To achieve the above-mentioned purpose, the four-probe test device of the utility model adopts the following technical scheme: a four-probe test device, comprising a shell, a mounting block is arranged inside the shell, a first probe, a second probe, a third probe and a fourth probe are arranged on the mounting block, a mounting block driving mechanism is arranged on the shell to drive the mounting block to move, so as to realize that each probe is pressed towards or away from the measured object; each probe comprises a probe body and a mounting cylinder in contact with the probe body for electrically connected, the mounting cylinder is used for connecting with the cable, the center cavity of the mounting cylinder can be movably installed by the end of the probe body along the length direction of the probe body; a screw hole is arranged on the mounting cylinder, and a locking screw is arranged in the screw hole to lock and fix the probe body.

[0005] A first long hole extending along the length direction of the probe body is arranged on the mounting block, and the first long hole can be freely passed through by the locking screw.

[0006] An installation cavity is arranged on the mounting block for movably installing each mounting cylinder along the axial direction of the installation cavity, a first spring is sleeved on the outside of the mounting cylinder in the installation cavity, one end of the first spring is pressed or connected on the mounting cylinder, and the other end is pressed or connected on the cavity wall of the installation cavity.

[0007] The second long hole is arranged on the mounting block and communicates with each mounting cavity, and the length direction of the second long hole extends along the moving direction of the mounting cylinder.

[0008] The inner wall of the mounting cavity is provided with a first annular step, the outer surface of the mounting cylinder is a stepped shaft structure, one end of the first spring is pressed on the step surface of the stepped shaft structure, and the other end of the first spring is pressed on the step surface of the first annular step.

[0009] The mounting block comprises a first mounting block and a second mounting block, and the mounting cavity comprises a mounting cavity first part located on the first mounting block and a mounting cavity second part located on the second mounting block; the diameter of the mounting cavity first part is smaller than that of the mounting cavity second part, so that the first mounting block part located in the mounting cavity second part forms the first annular step.

[0010] The large-diameter section of the stepped shaft structure is movably arranged in the mounting cavity second part, and / or the small-diameter section of the stepped shaft structure is movably arranged in the mounting cavity first part.

[0011] The end of the mounting cavity second part is provided with a concave second annular step, the second annular step is used for limiting cooperation with the end face of the mounting cylinder, so as to prevent the mounting cylinder from being separated.

[0012] The lower end of the shell is provided with an object table for placing the measured object.

[0013] The second spring is arranged between the mounting block and the shell, the mounting block driving mechanism comprises an adjusting screw rod which is screwed on the shell and is used for pressing the mounting block, and the mounting block is reset under the action of the second spring.

[0014] The probe body and the mounting cylinder are arranged in a position relationship, and then the locking screw is fixed, so that the length of the probe can be adjusted conveniently.

[0015] Further, when the length of the probe needs to be adjusted, the probe does not need to be disassembled, and the first long hole on the mounting block can be used to achieve the adjustment, that is, the length of the corresponding probe can be adjusted from the outside of the mounting block, and the adjustment is convenient. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a structural schematic view of an embodiment of the four-probe testing device of the utility model;

[0017] Figure 2 is Figure 1 the internal structure schematic view of the utility model;

[0018] Figure 3 is Figure 2 is a partial enlarged view of A in the middle;

[0019] Figure 4 is Figure 2 is a partial enlarged view of B in the middle;

[0020] Figure 5 is Figure 1 is a structural schematic view in the upper shell. DETAILED DESCRIPTION

[0021] In order to facilitate the understanding of the present application, the present application will be described in more detail below in conjunction with the drawings and specific embodiments. The preferred embodiments of the present application are shown in the drawings. However, the present application can be realized in many different forms and is not limited to the embodiments described in the specification. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0022] It should be noted that, unless otherwise defined, the technical and scientific terms used in the specification have the same meaning as understood by those skilled in the art to which the present application belongs. The technical and scientific terms used in the specification are only for the purpose of describing specific embodiments and are not intended to limit the present application.

[0023] An embodiment of the four-probe testing device of the present application is shown in Figures 1-5 As shown, it comprises a shell 1, an installation block 17 is arranged inside the shell, a first probe 11, a second probe 12, a third probe 13 and a fourth probe 14 are arranged on the installation block, a lower end of the shell is provided with a loading table 9 for placing a measured object 10. The loading table 9 and the shell 17 are connected through screws, specifically, a screw hole 34 is arranged at the lower end of the shell, a connecting hole 35 is arranged on the loading table, the connecting hole and the screw hole are correspondingly arranged and fixedly connected through a screw.

[0024] The first probe 11, the second probe 12, the third probe 13 and the fourth probe 14 have the same structure. Specifically, each probe comprises a probe body 22 and an installation cylinder 23 in contact with the probe body for electrically connected, the installation cylinder is used for connecting with a cable, an upper end of the installation cylinder 23 is provided with a cable connecting end 25. The central cavity 24 of the installation cylinder can be contacted by the end of the probe body 22 along the length direction of the probe body (in the present embodiment, that is, the direction along the arrow A in the drawing). Figure 1 and 2The side wall of the mounting cylinder is provided with a screw hole 36 which is in communication with the central cavity of the mounting cylinder, and a locking screw is installed in the screw hole to lock and fix the probe body. In this embodiment, a first long hole 37 extending along the length direction of the probe body is provided on the mounting block 17, and the first long hole can be freely passed through by the locking screw, and the first long hole provides a space for the movement of the locking screw. In this way, when the probe needs to be adjusted, the probe does not need to be disassembled, and only the position of the probe body in the mounting cylinder needs to be moved, and the fixing is performed from the side of the mounting block, which is quick and convenient.

[0025] The mounting block is provided with a mounting cavity for the mounting of each mounting cylinder in the axial direction, and a first spring 26 is sleeved outside the mounting cylinder in the mounting cavity. One end of the first spring is pressed against or connected to the mounting cylinder, and the other end is pressed against or connected to the cavity wall of the mounting cavity. The function of the first spring is that when the probe is pressed against the measured object, the upper end of the probe will compress the first spring, which not only avoids the hard contact between the probe and the measured object to protect the probe, but also provides a stable pressing force to ensure the stable contact between the probe and the measured object below. The mounting block is provided with a second long hole 30 in communication with each mounting cavity, and the length direction of the second long hole extends along the movement direction of the mounting cylinder. The second long hole is used for the passage of the cable, and the second long hole provides a movement space for the cable.

[0026] For the installation of the above-mentioned first spring, in this embodiment, a first annular step 29 is provided on the inner wall of the mounting cavity, and the outer surface of the mounting cylinder is a stepped shaft structure. One end of the first spring 26 is pressed against the step surface 28 of the stepped shaft structure, and the other end is pressed against the step surface of the first annular step 29. Specifically, the mounting block includes a first mounting block 18 and a second mounting block 19, and the mounting cavity includes a mounting cavity first part located on the first mounting block and a mounting cavity second part located on the second mounting block. The diameter of the mounting cavity first part is smaller than the diameter of the mounting cavity second part, so that the first mounting block part located in the mounting cavity second part forms the above-mentioned first annular step 29. The large diameter section of the stepped shaft structure is movably installed in the mounting cavity second part, and the small diameter section of the stepped shaft structure is movably installed in the mounting cavity first part. The end of the mounting cavity second part has a concave second annular step 27, which is used for the limiting cooperation of the end surface of the mounting cylinder 23 to prevent the mounting cylinder from falling off. The first mounting block is provided with a connecting long hole 20, and the second mounting block is provided with a threaded hole 21, and the two are fixedly connected by a connecting bolt. The mounting of the mounting cylinder and the first spring is realized through the above-mentioned structure.

[0027] In the embodiment, the mounting block driving mechanism is arranged on the shell to drive the mounting block to move, so as to press the probes against or away from the measured object. Specifically, the second springs 31 are arranged between the mounting block 17 and the shell 1. In the embodiment, the number of the second springs is three and they are uniformly and circumferentially spaced. In other embodiments, the number of the second springs can be adjusted according to actual needs, for example, two or four. The mounting block driving mechanism includes the adjusting screw 15 which is screwed to the shell and used to press the mounting block 17. The mounting block is reset under the action of the second springs. The end of the adjusting screw has a conical pressure fixing part 32, and the mounting block is provided with a positioning hole 33 which is positioned and pressed by the conical pressure fixing part.

[0028] In the embodiment, the shell includes the cover plate 2, the upper shell 3, the middle shell 4, the lower shell 5 and the bottom shell 6 which are sequentially arranged from top to bottom and connected together. The adjusting screw 15 is arranged on the cover plate 2. The mounting block 17 is located in the cavity of the upper shell. The probes pass through the middle shell, the lower shell and the bottom shell in sequence from the upper shell downward and leak out of the bottom shell. The middle shell 4 is provided with four probe perforations for corresponding probes to pass through up and down. The lower shell 5 is a cylindrical structure, and the lower shell is fixed to the middle shell through the bottom shell. Specifically, the middle shell 4 is provided with the first mounting hole 16 which extends along the up-down direction. The number of the first mounting holes is two and they are symmetrically arranged. The connecting rod 7 is arranged in the first mounting hole. The end of the connecting rod located in the mounting hole has a first ring groove. The middle shell is provided with the first through hole corresponding to the first ring groove, and the two are fixedly connected by screws. Similarly, the connecting rod and the bottom shell at the lower end are also fixedly connected by the same connection method as described above, that is, the bottom shell is provided with the second mounting hole, the lower end of the connecting rod is located in the second mounting hole, the end of the connecting rod located in the second mounting hole is provided with the second ring groove, and the bottom shell is provided with the second through hole corresponding to the second ring groove, and the two are also connected by screws.

[0029] In use, a shell can be used. The four-probe testing device is inserted into the shell. The first flange is arranged at the insertion port, and the second flange corresponding to the second flange is arranged on the upper shell of the shell of the four-probe testing device. Different test environments can be created in the shell, such as high temperature, low temperature and different atmosphere environments.

[0030] In the above description of the present specification, unless otherwise explicitly specified and limited, the terms "fixed", "mounted", "connected" or "linked" and the like should be understood in a broad sense. For example, as to the term "connected", it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through an intermediate medium, or it can be internal connection of two elements or interaction relationship between two elements. Therefore, unless otherwise explicitly limited in the present specification, the above terms can be understood in the specific meaning in the present application by the person skilled in the art according to the specific circumstances.

[0031] According to the above description of the present specification, the person skilled in the art can also understand the terms used as follows, for example, the terms indicating the orientation or positional relationship such as "upper", "lower", "front", "rear", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", "center", "longitudinal", "transverse", "clockwise" or "counterclockwise" are based on the orientation or positional relationship shown in the drawings of the present specification, which is only for the purpose of facilitating the description of the present application and simplifying the description, and is not explicitly or implicitly indicated that the device or element involved must have the specific orientation, be constructed and operated in the specific orientation, therefore the above orientation or positional relationship terms cannot be understood or interpreted as a limitation on the present application.

[0032] In addition, the terms "first" or "second" and the like used in the present specification are terms used to refer to numbers or ordinal numbers only for the purpose of description, and cannot be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" or "second" can explicitly or implicitly include at least one of the features. In the description of the present specification, the meaning of "plurality" is at least two, for example, two, three or more, etc., unless otherwise explicitly specified and limited.

[0033] In other embodiments of the present application, the large diameter section of the stepped shaft structure is guided and movably installed in the second part of the installation cavity, and the small diameter section of the stepped shaft structure only needs to be movably installed in the first part of the installation cavity, that is, the small diameter section of the stepped shaft structure does not need to be guided and installed in the first part of the installation cavity. Similarly, the large diameter section of the stepped shaft structure only needs to be movably installed in the second part of the installation cavity, at this time the small diameter section of the stepped shaft structure is guided and movably installed in the first part of the installation cavity, that is, the large diameter section of the stepped shaft structure does not need to be guided and installed in the second part of the installation cavity. The number of installation holes can be adjusted according to actual needs.

Claims

1. A four-probe testing device, comprising a housing, an internal mounting block, a first probe, a second probe, a third probe, and a fourth probe mounted on the mounting block, and a mounting block driving mechanism on the housing for moving the mounting block to allow each probe to press towards or move away from the object being tested; characterized in that: Each probe includes a probe body and a mounting cylinder that contacts the probe body for conductive communication. The mounting cylinder is used to connect with a cable. The central cavity of the mounting cylinder can be mounted movably along the length of the probe body by the end of the probe body. The mounting cylinder is provided with screw holes, in which locking screws are installed to lock and fix the probe body.

2. The four-probe testing device according to claim 1, characterized in that: The mounting block is provided with a first elongated hole extending along the length of the probe body, and the first elongated hole can be freely passed through by a locking screw.

3. The four-probe testing device according to claim 1, characterized in that: The mounting block is provided with a mounting cavity for each mounting cylinder to be installed movably along its axial direction. A first spring is fitted inside the mounting cavity on the outside of the mounting cylinder. One end of the first spring presses against or is connected to the mounting cylinder, and the other end presses against or is connected to the cavity wall of the mounting cavity.

4. The four-probe testing device according to claim 3, characterized in that: The mounting block is provided with a second elongated hole that communicates with each mounting cavity. The length of the second elongated hole extends along the movement direction of the mounting cylinder, and the second elongated hole allows cables to pass through.

5. The four-probe testing device according to claim 3, characterized in that: The inner wall of the mounting cavity is provided with a first annular step, and the outer surface of the mounting cylinder is a stepped shaft structure. One end of the first spring presses against the stepped surface of the stepped shaft structure, and the other end presses against the stepped surface of the first annular step.

6. The four-probe testing device according to claim 5, characterized in that: The mounting block includes a first mounting block and a second mounting block, and the mounting cavity includes a first part of the mounting cavity located on the first mounting block and a second part of the mounting cavity located on the second mounting block; the diameter of the first part of the mounting cavity is smaller than the diameter of the second part of the mounting cavity, so that the portion of the first mounting block located within the second part of the mounting cavity forms the first annular step.

7. The four-probe testing device according to claim 6, characterized in that: The large-diameter section of the stepped shaft structure is guided and moved within the second part of the mounting cavity, and / or the small-diameter section of the stepped shaft structure is guided and moved within the first part of the mounting cavity.

8. The four-probe testing device according to claim 6, characterized in that: The end of the second part of the mounting cavity has a concave second annular step, which is used for end face limiting fit of the mounting cylinder to prevent detachment.

9. The four-probe testing device according to claim 1, characterized in that: The lower end of the outer shell is provided with a platform for placing the object to be measured.

10. The four-probe testing apparatus according to any one of claims 1-9, characterized in that: A second spring is provided between the mounting block and the outer shell. The mounting block driving mechanism includes an adjusting screw threaded to the outer shell for pressing the mounting block. The mounting block is reset under the action of the second spring.

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