Structure of monitoring source measuring unit

Abstract

The utility model provides a structure of a monitoring source measuring unit. The structure comprises a resistor, a processor, an alarm, a voltage output module, a current measuring module and two idle pin boards. The voltage output module, the current measurement module, the resistor and the two idle pin plates are connected in series to form a loop, the voltage output module transmits preset voltage to the resistor, and the current measurement module is used for measuring the value of current flowing through the resistor; the current measuring module and the alarm are respectively connected with the processor; the current measurement module is used for sending a measured current value to the processor; and the processor is used for judging whether the received current value is within a preset threshold range or not and determining whether to start the alarm or not according to a judgment result. When the source measuring unit breaks down, the voltage output by the voltage output module changes greatly, and the current value measured by the current measuring module is not within the threshold range at the moment. The structure can monitor the source measuring unit in real time and send out an alarm signal in time.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer electrical property testing device, especially a kind of structure of monitoring source measurement unit. BACKGROUND

[0002] In semiconductor manufacturing process, wafer electrical property testing device is needed to be used to carry out WAT (Wafer Acceptance Test, wafer electrical property testing or wafer acceptance test) to wafer, and WAT is an indispensable means to monitor semiconductor process. The test items of WAT include the parameters such as voltage, current and resistance of each device in wafer, and the commonality of each test item is to use hardware SMU (Source Measure Unit, source measurement unit), and SMU is an electronic device that can provide and measure voltage and current simultaneously, and SMU is part of wafer electrical property testing device.

[0003] The quality of SMU directly affects test results. When WAT is carried out, the input condition of SMU, the pad on wafer for testing and each device to be measured need to be determined, and SMU applies voltage on pad through pin board, and pad delivers voltage to the device to be measured. When the measured value of device is abnormal, the following verification process needs to be carried out: stop testing, judge whether SMU or other modules fail by self-checking of wafer electrical property testing device, if failure occurs, corresponding modules need to be replaced after artificial analysis and verified by previously tested wafer, in addition, wafer electrical property testing device needs to be replaced to retest wafer with abnormal measured value, so as to confirm whether wafer electrical property testing device fails or wafer is unqualified. However, the whole verification process needs about 3 hours, which affects production efficiency. UTILITY MODEL CONTENT

[0004] The utility model provides a kind of structure of monitoring source measurement unit to solve the technical problem that the above-mentioned verification process cannot quickly judge whether source measurement unit fails.

[0005] To solve the above technical problems, the utility model provides a kind of structure of monitoring source measurement unit, the source measurement unit includes voltage output module, current measurement module and two idle pin boards, the structure of monitoring source measurement unit includes resistance, processor, alarm, the voltage output module, the current measurement module and the two idle pin boards.

[0006] The voltage output module, the current measurement module, the resistance and the two idle pin boards are connected in series to form a loop, the voltage output module delivers a preset voltage to the resistance through the two idle pin boards, and the current measurement module is used to measure the current value flowing through the resistance.

[0007] The current measurement module and the alarm are connected with the processor respectively, the current measurement module is used to send the measured current value to the processor, and the processor is used to judge whether the received current value is within a preset threshold range and determine whether to start the alarm according to the judgment result.

[0008] Preferably, the structure of the monitoring source measurement unit further comprises a display, the display is connected with the current measurement module, and the display is used to display the current value measured by the current measurement module and the threshold range.

[0009] Preferably, a first switch is arranged between the display and the current measurement module.

[0010] Preferably, the alarm is installed on the side wall of the display.

[0011] Preferably, the resistance is a fixed resistor.

[0012] Preferably, the resistance is a sliding rheostat.

[0013] Preferably, the processor is a processor of a wafer electrical property testing device in which the source measurement unit is located.

[0014] Preferably, a second switch is arranged between the alarm and the processor.

[0015] Preferably, the resistance is connected with the two idle pin boards in series through a lead with a clamp.

[0016] Preferably, the alarm is connected with the processor in series through a lead with a clamp.

[0017] The utility model provides a kind of structure of monitoring source measurement unit, including resistance, processor, alarm, voltage output module, current measurement module and two idle pinboard, voltage output module is applied by two idle pinboard voltage at the both ends of resistance, current measurement module measures the current flowing through resistance by two idle pinboard.When source measurement unit fails, the voltage output by voltage output module will have greater change, the current value measured by current measurement module will not be within the threshold range of preset at this time.If processor determines that the current value received is within the threshold range of preset, processor does not start alarm;If processor determines that the current value received is not within the threshold range of preset, processor starts alarm, reminds operating personnel to check source measurement unit in time.The unexpected effect that the structure of monitoring source measurement unit has is that source measurement unit can be monitored in real time, when source measurement unit fails, alarm signal can be sent in time. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the structure schematic view of the structure of monitoring source measurement unit when using of the utility model one embodiment provides.

[0019] Figure 2 It is Figure 1 The circuit schematic view between voltage output module, current measurement module and resistance in it.

[0020] Figure 3 It is Figure 1 The schematic view corresponding to the threshold upper limit, threshold lower limit and current value curve diagram measured by current measurement module displayed by display in it.

[0021] [The following is explained as follows]:

[0022] Resistance-R, processor-101, alarm-102, voltage output module-103, current measurement module-104 idle pinboard-105, display-106;

[0023] Wafer-201, pin-202, device-203;

[0024] Bearing table-301. DETAILED DESCRIPTION

[0025] To make the purpose, advantage and feature of the utility model more clear, the structure of monitoring source measurement unit proposed by the utility model is further detailed below with the drawings.For explanation, the drawings are all very simplified and use non-precise scale, just to facilitate, clear and assist the purpose of explaining the utility model embodiment.

[0026] In the description of the utility model, the terms "first", "second" and the like qualifiers are added for the convenience of description and reference, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features qualified with "first", "second" and the like can explicitly or implicitly include one or more of the features.

[0027] Reference Figure 1 As shown in the embodiment, the structure of the monitoring source measurement unit includes a resistor R, a processor 101, an alarm 102, the voltage output module 103, the current measurement module 104 and the two idle pin boards 105. The voltage output module 103, the current measurement module 104, the resistor R and the two idle pin boards 105 are connected in series to form a loop. The voltage output module 103 delivers a preset voltage to the resistor R through the two idle pin boards 105. The current measurement module 104 is used to measure the current value flowing through the resistor R. The current measurement module 104 and the alarm 102 are respectively connected to the processor 101. The current measurement module 104 is used to send the measured current value to the processor 101. The processor 101 is used to determine whether the received current value is within a preset threshold range, and to determine whether to start the alarm 102 according to the determination result.

[0028] Reference Figure 1 As shown in the embodiment, the wafer 201 is fixed on the bearing table 301 during testing. The wafer 201 usually has multiple pins 202 and multiple devices 203. The devices 203 are connected to the pin boards through the pins 202. Usually, one device 203 is configured with two pins 202. The devices 203 are the objects to be tested. The idle pin boards 105 refer to the pin boards that do not need to be used to connect the pins 202 on the wafer 201 for testing the wafer 201. The wafer electrical property testing device usually includes 48 pin boards, which are represented by 1-48. Figure 1 During wafer electrical property testing, only the first 21 pin boards are usually used. The two unused pin boards can be selected as idle pin boards, for example, the 24th and 25th pin boards are used as idle pin boards 105.

[0029] Reference Figure 1 And Figure 2 As shown in the embodiment, the voltage output by the voltage output module 103, i.e. the SMU preset voltage V, can be 1V. The resistance of the resistor R can be 1000Ω. In this way, the measured current I measured by the current measurement module 104 is theoretically 1mA. The current flowing through the two idle pin boards 105 and the resistor R is small, which will not burn out the idle pin boards 105 and the resistor R.Figure 3 As shown, Figure 3 The horizontal axis, measurement time / s, represents the measurement time for a certain batch of wafers, and the vertical axis, current value / mA, represents the current magnitude of the wafers in that batch measured by the current measurement module 104. Considering minor fluctuations in voltage and current, as well as measurement errors, a preset threshold range is set. The threshold range includes an upper threshold and a lower threshold. The threshold range can be the theoretical current value plus or minus a certain value. For example, if the theoretical current value is 1mA, the corresponding threshold range could be 0.9mA to 1.1mA. The display 106 displays... Figure 3 The graphic shown can also display the batch information of the wafer corresponding to that graphic.

[0030] This embodiment provides a monitoring source measurement unit structure, including a resistor R, a processor 101, an alarm 102, a voltage output module 103, a current measurement module 104, and two idle pin plates 105. The voltage output module 103 applies voltage to both ends of the resistor R through the two idle pin plates 105. The current measurement module 104 measures the current flowing through the resistor R through the two idle pin plates 105. When the source measurement unit malfunctions, the voltage output by the voltage output module 103 will change significantly, and the current value measured by the current measurement module 104 will be outside the preset threshold range. If the processor 101 determines that the received current value is within the preset threshold range, the processor 101 will not activate the alarm 102; if the processor 101 determines that the received current value is outside the preset threshold range, the processor 101 will activate the alarm 102 to remind the operator to check the source measurement unit in time. The unexpected effect of this monitoring source measurement unit structure is that it can monitor the source measurement unit in real time, and can promptly issue an alarm signal when the source measurement unit malfunctions.

[0031] Preferred, Reference Figure 1 and Figure 3 As shown, the structure of the monitoring source measurement unit also includes a display 106, which is connected to the current measurement module 104. The display 106 is used to display the current value measured by the current measurement module 104 and the threshold range. The display 106 can display the current value measured by the current measurement module 104 and the preset threshold range in real time, allowing operators to more intuitively view the fluctuations in the current value measured by the current measurement module 104.

[0032] Preferred, Reference Figure 1As shown in the figure, a first switch is arranged between the display 106 and the current measurement module 104. The first switch can be used to select whether to send the current value measured by the current measurement module 104 to the display 106. When the first switch is closed, the current measurement module 104 sends the measured current value to the display 106; when the first switch is opened, the current measurement module 104 does not send the measured current value to the display 106.

[0033] Preferably, as shown in the figure, the display 106 is arranged on the side wall of the current measurement module 104, so that the display 106 and the alarm 102 can be conveniently viewed. Figure 1

[0034] Preferably, as shown in the figure, the display 106 is arranged on the side wall of the current measurement module 104, so that the display 106 and the alarm 102 can be conveniently viewed. Figure 1 Preferably, as shown in the figure, the resistor R is a fixed resistor. The resistance of the fixed resistor can be relatively large, and the use of the fixed resistor can prevent the current on the fixed resistor from being too large when the resistance is too small, thereby preventing the fixed resistor and the two idle pin plates 105 from being burned out.

[0035] Preferably, as shown in the figure, the resistor R is a fixed resistor. The resistance of the fixed resistor can be relatively large, and the use of the fixed resistor can prevent the current on the fixed resistor from being too large when the resistance is too small, thereby preventing the fixed resistor and the two idle pin plates 105 from being burned out. Figure 1 Preferably, as shown in the figure, the resistor R is a fixed resistor. The resistance of the fixed resistor can be relatively large, and the use of the fixed resistor can prevent the current on the fixed resistor from being too large when the resistance is too small, thereby preventing the fixed resistor and the two idle pin plates 105 from being burned out.

[0036] Figure 1 Preferably, as shown in the figure, the processor 101 is a processor provided by the wafer electrical property testing device in which the source measurement unit is arranged, so that a separate processor is not required. In other embodiments, a processor can be additionally configured as the processor 101 for monitoring the structure of the source measurement unit, with reference to the model of the processor provided by the wafer electrical property testing device. The processor 101 can compare the size of the data and send a start signal to the alarm 102.

[0037] Preferably, as shown in the figure, the processor 101 is a processor provided by the wafer electrical property testing device in which the source measurement unit is arranged, so that a separate processor is not required. In other embodiments, a processor can be additionally configured as the processor 101 for monitoring the structure of the source measurement unit, with reference to the model of the processor provided by the wafer electrical property testing device. The processor 101 can compare the size of the data and send a start signal to the alarm 102. Figure 1 Preferably, as shown in the figure, the processor 101 is a processor provided by the wafer electrical property testing device in which the source measurement unit is arranged, so that a separate processor is not required. In other embodiments, a processor can be additionally configured as the processor 101 for monitoring the structure of the source measurement unit, with reference to the model of the processor provided by the wafer electrical property testing device. The processor 101 can compare the size of the data and send a start signal to the alarm 102.

[0038] Figure 1 Preferably, as shown in the figure, the processor 101 is a processor provided by the wafer electrical property testing device in which the source measurement unit is arranged, so that a separate processor is not required. In other embodiments, a processor can be additionally configured as the processor 101 for monitoring the structure of the source measurement unit, with reference to the model of the processor provided by the wafer electrical property testing device. The processor 101 can compare the size of the data and send a start signal to the alarm 102.

[0039] Preferably, as shown in the figure, the processor 101 is a processor provided by the wafer electrical property testing device in which the source measurement unit is arranged, so that a separate processor is not required. In other embodiments, a processor can be additionally configured as the processor 101 for monitoring the structure of the source measurement unit, with reference to the model of the processor provided by the wafer electrical property testing device. The processor 101 can compare the size of the data and send a start signal to the alarm 102. Figure 1 Preferably, as shown in the figure, the processor 101 is a processor provided by the wafer electrical property testing device in which the source measurement unit is arranged, so that a separate processor is not required. In other embodiments, a processor can be additionally configured as the processor 101 for monitoring the structure of the source measurement unit, with reference to the model of the processor provided by the wafer electrical property testing device. The processor 101 can compare the size of the data and send a start signal to the alarm 102.​​​

[0040] In summary, the utility model provides a kind of structure of monitoring source measurement unit, including resistance R, processor 101, alarm 102, voltage output module 103, current measurement module 104 and two idle pinboard 105, voltage output module 103 is applied in the voltage of resistance R both ends by two idle pinboard 105, current measurement module 104 measures the current of flowing through resistance R by two idle pinboard 105.When source measurement unit fails, the voltage output by voltage output module 103 will occur greater change, current measurement module 104 measured current value will not be within the preset threshold range at this time.If processor 101 determines that the received current value is within the preset threshold range, processor 101 does not start alarm 102;If processor 101 determines that the received current value is not within the preset threshold range, processor 101 starts alarm 102, reminds operating personnel to check source measurement unit in time.The structure of monitoring source measurement unit has the unexpected effect that source measurement unit can be monitored in real time, when source measurement unit fails, alarm signal can be sent in time.

[0041] The above description is only the description of the preferred embodiment of the utility model, and not any limitation on the scope of the utility model, any change or modification made by the person skilled in the art according to the above disclosure belongs to the protection scope of the utility model.

Claims

1. A structure for monitoring a source measurement unit, the source measurement unit comprising a voltage output module, a current measurement module and two idle pin boards, characterized in that, The structure of the monitoring source measurement unit comprises a resistor, a processor, an alarm, the voltage output module, the current measurement module and the two idle pin boards; The voltage output module, the current measurement module, the resistor and the two idle pin boards are connected in series to form a loop, the voltage output module delivers a preset voltage to the resistor through the two idle pin boards, and the current measurement module is used to measure the current value flowing through the resistor; The current measurement module and the alarm are connected with the processor respectively; The current measurement module is used to send the measured current value to the processor; The processor is used to determine whether the received current value is within a preset threshold range, and determine whether to start the alarm according to the determination result.

2. A structure for monitoring a source measurement unit as recited in claim 1, wherein, The structure of the monitoring source measurement unit further comprises a display connected with the current measurement module, and the display is used to display the current value measured by the current measurement module and the threshold range.

3. A structure for monitoring a source measurement unit as recited in claim 2, wherein, A first switch is arranged between the display and the current measurement module.

4. A structure for monitoring a source measurement unit as recited in claim 2, wherein, The alarm is installed on the side wall of the display.

5. A structure for monitoring a source measurement unit as recited in claim 1, wherein, The resistor is a fixed resistor.

6. A structure for monitoring a source measurement unit as recited in claim 1, wherein, The resistor is a sliding rheostat.

7. A structure for monitoring a source measurement unit as recited in claim 1, wherein, The processor is a processor of a wafer electrical property testing device where the source measurement unit is located.

8. A structure for monitoring a source measurement unit as recited in claim 1, wherein, A second switch is arranged between the alarm and the processor.

9. A structure for monitoring a source measurement unit as recited in claim 1, wherein, The resistor is connected with the two idle pin boards in series through a wire with a clamp.

10. A structure for monitoring a source measurement unit as recited in claim 1, wherein, The alarm is connected with the processor in series through a wire with a clamp.

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