Water-cooled electrode capable of adjusting length of electrode main body

Abstract

The utility model discloses a water-cooled electrode capable of adjusting the length of an electrode main body. The water-cooled electrode comprises the electrode main body, a copper core is arranged in the electrode main body in a sliding mode, one end of the copper core is provided with a screw rod, and the electrode main body is inserted into a cavity in the horizontal direction and is connected with a first connecting pipe of a heating body in the cavity through the screw rod. A flange is connected to the electrode body, a second connecting pipe is arranged on the cavity, the electrode body is inserted into the cavity along the second connecting pipe, and the flange is connected with the second connecting pipe through a first bolt so that the electrode body can be connected to the cavity. According to the water-cooled electrode capable of adjusting the length of the electrode main body, the electrode main body is connected with the cavity, and the length of the part, extending into the cavity, of the copper core of the electrode main body is adjusted, so that the position of the water-cooled electrode can be adjusted in the horizontal direction, and the water-cooled electrode can be conveniently adjusted to a proper position; therefore, the installation position of the heating body in the cavity is guaranteed, the structure is simple, installation is convenient, and the service life of the heating body is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model belongs to silicon carbide crystal growth equipment field especially relates to a water -cooled electrode of adjustable electrode main part length. BACKGROUND

[0002] In the equipment installation use process, need water -cooled electrode and heating body connection fixed, but water -cooled electrode because of the fixed position, and the heating body that water -cooled electrode connects can appear deformation, cause damage to heating body.

[0003] Heating body deformation can make the service life of heating reduce, need to adjust the length position of electrode main body to go into the cavity interior to reduce the deformation in the installation process of heating body, to make the force of heating body more uniform.

[0004] Therefore, the urgent need designs a kind of water -cooled electrode of adjustable electrode main part length, solves the above-mentioned water -cooled electrode and heating body connection, heating body easy deformation problem. UTILITY MODEL CONTENTS

[0005] To solve the technical problem that the water-cooled electrode mentioned in the background art is fixed in position and the heating body connected to the water-cooled electrode may deform and cause damage to the heating body, a water-cooled electrode with adjustable electrode main body length is provided to solve the problem of deformation of the heating body caused by the water-cooled electrode.

[0006] To achieve the above-mentioned purpose, the specific technical scheme of the water-cooled electrode with adjustable electrode main body length of the utility model is as follows:

[0007] A water-cooled electrode with adjustable electrode main body length, comprising an electrode main body, a copper core slidably arranged in the electrode main body, a screw rod arranged at one end of the copper core, the electrode main body inserted into a cavity along a horizontal direction, and connected to a first connecting pipe of a heating body in the cavity through the screw rod; a flange connected to the electrode main body, a second connecting pipe arranged on the cavity, the electrode main body inserted into the cavity along the second connecting pipe, and the flange connected to the second connecting pipe through a first bolt, so that the electrode main body is connected to the cavity.

[0008] Further, the first connecting pipe is connected to the end of the heating body, the copper core is inserted into the first connecting pipe, the screw rod is inserted between the first connecting pipe and the copper core, and the end of the screw rod is screwed into a copper nut, so that the copper core is connected to the heating body.

[0009] Further, the second connecting pipe is connected to the side wall of the cavity, the second connecting pipe is connected to a cavity flange disc away from the cavity, the electrode main body is inserted along the cavity flange disc, and the cavity flange disc is connected to the flange through the first bolt.

[0010] Further, a first insulating sleeve is sleeved on the electrode main body, and the first insulating sleeve is clamped between the electrode main body and the cavity flange disc.

[0011] Further, the second insulation sleeve is clamped between the cavity flange and the flange, and the first sealing ring is arranged between the first insulation sleeve and the second insulation sleeve.

[0012] Further, the third insulation sleeve is inserted into the flange hole of the flange, and the first bolt is screwed into the third insulation sleeve and the cavity flange.

[0013] Further, the second bolt is screwed on the flange, and the second bolt is connected to the electrode body at one end of the flange to connect the flange to the electrode body.

[0014] Further, the fourth insulation sleeve is sleeved on the electrode body, the fourth insulation sleeve is clamped between the flange and the electrode body, and the second bolt passes through the fourth insulation sleeve and is connected to the electrode body.

[0015] Further, the second sealing ring is clamped between the fourth insulation sleeve and the first insulation sleeve, and the second sealing ring is sleeved on the electrode body.

[0016] Further, the insulating plate is sleeved on the electrode body, and the insulating plate is clamped between the second sealing ring and the fourth insulation sleeve.

[0017] The water-cooled electrode with adjustable electrode body length has the following advantages:

[0018] By connecting the electrode body and the cavity, the length of the copper core of the electrode body extending into the cavity is adjusted, the position of the water-cooled electrode in the horizontal direction is adjusted, the water-cooled electrode is adjusted to the appropriate position, and the installation position of the heating body in the cavity is ensured. The structure of the present application is simple, convenient to install, convenient to adjust the position of the electrode into the cavity, reduces the deformation of the heating body during installation, and increases the service life of the heating body. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a whole installation schematic view of the water-cooled electrode with adjustable electrode body length of the utility model;

[0020] Figure 2 It is a sectional view of the water-cooled electrode with adjustable electrode body length of the utility model.

[0021] Marking in the figure:

[0022] 1, electrode body; 2, copper core; 3, copper nut; 4, cavity; 5, heating body; 6, first connecting pipe; 7, second connecting pipe; 8, flange; 9, cavity flange; 10, first bolt; 11, second bolt; 12, first insulation sleeve; 13, second insulation sleeve; 14, third insulation sleeve; 15, fourth insulation sleeve; 16, first sealing ring; 17, second sealing ring; 18, third sealing ring; 19 insulating plate. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model below. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor are within the protection scope of the utility model.

[0024] The person skilled in the art can understand that although some embodiments herein include certain features included in other embodiments rather than other features, the combination of features of different embodiments means to be within the scope of the utility model and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0025] The technical scheme of the utility model will be described below with reference to the accompanying drawings Figure 1 to the accompanying drawings Figure 2 The adjustable electrode main body length water-cooled electrode of the utility model is described.

[0026] As Figure 1 shown, the adjustable electrode main body length water-cooled electrode in the utility model includes an electrode main body 1, a copper core 2 is slidably arranged in the electrode main body 1, the copper core 2 is provided with a screw rod at one end, the electrode main body 1 is inserted into a cavity 4 along the horizontal direction, and the screw rod is connected with a first connecting pipe 6 of a heating body 5 in the cavity 4; a flange 8 is connected to the electrode main body 1, a second connecting pipe 7 is arranged on the cavity 4, the electrode main body 1 is inserted into the cavity 4 along the second connecting pipe 7, and the flange 8 is connected with the second connecting pipe 7 through a first bolt 10, so that the electrode main body 0 is connected to the cavity 1.

[0027] By connecting the electrode main body 1 with the cavity 4 and adjusting the length of the copper core 2 of the electrode main body 1 extending into the inside of the cavity 4, the position of the water-cooled electrode in the horizontal direction can be adjusted, the water-cooled electrode can be conveniently adjusted to a suitable position, and the installation position of the heating body 5 in the cavity 4 is ensured. The application has simple structure, is convenient to install, is convenient for adjusting the position of the water-cooled electrode into the cavity 4, reduces the deformation of the heating body 5 during installation, and increases the service life of the heating body 5.

[0028] Further, as Figure 1 and Figure 2As shown, the heating element 5 is connected to a first connecting pipe 6 at one end, and one end of the copper core 2 is inserted into the first connecting pipe 6. A screw is inserted between the first connecting pipe 6 and the copper core 2, and a copper nut 3 is screwed into the end of the screw so that the copper core 2 is connected to the heating element 5. A second connecting pipe 7 is connected to the side wall of the cavity 4. A cavity flange 9 is connected to the side of the second connecting pipe 7 away from the cavity 4. The electrode body 1 is inserted along the cavity flange 9. The cavity flange 9 is connected to the flange 8 by a first bolt 10. A first insulating sleeve 12 is fitted on the electrode body 1. The first insulating sleeve 12 is clamped between the electrode body 1 and the cavity flange 9.

[0029] In this embodiment, preferably, the heating element 5 is disposed inside the cavity 4. A first connecting pipe 6 is connected horizontally to the port of the heating element 5 on the side near the cavity 4. A connecting hole is opened vertically at the port of the first connecting pipe 6. After the copper core 2 is inserted into the first connecting pipe 6, the screw passes through the connecting port of the first connecting pipe 6 and the copper core 2 in sequence. Copper nuts 3 are screwed into both ends of the screw to realize the connection between the copper core 2 and the heating element 5. The horizontal direction is denoted as S.

[0030] An opening is provided on the side wall of the cavity 4, and a second connecting pipe 7 is vertically connected to the opening. The second connecting pipe 7 is on the same horizontal line as the first connecting pipe 6, and a cavity flange 9 is fixedly connected to the side of the second connecting pipe 7 away from the opening of the cavity 4. Preferably, the electrode body 1 is inserted into the second connecting pipe 7 from one side of the cavity flange 9 in a horizontal direction, so that one end of the electrode body 1 enters the cavity 4. Furthermore, the cavity flange 9 is connected to the flange 8 by a plurality of first bolts 10. The first bolts 10 are stainless steel bolts. Stainless steel bolts have strong corrosion resistance to ensure a stable connection between the cavity flange 9 and the flange 8.

[0031] Preferably, a first insulating sleeve 12 is fitted along the outer wall of the electrode body 1. The side of the first insulating sleeve 12 away from the electrode body 1 abuts against the cavity flange 9, so that the electrode body 1 and the cavity 4 are insulated to avoid electrical conduction.

[0032] Furthermore, such as Figure 1 As shown, a second insulating sleeve 13 is clamped between the cavity flange 9 and the flange 8, and a first sealing ring 16 is provided between the second insulating sleeve 13 and the first insulating sleeve 12; a third insulating sleeve 14 is inserted into the flange hole of the flange 8, and a first bolt 10 is inserted into the third insulating sleeve 14 and screwed to the cavity flange 9.

[0033] In this embodiment, a second insulating sleeve 13 is added between the cavity flange 9 and the flange 8. The second insulating sleeve 13 prevents the cavity flange 9 from contacting the flange 8, that is, the second insulating sleeve 13 fills the gap between the cavity flange 9 and the flange 8, and the first sealing ring 16 is clamped between the first insulating sleeve 12 and the second insulating sleeve 13 to ensure that the electrode body 1 is completely sealed to the cavity 4. The second insulating sleeve 13 also serves to insulate and prevent conductivity.

[0034] Preferably, a third insulating sleeve 14 is inserted into the flange hole of the flange 8. When multiple first bolts 10 are inserted into the flange hole, the first bolts 10 do not directly contact the flange 8. The first bolts 10 are connected to the cavity flange 9, so that the cavity flange 9 and the flange 8 are connected at the same time, and the insulation and conduction prevention functions are achieved.

[0035] Furthermore, such as Figure 1 As shown, a second bolt 11 is screwed onto the flange 8. The second bolt 11 is inserted into one end of the flange 8 and connected to the electrode body 1, so that the flange 8 is connected to the electrode body 1. A fourth insulating sleeve 15 is fitted on the electrode body 1. The fourth insulating sleeve 15 is clamped between the flange 8 and the electrode body 1. The second bolt 11 passes through the fourth insulating sleeve 15 and is connected to the electrode body 1. A second sealing ring 17 is clamped between the fourth insulating sleeve 15 and the first insulating sleeve 12. The second sealing ring 17 is fitted on the electrode body 1. An insulating plate 19 is fitted on the electrode body 1. The insulating plate 19 is clamped between the second sealing ring 13 and the fourth insulating sleeve 15.

[0036] In this embodiment, preferably, the flange 8 is connected to the electrode body 1 by a plurality of second bolts 11, the second bolts 11 being locking bolts, and a fourth insulating sleeve 15 is sleeved along the side wall of the electrode body 1. The side of the fourth insulating sleeve 15 away from the electrode body 1 abuts against the flange 8, and the second bolts 11 pass through the flange 8 and the fourth insulating sleeve 15 in sequence before being connected to the electrode body 1. The fourth insulating sleeve 15 further optimizes the insulation effect.

[0037] A second sealing ring 17 is provided between the fourth insulating sleeve 15 and the first insulating sleeve 12, and a third sealing ring 18 is provided at the end of the electrode body 1 away from the cavity 4. Preferably, there are two sets of the second sealing ring 17, both of which are sleeved on the electrode body 1. An insulating plate 19 is also sleeved on the electrode body 1. The insulating plate 19 is located between the second sealing ring 17 and the fourth insulating sleeve 15, which further ensures that the electrode body 1 is completely sealed and insulated from the cavity 4, preventing conductivity; it also ensures the adjustability of the electrode body 1, thereby ensuring the installation of the heating element 5.

[0038] The working principle of the water-cooled electrode with adjustable electrode body length in this invention is as follows:

[0039] First, when the water-cooled electrode is installed in its initial position, tighten the locking nut of the second bolt 11 to ensure that the position of the water-cooled electrode is fixed.

[0040] Then, install the heating element 5. If the water-cooled electrode position is not suitable during the installation of the heating element 5, the locking nut of the second bolt 11 and the first bolt 10 can be loosened so that the electrode body 1 can be moved horizontally.

[0041] Then, slowly twitching electrode main body 1, can be adjusted in the horizontal direction a certain distance, adjust the position after, ensure that the size space required for installing heating body 5;

[0042] Finally, after installing heating body 5, the position of the electrode main body 1 of the water-cooled electrode is determined, the copper core 2 of the electrode main body 1 is connected with the first connecting pipe 6 of the heating body 5, the first bolt 10 is first fastened, and then the second bolt 11 is fastened, so that the position of the electrode main body 1 is locked.

[0043] Based on the water-cooled electrode with adjustable electrode main body length, by connecting the electrode main body 1 with the cavity 4, the length of the copper core 2 of the electrode main body 1 extending into the cavity 4 can be adjusted, the position of the water-cooled electrode in the horizontal direction can be adjusted, the water-cooled electrode can be adjusted to a suitable position, and then the installation position of the heating body 5 in the cavity 4 is ensured.

[0044] Obviously, the above embodiments of the utility model are only examples for clearly illustrating the utility model, and are not a limitation on the embodiments of the utility model. For ordinary skilled in the art, on the basis of the above description, other different forms of changes or changes can be made. Here, all the embodiments are not enumerated. Any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model claims.

Claims

1. A water-cooled electrode with adjustable length of the electrode body, characterized in that, The electrode body is inserted into the cavity along the horizontal direction, and connected with the first connecting pipe of the heat generating body in the cavity through the screw rod.

2. The water-cooled electrode of adjustable length of the electrode body according to claim 1, characterized in that The first connecting pipe is connected with the end of the copper core, and the screw rod is inserted between the first connecting pipe and the copper core, and the end of the screw rod is screwed into the copper nut, so that the copper core is connected with the heat generating body.

3. The water-cooled electrode of adjustable length of the electrode body according to claim 1, characterized in that The second connecting pipe is connected with the side wall of the cavity, and the cavity flange disc is connected with the side of the second connecting pipe away from the cavity.

4. The water-cooled electrode of adjustable length of the electrode body according to claim 3, characterized in that The first insulation sleeve is sleeved on the electrode body and clamped between the electrode body and the cavity flange disc.

5. The water-cooled electrode of adjustable length of the electrode body according to claim 4, characterized in that The second insulation sleeve is clamped between the cavity flange disc and the flange, and the first sealing ring is arranged between the second insulation sleeve and the first insulation sleeve.

6. The water-cooled electrode of adjustable length of the electrode body according to claim 3, characterized in that The third insulation sleeve is inserted into the flange hole of the flange, and the first screw is screwed with the cavity flange disc through the third insulation sleeve.

7. The water-cooled electrode of adjustable length of the electrode body according to claim 6, characterized in that The second screw is screwed on the flange, and the second screw is connected with the electrode body at one end of the flange to connect the flange with the electrode body.

8. The water-cooled electrode of adjustable length of the electrode body according to claim 7, characterized in that The fourth insulation sleeve is sleeved on the electrode body and clamped between the flange and the electrode body, and the second screw is connected with the electrode body after passing through the fourth insulation sleeve.

9. The water-cooled electrode of adjustable length of the electrode body according to claim 8, characterized in that The second sealing ring is clamped between the fourth insulation sleeve and the first insulation sleeve, and the second sealing ring is sleeved on the electrode body.

10. The water-cooled electrode of adjustable length of the electrode body according to claim 9, characterized in that The insulation plate is sleeved on the electrode body and clamped between the second sealing ring and the fourth insulation sleeve.

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