Micro-tower type combined VPSA oxygen enrichment device
By using a micro-tower type combined VPSA oxygen enrichment device, which employs a coupling-decoupling mechanism for magnetic levitation blowers and vacuum pumps, as well as automatic control equipment, the problems of equipment complexity and high maintenance costs caused by large adsorption towers are solved, achieving efficient and stable oxygen production and system reliability.
Patent Information
- Application Number
- CN202423131969.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-18
- Publication Date
- 2025-11-21
- Estimated Expiration
- 2034-12-18
AI Technical Summary
The use of large adsorption towers in existing VPSA oxygen production technology increases equipment complexity and maintenance costs, and makes control cumbersome, making it difficult to achieve standardized and integrated layout.
The micro-tower type combined VPSA oxygen enrichment device includes an integrated blower and vacuum unit, a blower main pipe, a micro-tower skid-mounted device, an exhaust gas main pipe, an oxygen enrichment main pipe, an oxygen balance tank, an oxygen compressor, and an oxygen storage tank. The blower and vacuum operation are achieved by a coupling-decoupling mechanism of a magnetic levitation blower and a vacuum pump. The micro-adsorption tower is connected in parallel, and the system is automatically controlled by an automatic control device.
It improves installation and equipment operating efficiency, reduces noise pollution and vibration, achieves standardized design and efficient and stable oxygen production, and enhances the reliability and flexibility of the system.
Smart Images

Figure CN223570358U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to gas separation technical field, concretely is micro tower type combined VPSA oxygen enrichment device. BACKGROUND
[0002] VPSA oxygen production device is the adsorption selectivity of special oxygen production molecular sieve (such as lithium molecular sieve or zeolite molecular sieve) to oxygen, nitrogen and other gas components in air. Under normal temperature, nitrogen, carbon dioxide, water vapor and other impurity gases in air are adsorbed by adsorbent under high pressure, while oxygen is enriched due to its low adsorption capacity and flows out from the top of the adsorption tower as product oxygen. VPSA oxygen production technology has become an important and preferred method for producing oxygen in modern industry due to its high efficiency, energy saving, environmental protection, high automation, continuous and stable oxygen production, simple operation and strong adaptability.
[0003] In VPSA oxygen production technology, the adsorption tower is the core part of the equipment, and its performance directly affects the yield and quality of oxygen. The traditional VPSA technology usually uses large adsorption towers as separation equipment, which can realize the separation and purification of oxygen, but the setting of large adsorption towers also increases the complexity and maintenance cost of the whole equipment. At the same time, it also has the disadvantages of large installation difficulty, complex start-stop maintenance, etc.
[0004] In the existing VPSA oxygen production technology, multiple blowers and vacuum pumping equipment are arranged on the air inlet manifold and exhaust pipe, and the existence of multiple equipment leads to complex control, high manufacturing cost, large installation and maintenance workload, and difficulty in realizing standardized and integrated arrangement.
[0005] Therefore, it is of important practical value and broad market prospect to develop a VPSA oxygen production technology with universality, standardization and high reliability. INVENTION CONTENTS
[0006] The technical problem to be solved by the utility model is to overcome the deficiencies in the prior art and provide a micro tower type combined VPSA oxygen enrichment device.
[0007] To solve the technical problem, the solution of the utility model is:
[0008] A micro tower type combined VPSA oxygen enrichment device is provided, which comprises a blowing and vacuum integrated machine, a blowing main pipe, a micro tower skid-mounted device, an exhaust main pipe, an oxygen enrichment main pipe, an oxygen main balance tank, an oxygen compressor and an oxygen storage tank.
[0009] The blast main and the exhaust main are arranged in parallel, and a blast-vacuum integrated machine is arranged between the two main pipes; the blast-vacuum integrated machine comprises a magnetic suspension blower and a magnetic suspension vacuum pump, rotors of the two are connected with an output shaft of a permanent magnet motor through a transmission shaft and a coupling-decoupling mechanism in sequence, and the two perform blast and vacuum operation simultaneously in the coupling state and perform blast or vacuum operation independently in the decoupling state; an air filter and a cold exchanger are arranged on the blast main before and after the magnetic suspension blower respectively, and a silencer is arranged on the exhaust main after the magnetic suspension vacuum pump.
[0010] At least two groups of micro tower skid-mounted devices are arranged in parallel between the blast main and the exhaust main; each micro tower skid-mounted device has the same structural layout, and comprises: at least three micro adsorption towers arranged in parallel and having the same structure, the volume of the micro adsorption tower is between 0.075-0.400 m 3 The bottom of each micro adsorption tower is provided with an air inlet pipe and an exhaust pipe, the air inlet pipe is connected to the blast main through a blast pipeline, and the exhaust pipe is connected to the exhaust main through an exhaust pipeline; the top of each micro adsorption tower is provided with an oxygen outlet pipe and a regeneration pipe, the oxygen outlet pipe is connected to an oxygen partial balance tank through an oxygen outlet pipeline, and the regeneration pipe is connected to the oxygen outlet pipeline through a regeneration pipeline; control valves are arranged on each pipeline in the micro tower skid-mounted device respectively, and an exhaust check valve is arranged at the end of the exhaust pipeline, and a regeneration check valve is arranged at the end of the regeneration pipeline.
[0011] The oxygen partial balance tank in each micro tower skid-mounted device is connected to an oxygen total balance tank, and the oxygen total balance tank is connected to an oxygen compressor and an oxygen storage tank in sequence through an oxygen enrichment main.
[0012] As an improved scheme, the inner diameter specification of the micro adsorption tower is DN250-DN500 (selected according to different modulus standards).
[0013] As an improved scheme, the rotor structure of the magnetic suspension blower and the magnetic suspension vacuum pump is coaxial arrangement or non-coaxial arrangement.
[0014] As an improved scheme, a first regulating valve is arranged at the inlet of the oxygen total balance tank, a second regulating valve is arranged at the inlet of the oxygen compressor; a shunt pipeline is arranged between the oxygen total balance tank and the oxygen compressor, and a third regulating valve is arranged on the shunt pipeline; a fourth regulating valve is arranged on the exhaust main.
[0015] As an improved scheme, each regulating valve is a manual regulating valve, an electric regulating valve or a pneumatic regulating valve; when an electric regulating valve or a pneumatic regulating valve is used, the actuators of each regulating valve are connected to the automatic control equipment through a cable respectively.
[0016] As an improved scheme, the control valves on each pipeline are pneumatic valves or electromagnetic valves, and the actuators of each control valve are connected to the automatic control equipment through a cable respectively.
[0017] As an improved scheme, the magnetic suspension blower and the magnetic suspension vacuum pump each comprise a magnetic suspension bearing, a three-dimensional flow impeller, a frequency converter and a controller, and the controller is connected to the automatic control device through a signal line.
[0018] As an improved scheme, the pressure sensor and the temperature sensor are arranged on each pipeline and are connected to the automatic control device through signal lines.
[0019] As an improved scheme, the automatic control device is a DDC controller or a PLC controller.
[0020] Compared with the prior art, the utility model has the beneficial effects that:
[0021] 1、The utility model discloses a parallel arrangement of blast main pipe and waste gas main pipe, and the vertical setting blast vacuum integrated machine can realize the combination and integrated installation of VPSA oxygen enrichment device.
[0022] 2、The utility model discloses a plurality of micro tower skid-mounted devices, and adopts the parallel arrangement of multiple micro adsorption towers in the micro tower skid-mounted device.
[0023] 3、In the utility model, the blast valve on the blast pipeline in each micro tower skid-mounted device can be adjusted according to the distance from the magnetic suspension blower to ensure that the raw material air can be evenly distributed to each micro tower skid-mounted device. BRIEF DESCRIPTION OF DRAWINGS
[0024] Figure 1 It is the overall structure schematic diagram of the micro tower combined VPSA oxygen enrichment device.
[0025] Figure 2 It is the structure schematic diagram of a single micro tower skid-mounted device.
[0026] Figure 3 It is the schematic diagram of the connection relationship between the automatic control device and other components in the utility model.
[0027] The reference signs are: 101 blast main; 102 exhaust gas main; 103 oxygen-rich main; 104 blast pipeline; 105 exhaust gas pipeline; 106 oxygen outlet pipeline; 107 regeneration pipeline; 108 shunt pipeline; 2 air filter; 3 magnetic suspension blower; 4 cold exchanger; 501-504 first to fourth control valves; 6 micro tower skid device; 601 micro adsorption tower; 602 air inlet valve; 603 air outlet valve; 604 oxygen outlet valve; 605 regeneration valve; 606 air inlet pipeline; 607 exhaust gas check valve; 608 regeneration check valve; 609 oxygen gas balance tank; 7 oxygen gas total balance tank; 8 silencer; 9 magnetic suspension vacuum pump; 10 oxygen gas storage tank; 11 oxygen compressor; 12 transmission shaft; 13 permanent magnet motor; 100 automatic control equipment; 200 sensor; 300 actuator. DETAILED DESCRIPTION
[0028] In the present application, the serial numbers for components, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any sequence or technical meaning. In the present application, "connection" and "coupling" include direct and indirect connection (coupling) unless otherwise specified. In the description of the present application, it should be understood that the orientations or positional relationships indicated by the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. are based on the orientations or positional relationships shown in the drawings, and are only used for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.
[0029] In the present application, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature in relation to the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the "over", "above" and "on" of the first feature in relation to the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "under", "below" and "under" of the first feature in relation to the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.
[0030] The specific embodiments of the present application will be described in detail below with reference to the accompanying drawings.
[0031] 1. Structure and arrangement of the device
[0032] As Figure 1As shown, the micro-tower combined VPSA oxygen enrichment device includes a blast main pipe 101, a exhaust main pipe 102, an oxygen enrichment main pipe 103, an oxygen balance tank 7, an oxygen compressor 11, an oxygen storage tank 10, a micro-tower skid-mounted device 6 and a blast vacuum integrated machine. Among them,
[0033] The blast main pipe 101 and the exhaust main pipe 102 are arranged in parallel, and the blast vacuum integrated machine is vertically arranged between the two pipes, including a magnetic suspension blower 3 arranged on the blast main pipe 101, a permanent magnet motor 13 in the middle and a magnetic suspension vacuum pump 9 arranged on the exhaust main pipe 102. The magnetic suspension blower 3 and the magnetic suspension vacuum pump 9 each include a magnetic suspension bearing, a three-dimensional flow impeller, a frequency converter and a controller, and the controller is connected to the automatic control device 100 through a signal line. The rotor structure of the magnetic suspension blower 3 and the magnetic suspension vacuum pump 9 is connected to the output shaft of the permanent magnet motor 13 through a transmission shaft 12 and a coupling-decoupling mechanism, respectively, and in the coupling state, the blast and vacuum operations are performed simultaneously, and in the decoupling state, the blast or vacuum operation is performed alone. The rotor structure and the motor output shaft can be coaxially arranged or non-coaxially arranged, when coaxially arranged, the output shaft at both ends of the permanent magnet motor 13 is connected to the two rotor structures through the coupling-decoupling mechanism and the transmission shaft 12, and when non-coaxially arranged, the shafts are associated through a gear set to adjust the operating speed. The permanent magnet motor 13 and the output shaft are connected by a key to realize power transmission. The permanent magnet motor 13 converts electrical energy into mechanical rotary power to drive the transmission shaft 12 to rotate, and then drive the rotors and impellers in the magnetic suspension blower 3 and the magnetic suspension vacuum pump 9 to rotate and work. An air filter 2 and a cold exchanger 4 are arranged on the blast main pipe 101 before and after the blast group 3, and a silencer 8 is arranged on the exhaust main pipe 102 after the magnetic suspension vacuum pump 9.
[0034] At least two groups of micro-tower skid-mounted devices 6 are arranged in parallel between the blast main pipe 101 and the exhaust main pipe 102; each micro-tower skid-mounted device 6 has the same structural layout, including: at least three micro-adsorption towers 601 arranged in parallel and having the same structure, the bottom of each tower is provided with an air inlet pipe and an exhaust pipe, the air inlet pipe is connected to the blast main pipe 101 through a blast pipeline 104, and the exhaust pipe is connected to the exhaust main pipe 102 through an exhaust pipeline 105; the top of each micro-adsorption tower 6 is provided with an oxygen outlet pipe and a regeneration pipe, the oxygen outlet pipe is connected to the oxygen balance tank 609 through an oxygen outlet pipeline 106, and the regeneration pipe is connected to the oxygen outlet pipeline 106 through a regeneration pipeline 107; control valves (air inlet valve 602, exhaust valve 603, oxygen outlet valve 604, regeneration valve 605) are arranged on each pipeline in the micro-tower skid-mounted device, respectively, and an exhaust check valve 607 is arranged at the end of the exhaust pipeline 105, and a regeneration check valve 608 is arranged at the end of the regeneration pipeline 107.
[0035] As shown in FIG. 1, the micro-tower combined VPSA oxygen enrichment device includes a blast main pipe 101, a exhaust main pipe 102, an oxygen enrichment main pipe 103, an oxygen balance tank 7, an oxygen compressor 11, an oxygen storage tank 10, a micro-tower skid-mounted device 6 and a blast vacuum integrated machine. Among them, Figure 2As shown, the micro-tower skid-mounted device 6 comprises three micro-adsorption towers 601A, B, and C arranged in parallel, and blast pipe 104, exhaust pipe 105, oxygen outlet pipe 106, and regeneration pipe 107 connected with each micro-adsorption tower 601. The air inlet section of the blast pipe 104 is provided with a blast valve 606, the bottom and top of the micro-adsorption tower 601 are respectively provided with a vent pipe, the bottom vent pipe is simultaneously connected with the air inlet pipe and the exhaust pipe, and is respectively provided with an air inlet valve 602 and an exhaust valve 603; the top end of the top vent pipe is simultaneously connected with the oxygen outlet pipe and the regeneration pipe, and is respectively provided with an oxygen outlet valve 604 and a regeneration valve 605; the air inlet pipe, the exhaust pipe, the oxygen outlet pipe, and the regeneration pipe are arranged symmetrically.
[0036] The oxygen balance tank 609 in each micro-tower skid-mounted device 6 is connected to the oxygen total balance tank 7, which is in turn connected with the oxygen compressor 11 and the oxygen storage tank 10 through the oxygen-rich total pipe 103. The first control valve 501 is arranged at the inlet of the oxygen total balance tank 7, the second control valve 502 is arranged at the inlet of the oxygen compressor 11, and the shunt pipe 108 is arranged between the oxygen total balance tank 7 and the oxygen compressor 11, and the third control valve 503 is arranged on the shunt pipe 108. The fourth control valve 504 is arranged on the exhaust total pipe 102.
[0037] In order to realize switching control during the operation of the oxygen enrichment device, the first to fourth control valves can be manually adjustable valves, electrically adjustable valves, or pneumatically adjustable valves; when electrically adjustable valves or pneumatically adjustable valves are used, the actuators 300 of the control valves are respectively connected to the automatic control equipment 100 through cables. The control valves on each pipe can be pneumatic valves or electromagnetic valves, and the actuators 300 of the control valves are respectively connected to the automatic control equipment 100 through cables. Pressure sensors and temperature sensors are arranged on each pipe, and are respectively connected to the automatic control equipment 100 through signal lines. The controllers in the magnetic suspension blower 3 and the magnetic suspension vacuum pump 9 are respectively connected to the automatic control equipment 100 through signal lines, and can realize the control of the equipment operation according to the preset program or manual control. The coupling-uncoupling mechanism has a controller and is connected to the automatic control equipment 100 through a signal line, and can realize the switching between the coupling state and the uncoupling state according to the preset program or manual control. The automatic control equipment 100 is a DDC or PLC controller, which is used to realize the automatic control of the system operation. Each control valve is used to control or shut off the gas flow, and the cooler 4 can use a mature water-cooled or air-cooled heat exchanger on the market.
[0038] The micro-tower skid-mounted device 6 can be combined by 3n micro-adsorption towers 601, where n can be 1 or 2 or 3, for example, 3 micro-adsorption towers 601 form a skid-mounted device, or 6 micro-adsorption towers 601 form a skid-mounted device. The volume of the micro-adsorption tower 601 is 0.075-0.400 m 3between DN250 and DN500. For example, the micro-tower skid-mounted device 6 composed of three micro-adsorption towers 601 can produce 90% concentration oxygen with an output of about 25 Nm 3 / h, and the start-up pressure stabilization time is 15-20 seconds. Based on this, four groups of micro-tower skid-mounted devices 6 are constructed to form an oxygen production device, which can produce 90% concentration oxygen with an output of about 100 Nm 3 / h.
[0039] 2. Device operation method
[0040] The permanent magnet motor 13 is started to generate rotating power, and the rotating power of the permanent magnet motor 13 is transmitted to the rotors in the magnetic levitation blower 3 and the magnetic levitation vacuum pump 9 through the transmission shaft 12, and the coupling or decoupling action of the coupling-decoupling mechanism realizes the operation of simultaneous or separate blowing and vacuumizing. Through the integrated arrangement and single motor driving mode, not only the efficiency and service life of the equipment are improved, but also the noise and vibration are reduced. After the magnetic levitation blower 3 is operated, external air is sucked into the blast main pipe 101 to increase the air pressure, and the air enters the blast main pipe 101 to perform the dust removal and water removal process through the air filter 2 to ensure the purity of the air and avoid blocking the adsorbent. Then, the air enters the cooler 4 to obtain raw material air with appropriate temperature (35-45°C). In this example, the raw material air is sent into the corresponding micro-tower skid-mounted device 6 through the corresponding blast valve 606 for subsequent vacuum pressure swing adsorption oxygen production. The opening degree of the blast valve 606 can be adjusted according to the distance from the position of the blast main pipe 101 to realize the consistency of the raw material air flow between the micro-tower skid-mounted devices 6 and ensure the balance of the air supply flow. For example, in this embodiment, the opening degree of the blast valve 606 close to the blast inlet is smaller than that of the blast valve 606 far away from the blast inlet.
[0041] In the micro-tower pry device 6, one of the air inlet valves 602 is opened to send the blast into the corresponding micro-adsorption tower 601, at this time its corresponding exhaust valve 603 is closed, the micro-adsorption tower is filled with adsorbent, wherein the moisture, carbon dioxide and a small amount of other gas components are first adsorbed by the adsorbent (such as activated alumina) filled at the bottom of the inlet. Subsequently, nitrogen is adsorbed by zeolite molecular sieve, and oxygen and other non-adsorbed components are discharged as product gas from the top outlet into the oxygen exhaust pipe to produce oxygen-enriched gas with a concentration of about 90%. The oxygen-enriched gas is then sent into the oxygen balance valve 609 through the oxygen outlet valve 604 and the oxygen outlet pipeline 106 for storage and pressure stabilization. Then, the oxygen-enriched gas stored and pressure-stabilized in each micro-tower pry device 6 flows into the oxygen outlet main pipe 103 and then into the oxygen total balance tank 7 for further pressure stabilization. In actual working conditions, when there is no requirement for the pressure of the oxygen-enriched gas, the oxygen-enriched gas with a pressure of ≤20 kPa obtained after pressure stabilization can be used as finished oxygen-enriched gas and directly discharged for use through the third regulating valve 503. When the user has a pressure requirement for the oxygen-enriched gas, the oxygen-enriched gas is pressurized through the second regulating valve 502 and the oxygen pressure machine 11 and then flows into the oxygen storage tank 10 for storage as pressurized oxygen-enriched gas.
[0042] In the tower pry device 6, the three micro-adsorption towers 601A, 601B and 601C are switched and used in parallel, and work in a cyclic and alternating manner according to the order of adsorption, pressure equalization and desorption. For example, when the micro-adsorption tower 601A is desorbing, the micro-adsorption tower 601B is adsorbing, and the micro-adsorption tower 601C is in the pressure equalization or desorption preparation phase. Subsequently, the micro-adsorption tower 601A completes desorption and enters the pressure equalization phase, the micro-adsorption tower 601A may be close to adsorption saturation and prepare for pressure equalization, and the micro-adsorption tower 601A may start adsorption. Through such a cyclic operation mode, the oxygen-enriched device always has oxygen output, achieving the purpose of continuous oxygen production. At the same time, by reasonably adjusting the time, pressure and other parameters of each stage, the oxygen yield and purity can be optimized, and the overall operation efficiency of the device can be improved. Since the three-tower oxygen production operation in the micro-tower pry device 6 is a conventional technical means, it will not be described here.
Claims
1. A micro-tower combined VPSA oxygen enrichment device, characterized in that, The system comprises a blast vacuum integrated machine, a blast main pipe, a micro tower skid-mounted device, a waste gas main pipe, an oxygen-rich main pipe, an oxygen gas total balance tank, an oxygen compressor and an oxygen gas storage tank. The blast main pipe and the waste gas main pipe are arranged in parallel, and the blast vacuum integrated machine is arranged between the two pipes. The blast vacuum integrated machine comprises a magnetic suspension blower and a magnetic suspension vacuum pump. The rotors of the two are connected to the output shaft of the permanent magnet motor through a transmission shaft and a coupling-decoupling mechanism, respectively. In the coupling state, the blower and the vacuum pump operate simultaneously, and in the decoupling state, the blower or the vacuum pump operates independently. An air filter and a cold exchanger are arranged on the blast main pipe before and after the magnetic suspension blower, respectively, and a silencer is arranged on the waste gas main pipe after the magnetic suspension vacuum pump. At least two groups of micro-tower skid-mounted devices are arranged in parallel between the blast main and the exhaust main; each micro-tower skid-mounted device has the same structural layout, which comprises: at least three micro-adsorption towers arranged in parallel and having the same structure, the volume of the micro-adsorption tower being between 0.075 and 0.400 m 3 Each micro-adsorption tower is provided with an air inlet pipe and an exhaust pipe at the bottom, the air inlet pipe is connected to the blast main through an air blast pipeline, and the exhaust pipe is connected to the exhaust main through an exhaust pipeline; the top of each micro-adsorption tower is provided with an oxygen outlet pipe and a regeneration pipe, the oxygen outlet pipe is connected to an oxygen partial balance tank through an oxygen outlet pipeline, and the regeneration pipe is connected to the oxygen outlet pipeline through a regeneration pipeline; control valves are respectively arranged on each pipeline in the micro-tower skid-mounted device, an exhaust check valve is arranged at the end of the exhaust pipeline, and a regeneration check valve is arranged at the end of the regeneration pipeline. The oxygen gas sub-balance tanks of the micro tower skid-mounted devices are connected to the oxygen gas total balance tank, which is connected to the oxygen compressor and the oxygen gas storage tank through the oxygen-rich main pipe.
2. The micro-column combined VPSA oxygen enrichment device according to claim 1, characterized in that, The inner diameter of the micro adsorption tower is DN250-DN500.
3. The micro-column combined VPSA oxygen enrichment device according to claim 1, characterized in that, The rotors of the magnetic suspension blower and the magnetic suspension vacuum pump are coaxially arranged or non-coaxially arranged.
4. The micro-column combined VPSA oxygen enrichment device according to claim 1, characterized in that, A first regulating valve is arranged at the inlet of the oxygen gas total balance tank, a second regulating valve is arranged at the inlet of the oxygen compressor, a third regulating valve is arranged on the shunt pipeline between the oxygen gas total balance tank and the oxygen compressor, and a fourth regulating valve is arranged on the waste gas main pipe.
5. The micro-column combined VPSA oxygen enrichment device according to claim 4, characterized in that, The regulating valves are manual regulating valves, electric regulating valves or pneumatic regulating valves. When electric regulating valves or pneumatic regulating valves are used, the actuators of the regulating valves are connected to the automatic control equipment through cables.
6. The micro-column combined VPSA oxygen enrichment device according to claim 1, characterized in that, The control valves on the pipelines are pneumatic valves or electromagnetic valves, and the actuators of the control valves are connected to the automatic control equipment through cables.
7. The micro-column combined VPSA oxygen enrichment device according to claim 1, characterized in that, The magnetic suspension blower and the magnetic suspension vacuum pump each comprise a magnetic suspension bearing, a three-dimensional flow impeller, a frequency converter and a controller, and the controller is connected to the automatic control equipment through a signal line.
8. The micro-column combined VPSA oxygen enrichment device according to claim 1, characterized in that, Pressure sensors and temperature sensors are arranged on the pipelines, and are connected to the automatic control equipment through signal lines.
9. The micro-column combined VPSA oxygen enrichment apparatus according to any one of claims 5 to 8, characterized in that, The automatic control equipment is a DDC controller or a PLC controller.