Spraying equipment for silicon wafer processing

Abstract

The utility model discloses spraying equipment for silicon wafer processing, which comprises an equipment base, the equipment base is provided with a first water pipe, one end of the first water pipe is provided with a second water pipe through an adapter elbow, and one end of the second water pipe far away from the adapter elbow is connected with a third water pipe through a corrugated pipe. A nozzle is installed at the end, away from the second water pipe, of the third water pipe, a reinforcing mechanism used for preventing bending is installed on the outer wall of the second water pipe and the outer wall of the third water pipe, the reinforcing mechanism comprises a first fixing base and a second fixing base, and the first fixing base and the second fixing base are fixedly arranged on the outer ring of the second water pipe and the outer ring of the third water pipe respectively in a sleeving mode. The corrugated pipe can play a buffering role when the second water pipe or the third water pipe is disassembled and assembled, the corrugated pipe is not prone to wrinkling and breaking in the disassembling and assembling process, the service life is prolonged, the corrugated pipe is convenient to disassemble, assemble and replace, meanwhile, constant water flow pressure can be provided, and continuous flow can be achieved for a long time.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of silicon wafer processing spray technology, especially be used for the spray equipment of silicon wafer processing. BACKGROUND

[0002] In the production of semiconductor devices, silicon wafers must be cleaned strictly. Micro-pollution can also cause device failure. The purpose of cleaning is to remove surface contamination and impurities, including organic and inorganic substances. Some of these impurities exist in the form of atoms or ions, and some exist in the form of thin films or particles on the surface of the silicon wafer. Organic contamination includes photoresist, organic solvent residues, synthetic wax and oil or fiber brought by human contact with devices, tools and utensils. Inorganic contamination includes heavy metals such as gold, copper, iron and chromium, which seriously affect the minority carrier lifetime and surface conductance.

[0003] The spray pipe currently used is directly connected to one side of the equipment and the outside of the equipment, and directly connected to the nozzle on the other side, without any buffering design in the middle. Frequent disassembly and assembly of the spray pipe can cause damage to the surface of the pipe, and can easily wrinkle and break the pipe, greatly reducing the service life. UTILITY MODEL CONTENT

[0004] In view of the problems in the prior art, the utility model provides the following technical scheme:

[0005] The spray equipment for silicon wafer processing comprises a device base, a first water pipe is installed on the device base, a second water pipe is installed on one end of the first water pipe through an adapter elbow, a third water pipe is connected to the end of the second water pipe away from the adapter elbow through a corrugated pipe, a nozzle is installed on the end of the third water pipe away from the second water pipe, and a reinforcing mechanism for preventing bending is installed on the outer walls of the second water pipe and the third water pipe.

[0006] As a preferred embodiment of the above technical scheme, the reinforcing mechanism comprises first and second fixed seats, the first and second fixed seats are respectively fixedly sleeved on the outer rings of the second and third water pipes, and a reinforcing rib is installed between the first and second fixed seats.

[0007] As a preferred embodiment of the above technical scheme, the first fixed seat is provided with a plurality of through holes one, the second fixed seat is provided with a plurality of through holes two, and one reinforcing rib passes through one through hole one and one through hole two.

[0008] As a preferred embodiment of the above technical scheme, the outer ring of the reinforcing rib is provided with threads, and the threads are threadedly connected with first, second and third nuts, one end of the reinforcing rib is fixedly connected with an anti-falling baffle, the anti-falling baffle and the first nut are respectively located on the two sides of the first fixed seat, the diameter of the anti-falling baffle is greater than the distance between the through holes one, and the second and third nuts are respectively located on the two sides of the second fixed seat.

[0009] The utility model discloses beneficial effect is:

[0010] 1, the utility model discloses a corrugated pipe's setting is when the second water pipe or third water pipe is dismantled, can play the role of buffering, is not easy to wrinkle and break the pipe when disassembling, improves the life, makes its dismounting and replacement convenient, can provide constant water flow pressure simultaneously, long time unceasing flow. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 The structure diagram of the spraying equipment for silicon wafer processing in the embodiment is shown.

[0012] Figure 2 The structure diagram of the reinforcing mechanism in the embodiment is shown.

[0013] BRIEF DESCRIPTION OF DRAWINGS

[0014] 1, equipment base, 2, first water pipe, 3, adapter elbow, 4, second water pipe, 5, corrugated pipe, 6, third water pipe, 7, nozzle, 8, first fixed seat, 9, second fixed seat, 10, reinforcing rib, 11, anti-drop baffle, 12, first nut, 13, second nut, 14, third nut. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical scheme and advantage of the utility model embodiment more clear, the utility model technical scheme will be described clearly and completely below in conjunction with the embodiment.

[0016] Embodiment 1

[0017] As shown in Figure 1 And Figure 2 The spraying equipment for silicon wafer processing includes equipment base 1, and the equipment base 1 is installed with first water pipe 2, and one end of the first water pipe 2 is installed with second water pipe 4 through adapter elbow 3, and the second water pipe 4 is connected with third water pipe 6 through corrugated pipe 5 away from the adapter elbow 3, and the third water pipe 6 is installed with nozzle 7 away from the second water pipe 4, and the outer wall of the second water pipe 4 and the third water pipe 6 is installed with reinforcing mechanism for preventing bending.

[0018] It should be noted that the equipment base 1 is casted by cast iron, which is high in strength and not easy to be corroded, the adapter elbow 3 is made of polyurethane material and is used to change the direction of water flow, the nozzle 7 is made of stainless steel plate and has PVC pipe inside to provide small hole flow distribution, the first water pipe 2, the second water pipe 4, the corrugated pipe 5 and the third water pipe 6 are all used for water supply, the first water pipe 2 passes through the equipment base 1 and the adapter elbow 3 to be connected, then the direction of water flow is changed, and the second water pipe 4, the corrugated pipe 5 and the third water pipe 6 are connected to the nozzle 7, the adapter elbow 3 and the second water pipe 4 are manually connected, to ensure firm connection, then the corrugated pipe 5 and the third water pipe 6 are connected to the nozzle 7, to ensure firm connection, and no water leakage is found after testing after completion of connection.

[0019] By increasing a set of special material first water pipe 2, with corrosion resistance, can change the direction of water flow and ensure water pressure before and after the same, through field verification, the second water pipe 4, corrugated pipe 5, third water pipe 6 is not easy to bend broken flow, can prolong the service life.

[0020] Specifically, through the setting of corrugated pipe 5 when disassembling the second water pipe 4 or the third water pipe 6, it can play a buffering role, so that it is not easy to wrinkle and break the pipe when disassembling, and the service life is improved.

[0021] As shown in Figure 2 The reinforcing mechanism includes a first fixed seat 8 and a second fixed seat 9, and the first fixed seat 8 and the second fixed seat 9 are fixedly sleeved on the outer rings of the second water pipe 4 and the third water pipe 6, respectively, and the first fixed seat 8 and the second fixed seat 9 are provided with a reinforcing rib 10.

[0022] Specifically, the second water pipe 4 and the third water pipe 6 pass through the reinforcing rib 10 between the first fixed seat 8 and the second fixed seat 9, so that the corrugated pipe 5 will not be bent, and the nozzle 7 can smoothly spray water.

[0023] Example 2

[0024] As shown in Figure 1 and Figure 2 The spray equipment for silicon wafer processing, compared with example 1, the first fixed seat 8 of the embodiment is provided with a plurality of through holes one, and the second fixed seat 9 is provided with a plurality of through holes two, and one reinforcing rib 10 passes through one through hole one and through hole two.

[0025] It should be noted that the through hole one is arranged in a circular array with the center of the first fixed seat 8 as the base point, and the through hole two is arranged in a circular array with the center of the second fixed seat 9 as the base point, and the plurality of reinforcing ribs 10 provide stable support points for the corrugated pipe 5, so that the second water pipe 4, the corrugated pipe 5 and the third water pipe 6 can remain vertical after installation.

[0026] As shown in Figure 2 The outer ring of the reinforcing rib 10 is provided with threads, and the first nut 12, the second nut 13 and the third nut 14 are threadedly connected, and one end of the reinforcing rib 10 is fixedly connected with the anti-drop baffle 11, and the anti-drop baffle 11 and the first nut 12 are located on both sides of the first fixed seat 8, respectively, and the diameter of the anti-drop baffle 11 is greater than that of the through hole one, and the second nut 13 and the third nut 14 are located on both sides of the second fixed seat 9, respectively.

[0027] Specifically, the diameter of the anti-falling baffle 11 is larger than the through hole, so that the reinforcing rib 10 cannot pass through the first fixing seat 8 completely, and through cooperation with the first nut 12, the reinforcing rib 10 is firmly fixed on the first fixing seat 8, and at the same time, the reinforcing rib 10 is firmly fixed on the second fixing seat 9 through the second nut 13 and the third nut 14, which can provide support for the corrugated pipe 5.

[0028] The above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them.

Claims

1. A shower apparatus for processing of silicon wafers, comprising an apparatus base (1), characterized in that: The device base (1) is provided with a first water pipe (2), one end of the first water pipe (2) is provided with a second water pipe (4) through an adapter elbow (3), one end of the second water pipe (4) away from the adapter elbow (3) is connected with a third water pipe (6) through a bellows (5), one end of the third water pipe (6) away from the second water pipe (4) is provided with a nozzle (7), and the outer wall of the second water pipe (4) and the third water pipe (6) is provided with a reinforcing mechanism for preventing bending.

2. The shower device for processing a silicon wafer according to claim 1, wherein The reinforcing mechanism comprises a first fixed seat (8) and a second fixed seat (9), the first fixed seat (8) and the second fixed seat (9) are respectively fixedly sleeved on the outer rings of the second water pipe (4) and the third water pipe (6), and a reinforcing rib (10) is arranged between the first fixed seat (8) and the second fixed seat (9).

3. The shower for silicon wafer processing according to claim 2, wherein The first fixed seat (8) is provided with a plurality of through holes one, the second fixed seat (9) is provided with a plurality of through holes two, and one reinforcing rib (10) passes through one through hole one and one through hole two.

4. The shower for silicon wafer processing according to claim 2, wherein The outer ring of the reinforcing rib (10) is provided with threads, and the reinforcing rib (10) is threadedly connected with a first nut (12), a second nut (13) and a third nut (14), one end of the reinforcing rib (10) is fixedly connected with an anti-drop baffle (11), the anti-drop baffle (11) and the first nut (12) are located on the two sides of the first fixed seat (8), respectively, and the diameter of the anti-drop baffle (11) is greater than that of the through hole one, and the second nut (13) and the third nut (14) are located on the two sides of the second fixed seat (9), respectively.

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