Film thickness monitoring piece switching mechanism

Abstract

The utility model discloses a film thickness monitoring piece switching mechanism which comprises a rotatable workpiece disc, a rotatable monitoring piece rotating disc installed on the workpiece disc and a rotatable shifting piece arranged beside the monitoring piece rotating disc, and a through hole corresponding to a monitoring piece is formed beside the monitoring piece rotating disc. A plurality of guide parts of which the lengths are increased in sequence are arranged on the monitoring piece turntable; the shifting piece comprises a plurality of shifting rods of which the lengths are increased in sequence; when the monitoring piece exposed out of the through hole is replaced, any poke rod is rotated to enable the guide part corresponding to the poke rod to rotate, and the monitoring piece exposed out of the through hole is adjusted. The guide parts and the poke rods which are matched with each other are arranged to be different in length, so that the corresponding poke rods can only drive the guide parts with the corresponding lengths to move, and the monitoring pieces below the different guide parts can be selectively replaced according to the use conditions of the monitoring pieces exposed out of the through holes.

Description

TECHNICAL FIELD

[0001] The utility model relates to optical film coating equipment field technology especially is a kind of film thickness monitoring piece switching mechanism. BACKGROUND

[0002] Generally, directly monitoring optical method uses a piece of optical glass monitoring piece to carry out film layer thickness monitoring, so that the control process of band-pass filter and simple cut-off filter can be satisfied;But in the complex cut-off filter monitoring process, after monitoring piece completes multilayer film monitoring, monitoring precision is reduced due to error accumulation, if coating work is stopped at this time, not only coating efficiency is affected, but also coating failure can be caused.

[0003] Therefore, Chinese utility model patent CN 219218145 U, a film thickness monitoring piece switching mechanism, after the part exposed from the pair of through holes of monitoring piece is used again, coating work does not need to be stopped, only the rotation speed of hoisting arm is slightly reduced, then the rotation shaft in the dialing piece is started, the extension end of the dialing rod is swung to the inside between the two hoisting arms, finally monitoring piece is rotated by 90 degrees, part of used monitoring piece is hidden in tray, and the surface newly exposed by monitoring piece is clean surface, so that coating work can be continuously carried out without stopping.

[0004] But this way, monitoring piece rotation direction is sequentially carried out, cannot be arbitrarily adjusted according to actual demand, so that user needs to replace just replaced monitoring piece, and the monitoring piece needs to be adjusted multiple times to be aligned with the through hole. UTILITY MODEL CONTENTS

[0005] Therefore, the utility model provides a film thickness monitoring piece switching mechanism, which solves the problem that monitoring piece rotation direction is sequentially carried out, cannot be arbitrarily adjusted according to actual demand, so that user needs to replace just replaced monitoring piece, and the monitoring piece needs to be adjusted multiple times to be aligned with the through hole.

[0006] To achieve the above object, the utility model adopts the following technical scheme: a film thickness monitoring piece switching mechanism, including rotatable workpiece disc, monitoring piece turntable rotatable installed on workpiece disc and dialing piece rotatable arranged at the side of monitoring piece turntable, a pair of through holes corresponding to monitoring piece are arranged at the side of monitoring piece turntable, a plurality of guide portions with length increasing sequentially are arranged on monitoring piece turntable, and the dialing piece includes a plurality of dialing rods with length increasing sequentially;When replacing monitoring piece exposed in the through hole, any dialing rod is rotated to make the corresponding guide portion rotate, and the monitoring piece exposed in the through hole is adjusted.

[0007] Further, the guide portion includes index bar arranged at four edges of monitoring piece turntable, and a stand column arranged on the index bar.

[0008] Further, the column is arranged at the circumference of the index bar.

[0009] Further, the side edge of the workpiece disc is beveled, and the monitoring piece rotating disc is arranged at the side edge of the workpiece disc and is matched with the side edge of the workpiece disc.

[0010] Further, the driving member further comprises a connecting rod arranged beside the workpiece disc, and the driving rods are connected to the connecting rod at equal intervals, and the plurality of driving rods are matched with the plurality of columns of different lengths.

[0011] Further, the monitoring piece rotating disc comprises a first disc body arranged on the workpiece disc, and a second disc body rotatable relative to the first disc body, and the monitoring piece is arranged on one side of the second disc body relative to the first disc body, and the through hole is arranged on the first disc body.

[0012] Further, the driving member further comprises a rotating drum rotatable on the side of the first disc body away from the second disc body, and the guide part is arranged on the side wall of the rotating drum, and the rotating drum is connected to the second disc body.

[0013] Further, the monitoring piece rotating disc further comprises a machine body accommodating the workpiece disc and the driving member, and the inner cavity of the machine body is provided with a mounting plate arranged beside the workpiece disc, and the driving member is arranged on the mounting plate.

[0014] Further, the driving member further comprises a motor arranged on the mounting plate, and the connecting rod is connected to the motor.

[0015] Further, the plurality of driving rods are arranged around the connecting rod in sequence.

[0016] Compared with the prior art, the utility model has obvious advantages and beneficial effects, specifically, according to the above technical scheme, the guide part and the driving rod matched with each other are arranged to be of different lengths, the corresponding driving rod can only drive the guide part of corresponding length to move, and the monitoring piece under the different guide parts can be selectively replaced according to the use condition of the monitoring piece exposed in the through hole.

[0017] In order to more clearly illustrate the structural features and effects of the utility model, the utility model will be described in detail below in combination with the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the perspective view of embodiment 1 of the utility model.

[0019] Figure 2 It is the perspective view of the monitoring piece rotating disc of embodiment 1 of the utility model. Figure 1 It is the enlarged view of A of the utility model.

[0020] Figure 3 It is the perspective view of the monitoring piece rotating disc of embodiment 1 of the utility model.

[0021] Brief Description of the Drawings

[0022] 10 workpiece disc, 1 through hole;

[0023] 20 monitoring piece rotating disc, 21 guide portion, 211 indexing strip, 212 post, 22 first disc body, 23 second disc body;

[0024] 30 actuating member, 31 actuating rod, 32 connecting rod, 33 rotating drum, 34 motor;

[0025] 40 machine body, 41 mounting plate. DETAILED DESCRIPTION

[0026] Please refer to Figures 1-3 the specific structure of the preferred first embodiment of the present application is shown, which is a monitoring piece switching mechanism, comprising a rotatable workpiece disc 10, a rotatable monitoring piece rotating disc 20 mounted on the workpiece disc 10, and a rotatable actuating member 30 provided beside the monitoring piece rotating disc 20, a through hole 1 corresponding to the monitoring piece is provided beside the monitoring piece rotating disc 20, a plurality of guide portions 21 with increasing lengths are provided on the monitoring piece rotating disc 20, and the actuating member 30 comprises a plurality of actuating rods 31 with increasing lengths; when replacing the monitoring piece exposed in the through hole 1, rotating any actuating rod 31 makes the corresponding guide portion 21 rotate, and the exposed monitoring piece in the through hole 1 is adjusted. Compared with the existing monitoring piece switching mechanism, four posts are sequentially actuated by one actuating rod, the indexing strip connected with the post drives the indexing block to rotate, and the monitoring piece is replaced. However, the indexing block can only rotate by 90° when the actuating rod contacts the post each time, and the monitoring piece is sequentially replaced. The monitoring piece switching mechanism. By setting the guide portions 21 and the actuating rods 31 that cooperate with each other to have different lengths, the corresponding actuating rods 31 can only drive the corresponding guide portions 21 with different lengths to move, so as to selectively replace the monitoring piece below the different guide portions 21 according to the use condition of the monitoring piece exposed in the through hole 1.

[0027] Specifically, the monitoring piece rotating disc 20 mounted on the workpiece disc 10 can be one or multiple, when the monitoring piece rotating disc 20 is multiple, the multiple monitoring piece rotating discs 20 are arranged at equal intervals, and the guide portions 21 on the monitoring piece rotating disc 20 correspond to the actuating member 30. The number of guide portions 21 and the corresponding actuating rods 31 is consistent, and the lengths of the opposite guide portions 21 and the actuating rods 31 are matched, so that the actuating rods 31 that are not matched will not drive the guide portions 21 that are not matched to move, so that the staff can adjust according to the situation that the error accumulation leads to the decrease of monitoring accuracy after the multi-layer film of different monitoring pieces is monitored, so as to increase the service life of different monitoring pieces.

[0028] As Figure 2As shown, the guide part 21 includes index bars 211 arranged on the four edges of the monitoring disc 20, and a post 212 arranged on the index bar 211. By extending the index bars 211 on the four edges of the monitoring disc 20 to different lengths, an inappropriately long lever 31 cannot contact the post 212 on another index bar 211.

[0029] Specifically, the four index bars 211 arranged on the four edges of the monitoring disc 20 are four, and the four posts 212 on the four index bars 211 are also four. Because the lengths of different levers 31 are different, the lengths of the posts 212 that are suitable for the levers 31 are also different. According to the use of different monitoring sheets, a lever 31 is used to drive a post 212 with a length suitable for the lever 31, so that the monitoring sheet corresponding to the post 212 is moved to the transparent hole 1.

[0030] It should be noted that the number of monitoring sheets corresponds to the number of posts 212, and the position of the monitoring sheets corresponds to the position of the posts 212.

[0031] As shown in Figure 2 As shown, the post 212 is arranged on the side of the index bar 211. In order to facilitate the lever 31 to drive the index bar 211, the post 212 is arranged on the end of the index bar 211 away from the monitoring disc 20. The length of the post 212 is suitable for the length of the lever 31, and the post 212 is fixed on the surface of the index bar 211 to facilitate the lever 31 to drive the post 212, so that the index bar 211 drives the monitoring disc 20 to rotate, and a new monitoring sheet is replaced.

[0032] As shown in Figure 2 As shown, the side edge of the workpiece disc 10 is inclined, and the monitoring disc 20 is arranged on the side edge of the workpiece disc 10 and is suitable for the side edge of the workpiece disc 10. In order to enable different levers 31 to drive different posts 212, the side edge of the workpiece disc 10 is arranged as an inclined surface or an arc surface, so that the workpiece disc 10 arranged on the monitoring disc 20 is inclined, and the index bar 211 and the post 212 on the monitoring disc 20 are better contacted with the lever 31.

[0033] As shown in Figure 2 As shown, the driving part 30 further includes a connecting rod 32 arranged beside the workpiece disc 10, and the lever 31 includes a plurality of levers 31 connected to the connecting rod 32 at equal intervals. The plurality of levers 31 can be connected to a plurality of posts 212 with suitable lengths, respectively. The lever 31 is fixed on the connecting rod 32, the connecting rod 32 is arranged beside the workpiece disc 10, the lever 31 extends above the workpiece disc 10, and the lever 31 is connected to the post 212 on the monitoring disc 20 above the workpiece disc 10.

[0034] As shown in Figure 3As shown, the monitoring sheet rotating disc 20 includes a first disc body 22 mounted on the workpiece disc 10, and a second disc body 23 rotatable relative to the first disc body 22, the monitoring sheet is arranged on one side of the second disc body 23 opposite the first disc body 22, and the through hole 1 is arranged on the first disc body 22. The first disc body 22 is mounted on the workpiece disc 10 through a hinge, and the first disc body 22 is provided with a cavity at the lower end, and the monitoring sheet arranged on the side of the second disc body 23 opposite the first disc body 22 is located in the cavity arranged on the first disc body 22.

[0035] Specifically, the actuating member 30 further includes a rotating barrel 33 rotatable on the side of the first disc body 22 away from the second disc body 23, the guide portion 21 is arranged on the side wall of the rotating barrel 33, and the rotating barrel 33 is connected with the second disc body 23. The through hole 1 is arranged on the first disc body 22, and the contact between the actuating rod 31 and the stand 212 drives the rotating barrel 33 to rotate, and the connection between the rotating barrel 33 and the second disc body 23 drives the second disc body 23 to rotate, so as to change the monitoring sheet exposed at the through hole 1.

[0036] As shown in the drawings, Figure 1 As shown, the film thickness monitoring sheet switching mechanism further includes a machine body 40 accommodating the workpiece disc 10 and the actuating member 30, the inner cavity of the machine body 40 is provided with a mounting plate 41 located beside the workpiece disc 10, and the actuating member 30 is mounted on the mounting plate 41. The inner cavity of the machine body 40 is further provided with a driving cylinder at the top, the output end of the driving cylinder is fixed with the workpiece disc 10, the workpiece disc 10 is driven to rotate by the operation of the driving cylinder, the monitoring sheet rotating disc 20 on the workpiece disc 10 is in contact with the actuating rod 31, and finally the new monitoring sheet is replaced.

[0037] As shown in the drawings, Figure 1 As shown, the actuating member 30 further includes a motor 34 mounted on the mounting plate 41, and the connecting rod 32 is connected with the motor 34. The motor 34 can drive the actuating rod 31 on the connecting rod 32 to rotate, so as to better drive different stand 212 with different actuating rod 31.

[0038] In addition, a plurality of actuating rods 31 are sequentially arranged around the connecting rod 32. In order to enable an actuating rod 31 to be aligned with a corresponding stand 212, when the indexing strip 211 provided with the stand 212 is four, the actuating rod 31 is also provided with four, and the four actuating rods 31 are divided into four positions fixed on the connecting rod 32. With the driving of the motor 34, an actuating rod 31 is in contact with a corresponding stand 212, the rotating barrel 33 is driven to rotate, and the monitoring sheet below the stand 212 is moved to below the through hole 1.

[0039] The above is only a preferred embodiment of the present application, and does not limit the technical scope of the present application, so any slight modification, equivalent change and modification made according to the technical essence of the present application are still within the scope of the technical scheme of the present application.

Claims

1. A thin film thickness monitoring sheet switching mechanism, comprising a rotatable workpiece disk (10), a rotatable monitoring sheet turntable (20) mounted on the workpiece disk (10), and a rotatable actuating element (30) disposed beside the monitoring sheet turntable (20), characterized in that: The monitoring piece turntable (20) is provided with a corresponding monitoring piece through hole (1) on the side, the monitoring piece turntable (20) is provided with a plurality of length increasing guide parts (21), the poking member (30) comprises a plurality of length increasing poking rods (31); when the monitoring piece exposed in the through hole (1) is replaced, any poking rod (31) is rotated to make the corresponding guide part (21) rotate, and the exposed monitoring piece in the through hole (1) is adjusted.

2. A film thickness monitor sheet switching mechanism according to claim 1, characterized by: The guide part (21) comprises a scale bar (211) arranged on the four edges of the monitoring piece turntable (20), and a stand (212) arranged on the scale bar (211).

3. A film thickness monitor sheet switching mechanism according to claim 2, characterized in that: The stand (212) is arranged on the circumferential side of the scale bar (211).

4. A film thickness monitor sheet switching mechanism according to claim 2, characterized by: The side edge of the workpiece disc (10) is a slope, and the monitoring piece turntable (20) is arranged on the side edge of the workpiece disc (10) and is matched with the side edge of the workpiece disc (10).

5. A film thickness monitor sheet switching mechanism according to claim 4, characterized in that: The poking member (30) further comprises a connecting rod (32) located beside the workpiece disc (10), the poking rod (31) comprises a plurality of rods connected to the connecting rod (32) at equal intervals, and the plurality of poking rods (31) can be respectively connected to the plurality of stands (212) with matched lengths.

6. A film thickness monitor sheet switching mechanism according to claim 1, characterized by: The monitoring piece turntable (20) comprises a first disc body (22) mounted on the workpiece disc (10), and a second disc body (23) rotatable relative to the first disc body (22), the monitoring piece is arranged on one side of the second disc body (23) relative to the first disc body (22), and the through hole (1) is arranged on the first disc body (22).

7. A film thickness monitor sheet switching mechanism according to claim 6, characterized in that: The poking member (30) further comprises a rotating drum (33) rotatable on the side of the first disc body (22) away from the second disc body (23), the guide part (21) is arranged on the side wall of the rotating drum (33), and the rotating drum (33) is connected with the second disc body (23).

8. A film thickness monitor sheet switching mechanism according to claim 5, wherein: The thin film thickness monitoring piece switching mechanism further comprises a machine body (40) accommodating the workpiece disc (10) and the poking member (30), the machine body (40) is provided with a mounting plate (41) located beside the workpiece disc (10), and the poking member (30) is mounted on the mounting plate (41).

9. A film thickness monitor sheet switching mechanism according to claim 8, characterized in that: The poking member (30) further comprises a motor (34) mounted on the mounting plate (41), and the connecting rod (32) is connected with the motor (34).

10. A film thickness monitor sheet switching mechanism according to claim 5, characterized by: The plurality of poking rods (31) are distributed around the connecting rod (32).

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