Air exhaust flow uniformizing assembly and process equipment

Abstract

The utility model relates to the technical field of semiconductors or photovoltaics, in particular to an air exhaust flow uniformizing assembly and process equipment, and aims to solve the problem that the process effect of a substrate close to an air exhaust end is poor due to airflow turbulence in an area close to the air exhaust end in the process equipment. The air extracting and flow uniformizing assembly comprises a main body piece and at least two first flow uniformizing pieces, each first flow uniformizing piece is provided with a plurality of first flow uniformizing holes, and when flowing to the air extracting and flow uniformizing assembly, air in the process cavity is divided by the first flow uniformizing holes, so that the air is evenly sucked into the air extracting and flow uniformizing cavity when approaching the air extracting and flow uniformizing assembly, and air extracting and flow uniformizing are achieved; and the uniformity of the air flow close to or in contact with the air exhaust and flow uniformizing assembly is improved, so that the process effect of the substrate close to the air exhaust and flow uniformizing assembly is improved. In addition, the main body piece is further provided with at least one containing groove allowing the end of the carrier plate to stretch into, airflow in the space, close to the first flow uniformizing piece, of the two sides of the carrier plate is more uniform, and the air exhaust flow uniformizing assembly is further suitable for the application scene that substrates are borne on the two sides of the carrier plate.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor or photovoltaic technology, and in particular to an exhaust flow uniformization assembly and a process equipment. BACKGROUND

[0002] In the semiconductor or photovoltaic industry, many process equipments often involve the problem of airflow distribution when processing substrates, such as vapor deposition process or annealing process. The performance and process efficiency of these equipments depend largely on the uniformity of airflow distribution inside. Uniform airflow distribution can ensure the stability and consistency of product quality, thereby meeting the stringent requirements of the semiconductor or photovoltaic industry for high-precision and high-quality products.

[0003] However, the existing process equipment only uniformizes the airflow at the gas inlet end, while the exhaust end is directly connected to the pump port of the vacuum pump for exhaust, resulting in airflow turbulence in the area close to the exhaust end, thereby causing product quality problems such as uneven coating of the substrate close to the exhaust end and poor annealing effect. SUMMARY

[0004] Therefore, the embodiments of the present application provide an exhaust flow uniformization assembly and a process equipment to solve the problem of airflow turbulence in the area close to the exhaust end of the process equipment, thereby causing poor process effect of the substrate close to the exhaust end.

[0005] In a first aspect, an embodiment of the present application provides an exhaust flow uniformization assembly applied to a process equipment, the process equipment comprising a process cavity, the process cavity having a process chamber, the process chamber being capable of accommodating at least one carrier plate, a first side of the carrier plate and a second side of the carrier plate being oppositely arranged, the first side of the carrier plate and the second side of the carrier plate respectively having a first carrying area and a second carrying area for carrying a substrate, wherein the exhaust flow uniformization assembly is capable of being arranged in the process chamber, the exhaust flow uniformization assembly comprising: a main body having a connecting port configured to communicate with an exhaust device; at least two first flow uniformization members arranged on a side of the main body facing the first carrying area and a side of the main body facing the second carrying area; wherein the main body and the at least two first flow uniformization members form an exhaust flow uniformization chamber, the first flow uniformization member has a plurality of first flow uniformization holes, and the connecting port and the first flow uniformization holes are in communication with the exhaust flow uniformization chamber; the main body further has at least one accommodating groove arranged in a first direction, the accommodating groove being arranged between two adjacent first flow uniformization members and being configured to allow an end of the carrier plate to extend into; and a position of the at least one first flow uniformization member relative to the main body in a second direction is adjustable to adjust a size of the accommodating groove in the second direction, the second direction intersecting the first direction.

[0006] In combination with the first aspect, in some implementations of the first aspect, the accommodating groove extends through the main body in the first direction, and the carrier plate is capable of moving in the first direction to pass through the accommodating groove.

[0007] With reference to the first aspect, in some implementations of the first aspect, the accommodation groove has an inlet and an outlet at both ends in the second direction, and the gas extraction and flow uniformization assembly further comprises: at least one adjusting member disposed on the main body member and adjustable in position along the second direction relative to the main body member to adjust the size of the inlet and outlet along the second direction.

[0008] With reference to the first aspect, in some implementations of the first aspect, the adjusting member has at least one first waist-shaped hole extending along the second direction, the main body member has at least one first connecting hole, and the gas extraction and flow uniformization assembly further comprises: at least one first baffle located on a side of the adjusting member away from the main body member, the first baffle having a second connecting hole, the first baffle covering the first waist-shaped hole in orthographic projection on the adjusting member, and at least one first screwing member sequentially passing through the second connecting hole, the first waist-shaped hole and the first connecting hole to connect the first baffle and the adjusting member with the main body member.

[0009] With reference to the first aspect, in some implementations of the first aspect, the gas extraction and flow uniformization assembly further comprises: at least one second flow uniformization member disposed in the gas extraction and flow uniformization chamber and spaced apart from the first flow uniformization member along a third direction perpendicular to the first direction and the second direction, and having a plurality of second flow uniformization holes; and the connecting port is located on a side of the second flow uniformization member away from the first flow uniformization member and is spaced apart from the second flow uniformization member.

[0010] With reference to the first aspect, in some implementations of the first aspect, in a direction of the first flow uniformization member towards the connecting port, the size of the main body member in the first direction gradually decreases.

[0011] With reference to the first aspect, in some implementations of the first aspect, the position of the second flow uniformization member along the third direction relative to the main body member is adjustable.

[0012] With reference to the first aspect, in some implementations of the first aspect, the gas extraction and flow uniformization assembly further comprises: a connecting assembly extending along the first direction, one side of the connecting assembly being sealingly connected with the main body member along the second direction, the other side of the connecting assembly being sealingly connected with the second flow uniformization member, and the side of the second flow uniformization member away from the connecting assembly being sealingly connected with the main body member.

[0013] With reference to the first aspect, in some implementations of the first aspect, the first flow uniformization member has an open area near a side of the accommodation groove, and the plurality of first flow uniformization holes are located in the open area, and the gas extraction and flow uniformization assembly further comprises: at least one flow converging member disposed on the first flow uniformization member and located in the open area away from at least a part of the edge area of the accommodation groove and configured to converge the gas between the flow converging member and the carrier plate.

[0014] In some implementations of the first aspect, the carrier is vertically arranged in a process device, and the process device further comprises a plurality of support shafts for supporting end portions of the carrier; the main body is rotatably connected with the support shafts, and the main body further comprises a plurality of third connection holes arranged along the first direction; and the gas extraction and flow uniformization assembly further comprises at least one connecting ring arranged on the main body, the support shafts are arranged in the inner ring of the connecting ring, and the connecting ring is sealingly connected with the main body and the support shafts to seal the third connection holes.

[0015] In the second aspect, an embodiment of the present application provides a process device, comprising: a process cavity having a process chamber capable of accommodating at least one carrier; the gas extraction and flow uniformization assembly according to any one of the first aspect, arranged in the process chamber, and the end portion of the carrier extends into the accommodating groove of the gas extraction and flow uniformization assembly; and a gas extraction device in communication with the connecting port of the gas extraction and flow uniformization assembly for providing suction force.

[0016] The gas extraction and flow uniformization assembly provided by the embodiment comprises a main body and at least two first flow uniformization members, the first flow uniformization member has a plurality of first flow uniformization holes, and the gas in the process chamber is divided into a plurality of flows by the plurality of first flow uniformization holes when flowing to the gas extraction and flow uniformization assembly, so that the gas is uniformly sucked into the gas extraction and flow uniformization chamber when being close to the gas extraction and flow uniformization assembly, the uniformity of the gas flow close to or contacting the gas extraction and flow uniformization assembly is improved, and thus the process effect of the substrate close to the gas extraction and flow uniformization assembly is improved. In addition, the main body further has at least one accommodating groove arranged between two adjacent first flow uniformization members for the end portion of the carrier to extend into, so that the gas flow in the space close to the first flow uniformization member on both sides of the carrier is more uniform, thereby improving the process effect of the substrate close to the gas extraction and flow uniformization assembly on both sides of the carrier, and the gas extraction and flow uniformization assembly is also applicable to the application scenario that both sides of the carrier can carry at least one substrate, which is helpful for high-capacity and high-quality production.

[0017] In addition, the position of the first flow uniformization member relative to the main body along the second direction is adjustable, so as to adjust the size of the accommodating groove along the second direction, so that the gap between the carrier and the first flow uniformization member and the accommodating groove is as small as possible, and the gas extraction efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description of embodiments of the present application taken in conjunction with the accompanying drawings. The accompanying drawings are intended to provide a further understanding of embodiments of the present application and are incorporated in and constitute a part of the specification, illustrate embodiments of the present application and serve to explain the present application, but do not constitute a limitation of the present application. In the drawings, the same reference numerals represent the same components or steps.

[0019] Figure 1 Fig. 1 shows a front view of a gas extraction and flow uniformization assembly provided by an embodiment of the present application.

[0020] Figure 2 Fig. 4 shows a left view of the uniform flow assembly according to an embodiment of the present application.

[0021] Figure 3 Fig. 5 shows a top view of the uniform flow assembly according to an embodiment of the present application.

[0022] Figure 4 Fig. 6 shows a bottom view of the uniform flow assembly according to an embodiment of the present application.

[0023] Figure 5 Fig. 7 shows a structure diagram of the uniform flow assembly according to an embodiment of the present application. Figure 3 Fig. 8 shows a sectional structure diagram of the uniform flow assembly along A-A according to an embodiment of the present application.

[0024] Figure 6 Fig. 9 shows a structure diagram of the process equipment according to an embodiment of the present application.

[0025] Figure 7 Fig. 10 shows a structure diagram of the uniform flow assembly according to an embodiment of the present application. Figure 3 Fig. 11 shows a sectional structure diagram of the uniform flow assembly along B-B according to an embodiment of the present application.

[0026] Figure 8 Fig. 12 shows a top view of the uniform flow assembly according to another embodiment of the present application.

[0027] Figure 9 Fig. 13 shows a structure diagram of the uniform flow assembly according to an embodiment of the present application. Figure 8 Fig. 14 shows an enlarged view of a part C.

[0028] Figure 10 Fig. 15 shows a structure diagram of the uniform flow assembly according to an embodiment of the present application. Figure 5 Fig. 16 shows an enlarged view of a part D.

[0029] Figure 11 Fig. 17 shows a structure diagram of the uniform flow assembly according to an embodiment of the present application. Figure 5 Fig. 18 shows an enlarged view of a part E.

[0030] Reference signs:

[0031] 1, process equipment; 10, gas extraction and flow uniformization assembly; 11, main body; 110, connecting port; 111, accommodating groove; 1110, inlet and outlet; 112, first connecting hole; 113, third connecting hole; 114, fourth connecting hole; 12, first flow uniformization member; 120, first flow uniformization hole; 121, opening area; 122, connecting area; 123, second waist-shaped hole; 124, sixth connecting hole; 13, gas extraction and flow uniformization chamber; 14, mounting member; 15, adjusting member; 150, avoiding part; 151, first waist-shaped hole; 16, first baffle; 160, second connecting hole; 17, second flow uniformization member; 170, second flow uniformization hole; 18, connecting assembly; 180, connecting member; 19, flow converging member; 190, connecting part; 191, flow converging part; 192, third waist-shaped hole; 20, process cavity; 21, process chamber; 22, protruding part; 30, carrier plate; 31, first side of carrier plate; 32, second side of carrier plate; 33, first bearing area; 34, second bearing area; 40, substrate; 50, gas extraction device; 60, supporting shaft; 70, connecting ring; 71, second baffle; 710, fifth connecting hole; 72, pressing plate; 720, seventh connecting hole; 80, air uniformization assembly; X1, first direction; X2, second direction; X3, third direction. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0033] Figure 1 The main view of the gas extraction and flow uniformization assembly provided by an embodiment of the present application is shown. Figure 2 The left view of the gas extraction and flow uniformization assembly provided by an embodiment of the present application is shown. Figure 3 The top view of the gas extraction and flow uniformization assembly provided by an embodiment of the present application is shown. Figure 4 The bottom view of the gas extraction and flow uniformization assembly provided by an embodiment of the present application is shown. Figure 5 The structure schematic view of the gas extraction and flow uniformization assembly provided by an embodiment of the present application is shown. Figure 3 The structure schematic view of the gas extraction and flow uniformization assembly provided by an embodiment of the present application is shown. Figure 6 The structure schematic view of the process equipment provided by an embodiment of the present application is shown.

[0034] As shown in the drawings, Figures 1 to 6As shown, the gas extraction and flow uniformization assembly 10 is applied to a process apparatus 1. The process apparatus 1 includes a process chamber 20. The process chamber 20 has a process cavity 21 capable of accommodating at least one carrier plate 30. A first side 31 of the carrier plate and a second side 32 of the carrier plate are oppositely arranged. The first side 31 of the carrier plate and the second side 32 of the carrier plate respectively have a first loading area 33, a second loading area 34 for loading a substrate 40.

[0035] The substrate 40 can be any sheet-like material to be processed. Exemplarily, the substrate 40 can include at least one of a silicon wafer, a battery sheet, a wafer, and a glass plate. Specifically, the carrier plate 30 serves as a carrier to load the substrate 40. The first side 31 of the carrier plate can have one or more first loading areas 33. The second side 32 of the carrier plate can have one or more second loading areas 34.

[0036] Specifically, the process apparatus 1 can process the substrate 40 on the first side 31 of the carrier plate and the substrate 40 on the second side 32 of the carrier plate. The process apparatus 1 can include any apparatus for processing the substrate 40 based on the distribution of gas flow. Exemplarily, the process apparatus 1 can include a coating apparatus or an annealing apparatus. Exemplarily, the process apparatus 1 can be used to perform a vapor deposition process. The process apparatus 1 can be a vertical apparatus (as shown) or a horizontal apparatus. Figure 6 As shown, the gas extraction and flow uniformization assembly 10 is applied to a process apparatus 1. The process apparatus 1 includes a process chamber 20. The process chamber 20 has a process cavity 21 capable of accommodating at least one carrier plate 30. A first side 31 of the carrier plate and a second side 32 of the carrier plate are oppositely arranged. The first side 31 of the carrier plate and the second side 32 of the carrier plate respectively have a first loading area 33, a second loading area 34 for loading a substrate 40.

[0037] The gas extraction and flow uniformization assembly 10 can be disposed in the process cavity 21. The gas extraction and flow uniformization assembly 10 includes a main body 11 and at least two first flow uniformization members 12.

[0038] The main body 11 has a connecting port 110 configured to communicate with a gas extraction device 50. The at least two first flow uniformization members 12 are respectively disposed on a side of the main body 11 facing the first loading area 33 and a side of the main body 11 facing the second loading area 34. The main body 11 and the at least two first flow uniformization members 12 form a gas extraction and flow uniformization chamber 13. The first flow uniformization member 12 has a plurality of first flow uniformization holes 120. The connecting port 110 and the first flow uniformization holes 120 are in communication with the gas extraction and flow uniformization chamber 13.

[0039] The main body 11 further has at least one receiving groove 111 disposed along a first direction X1 between two adjacent first flow uniformization members 12. The receiving groove 111 is configured to allow an end portion of the carrier plate 30 to extend into. The position of the at least one first flow uniformization member 12 relative to the main body 11 along a second direction X2 is adjustable to adjust the size of the receiving groove 111 along the second direction X2. The second direction X2 is transverse to the first direction X1.

[0040] Specifically, the gas extraction device 50 is in communication with the gas extraction uniform flow chamber 13 through the connecting port 110. When the gas extraction device 50 is working, the gas in the process chamber 21 flows through the gas extraction uniform flow assembly 10 and is extracted from the process chamber 21 by the gas extraction device 50. The gas in the process chamber 21 is divided by the plurality of first uniform flow holes 120 when flowing to the gas extraction uniform flow assembly 10, so that the gas is uniformly sucked into the gas extraction uniform flow chamber 13 when being close to the gas extraction uniform flow assembly 10, the uniformity of the gas flow close to or contacting the gas extraction uniform flow assembly 10 is improved, and thus the process effect of the substrate 40 close to the gas extraction uniform flow assembly 10 is improved, for example, the thin film deposited on the substrate 40 is more uniform.

[0041] Exemplarily, the main body 11 can be a hollow structure. For example, the main body 11 can be a box body with a plurality of openings. Exemplarily, the shape of the outer shape of the main body 11 can include one or a combination of a cube, a pyramid, and a column. Exemplarily, the main body 11 can be a sheet metal part. Exemplarily, the main body 11 and the first uniform flow part 12 can be integrally formed or detachably connected.

[0042] Exemplarily, the gas extraction uniform flow assembly 10 further includes a plurality of mounting parts 14. The plurality of mounting parts 14 are arranged on the main body 11 and are used for mounting the main body 11 to the process cavity 20. Exemplarily, the gas extraction device 50 can include a vacuum pump, and can further include a jet pump or a diffusion pump, which is not limited in the embodiment.

[0043] Exemplarily, the first uniform flow holes 120 can be uniformly distributed on the first uniform flow part 12. Exemplarily, the first uniform flow holes 120 can be locally distributed on the first uniform flow part 12. Exemplarily, the diameters of the first uniform flow holes 120 are equal. Exemplarily, from the middle region to the edge region of the first uniform flow part 12, the number of the first uniform flow holes 120 increases, or the diameters of the first uniform flow holes 120 increase. Exemplarily, the shape of the first uniform flow part 12 can include a plate shape. Exemplarily, the first uniform flow part 12 has a plane of the first uniform flow holes 120 parallel to the first direction X1 and the second direction X2. The first uniform flow part 12 can be a sheet metal part.

[0044] With the rapid development of technology and the continuous growth of market demand, high productivity has gradually become a development trend in the field of semiconductor or photovoltaic technology. In order to meet the urgent demand of the market for productivity, the gas extraction uniform flow assembly 10 provided in the embodiment is also applicable to the application scenario that both sides of the carrier plate can carry at least one substrate.

[0045] Specifically, the gas-suction uniform-flow assembly 10 has a receiving groove 111. The end of the carrier plate 30 extends into the receiving groove 111, divides the space in the process chamber 21 that needs to be suctioned into two parts, and isolates the two parts. The receiving groove 111 is provided with a first uniform-flow piece 12 on both sides, that is, the first side 31 of the carrier plate and the second side 32 of the carrier plate are both provided with the first uniform-flow piece 12. As shown in Figure 6 , two first uniform-flow pieces 12 are arranged on the side of the main body piece 11 that faces the first bearing area 33 and the side of the main body piece 11 that faces the second bearing area 34, for example, one of the two adjacent first uniform-flow pieces 12 is arranged on the side of the main body piece 11 that faces the first bearing area 33, and the other of the two adjacent first uniform-flow pieces 12 is arranged on the side of the main body piece 11 that faces the second bearing area 34, so as to uniformly flow the gas in the respective areas of the two parts close to the first uniform-flow piece 12, make the gas flow in the areas close to the first uniform-flow piece 12 on both sides of the carrier plate 30 more uniform, and thus improve the process effect of the substrate 40 close to the gas-suction uniform-flow assembly 10 on both sides of the carrier plate 30. In addition, since the gas flow is smoother and more orderly, the gas is more easily and fully reaches the surface of the substrate 40, which is beneficial to shorten the process time and improve the process efficiency.

[0046] Specifically, the end of the carrier plate 30 extends along a first direction X1. Exemplarily, the carrier plate 30 can extend into the receiving groove 111 and be detachably connected with the main body piece 11. Exemplarily, the carrier plate 30 can also be inserted into the receiving groove 111 without being connected with the main body piece 11. Specifically, a second direction X2 is arranged transversely to the first direction X1. The included angle between the second direction X2 and the first direction X1 is greater than 0° and less than or equal to 90°. Exemplarily, the shape of the orthographic projection of the receiving groove 111 on the main body piece 11 includes a long strip shape, and the length direction of the long strip shape is the first direction X1. The second direction X2 is the width direction of the long strip shape. Exemplarily, the shape of the orthographic projection of the receiving groove 111 on the main body piece 11 includes a rectangle, an oblong or a polygon. The shape of the receiving groove 111 can be set according to the shape of the end of the carrier plate 30. Exemplarily, the receiving groove 111 can be a blind groove. The receiving groove 111 can also be a hollow groove. For example, the groove bottom or the groove wall of the receiving groove 111 is hollow and communicates with the gas-suction uniform-flow chamber 13. Such a setting is beneficial to suction the gas flowing into the receiving groove 111, and further reduces the turbulence of the gas flow.

[0047] Exemplarily, referring to Figure 6 , the process equipment 1 can be a vertical equipment, and the gas-suction uniform-flow assembly 10 can be located at the upper part or the lower part of the process chamber 21. Exemplarily, the process equipment 1 can also be a horizontal equipment, and the gas-suction uniform-flow assembly 10 can be located at the side of the process chamber 21.

[0048] In some application scenarios, the process chamber 21 can accommodate multiple carrier plates 30. The multiple carrier plates 30 can be arranged in parallel and spaced apart, or can be arranged non-parallel. Taking the example of the multiple carrier plates 30 being arranged in parallel and spaced apart, the exhaust uniform flow assembly 10 can include two or more first uniform flow members 12. The main body member 11 is provided with a receiving groove 111 corresponding to each carrier plate 30. Exemplarily, one first uniform flow member 12 can be arranged between adjacent carrier plates 30, and one first uniform flow member 12 can be arranged on the side of the first carrier plate 30 away from the last carrier plate 30 and on the side of the last carrier plate 30 away from the first carrier plate 30. Exemplarily, two or more first uniform flow members 12 can also be arranged between adjacent carrier plates 30. Exemplarily, when the multiple carrier plates 30 are arranged non-parallel, that is, when the extension directions of the carrier plates 30 intersect, the number and layout of the first uniform flow members 12 can be set according to the number and layout of the carrier plates 30, which is not limited in the embodiment.

[0049] In some application scenarios, the position of a first uniform flow member 12 relative to the main body member 11 along the second direction X2 is adjustable. In this way, when the machining precision or installation precision of the main body member 11 and the first uniform flow member 12 is low, it is convenient to adjust the size of the receiving groove 111 along the second direction X2 after the carrier plate 30 is inserted into the receiving groove 111, so that the gap between the carrier plate 30 and the first uniform flow member 12 and the receiving groove 111 is as small as possible, thereby improving the exhaust efficiency. In addition, this arrangement also makes the receiving groove 111 suitable for carrier plates 30 of different specifications, thereby increasing the versatility of the exhaust uniform flow assembly 10. Exemplarily, the positions of the first uniform flow members 12 on both sides of the receiving groove 111 relative to the main body member 11 along the second direction X2 are adjustable.

[0050] The exhaust uniform flow assembly 10 provided in the embodiment includes a main body member 11 and at least two first uniform flow members 12. The first uniform flow member 12 has a plurality of first uniform flow holes 120. The gas in the process chamber 21 is divided into multiple streams by the plurality of first uniform flow holes 120 when flowing towards the exhaust uniform flow assembly 10, so that the gas is uniformly sucked into the exhaust uniform flow chamber 13 when close to the exhaust uniform flow assembly 10, thereby achieving exhaust uniform flow and improving the uniformity of the gas flow close to or contacting the exhaust uniform flow assembly 10, thereby improving the process effect of the substrate 40 close to the exhaust uniform flow assembly 10. In addition, the main body member 11 also has at least one receiving groove 111, which is arranged between two adjacent first uniform flow members 12 to allow the end of the carrier plate 30 to be inserted, so that the gas flow in the space near the first uniform flow member 12 on both sides of the carrier plate 30 is more uniform, thereby improving the process effect of the substrate 40 close to the exhaust uniform flow assembly 10 on both sides of the carrier plate 30, so that the exhaust uniform flow assembly 10 is also suitable for application scenarios in which both sides of the carrier plate 30 can carry at least one substrate 40, which is helpful for high-capacity and high-quality production.

[0051] In addition, the first flow uniformizing member 12 is adjustable in position along the second direction X2 relative to the main body member 11 to adjust the size of the accommodating groove 111 along the second direction X2, so as to make the gap between the carrier plate 30 and the first flow uniformizing member 12 and the accommodating groove 111 as small as possible, thereby improving the pumping efficiency.

[0052] In some embodiments, as shown in Figure 3 and Figure 6 , the accommodating groove 111 extends through the main body member 11 along the first direction X1, and the carrier plate 30 is movable along the first direction X1 to pass through the accommodating groove 111. Such an arrangement makes the pumping flow uniformizing assembly 10 suitable for application scenarios where the carrier plate 30 is movable along the first direction X1, which is conducive to the continuous process treatment of the substrate 40 by the process equipment 1 and increases the degree of automation of the process equipment 1. For example, the process equipment 1 has a plurality of process chambers 21 arranged along the first direction X1, and the carrier plate 30 moves along the first direction X1 in the plurality of process chambers 21 to perform the same or different process treatment.

[0053] In some embodiments, as shown in Figure 2 , Figure 4 and Figure 6 , the accommodating groove 111 has an inlet and outlet 1110 at both ends along the second direction X2. The pumping flow uniformizing assembly 10 further comprises at least one adjusting member 15. The at least one adjusting member 15 is arranged on the main body member 11 and adjustable in position along the second direction X2 relative to the main body member 11 to adjust the size of the inlet and outlet 1110 along the second direction X2. Such an arrangement facilitates adjustment of the size of the inlet and outlet 1110 along the second direction X2 after the carrier plate 30 extends into the accommodating groove 111, so as to make the gap between the carrier plate 30 and the adjusting member 15 and the accommodating groove 111 as small as possible, thereby improving the pumping efficiency. In addition, such an arrangement also makes the inlet and outlet 1110 suitable for different specifications of the carrier plate 30, thereby increasing the versatility of the pumping flow uniformizing assembly 10.

[0054] Specifically, the two inlets and outlets 1110 are oppositely arranged along the second direction X2. As shown in Figure 6 , the shape of the inlet and outlet 1110 can be arranged according to the shape of the carrier plate 30 to ensure that the end of the carrier plate 30 can smoothly pass into or out of the inlet and outlet 1110. For example, the inlet and outlet 1110 can be in communication with the pumping flow uniformizing chamber 13. For example, the two sides of each inlet and outlet 1110 are provided with adjusting members 15, and the size of the inlet and outlet 1110 corresponding to the two adjusting members 15 along the second direction X2 can be adjusted by adjusting the positions of the two adjusting members 15. For example, the two sides of each inlet and outlet 1110 are provided with adjusting members 15.

[0055] For example, as shown in Figure 2As shown, along the second direction X2, the adjusting member 15 away from the inlet and outlet 1110 side is provided with a mounting member 14. The adjusting member 15 away from the inlet and outlet 1110 side has a avoiding part 150. The avoiding part 150 is used to avoid the mounting member 14 when the adjusting member 15 adjusts along the second direction X2. In this way, the adjusting range of the adjusting member 15 can be increased. Exemplarily, the avoiding part 150 can include an avoiding slot.

[0056] In some embodiments, as shown in FIG. 1, the adjusting member 15 has at least one first waist-shaped hole 151 extending along the second direction X2. The main body member 11 has at least one first connecting hole 112. Figure 2

[0057] The gas extraction and flow uniformization assembly 10 further comprises at least one first baffle 16 and at least one first screwing member. The at least one first baffle 16 is located on the side of the adjusting member 15 away from the main body member 11. The first baffle 16 has a second connecting hole 160. The at least one first screwing member passes through the second connecting hole 160, the first waist-shaped hole 151 and the first connecting hole 112 in sequence, so that the first baffle 16 and the adjusting member 15 are connected with the main body member 11.

[0058] In this way, the adjusting member 15 can be positionally adjusted within the size range of the first waist-shaped hole 151 along the second direction X2, and the position adjustment of the adjusting member 15 is realized by the first waist-shaped hole 151, which is simple in structure and low in cost. In addition, since the orthographic projection of the first baffle 16 on the adjusting member 15 covers the first waist-shaped hole 151, the first baffle 16 can block the first waist-shaped hole 151, so that it is difficult for gas to escape from the first waist-shaped hole 151.

[0059] Specifically, after the position adjustment of the adjusting member 15, the orthographic projection of the first baffle 16 on the adjusting member 15 can still cover the first waist-shaped hole 151. Exemplarily, as shown in FIG. 1, each adjusting member 15 can have two first waist-shaped holes 151. The first connecting hole 112, the first waist-shaped hole 151 and the second connecting hole 160 correspond one by one. Exemplarily, the hole wall of the first connecting hole 112 can have threads or can have no threads. The hole wall of the second connecting hole 160 can have threads or can have no threads. The first screwing member can be a screw or a bolt. Figure 2

[0060] Exemplarily, as shown in FIG. 1, the first baffle 16 can have a first connecting hole 160. The first baffle 16 can be connected with the main body member 11 through the first connecting hole 160 and the first connecting hole 112. Figure 2 ​​As shown, the adjustment member 15 can be located outside the main body member 11. The first baffle 16 can also be located outside the main body member 11. In this way, it is difficult for the gas to escape along the escape path first connecting hole 112-first waist-shaped hole 151-second connecting hole 160. Exemplarily, the adjustment member 15 can be located inside the main body member 11, i.e. in the gas extraction uniform flow chamber 13. The first baffle 16 can also be located in the gas extraction uniform flow chamber 13.

[0061] In some embodiments, as shown in Figure 3 and Figure 5 As shown, the gas extraction uniform flow assembly 10 further comprises at least one second uniform flow member 17. The at least one second uniform flow member 17 is arranged in the gas extraction uniform flow chamber 13. The second uniform flow member 17 is arranged in the third direction X3 apart from the first uniform flow member 12 and has a plurality of second uniform flow holes 170. The third direction X3 is perpendicular to the first direction X1 and the second direction X2. The connecting port 110 is located on the side of the second uniform flow member 17 away from the first uniform flow member 12 and is arranged apart from the second uniform flow member 17.

[0062] By arranging the second uniform flow member 17 between the connecting port 110 and the first uniform flow member 12, and the plurality of second uniform flow holes 170 on the second uniform flow member 17, the gas uniformly flowed through the first uniform flow member 12 can be further uniformly flowed through the second uniform flow holes 170, so that the gas is further orderly extracted from the process chamber 21, and the process effect is further improved.

[0063] Exemplarily, the second uniform flow member 17 has second uniform flow holes 170 uniformly distributed. Exemplarily, from the middle region of the second uniform flow member 17 to the edge region of the second uniform flow member 17, the aperture of the second uniform flow holes 170 can change from small to large, or the number of the second uniform flow holes 170 can change from few to many. Exemplarily, the shape of the second uniform flow member 17 can include a plate shape. Exemplarily, the second uniform flow member 17 has a plane parallel to the first direction X1 and the second direction X2. The second uniform flow member 17 can be a sheet metal member.

[0064] Exemplarily, as shown in Figure 4 The region of the second uniform flow member 17 provided with the second uniform flow holes 170 has an overlapping projection on the connecting port 110. Exemplarily, as shown in Figure 5 The second uniform flow member 17 is located directly above the connecting port 110. Exemplarily, the gas extraction uniform flow assembly 10 can comprise a plurality of second uniform flow members 17. The plurality of second uniform flow members 17 are arranged apart in the third direction X3 to uniformly flow the gas multiple times. The sum of the areas of the second uniform flow holes 170 of each second uniform flow member 17 can be equal or not equal. Exemplarily, the first uniform flow member 12, the second uniform flow member 17 and the connecting port 110 are arranged apart in the third direction X3.

[0065] In some embodiments, such as Figure 1 As shown, along the direction from the first flow equalizer 12 toward the connection port 110, the size of the main body 11 gradually decreases in the first direction X1. This arrangement allows the gas flowing through the first flow equalizer 12 into the suction flow equalizer chamber 13 to easily converge along the inner wall of the main body 11 toward the connection port 110, thus entering the connection port 110 more smoothly and reducing airflow turbulence. In other words, along the direction from the connection port 110 toward the first flow equalizer 12, the size of the main body 11 gradually increases in the first direction X1, which also expands the suction range of the suction flow equalizer assembly 10 and more effectively captures the gas in the process chamber 21.

[0066] Exemplarily, the shape of the main body 11 in its orthographic projection onto a plane parallel to the first direction X1 and the third direction X3 includes a trapezoid, for example, an isosceles trapezoid. Exemplarily, refer to... Figure 6 The shape of the main body 11 in the orthographic projection onto a plane parallel to the second direction X2 and the third direction X3 includes a rectangle. This arrangement allows the process chamber 21 to be designed to be smaller in the dimension along the second direction X2, that is, along the thickness direction of the carrier plate 30, which is beneficial to reducing the footprint of the process equipment 1. For example, the dimensions of the main body 11 in the second direction X2 are at least partially equal along the direction from the first flow equalizer 12 toward the connection port 110.

[0067] Figure 7 The image shown is an embodiment provided by this application. Figure 3 The diagram shows a cross-sectional view of the air extraction and equalization assembly along the BB. Figure 7 As shown, the position of the second flow equalizer 17 relative to the main body 11 along the third direction X3 is adjustable. Since the size of the main body 11 gradually decreases in the first direction X1 along the direction of the first flow equalizer 12 toward the connection port 110, by adjusting the position of the second flow equalizer 17 along the third direction X3, the gap between the second flow equalizer 17 and the main body 11 along the first direction X1 can be adjusted, thereby changing the flow area of ​​the gap between the second flow equalizer 17 and the main body 11, and thus changing the pumping speed of the pumping flow equalizer assembly 10.

[0068] For example, when the second flow equalizer 17 is adjusted relative to the main body 11 along the third direction X3 toward the connection port 110, the gap between the second flow equalizer 17 and the main body 11 along the first direction X1 becomes smaller, and the pumping speed of the pumping and equalizing assembly 10 decreases. In some application scenarios, the second flow equalizer 17 and the main body 11 may also be without gap along the first direction X1.

[0069] In some embodiments, such as Figure 5As shown, the gas extraction and flow uniformization assembly 10 further comprises a connecting assembly 18. The connecting assembly 18 extends along the first direction X1. Along the second direction X2, one side of the connecting assembly 18 is sealingly connected with the main body 11, and the other side of the connecting assembly 18 is sealingly connected with the second flow uniformization member 17. The side of the second flow uniformization member 17 away from the connecting assembly 18 is sealingly connected with the main body 11. The second flow uniformization member 17 is connected with the main body 11 through the connecting assembly 18, which not only facilitates the installation of the second flow uniformization member 17, but also helps to ensure the sealing of the connection between the second flow uniformization member 17 and the main body 11 along the second direction X2, thereby improving the gas extraction efficiency.

[0070] Exemplarily, the connecting assembly 18 can comprise a plurality of connecting members 180. Exemplarily, along the second direction X2, the adjacent sides of the plurality of connecting members 180 are sealingly connected, the side of the first connecting member 180 away from the last connecting member 180 is sealingly connected with the main body 11, and the side of the last connecting member 180 away from the first connecting member 180 is sealingly connected with the second flow uniformization member 17. Exemplarily, both sides of the second flow uniformization member 17 along the second direction X2 are sealingly connected with the main body 11 through the connecting assembly 18. Exemplarily, the connecting assembly 18 can be integrally formed. Exemplarily, the plurality of connecting members 180 can be detachably connected.

[0071] In some embodiments, as shown in Figure 2 , Figure 3 and Figure 6 , the first flow uniformization member 12 has an open area 121 on the side close to the accommodating groove 111. A plurality of first flow holes 120 are located in the open area 121. The gas extraction and flow uniformization assembly 10 further comprises at least one flow collecting member 19. The at least one flow collecting member 19 is arranged on the first flow uniformization member 12 and located in the at least part of the edge area of the open area 121 away from the accommodating groove 111, and is configured to collect the gas between the flow collecting member 19 and the carrier plate 30. Specifically, the flow collecting member 19 is arranged on the side of the first flow uniformization member 12 away from the gas extraction and flow uniformization chamber 13. By arranging the flow collecting member 19, the gas close to the first flow uniformization member 12 can be collected to the open area 121, which helps to reduce the space that needs to be extracted by the gas extraction and flow uniformization assembly 10, thereby improving the gas extraction efficiency.

[0072] Exemplarily, as shown in Figure 2 and Figure 3 , one flow collecting member 19 is arranged on the first flow uniformization member 12. Exemplarily, a plurality of flow collecting members 19 can also be arranged on the first flow uniformization member 12. Exemplarily, the edge area of the open area 121 away from the accommodating groove 111 can be the edge area of the open area 121 other than the edge area close to the accommodating groove 111. Exemplarily, the flow collecting member 19 can also be located in all edge areas of the open area 121.

[0073] Exemplarily, the first flow uniforming member 12 further has a connecting region 122 on a side of the opening region 121 away from the accommodating groove 111. The flow converging member 19 includes a connecting portion 190 and a flow converging portion 191 connected to the connecting portion 190. The connecting portion 190 is connected to the connecting region 122 of the first flow uniforming member 12. The flow converging portion 191 is located on at least a partial edge region of the opening region 121 away from the accommodating groove 111, and is configured to converge the gas between the flow converging portion 191 and the carrier plate 30.

[0074] Exemplarily, referring to Figure 5 , an angle between a normal projection of the flow converging portion 191 on a plane parallel to the second direction X2 and the third direction X3 and a normal projection of the opening region 121 of the first flow uniforming member 12 on the plane parallel to the second direction X2 and the third direction X3 is a right angle or an obtuse angle. So as to converge the gas between the flow converging portion 191 and the carrier plate 30. As Figure 2 indicated, the angle between the normal projection of the flow converging portion 191 on the plane parallel to the second direction X2 and the third direction X3 and the normal projection of the opening region 121 of the first flow uniforming member 12 on the plane parallel to the second direction X2 and the third direction X3 is an obtuse angle.

[0075] In some application scenarios, as Figure 6 indicated, the process cavity 20 has a protruding portion 22 on a side of the flow converging portion 191. The protruding portion 22 protrudes towards the carrier plate 30 and is spaced apart from the carrier plate 30. A side of the flow converging portion 191 away from the first flow uniforming member 12 abuts against a side of the protruding portion 22 towards the flow converging portion 191, so as to cooperate with the protruding portion 22 and the carrier plate 30 to form a smaller pumping space and increase pumping efficiency.

[0076] Exemplarily, an angle between a normal projection of the flow converging portion 191 on a plane parallel to the second direction X2 and the third direction X3 and a normal projection of the opening region 121 of the first flow uniforming member 12 on the plane parallel to the second direction X2 and the third direction X3 is an obtuse angle. The part of the process cavity 20 having the protruding portion 22 can be a cavity door. When the cavity door is closed, the protruding portion 22 exerts a force on the side of the flow converging portion 191 away from the first flow uniforming member 12, so that the angle between the normal projection of the flow converging portion 191 on the plane parallel to the second direction X2 and the third direction X3 and the normal projection of the opening region 121 of the first flow uniforming member 12 on the plane parallel to the second direction X2 and the third direction X3 becomes a smaller obtuse angle or a right angle, so that the side of the flow converging portion 191 away from the first flow uniforming member 12 is completely abutted or attached to the side of the protruding portion 22 towards the flow converging portion 191.

[0077] Exemplarily, the connecting portion 190 and the busbar portion 191 are both plate-shaped. The connecting portion 190 extends along the first direction X1. Exemplarily, the busbar portion 191 includes a first sub-busbar portion and two second sub-busbar portions. The first sub-busbar portion extends along the first direction X1. The two second sub-busbar portions are oppositely arranged along the first direction X1. Exemplarily, the second sub-busbar portions extend along the second direction X2.

[0078] Figure 8 Fig. 6 shows a top view of the gas extraction and flow uniformization assembly provided by another embodiment of the present application. Figure 9 Fig. 7 shows a top view of the gas extraction and flow uniformization assembly provided by an embodiment of the present application. Figure 8 Fig. 8 shows an enlarged view of the portion C.

[0079] In some embodiments, as shown in Figs. 1-8, the first flow uniformization member 12 has at least one second waist-shaped hole 123. The second waist-shaped hole 123 extends along the second direction X2. The main body member 11 also has at least one fourth connecting hole 114. The gas extraction and flow uniformization assembly 10 further includes at least one second baffle 71 and at least one second screwing member. Figure 3 、 Figure 8 and Figure 9 Exemplarily, the first flow uniformization member 12 has at least one second waist-shaped hole 123. The second waist-shaped hole 123 extends along the second direction X2. The main body member 11 also has at least one fourth connecting hole 114. The gas extraction and flow uniformization assembly 10 further includes at least one second baffle 71 and at least one second screwing member.

[0080] The at least one second baffle 71 is located on the side of the first flow uniformization member 12 away from the main body member 11. The orthographic projection of the second baffle 71 on the first flow uniformization member 12 covers the second waist-shaped hole 123. The second baffle 71 has a fifth connecting hole 710. The second screwing member passes through the fifth connecting hole 710, the second waist-shaped hole 123 and the fourth connecting hole 114 in sequence, so as to connect the second baffle 71 and the first flow uniformization member 12 with the main body member 11.

[0081] In this way, the first flow uniformization member 12 can be adjusted in position within the size range of the second waist-shaped hole 123 along the second direction X2. The position adjustment of the first flow uniformization member 12 is realized by the second waist-shaped hole 123, which is simple in structure and low in cost. In addition, since the orthographic projection of the second baffle 71 on the adjustment member 15 covers the second waist-shaped hole 123, the second baffle 71 can block the second waist-shaped hole 123, so that it is difficult for gas to escape from the second waist-shaped hole 123.

[0082] In some embodiments, the at least one busbar member 19 is adjustable in position relative to the first flow uniformization member 12 along the second direction X2. In this way, it is convenient to install the gas extraction and flow uniformization assembly 10 on the process equipment 1, and it is convenient to install and debug the process equipment 1. In addition, the spacing between the busbar member 19 and the carrier plate 30 can be changed to adapt to different process conditions. Exemplarily, the busbar member 19 near the side of the cavity door is adjustable in position relative to the first flow uniformization member 12 along the second direction X2. Exemplarily, Figure 3In the air extraction and equalization assembly 10 shown, the positions of the first equalization member 12 and the converging member 19 on one side of the receiving groove 111 are adjustable, while the positions of the first equalization member 12 and the converging member 19 on the other side of the receiving groove 111 are not adjustable. Exemplarily, the positions of the converging members 19 on both sides of the receiving groove 111 are adjustable.

[0083] Figure 10 The image shown is an embodiment provided by this application. Figure 5 A magnified view of a section at point D.

[0084] In some embodiments, such as Figures 8 to 10 As shown, the first flow equalizer 12 has at least one sixth connecting hole 124. The confluence member 19 also has at least one third oblong hole 192. The third oblong hole 192 extends along the second direction X2. The air extraction and flow equalization assembly 10 also includes at least one pressure plate 72 and at least one third screw connector.

[0085] At least one pressure plate 72 is located on the side of the manifold 19 away from the first flow equalizer 12. The pressure plate 72 extends along a first direction X1 to press the manifold 19 against the first flow equalizer 12, preventing gas from escaping between the manifold 19 and the first flow equalizer 12. The pressure plate 72 has a seventh connecting hole 720. A third screw thread passes sequentially through the seventh connecting hole 720, the third oblong hole 192, and the sixth connecting hole 124, connecting the pressure plate 72 and the manifold 19 to the first flow equalizer 12. Exemplarily, the orthographic projection of the pressure plate 72 onto the first flow equalizer 12 overlaps the orthographic projection of the hole wall of the sixth connecting hole 124 onto the first flow equalizer 12. Exemplarily, the seventh connecting hole 720 may be an oblong hole.

[0086] With this configuration, the manifold 19 can be positioned within the dimensional range of the third oblong hole 192 along the second direction X2. The position adjustment of the manifold 19 is achieved using the third oblong hole 192, resulting in a simple structure and low cost. Exemplarily, the connecting portion 190 has at least one third oblong hole 192. Exemplarily, as... Figure 3 As shown, the side of the manifold 19 away from the first flow equalizer 12 may not have a pressure plate 72.

[0087] Figure 11 The image shown is an embodiment provided by this application. Figure 5 A magnified view of a section at point E in the middle.

[0088] In some embodiments, such as Figures 5 to 7 as well as Figure 11 As shown, the carrier plate 30 is erected in the process equipment 1, which also includes a plurality of support shafts 60. The support shafts 60 are used to support the ends of the carrier plate 30. The main body 11 is rotatably connected to the support shafts 60, and the main body 11 also has a plurality of third connecting holes 113, which are spaced apart along a first direction X1.

[0089] The gas extraction and flow uniformization assembly 10 further comprises at least one connecting ring 70. The at least one connecting ring 70 is arranged on the main body 11, the support shaft 60 is arranged through the inner ring of the connecting ring 70, and the connecting ring 70 is sealingly connected with the main body 11 and the support shaft 60 to seal the third connecting hole 113. By arranging the connecting ring 70, the main body 11 can be protected from being directly connected with the support shaft 60, so as to avoid damage to the main body 11 due to vibration and the like. In addition, in some application scenarios, the machining precision of the third connecting hole 113 is low, and by arranging the connecting ring 70 with high machining precision, the sealing performance of the connection between the inner ring of the connecting ring 70 and the support shaft 60 can be better, and the gas extraction efficiency can be improved.

[0090] Exemplarily, the orthographic projection of the connecting ring 70 on the main body 11 can cover the orthographic projection of the hole wall of the third connecting hole 113 on the main body 11. Exemplarily, the main body 11 is rotatably connected with the support shaft 60 through a magnetic fluid bearing. Exemplarily, the support shaft 60 and the connecting ring 70 are arranged in one-to-one correspondence. Exemplarily, the material of the connecting ring 70 can include stainless steel. Exemplarily, the connecting ring 70 can be connected with the main body 11 in a threaded manner. Exemplarily, the connecting ring 70 is arranged in the gas extraction and flow uniformization chamber 13.

[0091] The gas extraction and flow uniformization assembly 10 embodiment of the present application is described in detail above, and the process equipment 1 embodiment of the present application is described in detail below. It should be understood that the description of the gas extraction and flow uniformization assembly 10 embodiment corresponds to the description of the process equipment 1 embodiment, and therefore, the parts not described in detail can be referred to the previous gas extraction and flow uniformization assembly 10 embodiment.

[0092] As shown in Figure 6 The process equipment 1 comprises a process cavity 20, the gas extraction and flow uniformization assembly 10 and the gas extraction device 50 mentioned in any of the embodiments.

[0093] The process cavity 20 has a process chamber 21 capable of accommodating at least one carrier plate 30. The gas extraction and flow uniformization assembly 10 is arranged in the process chamber 21, and the end of the carrier plate 30 extends into the accommodating groove 111 of the gas extraction and flow uniformization assembly 10. The gas extraction device 50 is in communication with the connecting port 110 of the gas extraction and flow uniformization assembly 10 for providing suction force.

[0094] Exemplarily, the process equipment 1 further comprises at least one carrier plate 30. The first side 31 of the carrier plate and the second side 32 of the carrier plate are oppositely arranged. The first side 31 of the carrier plate and the second side 32 of the carrier plate respectively have a first carrying area 33 and a second carrying area 34 for carrying a substrate 40.

[0095] Exemplarily, the process equipment 1 further comprises a gas distribution assembly 80 and a gas source. The gas distribution assembly 80 is disposed in the process chamber 21. The gas source is in communication with the gas distribution assembly 80. The gas source is configured to provide gas to the gas distribution assembly 80. The gas distribution assembly 80 is configured to distribute the gas provided by the gas source. The distributed gas flows to the first side 31 of the carrier plate and the second side 32 of the carrier plate. Exemplarily, the gas distribution assembly 80 and the gas suction and distribution assembly 10 are oppositely disposed. Further, the process equipment 1 can be a vertical equipment. The gas distribution assembly 80 and the gas suction and distribution assembly 10 are oppositely disposed along the third direction X3.

[0096] In the process equipment 1 provided by the embodiment, the gas suction and distribution assembly 10 comprises the main body 11 and the at least two first distribution members 12. The first distribution member 12 has the plurality of first distribution holes 120. The gas in the process chamber 21 is divided by the plurality of first distribution holes 120 when flowing to the gas suction and distribution assembly 10, so that the gas is uniformly sucked into the gas suction and distribution chamber 13 when being close to the gas suction and distribution assembly 10, the uniformity of the gas flow close to or contacting the gas suction and distribution assembly 10 is improved, and thus the process effect of the substrate 40 close to the gas suction and distribution assembly 10 is improved. Further, the main body 11 further has the at least one accommodating groove 111 disposed between the two adjacent first distribution members 12, so that the end of the carrier plate 30 is inserted into the accommodating groove 111, the gas flow in the space close to the first distribution member 12 on both sides of the carrier plate 30 is more uniform, the process effect of the substrate 40 close to the gas suction and distribution assembly 10 on both sides of the carrier plate 30 is improved, the gas suction and distribution assembly 10 is also applicable to the application scenario that the both sides of the carrier plate 30 can carry at least one substrate 40, and the productivity of the process equipment 1 and the product quality after the process are improved.

[0097] In addition, the position of the first distribution member 12 along the second direction X2 relative to the main body 11 is adjustable, so as to adjust the size of the accommodating groove 111 along the second direction X2, so that the gap between the carrier plate 30 and the first distribution member 12 and the accommodating groove 111 is as small as possible, and the gas suction efficiency is improved.

[0098] The basic principle of the present application is described above in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects and the like mentioned in the present application are only examples and not limitations, and these advantages, advantages, effects and the like cannot be considered as the must-have of each embodiment of the present application. In addition, the above specific details are only for the purpose of example and for the purpose of understanding, and are not limited to the present application, and the above specific details are not limited to the present application.

[0099] The block diagrams of the devices, apparatuses, equipment, systems referred to in this application are only illustrative examples and are not intended to require or imply that the connection, arrangement, configuration must be as shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "comprise", "have", "contain", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with each other. The words "or" and "and" as used herein mean "and / or", and can be used interchangeably with each other, unless the context clearly indicates otherwise. The word "such as" as used herein means the phrase "such as but not limited to", and can be used interchangeably with the phrase.

[0100] It is also important to note that each of the devices, apparatuses, and methods described in this application can be embodied in a variety of forms, including but not limited to a device, a system, a method, a computer program product, a computer-readable storage medium, a computer-readable signal medium, and the like. Any such forms separate from the other forms are also considered to be within the scope of this application.

[0101] The above description of the disclosed aspects is given for illustrative and descriptive purposes only. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the application. Thus, the present application is not intended to be limited to the aspects shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0102] The above description has been given for illustrative and descriptive purposes only. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although several example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A gas extraction and flow uniformization assembly, characterized in that, The application is applied to a process equipment, which comprises a process cavity having a process chamber capable of accommodating at least one carrier plate, a first side of the carrier plate and a second side of the carrier plate are oppositely arranged, and the first side of the carrier plate and the second side of the carrier plate respectively have a first carrying area and a second carrying area for carrying a substrate, wherein the exhaust uniform flow assembly can be arranged in the process chamber, and the exhaust uniform flow assembly comprises: a main body having a connecting port configured to communicate with an exhaust device; at least two first uniform flow members arranged on one side of the main body facing the first carrying area and one side of the main body facing the second carrying area; wherein the main body and the at least two first uniform flow members form an exhaust uniform flow chamber, the first uniform flow members have a plurality of first uniform flow holes, and the connecting port and the first uniform flow holes are in communication with the exhaust uniform flow chamber; the main body further has at least one accommodating groove arranged in a first direction, and the accommodating groove is arranged between two adjacent first uniform flow members and is configured to allow an end portion of the carrier plate to extend into the accommodating groove; the position of at least one first uniform flow member relative to the main body in a second direction is adjustable to adjust the size of the accommodating groove in the second direction, and the second direction intersects the first direction.

2. The gas pumping uniform flow assembly of claim 1, wherein, The accommodating groove extends through the main body in the first direction, and the carrier plate can move in the first direction to pass through the accommodating groove.

3. The gas pumping uniform flow assembly of claim 2, wherein, The accommodating groove has an inlet and an outlet at both ends in the second direction, and the exhaust uniform flow assembly further comprises: at least one adjusting member arranged on the main body and adjustable in position relative to the main body in the second direction to adjust the size of the inlet and outlet in the second direction.

4. The gas pumping uniform flow assembly of claim 3, wherein, The adjusting member has at least one first waist-shaped hole extending in the second direction, and the main body has at least one first connecting hole, and the exhaust uniform flow assembly further comprises: at least one first baffle located on a side of the adjusting member away from the main body, the first baffle has a second connecting hole, and the first baffle has a second connecting hole, and the first baffle has a second connecting hole; at least one first threaded member sequentially passing through the second connecting hole, the first waist-shaped hole and the first connecting hole, so that the first baffle and the adjusting member are connected with the main body.

5. The gas pumping uniformity assembly of claim 1, wherein, Further comprising: at least one second uniform flow member arranged in the exhaust uniform flow chamber and spaced apart from the first uniform flow member in a third direction, and having a plurality of second uniform flow holes, and the third direction is perpendicular to the first direction and the second direction; wherein the connecting port is located on a side of the second uniform flow member away from the first uniform flow member and is spaced apart from the second uniform flow member.

6. The gas pumping uniform flow assembly of claim 5, wherein, In the direction of the first uniform flow member facing the connecting port, the size of the main body in the first direction gradually decreases; wherein the position of the second uniform flow member relative to the main body in the third direction is adjustable.

7. The gas pumping uniform flow assembly of claim 5, wherein, Further comprising: A connecting assembly is extended along the first direction, and is sealingly connected with the main body at one side and the second uniform flow piece at the other side along the second direction. The side of the second uniform flow piece away from the connecting assembly is sealingly connected with the main body.

8. The gas abatement uniformity assembly of any of claims 1 to 7, wherein, The first uniform flow piece has an opening area near the side of the accommodating groove, and a plurality of first uniform flow holes are located in the opening area. The gas extraction and uniform flow assembly further comprises: At least one flow collecting piece is arranged on the first uniform flow piece and located in the at least part of the edge area of the opening area away from the accommodating groove, and is configured to collect the gas between the flow collecting piece and the carrier plate.

9. The gas abatement uniformity assembly of any of claims 1 to 7, wherein, The carrier plate is vertically arranged in the process equipment, and the process equipment further comprises a plurality of support shafts for supporting the end of the carrier plate. The main body is rotatably connected with the support shaft, and the main body further has a plurality of third connecting holes which are arranged at intervals along the first direction. At least one connecting ring is arranged on the main body, and the support shaft is arranged in the inner ring of the connecting ring. The connecting ring is sealingly connected with the main body and the support shaft to close the third connecting hole.

10. A process plant, characterized by It comprises: A process cavity has a process chamber capable of accommodating at least one carrier plate; The gas extraction and uniform flow assembly according to any one of claims 1-9 is arranged in the process chamber, and the end of the carrier plate extends into the accommodating groove of the gas extraction and uniform flow assembly. An air extraction device is in communication with the connecting port of the gas extraction and uniform flow assembly for providing suction force.

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