Flow stabilizer and wet process equipment

Abstract

The utility model discloses a flow stabilizer and wet process equipment, a containing space in a fluctuation suppression unit of the flow stabilizer is used for receiving chemical liquid from a first inlet end, a first outlet end is used for outputting the chemical liquid in the containing space, and a liquid extraction unit is communicated with the first outlet end. And outputting the chemical liquid in the fluctuation suppression unit to the particle instrument to realize accurate control of the flow, so that the flow of the chemical liquid acquired by the particle instrument is kept in a constant state. Therefore, the chemical liquid entering the fluctuation suppression unit is buffered through the fluctuation suppression unit, and the output chemical liquid is subjected to constant flow regulation and control through the liquid extraction unit, so that the flow of the chemical liquid is stably controlled before the chemical liquid enters the particle instrument, and the interference of the flow velocity change of the chemical liquid on the detection result of the particle instrument is avoided; and the authenticity and the reliability of measured data in the particle counting process of the particle instrument are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a current stabilizing device and wet process equipment. Background Technology

[0002] In the field of chemical liquid supply systems, to ensure the reliability and stability of chemical liquid quality, it is necessary to regularly monitor multiple indicators of the chemical liquid output by the system. These monitoring indicators include key parameters such as the liquid's metal ion content, chemical concentration, moisture content, and particle count.

[0003] Currently, among various monitoring indicators, metal ion, concentration, and moisture can be detected offline through sampling. However, for particle detection, since the sampled liquid inevitably comes into contact with the external environment during the sampling process, environmental particulate pollution can cause significant distortion of the test data. Therefore, on-site online detection is necessary to ensure the reliability of particle detection values.

[0004] However, existing particle analyzers have a problem when performing online detection: they may experience intermittent "data jumps," which can affect the accuracy and reliability of the measurement data during particle counting. Utility Model Content

[0005] The problem solved by this utility model embodiment is to provide a flow stabilization device and wet process equipment to avoid interference of chemical liquid flow rate changes on particle detection data, improve the authenticity and reliability of measurement data during particle counting, and ensure the wet process.

[0006] To address the aforementioned problems, this utility model provides a flow stabilizing device. Located upstream of a particle granulator along the flow path of the chemical liquid, the flow stabilizing device includes: a fluctuation suppression unit comprising a receiving space and a first inlet and a first outlet connected to the receiving space; the receiving space receiving chemical liquid from the first inlet, and the first outlet outputting the chemical liquid from the receiving space; and a liquid extraction unit connected to the first outlet, used to extract the chemical liquid from the fluctuation suppression unit and output it to the particle granulator.

[0007] This utility model embodiment also provides a wet process equipment, including: a process chamber for performing process treatment; a main pipeline for transporting chemical liquid to the process chamber; a detection branch connected to the main pipeline; a flow stabilizing device disposed on the detection branch; and a particle analyzer located on the detection branch and connected to the liquid extraction unit in the flow stabilizing device for detecting particles in the chemical liquid.

[0008] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0009] The fluctuation suppression unit of the flow stabilization device provided in this embodiment of the invention has a receiving space for receiving chemical liquid from a first inlet end, and a first outlet end for outputting the chemical liquid from the receiving space. A liquid extraction unit is connected to the first outlet end, outputting the chemical liquid from the fluctuation suppression unit to the particle analyzer, thereby achieving precise flow control and maintaining a constant flow rate of the chemical liquid acquired by the particle analyzer. Therefore, by buffering the chemical liquid entering its interior through the fluctuation suppression unit and regulating the constant flow rate of the output chemical liquid through the liquid extraction unit, the flow rate of the chemical liquid is stabilized before entering the particle analyzer, avoiding interference from changes in the chemical liquid flow rate on the particle analyzer's detection results, and improving the accuracy and reliability of the measurement data during particle counting.

[0010] The wet process equipment provided in this embodiment of the invention achieves directional delivery of chemical liquid to the process chamber through a main pipeline. A detection branch is connected to the main pipeline, allowing the chemical liquid to enter. Because a flow stabilization device is installed on the detection branch, the chemical liquid enters the particle analyzer at a stable flow rate after passing through the device. This avoids interference from changes in the chemical liquid flow rate with the particle analyzer's detection results, improves the accuracy and reliability of the measurement data during real-time particle counting, and helps ensure the quality of the supplied chemical system. Therefore, the wet process equipment can achieve real-time online particle detection while the wet process is proceeding normally. Attached Figure Description

[0011] Figure 1 This is a structural schematic diagram of a wet process equipment;

[0012] Figure 2 This is a schematic diagram of the structure of an embodiment of the current stabilizing device of this utility model;

[0013] Figure 3 This is a schematic diagram of the fluctuation suppression unit in an embodiment of the current stabilization device of this utility model;

[0014] Figure 4 This is a functional block diagram of the liquid level sensor, signal processing module, controller and pipeline switch in the embodiment of the flow stabilization device of this utility model;

[0015] Figure 5 This utility model presents a schematic diagram of the structure of a wet process equipment embodiment. Detailed Implementation

[0016] As the background technology indicates, existing particle analyzers have problems during online detection, specifically the occurrence of intermittent "data jumps." The main reasons for this problem include: firstly, the presence of actual particle clusters within the tested liquid, although this is a low-probability event; secondly, interference from the internal and external environment before the tested liquid enters the particle analyzer, which is a high-probability event, specifically manifested in changes in the liquid's flow rate and the appearance of preheating decomposition bubbles. These factors affect the accuracy and reliability of the measurement data during particle counting.

[0017] refer to Figure 1 A wet process apparatus is shown, comprising: a liquid supply device 1 storing a chemical liquid; a process stand 2 for performing the process; a main pipeline 3 disposed between the process stand 2 and the liquid supply device 1 for transferring the chemical liquid from the liquid supply device 1 to the process stand 2; a detection branch 4 connected to the main pipeline 3; and a particle analyzer 5 located on the detection branch 4 for detecting particles in the chemical liquid.

[0018] During the process of processing at the process equipment 2, when the process equipment 2 uses acidic liquid through the main pipe 3, the flow rate of the main pipe 3 will increase significantly. The sudden increase in flow rate will be transmitted to the detection branch 4, interfering with the detection results of the particle analyzer 5, resulting in inaccurate measurement data and poor reliability of the particle counting process performed by the particle analyzer 5.

[0019] To address the aforementioned technical problem, this utility model provides a flow stabilizing device positioned upstream of the particle analyzer along the flow path of the chemical liquid. The device includes: a fluctuation suppression unit with a first inlet and a first outlet; the fluctuation suppression unit accommodates the chemical liquid, the first inlet receives the chemical liquid, and the first outlet provides an outlet for the chemical liquid; and a liquid extraction unit connected to the first outlet extracts the chemical liquid from the fluctuation suppression unit and outputs it to the particle analyzer. The fluctuation suppression unit of this flow stabilizing device receives the chemical liquid from the first inlet, the first outlet outputs the chemical liquid from the container, and the liquid extraction unit, connected to the first outlet, outputs the chemical liquid from the fluctuation suppression unit to the particle analyzer, thus achieving precise flow control and maintaining a constant flow rate of the chemical liquid acquired by the particle analyzer. Therefore, it can be seen that by using the fluctuation suppression unit to buffer the chemical liquid entering the particle analyzer and using the liquid extraction unit to regulate the constant flow rate of the output chemical liquid, the flow rate of the chemical liquid is stabilized before entering the particle analyzer, thus avoiding interference from changes in the flow rate of the chemical liquid on the particle analyzer's detection results and improving the authenticity and reliability of the measurement data during particle counting.

[0020] To make the above-mentioned objectives, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0021] Accordingly, this utility model provides a current stabilizing device. (Reference) Figure 2 This is a schematic diagram of the structure of an embodiment of the current stabilizing device of this utility model; Figure 3 This is a schematic diagram of the fluctuation suppression unit in an embodiment of the current stabilization device of this utility model.

[0022] In the flow path of the chemical liquid, a flow stabilizing device 100 is located upstream of the particle granulator. The flow stabilizing device 100 includes: a fluctuation suppression unit 101, which includes a receiving space (not shown in the figure) and a first inlet end 103 and a first outlet end 104 communicating with the receiving space. The receiving space is used to receive the chemical liquid from the first inlet end 103, and the first outlet end 104 is used to output the chemical liquid in the receiving space; and a liquid extraction unit 106, which is connected to the first outlet end 104, for extracting the chemical liquid in the fluctuation suppression unit 101 and outputting it to the particle granulator.

[0023] This embodiment of the invention provides a flow stabilizing device 100 with a wave suppression unit 101 containing a receiving space for receiving chemical liquid from a first inlet end 103, and a first outlet end 104 for outputting the chemical liquid from the receiving space. A liquid extraction unit 106 is connected to the first outlet end 104, outputting the chemical liquid from the wave suppression unit 101 to the particle analyzer, thereby achieving precise flow control and maintaining a constant flow rate of the chemical liquid acquired by the particle analyzer. Therefore, by using the wave suppression unit 101 to buffer the chemical liquid entering it, and by using the liquid extraction unit 106 to regulate the constant flow rate of the output chemical liquid, the flow rate of the chemical liquid is stabilized before entering the particle analyzer, avoiding interference from changes in the chemical liquid flow rate on the particle analyzer's detection results, and improving the accuracy and reliability of the measurement data during particle counting. Furthermore, the flow stabilizing device 100 has the advantages of simple structure, low production cost, and simple operation.

[0024] Compared to the case where chemical liquids are transported in pipelines, the containment space of the fluctuation suppression unit 101 helps to reduce the inlet flow rate of the flow stabilizing device 100, which helps to reduce the interference of chemical liquid flow rate changes on the particle analyzer detection results, making the measurement data of the particle analyzer during particle counting process more authentic and reliable.

[0025] In this embodiment, the first inlet end 103 is located at the top of the fluctuation suppression unit 101, and the first outlet end 104 is located at the top of the fluctuation suppression unit 101 (e.g., ...). Figure 3(as shown) or bottom. When the flow stabilizing device 100 is working, the chemical liquid flows in from the first inlet end 103 and flows out from the first outlet end 104.

[0026] Specifically, the fluctuation suppression unit 101 includes a closed buffer tank. The accommodating space is located inside the buffer tank, the first inlet end 103 is located at the top of the buffer tank, and the first outlet end 104 is located at the top or bottom of the buffer tank. Figure 3 As stated, the first outlet end 104 is located at the top of the buffer tank trough; as Figure 5 As shown, the first outlet end 104 is located at the bottom of the buffer tank trough.

[0027] In this embodiment, the inner wall of the containment space is made of at least one or more materials selected from perfluoroalkoxy and fluorinated ethylene propylene copolymers. Specifically, the material of the inner wall of the containment space is perfluoroalkoxy (PFA) to ensure that the cleanliness of the chemical liquid is not affected. Perfluoroalkoxy is a high-performance fluoropolymer with high chemical stability, does not easily react with other chemicals, and maintains the purity of the material.

[0028] In this embodiment, the volume of the containing space is between 50L and 70L. If the volume of the containing space is too large, the chemical liquid will remain inside for too long, affecting the purity and stability of the chemical liquid and adversely affecting subsequent particle size analysis; moreover, an excessively large volume will result in an excessively large flow stabilization device. If the volume of the containing space is too small, the volume of chemical solution that the containing space can hold is small, and the buffering effect of the corresponding fluctuation suppression unit 101 is small, which cannot effectively reduce the interference of chemical liquid flow rate changes on the particle size analysis results.

[0029] The flow stabilizing device 100 further includes a liquid collection tank 116, a fluctuation suppression unit 101, and a liquid extraction unit 106 disposed in the liquid collection tank 116, which is used to collect leaked liquid. Considering the corrosiveness of the chemical liquid, the liquid collection tank 116 needs to be made of corrosion-resistant materials, such as perfluoroalkoxy or fluorinated ethylene propylene copolymers.

[0030] In this embodiment, the liquid collection tank 116 is a square tank. In other embodiments, the liquid collection tank may also be a circular tank.

[0031] The current stabilizing device 100 also includes: a cover 105 (e.g., a housing 105). Figure 2 As shown, a liquid collection tank 116 is provided; a leakage monitoring unit is located at the bottom of the cover 105 and is used to detect whether there is leakage in the fluctuation suppression unit 101 and the liquid extraction unit 106.

[0032] The enclosure 105 serves as the external protective structure of the flow stabilization device 100, housing the fluctuation suppression unit 101 and the liquid extraction unit 106 internally, providing physical protection for them. During operation, the leakage monitoring unit continuously detects any leaks in the fluctuation suppression unit 101 and the liquid extraction unit 106, making the operation of the flow stabilization device 100 safer and more reliable, thus ensuring the safety and stability of the chemical liquid detection process.

[0033] In this embodiment, the cover 105 and the liquid collection tank form a sealed structure, providing a closed working environment for the fluctuation suppression unit 101 and the liquid extraction unit 106. This helps to prevent external environmental pollution and interference with the chemical liquid, and ensures the authenticity and reliability of the data during particle detection.

[0034] The leakage monitoring unit monitors the leakage of the fluctuation suppression unit 101 and the liquid extraction unit 106 in real time at the bottom of the cover 105, thereby promptly detecting potential leakage hazards in the flow stabilization device 100 and preventing safety hazards and environmental pollution caused by chemical liquid leakage.

[0035] In this embodiment, the leakage monitoring unit 107 includes: a liquid level sensor 107a (e.g., Figure 4 As shown), it is set in the liquid collection tank 116; the signal processing module 107b (as shown) Figure 4 As shown in the figure, it is used to receive the signal from the liquid level sensor 107a and to detect whether there is leakage in the liquid collection tank 116.

[0036] In this embodiment, the liquid level sensor 107a is an electrode-type liquid level sensor, which detects the liquid level by measuring the change in conductivity between the electrodes. When liquid comes into contact with the electrodes, it changes the conductivity between the electrodes, thereby achieving liquid level detection. In other embodiments, the liquid level sensor can also be a photoelectric liquid level sensor or an ultrasonic liquid level sensor.

[0037] In this embodiment, the first pipe 108 is connected to the first inlet end 103 and is used to introduce chemical liquid into the fluctuation suppression unit 101.

[0038] The first pipe 108 serves as the liquid inlet channel of the fluctuation suppression unit 101. It delivers chemical liquid through its connection with the first inlet end 103, providing an input path for chemical liquid to the entire flow stabilization device 100.

[0039] Specifically, the first pipe 108 serves as a delivery channel and is connected to the buffer tank of the fluctuation suppression unit 101 to ensure that the chemical liquid can be stably delivered to the containment space of the fluctuation suppression unit 101.

[0040] In this embodiment, the material of the inner wall of the first pipe 108 includes one or more of perfluoroalkoxy and fluorinated ethylene propylene copolymers. As an example, the inner wall of the first pipe 108 is made of perfluoroalkoxy (PFA) to ensure that the cleanliness of the chemical liquid is not affected. Perfluoroalkoxy is a high-performance fluoropolymer with high chemical stability, does not easily react with other chemicals, and maintains the purity of the material.

[0041] As an example, the inner diameter of the first pipe 108 is 1.25 inches or 1.5 inches.

[0042] It should be noted that the first pipe 108 and the first inlet end 103 are sealed together. For example, a sealing ring may be used.

[0043] In this embodiment, the flow stabilizing device 100 further includes: a pipeline switch 113 (e.g., Figure 4 As shown), it is installed on the first pipe 108 and used to control the opening or closing of the first pipe 108; controller 102 (as shown) Figure 4 As shown, it is connected to the leakage monitoring unit 107 and the pipeline switch 113, and is used to disconnect the first pipeline 108 through the pipeline switch 113 when the leakage monitoring unit 107 detects leakage.

[0044] A pipe switch 113 is installed on the first pipe 108. The pipe switch 113 controls the opening or closing of the first pipe 108, thereby achieving precise control of the liquid flow. Figure 4 As shown, the controller 102 is electrically connected to both the leakage monitoring unit 107 and the pipeline switch 113, forming a closed-loop control system. When leakage is detected in the fluctuation suppression unit 101 and the liquid extraction unit 106, the pipeline switch 113, under the control of the controller 102, promptly cuts off the chemical liquid supply to prevent safety hazards and environmental pollution caused by chemical liquid leakage. This enables the flow stabilizing device 100 to have self-protection capabilities during operation, which helps ensure the safety and reliability of the entire flow stabilizing device 100.

[0045] In this embodiment, the pipeline switch 113 is a solenoid valve. The pipeline switch 113, the controller 102, and the leakage monitoring unit 107 form a safety control loop.

[0046] The fluctuation suppression unit 101 includes a positive pressure unit (not shown in the figure), which is disposed on the top of the fluctuation suppression unit 101 and communicates with the containment space, for introducing inert gas into the fluctuation suppression unit 101 to maintain a positive pressure environment in the containment space.

[0047] The positive pressure unit is located at the top of the fluctuation suppression unit 101 and communicates with the containment space. By introducing inert gas into the fluctuation suppression unit 101, a stable positive pressure environment is formed within the fluctuation suppression unit 101, thereby preventing particulate contaminants from the external environment from entering the system. This effectively protects the cleanliness of the chemical liquid, making the particle test data more accurate and reliable, and improving the accuracy of particle counting.

[0048] In this embodiment, the positive pressure unit includes: a gas storage unit for storing inert gas; a second pipe 109 disposed between the gas storage unit and the fluctuation suppression unit 101 for connecting the fluctuation suppression unit 101 and the gas storage unit, and for introducing inert gas from the gas storage unit into the fluctuation suppression unit 101; and a pressure monitoring unit disposed at the top of the second pipe 109 or the fluctuation suppression unit 101 for monitoring the pressure state within the fluctuation suppression unit 101.

[0049] The gas storage unit is used to store inert gas. The gas storage unit introduces the inert gas into the fluctuation suppression unit 101 through the second pipe 109, thereby forming a stable positive pressure environment in the containment space.

[0050] As an example, the gas storage unit includes a pressure regulating valve for controlling the pressure and flow rate of the inert gas supplied to the fluctuation suppression unit 101. Secondly, the gas storage unit should also include a safety pressure relief device to prevent excessive internal pressure from causing safety hazards.

[0051] It should also be noted that the gas storage unit works in conjunction with the pressure monitoring unit to adjust the gas output based on the pressure monitoring data, thereby maintaining the stability of the pressure in the storage space.

[0052] The second pipe 109 serves as an inert gas transmission channel, connecting the gas storage unit and the fluctuation suppression unit 101, thereby enabling the directional delivery of inert gas and establishing a stable positive pressure environment in the containment space.

[0053] In this embodiment, the inner wall of the second pipe 109 is made of at least one or more materials selected from perfluoroalkoxy and fluorinated ethylene propylene copolymers. Specifically, the material of the inner wall of the second pipe 109 is perfluoroalkoxy (PFA) to ensure that the cleanliness of the chemical liquid is not affected. Perfluoroalkoxy is a high-performance fluoropolymer with high chemical stability, does not easily react with other chemical substances, and maintains the purity of the material.

[0054] The pressure monitoring unit is used to monitor the pressure status to ensure the normal operation of the flow stabilizing device 100.

[0055] As an example, the pressure monitoring unit is used to monitor the pressure status. When installed on the second pipeline 109, it can directly monitor the delivery pressure of the inert gas. When installed on top of the fluctuation suppression unit 101, it can directly monitor the actual pressure status inside the device.

[0056] It should be noted that inert gases include one or more of nitrogen, helium, argon, and neon.

[0057] It should also be noted that the second pipe 109 is located at the top of the buffer tank. The second pipe 109 is located at the top of the buffer tank to introduce inert gas from the top of the buffer tank into the containment space, which can form a stable gas-liquid stratification in the containment space, thus isolating the chemical liquid in the containment space from the impurity gas.

[0058] It should be noted that the top of the buffer tank trough also has a third inlet end 115 (e.g., Figure 3 As shown in the figure, the third inlet end 115 is connected to the second pipe 109.

[0059] It should be noted that the second pipe 109 and the third inlet end 115 are sealed together. For example, a sealing ring may be used.

[0060] The flow stabilizing device 100 further includes a third pipe 110, which is connected to the fluctuation suppression unit 101 and is used to introduce cleaning fluid into the fluctuation suppression unit 101.

[0061] The third pipe 110 serves as the cleaning channel for the fluctuation suppression unit 101. By introducing cleaning fluid into the fluctuation suppression unit 101, the containing space is cleaned and maintained, thereby ensuring the cleanliness of the chemical liquid in the fluctuation suppression unit 101. Therefore, it can effectively prevent the influence of residues inside the flow stabilization device 100 on subsequent particle testing, making the particle detection data more accurate and reliable, and helping to improve the working performance and service life of the entire flow stabilization device 100.

[0062] In this embodiment, the inner wall of the third pipe 110 is made of at least one or more materials selected from perfluoroalkoxy and fluorinated ethylene propylene copolymers. Specifically, the material of the inner wall of the third pipe 110 is perfluoroalkoxy to ensure that the cleanliness of the chemical liquid is not affected. Perfluoroalkoxy is a high-performance fluoropolymer with high chemical stability, does not easily react with other chemical substances, and maintains the purity of the material.

[0063] In this embodiment, the third pipe 110 is located at the top of the fluctuation suppression unit 101, that is, at the top of the buffer tank.

[0064] The third pipe 110 introduces cleaning fluid from the top of the buffer tank. Gravity allows the cleaning fluid to thoroughly flush the inner wall of the buffer tank, thereby improving cleaning efficiency and uniformity. This can more thoroughly remove any residues and particles that may be attached to the inner wall of the buffer tank, ensuring that subsequent testing will not be affected by residues and thus guaranteeing the accuracy of particle counting.

[0065] It should be noted that the top of the buffer tank also has a second inlet end 114, which is connected to the third pipe 110.

[0066] It should be noted that the third pipe 110 and the second inlet end 114 are sealed connections. For example, a sealing ring may be used.

[0067] In this embodiment, the cleaning solution includes pure water. The inclusion of pure water in the cleaning solution effectively removes residual substances from inside the system, thereby ensuring the purity of the chemical liquid. This reduces the impact of impurities on particle counting, making the measurement data more accurate and reliable.

[0068] In this embodiment, the liquid extraction unit 106 includes: a peristaltic pump 112; a fourth pipe 111, one end of which is connected to the peristaltic pump 112, and the other end of which is connected to the first outlet end 104 of the fluctuation suppression unit 101.

[0069] The peristaltic pump 112 is connected to the first outlet end 104 of the fluctuation suppression unit 101, so that the peristaltic pump 112 outputs the chemical liquid in the internal containment space of the fluctuation suppression unit 101 at a constant flow rate.

[0070] When the peristaltic pump 112 is working, the chemical liquid is isolated in the pump tube, so that the chemical liquid only comes into contact with the pump tube and will not affect the cleanliness of the chemical liquid. Therefore, when the peristaltic pump 112 is working, the suction component in the peristaltic pump will not come into direct contact with the chemical liquid, thus avoiding the impact of the peristaltic pump 112 on the cleanliness of the chemical liquid.

[0071] The fourth conduit 111 connects the first outlet end 104 of the fluctuation suppression unit 101 to the peristaltic pump 112, providing a stable flow channel for the chemical liquid, so that the peristaltic pump 112 can accurately control the flow rate of the liquid drawn from the fluctuation suppression unit 101.

[0072] In this embodiment, the inner wall of the fourth pipe 111 is made of at least one or more materials selected from perfluoroalkoxy and fluorinated ethylene propylene copolymers. Specifically, the material of the inner wall of the fourth pipe 111 is perfluoroalkoxy to ensure that the cleanliness of the chemical liquid is not affected. Perfluoroalkoxy is a high-performance fluoropolymer with high chemical stability, does not easily react with other chemical substances, and maintains the purity of the material.

[0073] It should be noted that the fourth pipe 111 and the first outlet end 104 are sealed together. For example, a sealing ring may be used.

[0074] refer to Figure 5 This utility model also provides a wet process equipment, including: a process chamber 300 for process treatment; a main pipeline 400 for transporting chemical liquid to the process chamber 300; a detection branch 500 connected to the main pipeline 400; a flow stabilizing device 100 disposed on the detection branch 500; and a particle analyzer 600 located on the detection branch 500 and connected to the liquid extraction unit 106 in the flow stabilizing device 100 for particle detection of the chemical liquid.

[0075] In the wet process equipment provided in this embodiment, the chemical liquid is directionally transported to the process chamber 300 via the main pipeline 400. The detection branch 500 is connected to the main pipeline 400, allowing the chemical liquid to enter. Because the flow stabilizing device 100 is installed on the detection branch 500, the chemical liquid, after passing through the flow stabilizing device 100, can enter the particle analyzer 600 at a stable flow rate. This avoids interference from changes in the chemical liquid flow rate on the detection results of the particle analyzer 600, improving the accuracy and reliability of the measurement data during real-time particle counting by the particle analyzer 600, and helping to ensure the quality of the supplied chemical system. Therefore, the wet process equipment can achieve real-time online particle detection while the wet process is proceeding normally.

[0076] The wet process equipment also includes a liquid supply device 200, which is connected to the main pipeline 400, and the liquid supply device 200 stores chemical liquid.

[0077] The liquid supply device 200 serves as the starting point of the wet process equipment, used to store the chemical liquid to be transported, and to transport the chemical liquid through the main pipeline 400.

[0078] In this embodiment, the liquid supply device 200 includes a liquid supply tank, and the top of the liquid supply tank is provided with a chemical liquid inlet and an inert gas inlet.

[0079] The liquid supply tank receives chemical liquid through the chemical liquid inlet at the top, providing a stable source of chemical liquid for the entire chemical liquid system. Inert gas is introduced into the tank through the inert gas inlet to maintain a positive pressure environment inside the tank. Therefore, it can effectively prevent external environment from contaminating and oxidizing the chemical liquid, so that the chemical liquid maintains a high purity state during storage and transportation.

[0080] In this embodiment, the liquid supply tank is an integrated structure.

[0081] In this embodiment, the inert gas can be one or more of nitrogen, helium, argon, and neon.

[0082] In this embodiment, the material of the inner wall of the liquid supply tank includes one or more of perfluoroalkoxy and fluorinated ethylene propylene copolymers.

[0083] In this embodiment, the process chamber 300 is located in the process machine.

[0084] The main pipeline 400 is used to establish a transmission path for chemical liquids between the process chamber 300 and the liquid supply device 200, so that the chemical liquids in the liquid supply device 200 are transmitted to the process chamber 300.

[0085] In this embodiment, the material of the inner wall of the main pipe 400 includes one or more of perfluoroalkoxy and fluorinated ethylene propylene copolymers.

[0086] The wet process equipment further includes: a transfer pump 700, installed on the main pipeline 400, for transferring chemical liquid from the liquid supply device 200 to the process chamber 300; a pressure regulator 800, installed on the main pipeline 400 and located between the transfer pump 700 and the process chamber 300, for stabilizing liquid pressure; and a filter 900, installed on the main pipeline 400 and located between the pressure regulator 800 and the process chamber 300, for filtering impurities in the liquid.

[0087] When the wet process equipment is in operation, the transfer pump 700 delivers the chemical liquid from the liquid supply device 200 to the main pipeline 400; then the chemical liquid enters the pressure regulator 800, which reduces the pressure fluctuation in the main pipeline 400 and maintains a stable output pressure of the chemical liquid; the filter 900 filters out impurities in the chemical liquid to avoid affecting the process treatment in the process chamber 300.

[0088] The detection branch 500 is connected to the main pipeline 400, which can divert a portion of the chemical liquid from the main pipeline 400 for particle detection. Particle detection can be completed without affecting the normal process, realizing real-time online inspection and ensuring the reliability of particle detection data.

[0089] In this embodiment, the detection branch 500 is connected to the main pipeline 400 between the filter 900 and the process chamber 300, so that the chemical liquid can enter the detection branch 500 after being filtered by the filter 900. This ensures that the liquid entering the detection branch 500 has been filtered to remove impurities, thereby ensuring the cleanliness of the chemical liquid. As a result, more accurate particle detection data can be provided, which is beneficial to improving the accuracy and reliability of the test data.

[0090] The flow stabilizing device 100 is installed on the detection branch 500, so that the chemical liquid can enter the particle analyzer 600 at a stable flow rate after passing through the flow stabilizing device 100. This avoids the influence of changes in the flow rate of the chemical liquid on the monitoring results of the particle analyzer 600, and makes the measurement data of the particle analyzer 600 real-time particle counting process authentic and reliable.

[0091] The particle analyzer 600 is connected to the liquid extraction unit 106 in the flow stabilizing device 100, thereby obtaining a chemical liquid with a stable flow rate. It can perform real-time online monitoring of particles in the chemical liquid when the flow rate of the chemical liquid is stable, so that the measurement data in the particle counting process is authentic and reliable, which is conducive to ensuring the liquid supply quality of the chemical supply system.

[0092] In this embodiment, the particle analyzer 600 also has a display screen for real-time monitoring of particle detection values ​​in chemical liquids. This not only facilitates data reading but also enables timely detection and response to abnormal situations during the testing process.

[0093] The wet process equipment also includes a flow meter 1000, which is installed on the detection branch 500 and is located between the liquid extraction unit 106 and the particle analyzer 600.

[0094] The flow meter 1000 is installed on the detection branch 500 and located between the liquid extraction unit 106 and the particle analyzer 600. This allows for real-time monitoring of the flow rate of the chemical liquid after being regulated by the liquid extraction unit 106, thereby ensuring that the flow rate of the liquid entering the particle analyzer 600 is stable. This effectively avoids interference caused by flow rate fluctuations in particle counting, making the measurement data during the particle counting process more accurate and reliable.

[0095] When acidic liquids are required in the process, the flow rate of the chemical liquid in the main pipeline 400 increases significantly, and the flow rate of the chemical liquid in the corresponding detection branch 500 also increases. The fluctuation suppression unit 101 in the flow stabilization device 100 receives the chemical liquid and buffers the chemical liquid entering it, effectively slowing down the inlet flow rate. Subsequently, the liquid extraction unit 106 controls the constant flow rate of the output chemical liquid, ensuring stable flow control before it enters the particle analyzer. This avoids interference from changes in the chemical liquid flow rate on the particle analyzer's detection results, thereby improving the accuracy and reliability of the measurement data during particle counting and ultimately achieving high-precision acquisition of particle detection data in the chemical liquid.

[0096] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A current stabilizing device, characterized in that, In the flow path of the chemical liquid, the flow stabilizing device is located upstream of the particle analyzer, and includes: The fluctuation suppression unit includes a receiving space and a first inlet and a first outlet communicating with the receiving space. The receiving space is used to receive chemical liquid from the first inlet, and the first outlet is used to output the chemical liquid in the receiving space. The liquid extraction unit, connected to the first outlet end, is used to extract the chemical liquid in the fluctuation suppression unit and output it to the particle analyzer.

2. The current stabilizing device as described in claim 1, characterized in that, The current stabilizing device also includes: A liquid collection tank, in which the fluctuation suppression unit and the liquid extraction unit are disposed, the liquid collection tank being used to collect leaked liquid; A cover is installed on the liquid collection tank; A leakage monitoring unit, located at the bottom of the cover, is used to detect whether there is leakage in the fluctuation suppression unit and the liquid extraction unit.

3. The current stabilizing device as described in claim 2, characterized in that, The leakage monitoring unit includes: A liquid level sensor is installed in the liquid collection tank; The signal processing module is used to receive the signal from the liquid level sensor and to detect whether there is leakage in the liquid collection tank.

4. The current stabilizing device as described in claim 2, characterized in that, The current stabilizing device also includes: The first pipe, connected to the first inlet end, is used to introduce chemical liquid into the wave suppression unit; A pipe switch is installed on the first pipe to control the opening or closing of the first pipe; a controller is connected to the leakage monitoring unit and the pipe switch to disconnect the first pipe through the pipe switch when the leakage monitoring unit detects leakage.

5. The current stabilizing device as described in claim 4, characterized in that, The material of the inner wall of the first pipe includes one or more of perfluoroalkoxy and fluorinated ethylene propylene copolymers.

6. The current stabilizing device as described in claim 1, characterized in that, The fluctuation suppression unit includes: A positive pressure unit is disposed on top of the fluctuation suppression unit and communicates with the containment space. It is used to introduce inert gas into the fluctuation suppression unit to maintain a positive pressure environment within the containment space.

7. The current stabilizing device as described in claim 6, characterized in that, The positive pressure unit includes: Gas storage unit for storing inert gases; The second pipe is disposed between the gas storage unit and the fluctuation suppression unit, for connecting the fluctuation suppression unit and the gas storage unit, and for introducing inert gas from the gas storage unit into the fluctuation suppression unit. A pressure monitoring unit is installed at the top of the second pipe or the fluctuation suppression unit to monitor the pressure status within the fluctuation suppression unit.

8. The current stabilizing device as described in claim 1, characterized in that, The current stabilizing device also includes: The third pipe is connected to the fluctuation suppression unit and is used to introduce cleaning fluid into the fluctuation suppression unit.

9. The current stabilizing device as described in claim 1, characterized in that, The fluctuation suppression unit includes a closed buffer tank. The accommodating space is located inside the buffer tank, the first inlet end is located at the top of the buffer tank, and the first outlet end is located at the top or bottom of the buffer tank.

10. The current stabilizing device as described in claim 1, characterized in that, The liquid extraction unit includes: Peristaltic pump; A fourth pipe, one end of which is connected to the peristaltic pump, and the other end of which is connected to the first outlet end of the fluctuation suppression unit.

11. A wet process equipment, characterized in that, include: Process chambers are used for processing; Main pipelines are used to transport chemical liquids to the process chambers; The detection branch is connected to the main pipeline; The current stabilizing device as described in any one of claims 1 to 10 is disposed on the detection branch; A particle analyzer, located on the detection branch and connected to the liquid extraction unit in the flow stabilization device, is used to detect particles in the chemical liquid.

12. The wet process equipment as described in claim 11, characterized in that: The wet process equipment also includes: A liquid supply device is connected to the main pipeline, and the liquid supply device stores chemical liquid. A delivery pump, installed on the main pipeline, is used to deliver chemical liquids from the supply device to the process chamber; A pressure regulator is installed on the main pipeline and located between the delivery pump and the process chamber to stabilize the liquid pressure; A filter is installed on the main pipeline and located between the pressure regulator and the process chamber to filter impurities in the liquid; The detection branch is connected to the main pipeline between the filter and the process chamber.

13. The wet process equipment as described in claim 11, characterized in that: The wet process equipment also includes: A flow meter is installed on the detection branch, and the flow meter is located between the liquid extraction unit and the particle analyzer.

Images