Electric heating type semiconductor waste gas purification device

Abstract

The utility model relates to the technical field of semiconductor waste gas treatment, in particular to an electric heating type semiconductor waste gas purification device which comprises a horizontal burner, the input end of the burner is used for being connected with a waste gas pipeline, the output end of the burner is connected with a cooler, and the output end of the cooler is connected with a vertical output device. An electric heating module is annularly arranged in the combustor, a plurality of flow control modules distributed at intervals along an airflow path in the combustor are arranged on the inner side of the electric heating module, each flow control module comprises a plurality of ribbons distributed in a staggered mode, hinge ends are arranged at the two ends of each ribbon in the length direction, and the outer side ends of the hinge ends are connected with the inner wall of the electric heating module. The ribbons are of a strip-shaped spiral blade structure, and the ribbons are made of heat conduction materials. The utility model is favorable for solving the problems that the gas flow in the combustion chamber of the existing vertical structure is in a continuous fluctuation state, the vertical combustor can cause the fluctuation of the combustion state, the gas is easily not fully combusted, and the purification effect is influenced.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor waste gas treatment technical field especially relates to a kind of electric heating type semiconductor waste gas purification device. BACKGROUND

[0002] With the rapid development of science and technology, the position of semiconductor industry in national economy is increasingly important. However, in the process of semiconductor production, various chemical reactions can produce a large amount of waste gas, which will cause serious harm to the environment if not treated up to standard.

[0003] For low concentration, large wind volume and complex component organic waste gas in semiconductor industry, the most widely used method is combustion method. For example, a combustion treatment device for semiconductor process waste gas is disclosed in patent CN221463844U, which includes a burner with a cylindrical structure. A combustion chamber is provided inside the burner. An air inlet tank is connected to the front end of the burner. A wind pipe is provided at one end of the air inlet tank. A lighter is connected to the air inlet tank. An internal cylinder is provided inside the air inlet tank. The air inlet tank forms a first gas chamber and a second gas chamber in the form of an annular cavity structure inside and outside the internal cylinder. The wind pipe is provided with a first wind pipe and a second wind pipe at one end of the first gas chamber and the second gas chamber, respectively. The first wind pipe is connected to an external semiconductor process waste gas discharge pipeline. The second wind pipe is connected to an external combustible gas pipeline. A flow guide structure is provided on the side wall of the first gas chamber and / or the second gas chamber. At present, most of the industry uses a burner structure similar to the above technical solution. The structure of this type of burner is vertically arranged. When a naked flame is provided inside, the waste gas is burned together with the auxiliary gas introduced by supplementing. However, the gas flow direction of the vertical combustion chamber is greatly dependent on the pressure control of the external wind pipe. The internal gas flow is in a state of continuous fluctuation during actual operation. In addition, the gas has a self-lifting tendency. The vertical combustion chamber can cause fluctuations in the combustion state, which can cause incomplete combustion of the gas and affect the purification effect. SUMMARY

[0004] The utility model provides a kind of electric heating type semiconductor waste gas purification device, it is favorable to solve the problem that the internal gas flow of the combustion chamber of existing vertical structure is in the state of continuous fluctuation. The vertical combustion chamber can cause fluctuations in the combustion state, which can cause incomplete combustion of the gas and affect the purification effect.

[0005] The utility model is implemented as follows:

[0006] The utility model provides an electric heating type semiconductor waste gas purification device, including horizontal combustor, the input end of combustor is used for connecting the waste gas pipeline, the output end of combustor is connected with cooler, and the output end of cooler is connected with the vertical output ware, the inside of combustor is equipped with electric heating module, and the inside of electric heating module is equipped with a plurality of flow control module that is spaced apart along the airflow path in combustor, and flow control module includes a plurality of staggered distribution ribbon, and the length direction both ends of ribbon are equipped with articulated end, and the outside end of articulated end is connected with the inner wall of electric heating module, the ribbon is the strip spiral blade structure of ribbon being made of heat conducting material.

[0007] On the basis of the above technical scheme, the combustor includes a horizontal shell, the left and right sides of the shell are respectively an air inlet end and an air outlet end, the middle part of the shell is a rectangular cylinder structure, and the shell is provided with a square-to-round structure at the air inlet end and the air outlet end.

[0008] On the basis of the above technical scheme, the air inlet end is provided with an igniter.

[0009] On the basis of the above technical scheme, the inside of the middle part of the shell is provided with an inner cylinder, the outer wall of the inner cylinder is attached to the inner wall of the shell, the inner cylinder comprises an outer shell, an electric heating layer and an inner shell from outside to inside, and the flow control module is connected to the inner wall of the inner shell.

[0010] On the basis of the above technical scheme, the electric heating layer is uniformly laid with an electric heating wire with a temperature control module.

[0011] On the basis of the above technical scheme, the outer shell is a heat preservation structure, and the inner shell is a heat conduction structure.

[0012] On the basis of the above technical scheme, the articulated end is a universal ball head structure.

[0013] On the basis of the above technical scheme, the ribbon is provided with a side wing on both sides in the short side direction, and the outer side end of the side wing is a rounded corner structure.

[0014] Compared with the prior art, the utility model at least has the following advantages:

[0015] 1. The utility model adopts a horizontal combustor design, which is stable in structure and avoids the problems of airflow fluctuation and insufficient combustion of a vertical combustor. The airflow in the horizontal combustor is stable, which is conducive to achieving full combustion and efficient purification of waste gas.

[0016] 2. The utility model cooperates the use of the electric heating module and the flow control module to realize precise temperature control of the combustion chamber, reduce temperature fluctuation, reduce heat loss, improve heating efficiency, orderly control airflow, uniformly heat and effectively disturb waste gas, and improve mixing uniformity, combustion efficiency and purification effect. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to make the technical scheme of the embodiments of the present application clearer, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the following drawings only show some of the embodiments of the present application, and should not be considered as limiting the scope. For those skilled in the art, other related drawings can be obtained without creative effort based on the drawings.

[0018] Figure 1 It is a structural schematic diagram of an electric heating type semiconductor waste gas purification device.

[0019] Figure 2 It is a structural schematic diagram of an electric heating type semiconductor waste gas purification device. Figure 1 It is a structural schematic diagram of an electric heating type semiconductor waste gas purification device.

[0020] Figure 3 It is a structural schematic diagram of an electric heating type semiconductor waste gas purification device. Figure 2 It is a structural schematic diagram of an electric heating type semiconductor waste gas purification device.

[0021] Figure 4 It is a structural schematic diagram of an electric heating type semiconductor waste gas purification device. Figure 3 It is a structural schematic diagram of an electric heating type semiconductor waste gas purification device.

[0022] Figure 5 It is a structural schematic diagram of an electric heating type semiconductor waste gas purification device.

[0023] Figure 6 It is a structural schematic diagram of an electric heating type semiconductor waste gas purification device.

[0024] In the drawings, 100 is a burner, 101 is a shell, 102 is an air inlet end, 103 is an air outlet end, 104 is an igniter, 110 is an inner cylinder, 111 is an outer shell, 112 is an electric heating layer, 113 is an inner shell, 200 is a cooler, 300 is an output device, 400 is a flow control module, 410 is a ribbon, 411 is a hinged end, and 412 is a wing. DETAILED DESCRIPTION

[0025] In order to make the technical scheme of the embodiments of the present application clearer, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the following drawings only show some of the embodiments of the present application, and should not be considered as limiting the scope. For those skilled in the art, other related drawings can be obtained without creative effort based on the drawings.

[0026] In the description of the utility model, the terms "first", "second" are only for the purpose of description, and can not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include one or more features. In the description of the utility model, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0027] It should be noted that when an element is referred to as "fixed to" another element, it can be directly on another element or there can be a middle element. When an element is considered "connected" to another element, it can be directly connected to one element or there can be a middle element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not indicate the only implementation.

[0028] The utility model will be further described in detail below in combination with the drawings and specific embodiments.

[0029] Embodiment 1: combination Figures 1-5 The embodiment discloses an electric heating type semiconductor waste gas purification device, which realizes efficient purification treatment of waste gas generated in the semiconductor production process through electric heating and a specially designed flow control module 400, and solves the problems of gas flow fluctuation and insufficient combustion of the existing technology.

[0030] The device comprises a horizontal combustor 100, the input end of the combustor 100 is used for connecting the waste gas pipeline, the output end of the combustor 100 is connected with a cooler 200, and the output end of the cooler 200 is connected with a vertical output device 300. The combustor 100 is used for burning and purifying waste gas (or supplementing mixed nitrogen), the cooler 200 is used for cooling the combusted gas, and the cooled gas is discharged to the plant end for secondary treatment by the output device 300.

[0031] Specifically, as shown in Figure 2 The combustor 100 comprises a horizontal shell 101, the left and right sides of the shell 101 are respectively an air inlet end 102 and an air outlet end 103, the middle part of the shell 101 is a rectangular cylindrical structure, which provides a stable horizontal structure and also provides a suitable installation structure basis for the installation of the flow control module 400, and the shell 101 located at the air inlet end 102 and the air outlet end 103 is provided with a square-to-round structure to adapt to the shape of the connecting interface of the waste gas pipeline and the cooler 200.

[0032] The air inlet end 102 is provided with an igniter 104 for igniting the combustible components in the waste gas entering the combustor 100.

[0033] The electric heating module is arranged inside the combustor 100, which is used for precise temperature control of the inner cavity of the combustor 100, reduces temperature fluctuation and heat loss, and improves heating efficiency. Specifically, the electric heating module includes an inner cylinder 110 arranged at the inner side of the middle part of the shell 101, the outer wall of the inner cylinder 110 is arranged in close contact with the inner wall of the shell 101, and the inner cylinder 110 includes an outer shell 111, an electric heating layer 112 and an inner shell 113 from outside to inside. The electric heating layer 112 is uniformly laid with electric heating wires with temperature control modules, which is used for heating and temperature control of the inner cavity and exhaust gas. The outer shell 111 is a heat preservation structure made of heat preservation cotton, and the inner shell 113 is a heat conducting structure made of ceramic, which is used for transmitting the heat generated by the electric heating layer 112 to the inner side area.

[0034] The inner side of the electric heating module is provided with four groups of flow control modules 400 distributed along the airflow path inside the combustor 100, which are used for disturbing airflow, improving mixing uniformity and combustion efficiency, and the flow control modules 400 are connected to the inner wall of the inner shell 113.

[0035] Further, the flow control module 400 includes a plurality of staggered distribution of ribbons 410, the length direction both ends of the ribbon 410 are provided with hinged end 411, the hinged end 411 is a universal ball head structure, the outer side end of the hinged end 411 is connected with the inner wall of the electric heating module, the hinged end 411 can also make the ribbon 410 have enough freedom degree on the basis of connecting function, the ribbon 410 is a strip spiral blade structure made of heat conducting material (ceramic), which can rotate under the action of airflow, so as to disturb airflow, improve mixing uniformity and combustion efficiency. It should be noted that the ribbon 410 in the embodiment has heat conduction performance, so that the heat generated by the electric heating module is uniformly conducted and distributed on the airflow path, that is, on the basis of controlling the flow rate and distributing the uniform gas, the heating uniformity can also be improved, which is helpful to provide stable temperature conditions for high temperature decomposition reaction of harmful substances in exhaust gas.

[0036] Embodiment 2: on the basis of embodiment 1, combined with Figure 6 As shown in the figure, in the embodiment, the both sides of the short side direction of the ribbon 410 are provided with side wings 412, the outer side end of the side wing 412 is a rounded corner structure, the side wing 412 can further increase the disturbance effect of the ribbon 410 on the airflow by increasing the transverse area of the ribbon 410 when facing the airflow direction, helping the ribbon 410 to obtain more rotary driving force, and at the same time, when facing the airflow direction, it can reduce the friction resistance between the ribbon 410 and the airflow, and has the effect of flow guiding.

[0037] The above examples are only used to illustrate the technical solutions of the present application, and are not intended to limit them; although the present application has been described in detail with reference to the foregoing examples, those skilled in the art should understand that the technical solutions recorded in the foregoing examples can still be modified, or some technical features therein can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. An electrothermal semiconductor waste gas purification device, characterized in that, The device includes a horizontal burner (100), the input end of which is connected to an exhaust gas pipeline, and the output end of which is connected to a cooler (200). The output end of the cooler (200) is connected to a vertical output device (300). An electric heating module is arranged in a ring inside the burner (100). Several flow control modules (400) are arranged at intervals along the internal airflow path of the burner (100) on the inner side of the electric heating module. The flow control module (400) includes several staggered ribbons (410). The ribbons (410) have hinged ends (411) at both ends in the length direction. The outer ends of the hinged ends (411) are connected to the inner wall of the electric heating module. The ribbons (410) are strip-shaped spiral blade structures made of thermally conductive material.

2. The electrothermal semiconductor waste gas purification device according to claim 1, characterized in that, The burner (100) includes a horizontal housing (101), with an air inlet (102) and an air outlet (103) on the left and right sides of the housing (101), respectively. The middle part of the housing (101) is a rectangular cylindrical structure, and the housing (101) has a square-to-round structure at the air inlet (102) and air outlet (103).

3. The electrothermal semiconductor waste gas purification device according to claim 2, characterized in that, The air intake end (102) is equipped with an igniter (104).

4. The electrothermal semiconductor waste gas purification device according to claim 2, characterized in that, The inner cylinder (110) is provided on the inner side of the middle part of the housing (101). The outer wall of the inner cylinder (110) is fitted to the inner wall of the housing (101). The inner cylinder (110) includes an outer shell (111), an electric heating layer (112) and an inner shell (113) from the outside to the inside. The flow control module (400) is connected to the inner wall of the inner shell (113).

5. The electrothermal semiconductor waste gas purification device according to claim 4, characterized in that, The electric heating layer (112) is uniformly filled with electric heating wires with temperature control modules.

6. The electrothermal semiconductor exhaust gas purification device according to claim 4, characterized in that, The outer shell (111) is a heat-insulating structure, and the inner shell (113) is a heat-conducting structure.

7. The electrothermal semiconductor waste gas purification device according to claim 1, characterized in that, The hinged end (411) is a universal ball joint structure.

8. The electrothermal semiconductor waste gas purification device according to claim 1, characterized in that, The ribbon (410) has side wings (412) on both sides in the short side direction, and the outer ends of the side wings (412) have rounded corners.

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