Coating device suitable for tantalum carbide CVD (Chemical Vapor Deposition) furnace

Abstract

The utility model discloses a coating device suitable for a tantalum carbide CVD furnace, which comprises a lifting rotating mechanism and a lifting tool which are connected with each other, the lifting tool is used for bearing a workpiece to be processed, and under the driving of the lifting rotating mechanism, the lifting tool drives the workpiece to rotate and lift so as to deposit on the surface of the workpiece to form a qualified coating. The lifting tool has the advantages of being compact in structure, convenient to operate, high in stability and the like, contact points between the workpiece and the lifting tool can be separated in the furnace production process, and a qualified coating is formed on the outer surface of the workpiece in all directions in the one-time machining process. The defect that a compact coating cannot be formed on a contact point due to the fact that the contact point between the workpiece and the tool cannot be separated in the prior art is overcome.

Description

TECHNICAL FIELD

[0001] The utility model relates to carbonized tantalum coating preparation technical field, specifically related to a kind of coating device suitable for carbonized tantalum CVD furnace. BACKGROUND

[0002] Carbonized tantalum coating material has high temperature resistance, corrosion resistance, high purity, high hardness, oxidation resistance and other excellent characteristics.In the semiconductor, aerospace, weapon equipment and other fields, it has broad application prospect.

[0003] Carbonized tantalum CVD process is that process gas reacts at high temperature, nucleates, grows and forms film on the surface of the product to be processed, and finally forms a dense coating.The existing preparation process mainly includes two kinds, one is that the product is placed on tool tray, bracket, and then carbonized tantalum CVD furnace is used to prepare carbonized tantalum coating product;The other is that the product is hung on the tool by molybdenum wire, and then carbonized tantalum CVD furnace is used to prepare carbonized tantalum coating product.

[0004] Because the existing carbonized tantalum CVD furnace loading device is a rotatable tray or bracket, the product to be processed is placed on the tray or hung on the bracket, but there is no relative displacement between the tray or bracket and the product.It can only be processed by two times, and the contact point of the product is changed by the second processing to ensure that the outer surface of the product is fully coated.The operation is complicated, and it is impossible to ensure that the contact point forms a dense coating. UTILITY MODEL CONTENT

[0005] The utility model solves the technical problem that the contact point between workpiece and tool cannot be separated in the prior art, which causes the contact point to be unable to form a dense coating, and provides a coating device suitable for carbonized tantalum CVD furnace, which has compact structure, convenient operation and high stability, and is beneficial to improve the coating quality.

[0006] In order to solve the above technical problems, the utility model adopts the technical scheme that:

[0007] A coating device suitable for carbonized tantalum CVD furnace, comprising a lifting and rotating mechanism and a lifting tool connected with each other, the lifting tool is used to carry the workpiece to be processed, under the driving of the lifting and rotating mechanism, the lifting tool drives the workpiece (300) to rotate and lift, so as to realize the workpiece surface deposition to form qualified coating.

[0008] As a further improvement of the utility model, the lifting and rotating mechanism comprises a lifting driving assembly and a rotating driving assembly; the lifting tool comprises a rotating table, a lifting base, a fixed support assembly and a lifting support assembly, the fixed support assembly and the lifting support assembly are both used for bearing workpieces; the rotating table is connected with the rotating driving assembly, the lifting base is nested in the rotating table and is connected with the lifting driving assembly; the fixed support assembly and the lifting support assembly are both arranged on the rotating table, and the lifting support assembly is connected with the lifting base; under the driving of the rotating driving assembly, the rotating table drives the fixed support assembly and the lifting support assembly to rotate synchronously; under the driving of the lifting driving assembly, the lifting base drives the lifting support assembly to lift, so as to realize that the fixed support assembly and the lifting support assembly alternately bear workpieces.

[0009] As a further improvement of the utility model, the fixed support assembly comprises a fixed plate, a fixed rod, fixed support points and a top plate, a plurality of through holes are formed in the top plate; the fixed plate is connected with the rotating table, one end of the fixed rod is locked and connected with the fixed plate through a nut, and the other end of the fixed rod can penetrate through the through holes; a plurality of fixed support points are arranged on the fixed rod; the lifting support assembly is located above the fixed plate, and the lifting base penetrates through the fixed plate and is connected with the lifting support assembly.

[0010] As a further improvement of the utility model, the lifting support assembly comprises a lifting plate, a lifting rod and lifting support points; the lifting base penetrates through the fixed plate and is fixedly connected with the lifting plate through bolts; one end of the lifting rod is locked and connected with the lifting plate through a nut, and the other end of the lifting rod can penetrate through the through holes, and the lifting rod is provided with the lifting support points; the lifting driving assembly drives the lifting base to lift, so that the lifting plate drives the lifting rod to lift, so as to realize that the lifting support points and the fixed support points alternately bear workpieces.

[0011] As a further improvement of the utility model, a plurality of fixed support points are uniformly distributed on the fixed rod in the vertical direction, and a plurality of lifting support points are uniformly distributed on the lifting rod in the vertical direction.

[0012] As a further improvement of the utility model, notches are formed in the side edges of the lifting plate, and the fixed rod penetrates in the notches.

[0013] As a further improvement of the utility model, the lifting driving assembly comprises a lifting speed reducer, a screw pair, a lifting shaft and a lifting jacking rod; the output end of the lifting speed reducer is connected with one end of the lifting shaft through the screw pair, and the other end of the lifting shaft is connected with the lifting base through the lifting jacking rod.

[0014] As a further improvement of the utility model, the rotating driving assembly comprises a rotating speed reducer and a rotating shaft, the output end of the rotating speed reducer is connected with one end of the rotating shaft, and the other end of the rotating shaft is connected with the rotating table; the lifting shaft is nested in the rotating shaft.

[0015] As a further improvement of this utility model, a bellows is provided between the rotating shaft and the rotating table, and the lifting rod is located inside the bellows.

[0016] As a further improvement of this utility model, a water-cooled protective sleeve is provided on the outside of the rotating shaft.

[0017] Compared with the prior art, the advantages of this utility model are:

[0018] 1. The coating device of this utility model, applicable to tantalum carbide CVD furnace, consists of a lifting and rotating mechanism and a lifting fixture as its main structure, which is compact and easy to operate. Furthermore, the lifting fixture supports the workpiece to be processed. Driven by the lifting and rotating mechanism, the lifting fixture can both rotate and lift the workpiece, so that the contact point between the workpiece and the lifting fixture is separated during the furnace production process. This allows the workpiece to form a qualified coating on all sides of its surface in one processing step, which significantly improves the preparation efficiency of tantalum carbide coating.

[0019] 2. This utility model discloses a coating device suitable for tantalum carbide CVD furnaces. By incorporating a fixed support assembly and a lifting support assembly within the lifting fixture, the workpiece is placed on a fixed fulcrum during production. The fixed fulcrum and the lifting fulcrum are not at the same point. Driven by the lifting and rotating mechanism, the workpiece rotates continuously, with the fixed and lifting fulcrums alternately supporting the workpiece, ultimately completing the production process. Because the workpiece's support points are constantly changing, all support points are fully exposed to the process gas environment, ensuring the formation of a qualified coating at each support point. This ultimately achieves the goal of coating the workpiece surface from all angles without any blind spots. Attached Figure Description

[0020] Figure 1 This is a schematic diagram illustrating the structural principle of the coating device in a specific embodiment of this utility model;

[0021] Figure 2 This is a schematic diagram of the structural principle of the lifting and rotating mechanism in a specific embodiment of this utility model;

[0022] Figure 3 This is one of the schematic diagrams illustrating the structural principle of the lifting device in a specific embodiment of this utility model; in the diagram, the lifting plate is in a low position;

[0023] Figure 4 This is the second schematic diagram of the structural principle of the lifting device in a specific embodiment of this utility model; in the diagram, the lifting plate is at a high position;

[0024] Figure 5 This is a schematic diagram of the three-dimensional structure of the lifting fixture in a specific embodiment of this utility model.

[0025] Legend: 100, lifting and rotating mechanism; 200, lifting tool; 300, workpiece; 400, debugging tool; 101, lifting and deceleration motor; 102, screw pair; 103, lifting shaft; 104, rotating deceleration motor; 105, water-cooled protective sleeve; 106, rotating shaft; 107, lifting ejector rod; 108, bellows; 201, rotating table; 202, fixed plate; 203, lifting base; 204, lifting plate; 2041, notch; 205, lifting rod; 206, lifting fulcrum; 207, fixed rod; 208, fixed fulcrum; 209, top plate; 2091, through hole; 210, bolt; 211, nut. DETAILED DESCRIPTION

[0026] The utility model will be further described below in combination with the drawings and specific preferred embodiments, but it does not limit the protection scope of the utility model.

[0027] In the description of the utility model, it should be understood that the orientation or positional relationship indicated by the terms“side”,“center”,“longitudinal”,“transverse”,“length”,“width”,“thickness”,“upper”,“lower”,“front”,“rear”,“left”,“right”,“vertical”,“horizontal”,“top”,“bottom”,“inner”,“outer”,“clockwise”,“counterclockwise”,“axial”,“radial”,“circumferential” are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0028] In addition, the terms“first” and“second” are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features, so that the features limited by“first” and“second” can explicitly or implicitly include one or more features, and in the description of the utility model, the meaning of“multiple” is two or more, unless otherwise explicitly and specifically limited.

[0029] EMBODIMENT

[0030] As Figures 1 to 5 shown, the coating device suitable for tantalum carbide CVD furnace of the utility model, including each other's lifting and rotating mechanism 100 and lifting tool 200 that connects, lifting tool 200 is used to carry the workpiece 300 of being handled.Under the drive of lifting and rotating mechanism 100, lifting tool 200 drives workpiece 300 to rotate and lift, to realize the surface deposition of workpiece 300 and form qualified coating.It can be understood that in actual production process, lifting and rotating mechanism 100 is located outside tantalum carbide CVD furnace, and lifting tool 200 is sealingly arranged inside tantalum carbide CVD furnace.

[0031] In the embodiment, the main structure of the coating device is composed of the lifting and rotating mechanism 100 and the lifting tool 200, which has the characteristics of compact structure and convenient operation. Further, the workpiece 300 to be processed is carried by the lifting tool 200, and under the driving of the lifting and rotating mechanism 100, the lifting tool 200 can drive the workpiece 300 to rotate and lift, so as to make the contact point between the workpiece 300 and the lifting tool 200 separate in the production process in the furnace, so that the workpiece 300 forms a qualified coating all around in one processing process, which significantly improves the preparation efficiency of the tantalum carbide coating.

[0032] In the embodiment, the lifting and rotating mechanism 100 includes a lifting driving assembly and a rotating driving assembly. As shown in Figure 3 , Figure 4 and Figure 5 , the lifting tool 200 includes a rotating table 201, a lifting base 203, a fixed support assembly and a lifting support assembly, and the fixed support assembly and the lifting support assembly are both used for carrying the workpiece 300. The rotating table 201 is connected with the rotating driving assembly, and the lifting base 203 is nested in the rotating table 201 and connected with the lifting driving assembly. The fixed support assembly and the lifting support assembly are both arranged on the rotating table 201, and the lifting support assembly is connected with the lifting base 203. Under the driving of the rotating driving assembly, the rotating table 201 drives the fixed support assembly and the lifting support assembly to rotate synchronously to drive the workpiece 300 to rotate; under the driving of the lifting driving assembly, the lifting base 203 drives the lifting support assembly to lift to realize that the fixed support assembly and the lifting support assembly alternately carry the workpiece 300.

[0033] As shown in Figure 5 , the fixed support assembly includes a fixed plate 202, a fixed rod 207, a fixed fulcrum 208 and a top plate 209, the top plate 209 is detachably arranged in the tantalum carbide CVD furnace, and a plurality of through holes 2091 are arranged on the top plate 209. The fixed plate 202 is connected with the rotating table 201, one end of the fixed rod 207 is locked and connected with the fixed plate 202 through a nut 211, and the other end of the fixed rod 207 can penetrate the through hole 2091. A plurality of fixed fulcrums 208 are arranged on the fixed rod 207, and the workpiece 300 is supported by the fixed fulcrums 208. The lifting support assembly is located above the fixed plate 202, and the lifting base 203 penetrates the fixed plate 202 and is connected with the lifting support assembly.

[0034] As shown in Figure 5As shown, the lifting support assembly includes a lifting plate 204, a lifting rod 205 and a lifting support point 206. The lifting base 203 penetrates the fixed plate 202 and is connected and fixed with the lifting plate 204 through a bolt 210. One end of the lifting rod 205 is locked and connected with the lifting plate 204 through a nut 211, and the other end of the lifting rod 205 can penetrate the through hole 2091. The lifting rod 205 is provided with the lifting support point 206, which supports the workpiece 300. The lifting drive assembly drives the lifting base 203 to lift, so that the lifting plate 204 drives the lifting rod 205 to lift, so as to realize the alternating bearing of the workpiece 300 by the lifting support point 206 and the fixed support point 208.

[0035] In the embodiment, the fixed rod 207 is uniformly provided with a plurality of fixed support points 208 in the vertical direction, and the lifting rod 205 is uniformly provided with a plurality of lifting support points 206 in the vertical direction, so as to realize the simultaneous generation of the tantalum carbide coating of a plurality of workpieces 300, thereby improving the production efficiency of the tantalum carbide CVD furnace. When the lifting tool 200 is in the initial state, the fixed support point 208 is located above the lifting support point 206, and the workpiece 300 is placed on the fixed support point 208. In the production process, the workpiece 300 is supported by the fixed support point 208 and the lifting support point 206, respectively, and the positions of the fixed support point 208 and the lifting support point 206 are different, so that the workpiece 300 can be rotated under the driving of the fixed support point 208 and the lifting support point 206. The position change of the workpiece 300 and the support point ensures that all support points can be deposited in the production process, and ensures that there is no dead angle in the coating on the surface of the workpiece 300.

[0036] As shown in the figure, Figure 5 The side edge of the lifting plate 204 is provided with a notch 2041, and the fixed rod 207 penetrates in the notch 2041. The lifting plate 204 does not interfere with the fixed rod 207 in the lifting process. Further, in order to improve the displacement accuracy of the lifting plate 204, a step surface can be arranged at both ends of the fixed rod 207. When the lifting plate 204 rises to touch the step surface at the lower end of the fixed rod 207, it indicates that the lifting plate 204 has risen to the limit position. When the lifting plate 204 descends to touch the step surface at the upper end of the fixed rod 207, it indicates that the lifting plate 204 has descended to the limit position, so as to prevent the displacement of the lifting plate 204 from being too large and damaging the workpiece 300.

[0037] As shown in the figure, Figure 5 In the embodiment, a detachable debugging tool 400 is further arranged in the lifting tool 200, so as to facilitate the debugging of the lifting tool 200.

[0038] As shown in the figure, Figure 2As shown, the lifting driving assembly comprises a lifting reduction motor 101, a screw pair 102, a lifting shaft 103 and a lifting top rod 107. The output end of the lifting reduction motor 101 is connected with one end of the lifting shaft 103 through the screw pair 102, and the other end of the lifting shaft 103 is connected with the lifting base 203 through the lifting top rod 107.

[0039] As shown, the rotating driving assembly comprises a rotating reduction motor 104 and a rotating shaft 106. The output end of the rotating reduction motor 104 is connected with one end of the rotating shaft 106, and the other end of the rotating shaft 106 is connected with the rotating table 201. The lifting shaft 103 is nested in the rotating shaft 106 and can rotate freely in the rotating shaft 106, realizing the outer layer rotation and the inner layer lifting. Figure 2

[0040] In this embodiment, the rotating shaft 106 and the rotating table 201 are provided with a bellows 108, and the lifting top rod 107 is located in the bellows 108, so as to realize the sealing arrangement of the lifting tool 200 in the internal part of the tantalum carbide CVD furnace.

[0041] In this embodiment, the rotating shaft 106 is provided with a water-cooling protective sleeve 105 outside. The rotating shaft 106 is water-cooled and cooled at the same time of operation, so as to improve the operation stability of the rotating shaft 106.

[0042] In this embodiment, during production, the lifting reduction motor 101 rotates forward or reversely, drives the screw pair 102 to make ascending or descending movement, the screw pair 102 drives the lifting shaft 103 to make ascending or descending movement in the rotating shaft 106, the lifting shaft 103 drives the lifting top rod and the lifting tool 200 to lift; the rotating reduction motor 104 rotates, drives the rotating shaft 106 to rotate in the water-cooling protective sleeve 105, the rotating shaft 106 is connected with the rotating table 201, drives the fixed plate 202 to rotate, the fixed plate 202 drives the lifting plate 204, the lifting rod 205, the lifting fulcrum 206, the fixed rod 207 and the fixed fulcrum 208 to rotate together, the fixed fulcrum 208 supports the workpiece 300 and rotates together with the workpiece 300; the lifting base 203 is connected with the lifting top rod 107 and drives the lifting plate 204 to make lifting movement, the lifting plate 204 drives the lifting rod 205 and the lifting fulcrum 206 to make lifting movement; as shown, when the lifting fulcrum 206 ascends, the workpiece 300 is supported, so that the workpiece 300 is separated from the fixed fulcrum 208; as shown, when the lifting fulcrum 206 descends, the workpiece 300 is separated from the lifting fulcrum 206 and is supported by the fixed fulcrum 208. Figure 4 Figure 3

[0043] ​​​In the embodiment, the fixed supporting assembly and the lifting supporting assembly are arranged in the lifting tool, the workpiece is placed on the fixed supporting point during production, the fixed supporting point and the lifting supporting point are not at the same point, the workpiece is continuously rotated under the driving of the lifting and rotating mechanism, the fixed supporting point and the lifting supporting point alternately support the workpiece, and finally the production process is completed. Since the supporting points of the workpiece are continuously changed, all the supporting points can be completely exposed to the process gas environment, qualified coating can be formed at the supporting points, and finally the purpose of forming the coating on the surface of the workpiece in all directions without dead angle is achieved.

[0044] The preferred embodiments of the utility model are described above, the protection scope of the utility model is not only limited to the above-mentioned embodiments, and all technical solutions belonging to the utility model idea are within the protection scope of the utility model. It should be noted that for ordinary skilled persons in the art, some improvements and decorations without departing from the principles of the utility model are also considered as the protection scope of the utility model.

Claims

1. A coating apparatus suitable for use in a tantalum carbide CVD furnace, characterized in that, The device comprises a lifting and rotating mechanism (100) and a lifting tool (200) connected with each other, the lifting tool (200) is used for carrying a workpiece (300) to be processed, under the driving of the lifting and rotating mechanism (100), the lifting tool (200) drives the workpiece (300) to rotate and lift, so as to realize the workpiece (300) surface deposition to form a qualified coating. The lifting and rotating mechanism (100) comprises a lifting driving assembly and a rotating driving assembly. The lifting tool (200) comprises a rotating table (201), a lifting base (203), a fixed support assembly and a lifting support assembly, the fixed support assembly and the lifting support assembly are both used for carrying the workpiece (300); the rotating table (201) is connected with the rotating driving assembly, the lifting base (203) is nested in the rotating table (201) and connected with the lifting driving assembly; the fixed support assembly and the lifting support assembly are both arranged on the rotating table (201), and the lifting support assembly is connected with the lifting base (203); under the driving of the rotating driving assembly, the rotating table (201) drives the fixed support assembly and the lifting support assembly to rotate synchronously; under the driving of the lifting driving assembly, the lifting base (203) drives the lifting support assembly to lift, so as to realize the fixed support assembly and the lifting support assembly alternately carrying the workpiece (300).

2. The coating apparatus suitable for use in a tantalum carbide CVD furnace according to claim 1, characterized in that, The fixed support assembly comprises a fixed plate (202), a fixed rod (207), a fixed fulcrum (208) and a top plate (209), a plurality of through holes (2091) are arranged on the top plate (209); the fixed plate (202) is connected with the rotating table (201), one end of the fixed rod (207) is locked and connected with the fixed plate (202) through a nut (211), and the other end of the fixed rod (207) can penetrate through the through hole (2091); a plurality of fixed fulcrums (208) are arranged on the fixed rod (207); the lifting support assembly is located above the fixed plate (202), and the lifting base (203) penetrates through the fixed plate (202) and is connected with the lifting support assembly.

3. The coating apparatus suitable for use in a CVD furnace for tantalum carbide according to claim 2, characterized in that, The lifting support assembly comprises a lifting plate (204), a lifting rod (205) and a lifting fulcrum (206); the lifting base (203) penetrates through the fixed plate (202) and is connected and fixed with the lifting plate (204) through a bolt (210); one end of the lifting rod (205) is locked and connected with the lifting plate (204) through a nut (211), and the other end of the lifting rod (205) can penetrate through the through hole (2091), and the lifting fulcrum (206) is arranged on the lifting rod (205); the lifting driving assembly drives the lifting base (203) to lift, so that the lifting plate (204) drives the lifting rod (205) to lift, so as to realize the lifting fulcrum (206) and the fixed fulcrum (208) alternately carrying the workpiece (300).

4. The coating apparatus suitable for use in a CVD furnace for tantalum carbide according to claim 3, characterized in that, A plurality of fixed fulcrums (208) are uniformly distributed on the fixed rod (207) in the vertical direction, and a plurality of lifting fulcrums (206) are uniformly distributed on the lifting rod (205) in the vertical direction.

5. The coating apparatus suitable for use in a CVD furnace for tantalum carbide according to claim 3, characterized in that, The lifting plate (204) is provided with a notch (2041) on the side, and the fixing rod (207) penetrates in the notch (2041).

6. The coating apparatus suitable for use in a CVD furnace for tantalum carbide according to claim 3, characterized in that, The lifting driving assembly comprises a lifting reduction motor (101), a screw pair (102), a lifting shaft (103) and a lifting top rod (107); the output end of the lifting reduction motor (101) is connected with one end of the lifting shaft (103) through the screw pair (102), and the other end of the lifting shaft (103) is connected with the lifting base (203) through the lifting top rod (107).

7. The coating apparatus suitable for use in a CVD furnace for tantalum carbide according to claim 6, characterized in that, The rotating driving assembly comprises a rotating reduction motor (104) and a rotating shaft (106), the output end of the rotating reduction motor (104) is connected with one end of the rotating shaft (106), and the other end of the rotating shaft (106) is connected with the rotating table (201); the lifting shaft (103) is nested in the rotating shaft (106).

8. The coating apparatus suitable for use in a CVD furnace for tantalum carbide according to claim 7, characterized in that, A bellows (108) is arranged between the rotating shaft (106) and the rotating table (201), and the lifting top rod (107) is located in the bellows (108).

9. The coating apparatus suitable for use in a CVD furnace for tantalum carbide according to claim 7, characterized in that, A water-cooling protective sleeve (105) is arranged outside the rotating shaft (106).

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