Correction device for high-and low-magnification camera system and die bonder
By designing a high- and low-magnification camera system correction device, the problem of insufficient positioning accuracy of a single camera was solved, achieving efficient and accurate wafer positioning and picking, and improving production efficiency and accuracy.
Patent Information
- Application Number
- CN202422943933.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-28
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2034-11-28
AI Technical Summary
The current technology uses single-camera positioning, which is not accurate enough to accurately locate the wafer.
The high- and low-magnification camera system correction device includes a first camera, a second camera, a high-magnification lens barrel, a low-magnification lens barrel, a vertical movement mechanism, an optical path reflector, and a drive device. Precise positioning is achieved through the combination of high- and low-magnification switching and the optical path reflector.
This improves production efficiency and precision, ensures consistent precision during each wafer pick-up, and achieves concentricity between the camera center and the raw material IC and wafer.
Smart Images
Figure CN223599949U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of die bonding technology, and in particular to a high- and low-magnification camera system correction device and a die bonding machine. Background Technology
[0002] In the field of die bonding technology, such as Figure 1 As shown, multiple wafers are arranged on a blue film, which is mounted on a wafer ring 3. The wafer ring 3 is mounted on a wafer movement stage, which includes a Y stage 4 and an X stage 5. During the wafer picking process, the camera 1, the wafer, and the ejector pin 6 must be in a straight line, and some require the same angle. The wafer is then picked up by a suction nozzle 2. Because the same angle is required, and it is impossible for every wafer on a single blue film to have the same angle, the wafer ring 3 is mostly positioned using only a single camera. This results in insufficient precision and inaccurate positioning. Utility Model Content
[0003] To address the problem of insufficient accuracy caused by single-camera positioning in existing technologies, this invention provides a high- and low-magnification camera system correction device.
[0004] This utility model provides a high- and low-magnification camera system correction device, including a first camera, a second camera, a high-magnification lens barrel, a low-magnification lens barrel, a vertical movement mechanism, a first driving device, a first optical path reflector, a second optical path reflector, and a light source. The first camera is mounted on the top of the high-magnification lens barrel, and the first optical path reflector is mounted on the bottom of the high-magnification lens barrel. The second camera is mounted on the top of the low-magnification lens barrel, and the second optical path reflector is mounted on the bottom of the low-magnification lens barrel. The first camera, the second camera, the high-magnification lens barrel, and the low-magnification lens barrel constitute a camera system. The camera system is mounted on the vertical movement mechanism, which is connected to the first driving device. The first driving device drives the vertical movement mechanism to move longitudinally, and the vertical movement mechanism drives the camera system to move vertically. The first optical path reflector and the second optical path reflector are used to reflect light paths so that the first camera and the second camera can form images.
[0005] As a further improvement of this utility model, the high and low magnification camera system correction device includes a translation optical path reflector mechanism and a second driving device. The translation optical path reflector mechanism is connected to the first optical path reflector and the second driving device respectively. The second driving device is used to drive the translation optical path reflector mechanism to move back and forth in the horizontal direction. The translation optical path reflector mechanism is used to drive the first optical path reflector to move back and forth in the horizontal direction.
[0006] As a further improvement of the utility model, the translation optical path mirror mechanism includes a first fixed plate, a second fixed plate provided with a first groove, the first fixed plate is provided with a first guide rail and a second guide rail on the front face, the first groove of the second fixed plate is clamped on the first guide rail and the second guide rail, and the second fixed plate can slide back and forth along the first guide rail and the second guide rail, and the second fixed plate is connected with the camera system and the second driving device respectively.
[0007] As a further improvement of the utility model, the light source includes a first light source, and the first light source is installed below the first optical path mirror.
[0008] As a further improvement of the utility model, the high-low magnification camera system correction device further includes a rotary optical path mirror mechanism, the rotary optical path mirror mechanism is a rotary motor, the rotary motor is connected with the first optical path mirror, and the rotary motor is used for driving the first optical path mirror to rotate so as to increase the light brightness.
[0009] As a further improvement of the utility model, the light source includes a second light source and a third light source, the second light source is installed on the high magnification lens barrel, and the third light source is installed on the low magnification lens barrel.
[0010] As a further improvement of the utility model, the first optical path mirror is an optical path prism.
[0011] As a further improvement of the utility model, the light source includes a fourth light source, and the fourth light source is installed on the low magnification lens barrel.
[0012] As a further improvement of the utility model, the vertical movement mechanism includes a third fixed plate and a sliding block, the third fixed plate is provided with a sliding rail, the sliding block is installed on the sliding rail, the sliding block is installed with the camera system on the front face, and the sliding block is connected with the first driving device; the first driving device and the second driving device are high-precision cross-cylinder electric platforms.
[0013] The utility model also discloses a kind of die bonder, which includes translation workbench and the high-low magnification camera system correction device of the utility model, and the high-low magnification camera system correction device is installed on the translation workbench.
[0014] As a further improvement of the utility model, the translation workbench includes a first translation workbench and a second translation workbench, the high-low magnification camera system correction device is installed on the first translation workbench or the second translation workbench, the second translation workbench is used to move target piece transversely to align the high-low magnification camera system correction device, and the first translation workbench is used to move target piece longitudinally to align the high-low magnification camera system correction device.
[0015] The high-low zoom camera precision correction device has the advantages that: 1. The high-low zoom camera precision correction device has stable packaging process, and greatly improves production efficiency and precision; 2. The high-low zoom camera precision correction device uses high-precision high-low zoom switching cameras to achieve the concentricity of the center of the camera and the raw material IC and wafer, and ensures the consistency of the precision when the suction nozzle sucks the wafer each time. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 is the background diagram of the utility model;
[0017] Figure 2 is the axial view of the high-low zoom camera system correction device of the first embodiment of the utility model;
[0018] Figure 3 is the right view of the high-low zoom camera system correction device of the first embodiment of the utility model;
[0019] Figure 4 is the left view of the high-low zoom camera system correction device of the second embodiment of the utility model;
[0020] Figure 5 is the front view of the high-low zoom camera system correction device of the second embodiment of the utility model;
[0021] Figure 6 is the right view of the high-low zoom camera system correction device of the third embodiment of the utility model;
[0022] Figure 7 is the front view of the high-low zoom camera system correction device of the third embodiment of the utility model. DETAILED DESCRIPTION
[0023] Figures 2-3The utility model discloses a first embodiment, this embodiment discloses a high low zoom camera system correction device includes: first camera 1, second camera 2, high power lens barrel 3, low power lens barrel 14, vertical moving mechanism, first drive arrangement 12, first light path mirror 5, second light path mirror 6, first light source 7, high power lens barrel 3 top end installs first camera 1, high power lens barrel 3 bottom end installs first light path mirror 5, low power lens barrel 14 top end installs second camera 2, low power lens barrel 14 bottom end installs second light path mirror 6, first camera 1, second camera 2, high power lens barrel 3, low power lens barrel 14 constitute camera system, and camera system is installed on vertical moving mechanism 8, and vertical moving mechanism 8 is connected with first drive arrangement 12, and first drive arrangement 12 drives vertical moving mechanism 8 longitudinal movement, and vertical moving mechanism 8 longitudinal movement will drive camera system to move up and down, and the high low zoom switching is realized through the change of light path, and first light path mirror 5,second light path mirror 6 are used for reflecting light path respectively, so as to divide the same target piece into two camera imaging, specifically: 1. first light path mirror 5 reflects the light path of target piece to second light path mirror 6, and then is reflected to low power lens barrel 14 through mirror 6 and forms an image on low power lens barrel 14;Second light path mirror 6 reflects the light path of target piece, and second light path mirror 6 reflects the light path of target piece through first light path mirror 5, and then the light path is directly reflected to low power lens barrel 14 through second light path mirror 6 and forms an image on low power lens barrel 14;2. the light path of target piece is directly reflected through first light path mirror 5 and forms an image on high power lens barrel 3;Because target piece is directly below first light path mirror 5, and first light path mirror 5 can be light-transmitting, so the light path of target piece is directly reflected through first light path mirror 5 and forms an image on high power lens barrel 3.
[0024] Vertical moving mechanism 8 includes third fixed plate 80, slider 81, is equipped with slide rail on third fixed plate 80, slider 81 is installed on the slide rail, slider 81 front installs camera system, translation light path mirror mechanism 4, first light source 7 is installed below first light path mirror 5, slider 81 is connected with first drive arrangement 12, first drive arrangement 12 drives slider 81 to move up and down, and simultaneously, drives the camera system, translation light path mirror mechanism 4, and first light path mirror 5, second light path mirror 6, first light source 7 installed on slider 81 to move up and down, to ensure the resolution of low power and high power imaging, ensure the consistency of precision.
[0025] First light path mirror 5, second light path mirror 6 are all triangle, and the inclination of reflecting surface is 45 degrees, and first light path mirror 5 on high power lens barrel 3 is reflected to second light path mirror 6 on low power lens barrel 14, and then to the imaging camera (second camera 2) on low power lens barrel 14 and forms an image.
[0026] The first driving device 12 and the second driving device 13 are high-precision cross-cylinder electric platforms, which are existing products.
[0027] The high-low zoom camera system correction device comprises a translation light path mirror mechanism 4 and a second driving device 13. The first light path mirror 5 is installed at the end of the translation light path mirror mechanism 4. The second driving device 13 is connected with the translation light path mirror mechanism 4. The second driving device 13 drives the translation light path mirror mechanism 4 to move back and forth along the horizontal direction, and drives the first light path mirror 5 to move back and forth along the horizontal direction at the same time. After the second driving device 13 drives the first light path mirror 5 installed on the translation light path mirror mechanism 4 to move outward, the first light path mirror 5 cannot reflect the light path of the light source to the second light path mirror 6, and the imaging light path changes. At this time, only the high zoom lens imaging is realized, so as to change the imaging light path and realize the switching of the high-low zoom lens.
[0028] The translation light path mirror mechanism 4 comprises a first fixed plate 40 and a second fixed plate 41 provided with a first groove. The front surface of the first fixed plate 40 is provided with a first guide rail 401 and a second guide rail 402. The first groove of the second fixed plate 41 is clamped on the first guide rail 401 and the second guide rail 402, and the second fixed plate 41 can slide back and forth along the first guide rail 401 and the second guide rail 402. The second fixed plate 41 is connected with the camera system and the second driving device 13 respectively. The second driving device 13 drives the second fixed plate 41 to move back and forth along the first guide rail 401 and the second guide rail 402.
[0029] The top of the first guide rail 401 and the bottom of the second guide rail 402 are respectively provided with a sliding groove. The upper and lower opposite surfaces of the first groove are respectively provided with protrusions corresponding to the sliding grooves. When the second driving device 13 drives the second fixed plate 41 to move left and right, the protrusions on the upper and lower surfaces of the first groove move left and right along the corresponding sliding grooves.
[0030] Figures 4-5The utility model discloses a second embodiment of the utility model, this embodiment discloses a high low zoom camera system correction device includes: first camera 1, second camera 2, high power lens barrel 3, low power lens barrel 14, vertical movement mechanism, first drive arrangement, first light path reflector 5, second light path reflector 6, first light source 7, high power lens barrel 3 top end installs first camera 1, high power lens barrel 3 bottom end installs first light path reflector 5, low power lens barrel 14 top end installs second camera 2, low power lens barrel 14 bottom end installs second light path reflector 6, first camera 1, second camera 2, high power lens barrel 3, low power lens barrel 14 constitute camera system, and high low lens barrel installs an imaging camera respectively, and camera system is installed on vertical movement mechanism 8, and vertical movement mechanism 8 is connected with first drive arrangement 12, and first drive arrangement 12 is used to drive vertical movement mechanism longitudinal movement, and vertical movement mechanism 8 longitudinal movement drives camera system to move up and down simultaneously, and first light path reflector 5 is used to reflect to second light path reflector 6 to low power lens barrel 14 on imaging.
[0031] Vertical movement mechanism 8 includes third fixed plate 80, slider 81, be equipped with slide rail on third fixed plate 80, slider 81 is installed on the slide rail, slider 81 front installs camera system, translation light path reflector mechanism 4, first light source 7 is installed below first light path reflector 5, slider 81 is connected with first drive arrangement 12, and first drive arrangement 12 drives slider 81 to move up and down simultaneously, will drive the camera system, rotating light path reflector mechanism, and first light path reflector 5, second light path reflector 6, first light source 7 moving up and down that are installed on slider 81, to ensure the resolution of low and high imaging, ensure the consistency of precision.
[0032] First light path reflector 5, second light path reflector 6 are all triangle, and the inclination of reflecting surface is 45 degrees, and first light path reflector 5 on high power lens barrel 3 is reflected to second light path reflector 6 on low power lens barrel 14, and then to low power lens barrel 14 imaging.
[0033] Rotating light path reflector mechanism is rotating motor 15, and rotating motor 15 is connected with first light path reflector 5, and rotating motor 15 drives first light path reflector 5 to rotate relative to second light path reflector 6, increases the light brightness, simultaneously, rotating motor 15 drives first light path reflector 5 to rotate by rotating, and first light path reflector 5 rotates and makes target piece light path change, to change target piece imaging light path to reach the switching of high and low zoom lens.
[0034] The high low zoom camera system correction device further includes second light source 9, third light source 10, second light source 9 is installed on high power lens barrel 3, and third light source 10 is installed on low power lens barrel 14.
[0035] The first driving device 12 and the second driving device 13 are high-precision cross-cylinder electric platforms, which are existing products.
[0036] Figures 6-7 The utility model discloses a third embodiment of the utility model, a kind of high-low zoom camera system correction device disclosed in the embodiment includes: first camera 1, second camera 2, high-power lens barrel 3, low-power lens barrel 14, vertical moving mechanism, first driving device, first light path mirror 5, second light path mirror 6, first light source 7, high-power lens barrel 3 top end installs first camera 1, high-power lens barrel 3 bottom end installs light path prism, low-power lens barrel 14 top end installs second camera 2, low-power lens barrel 14 bottom end installs second light path mirror 6, first camera 1, second camera 2, high-power lens barrel 3, low-power lens barrel 14 constitute camera system, camera system is installed on vertical moving mechanism 8, vertical moving mechanism 8 is connected with first driving device 12, first driving device 12 drives vertical moving mechanism longitudinal motion, while vertical moving mechanism 8 moves longitudinally, drives camera system to move up and down.
[0037] Vertical moving mechanism 8 includes third fixed plate 80, sliding block 81, third fixed plate 80 is equipped with slide rail, sliding block 81 is installed on slide rail, sliding block 81 front installs camera system, translation light path mirror mechanism 4, first light source 7 is installed below first light path mirror 5, sliding block 81 is connected with first driving device 12, while first driving device 12 drives sliding block 81 to move up and down, will drive camera system, light path prism, second light path mirror 6, first light source 7 installed on sliding block 81 to move up and down, to ensure the resolution of low-power and high-power imaging, ensure the consistency of precision.
[0038] In the embodiment, the fourth light source 11 installed in the low-power lens 3 is reflected to the high-power lens 4 through the light path prism to change the imaging light path to achieve simultaneous imaging of the high-low power lens. Specifically, the light source through the light path prism has two light paths, one is a 90-degree reflection light path, and the other is a straight-through light path. The fourth light source 11 is reflected to the low-power lens barrel 14 through the 90-degree reflection light path by the light path prism, and then imaged at the second camera 2. At the same time, the second light path mirror 6 reflects the light path of the target piece to the light path prism, and then reaches the high-power lens barrel 3 through the straight-through light path of the light path prism, and then imaged at the first camera 1. Thus, simultaneous imaging of the high-low power lens is achieved.
[0039] The imaging principle of the high-low zoom camera system correction device of the utility model is as follows:
[0040] The light source irradiates the same target (wafer) and reflects, first through the light path of the low-power lens barrel 14 to the second camera 2 to form an image, then the position is calculated by the imaging software of the second camera 2, and then the target (wafer) is moved to the imaging light path of the high-power lens barrel 3, and then imaged by the first camera 1 installed on the high-power lens barrel 3, and then the accurate position is calculated by the imaging software of the first camera 1.
[0041] The specific steps of the high-low-power camera system correction device are as follows:
[0042] 1. The low-power lens barrel 14 finds the target wafer in a large range: the target wafer is first found in a large range on the blue film arranged with multiple wafers by the low-power lens barrel 14, and then the found target wafer is photographed by the second camera 2 installed at the top end of the low-power lens barrel 14, and then the position of the wafer is calculated by the second camera 2 according to the picture, and the calculated result is transmitted to the wafer workbench, and the wafer workbench moves the wafer to the high-power lens barrel 3.
[0043] 2. The high-power lens barrel 3 accurately calculates the position of the target wafer: the first camera 1 installed on the high-power lens barrel 3 captures the image of the wafer and accurately calculates, and then the calculation result is sent to the wafer workbench, and then the calculation result of the first camera 1 is sent to the suction nozzle by the wafer workbench, and the suction nozzle can accurately suck the wafer according to the calculation result.
[0044] In the third embodiment, the high-low-power lens barrel simultaneously images, and in the process of simultaneous imaging, the low-power lens barrel 14 still transmits the position of the wafer to the wafer workbench, the wafer workbench moves the target piece under the high-power lens according to the position, the high-power lens barrel 3 directly transmits the calculated position to the wafer workbench, and the wafer workbench accurately moves the target piece to the position of the suction nozzle.
[0045] The first camera 1 and the second camera 2 are provided with imaging software, which is provided by the camera manufacturer.
[0046] The first light source 7, the second light source 9, the third light source 10 and the fourth light source 11 in the high-low-power camera system correction device are collectively referred to as light sources, and the light sources are arranged on the high-low-power camera system correction device to make the image clearer.
[0047] The utility model discloses a vertical moving mechanism 8 moves the camera, high-low-power lens barrel up and down, and the first light path mirror 5 is moved horizontally or the first light path mirror is rotated or the light path prism is adopted, to reach the maximum light quantity and the focus of clearer when high-low-power camera imaging, thereby ensuring the consistency of precision every time sucking.
[0048] The utility model discloses a kind of die bonder, and the die bonder includes translation workbench, and the high-low-power camera system correction device of the utility model, high-low-power camera system correction device is installed on translation workbench.
[0049] The translation stage comprises a first translation stage 16 and a second translation stage 17 mounted with the first translation stage 16, the high-low magnification camera system correction device is mounted above the first translation stage 16 or the second translation stage 17, the second translation stage 17 is used for moving the target piece (wafer) laterally to align the high-low magnification camera system correction device, the first translation stage 16 is used for moving the target piece (wafer) longitudinally to align the high-low magnification camera system correction device, the high-precision position alignment target piece of the high-low magnification double camera precision correction device is realized through the translation stage.
[0050] The high-low magnification double camera precision correction device has the advantages that: 1. The high-low magnification double camera precision correction device has stable packaging process, and greatly improves production efficiency and precision; 2. The high-low magnification double camera precision correction device realizes the center of the camera and the concentricity of the raw material IC and the wafer through the high-precision high-low magnification switching camera, and ensures the consistency of the precision when the suction nozzle sucks the wafer each time.
[0051] The above is a further detailed description of the utility model in combination with a specific preferred embodiment, and the specific implementation of the utility model cannot be limited to these descriptions. For ordinary skilled persons in the technical field to which the utility model belongs, a number of simple deductions or substitutions can be made without departing from the concept of the utility model, and all of them should be regarded as falling within the protection scope of the utility model.
Claims
1. A correction device for high and low magnification camera systems, characterized in that: The system includes a first camera (1), a second camera (2), a high-power lens barrel (3), a low-power lens barrel (14), a vertical movement mechanism (8), a first drive device (12), a first optical path reflector (5), a second optical path reflector (6), and a light source. The first camera (1) is mounted on the top of the high-power lens barrel (3), and the first optical path reflector (5) is mounted on the bottom of the high-power lens barrel (3). The second camera (2) is mounted on the top of the low-power lens barrel (14), and the second optical path reflector (6) is mounted on the bottom of the low-power lens barrel (14). The camera (2), the high-power lens barrel (3), and the low-power lens barrel (14) constitute a camera system. The camera system is mounted on the vertical moving mechanism (8). The vertical moving mechanism (8) is connected to the first driving device (12). The first driving device (12) is used to drive the vertical moving mechanism (8) to move longitudinally. The vertical moving mechanism (8) is used to drive the camera system to move up and down. The first optical path reflector (5) and the second optical path reflector (6) are used to reflect the optical path so that the first camera (1) and the second camera (2) can form images.
2. The high / low magnification camera system correction device according to claim 1, characterized in that: The high and low magnification camera system correction device includes a translation optical path reflector mechanism (4) and a second driving device (13). The translation optical path reflector mechanism (4) is connected to the first optical path reflector (5) and the second driving device (13) respectively. The second driving device (13) is used to drive the translation optical path reflector mechanism (4) to move back and forth in the horizontal direction. The translation optical path reflector mechanism (4) is used to drive the first optical path reflector (5) to move back and forth in the horizontal direction.
3. The high / low magnification camera system correction device according to claim 2, characterized in that: The translation optical path reflector mechanism (4) includes a first fixing plate (40) and a second fixing plate (41) with a first groove. The first fixing plate (40) has a first guide rail (401) and a second guide rail (402) on its front side. The first groove surface of the second fixing plate (41) is fitted onto the first guide rail (401) and the second guide rail (402). The second fixing plate (41) can slide back and forth along the first guide rail (401) and the second guide rail (402). The second fixing plate (41) is connected to the camera system and the second driving device (13) respectively.
4. The high / low magnification camera system correction device according to claim 1, characterized in that: The light source includes a first light source (7), which is installed below the first optical path reflector (5).
5. The high / low magnification camera system correction device according to claim 1, characterized in that: The high and low magnification camera system correction device also includes a rotating optical path reflector mechanism, which is a rotating motor (15). The rotating motor (15) is connected to the first optical path reflector (5). The rotating motor (15) is used to drive the first optical path reflector (5) to rotate, so as to increase the light intake.
6. The high / low magnification camera system correction device according to claim 5, characterized in that: The light source includes a second light source (9) and a third light source (10). The second light source (9) is mounted on the high-power lens barrel (3), and the third light source (10) is mounted on the low-power lens barrel (14).
7. The high / low magnification camera system correction device according to claim 1, characterized in that: The first optical path reflector (5) is an optical path prism.
8. The high / low magnification camera system correction device according to claim 7, characterized in that: The light source includes a fourth light source (11), which is mounted on the low-magnification lens barrel (14).
9. The high / low magnification camera system correction device according to claim 2, characterized in that: The vertical moving mechanism (8) includes a third fixed plate (80) and a slider (81). The third fixed plate (80) is provided with a slide rail, and the slider (81) is mounted on the slide rail. The camera system is mounted on the front of the slider (81), and the slider (81) is connected to the first driving device (12). The first driving device (12) and the second driving device (13) are high-precision cross-cylindrical electric platforms.
10. A die bonder, characterized in that: The die bonder includes a translation stage and a high / low magnification camera system correction device as described in any one of claims 1-9, wherein the high / low magnification camera system correction device is mounted on the translation stage.
11. The die bonder according to claim 10, characterized in that: The translation worktable includes a first translation worktable (16) and a second translation worktable (17). The high and low magnification camera system correction device is installed on the first translation worktable (16) or the second translation worktable (17). The second translation worktable (17) is used to move the target component laterally to align with the high and low magnification camera system correction device, and the first translation worktable (16) is used to move the target component longitudinally to align with the high and low magnification camera system correction device.