Magnetron sputtering and crucible multifunctional coating equipment

Abstract

The utility model provides magnetron sputtering and crucible multifunctional coating equipment, and belongs to the field of film coating equipment. A magnetron sputtering device, a film rolling device and a rotating mechanism are arranged in a vacuum evaporation operation cavity of the equipment, the rotating mechanism comprises a fixed seat, a rotary table and a gear ring, and a plurality of crucibles are mounted at the top of the rotary table. According to the utility model, the rotating mechanism is arranged to enable the turntable to rotate and drive all the crucibles to rotate, so that the crucibles after evaporation coating processing are moved and the next crucible is rotated to an evaporation operation station, and the operation is repeated, so that a plurality of crucibles can be continuously adopted to perform evaporation coating operation processing after one-time vacuumizing; and different crucibles can adopt different coating materials, so that layered coating of various materials can be completed through one-time operation, or different materials are adopted for respective coating operation of a roll of film in sections, and the processing efficiency is remarkably improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of crucible coating, specifically, it relates to magnetron sputtering, crucible multifunctional coating equipment. BACKGROUND

[0002] The coating mode in the prior art is roughly divided into two kinds, one is to carry out coating through the mode of magnetron sputtering, and the working principle is to inject inert gas into a vacuum chamber, to carry out discharge bombardment on a metal target under high pressure, to knock out metal atoms to realize coating, and the other is to carry out coating through crucible thermal evaporation, and the metal material in the crucible is melted and evaporated through resistance heating to realize coating.

[0003] When the existing equipment is used, usually, the single processing process only involves a single coating material, and no matter the mode of magnetron sputtering or the mode of crucible thermal evaporation, the processing environment is relatively harsh, and the processing environment needs to be carried out in a vacuum environment, if the film needs to be sputtered and coated or evaporated and coated with different materials, it needs to be opened multiple times to replace different coating materials, and frequent vacuumizing operation is needed, which is a load on the equipment and the workers. UTILITY MODEL CONTENT

[0004] In order to make up for the above shortcomings, the utility model provides a magnetron sputtering, crucible multifunctional coating equipment which overcomes the above technical problems or at least partially solves the above problems.

[0005] The utility model is realized as follows:

[0006] The utility model provides magnetron sputtering, crucible multifunctional coating equipment, including vacuum evaporation operation cavity, the vacuum evaporation operation cavity is installed with magnetron sputtering device and take off and on film device, the take off and on film device includes take off and on drive device, take film roller and put film roller, take off and on drive device drives take film roller and put film roller to take off and on film, the magnetron sputtering device is the thin film sputtering coating between take film roller and put film roller, and it is characterized in that: the vacuum evaporation operation cavity still is provided with crucible evaporation mechanism and rotating mechanism, the crucible evaporation mechanism includes several crucibles and heating equipment, the rotating mechanism includes the fixed seat of fixed installation in the inner wall bottom of vacuum evaporation operation cavity, the top of fixed seat is rotatably installed with rotary table, the top of rotary table is provided with several placing grooves, and the placing groove is used to place the crucible;Rotary drive mechanism is installed in the rotary table, and the rotary drive mechanism drives the rotary table to rotate and makes different crucibles be in evaporation coating station, and the crucible evaporation mechanism adopts the crucible in evaporation coating station to evaporate and coat the thin film between take film roller and put film roller.

[0007] In a preferred scheme, the rotating driving mechanism comprises a gear ring rotatably installed in the rotating table, the top of the gear ring is fixedly installed with a driving shaft, the inside of the rotating table is provided with a driving groove, the driving shaft is slidably sleeved in the inside of the driving groove, the inner wall of the gear ring is fixedly installed with a first connecting plate, the bottom of the first connecting plate is fixedly installed with a driving rod, the center of the driving rod coincides with the center of the gear ring, the inside of the fixed seat is fixedly installed with a motor, and the output end of the motor is fixedly connected with the bottom of the driving rod.

[0008] In a preferred scheme, the inside of the placing groove is provided with a linkage clamping mechanism, the linkage clamping mechanism comprises a plurality of sliding grooves, and the sliding grooves are arranged in the bottom of the inner wall of the placing groove.

[0009] In a preferred scheme, the inside of the sliding groove is slidably sleeved with a sliding block, and the top of the sliding block is fixedly installed with a clamping block.

[0010] In a preferred scheme, the inside of the rotating table is rotatably installed with a plurality of rotating discs, and the number of the rotating discs is consistent with the number of the placing grooves.

[0011] In a preferred scheme, the top of the rotating disc is provided with an arc-shaped groove, the inside of the arc-shaped groove is slidably sleeved with a sliding shaft, and the top of the sliding shaft is fixedly connected with the bottom of the sliding block.

[0012] In a preferred scheme, the inner wall of the rotating disc is fixedly installed with a second connecting plate, the bottom of the second connecting plate is fixedly installed with a follow-up rod, and the center of the follow-up rod coincides with the center of the rotating disc.

[0013] In a preferred scheme, the bottom of the follow-up rod is fixedly installed with a gear, and the gear is in meshing connection with the gear ring.

[0014] The magnetic control sputtering and crucible multifunctional coating equipment has the following beneficial effects:

[0015] 1. The rotating mechanism is arranged, the driving shaft is located at one end of the driving groove in the initial state, the inner wall of the driving groove is extruded after the driving shaft moves to the other end of the driving groove, so that the rotating table rotates and drives all the crucibles to rotate, the processed crucible moves, the next crucible rotates to the evaporation operation station, and the above process is repeated, so that a plurality of crucibles can be used for evaporation coating operation processing after one-time vacuumization, different coating materials can be used for different crucibles, one-time operation can complete layered coating of multiple materials, or different materials are used for segmented coating operation of one roll of film, and the processing efficiency is significantly improved.

[0016] 2. By setting linkage clamping mechanism, when the rotating disc rotates, the inner wall of the arc-shaped groove causes extrusion to the sliding shaft, through the cooperation of the sliding groove, the sliding block moves radially from the outside to the inside of the rotating disc, since the sliding groove and the sliding block are provided with multiple, the sliding block drives the clamping block to clamp the crucible, and the elastic pad is installed on the clamping block, avoiding damage to the crucible caused by hard clamping. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments, and it should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation to the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0018] Fig. 1 is the overall structure schematic view provided by the embodiments of the present application.

[0019] Fig. 2 is the partial sectional view of the fixed seat and the rotating table provided by the embodiments of the present application.

[0020] Fig. 3 is the partial sectional view of the rotating table provided by the embodiments of the present application.

[0021] Fig. 4 is the exploded view of the sliding shaft and the arc-shaped groove provided by the embodiments of the present application.

[0022] In the figure: 1, vacuum evaporation operation cavity; 201, fixed seat; 202, rotating table; 203, placing groove; 204, crucible; 205, gear ring; 206, driving shaft; 207, driving groove; 208, first connecting plate; 209, driving rod; 210, motor; 301, sliding groove; 302, sliding block; 303, clamping block; 304, rotating disc; 305, arc-shaped groove; 306, sliding shaft; 307, second connecting plate; 308, follow-up rod; 309, gear. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical scheme in the embodiments of the present application, obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the present application.

[0024] Embodiment: refer to Figs. 1-4The utility model provides a technical scheme: magnetron sputtering, crucible multifunctional coating equipment, including vacuum evaporation work cavity 1, vacuum evaporation work cavity 1 installs magnetron sputtering device and take -off device in, the take -off device includes take -off drive arrangement, take -off roll and roll, take -off drive arrangement drives take -off roll and roll take -off film, the magnetron sputtering device is the film sputtering coating between take -off roll and roll, vacuum evaporation work cavity 1 still be provided with crucible evaporation mechanism and rotating mechanism, the crucible evaporation mechanism includes several crucible 204 and heating equipment, the rotating mechanism includes the fixed seat 201 of fixed installation in the inner wall bottom of vacuum evaporation work cavity 1, the top rotation of fixed seat 201 is installed with rotary table 202, the top of rotary table 202 is set with several placing grooves 203, and the placing groove 203 is used to place crucible 204, the rotary drive mechanism is installed in rotary table 202, and the rotary drive mechanism drives rotary table rotation and makes different crucible be in evaporation coating station, the crucible evaporation mechanism uses the crucible in evaporation coating station to evaporate the film coating between take -off roll and roll of film. The heating equipment of crucible, magnetron sputtering device and take -off device are all current conventional equipment, not shown in the drawing.

[0025] With reference to Figs. 1-4 The rotating drive mechanism includes a gear ring 205 rotatably installed in the rotary table 202, a drive shaft 206 fixedly installed on the top of the gear ring 205, a drive groove 207 formed in the interior of the rotary table 202, the drive shaft 206 slidingly sleeved in the interior of the drive groove 207, a first connecting plate 208 fixedly installed on the inner wall of the gear ring 205, a drive rod 209 fixedly installed on the bottom of the first connecting plate 208, the center of the drive rod 209 coincides with the center of the gear ring 205, a motor 210 fixedly installed in the interior of the fixed seat 201, and the output end of the motor 210 fixedly connected with the bottom of the drive rod 209. By setting the drive rod 209, the staff starts the motor 210 to drive the drive rod 209 to rotate, and the first connecting plate 208 provides driving force for the rotation of the gear ring 205.

[0026] The worker places multiple crucibles 204 and coating materials in the inside of the placing groove 203, starts the vacuum pumping system to pump the inside of the vacuum evaporation coating work chamber 1, then drives the resistance heating system to heat the solid evaporation material to a temperature at which a certain vapor pressure is generated, and then generates a vapor cloud. The vapor cloud collides with the substrate to generate a thin film attached to the substrate. When one of the crucibles 204 is processed, the gear ring 205 is rotated to drive the driving shaft 206 to rotate. In the initial state, the driving shaft 206 is located at one end of the driving groove 207. When the driving shaft 206 moves to the other end of the driving groove 207 and continues to rotate, the inner wall of the driving groove 207 is extruded, thereby rotating the rotary table 202 and driving all the crucibles 204 to rotate, so that the processed crucible 204 moves, and the next crucible 204 rotates to the evaporation work station. In this way, multiple crucibles can be used for evaporation coating work processing after one-time pumping. Different crucibles can use different coating materials to achieve one-time work to complete multi-material layered coating, or one roll of film is segmented and coated with different materials. The processing efficiency is significantly improved.

[0027] It is worth noting that the vacuum evaporation coating work chamber 1 can also be coated by a magnetron sputtering method. After starting the magnetron sputtering system, the inert gas is discharged under high pressure to bombard the target body. The molecules, ions, electrons and atoms on the surface of the target body are sputtered and have kinetic energy, and finally adhere to the substrate to form a thin film.

[0028] Referring to Figs. 1-4 The inside of the placing groove 203 is provided with a linkage clamping mechanism. The linkage clamping mechanism includes a plurality of sliding grooves 301, which are arranged at the bottom of the inner wall of the placing groove 203. A sliding block 302 is slidably arranged in the inside of the sliding groove 301. A clamping block 303 is fixedly installed on the top of the sliding block 302. A plurality of rotating discs 304 are rotatably installed in the inside of the rotary table 202. The number of the rotating discs 304 is consistent with the number of the placing grooves 203. An arc-shaped groove 305 is arranged on the top of the rotating disc 304. A sliding shaft 306 is slidably arranged in the inside of the arc-shaped groove 305. The top of the sliding shaft 306 is fixedly connected with the bottom of the sliding block 302. When the rotating disc 304 rotates, the inner wall of the arc-shaped groove 305 extrudes the sliding shaft 306. Through the cooperation of the sliding groove 301, the sliding block 302 moves radially from the outside to the inside of the rotating disc 304. Since the sliding groove 301 and the sliding block 302 are provided with multiple, the sliding block 302 drives the clamping block 303 to clamp the crucible 204. The elastic pad is installed on the clamping block 303 to avoid damage to the crucible 204 caused by hard clamping. The clamping block 303 can clamp or release multiple crucibles 204 at the same time.

[0029] Referring to Figs. 1-4The inner wall of the rotating disc 304 is fixedly provided with a second connecting plate 307, the bottom of the second connecting plate 307 is fixedly provided with a follower rod 308, the center of the follower rod 308 coincides with the center of the rotating disc 304, the bottom of the follower rod 308 is fixedly provided with a gear 309, the gear 309 is in meshing connection with the gear ring 205, by arranging the gear 309, when the driving shaft 206 slides in the driving groove 207, the gear 309 is rotated through the meshing of the gear ring 205 and the gear 309, the rotating disc 304 is rotated through the cooperation of the follower rod 308, until the driving shaft 206 moves to the end of the driving groove 207, the clamping block 303 completes clamping, at this time, the driving shaft 206 drives the rotating table 202 to rotate together, correspondingly, the rotating table 202, the gear ring 205 and the gear 309 are in a relatively static state, the gear ring 205 cannot drive the gear 309 to rotate, so that the clamping block 303 continues to move and the equipment is damaged.

[0030] Specifically, the working process or working principle of the magnetron sputtering and crucible multifunctional coating equipment is as follows: when in use, the workers place a plurality of crucibles 204 and coating materials in the placing grooves 203, the workers start the motor 210, thereby driving the driving rod 209 to rotate, the first connecting plate 208 provides driving force for the rotation of the gear ring 205, the gear 309 is rotated through the meshing of the gear ring 205 and the gear 309, the rotating disc 304 is rotated through the cooperation of the follower rod 308, the inner wall of the arc-shaped groove 305 extrudes the sliding shaft 306, the sliding block 302 moves radially from the outside to the inside of the rotating disc 304 through the cooperation of the sliding groove 301, the sliding block 302 drives the clamping block 303 to clamp the crucible 204, the driving shaft 206 is located at one end of the driving groove 207 in the initial state, until the driving shaft 206 moves to the end of the driving groove 207, the clamping block 303 completes clamping, and then the motor 210 is turned off, the vacuum pumping system is started to pump the vacuum evaporation chamber 1, when one of the crucibles 204 is processed, the motor 210 is started again, the driving shaft 206 extrudes the inner wall of the driving groove 207 to rotate the rotating table 202, correspondingly, the rotating table 202, the gear ring 205 and the gear 309 are in a relatively static state, the gear ring 205 cannot drive the gear 309 to rotate, so that the clamping block 303 continues to move and the equipment is damaged.

Claims

1. A magnetron sputtering and crucible multifunctional film coating device, comprising a vacuum evaporation working cavity (1), wherein a magnetron sputtering device and a film winding and unwinding device are installed in the vacuum evaporation working cavity (1), the film winding and unwinding device comprises a winding and unwinding driving device, a film winding roller and a film unwinding roller, the winding and unwinding driving device drives the film winding roller and the film unwinding roller to wind and unwind a film, and the magnetron sputtering device is used for sputtering and coating the film between the film winding roller and the film unwinding roller, characterized in that: The vacuum evaporation operation cavity (1) is internally provided with a crucible evaporation mechanism and a rotating mechanism, the crucible evaporation mechanism comprises a plurality of crucibles and heating equipment, the rotating mechanism comprises a fixed seat (201) fixedly installed at the bottom of the inner wall of the vacuum evaporation operation cavity (1), a rotary table (202) rotatably installed at the top of the fixed seat (201), a plurality of placing grooves (203) are formed at the top of the rotary table (202), and the placing grooves (203) are used for placing the crucibles (204). ​ 2. The magnetron sputtering, crucible multi-functional film coating apparatus according to claim 1, wherein The rotating mechanism comprises a gear ring (205) rotatably installed in the rotary table (202), a driving shaft (206) fixedly installed at the top of the gear ring (205), a driving groove (207) formed in the rotary table (202), the driving shaft (206) being slidably sleeved in the driving groove (207), a first connecting plate (208) fixedly installed on the inner wall of the gear ring (205), a driving rod (209) fixedly installed at the bottom of the first connecting plate (208), the center of the driving rod (209) coinciding with the center of the gear ring (205), a motor (210) fixedly installed in the fixed seat (201), and the output end of the motor (210) being fixedly connected with the bottom of the driving rod (209).

3. The magnetron sputtering, crucible multi-functional film coating apparatus according to claim 2, wherein The placing groove (203) is internally provided with a linkage clamping mechanism, the linkage clamping mechanism comprises a plurality of sliding grooves (301) formed at the bottom of the inner wall of the placing groove (203).

4. The magnetron sputtering, crucible multi-functional film coating apparatus according to claim 3, wherein The sliding groove (301) is internally slidably sleeved with a sliding block (302), and the top of the sliding block (302) is fixedly installed with a clamping block (303).

5. The magnetron sputtering, crucible multi-functional film coating apparatus according to claim 4, wherein The rotary table (202) is rotatably installed with a plurality of rotating discs (304), and the number of the rotating discs (304) is consistent with the number of the placing grooves (203).

6. The magnetron sputtering, crucible multi-functional film coating apparatus according to claim 5, wherein The top of the rotating disc (304) is provided with an arc-shaped groove (305), the arc-shaped groove (305) is slidably sleeved with a sliding shaft (306) at the inside, and the top of the sliding shaft (306) is fixedly connected with the bottom of the sliding block (302).

7. The magnetron sputtering, crucible multi-functional film coating apparatus according to claim 6, wherein The inner wall of the rotating disc (304) is fixedly installed with a second connecting plate (307), the bottom of the second connecting plate (307) is fixedly installed with a follower rod (308), and the center of the follower rod (308) coincides with the center of the rotating disc (304).

8. The magnetron sputtering, crucible multi-functional film coating apparatus according to claim 7, wherein The bottom of the follower rod (308) is fixedly installed with a gear (309), and the gear (309) is in meshing connection with the gear ring (205).

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