Double-drive gantry platform
By designing a dual-drive gantry platform and using a hollow structure, the problems of torsional deformation, heavy weight, and synchronization of the gantry platform were solved, achieving high-precision and high-stability motion control and improving the performance of the testing equipment.
Patent Information
- Application Number
- CN202423296593.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-12-26
AI Technical Summary
Traditional gantry platforms suffer from problems such as gantry frame torsion deformation, heavy weight, poor synchronization, poor heat dissipation, and low material utilization, which affect the detection accuracy and equipment performance.
The system employs a dual-drive approach, using two parallel linear motors to drive the gantry bridge, and a vertical second linear motor on the bridge. The bridge features a hollow structure, combined with a marble base and columns, forming a high-rigidity and lightweight structure.
It achieves high-precision, low-friction synchronous control, reduces drive load, improves system response performance and heat dissipation, and enhances detection accuracy and equipment stability.
Smart Images
Figure CN223609731U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to linear motor field especially relates to a double drive gantry platform. BACKGROUND
[0002] Traditional gantry platform structure usually adopts single shaft drive mode, and the movement of the gantry frame is supported by setting guide rails at the two ends of the base, and the structure is prone to torsional deformation and vibration problems of the gantry frame during large stroke and high speed movement, which affects the detection accuracy, and the overall weight of the gantry frame is large due to the solid structure design, which not only increases the load of the driving system, but also reduces the response speed of the equipment.
[0003] The industry has developed a double shaft driven gantry platform, but the existing double shaft driven gantry platform still has many deficiencies in actual application, such as insufficient rigidity of the gantry frame leading to deformation during high speed movement, affecting the detection accuracy; the weight of the gantry frame is too large, so that the acceleration and deceleration performance of the system is limited; the synchronization of the double shaft driving system is not ideal, causing unstable movement; in addition, the traditional solid gantry frame structure also has problems such as poor heat dissipation performance and low material utilization rate. SUMMARY
[0004] In order to overcome the deficiencies of the prior art, the utility model provides a double drive gantry platform with high rigidity, high speed, high precision and low friction.
[0005] The utility model solves the technical problems thereof by adopting the technical scheme of:
[0006] A double drive gantry platform, comprising: a base; two parallel first linear motors arranged at the two ends of the base; a gantry frame, the two ends of the gantry frame are fixedly connected with the sliding tables of the two first linear motors, and the gantry frame is driven to reciprocate by the first linear motor; a second linear motor arranged on the gantry frame, the movement direction of the second linear motor is perpendicular to the movement direction of the first linear motor; the interior of the gantry frame is a hollow structure.
[0007] Further, the hollow structure comprises a plurality of through holes extending along the length direction of the gantry frame, and the through holes penetrate the end of the gantry frame.
[0008] Further, the cross section shape of the through hole is rectangular, and the spacing between adjacent through holes is equal, and the upper and lower surfaces of the gantry frame are complete planes.
[0009] Further, the length direction of the gantry frame is provided with a sink groove, and the sink groove is used for arranging cables and enhancing the structural strength of the gantry frame.
[0010] Further, the gantry bridge is fixedly connected with the sliding table through a mounting seat which is integrally formed with the gantry bridge.
[0011] Further, one end of the first linear motor is provided with a first drag chain plate, a wiring channel is formed in the side of the gantry bridge corresponding to the position of the first drag chain plate, and the wiring channel is used for passing the drag chain.
[0012] Further, the second linear motor is located between the two first drag chain plates, a second drag chain plate is arranged on the side of the gantry bridge away from the second linear motor, and the mounting height of the second drag chain plate is higher than that of the first drag chain plate.
[0013] Further, the length direction of the second linear motor is parallel to the length direction of the gantry bridge, and the second drag chain plate is fixedly connected with the gantry bridge.
[0014] Further, the base is made of marble.
[0015] Further, the base further comprises a stand column located at two ends of the base, the stand column is fixedly connected with the base through a fastener, the two first linear motors are respectively fixedly arranged on the two stand columns, and the stand column is made of marble.
[0016] The double-drive gantry platform has the following beneficial effects:
[0017] The double-drive gantry platform drives the gantry bridge to move in a double-drive mode, realizes higher-precision synchronous control, effectively avoids torsional deformation of the gantry bridge in the movement process, and improves the movement precision and stability of the whole system. Through the hollow structure of the gantry bridge, the overall weight of the bridge is significantly reduced, not only the load of the driving system is reduced, the dynamic response performance of the system is improved, but also the heat dissipation effect of the structure is improved. Meanwhile, the hollow design also improves the material utilization rate and reduces the manufacturing cost. BRIEF DESCRIPTION OF DRAWINGS
[0018] The double-drive gantry platform will be further described below in combination with the drawings and embodiments.
[0019] Figure 1 is a three-dimensional structure schematic view of the double-drive gantry platform;
[0020] Figure 2 is a top view structure schematic view of the double-drive gantry platform;
[0021] Figure 3 is a three-dimensional structure schematic view of the gantry bridge of the double-drive gantry platform;
[0022] Figure 4 is a side view schematic view of the gantry bridge of the double-drive gantry platform.
[0023] wherein,
[0024] 10, base;
[0025] 20, first linear motor; 21, sliding table; 22, first drag chain plate;
[0026] 30, gantry bridge; 31, hollow structure; 311, through hole; 32, sink groove; 33, mounting seat; 34, wiring channel;
[0027] 40, second linear motor; 41, second drag chain plate;
[0028] 50, column. DETAILED DESCRIPTION
[0029] The concept, specific structure and technical effects of the present application will be described clearly and completely in combination with the embodiments and drawings, so as to fully understand the purpose, features and effects of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments of the present application, other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application. In addition, all the connection / connection relationships involved in the patent do not mean that the components are directly connected, but that a better connection structure can be composed by adding or reducing connection auxiliary components according to the specific implementation situation. The various technical features in the present application can be combined interactively without mutual contradiction and conflict.
[0030] Referring to Figures 1-3 , a double-drive gantry platform, comprising: a base 10; two parallel first linear motors 20 arranged at both ends of the base 10; a gantry bridge 30, both ends of the gantry bridge 30 are fixedly connected with the sliding tables 21 of the two first linear motors 20, and the gantry bridge 30 is driven to reciprocate by the first linear motors 20; a second linear motor 40 arranged on the gantry bridge 30, the movement direction of the second linear motor 40 is perpendicular to the movement direction of the first linear motor 20; the inside of the gantry bridge 30 is a hollow structure 31.
[0031] The double-drive gantry platform provides a stable support foundation through the base 10, two parallel first linear motors 20 are arranged at both ends of the base 10, and the first linear motors 20 drive the gantry bridge 30 to reciprocate. Figure 1 , 2The layout ensures symmetry and smoothness of driving force. The two first linear motors 20 are respectively fixedly connected with two ends of the gantry bridge 30. High-precision reciprocating movement of the gantry bridge 30 is realized by synchronously controlling the two first linear motors 20. The gantry bridge 30 adopts a hollow structure 31, which effectively reduces the overall weight while ensuring the structural strength, greatly reduces the inertia during high-speed movement, and improves the dynamic response characteristics of the system. The second linear motor 40 is arranged on the gantry bridge 30, and the movement direction of the second linear motor 40 is perpendicular to the first linear motor 20, forming an XY dual-axis movement platform. The first linear motor 20 and the second linear motor 40 of the case adopt a non-contact double linear motor driving scheme, which can realize a repeat positioning accuracy of ±50 nm and ensure a movement accuracy of 100 nm. Since there is no mechanical contact, the system has the characteristics of low friction and long service life. The entire double-drive gantry platform can be applied to high-precision detection equipment, such as in semiconductor detection equipment, which can realize high-precision scanning and detection of the wafer surface. The system can maintain stable performance and accuracy during long-term operation.
[0032] Therefore, the double-drive gantry platform of the case can realize high-precision movement in the X and Y directions through the first linear motor 20 and the second linear motor 40. The specific implementation manner is as follows: the two first linear motors 20 synchronously drive the gantry bridge 30 to move reciprocally in the X direction. By accurately controlling the synchronism of the two linear motors, the gantry bridge 30 can maintain good parallelism and stability during movement. Meanwhile, the second linear motor 40 installed on the gantry bridge 30 can move in the Y direction, which cooperates with the movement in the X direction to realize large-stroke planar scanning movement. In semiconductor detection applications, the XY dual-axis movement can accurately control the position of the detection probe to realize precise scanning of the wafer surface. Through the coordination of the control system, automatic detection can be performed according to the preset scanning path, which meets the strict requirements for position accuracy and movement stability in the semiconductor manufacturing process. In some embodiments, the material of the base 10 is marble. Marble has excellent physical properties, including high compressive strength, structural stability, good shock absorption performance, and thermal stability, which can provide a stable support foundation for the precision movement platform. During long-term operation of the high-precision detection equipment, the marble base 10 can effectively suppress the influence of environmental vibration. Due to its low thermal expansion coefficient, the influence of temperature change on system accuracy can be reduced, ensuring stable performance of the equipment in semiconductor detection and other application scenarios.
[0033] Further, with reference to Figure 1Two marble columns 50 are arranged at the two ends of the base 10, and the columns 50 are fixedly connected with the base 10 through fasteners to form a stable gantry support structure. The two first linear motors 20 are respectively fixed on the two columns 50 to provide reliable installation reference, and the marble material has excellent thermal stability and damping performance, so that the whole motion system has good structural rigidity and stability.
[0034] In some embodiments, with reference to Figure 3 The hollow structure 31 includes a plurality of through holes 311 extending along the length direction of the gantry bridge 30, and the through holes 311 penetrate the end of the gantry bridge 30. It can be understood that the through hollow structure 31 not only effectively reduces the overall weight of the gantry bridge 30, but also maintains the overall rigidity of the structure. The design of the through holes 311 can significantly reduce the inertial load during high-speed motion. In a semiconductor detection device, such lightweight design can improve the acceleration performance and dynamic response characteristics of the gantry bridge 30, so that the detection probe can complete position switching more quickly and stably. At the same time, the through hole 311 structure is also beneficial to heat dissipation and reduction of air resistance, ensuring good performance stability of the equipment during long-time high-speed operation.
[0035] Further, the cross-sectional shape of the through hole 311 is rectangular, and the spacing between adjacent through holes 311 is equal. The upper and lower surfaces of the gantry bridge 30 are complete planes. Among them, the adjacent through holes 311 are distributed at equal intervals, and the regular hollow layout not only ensures the uniformity of the structure, but also provides good mechanical properties. At the same time, the upper and lower surfaces of the gantry bridge 30 adopt a complete plane design to provide a stable installation reference surface for the second linear motor 40 and other functional components.
[0036] Further, with reference to Figure 3 The length direction of the gantry bridge 30 is provided with a sink groove 32, and the sink groove 32 is used to arrange cables and enhance the structural strength of the gantry bridge 30. It can be understood that the power cable and signal cable of the system provide an effective wiring channel through the arrangement of the sink groove 32, so that the cable arrangement is more orderly and safe. At the same time, the design of the sink groove 32 can also enhance the overall structural strength of the gantry bridge 30. The integrated cable arrangement can effectively avoid interference and damage of the cable during high-speed motion, and the reinforcing ribs formed by the sink groove 32 structure can also improve the torsional stiffness of the gantry bridge 30, so as to ensure that the detection equipment maintains good structural stability during high-speed motion, and improves the operation reliability of the whole system. The sink groove 32 can be arranged on any surface of the gantry bridge 30.
[0037] Further, with reference to Figure 3The gantry bridge 30 is fixedly connected with the sliding table 21 through a mounting seat 33, and the mounting seat 33 is integrally formed with the gantry bridge 30. The mounting seat 33 is fixedly connected with the sliding table 21 of the first linear motor 20, which not only improves the structural rigidity of the connection part, but also reduces the cumulative error that may be caused by the assembly link. In the semiconductor detection equipment, the design can ensure that the connection between the gantry bridge 30 and the sliding table 21 is more stable and reliable, avoids loosening and deformation that may be caused by the traditional bolt connection, and thus ensures the positioning accuracy and the repeat accuracy of the entire motion system during high-precision detection, effectively improving the overall performance and service life of the equipment.
[0038] In some embodiments, with reference to Figure 3 、 4 One end of the first linear motor 20 is provided with a first drag chain plate 22, and a wire channel 34 is formed in the side surface of the gantry bridge 30 corresponding to the position of the first drag chain plate 22, and the wire channel 34 is used for the drag chain to pass through. By providing the first drag chain plate 22 at one end of the first linear motor 20, and simultaneously forming the wire channel 34 at the corresponding position of the side surface of the gantry bridge 30, the design enables the drag chain to be orderly arranged and moved along the wire channel 34, effectively protecting the power supply and signal cables required for system operation, and ensuring that the cables can be orderly folded and unfolded along with the drag chain when the gantry bridge 30 is moving at high speed, avoiding cable winding and wear, and simultaneously preventing the wire channel 34 from interfering with the normal movement of the equipment, thereby improving the operation stability and reliability of the entire detection system.
[0039] Further, with reference to Figure 1 、 2 The second linear motor 40 is located between the two first drag chain plates 22, and a second drag chain plate 41 is arranged on the side of the gantry bridge 30 away from the second linear motor 40, and the installation height of the second drag chain plate 41 is higher than that of the first drag chain plate 22. It can be understood that the second drag chain plate 41 is arranged on the side of the gantry bridge 30 away from the second linear motor 40, and the installation height of the second drag chain plate 41 is designed to be higher than that of the first drag chain plate 22, forming a layered cable management system. Through the staggered design, the mutual interference between the drag chains during movement in different directions is avoided, and the control cables of the first linear motor 20 and the second linear motor 40 are orderly managed through the drag chains of different heights, respectively, ensuring that the cables in each direction of the double-drive system can maintain a good movement trajectory during high-speed movement, effectively improving the operation stability and detection accuracy of the entire system.
[0040] Further, the length direction of the second linear motor 40 is parallel to the length direction of the gantry bridge 30, and the second drag chain plate 41 is fixedly connected with the gantry bridge 30. It can be understood that the second linear motor 40 can realize accurate motion control along the length direction of the gantry bridge 30, and through the fixed connection of the second drag chain plate 41 and the gantry bridge 30, it can ensure that the drag chain always maintains a stable relative position during high-speed motion, so that the motor control cable can be orderly folded and unfolded with the movement of the detection component, effectively avoiding the disorder and wear of the cable, and improving the operation reliability of the entire detection system.
[0041] The above is a specific description of the preferred embodiment of the utility model, but the utility model is not limited to the embodiments, and those skilled in the art can make various equivalent modifications or replacements without departing from the spirit of the utility model, and these equivalent modifications or replacements are all included in the range defined by the claims of the present application.
Claims
1. A dual drive gantry platform characterized by, The utility model relates to a double-drive gantry platform, which comprises a base, two first linear motors arranged at two ends of the base and parallel to each other, a gantry frame fixedly connected to sliding tables of the two first linear motors and driven by the first linear motors to move back and forth, a second linear motor arranged on the gantry frame and moving in a direction perpendicular to the first linear motors, a hollow structure inside the gantry frame, a sunken groove arranged along a length direction of the gantry frame and used for arranging cables and enhancing structural strength of the gantry frame.
2. The double-drive gantry platform according to claim 1, wherein the hollow structure comprises a plurality of through holes extending along the length direction of the gantry frame and penetrating through end portions of the gantry frame.
3. The double-drive gantry platform according to claim 2, wherein the through holes are rectangular in cross-sectional shape, and adjacent through holes are equal in spacing, and upper and lower surfaces of the gantry frame are complete planes.
4. The double-drive gantry platform according to claim 1, wherein the gantry frame is fixedly connected to the sliding tables through mounting seats, and the mounting seats are integrally formed with the gantry frame.
5. The double-drive gantry platform according to claim 1, wherein one end of the first linear motor is provided with a first drag chain plate, and a side surface of the gantry frame is provided with a wire channel corresponding to a position of the first drag chain plate, and the wire channel is used for passing a drag chain.
6. The double-drive gantry platform according to claim 5, wherein the second linear motor is located between the two first drag chain plates, and a side surface of the gantry frame away from the second linear motor is provided with a second drag chain plate, and the second drag chain plate is higher in mounting height than the first drag chain plate.
7. The double-drive gantry platform according to claim 6, wherein the second linear motor is parallel in length direction to the gantry frame, and the second drag chain plate is fixedly connected to the gantry frame.
8. The double-drive gantry platform according to claim 1, wherein the base is made of marble.
9. The double-drive gantry platform according to claim 1, wherein the base further comprises two columns arranged at two ends of the base, the columns are fixedly connected to the base through fasteners, the two first linear motors are respectively arranged on the two columns, and the columns are made of marble.