Probe station capable of automatically replacing probe card
By using a probe station with an automatic probe card replacement mechanism, and employing a robotic arm and adsorption structure, the automatic replacement of probe cards is achieved, solving the problems of low replacement efficiency and poor positioning accuracy in existing technologies, thereby improving wafer production efficiency and machine utilization.
Patent Information
- Application Number
- CN202422917527.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-27
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-11-27
AI Technical Summary
In existing technologies, the replacement efficiency of probe cards is low and the positioning accuracy is poor, which leads to a longer wafer mass production cycle, and manual replacement reduces the utilization rate of the equipment.
An automatic probe station for changing probe cards was designed. It uses a robotic arm and an adsorption structure to achieve automated replacement of probe cards. The station includes a main body, a storage tank, a robotic arm, and an adsorption structure. It uses a laser emitter and receiver for positioning and a transmission chain and robotic arm to achieve automatic unloading and loading of probe cards.
It enables efficient and automatic replacement of probe cards, improves positioning accuracy, shortens wafer mass production cycle, and increases equipment utilization.
Smart Images
Figure CN223611586U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to semiconductor manufacturing equipment technical field, especially a kind of probe station of automatic replacement probe card. BACKGROUND
[0002] Wafer Acceptance Test (WAT) is carried out after wafer product flow sheet ends and before quality inspection, for measuring the electrical parameter of Test key. The purpose of wafer acceptance test is to detect the process condition of each wafer product by testing the electrical parameter of Test key on wafer, to evaluate the quality and stability of semiconductor manufacturing process, to judge whether wafer product meets the electrical specification requirements of the process technology platform.
[0003] When wafer acceptance test is carried out, single needle card position is fixed, so each time needle card is replaced, it needs to be reloaded and positioned. Moreover, if the front and rear two tests are different products, needle card needs to be replaced. The process of replacing needle card is carried out by artificial, not only low efficiency, and positioning accuracy is low. Artificial replacement of needle card will also cause the delay of engineer to load data and handle problems, reduce machine usage, and cause wafer mass production cycle to be long. UTILITARY MODEL CONTENT
[0004] The utility model aims at providing a kind of probe station of automatic replacement probe card, can realize the efficient automatic replacement of probe card.
[0005] To solve the above technical problems, the utility model is realized by the following technical solutions:
[0006] The utility model provides a kind of probe station of automatic replacement probe card, comprising:
[0007] Warehouse door main body is installed on the machine table body of probe station, wherein storage groove is provided in the warehouse door main body;
[0008] Storage box is fixed in the storage groove, wherein multiple layers of supporting structures are installed in the storage box, and the supporting structure allows the loading of the probe card;
[0009] Mechanical hand device is installed in the machine table body, wherein the mechanical hand device includes multiple mechanical arms, and the end of multiple mechanical arms is sequentially rotationally connected to form transmission chain, when the warehouse door main body is closed, the other end of transmission chain is allowed to extend into the storage box;And
[0010] An adsorption structure is installed at the other end of the transmission chain, and when the probe card is replaced, the transmission chain allows the adsorption structure to move in a direction perpendicular to the probe card and allows the transmission chain to rotate the adsorption structure by 360 degrees, wherein the adsorption structure can adsorb the surface of any probe card.
[0011] In an embodiment of the utility model, the containing structure includes a plurality of supports, the support is fixed on the inner side wall of the storage box, and a plurality of supports are symmetrically arranged in the storage box, a clamping groove is arranged on the support, and the clamping groove allows the probe card to be loaded.
[0012] In an embodiment of the utility model, the probe station includes a laser emitter and a laser receiver, the laser emitter and the laser receiver are fixed on the side wall of the storage box, a through hole is arranged on the support, the through hole is communicated with the clamping groove, the laser emitter and the laser receiver are installed in the through hole, the laser path of the laser emitter passes through a plurality of clamping grooves in the same layer and reaches the laser receiver.
[0013] In an embodiment of the utility model, the transmission chain includes:
[0014] A first mechanical arm, the first mechanical arm is a columnar body, and the first mechanical arm is allowed to rotate around an axis and move along the axis;
[0015] A second mechanical arm, the first end of the second mechanical arm is rotatably connected to the end of the first mechanical arm;
[0016] A third mechanical arm, the first end of the third mechanical arm is rotatably connected to the second end of the second mechanical arm, and the second end of the third mechanical arm is installed with the adsorption structure.
[0017] In an embodiment of the utility model, the probe station includes a radio frequency scanner, the radio frequency scanner is installed on the third mechanical arm, and after the adsorption structure is adsorbed and connected to the surface of the probe card, the scanning range of the radio frequency scanner covers the surface of the probe card.
[0018] In an embodiment of the utility model, the mechanical hand device includes:
[0019] A base is fixed in the machine table body;
[0020] A first rotating power source, the output end of the first rotating power source is connected to the end of the first mechanical arm and drives the first mechanical arm to rotate around an axis; and
[0021] A lifting power source is fixed on the base, an output end of the lifting power source is connected to the first rotating power source, and the lifting power source drives the first rotating power source and the transmission chain to move along the axial direction of the first mechanical arm.
[0022] In an embodiment of the utility model, the mechanical arm device comprises a support rod, the support rod is fixed on the second end of the third mechanical arm, and an end of the support rod is fixedly connected to the adsorption structure.
[0023] A second rotating power source is installed on the end of the first mechanical arm, an output end of the second rotating power source is connected to the first end of the second mechanical arm, and the second mechanical arm is driven to rotate.
[0024] A third rotating power source is installed on the second end of the second mechanical arm, an output end of the third rotating power source is connected to the first end of the third mechanical arm, and the third mechanical arm is driven to rotate.
[0025] In an embodiment of the utility model, the mechanical arm device comprises a support rod, the support rod is fixed on the second end of the third mechanical arm, and an end of the support rod is fixedly connected to the adsorption structure.
[0026] In an embodiment of the utility model, an adsorption hole is arranged on the adsorption structure, the adsorption hole is arranged on the connecting surface of the adsorption structure and the probe card, the adsorption hole is communicated with the cavity, and the probe station comprises an adsorption power source.
[0027] In an embodiment of the utility model, the adsorption structure is adsorbed and connected to the first surface of the probe card, the number of the probe card is arranged on the first surface of the probe card, and the probe structure of the probe card is distributed on the second surface of the probe card.
[0028] As described above, the utility model provides a probe station capable of automatically replacing a probe card, stores the probe card to be tested in the machine in sequence, and can automatically unload the current probe card and automatically load a new probe card in the machine without opening the door of the machine, so that the test efficiency of the machine is higher, the positioning accuracy of the probe card is higher, and the use rate of the machine is improved.
[0029] Of course, any product implementing the present application does not necessarily need to achieve all the advantages mentioned above simultaneously. BRIEF DESCRIPTION OF DRAWINGS
[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed for the embodiment description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.
[0031] Figure 1 It is a component position distribution structure diagram of the probe station in an embodiment of the present application.
[0032] Figure 2 It is a structure diagram of the mechanical hand device in an embodiment of the present application.
[0033] Figure 3 It is a structure diagram of the storage box in an embodiment of the present application.
[0034] Figure 4 It is a structure diagram of the loading structure in an embodiment of the present application.
[0035] Figure 5 It is a side structure diagram of the mechanical hand device in an embodiment of the present application.
[0036] Figure 6 It is a control principle diagram of the probe station needle replacement in an embodiment of the present application.
[0037] In the figure: A, probe card; 100, machine table body; 101, warehouse door opening; 200, warehouse door body; 210, storage groove; 220, storage box; 230, loading structure; 231, support; 232, clamping groove; 233, through hole; 240, first hinge; 250, laser emitter; 260, laser receiver; 300, base; 400, mechanical hand device; 410, first mechanical arm; 411, second hinge; 420, second mechanical arm; 421, third hinge; 430, third mechanical arm; 431, fourth hinge; 440, support rod; 450, adsorption structure; 460, scanner; 10, main machine; 20, positioning unit; 30, adsorption unit; 40, lifting power source; 50, first rotating power source; 60, second rotating power source; 70, third rotating power source; 80, adsorption power source. DETAILED DESCRIPTION
[0038] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.
[0039] Please refer to Figure 1 and Figure 2 The utility model provides a kind of probe station of automatically replacing probe card A, as shown in the drawings, wherein probe station includes machine table body 100. Machine table body 100 refers to the machine table frame of probe station. The utility model does not limit the components and modules for realizing detection function in probe station. In the utility model, probe station includes warehouse door main body 200, storage box 220, mechanical hand device 400 and suction structure 450. Wherein warehouse door main body 200 is installed on machine table body 100. Storage groove 210 is provided in warehouse door main body 200. Wherein storage box 220 is fixed in storage groove 210. Multiple layers of supporting structure 230 are installed in storage box 220, and supporting structure 230 is used to support probe card A. Multiple layers of probe card A can be stored in storage box 220, and multiple layers of probe card A are distributed in parallel. Wherein mechanical hand device 400 is installed in machine table body 100. Mechanical hand device 400 includes multiple mechanical arms, and the end of multiple mechanical arms is sequentially connected to form transmission chain. In the embodiment, one end of transmission chain is used as the rotation center of mechanical hand device 400, and the other end of transmission chain can be extended into storage box 220 when warehouse door main body 200 is closed. Specifically, when warehouse door is closed and probe card A needs to be replaced, the other end of transmission chain can be extended between two adjacent probe cards A. Wherein suction structure 450 is installed on the other end of transmission chain. When replacing probe card A, transmission chain can move along the direction perpendicular to probe card A with suction structure 450, to realize coordinate adjustment in vertical direction. And transmission chain can rotate 360 ° around rotation center with suction structure 450, to realize coordinate adjustment in horizontal plane. Wherein suction structure 450 can be adsorbed to the surface of any probe card A, to realize the transfer of probe card A.
[0040] Please refer to Figure 1 and Figure 2As shown, in an embodiment of the present application, the machine table body 100 has a door opening 101, wherein the mechanical arm device 400 can be installed at the door opening 101, so that after the door body 200 is closed, the mechanical arm device 400 can quickly complete the operation of replacing the probe card A. And the mechanical arm device 400 is arranged at the door opening 101, which is beneficial to the modification of the probe station without affecting the function of the probe station body. In the present application, when it is necessary to replace the probe card A, the adsorption structure 450 is connected to the surface of the unloaded probe card A, and the unused probe card A is sent into the storage box 220 for placement, then the mechanical arm device 400 adjusts the position, thereby adjusting the position of the adsorption structure 450, so that the adsorption structure 450 is connected to the surface of the probe card A to be replaced, the probe card A is taken out from the storage box 220, and is sent to the working position of the probe card A in the machine table body 100. After the replaced probe card A reaches the working position, the adsorption structure 450 is separated from the surface of the probe card A, and the mechanical arm device 400 returns to the original position. Wherein the whole process of replacing the probe card A can be carried out without opening the door body 200. It should be noted that the maximum thickness of the door body 200 is greater than the diameter of the probe card A. The present application does not limit the shape of the door body 200, as long as the door body 200 can accommodate the probe card A. In the present embodiment, the door body 200 is a polyhedron, and can be a cuboid, a trapezoidal body. In the present embodiment, the storage groove 210 is arranged on one side of the door body 200 close to the door opening 101, and the slot of the storage groove 210 faces the door opening 101. In the present embodiment, the door body 200 and the machine table body 100 are hinged, and can be connected through the first hinge 240 in the present application. Figure 1 In the present embodiment, the storage box 220 is fixed in the storage groove 210, and the fixing mode can be welding or connection through bolts, screws and the like.
[0041] Please refer to Figures 2 to 4As shown, in an embodiment of the present application, the accommodating structure 230 comprises a plurality of supports 231. The supports 231 are fixed on the inner side walls of the storage box 220, and the plurality of supports 231 are symmetrically arranged in the storage box 220. The supports 231 are provided with clamping grooves 232, and when the probe card A is placed in the storage box 220, the probe card A can be inserted into the clamping grooves 232. In the embodiment, a plurality of probe cards A can be placed in the storage box 220, and one layer of supports 231 corresponds to one piece of probe card A. In the embodiment, the supports 231 can be fixed on the inner walls of the storage box 220 by welding, and the clamping grooves 232 are arranged on the side of the supports 231 away from the inner walls of the storage box 220. In the embodiment, the supports 231 of adjacent layers have a preset distance, so as to facilitate the extension of the adsorption structure 450 and the transmission chain end. In the embodiment, in one layer of supports 231, the distance between the groove bottoms of the opposite two clamping grooves 232 is greater than the diameter of the probe card A, so as to ensure that the probe card A can be inserted into the clamping grooves 232. The probe card A is provided with an encoding strip, and the information of the probe card A is stored in the encoding strip. The probe card A comprises a probe structure. In the embodiment, the surface of the probe card A provided with the encoding strip is set as a first surface, and the surface where the probe structure is located is set as a second surface. When the probe card A is loaded into the clamping grooves 232, the second surface of the probe card A is in contact with the groove wall of the clamping grooves 232, and the probe card A can be stably placed in the clamping grooves 232 by gravity. In the embodiment, the accommodating structure 230 comprises a plurality of layers of supports 231, wherein the number of single-layer supports 231 is a plurality, and the single-layer supports 231 are symmetrically distributed on the opposite two inner side walls of the storage box 220. In the embodiment, the single-layer supports 231 are, for example, 2, and in order to ensure that the supports 231 can be fixed stably, the length of the clamping grooves 232 can be greater than the radius of the probe card A. In the embodiment, in order to facilitate taking, the plurality of layers of probe cards A can be distributed from bottom to top or from top to bottom according to the test order.
[0042] Please refer to Figures 2 to 4 , Figure 6As shown, in one embodiment of this utility model, the probe station includes a laser emitter 250 and a laser receiver 260, which are fixed to the side wall of the storage box 220. A through hole 233 is provided on the bracket 231, communicating with a slot 232. The laser emitter 250 and laser receiver 260 are installed in the through hole 233, and the laser path of the laser emitter 250 passes through multiple slots 232 on the same layer to reach the laser receiver 260. In this embodiment, one end of the through hole 233 is connected to the side wall of the storage box 220, and the other end is connected to the slot 232. In this embodiment, the laser path is parallel to the surface of the probe card A. To ensure good placement stability of the probe card A, the probe card A is parallel to the horizontal plane after being placed in the slot 232. The laser path can be parallel to the horizontal plane. Before probe card A is inserted, the through hole 233 is not blocked, so the laser emitted by laser emitter 250 can pass through slot 232 and reach laser receiver 260. When probe card A is inserted, the laser emitted by laser emitter 250 is blocked by probe card A, so laser receiver 260 cannot receive the laser. Specifically, when laser receiver 260 cannot receive the laser signal, it can stop feeding data back to host 10, at which point host 10 can know that probe card A has been inserted. In this embodiment, in order to ensure that probe card A is fully inserted, the position of through hole 233, the position and number of laser emitters 250, and the length of bracket 231 and through hole 233 can be adjusted so that the laser emitted by laser emitter 250 is completely blocked after probe card A is fully inserted into slot 232. When probe card A is fully inserted into slot 232, probe card A is completely placed in storage box 220.
[0043] Please see Figures 1 to 3 , Figure 5 As shown, in one embodiment of this utility model, the transmission chain includes a first robotic arm 410, a second robotic arm 420, and a third robotic arm 430. The first robotic arm 410 is a columnar body and can rotate on its own axis and move axially. In this embodiment, the first robotic arm 410 is, for example, a cylinder. The first end of the second robotic arm 420 is rotatably connected to the end of the first robotic arm 410. The first end of the third robotic arm 430 is rotatably connected to the second end of the second robotic arm 420, and an adsorption structure 450 is mounted on the second end of the third robotic arm 430. In this embodiment, the second robotic arm 420 and the third robotic arm 430 can be polyhedra. To ensure that the end of the third robotic arm 430 can extend between adjacent probe cards A, the thickness of the first end of the third robotic arm 430 is greater than the thickness of the second end, and the total height of the third robotic arm 430 and the adsorption structure 450 is less than the distance between adjacent probe cards A.
[0044] Please see Figures 1 to 3 ,Figure 5 and Figure 6 As shown in the figure, in an embodiment of the utility model, the mechanical hand device 400 includes base 300, lifting power source 40, first rotating power source 50, second rotating power source 60 and third rotating power source 70. Among them, the base 300 is fixed in the machine table body 100. The output end of the first rotating power source 50 is connected to the end of the first mechanical arm 410, and the first mechanical arm 410 is rotated from the shaft. Among them, the lifting power source 40 is fixed on the base 300. The output end of the lifting power source 40 is connected to the first rotating power source 50, and the lifting power source 40 moves the first rotating power source 50 and the transmission chain along the axial direction of the first mechanical arm 410. Among them, the second rotating power source 60 is installed at the end of the first mechanical arm 410. The output end of the second rotating power source 60 is connected to the first end of the second mechanical arm 420, and the second mechanical arm 420 is rotated. The third rotating power source 70 is installed at the second end of the second mechanical arm 420. The output end of the third rotating power source 70 is connected to the first end of the third mechanical arm 430, and the third mechanical arm 430 is rotated. In this embodiment, the lifting power source 40 can be a cylinder, a hydraulic cylinder. The first rotating power source 50, the second rotating power source 60 and the third rotating power source 70 can be motors, and the output end of the first rotating power source 50, the second rotating power source 60 and the third rotating power source 70 can be motor shafts. In this embodiment, the connection position of the output end of the first rotating power source 50 and the first mechanical arm 410 is embodied as the second hinge 411 in Figure 1 .
[0045] The connection position of the second rotating power source 60 and the second mechanical arm 420 is embodied as the third hinge 421 in Figure 1 .
[0046] The connection position of the third rotating power source 70 and the third mechanical arm 430 is embodied as the fourth hinge 431 in Figure 1 .
[0047] Please refer to Figures 1 to 3 , Figure 5 and Figure 6As shown in the embodiment of the utility model, the first rotating power source 50 can be installed at the output end of the lifting power source 40, and the first rotating power source 50 can also drive the first mechanical arm 410 to rotate while following the lifting power source 40 to lift. The utility model does not show the power source. The second rotating power source 60 can be installed in the first mechanical arm 410 or on the end face of the first mechanical arm 410. The output shaft of the second rotating power source 60 is fixedly connected to the end of the second mechanical arm 420. The output shaft of the third rotating power source 70 is fixedly connected to the end of the third mechanical arm 430. Among them, the lifting power source 40, the first rotating power source 50, the second rotating power source 60 and the third rotating power source 70 are independently powered, and the power supply line of the power source is not shown in the embodiment. In the embodiment, in order to ensure that the manipulator device 400 can find the corresponding probe card A, the coordinates to be reached by the adsorption structure 450 can be determined through the positioning unit 20 of the host computer 10, and the lifting power source 40, the first rotating power source 50, the second rotating power source 60 and the third rotating power source 70 are called through the positioning unit 20, so that the adsorption structure 450 reaches the required position. It should be noted that the movement route of the first mechanical arm 410, the second mechanical arm 420 and the third mechanical arm 430 can be planned. The setting of multiple mechanical arms can improve the fineness of the control of the moving path of the adsorption structure 450. Among them, since the position of each layer is fixed, the coordinate amount to be moved by the mechanical arm when taking each layer of probe card A is also fixed, and the appropriate coordinates can be designed through experiment, and the displacement amount to be moved by the mechanical arm is obtained, and the displacement data is stored in the positioning unit 20. When the probe card A is replaced, only the displacement data stored in the positioning unit 20 is called to complete the control of the mechanical arm. This process can be independent of online calculation, based on data input and output and stored data packets, and based on single-chip microcomputer control, that is, it can be realized.
[0048] Please refer to Figure 1 and Figure 2 、 Figure 5 As shown in the embodiment of the utility model, the probe station includes a radio frequency scanner 460, the radio frequency scanner 460 is installed on the third mechanical arm 430, and after the adsorption structure 450 is adsorbed and connected with the surface of the probe card A, the scanning range of the radio frequency scanner 460 covers the surface of the probe card A. In the embodiment, the radio frequency scanner 460 can read the ID information of the probe card A through wireless radio frequency identification (Radio Frequency Identification, RFID).
[0049] Please refer to Figures 1 to 3 、 Figure 5 and Figure 6As shown in the utility model one embodiment, mechanical arm device 400 includes support pole 440, support pole 440 is fixed at the second end of third mechanical arm 430, and the end of support pole 440 is fixedly connected to adsorption structure 450. Wherein adsorption structure 450 is provided with cavity, and support pole 440 is provided with pipeline, and the first end of pipeline is communicated with cavity. In the embodiment, the pipeline can be tubular cavity arranged inside the support pole 440, or can be pipe arranged in the tubular cavity. In the embodiment, adsorption structure 450 is provided with adsorption hole, and the adsorption hole is arranged on the connecting surface of adsorption structure 450 and probe card A, and the adsorption hole is communicated with the cavity, and the probe station includes adsorption power source 80, when the adsorption power source 80 is started and the adsorption structure 450 is connected to the surface of probe card A, the adsorption power source 80 is communicated with the second end of the pipeline, and forms negative pressure in the cavity. Wherein adsorption structure 450 can be suction cup, and the inside of the suction cup is hollow, one side of the suction cup is adsorption surface, and the other side can be funnel-shaped. Wherein the adsorption hole is arranged on the adsorption surface. When the replacement of probe card A is to be carried out, the adsorption surface of adsorption structure 450 is first contacted with the surface of corresponding probe card A, then the output end of adsorption power source 80 is communicated with the pipeline, the gas of cavity is removed, so that the cavity is adsorbed into negative pressure, so that the adsorption surface is tightly connected with the surface of probe card A. Then the probe card A is moved to the working position by the mechanical arm device 400 along the horizontal plane. When the probe card A is moved to the working position, the adsorption power source 80 is no longer communicated with the pipeline and the pipeline is communicated with air, or the pipeline is inflated, the normal pressure of the cavity is restored, so that the adsorption surface of adsorption structure 450 is separated from the surface of probe card A. Wherein the adsorption power source 80 is, for example, an air extractor. Wherein the main machine 10 is provided with adsorption unit 30, and the adsorption unit 30 controls the opening and closing of adsorption power source 80 in an electrical manner.
[0050] Please refer to Figures 1 to 3 、 Figure 5 and Figure 6 As shown in the utility model one embodiment, adsorption structure 450 is connected with the first surface of probe card A, wherein the number of probe card A is arranged on the first surface of probe card A, and the probe structure of probe card A is distributed on the second surface of probe card A, and the first surface and the second surface are opposite. In order to guarantee the safety and stability of probe card A and facilitate the scanning of the ID of probe card A, the second surface can be placed facing the ground, and the first surface is placed back to the ground.
[0051] The above disclosed embodiments of the utility model are only used for helping the utility model to be described. The embodiments do not describe all the details, and also do not limit the utility model to be the specific implementation mode. Apparently, according to the content of the specification, many modifications and changes can be made. The specification selects and specifically describes these embodiments, in order to better explain the principle and practical application of the utility model, so that the person skilled in the art can well understand and utilize the utility model. The utility model is limited by the claims and the whole range and equivalents.
Claims
1. A probe station for automatically changing a probe card, characterized by, The probe station comprises: a door body installed on a machine body of the probe station, wherein a storage groove is arranged in the door body; a storage box fixed in the storage groove, wherein a plurality of layers of supporting structures are installed in the storage box, and the supporting structures allow the probe cards to be loaded; a mechanical arm device installed in the machine body, wherein the mechanical arm device comprises a plurality of mechanical arms, and the ends of the plurality of mechanical arms are sequentially rotationally connected to form a transmission chain, when the door body is closed, the other end of the transmission chain is allowed to extend into the storage box; an adsorption structure installed at the other end of the transmission chain, when the probe card is replaced, the transmission chain is allowed to move the adsorption structure in a direction perpendicular to the probe card, and the transmission chain is allowed to rotate the adsorption structure, wherein the adsorption structure can be adsorbed and connected to the surface of any probe card. The supporting structure comprises a plurality of supports fixed on the inner side wall of the storage box, and the plurality of supports are symmetrically arranged in the storage box, a clamping groove is arranged on the support, and the clamping groove allows the probe card to be loaded.
2. The probe station of claim 1, wherein, The probe station comprises a laser emitter and a laser receiver fixed on the side wall of the storage box, a through hole is arranged on the support, the through hole is communicated with the clamping groove, the laser emitter and the laser receiver are installed in the through hole, the laser path of the laser emitter passes through a plurality of clamping grooves of the same layer and reaches the laser receiver.
3. The automatic changeover probe card of claim 2, wherein The transmission chain comprises:
4. The automatic probe card changing probe station of claim 1 wherein, a first mechanical arm, the first mechanical arm is a columnar body, and the first mechanical arm is allowed to rotate about the axis and move along the axis; a second mechanical arm, a first end of the second mechanical arm is rotationally connected to the end of the first mechanical arm; a third mechanical arm, a first end of the third mechanical arm is rotationally connected to a second end of the second mechanical arm, and a second end of the third mechanical arm is installed with the adsorption structure. The probe station comprises a radio frequency scanner installed on the third mechanical arm, and after the adsorption structure is adsorbed and connected to the surface of the probe card, the scanning range of the radio frequency scanner covers the surface of the probe card.
5. The automatic changeover probe card of claim 4, wherein The mechanical arm device comprises:
6. The automatic changeover probe card of claim 4, wherein a base fixed in the machine body; a first rotation power source, an output end of the first rotation power source is connected to the end of the first mechanical arm, and the first rotation power source drives the first mechanical arm to rotate about the axis; and a lifting power source fixed on the base, an output end of the lifting power source is connected to the first rotation power source, and the lifting power source drives the first rotation power source and the transmission chain to move along the axis of the first mechanical arm. The mechanical arm device comprises:
7. The automatic changeover probe card of claim 4, wherein a second rotation power source installed on the end of the first mechanical arm, an output end of the second rotation power source is connected to the first end of the second mechanical arm, and the second rotation power source drives the second mechanical arm to rotate; and a third rotation power source installed on the second end of the second mechanical arm, an output end of the third rotation power source is connected to the first end of the third mechanical arm, and the third rotation power source drives the third mechanical arm to rotate. 8. The automatic changeover probe card of claim 4, wherein The mechanical arm device comprises a support rod fixed at the second end of the third mechanical arm, and the end of the support rod is fixedly connected to the adsorption structure, wherein a cavity is arranged in the adsorption structure, and a pipeline is arranged in the support rod, and the first end of the pipeline communicates with the cavity.
9. The automatic changeover probe card of claim 8 wherein, An adsorption hole is arranged on the adsorption structure, the adsorption hole is arranged on the connecting surface of the adsorption structure and the probe card, and the adsorption hole communicates with the cavity, the probe station comprises an adsorption power source, when the adsorption power source is started and the adsorption structure is connected to the surface of the probe card, the adsorption power source communicates with the second end of the pipeline, and negative pressure is formed in the cavity.
10. The automatic changeover probe card of claim 1, wherein The adsorption structure is adsorbed and connected with the first surface of the probe card, wherein the number of the probe card is arranged on the first surface of the probe card, and the probe structure of the probe card is distributed on the second surface of the probe card, wherein the first surface and the second surface are opposite.