Probe station testing device
By rotating the locking ring, a stable electrical connection between the image acquisition board and the probe station is achieved, which solves the problem of unstable connector contact in probe station testing and improves wafer testing yield.
Patent Information
- Application Number
- CN202423210723.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-25
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-12-25
AI Technical Summary
During probe station testing, unstable or poor contact between the female connector and the probe connector can lead to a decrease in the yield of wafer products.
The design of the locking ring rotation enables a precise and stable electrical connection between the second connector of the image acquisition board and the first connector of the probe card of the probe station. The guide groove and clamping structure of the locking ring ensure stable contact of the connector.
It improved the yield of wafers tested by probe cards and reduced the test yield loss caused by contact problems.
Smart Images
Figure CN223612368U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to integrated circuit test technical field, concretely relates to a probe station testing arrangement. BACKGROUND
[0002] In the wafer manufacturing process, the wafer needs to be tested to ensure the quality and stability of the chip manufacturing process. Usually, a test head and a probe station are used for testing. The probe station is a testing tool used to transmit test signals to the solder pads of the chip for measuring and analyzing the electrical characteristics and performance of the chip. The probe station detection data can provide detailed information about the electrical characteristics and performance of the chip. By collecting and analyzing these data, the image acquisition board card in the test head can evaluate the quality and stability of the chip and determine any aspects that need to be adjusted or improved, thereby ensuring the quality and reliability of chip manufacturing and packaging.
[0003] The image acquisition board card in the test head is provided with a female connector, and the probe card of the probe station is provided with a probe connector. The probes of the probe connector are densely and finely distributed. In actual testing, the female connector and the probe connector are unstable or poorly contacted when plugged, which reduces the yield of wafer product testing. UTILITY MODEL CONTENTS
[0004] The utility model aims at providing a probe station testing arrangement. The second connector of the image acquisition board card and the first connector of the probe card in the probe station are accurately and stably plugged and connected by the rotation of the lock ring, the stable contact between the first connector and the second connector is realized, the yield of the probe card testing wafer is improved, and the loss of the test yield caused by the contact problem is reduced.
[0005] The utility model provides a probe station testing arrangement, which comprises:
[0006] A probe station is fixed with a probe card in the recessed space of the probe station. A first connector is fixed on the circumference of the probe card. A positioning protrusion in the Z direction is fixed on the probe station.
[0007] An image acquisition board card is located above the probe card and is provided with a second connector at the bottom circumference. A positioning recess is arranged in the image acquisition board card. The positioning recess is limited by the positioning protrusion. A first bearing is arranged at the lower position of the image acquisition board card.
[0008] A lock ring, the annular plane of the lock ring is parallel to the probe table upper surface, and the lower surface of the lock ring is spaced apart from the probe table upper surface by a preset distance; the circumference side wall of the lock ring is distributed with guide rail grooves and clamping grooves which all penetrate through the side wall; the upper clamping plate extends out in the radial center direction from the upper part of the clamping groove where the lock ring is located, and the lower clamping plate extends out in the radial center direction from the lower part of the clamping groove where the lock ring is located; the upper clamping plate, the clamping groove and the lower clamping plate together constitute a clamping structure for the first bearing; the guide rail groove comprises a low section, a slope section and a high section which are communicated; the handle is fixed outside the lock ring,
[0009] A positioning block, the positioning block is fixed on the probe table, and a second bearing is arranged on the positioning block, and the second bearing is located in the guide rail groove;
[0010] The second connector descending process: the handle rotates and rotates from high to low, drives the low section and the slope section of the guide rail groove to pass through the second bearing position in turn, and the second bearing rotates and presses down the lock ring when the guide rail groove passes through; at the same time, the clamping structure rotates through the first bearing position, and the upper clamping plate presses down the first bearing, so that the second connector is connected with the static first connector by plug-in connection.
[0011] Further, in the guide rail groove, the junction of the slope section and the high section is the highest part of the lower surface of the guide rail groove; the junction serves as the starting point of the high section, and the height of the lock ring below the guide rail groove gradually decreases from the starting point of the high section to the terminal point of the high section.
[0012] Further, the second connector rebounding and rising process: the handle continues to rotate, drives the high section of the guide rail groove to pass through the second bearing position, the second bearing rotates when the guide rail groove passes through, and the height of the lock ring below the guide rail groove is the depth of the lock ring pressed down by the second bearing; the depth of the lock ring pressed down by the second bearing gradually decreases from the starting point of the high section to the terminal point of the high section, and the lock ring rebounds and rises as a whole; at the same time, the lower clamping plate rises and passes through the first bearing, so that the second connector rebounds and rises and the overlapping part with the static first connector is reduced but still connected by electric connection; the rebounding and rising distance of the second connector is smaller than the descending distance.
[0013] Further, the probe table testing device further comprises a handle guide block, the handle guide block is fixed on the probe table and located outside the annular lock ring; the handle guide block is arranged in a certain radian along the outside of the lock ring; the handle guide block has a high section, a slope section and a low section connected in the clockwise direction; the handle is pulled to rotate along the handle guide block in the clockwise direction from the high section to the low section.
[0014] Further, at least two first bearings are arranged on the image acquisition board card at intervals, at least two clamping structures are arranged on the lock ring at intervals, the first bearings are arranged one by one corresponding to the clamping structures, at least two guide grooves are arranged on the lock ring at intervals, and the positioning blocks are arranged one by one corresponding to the guide grooves.
[0015] Further, the first connectors are arranged on the square periphery of the probe card, the second connectors are arranged on the square periphery of the bottom of the image acquisition board card, the second connectors are arranged corresponding to the first connectors, and the first bearings are arranged at lower positions outside four corners of the image acquisition board card.
[0016] Further, four clamping structures are arranged on the lock ring at intervals, one guide groove is arranged between every two adjacent clamping structures, and four guide grooves are arranged on the lock ring at intervals.
[0017] Further, a first shaft matched with the first bearing is arranged at a lower position of the image acquisition board card, the first shaft is arranged in parallel with the radial direction of the lock ring, the first shaft is fixed on the image acquisition board card, the inner ring of the first bearing is in an integrated structure with the first shaft, or the inner ring of the first bearing is fixed on the first shaft, and a retainer and balls in the retainer are arranged between the outer ring of the first bearing and the inner ring of the first bearing.
[0018] Further, a second shaft matched with the second bearing is arranged on the positioning block, the second shaft is arranged in parallel with the radial direction of the lock ring, the second shaft is fixed on the positioning block, the inner ring of the second bearing is in an integrated structure with the second shaft, or the inner ring of the second bearing is fixed on the second shaft, and a retainer and balls in the retainer are arranged between the outer ring of the second bearing and the inner ring of the second bearing.
[0019] Further, a plurality of probes arranged in an array are arranged on the first connector, and the second connector is a female connector matched with the plurality of probes.
[0020] Compared with the prior art, the utility model has the beneficial effects that:
[0021] The utility model provides a kind of probe station testing device, comprising: probe station, the periphery of the probe card in probe station is fixed with first connector;Image acquisition board card, the bottom periphery of image acquisition board is provided with second connector;The lower position of image acquisition board card is provided with first bearing;Lock ring, the periphery lateral wall of lock ring is distributed with the guide rail groove and the clamping groove of even through lateral wall;Upper clamping plate, clamping groove and lower clamping plate jointly constitute the clamping structure for first bearing;Guide rail groove includes intercommunication low section, slope section and high section;Positioning block, positioning block is fixed on probe station, second bearing is provided on positioning block, and second bearing is located in guide rail groove;Handle rotation drives low section and slope section of guide rail groove to pass second bearing position in turn, and second bearing rotates and presses down lock ring when guide rail groove passes;At the same time, clamping structure rotates to pass first bearing position, and upper clamping plate presses down first bearing, to make second connector drop and with stationary first connector plug-in electric connection.The utility model realizes the accurate and stable plug-in electric connection of the second connector of image acquisition board card and the first connector of the probe card in probe station by lock ring rotation, realizes the stable contact of first connector and second connector, improves the yield of probe card test wafer, reduces the test yield loss caused by contact problem. BRIEF DESCRIPTION OF DRAWINGS
[0022] Figure 1 It is schematic view of the probe station testing device of the utility model embodiment.
[0023] Figure 2 It is schematic view of lock ring in the probe station testing device of the utility model embodiment.
[0024] Figure 3 It is schematic view of guide rail groove of lock ring in the probe station testing device of the utility model embodiment.
[0025] Figure 4 It is schematic view of lock ring on probe station in the probe station testing device of the utility model embodiment.
[0026] Figure 5 It is schematic view of initial state in the probe station testing device of the utility model embodiment.
[0027] Among them, the following is marked:
[0028] 10-probe station;11-first connector;12-probe card;13-positioning protrusion;20-image acquisition board card;21-second connector;22-first bearing;30-lock ring;31-guide rail groove;31a-low section;31b-slope section;31c-high section;32-clamping structure;321-upper clamping plate;322-clamping groove;323-lower clamping plate;33-handle;40-positioning block;41-second bearing;50-handle guide block. DETAILED DESCRIPTION
[0029] The utility model will be further explained in detail below in combination with the drawings and specific embodiments. The advantages and features of the utility model will be more apparent according to the following description. It should be noted that the drawings are all very simplified and use non-precise scale, only to facilitate, clear and assist the purpose of explaining the embodiment of the utility model.
[0030] For the convenience of description, some embodiments of the present application can use spatial relative terms such as "above", "below", "top", "under" and the like to describe the relationship between one element or component and another (or another) element or component as shown in the drawings of the embodiments. It should be understood that in addition to the orientation described in the drawings, the spatial relative terms are also intended to include different orientations of the device in use or operation. For example, if the device in the drawings is turned over, the element or component described as "below" or "under" the other element or component will be positioned "above" or "above" the other element or component. The terms "first", "second", etc. in the following are used to distinguish between similar elements, and are not necessarily used to describe a specific order or time sequence. It is understood that these terms used in this way can be replaced under appropriate circumstances.
[0031] The utility model embodiment provides a kind of probe station testing device, as shown in Figures 1 to 5 It includes:
[0032] Probe station 10, probe card 12 is fixed in the circular recess space of probe station 10, the perimeter of probe card 12 is fixed with first connector 11, and positioning protrusion 13 along Z direction is fixed on probe station 10;Z direction is perpendicular to the upper surface of probe station;
[0033] Image acquisition board card 20, image acquisition board card 20 is located above probe card 12 and is provided with second connector 21 in bottom perimeter;Positioning recess is provided in image acquisition board card 20, and positioning recess and positioning protrusion 13 are inserted and limited, so that image acquisition board card 20 can only move in Z direction relative to probe station 10;First bearing 22 is provided in the lower position of image acquisition board card 20;
[0034] Lock ring 30, as shown in Figures 1 to 4As shown, the annular plane of the locking ring 30 is parallel to the upper surface of the probe station 10, and the lower surface of the locking ring 30 is spaced apart from the upper surface of the probe station 10 by a predetermined distance. The locking ring 30 is substantially annular in shape, has a certain wall thickness (ring width) in the radial direction, and the ring width is equal to the difference between the radius of the annular outer ring and the radius of the annular inner ring; the locking ring has a certain height. The peripheral side wall of the locking ring 30 is provided with guide grooves 31 and clamping grooves 322 which penetrate the side wall. The clamping grooves 322 have a certain arc along the circumferential direction of the locking ring 30; the clamping grooves 322 are located in the middle region of the side wall of the locking ring 30. The upper part of the locking ring 30 located in the clamping groove 322 extends to the radial center direction to form an upper clamping plate 321, and the lower part of the locking ring 30 located in the clamping groove 322 extends to the radial center direction to form a lower clamping plate 323; the upper clamping plate 321, the clamping groove 322 and the lower clamping plate 323 together form a clamping structure 32 for the first bearing 22; the guide grooves 31 include a low section 31a, a slope section 31b and a high section 31c which are connected; the handle 33 is fixed outside the locking ring 30; for example, the upper part of one of the clamping grooves 322 in the locking ring 30 is provided with a handle 33 in the radial direction away from the center;
[0035] The positioning block 40 is fixed on the probe station 10, and the second bearing 41 (not shown) is arranged in the radial direction towards the center direction on the positioning block 40, and the second bearing 41 is located in the guide groove 31;
[0036] The second connector 21 is lowered: the handle 33 is rotated and rotated from high to low, driving the low section 31a and the slope section 31b of the guide groove 31 to pass through the position of the second bearing 41 in sequence, and the second bearing 41 is rotated and pressed down the locking ring 30 when the guide groove 31 passes through; at the same time, as Figure 4 The red circle, the clamping structure 32 rotates through the position of the first bearing 22, and the upper clamping plate 321 presses down the first bearing 22, so that the second connector 21 is lowered and connected to the static first connector 11.
[0037] The probe station testing device of the embodiment of the utility model is described in detail below.
[0038] As shown in Figure 2 and Figure 4 As shown in the guide groove 31, the junction P of the slope section 31b and the high section 31c is the highest part of the lower surface of the guide groove 31; the junction P is the starting point of the high section, and the height of the locking ring 30 below the guide groove 31 gradually decreases from the starting point of the high section to the end point of the high section.
[0039] As shown in Figures 1 to 5As shown, the second connector 21 spring-up process: the handle 33 continues to rotate, the high section 31c of the guide rail slot 31 passes through the position of the second bearing 41, the second bearing 41 rotates when the guide rail slot 31 passes through, and the height of the locking ring 30 below the guide rail slot 31 is the depth of the locking ring 30 pressed down by the second bearing 41; from the starting point of the high section 31c to the end point of the high section, the depth of the locking ring 30 pressed down by the second bearing 41 gradually decreases, and the locking ring 30 as a whole spring-up; at the same time, the lower clamping plate 323 rises to the upper first bearing 22, so that the overlapping part of the spring-up of the second connector 21 and the static first connector 11 is reduced but still electrically connected; the spring-up distance of the second connector 21 is less than the falling distance.
[0040] The probe station test device further comprises a handle guide block 50 fixed to the probe station 10 and located on the outer side of the ring-shaped locking ring 30; the handle guide block 50 is arranged in a certain arc along the outer side of the locking ring 30; the handle guide block 50 has a high section, a slope section and a low section connected in a clockwise direction; pulling the handle 33 along the handle guide block 50 from the high section to the low section in a clockwise direction.
[0041] At least two first bearings 22 are arranged on the image acquisition board card 20 in intervals, and at least two clamping structures 32 are arranged on the locking ring 30 in intervals; the first bearings 22 and the clamping structures 32 are arranged one by one in correspondence; at least two guide rail slots 31 are arranged on the locking ring 30 in intervals, and the positioning blocks 40 are arranged one by one in correspondence with the guide rail slots 31.
[0042] For example, the square four corners of the probe card 12 are each fixed with a first connector 11, the square four corners of the bottom of the image acquisition board card 20 are each fixed with a second connector 21, and the second connectors 21 are arranged in correspondence with the first connectors 11; the outer lower positions of the four corners of the image acquisition board card 20 are each provided with a first bearing 22. The locking ring 30 is provided with four clamping structures 32 arranged in intervals, and one guide rail slot 31 is arranged between every adjacent two clamping structures 32, that is, the locking ring 30 is provided with four guide rail slots 31 arranged in intervals.
[0043] The lower position of the image acquisition board card 20 is further provided with a first shaft matched with the first bearing 22, and the axial direction of the first shaft is parallel to the radial direction of the locking ring 30; the first shaft is fixed on the image acquisition board card 20, the inner ring of the first bearing is an integral structure with the first shaft, or the inner ring of the first bearing is fixed on the first shaft; the outer ring of the first bearing and the inner ring of the first bearing are provided with a retainer and a ball located in the retainer. For example, the first bearing 22 is an external thread screw bearing, the external thread screw is the first shaft, the inner ring of the first bearing is an integral structure with the first shaft, and the external thread screw part is rotated and screwed into the image acquisition board card 20.
[0044] The second shaft matching with the second bearing 41 is arranged on the positioning block 40, and the axial direction of the second shaft is parallel to the radial direction of the lock ring 30; the second shaft is fixed on the positioning block 40, and the inner ring of the second bearing 41 is in an integrated structure with the second shaft or is fixed on the second shaft; the outer ring of the second bearing 41 and the inner ring of the second bearing 41 are provided with a retainer and a ball located in the retainer. The second bearing 41 can also be an external thread screw bearing, and the external thread screw part is rotated and screwed into the positioning block 40. The second bearing 41 is located in the guide rail groove 31.
[0045] For example, the first connector 11 is provided with a plurality of probes arranged in an array; and the second connector 21 is a female connector matching with the plurality of probes.
[0046] The movement process of the probe station testing device in the embodiment of the utility model will be described in detail below.
[0047] In the initial state, the handle 33 of the lock ring 30 is arranged at the high position of the handle guide block 50, the lower surface of the lock ring 30 is spaced apart from the upper surface of the probe station 10 by a preset distance, the second bearing 41 of the positioning block 40 is arranged at the low position section 31a of the guide rail groove 31 of the lock ring 30; the positioning recess and the positioning protrusion 13 are oppositely limited; and the first bearing 22 is located at the starting position of the clamping and pressing structure 32.
[0048] The second connector 21 is lowered: the clockwise left-rotating handle 33 sequentially passes through the high position, the slope and the low position of the handle guide block 50; the handle 33 gives the lock ring 30 a left-rotating and downward power; the second shaft on the positioning block 40 is fixed on the positioning block 40 and does not move, the outer ring of the second bearing 41 on the positioning block 40 can rotate, and the second bearing 41 is arranged in the guide rail groove 31; during the process of the left-rotating handle 33 being pressed downward, the low position section 31a and the slope section 31b of the guide rail groove 31 sequentially pass through the position of the second bearing 41, the second bearing 41 rotates to reduce the friction force when passing through the guide rail groove 31 and presses the lock ring 30 downward, and the height of the lock ring below the guide rail groove 31 is the depth of the lock ring pressed downward by the second bearing 41. At the same time, the first shaft is fixed on the image acquisition board card 20 and does not move, and the outer ring of the first bearing 22 can rotate freely; the clamping and pressing structure 32 composed of the upper clamping plate 321, the clamping groove 322 and the lower clamping plate 323 rotates clockwise and passes through the position of the first bearing 22, and the upper clamping plate 321 presses the first bearing 22 downward, so that the second connector 21 being lowered and the first connector 11 being static are electrically connected by plug-in.
[0049] Second connector 21 spring up process: handle 33 continues to rotate clockwise at the low part of handle guide block 50, the high section 31c of guide rail groove 31 passes through the second bearing 41 position on the positioning block 40, the second bearing 41 rotates to reduce friction when the guide rail groove 31 passes, the height of the locking ring below the guide rail groove 31 is the depth of the second bearing 41 pressed down; from the starting point to the end point of the high section 31c, the height of the locking ring below the guide rail groove 31 gradually decreases, that is, the depth of the locking ring 30 pressed down by the second bearing 41 gradually decreases, and the locking ring 30 springs up; the spring up distance is less than the drop distance.
[0050] The locking ring 30 springs up, and the clamping structure 32 composed of the upper clamping plate 321, the clamping groove 322 and the lower clamping plate 323 rotates clockwise through the first bearing position, the locking ring springs up, and the lower clamping plate 323 is on the first bearing 22, so that the overlapping part of the spring up of the second connector 21 and the static first connector 11 is reduced but still electrically connected; the first bearing 22 rotates to reduce friction when the clamping structure 32 passes.
[0051] The locking ring spring structure of the utility model can be applied to the locking of the test head (including image acquisition board card 20) and probe table 10 of different platforms. The utility model realizes the accurate and stable plug-in electrical connection of the second connector 21 of the image acquisition board card 20 and the first connector 11 of the probe card 12 in the probe table 10 through the rotation of the locking ring, realizes the stable contact of the first connector 11 and the second connector 21, improves the yield of the probe card 12 testing wafer, and reduces the test yield loss caused by the contact problem.
[0052] Through the design of the guide rail groove 31 of the locking ring 30 from the starting point of the high section to the end point of the high section, the height of the locking ring 30 below the guide rail groove 31 gradually decreases; the spring up of the second connector 21 is realized, so that the overlapping part of the second connector 21 and the first connector 11 is reduced but still electrically connected. Experiments show that the overlapping part of the second connector 21 and the first connector 11 is reduced by a preset distance, compared with the maximum overlapping size of the second connector 21 and the first connector 11 when plugged in, after the second connector 21 springs up by a preset distance, the contact effect of the second connector 21 and the first connector 11 is better and more stable. The effect of the second connector 21 and the first connector 11 from complete contact to local separation is realized, and the separation degree depends on the size of the spring back stroke. The spring back stroke can realize the change of the friction direction between the second connector 21 and the first connector 11. The spring back stroke of the locking ring structure can be designed as a fixed distance, or as a variable stroke.
[0053] In summary, the utility model provides a kind of probe station testing device, comprising: probe station, the periphery of the probe card in probe station is fixed with first connector;Image acquisition board card, the bottom periphery of image acquisition board is provided with second connector;The lower position of image acquisition board card is provided with first bearing;Lock ring, lock ring's periphery side wall is distributed with the guide rail groove and the clamping groove that all penetrate side wall;Upper clamping plate, clamping groove and lower clamping plate jointly constitute the clamping structure for first bearing;Guide rail groove includes intercommunicating low section, slope section and high section;Positioning block, positioning block is fixed on probe station, positioning block is provided with second bearing, and second bearing is located in guide rail groove;Handle rotation drives low section and slope section of guide rail groove to pass second bearing position in turn, and second bearing rotates and presses down lock ring when guide rail groove passes;At the same time, clamping structure rotates to pass first bearing position, and upper clamping plate presses down first bearing, to make second connector drop and be connected with the first connector of static plug-in electricity.The utility model realizes the accurate and stable plug-in electricity connection of the second connector of image acquisition board card and the first connector of the probe card in probe station by lock ring rotation, realizes the stable contact of first connector and second connector, improves the yield of probe card test wafer, reduces the test yield loss caused by contact problem.
[0054] Each embodiment in the specification is described in a progressive manner, and each embodiment focuses on the difference from other embodiments, and the same or similar parts between each embodiment can be referred to each other.For the method disclosed by the embodiment, since it corresponds to the device disclosed by the embodiment, the description is relatively simple, and the relevant part can be referred to the method part.
[0055] The above description is only the description of the preferred embodiment of the utility model, and does not limit the scope of the utility model, and any person skilled in the art can make possible changes and modifications to the utility model technical scheme by using the above disclosed method and technical content without departing from the spirit and scope of the utility model, therefore, any simple modification, equivalent change and modification made to the above embodiment according to the technical essence of the utility model, all belong to the protection scope of the utility model technical scheme.
Claims
1. A probe station test apparatus, characterized by, It includes: Probe station, the recess space of the probe station is fixed with a probe card, the periphery of the probe card is fixed with a first connector, and the probe station is fixed with a positioning protrusion in the Z direction; Image acquisition board, the image acquisition board is located above the probe card and is provided with a second connector at the bottom periphery; the image acquisition board is provided with a positioning recess, and the positioning recess is inserted and limited with the positioning protrusion; the lower position of the image acquisition board is provided with a first bearing; Lock ring, the annular plane of the lock ring is parallel to the upper surface of the probe station, and the lower surface of the lock ring is spaced apart from the upper surface of the probe station by a predetermined distance; the periphery of the lock ring is distributed with guide groove and clamping groove which are all through the side wall; the upper clamping plate of the lock ring extends to the radial center direction above the upper part of the clamping groove, and the lower clamping plate of the lock ring extends to the radial center direction below the lower part of the clamping groove; the upper clamping plate, the clamping groove and the lower clamping plate jointly constitute a clamping structure for the first bearing; the guide groove includes a low section, an inclined section and a high section which are communicated; the outside of the lock ring is fixed with a handle, Positioning block, the positioning block is fixed on the probe station, and the positioning block is provided with a second bearing, and the second bearing is located in the guide groove; The second connector descending process: the handle rotates and rotates from high to low, drives the low section and the inclined section of the guide groove to pass through the second bearing position in turn, and the second bearing rotates and presses down the lock ring when the guide groove passes through; at the same time, the clamping structure rotates through the first bearing position, and the upper clamping plate presses down the first bearing, so that the second connector is connected with the static first connector.
2. The probe station testing device of claim 1, wherein In the guide groove, the junction of the inclined section and the high section of the guide groove is the highest part of the lower surface of the guide groove; from the starting point of the high section to the terminal point of the high section, the height of the lock ring below the guide groove gradually decreases.
3. The probe station testing device of claim 2, wherein The second connector rebounding upward process: the handle continues to rotate, drives the high section of the guide groove to pass through the second bearing position, the second bearing rotates when the guide groove passes through, and the height of the lock ring below the guide groove is the depth pressed down by the second bearing; from the starting point of the high section to the terminal point of the high section, the depth of the lock ring pressed down by the second bearing gradually decreases, and the lock ring rebounds upward as a whole; at the same time, the lower clamping plate rises to the first bearing, so that the second connector rebounds upward and the overlapping part of the static first connector is reduced but still connected; the rebounding upward distance of the second connector is less than the descending distance.
4. The probe station apparatus of claim 1, wherein, Further includes: A handle guide block is fixed on the probe station and located on the outer side of the locking ring. The handle guide block is arranged in an arc along the outer side of the locking ring. The handle guide block has a high position part, an inclined part and a low position part connected in a clockwise direction. Pulling the handle along the handle guide block rotates from the high position part to the low position part in a clockwise direction.
5. The probe station testing device of claim 1, wherein, At least two first bearings are arranged on the image acquisition board card, and at least two clamping structures are arranged on the locking ring. The first bearings and the clamping structures are arranged one by one. At least two guide rail grooves are arranged on the locking ring, and the positioning blocks and the guide rail grooves are arranged one by one.
6. The probe station testing device of claim 1, wherein, The square periphery of the probe card is fixed with the first connector, and the square periphery of the bottom of the image acquisition board card is fixed with the second connector. The second connector is arranged corresponding to the first connector. The first bearing is arranged at the lower part of the outer four corners of the image acquisition board card.
7. The probe station testing device of claim 6, wherein, Four clamping structures are arranged on the locking ring, and one guide rail groove is arranged between every two adjacent clamping structures, that is, four guide rail grooves are arranged on the locking ring.
8. The probe station testing device of claim 1, wherein, A first shaft matched with the first bearing is arranged at the lower part of the image acquisition board card. The axial direction of the first shaft is parallel to the radial direction of the locking ring. The first shaft is fixed on the image acquisition board card. The inner ring of the first bearing is an integral structure with the first shaft, or the inner ring of the first bearing is fixed on the first shaft. A retainer and balls in the retainer are arranged between the outer ring of the first bearing and the inner ring of the first bearing.
9. The probe station testing device of claim 1, wherein, A second shaft matched with the second bearing is arranged on the positioning block. The axial direction of the second shaft is parallel to the radial direction of the locking ring. The second shaft is fixed on the positioning block. The inner ring of the second bearing is an integral structure with the second shaft, or the inner ring of the second bearing is fixed on the second shaft. A retainer and balls in the retainer are arranged between the outer ring of the second bearing and the inner ring of the second bearing.
10. The probe station testing device of claim 1, wherein, A plurality of probes arranged in an array are arranged on the first connector. The second connector is a female connector matched with the plurality of probes.