Ejector pin mechanism

Abstract

An embodiment of the utility model provides an ejector pin mechanism, which is used for ejecting a chip on a wafer and comprises an ejector pin unit and a vacuum adsorption assembly, and the ejector pin unit comprises an ejector pin and an ejector pin chuck. The vacuum adsorption assembly comprises an ejector pin sleeve and a vacuum unit; the vacuum unit comprises a vacuum part and a second connecting part; the ejector pin unit is sleeved with the ejector pin sleeve, and an ejector pin channel is formed in the upper end face of the ejector pin sleeve; according to the ejector pin mechanism, the ejector pin seat outer sleeve is arranged, and the air channel and the air channel are formed in the ejector pin seat outer sleeve, so that the structure of the ejector pin mechanism is simplified, a vacuum air channel is optimized, the length of the vacuum air channel and needed connecting pieces are reduced, the stability of the ejector pin mechanism is greatly improved, and the possible leakage problem of vacuum is solved; preferably, the air channel is obliquely formed in the ejector pin base outer sleeve, and the included angle between the air channel and the axis of the air channel is an obtuse angle, so that during vacuum action, the air resistance is smaller, the action response speed is higher, and the high-speed grabbing action can be better achieved.

Description

Technical Field

[0001] This utility model relates to the field of wafer loading equipment technology, and in particular to a pin mechanism. Background Technology

[0002] The manufacturing process of semiconductor chips is complex, mainly consisting of wafer fabrication, oxidation, photolithography, etching, thin film deposition, interconnection, testing, and packaging. Among these, packaging refers to the process of dicing the wafer from the front-end processes into individual chips with electrical properties. During product manufacturing, chips need to be picked up from the wafer film for production.

[0003] After the chip is cut into a matrix of individual chips on the film, the adhesion between the chip and the film is too strong, so the chip cannot be directly picked up from the film using a suction cup. It is necessary to lift the center of the chip and separate the chip edge from the film, thereby reducing the adhesion between the film and the chip, so that the suction cup can pick up the chip from the film.

[0004] Existing ejector mechanisms are cumbersome to replace and prone to damage. It is difficult to adjust multiple ejector pins to the same plane in multi-ejector mechanisms. Because repeated disassembly and installation are required, the hole positions of the ejector pin and ejector pin sleeve need to be checked and aligned each time, which increases the workload of operators. Furthermore, the ejector pin and ejector pin sleeve may also affect the sealing of the ejector pin cap due to wear and other reasons, leading to vacuum leakage. Utility Model Content

[0005] This utility model proposes an ejector pin mechanism to solve the technical problems existing in the prior art, such as the inability to disassemble and install the ejector pin mechanism, the inability of multiple ejector pins to be on the same horizontal plane, and vacuum leakage.

[0006] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0007] This utility model provides a ejector mechanism for lifting chips on a wafer, including an ejector unit and a vacuum adsorption assembly. The ejector unit includes an ejector pin and an ejector chuck. The vacuum adsorption assembly includes an ejector sleeve and a vacuum unit, which includes a vacuum section and a second connecting section. The ejector sleeve is fitted outside the ejector unit and has an ejector channel on its upper surface. The vacuum section includes an ejector seat outer sleeve, and the ejector sleeve is connected above the ejector seat outer sleeve. The ejector seat outer sleeve is fitted outside the second connecting section, and its upper end extends axially toward the ejector sleeve to form an extension section. The extension section is a hollow columnar structure. An air passage is formed on the ejector seat outer sleeve, and a gas channel is formed on the side wall of the extension section. One end of the gas channel communicates with the gas passage, and the other end extends through the upper surface of the extension section. A gas connector is installed at the opening of the gas passage. The gas passage is inclined on the ejector seat outer sleeve, and the angle between the axes of the gas passage and the gas channel is an obtuse angle.

[0008] Preferably, the ejector sleeve is threadedly connected to the extension section, and a sealing ring is provided between the inner circumferential surface of the lower edge of the ejector sleeve and the extension section.

[0009] Preferably, the second connecting part includes an inner shaft of the ejector pin, the upper end of which has a threaded section that is threadedly connected to the bottom of the ejector pin chuck; a ball bushing is fitted over the inner shaft of the ejector pin, and a linear bearing sleeve is fitted over the ball bushing.

[0010] Preferably, the top opening of the extension section is slightly larger than the outer diameter of the inner shaft of the ejector pin; a retaining groove is provided near the lower edge of the outer sleeve of the ejector pin seat, and a spring retaining ring is engaged in the retaining groove.

[0011] Preferably, the reset assembly maintains a tendency force applied to the inner axis of the ejector pin that is opposite to the ejector pin ejection direction.

[0012] Preferably, the reset assembly includes a compression spring, which is sleeved outside the inner shaft of the ejector pin, with the upper end of the compression spring abutting against the spring retaining ring and the lower end acting on the inner shaft of the ejector pin.

[0013] Preferably, the ejector pin sleeve has a groove near its upper end, into which a rubber ring is inserted, with the upper edge of the rubber ring positioned above the ejector pin sleeve.

[0014] Preferably, the gas channel extends to the rubber ring through the gas channel and the inner cavity of the ejector pin sleeve, and the rubber ring and the bottom contact surface of the wafer form a vacuum chamber.

[0015] Preferably, the connection between the threaded section and the ejector pin chuck is provided with a through hole and a threaded hole in the radial direction, respectively. After the two are threadedly connected, an ejector pin passes through the through hole and is then screwed into the threaded hole.

[0016] Preferably, the ejector pin housing has a mounting flange.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] The ejector mechanism provided by this utility model simplifies the structure of the ejector mechanism by setting an ejector seat jacket and opening air channels and air passages on the ejector seat jacket, optimizes the vacuum air passage, reduces the length of the vacuum air passage and the required connecting parts, and greatly improves the stability of the ejector mechanism and the leakage problem that may exist in the vacuum. In addition, it is preferable that the air passage is opened at an angle on the ejector seat jacket, and the angle between the axis of the air passage and the air passage is an obtuse angle. In this way, the air resistance is smaller and the action response speed is faster during vacuum action, which is more conducive to the realization of high-speed grasping action. Attached Figure Description

[0019] To more clearly illustrate the technical solution proposed by this utility model, a detailed description is provided below in conjunction with the embodiments and accompanying drawings. It should be understood that the accompanying drawings described below are merely some embodiments of this utility model, and those skilled in the art can make changes to these drawings under the concept of this utility model.

[0020] Figure 1 An assembly perspective view of the ejector mechanism provided by this utility model;

[0021] Figure 2 An assembly perspective view of the ejector pin chuck provided by this utility model;

[0022] Figure 3 An assembly perspective view of an embodiment of the second connecting part provided by this utility model;

[0023] Figure 4 An assembly perspective view of the ejector pin clamping cap provided by this utility model;

[0024] Figure 5 A cross-sectional view of the ejector mechanism provided by this utility model.

[0025] 1. Ejector pin; 2. Ejector pin chuck; 21. Frustum; 211. First cross groove; 212. Mounting hole; 22. Cylinder; 221. Second cross groove; 23. First connecting part; 3. Ejector pin sleeve; 31. Rubber ring; 32. Lower edge; 33. Inner cavity; 34. Sealing ring; 4. Ejector pin locking cap; 5. Vacuum part; 51. Ejector pin seat outer sleeve; 511. Air passage; 512. Extension section; 512a. Gas passage; 513. Mounting flange; 52. Gas connection connector; 6. Second connecting part; 61. Ejector pin inner shaft; 611. Threaded section; 62. Ball bushing; 63. Linear bearing sleeve; 64. Spring retaining ring; 65. Connecting rod; 7. Ejector screw. Detailed Implementation

[0026] The technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Similar component reference numerals in the drawings represent similar components. Obviously, the embodiments described below are only some embodiments of this utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0027] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0028] It should also be understood that the terminology used in this specification of embodiments of the present invention is for the purpose of describing particular embodiments only and is not intended to limit the embodiments of the present invention. As used in this specification of embodiments of the present invention and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0029] The present invention provides an ejector mechanism, comprising an ejector unit and a vacuum unit;

[0030] Please refer to the following: Figure 1 and Figure 2 , Figure 3 In this embodiment, the ejector pin unit includes an ejector pin 1, an ejector pin chuck 2, and a vacuum adsorption assembly. The ejector pin chuck 2 includes a mounting part, a fixing part, and a first connecting part 23. The mounting part, fixing part, and first connecting part 23 are machined into a single unit. The mounting part includes a frustum 21 with a first cross groove 211 at its center. The first cross groove 211 has multiple mounting holes 212 for inserting ejector pins 1, allowing the number of ejector pins 1 to be selected according to the chip size. The fixing part includes a cylinder 22 located below the frustum 21, with a certain distance between the frustum 21 and the cylinder 22. The center of the cylinder 22 is connected to the first cross groove 211. A second cross groove 221 is formed parallel to the cross groove 211. The width of the second cross groove 221 is greater than that of the first cross groove 211. The ejector pin 1 passes through the mounting hole 212 and the second cross groove 221 and abuts against the cylinder 22, so that multiple ejector pins 1 are located on the same horizontal plane. Then, by fitting the ejector pin locking cap 4 onto the ejector pin chuck 2, the inner surface of the ejector pin locking cap 4 is provided with internal threads, and the outer surface of the cylinder 22 is provided with external threads. By tightening the ejector pin locking cap 4, the ejector pin 1 is tightly fixed in the mounting hole 212 and the second cross groove 221, so that the width of the second cross groove 221 is exactly the same as the diameter of the ejector pin 1, thus completing the quick installation and fixing of multiple ejector pins 1.

[0031] Please refer to the following: Figure 3 , Figure 5In this embodiment, the vacuum adsorption assembly includes a pin sleeve 3 and a vacuum unit including a vacuum section 5 and a second connecting section 6. The vacuum section 5 includes a pin seat outer sleeve 51, and the pin sleeve 3 is connected above the pin seat outer sleeve 51. The pin seat outer sleeve 51 is sleeved on the outside of the linear bearing sleeve 63, and the upper end of the pin seat outer sleeve 51 extends axially toward the pin sleeve 3 to form an extension section 512. The extension section 512 is a hollow columnar structure. An air passage 511 is provided on the pin seat outer sleeve 51, and a gas channel 512a is provided on the side wall of the extension section 512. One end of the gas channel 512a communicates with the air passage 511, and the other end extends through the upper end face of the extension section 512. An air connector 52 is installed at the opening of the air passage 511, and the air passage 52 is connected to the pipeline of an external vacuum device. The end of the air passage 511 is vacuumed through the air passage 511. Specifically, the ejector sleeve 3 is fitted over the ejector locking cap 4, with a gap between the ejector locking cap 4 and the inner wall of the ejector sleeve 3. The ejector sleeve 3 is threadedly connected to the extension section 512. A sealing ring 34 is provided between the inner circumferential surface of the lower edge 32 of the ejector sleeve 3 and the extension section 512 to seal the two and prevent vacuum leakage. In addition, the ejector seat outer sleeve 51 has a mounting flange 513 for connecting and installing the entire mechanism with components such as the frame.

[0032] In this embodiment, a groove is provided on the outer peripheral surface of the upper end of the ejector sleeve 3, and a rubber ring 31 is inserted into the groove, thereby forming a suction cup structure. The top of the ejector sleeve 3 is provided with multiple ejector holes. The gas channel 511 extends to the top of the rubber ring 31 via the gas channel 512a and the inner cavity 33 of the ejector sleeve 3. The rubber ring 31 contacts the blue film on the bottom of the wafer to form a vacuum chamber. When an external vacuum device, such as a vacuum generator, is activated, a vacuum is generated in the vacuum chamber. When the drive unit drives the ejector 1 to move, the ejector 1 passes through the ejector hole in the vacuum chamber and pushes the chip upward. When the external die-grabbing equipment picks up the wafer, since the blue film is adsorbed, it is easier to separate the wafer from the blue film for picking. The design of the ejector seat jacket 51 in this embodiment, along with the air passage 511 and air channel a on the ejector seat jacket 51, simplifies the structure of the ejector mechanism, optimizes the vacuum air path, reduces the length of the vacuum air path and the required connecting parts, and significantly improves the stability of the ejector mechanism and the potential leakage problem in the vacuum. Furthermore, it is preferable that the air passage 511 is inclined on the ejector seat jacket 51, and the angle between the axis of the air passage 511 and the air channel a is an obtuse angle. This results in less air resistance and faster action response during vacuum operation, which is more conducive to the realization of high-speed gripping action.

[0033] The ejector seat outer sleeve 51 is fitted over the second connecting part 6. Specifically, the second connecting part 6 includes an inner ejector shaft 61, the upper end of which has a threaded section 611. This threaded section 611 is threadedly connected to the threaded hole at the bottom of the first connecting part 23. Preferably, the threaded section 611 and the first connecting part 23 have a through hole and a threaded hole respectively radially formed at their connection point. After the two are threadedly connected, an ejector screw 7 passes through the through hole and is threaded into the threaded hole. Furthermore, it is even more preferable that the inner shaft is made of a wear-resistant material, such as stainless steel. A ball bushing 62 is fitted over the inner ejector shaft 61. The ball bushing 62 converts sliding friction into rolling friction, reducing friction. A linear bearing sleeve 63 is fitted over the ball bushing 62. To axially limit the linear bearing sleeve 63 and the ball bushing 62 and prevent them from dislodging, this embodiment preferably has a top opening of the extension section 512 slightly larger than the outer diameter of the ejector pin inner shaft 61. This ensures the smooth passage and axial movement of the ejector pin inner shaft 61, but restricts the linear bearing sleeve 63 and the ball bushing 62 from moving upward through the top opening of the extension section 512. Furthermore, a retaining ring groove is provided near the lower edge 32 of the ejector pin seat outer sleeve 51. A spring retaining ring 64 is engaged in the retaining ring groove to restrict the linear bearing sleeve 63 and the ball bushing 62 from dislodging from the lower end. A connecting rod is connected to the lower end of the ejector pin inner shaft 61. The connecting rod is connected to the power output end of the drive component, driving the ejector pin inner shaft 61 to move axially upward. Furthermore, to ensure the ejector pin quickly returns to its initial position after an ejection action, this embodiment preferably includes a compression spring. Specifically, the compression spring is sleeved outside the inner shaft 61 of the ejector pin, with its upper end abutting against the spring retainer 64 and its lower end abutting against the connecting rod. When the output end of the drive unit moves the connecting rod and the inner shaft 61 of the ejector pin upwards, thereby causing the ejector pin 1 to eject, the compression spring is compressed. After the ejection is completed and the power at the output end of the drive unit is removed, the compression spring begins to recover, which will spring the connecting rod back to its initial position. It should be noted that the drive unit in this embodiment can be a stepper motor or a voice coil motor.

[0034] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. The illustrative expressions of the above terms in this specification should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0035] The above description describes specific embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the scope of protection of this utility model. Therefore, the scope of protection of this utility model should be determined by the scope of the claims.

Claims

1. A push-pin mechanism for lifting a chip on a wafer, characterized in that, The device includes a ejector unit and a vacuum adsorption assembly. The ejector unit includes an ejector pin and an ejector pin chuck. The vacuum adsorption assembly includes an ejector pin sleeve and a vacuum unit, which includes a vacuum section and a second connecting section. The ejector pin sleeve is fitted outside the ejector unit and has an ejector pin channel on its upper surface. The vacuum section includes an ejector pin seat outer sleeve, which is connected above the ejector pin seat outer sleeve. The ejector pin seat outer sleeve is fitted outside the second connecting section, and its upper end extends axially toward the ejector pin sleeve as an extension section. The extension section is a hollow columnar structure. An air passage is formed on the ejector pin seat outer sleeve, and a gas channel is formed on the side wall of the extension section. One end of the gas channel communicates with the air passage, and the other end extends through the upper surface of the extension section. An air passage connector is installed at the opening of the air passage. The air passage is inclined on the ejector pin seat outer sleeve, and the angle between the axes of the air passage and the air passage is an obtuse angle.

2. The ejector mechanism as described in claim 1, characterized in that, The ejector sleeve is threadedly connected to the extension section, and a sealing ring is provided between the inner circumferential surface of the ejector sleeve near the lower edge and the extension section.

3. The ejector mechanism as described in claim 1, characterized in that, The second connecting part includes an inner shaft of a ejector pin, the upper end of which has a threaded section, and the threaded section is threadedly connected to the bottom of the ejector pin chuck; a ball bushing is sleeved on the inner shaft of the ejector pin, and a linear bearing sleeve is sleeved on the outside of the ball bushing.

4. The ejector mechanism as described in claim 3, characterized in that, The top opening of the extension section is slightly larger than the outer diameter of the inner shaft of the ejector pin; a retaining groove is provided near the lower edge of the outer sleeve of the ejector pin seat, and a spring retaining ring is engaged in the retaining groove.

5. The ejector mechanism as described in claim 4, characterized in that, It also includes a reset component that maintains a tendency force applied to the inner axis of the ejector pin that is opposite to the ejector pin ejection direction.

6. The ejector mechanism as described in claim 5, characterized in that, The reset assembly includes a compression spring, which is sleeved outside the inner shaft of the ejector pin. The upper end of the compression spring abuts against the spring retaining ring, and the lower end acts on the inner shaft of the ejector pin.

7. The ejector mechanism as described in claim 1, characterized in that, The ejector pin sleeve has a slot near its upper end, and a rubber ring is inserted into the slot. The upper edge of the rubber ring is at the same height as the ejector pin sleeve.

8. The ejector mechanism as described in claim 7, characterized in that, The gas passage extends through the gas channel and the inner cavity of the ejector pin sleeve to the rubber ring, and the rubber ring forms a vacuum chamber with the bottom contact surface of the wafer.

9. The ejector mechanism as described in claim 3, characterized in that, The connection between the threaded section and the ejector pin chuck is provided with a through hole and a threaded hole in the radial direction, respectively. After the two are threadedly connected, a set screw passes through the through hole and is then screwed into the threaded hole.

10. The ejector mechanism as described in claim 4, characterized in that, The ejector pin housing has a mounting flange.

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