Vacuum breaking device and coating equipment

Abstract

The utility model relates to the field of coating equipment, and discloses a vacuum breaking device and the coating equipment. The vacuum breaking device comprises a mounting frame, a linear driving assembly and a sealing cover, the mounting frame is provided with a first containing cavity, the first containing cavity communicates with the outside in the radial direction, and an air inlet hole is formed in the axial end of the mounting frame and communicates with the first containing cavity; the linear driving assembly is fixedly mounted at the end, away from the air inlet, of the mounting frame, the sealing cover is mounted at the telescopic end of the linear driving assembly and located in the first containing cavity, and the linear driving assembly drives the sealing cover to close or open the air inlet. The first containing cavity is communicated with the outside in the radial direction, after the linear driving assembly drives the sealing cover to unseal the air inlet hole, a large amount of external air can directly enter the air inlet hole through the first containing cavity, and further, the external air enters a part communicated with the air inlet hole through the air inlet hole; and the part communicated with the air inlet hole is recovered to the atmospheric environment state.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of coating equipment, in particular to a vacuum breaking device and coating equipment. BACKGROUND

[0002] In the current vacuum coating process, the operating environment of the vacuum chamber needs to be converted from high vacuum to atmospheric state before and after coating, which is a necessary step to realize product installation and disassembly. However, the existing vacuum breaking assembly generally has a small air flow in the design, which directly leads to a long time-consuming and low efficiency in the vacuum breaking process, so that the vacuum chamber cannot be quickly restored to the atmospheric state suitable for the operation of the staff.

[0003] This situation not only seriously restricts the continuous operation capacity of the production line and reduces the overall production efficiency, but also increases the production cost and time cost due to frequent downtime and waiting. CONTENT OF THE INVENTION

[0004] Therefore, the purpose of the present application is to overcome the deficiencies in the prior art and provide a vacuum breaking device and coating equipment.

[0005] To achieve the above purpose, the technical scheme adopted by the present application is as follows:

[0006] The present application provides:

[0007] A vacuum breaking device, comprising:

[0008] A mounting frame having a first accommodating cavity, the first accommodating cavity being in communication with the outside in the radial direction, the mounting frame having an air inlet hole opened at the axial end, the air inlet hole being in communication with the first accommodating cavity;

[0009] A linear drive assembly fixedly installed at the end of the mounting frame away from the air inlet hole;

[0010] A sealing cover installed at the telescopic end of the linear drive assembly, the sealing cover being located in the first accommodating cavity, the linear drive assembly driving the sealing cover to close or open the air inlet hole.

[0011] Further, the mounting frame comprises:

[0012] A first plate, the linear drive assembly being fixedly installed on the first plate;

[0013] A plurality of connecting columns, the connecting columns being uniformly spaced and fixedly installed on the end face of the first plate away from the linear drive assembly;

[0014] A second plate member is fixedly installed on the end face of the connecting column away from the first plate member, and the air inlet hole is arranged on the second plate member. The first plate member, the connecting column and the second plate member define the first accommodating cavity.

[0015] Further, an end of the first plate member towards the second plate member is fixedly installed with a filter core, an end of the filter core away from the first plate member is connected with the end face of the second plate member towards the first plate member, the filter core is located in the first accommodating cavity, the filter core has a second accommodating cavity, the sealing cover is located in the second accommodating cavity, and the air inlet hole is in communication with the second accommodating cavity.

[0016] Further, an end face of the second plate member away from the first plate member is fixedly installed with an air inlet pipe, the air inlet pipe is in communication with the air inlet hole, and the air inlet pipe is arranged in the circumferential direction of the air inlet hole.

[0017] Further, the linear drive assembly comprises:

[0018] a linear drive member;

[0019] a transmission rod connected with the telescopic end of the linear drive member;

[0020] a connecting head arranged at the end of the transmission rod away from the linear drive member, and the peripheral surface of the connecting head is provided with a limiting groove.

[0021] Further, the surface of the connecting head away from the linear drive member is an arc surface.

[0022] Further, the end face of the sealing cover towards the connecting head is provided with a protrusion, and the protrusion is arranged with a mounting groove matched with the connecting head.

[0023] Further, the end face of the sealing cover towards the air inlet hole is provided with a sealing assembly, the sealing assembly comprises a receiving groove arranged on the end face of the sealing cover towards the air inlet hole, and a sealing member is arranged in the receiving groove.

[0024] Further, the sealing member partially protrudes from the end face of the sealing cover towards the air inlet hole.

[0025] The application also provides a coating equipment comprising the above-mentioned vacuum breaking device.

[0026] The first accommodating cavity of the application is communicated with the outside in the radial direction, and when the linear driving assembly drives the sealing cover to unblock the air inlet hole, a large amount of air outside can directly enter the air inlet hole through the first accommodating cavity, and further air outside enters the component communicated with the air inlet hole through the air inlet hole, so that the component communicated with the air inlet hole returns to the atmospheric environment state, and the vacuum is broken.

[0027] In order to make the above objectives, characteristics and advantages of the application more apparent and easy to understand, the following preferred embodiments are specifically described below, and the accompanying drawings are referred to for detailed description. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some of the embodiments of the application, and therefore should not be regarded as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0029] Figure 1 The overall structure of the vacuum breaking device of the application is shown in the schematic diagram;

[0030] Figure 2 The cross-sectional structure of the vacuum breaking device of the application is shown in the schematic diagram;

[0031] Figure 3 The structure of the linear driving assembly of the application is shown in the schematic diagram;

[0032] Figure 4 The three-dimensional structure of the sealing cover of the application is shown in the schematic diagram;

[0033] Figure 5 The structure of the sealing cover and the sealing assembly of the application is shown in the schematic diagram.

[0034] Main element symbol explanation: 100-mounting frame; 101-first accommodating cavity; 102-air inlet hole; 110-first plate; 120-connection column; 130-second plate; 200-linear driving assembly; 210-linear driving member; 220-transmission rod; 230-connection head; 240-limiting groove; 300-sealing cover; 310-protrusion; 320-mounting groove; 400-filter element; 410-second accommodating cavity; 500-air inlet pipe; 600-sealing assembly; 610-housing groove; 620-sealing member. DETAILED DESCRIPTION

[0035] Embodiments of the present application are described below in detail with reference to examples shown in the drawings, wherein the same or similar numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary only, and are merely intended to explain the present application, and are not to be understood as limiting the present application.

[0036] In the description of the present application, it needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and is not intended to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0037] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0038] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0039] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "under" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0040] In the current vacuum coating process, the operating environment of the vacuum cavity of the coating equipment needs to be converted from high vacuum to atmospheric state before and after coating. Therefore, the vacuum breaking process needs to be performed. The existing vacuum breaking assembly has a small gas flow. Therefore, a certain period of time needs to be waited before the vacuum breaking process can be performed, thereby leading to long time and low efficiency, and the vacuum cavity cannot be quickly restored to the atmospheric state.

[0041] The embodiment of the present application provides a vacuum breaking device. In some embodiments, the vacuum breaking device comprises a mounting frame 100, a linear drive assembly 200 and a sealing cover 300. Specifically, the mounting frame 100 has a first accommodating cavity 101 which is in communication with the outside in the radial direction. An air inlet hole 102 is formed in the axial end of the mounting frame 100 and is in communication with the first accommodating cavity 101. The linear drive assembly 200 is fixedly installed at the end of the mounting frame 100 away from the air inlet hole 102. The sealing cover 300 is installed at the telescopic end of the linear drive assembly 200 and is located in the first accommodating cavity 101. The linear drive assembly 200 drives the sealing cover 300 to close or open the air inlet hole 102.

[0042] As shown in Figure 1 and Figure 2 , the air inlet hole 102 is in communication with the vacuum cavity. When the vacuum cavity is in a vacuum state, the linear drive assembly 200 drives the sealing cover 300 to block the air inlet hole 102 at this time, preventing the vacuum cavity from being in communication with the outside. When the vacuum breaking operation is needed, the linear drive assembly 200 drives the sealing cover 300 to remove the blockage of the air inlet hole 102. At this time, the air inlet hole 102 is in communication with the outside atmosphere through the first accommodating cavity 101. Under the action of air pressure, a large amount of air from the outside will enter the vacuum cavity in communication with the air inlet hole 102 through the first accommodating cavity 101, so that the vacuum cavity in communication with the air inlet hole 102 is quickly restored to the atmospheric state, realizing the effect of vacuum breaking.

[0043] In some embodiments, as shown in Figure 1 , the mounting frame 100 is cylindrical, the air inlet hole 102 is arranged at the lower end surface of the mounting frame 100, the linear drive assembly 200 is fixedly installed on the upper surface of the mounting frame 100, and the sealing cover 300 is located inside the mounting frame 100. In order to be able to close the air inlet hole 102 through the sealing cover 300, the area of the sealing cover 300 should be greater than the area of the air inlet hole 102. Specifically, the air inlet hole 102 and the sealing cover 300 are both circular.

[0044] The mounting frame 100 comprises a first plate 110, a plurality of connecting columns 120 and a second plate 130, the linear drive assembly 200 is fixedly installed on the first plate 110, the connecting columns 120 are uniformly spaced and fixedly installed on the end face of the first plate 110 away from the linear drive assembly 200, the second plate 130 is fixedly installed on the end face of the connecting columns 120 away from the first plate 110, the air inlet hole 102 is arranged on the second plate 130, and the first plate 110, the connecting columns 120 and the second plate 130 define the first containing cavity 101.

[0045] Referring to Figure 1 The first plate 110 and the second plate 130 are connected through the plurality of connecting columns 120, the first plate 110, the connecting columns 120 and the second plate 130 constitute the mounting frame 100, and since the cross section of the connecting columns 120 is small, that is, the area occupied by the end face of the first plate 110 and the connecting columns 120 is small, therefore, the area formed between the two adjacent connecting columns 120 is a channel for external air to enter the first containing cavity 101, that is, the air inlet channel is much larger than the proportion of the connecting columns 120 in the outer circumferential surface of the mounting frame 100, when it is necessary to break the vacuum, the external gas can quickly enter the first containing cavity 101, and then enter the vacuum cavity in communication with the air inlet hole 102 through the first containing cavity 101, so that the vacuum cavity returns to the atmospheric state.

[0046] The end of the first plate 110 towards the second plate 130 is fixedly installed with a filter core 400, the end of the filter core 400 away from the first plate 110 is connected with the end face of the second plate 130 towards the first plate 110, the filter core 400 is located in the first containing cavity 101, the filter core 400 has a second containing cavity 410, the sealing cover 300 is located in the second containing cavity 410, and the air inlet hole 102 is in communication with the second containing cavity 410.

[0047] Referring to Figure 1 And Figure 2 As can be seen from FIGS. 1 to 4, since dust exists in the atmospheric air, if the external air directly enters the vacuum cavity in communication with the air inlet hole 102 through the first containing cavity 101, the dust will also enter the vacuum cavity, thereby causing pollution of the vacuum cavity, therefore, a filter core 400 is fixedly installed between the first plate 110 and the second plate 130, the filter core 400 has a second containing cavity 410, in order to prevent external dust from entering the air inlet hole 102, the air inlet hole 102 is in communication with the second containing cavity 410, that is, the second containing cavity 410 covers the air inlet hole 102 inside, so that the gas entering the air inlet hole 102 is first filtered by the filter core 400.

[0048] It can be connected that the filter element 400 can be any component that can play a filtering effect, and specific limitations are not made, for example: the filter element 400 is a combination, which can be combined by fiber materials, activated carbon, and filter paper, etc. The fiber material can be polyester fiber, glass fiber, etc., which can effectively block particulate matter; activated carbon has strong adsorption effect, thereby removing odors, harmful gases, etc., and filter paper can filter small dust and other impurities.

[0049] The end face of the second plate member 130 away from the first plate member 110 is fixedly installed with an air inlet pipe 500, the air inlet pipe 500 is in communication with the air inlet hole 102, and the air inlet pipe 500 is arranged along the circumference of the air inlet hole 102.

[0050] Please continue to refer to Figure 1 and Figure 2 It is shown that the air inlet hole 102 can be communicated with components such as vacuum cavities that need to break vacuum through the air inlet pipe 500, that is, the air inlet pipe 500 plays the role of a communication pipeline at this time. It can be understood that the cross-sectional area of the air inlet pipe 500 is greater than the area of the air inlet hole 102, the air inlet pipe 500 covers the air inlet hole 102 inside it, and the air inlet pipe 500 is connected to the second plate member 130 at the circumferential direction of the air inlet hole 102.

[0051] The linear drive assembly 200 includes a linear drive member 210, a transmission rod 220, and a connecting head 230. The transmission rod 220 is connected to the telescopic end of the linear drive member 210. The connecting head 230 is arranged at the end of the transmission rod 220 away from the linear drive member 210. The circumferential surface of the connecting head 230 has a limiting groove 240.

[0052] Refer to Figure 2 and Figure 3 It is shown that in the present embodiment, the linear drive member 210 is fixedly installed on the upper surface of the first plate member 110. The transmission rod 220 connected to the telescopic end of the linear drive member 210 is located inside the second accommodating cavity 410, and the connecting head 230 at the end of the transmission rod 220 is connected to the sealing cover 300, so that when the linear drive member 210 drives the transmission rod 220 to move, the sealing cover 300 can also be driven to move through the connecting head 230. When the sealing cover 300 is moved to the position of the air inlet hole 102, the air inlet hole 102 is closed. When the sealing cover 300 is moved away from the air inlet hole 102, the air inlet hole 102 is opened. The air outside is filtered by the filter element 400 and enters the air inlet hole 102, and then enters the components that need to break vacuum through the air inlet pipe 500.

[0053] It should be noted that in the present embodiment, the linear drive member 210 is a gas cylinder.

[0054] The end face of the sealing cover 300 towards the connecting head 230 is provided with a protrusion 310, and a mounting groove 320 is formed in the protrusion 310 and matched with the connecting head 230; and the face of the connecting head 230 away from the linear driving member 210 is an arc face.

[0055] As shown in Figure 4 and Figure 5 illustred, the connecting head 230 is inserted into the mounting groove 320 to be clamped and mounted, the limiting groove 240 on the circumferential surface of the connecting head 230 is used to avoid the protrusion 310 to prevent movement interference with the protrusion 310 during installation, and the connecting head 230 has a certain amount of movement in the mounting groove 320, that is, the connecting head 230 and the mounting groove 320 are not fixedly connected.

[0056] Further, the end of the connecting head 230 is an arc face, specifically a hemispherical face, when the bottom surface of the sealing cover 300 and the upper surface of the second plate member 130 are not parallel due to machining or installation, the connecting head 230 moves in the mounting groove 320 and is pressed to make the bottom surface of the sealing cover 300 and the upper surface of the second plate member 130 closely contact, to ensure the sealing property.

[0057] The end face of the sealing cover 300 towards the air inlet hole 102 is provided with a sealing assembly 600, the sealing assembly 600 comprises a containing groove 610 formed in the end face of the sealing cover 300 towards the air inlet hole 102, and a sealing member 620 is mounted in the containing groove 610; and the sealing member 620 partially protrudes from the end face of the sealing cover 300 towards the air inlet hole 102.

[0058] As shown in Figure 5 illustrated, in order to ensure the sealing property of the sealing cover 300 to the air inlet hole 102, the lower surface of the sealing cover 300 needs to closely contact with the upper surface of the second plate member 130, and for this purpose, the sealing assembly 600 is arranged on the lower surface of the sealing cover 300 to seal the air inlet hole 102, specifically, the containing groove 610 is formed in the bottom surface of the sealing cover 300, and the sealing member 620 is mounted in the containing groove 610 and partially protrudes from the bottom surface of the sealing cover 300, and when it is needed to close the air inlet hole 102, the sealing member 620 can fully contact with the upper surface of the second plate member 130 to prevent the gap between the sealing cover 300 and the second plate member 130.

[0059] In this embodiment, the containing groove 610 is a dovetail groove, and the sealing member 620 is a sealing ring, for example, an O-shaped groove.

[0060] The application further provides a coating equipment, the coating equipment comprising the vacuum breaking device.

[0061] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the present application and the features of the different embodiments or examples without contradiction.

[0062] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limiting the present application, and the person skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. A vacuum breaking device, characterized in that, The utility model relates to a filter device, including: Mounting frame (100) has first accommodating cavity (101), first accommodating cavity (101) is communicated with outside in radial direction, mounting frame (100) axial end is provided with air inlet hole (102), air inlet hole (102) is communicated with first accommodating cavity (101); Linear drive assembly (200) is fixedly installed in the end of mounting frame (100) away from air inlet hole (102) direction; Sealing cover (300) is installed in the telescopic end of linear drive assembly (200), sealing cover (300) is located in first accommodating cavity (101), and linear drive assembly (200) drives sealing cover (300) to close or open air inlet hole (102).

2. The vacuum breaking device according to claim 1, characterized in that The mounting frame (100) includes: First plate (110), the linear drive assembly (200) is fixedly installed on the first plate (110); A plurality of connecting columns (120) are uniformly spaced and fixedly installed on the end face of the first plate (110) away from the linear drive assembly (200) direction; Second plate (130) is fixedly installed on the end face of the connecting column (120) away from the first plate (110) direction, the air inlet hole (102) is provided on the second plate (130), and the first plate (110), connecting column (120) and the second plate (130) define the first accommodating cavity (101).

3. The vacuum breaking device of claim 2, wherein The end of the first plate (110) towards the second plate (130) direction is fixedly installed with filter core (400), the end of the filter core (400) away from the first plate (110) direction is connected with the end face of the second plate (130) towards the first plate (110) direction, the filter core (400) is located in the first accommodating cavity (101), the filter core (400) has second accommodating cavity (410), the sealing cover (300) is located in the second accommodating cavity (410), and the air inlet hole (102) is communicated with the second accommodating cavity (410).

4. The vacuum breaking device of claim 2, wherein The end face of the second plate (130) away from the first plate (110) direction is fixedly installed with air inlet pipe (500), the air inlet pipe (500) is communicated with the air inlet hole (102), and the air inlet pipe (500) is arranged along the circumference of the air inlet hole (102).

5. The vacuum breaking device of claim 1, wherein The linear drive assembly (200) includes: Linear drive part (210); Transmission rod (220) is connected with the telescopic end of linear drive part (210); Connecting head (230) is arranged at the end of transmission rod (220) away from linear drive part (210) direction, and the circumferential surface of connecting head (230) has limit slot (240).

6. The vacuum breaking device of claim 5, wherein The face of the connecting head (230) away from the linear drive part (210) direction is arc surface.

7. The vacuum breaking device of claim 5, wherein The end face of the sealing cover (300) towards the connector (230) is provided with a protrusion (310), and the protrusion (310) is provided with a mounting groove (320) matched with the connector (230).

8. The vacuum breaking device of claim 1, wherein, The end face of the sealing cover (300) towards the air inlet hole (102) is provided with a sealing assembly (600), and the sealing assembly (600) comprises a containing groove (610) formed on the end face of the sealing cover (300) towards the air inlet hole (102), and a sealing element (620) is mounted in the containing groove (610).

9. The vacuum breaking device of claim 8, wherein, The sealing element (620) partially protrudes from the end face of the sealing cover (300) towards the air inlet hole (102).

10. A coating apparatus, characterized by, The vacuum breaking device comprises the sealing cover (300) according to any one of claims 1 to 9.

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