Adjustable probe mechanism and wafer detection device

Abstract

The utility model relates to an adjustable probe mechanism and a wafer detection device. The probe mechanism comprises a probe assembly, a top cover plate, a mounting assembly and an adjusting assembly, the probe assembly comprises a probe arm and a plurality of probes, the probe arm extends along a first direction, and the plurality of probes are arranged at one end of the probe arm at intervals; the top cover plate is used for installing the probe assembly, and the probe arm and the plurality of probes are located on the same side of the top cover plate; the mounting assembly is used for mounting the probe assembly and comprises a sleeving block, and the sleeving block is connected with the side, away from the multiple probes, of the probe arm; the adjusting assembly comprises a connecting piece, the connecting piece extends in the second direction, and the connecting piece is movably connected with the sleeving block; the connecting piece can move in the second direction to drive the sleeving block to rotate, so that the probe arm and the probes are driven to rotate, the angles of the multiple probes are adjusted, and the first direction intersects with the second direction. The probe mechanism can adjust the angles of a plurality of probes.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer detection, in particular to an adjustable probe mechanism and wafer detection device. BACKGROUND

[0002] In the detection of wafer, the tip of the probe needs to be accurately and stably stuck on the pressure welding point of the wafer to perform electrical test. When the end of the probe arm has multiple probes, the angle of the probe needs to be adjusted so that the multiple probes can be stuck on the wafer. Therefore, an adjusting assembly needs to be provided to adjust the angle of the probe. CONTENT OF THE UTILITY MODEL

[0003] In view of this, the present application provides an adjustable probe mechanism and wafer detection device, which can adjust the angle of the multiple probes.

[0004] The present application provides an adjustable probe mechanism, which comprises a probe assembly, a top cover plate, a mounting assembly and an adjusting assembly. The probe assembly comprises a probe arm and multiple probes. The probe arm extends along a first direction, and the multiple probes are arranged at one end of the probe arm. The top cover plate is used for mounting the probe assembly, and the probe arm and the multiple probes are located on the same side of the top cover plate. The mounting assembly is used for mounting the probe assembly, and comprises a sleeve block connected to the side of the probe arm away from the multiple probes. The adjusting assembly comprises a connecting piece extending along a second direction, and the connecting piece is movably connected to the sleeve block. The connecting piece can move along the second direction to drive the sleeve block to rotate, thereby driving the probe arm and the probes to rotate, so as to adjust the angle of the multiple probes. The first direction intersects the second direction.

[0005] Further, the adjusting assembly further comprises a first connecting shaft and a rotating piece. The first connecting shaft and the rotating piece are arranged on the side of the top cover plate away from the probe arm. The first connecting shaft is sleeved on the end of the connecting piece away from the sleeve block, and the first connecting shaft is threadedly connected with the connecting piece. The rotating piece is connected to the end of the first connecting shaft away from the connecting piece. When the rotating piece rotates, it drives the first connecting shaft to rotate, so that the connecting piece moves along the second direction relative to the first connecting shaft, to drive the sleeve block to rotate, thereby driving the probe arm and the probes to rotate, so as to adjust the angle of the multiple probes.

[0006] Further, the sleeve block comprises a connecting portion and a sleeve portion connected thereto. The sleeve portion is connected to the probe arm and is sleeved on the outer periphery of the probe arm. The connecting portion is movably connected to the connecting piece.

[0007] Further, the adjusting assembly further comprises a second connecting shaft and a knob, the second connecting shaft is sleeved on the end of the rotating member away from the first connecting shaft, the knob is arranged on the end of the second connecting shaft away from the rotating member, when the knob rotates, the second connecting shaft rotates to drive the rotating member to rotate.

[0008] Further, the mounting assembly further comprises a mounting block, the mounting block is located on the same side of the probe arm as the top cover plate, the mounting block comprises a mounting portion, the mounting portion has a mounting space, the sleeve block is located in the mounting space, and the probe arm is further rotatably connected to the mounting portion.

[0009] Further, the adjusting assembly further comprises a protective cylinder, the protective cylinder is connected to the knob and the top cover plate respectively, the protective cylinder has a channel, and the channel is used for arranging the rotating member.

[0010] Further, the channel comprises a first sub-channel and a second sub-channel connected by bending, the first sub-channel is farther away from the top cover plate than the second sub-channel, and the second sub-channel further communicates with the side of the top cover plate away from the knob; the rotating member comprises a first sub-portion, a second sub-portion, a third sub-portion and a fourth sub-portion connected to each other, the first sub-portion and the third sub-portion are bent towards the opposite sides of the second sub-portion, the fourth sub-portion and the second sub-portion are bent towards the opposite sides of the third sub-portion, the first sub-portion is located in the first sub-channel, the second sub-portion is at least partially located in the second sub-channel, the third sub-portion extends in a first direction, the fourth sub-portion extends in a second direction, and the third sub-portion and the fourth sub-portion are located on the side of the top cover plate away from the knob.

[0011] Further, the probe mechanism further comprises an electrical connection interface, the electrical connection interface is arranged on the protective cylinder, the electrical connection interface is electrically connected to the probe, and the electrical connection interface is electrically connected to an external power supply.

[0012] Further, the probe assembly further comprises a probe seat and an extension arm, the probe seat is arranged on the side of the top cover plate away from the probe arm, the extension arm is arranged through the top cover plate, and one end of the extension arm is connected to the probe seat; the mounting block further comprises a clamping portion, the clamping portion is connected to the side of the mounting portion away from the probe, and the clamping portion is used for clamping the end of the extension arm away from the probe seat.

[0013] The application provides a wafer detection device, which comprises a shell, a probe mechanism and a chuck provided in the application, and a top cover plate connected to the shell to enclose a sample cavity; the chuck is arranged in the sample cavity and used for carrying a sample to be detected, and the probe is used for detecting the sample to be detected.

[0014] In the present application, the probe arm extends in a first direction, and the plurality of probes are arranged at one end of the probe arm, when the probe arm rotates, the plurality of probes rotate relative to the top cover plate, thereby achieving the adjustment of the angle of the plurality of probes. Specifically, the probe arm, the probe, the sleeve block and the connecting piece are located on the same side of the top cover plate, when the connecting piece moves relative to the top cover plate in a second direction, the sleeve block is driven to rotate relative to the top cover plate, and the sleeve block is fixedly connected to the probe arm, thereby driving the probe arm and the probe to rotate, thereby achieving the adjustment of the angle of the probe. When the adjustable probe mechanism is applied to a wafer detection device, the sample to be detected is arranged on the chuck, and the plurality of probes can flatly contact the chuck, so as to ensure that the plurality of probes can all achieve electrical connection with the wafer, thereby improving the accuracy of detecting the sample to be detected. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the drawings described in the following embodiments are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0016] Figure 1 It is a structural schematic diagram of the probe mechanism of the first embodiment of the present application;

[0017] Figure 2 It is a structural schematic diagram of the probe mechanism of the second embodiment of the present application;

[0018] Figure 3 It is a top view structural schematic diagram of the probe mechanism of an embodiment of the present application;

[0019] Figure 4 It is a structural schematic diagram of the probe mechanism of the first embodiment of the present application; Figure 3 It is a sectional structural schematic diagram in A-A direction;

[0020] Figure 5 It is a sectional structural schematic diagram in B dotted box; Figure 4

[0021] Figure 6 It is a sectional structural schematic diagram in C-C direction; Figure 3

[0022] Figure 7 It is an enlarged view of D dotted box; Figure 6

[0023] Figure 8 It is an exploded structural schematic diagram of the probe mechanism of an embodiment of the present application;​​​

[0024] Figure 9 For Figure 3 The cross-sectional structure diagram of the E-E direction;

[0025] Figure 10 For Figure 9 The enlarged view of the F dashed box;

[0026] Figure 11 The structure schematic diagram of the wafer detection device of an embodiment of the present application.

[0027] Explanation of reference signs:

[0028] 100-probe mechanism, 110-probe assembly, 111-probe arm, 112-probe, 113-probe seat, 114-elongated arm, 120-top cover plate, 130-mounting assembly, 131-sleeving block, 1311-connection part, 1312-sleeving part, 132-mounting block, 1321-mounting part, 1322-mounting space, 1323-clamping part, 140-adjusting assembly, 141-connection piece, 142-first connecting shaft piece, 143-rotating piece, 1431-first sub-part, 1432-second sub-part, 1433-third sub-part, 1434-fourth sub-part, 144-second connecting shaft piece, 145-knob piece, 146-protection cylinder, 1461-channel, 1462-first sub-channel, 1463-second sub-channel, 150-electric connection interface, 200-wafer detection device, 210-housing, 211-sample cavity, 220-chuck. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative effort belong to the scope of protection of the present application.

[0030] The terms “first”, “second”, and the like in the specification and claims of the present application and the above drawings are used to distinguish different objects, and are not used to describe a specific order. In addition, the terms “include” and “have” and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units is not limited to the listed steps or units, but can optionally include steps or units not listed or can optionally include other steps or units inherent to the process, method, product or device.

[0031] Reference to "an embodiment" or "the embodiments" means that a particular feature, structure, or characteristic described in connection with the embodiment or embodiments can be included in at least one embodiment. The appearances of the phrase "in various embodiments" in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily all

[0032] In the detection of wafer, the tip of the probe needs to be accurately and stably stuck on the soldering point of the wafer to perform electrical test, when the end of the probe arm has multiple probes, the angle of the probe needs to be adjusted so that multiple probes can be stuck on the wafer. Therefore, an adjusting assembly needs to be provided to adjust the angle of the probe.

[0033] Please refer to Figure 1 and Figure 2 The present application provides an adjustable probe mechanism 100, which comprises a probe assembly 110, a top cover plate 120, a mounting assembly 130 and an adjusting assembly 140, the probe assembly 110 comprises a probe arm 111 and multiple probes 112, the probe arm 111 extends along a first direction (as shown in the X direction in the figure), and the multiple probes 112 are arranged at one end of the probe arm 111; the top cover plate 120 is used for mounting the probe assembly 110, and the probe arm 111 and the multiple probes 112 are located on the same side of the top cover plate 120; the mounting assembly 130 is used for mounting the probe assembly 110, and the mounting assembly 130 comprises a sleeve block 131, the sleeve block 131 is connected to the side of the probe arm 111 away from the multiple probes 112; the adjusting assembly 140 comprises a connecting piece 141, the connecting piece 141 extends along a second direction (as shown in the Y direction in the figure), and the connecting piece 141 is movably connected to the sleeve block 131; the connecting piece 141 can move along the second direction to drive the sleeve block 131 to rotate, thereby driving the probe arm 111 and the probes 112 to rotate, so as to adjust the angle of the multiple probes 112, wherein the first direction intersects the second direction. Figure 2 Figure 2 It can be understood that in the present application, "multiple" means more than or equal to two, which can be but is not limited to two, three, four or five, etc.

[0034] It can be understood that in the present application, "multiple" means more than or equal to two, which can be but is not limited to two, three, four or five, etc.

[0035] It can be understood that the sleeve block 131 is connected to the probe arm 111, which can be that the sleeve block 131 is fixedly connected to the probe arm 111.

[0036] ​It can be understood that the probe arm 111, the probe 112, the sleeve block 131 and the connecting piece 141 are located on the same side of the top cover plate 120.

[0037] It can be understood that the connecting piece 141 is movable in a second direction, the connecting piece 141 is movable in the second direction towards a side close to the probe 112, and the connecting piece 141 is also movable in the second direction towards a side away from the probe 112.

[0038] Optionally, in some embodiments, the first direction is perpendicular to the second direction.

[0039] In the embodiment, the probe arm 111 extends in a first direction, and the plurality of probes 112 are arranged at one end of the probe arm 111, when the probe arm 111 rotates, the plurality of probes 112 rotate relative to the top cover plate 120, so as to adjust the angle of the plurality of probes 112. Specifically, the probe arm 111, the probe 112, the sleeve block 131 and the connecting piece 141 are located on the same side of the top cover plate 120, when the connecting piece 141 moves relative to the top cover plate 120 in a second direction, the sleeve block 131 rotates relative to the top cover plate 120, and the sleeve block 131 is fixedly connected to the probe arm 111, so as to drive the probe arm 111 and the probe 112 to rotate, thereby adjusting the angle of the probe 112. When the adjustable probe mechanism 100 is applied to the wafer detection device 200, the sample to be detected is arranged on the chuck 220, and the plurality of probes 112 can flatly contact the chuck 220, so as to ensure that the plurality of probes 112 can all realize electrical connection with the wafer, thereby improving the accuracy of detection of the sample to be detected.

[0040] Optionally, the probe assembly 110 can be, but is not limited to, a radio frequency probe assembly, and the plurality of probes 112 can be respectively electrically connected to the outside to load different electrical signals, so as to realize detection of the sample to be detected.

[0041] Optionally, the connecting member 141 is movable in a second direction to drive the sleeve block 131 to rotate. For example, when the connecting member 141 moves towards one side of the probe 112 in the second direction, the sleeve block 131 rotates clockwise relative to the top cover plate 120. When the connecting member 141 is further movable in the second direction away from the one side of the probe 112, the sleeve block 131 rotates counterclockwise relative to the top cover plate 120. Alternatively, when the connecting member 141 moves towards one side of the probe 112 in the second direction, the sleeve block 131 rotates counterclockwise relative to the top cover plate 120. When the connecting member 141 is further movable in the second direction away from the one side of the probe 112, the sleeve block 131 rotates clockwise relative to the top cover plate 120.

[0042] Please refer to Figures 3 to 7 In some embodiments, the adjusting assembly 140 further comprises a first connecting shaft 142 and a rotating member 143. The first connecting shaft 142 and the rotating member 143 are disposed on a side of the top cover plate 120 away from the probe arm 111. The first connecting shaft 142 is sleeved on an end of the connecting member 141 away from the sleeve block 131, and the first connecting shaft 142 is threadedly connected with the connecting member 141. The rotating member 143 is connected to an end of the first connecting shaft 142 away from the connecting member 141. When the rotating member 143 rotates, the first connecting shaft 142 is driven to rotate, so that the connecting member 141 moves relative to the first connecting shaft 142 in a second direction to drive the sleeve block 131 to rotate, thereby driving the probe arm 111 and the probe 112 to rotate, and achieving adjustment of the angle of the plurality of probes 112.

[0043] It can be understood that the first connecting shaft 142 is threadedly connected with the connecting member 141. The first connecting shaft 142 has an internal thread, and the connecting member 141 has an external thread. The internal thread of the first connecting shaft 142 is threadedly connected with the external thread of the connecting member 141.

[0044] It can be understood that the rotating member 143 is fixedly connected with the first connecting shaft 142.

[0045] It can be understood that the opposite ends of the first connecting shaft 142 are respectively connected with the rotating member 143 and the connecting member 141.

[0046] It can be understood that the connecting member 141 moves relative to the first connecting shaft 142 in the second direction, which can be that the connecting member 141 moves relative to the first connecting shaft 142 in the second direction towards the first connecting shaft 142, or that the connecting member 141 moves relative to the first connecting shaft 142 in the second direction away from the first connecting shaft 142.

[0047] In the embodiment, the rotating member 143, the first connecting shaft 142 and the connecting member 141 are connected in sequence, when the rotating member 143 drives the first connecting shaft 142 to rotate, the connecting member 141 moves relative to the first connecting shaft 142 in the second direction to drive the sleeve block 131 to rotate relative to the top cover plate 120, thereby driving the probe arm 111 and the probe 112 to rotate, so as to adjust the angle of the plurality of probes 112. When the adjustable probe mechanism 100 is applied to the wafer detection device 200, the sample to be detected is arranged on the chuck 220, and the plurality of probes 112 can flatly contact the chuck 220, so as to ensure that the plurality of probes 112 can all realize electrical connection with the wafer, thereby improving the accuracy of detection of the sample to be detected.

[0048] Optionally, the rotating member 143 is a flexible shaft. The rotating member 143 is a shaft which has elasticity and can freely bend and drive. When the rotating member 143 away from the one end of the first connecting shaft 142 is rotated, the rotating motion can be transmitted to the one end of the rotating member 143 close to the first connecting shaft 142 to drive the first connecting shaft 142 to rotate.

[0049] Optionally, the rotating member 143 comprises a central axis (not shown in the figure) and a plurality of winding layers (not shown in the figure), the plurality of winding layers are sequentially wound on the outer periphery of the central axis, and the winding directions of two adjacent winding layers are opposite. The rotating member 143 has a good effect of conducting rotating motion, which facilitates the arrangement of the rotating member 143 in the probe mechanism 100. In other words, one end of the rotating member 143 can be arranged on the side of the top cover plate 120 away from the probe arm 111, and the other end of the rotating member 143 is arranged on the side of the top cover plate 120 provided with the probe arm 111. When the staff rotates the side of the rotating member 143 away from the probe arm 111, the rotating member 143 can conduct the rotating motion to the side of the rotating member 143 close to the probe arm 111, which facilitates the staff to adjust the angle of the plurality of probes 112, thereby making the probe mechanism 100 have good use performance.

[0050] It can be understood that if the winding direction of one of the winding layers is clockwise, the winding direction of the winding layer adjacent to the winding layer is counterclockwise.

[0051] Please see Figure 8 In some embodiments, the sleeve block 131 comprises a connecting portion 1311 and a sleeve portion 1312 connected to each other, the sleeve portion 1312 is connected to the probe arm 111 and sleeved on the outer periphery of the probe arm 111, and the connecting piece 141 is movably connected to the connecting portion 1311.

[0052] Understandably, the connecting portion 1311 and the sleeve portion 1312 are arranged staggered.

[0053] Understandably, the connecting piece 141 is arranged staggered with the probe arm 111, and the connecting piece 141 does not intersect with the probe arm 111.

[0054] In the embodiment, the sleeve block 131 comprises a connecting portion 1311 and a sleeve portion 1312 connected to each other, the sleeve portion 1312 is connected to the probe arm 111 and sleeved on the outer periphery of the probe arm 111, and the connecting piece 141 is movably connected to the connecting portion 1311, so that the connecting piece 141 is arranged staggered with the probe arm 111. When the connecting piece 141 moves along the second direction, the connecting portion 1311 is pushed to move along the second direction, and at the same time, the connecting portion 1311 drives the sleeve portion 1312 and the probe arm 111 to rotate relative to the top cover plate 120, so as to adjust the angle of the plurality of probes 112 arranged on the probe arm 111. Wherein, the connecting piece 141 is movably connected to the connecting portion 1311, so that when the connecting portion 1311 is pushed to move along the second direction, there is a certain movement allowance between the connecting portion 1311 and the connecting piece 141, which facilitates the connecting portion 1311 to drive the sleeve portion 1312 and the probe arm 111 to rotate relative to the top cover plate 120, so as to convert the linear motion of the connecting piece 141 along the second direction into the rotary motion of the probe arm 111 and the probe 112, which facilitates the staff to adjust the angle of the probe 112, so that the probe mechanism 100 has better use performance.

[0055] Please see Figure 9 and Figure 10 In some embodiments, the adjusting assembly 140 further comprises a second connecting shaft 144 and a knob piece 145, the second connecting shaft 144 is sleeved on one end of the rotating piece 143 away from the first connecting shaft 142, and the knob piece 145 is arranged on one end of the second connecting shaft 144 away from the rotating piece 143, when the knob piece 145 rotates, the second connecting shaft 144 is driven to rotate, so as to drive the rotating piece 143 to rotate.

[0056] It can be understood that the knob 145, the second connecting shaft 144, the rotating member 143, the first connecting shaft 142 and the connecting member 141 are sequentially connected.

[0057] It can be understood that the two opposite ends of the second connecting shaft 144 are respectively connected with the knob 145 and the rotating member 143.

[0058] It can be understood that the second connecting shaft 144 is fixedly connected with the knob 145 and the rotating member 143.

[0059] In the embodiment, the knob 145 and the rotating member 143 are connected through the second connecting shaft 144. When the worker rotates the knob 145, the second connecting shaft 144 and the rotating member 143 will be rotated, so that the rotating motion of the rotating member 143 away from one end of the probe arm 111 is transmitted to the rotating member 143 close to one end of the probe arm 111, so as to drive the first connecting shaft 142 to rotate, so that the connecting member 141 moves along the second direction relative to the first connecting shaft 142, and drives the probe arm 111 and the probe 112 to rotate. In the embodiment, the second connecting shaft 144 and the knob 145 are provided, so as to realize the rotation of the rotating member 143, thereby adjusting the angle of the probe 112. The worker can adjust the angle of the probe 112 without reaching into the side of the top cover plate 120 having the probe arm 111, which improves the convenience of adjusting the plurality of probes 112 and improves the use performance of the probe mechanism 100.

[0060] Please refer to Figure 8 In some embodiments, the mounting assembly 130 further comprises a mounting block 132, which is located on the same side of the top cover plate 120 as the probe arm 111. The mounting block 132 comprises a mounting portion 1321 having a mounting space 1322, and the sleeve block 131 is located in the mounting space 1322. The probe arm 111 is further rotatably connected to the mounting portion 1321.

[0061] It can be understood that the probe arm 111 passes through the sleeve block 131 and the mounting portion 1321.

[0062] It can be understood that the sleeve block 131 can rotate relative to the mounting block 132 in the mounting space 1322.

[0063] It can be understood that the relative positions of the mounting block 132 and the top cover plate 120 are fixed.

[0064] In the embodiment, the sleeve block 131 is sleeved on the side of the probe arm 111 away from the plurality of probes 112, and is located in the mounting space 1322. When the connecting piece 141 rotates in the second direction, the sleeve block 131 and the probe arm 111 are pushed to rotate relative to the mounting portion 1321, so as to realize the rotation of the probes 112 relative to the mounting portion 1321, thereby achieving the adjustment of the angle of the probes 112. In the embodiment, the probe arm 111 is rotatably connected to the mounting portion 1321. When the connecting piece 141 pushes the connecting portion 1311 to move in the second direction, the mounting portion 1321 can guide the probe arm 111 and the sleeve portion 1312 to rotate relative to the mounting portion 1321, so as to reduce the resistance of the probe arm 111 rotating relative to the mounting portion 1321, thereby improving the accuracy of adjusting the angle of the probe arm 111 and the plurality of probes 112, and improving the use performance of the probe mechanism 100.

[0065] In some embodiments, the adjustment assembly 140 further comprises a protective cylinder 146 connected to the knob piece 145 and the top cover plate 120, respectively. The protective cylinder 146 has a passage 1461 for arranging the rotating piece 143.

[0066] It can be understood that the protective cylinder 146 and the knob piece 145 are arranged on the side of the top cover plate 120 away from the probe arm 111.

[0067] In the embodiment, the protective cylinder 146 is connected to the knob piece 145 and the top cover plate 120, so as to protect the first connecting shaft 142 and the rotating piece 143, thereby avoiding damage to the first connecting shaft 142 and the rotating piece 143 caused by external impact, improving the accuracy of transmitting the rotating motion of the knob piece 145 to the end of the rotating piece 143 close to the probe arm 111, and improving the accuracy of adjusting the angle of the plurality of probes 112 by the probe mechanism 100. In the embodiment, the rotating piece 143 is located in the passage 1461, so as to transmit the rotating motion of the rotating piece 143 away from the probe arm 111 to the end of the rotating piece 143 close to the probe arm 111, thereby facilitating the operation of the staff on the side of the top cover plate 120 away from the probe arm 111, improving the convenience of adjusting the angle of the plurality of probes 112, and improving the use performance of the probe mechanism 100.

[0068] Please refer to Figure 2 , Figure 9 and Figure 10In some embodiments, the channel 1461 comprises a first sub-channel 1462 and a second sub-channel 1463 connected by a bend, the first sub-channel 1462 is further away from the top cover plate 120 than the second sub-channel 1463, and the second sub-channel 1463 also communicates with a side of the top cover plate 120 facing away from the knob member 145; the rotating member 143 comprises a first sub-portion 1431, a second sub-portion 1432, a third sub-portion 1433 and a fourth sub-portion 1434 connected by bends, the first sub-portion 1431 and the third sub-portion 1433 are bent towards opposite sides of the second sub-portion 1432, the fourth sub-portion 1434 and the second sub-portion 1432 are bent towards opposite sides of the third sub-portion 1433, the first sub-portion 1431 is located in the first sub-channel 1462, the second sub-portion 1432 is at least partially located in the second sub-channel 1463, the third sub-portion 1433 extends in a first direction, the fourth sub-portion 1434 extends in a second direction, and the third sub-portion 1433 and the fourth sub-portion 1434 are located on a side of the top cover plate 120 facing away from the knob member 145.

[0069] It can be understood that the first sub-channel 1462 communicates with the second sub-channel 1463, and the second sub-channel 1463 communicates with a side of the top cover plate 120 having the probe arm 111.

[0070] In the embodiment, the first sub-channel 1462, the second sub-channel 1463 and the top cover plate 120 are communicated in sequence away from the side of the knob 145, so that the rotating member 143 is arranged, so that the worker can operate on the side of the top cover plate 120 away from the probe arm 111, and the rotating motion of the rotating member 143 away from the end of the probe arm 111 is conducted to the rotating motion of the rotating member 143 close to the end of the probe arm 111 by rotating the knob 145 and the rotating member 143, so as to push the connecting member 141 to move in the second direction, and drive the rotation of the sleeve block 131, the probe arm 111 and the probe 112, thereby improving the convenience of adjusting the angle of the plurality of probes 112. In addition, the first sub-part 1431 is located in the first sub-channel 1462, and the second sub-part 1432 is at least partially located in the second sub-channel 1463. The first sub-part 1431 has a certain activity space in the first sub-channel 1462, and the second sub-part 1432 has a certain activity space in the second sub-channel 1463, so as to facilitate the transmission of the rotating motion of the first sub-part 1431 and the second sub-part 1432. Further, the third sub-part 1433 extends in the first direction, and the fourth sub-part 1434 extends in the second direction, so as to arrange the first connecting shaft 142 and make the connecting member 141 move in the second direction relative to the first connecting shaft 142, thereby pushing the sleeve block 131, the probe arm 111 and the probe 112 to rotate relative to the first rotating shaft, so as to adjust the angle of the plurality of probes 112.

[0071] In some embodiments, the probe mechanism 100 further comprises an electrical connection interface 150, which is arranged in the protective cylinder 146. The electrical connection interface 150 is electrically connected to the probe 112, and the electrical connection interface 150 is electrically connected to an external power supply.

[0072] In the embodiment, the electrical connection interface 150 is electrically connected to the probe 112 and the external power supply, so as to facilitate the electrical connection between the probe 112 and the external power supply. Optionally, the probe mechanism 100 further comprises an electrical connection line, and opposite ends of the electrical connection line are respectively electrically connected to the electrical connection interface 150 and the probe 112. The electrical connection line is located in the channel 1461. The arrangement of the electrical connection interface 150 and the protective cylinder 146 facilitates the electrical connection between the probe 112 and the external power supply, thereby realizing the electrical connection between the probe 112 and the sample to be detected, and completing the detection of the sample to be detected.

[0073] Please refer to Figure 2 and Figure 8In some embodiments, the probe assembly 110 further comprises a probe base 113 and an extension arm 114, the probe base 113 is arranged on the side of the top cover plate 120 away from the probe arm 111, the extension arm 114 is arranged through the top cover plate 120, and one end of the extension arm 114 is connected to the probe base 113; the mounting block 132 further comprises a clamping portion 1323, the clamping portion 1323 is connected to the side of the mounting portion 1321 away from the probe 112, and the clamping portion 1323 is used for clamping the end of the extension arm 114 away from the probe base 113.

[0074] In the present embodiment, the probe base 113 and the probe arm 111 are located on opposite sides of the top cover plate 120, and the extension arm 114 is connected to the probe base 113 and the mounting block 132 respectively, so as to realize the mounting of the probe arm 111 and the probe 112 on the side of the top cover plate 120 away from the probe base 113. The clamping portion 1323 is connected to the side of the mounting portion 1321 away from the probe 112, so as to clamp the end of the extension arm 114 away from the probe base 113. In other words, the clamping portion 1323 of the mounting block 132 is connected to the extension arm 114, the mounting portion 1321 of the mounting block 132 is connected to the probe arm 111, and the mounting block 132 realizes the connection of the probe base 113, the extension arm 114 and the probe arm 111, thereby improving the structural stability of the probe arm 111 and the probe 112 arranged on the probe mechanism 100, and improving the use performance of the probe mechanism 100.

[0075] Please refer to Figure 11 The present application provides a wafer detection device 200, which comprises a shell 210, a probe mechanism 100 provided by the present application, and a chuck 220, the top cover plate 120 is connected to the shell 210 to enclose a sample cavity 211; the chuck 220 is arranged in the sample cavity 211 and is used for carrying a sample to be detected, and the probe 112 is used for detecting the sample to be detected.

[0076] It can be understood that the probe base 113, the rotating member 143, the protective cylinder 146, the knob member 145 and the second connecting shaft member 144 are located outside the sample cavity 211, the probe arm 111, the plurality of probes 112, the mounting assembly 130, the connecting member 141 and the first connecting shaft member 142 are located inside the sample cavity 211, and the rotating member 143 is partially located inside the sample cavity 211 and partially located inside the channel 1461 formed by the protective cylinder 146.

[0077] Optionally, the sample to be detected is selected from at least one of a wafer, a circuit board and the like.

[0078] In the embodiment, the wafer detection device 200 comprises the probe mechanism 100 provided by the present application, the probe mechanism 100 can adjust the angle of the tips of the plurality of probes 112, so that when the sample to be detected is carried on the chuck 220, the tips of the plurality of probes 112 can flatly contact the sample to be detected, to avoid that the plurality of probes 112 are inclined to be arranged, so that part of the probes 112 cannot contact the sample to be detected, when the plurality of probes 112 load the electrical signal, it can ensure that the plurality of probes 112 can be electrically connected with the sample to be detected, the plurality of probes 112 cooperate with each other to realize the detection of the performance of the sample to be detected, and the detection performance of the wafer detection device 200 on the sample to be detected is improved.

[0079] In the present application, the phrase "embodiment" or "embodiments" means that the specific features, structures or characteristics described in connection with the embodiment can be included in at least one embodiment of the present application. The appearance of the phrase in various places in the specification does not necessarily mean the same embodiment, nor is it an independent or alternative embodiment that is not mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in the present application can be combined with other embodiments. In addition, it should be understood that the features, structures or characteristics described in the embodiments of the present application can be combined with each other without contradiction, to form another embodiment of the present application without departing from the spirit and scope of the present application.

[0080] Finally, it should be pointed out that the above embodiments are only used to illustrate the technical solutions of the present application and are not limiting. Although the present application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can be modified or replaced by equivalents without departing from the spirit and scope of the present application.

Claims

1. An adjustable probe mechanism, characterized by, The probe mechanism comprises: a probe assembly, the probe assembly comprising a probe arm and a plurality of probes, the probe arm extending along a first direction, the plurality of probes being arranged at one end of the probe arm; a top cover plate, the top cover plate being used for mounting the probe assembly, the probe arm and the plurality of probes being located at the same side of the top cover plate; a mounting assembly, the mounting assembly being used for mounting the probe assembly, the mounting assembly comprising a sleeve block, the sleeve block being connected to the side of the probe arm away from the plurality of probes; and an adjusting assembly, the adjusting assembly comprising a connecting member, the connecting member extending along a second direction, the connecting member being movably connected to the sleeve block, the connecting member being movable along the second direction to drive the sleeve block to rotate, thereby driving the probe arm and the probes to rotate, so as to adjust the angle of the plurality of probes, wherein the first direction intersects the second direction.

2. The probe mechanism of claim 1, wherein, The adjusting assembly further comprises a first connecting shaft and a rotating member, the first connecting shaft and the rotating member being arranged at the side of the top cover plate away from the probe arm, the first connecting shaft being sleeved at one end of the connecting member away from the sleeve block, and the first connecting shaft being threadedly connected to the connecting member, the rotating member being connected to one end of the first connecting shaft away from the connecting member; when the rotating member rotates, the first connecting shaft is driven to rotate, so that the connecting member moves along the second direction relative to the first connecting shaft, to drive the sleeve block to rotate, thereby driving the probe arm and the probes to rotate, so as to adjust the angle of the plurality of probes.

3. The probe mechanism of claim 1, wherein, The sleeve block comprises a connecting portion and a sleeve portion connected to each other, the sleeve portion being connected to the probe arm and sleeved at the outer periphery of the probe arm, the connecting member being movably connected to the connecting portion.

4. The probe mechanism of claim 2, wherein, The adjusting assembly further comprises a second connecting shaft and a knob member, the second connecting shaft being sleeved at one end of the rotating member away from the first connecting shaft, the knob member being arranged through one end of the second connecting shaft away from the rotating member, when the knob member rotates, the second connecting shaft is driven to rotate, to drive the rotating member to rotate.

5. The probe mechanism of claim 1, wherein, The mounting assembly further comprises a mounting block, the mounting block being located at the same side of the top cover plate as the probe arm, the mounting block comprising a mounting portion, the mounting portion having a mounting space, the sleeve block being located in the mounting space, the probe arm being further movably connected to the mounting portion.

6. The probe mechanism of claim 4, wherein, The adjusting assembly further comprises a protective cylinder, the protective cylinder being connected to the knob member and the top cover plate respectively, the protective cylinder having a passage, the passage being used for arranging the rotating member.

7. The probe mechanism of claim 6, wherein, The passage comprises a first sub-passage and a second sub-passage connected to each other in a bent manner, the first sub-passage being farther away from the top cover plate than the second sub-passage, the second sub-passage further communicating with the side of the top cover plate away from the knob member; The rotating member comprises a first sub-portion, a second sub-portion, a third sub-portion and a fourth sub-portion connected together, the first sub-portion and the third sub-portion are bent towards opposite sides of the second sub-portion, the fourth sub-portion and the second sub-portion are bent towards opposite sides of the third sub-portion, the first sub-portion is located in the first sub-channel, the second sub-portion is at least partially located in the second sub-channel, the third sub-portion extends in a first direction, the fourth sub-portion extends in a second direction, and the third sub-portion and the fourth sub-portion are located on a side of the top cover plate away from the knob member.

8. The probe mechanism of claim 6, wherein, The probe mechanism further comprises an electrical connection interface, which is arranged on the protective cylinder and electrically connected to the probe and an external power source.

9. The probe mechanism of claim 5, wherein, The probe assembly further comprises a probe base and an extension arm, the probe base is arranged on a side of the top cover plate away from the probe arm, the extension arm is arranged through the top cover plate, and one end of the extension arm is connected to the probe base; the mounting block further comprises a clamping portion, which is connected to a side of the mounting portion away from the probe, and the clamping portion is used for clamping one end of the extension arm away from the probe base.

10. A wafer inspection apparatus characterized by comprising: The wafer detection device comprises: a housing; the probe mechanism according to any one of claims 1 to 9, wherein the top cover plate is connected to the housing to enclose a sample cavity; and a chuck, which is arranged in the sample cavity and used for carrying a sample to be detected, and the probe is used for detecting the sample to be detected.

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