Cathode and anode film thickness online detection clamp

Abstract

The utility model provides a cathode and anode film thickness on-line detection clamp, relates to the technical field of film thickness detection clamps, and aims to solve the technical problem that a film thickness detection device in the prior art cannot realize on-line high-precision detection. A cathode and anode film thickness online detection clamp comprises a mounting plate, an upper clamping plate, a lower clamping plate, a cover plate, a first measuring head and a second measuring head, the left portion of the upper clamping plate is fixedly connected with the left portion of the lower clamping plate, the right portion of the upper clamping plate is fixedly connected with the right portion of the lower clamping plate, and the right end of the upper clamping plate and the right end of the lower clamping plate are both fixedly connected with the mounting plate. A front-back through mounting cavity is formed between the upper clamping plate and the lower clamping plate, the cover plate is located in the mounting cavity and fixedly connected with the upper clamping plate or the lower clamping plate, a front-back through mounting groove is formed in the cover plate, a first through hole is formed in the upper clamping plate, and a second through hole is formed in the lower clamping plate. The cover plate is provided with a communication structure used for vertically communicating the mounting groove with the first through hole and the second through hole, the first measuring head is connected with the upper clamping plate, and the second measuring head is connected with the lower clamping plate.

Description

Technical Field

[0001] This utility model relates to the field of film thickness detection fixture technology, specifically to an online detection fixture for anode and cathode film thickness. Background Technology

[0002] In new energy vehicle batteries, cathode and anode films are involved. The uniformity of film thickness is fundamental to evaluating various film performance characteristics. Uneven film thickness not only affects tensile strength and barrier properties at different points in the film but also impacts subsequent processing. For example, the cathode and anode films need to be stacked and then wound together. Both the cathode and anode films have tabs, and the wound film must ensure the tabs are aligned. Uneven film thickness will cause the tabs to misalign after winding. Therefore, whether the film thickness is uniform, consistent with preset values, and within specified ranges are prerequisites for the film to possess certain performance indicators. Film thickness measurement is one of the fundamental testing items in the film manufacturing industry.

[0003] In actual production, the ability to perform real-time online monitoring of thin films during the production process is crucial. Online monitoring allows for real-time detection of film thickness, enabling adjustments to equipment processing parameters and controlling the final product quality. Currently, measurement methods are primarily offline, while online measurement demands high resistance to environmental vibration from the testing device. Existing thin film thickness testing devices, if directly used for online measurement, are easily affected by vibrations during production, leading to inaccurate readings. Furthermore, because the XYZ directions and tilt angle of the two probes in the testing device need to be adjusted, existing devices use traditional five-axis optical adjustment stages. However, the springs in these stages can cause excessive vibration of the probes during online measurement, affecting measurement accuracy. Therefore, how to achieve high-precision film thickness detection under significant environmental vibration is a pressing issue that needs to be addressed. Utility Model Content

[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide an online anode and cathode thin film thickness detection fixture, thereby solving the technical problem that existing thin film thickness detection devices cannot achieve online high-precision detection.

[0005] To solve the above-mentioned technical problems, this utility model provides an online anode and cathode thin film thickness detection fixture, including a mounting plate, an upper clamping plate, a lower clamping plate, a cover plate, a first probe, and a second probe. The left side of the upper clamping plate is fixedly connected to the left side of the lower clamping plate, and the right side of the upper clamping plate is fixedly connected to the right side of the lower clamping plate. The right ends of the upper and lower clamping plates are both fixedly connected to the mounting plate. A through mounting cavity is formed between the upper and lower clamping plates. The cover plate is located in the mounting cavity and is fixedly connected to either the upper or lower clamping plate. The cover plate is provided with a through mounting groove for accommodating the film and allowing the film to move back and forth. A first through hole is provided vertically along the upper edge of the upper clamping plate, and a second through hole is provided vertically along the upper edge of the lower clamping plate. The cover plate is provided with a connecting structure for vertically connecting the mounting groove with the first and second through holes. The first probe is connected to the upper clamping plate, and the second probe is connected to the lower clamping plate. The first and second probes are coaxially arranged. The first probe detects the upper surface of the film through the first through hole and the connecting structure, and the second probe detects the lower surface of the film through the second through hole and the connecting structure.

[0006] With the above structure, the online detection fixture for anode and cathode film thickness of this utility model has the following advantages: the anode and cathode films move through the mounting groove, the first probe detects the upper surface of the film, and the second probe detects the lower surface of the film. The difference between the measurements of the first probe and the second probe is calculated to obtain the film thickness. As the film moves during the production process, it is possible to detect in real time whether the uniformity of the film thickness along the film movement direction meets the requirements, thus realizing online detection. In addition, since the left and right parts of the upper and lower clamping plates are fixed and rigidly connected, it is ensured that when environmental vibration is transmitted to the first probe and the second probe, the phase is synchronized, thereby canceling the environmental vibration and realizing online high-precision detection.

[0007] As an improvement, a first flange is connected to the upper clamping plate. The first flange has a third through hole on its upper edge for the first probe to pass through. The upper end face of the first flange has a mounting hole, and a second flange is installed in the mounting hole. The first probe is connected to the second flange. Several first bolts are connected circumferentially to the side wall of the first flange, and the first bolts abut against the outer peripheral wall of the second flange. With this structure, the second flange can be moved horizontally by rotating the first bolts. For example, screwing in the first bolt on the right side will move the second flange to the left. The movement of the second flange will drive the first probe to move synchronously. The horizontal position of the first probe can be adjusted with the second probe as a reference to ensure that the first probe and the second probe are coaxial to improve measurement accuracy. Moreover, the entire structure does not require the use of springs, has good vibration resistance, and higher detection accuracy.

[0008] As an improvement, the second flange is a frustum-shaped structure with an upper outer diameter smaller than the lower outer diameter. With this structure, the first bolt abuts against the outer peripheral wall of the frustum-shaped second flange. The cooperation between the outer peripheral wall of the second flange and the first bolt prevents the second flange from moving upward. At the same time, the tightening force of the first bolt on the second flange will also generate a downward component force on the second flange, ensuring that the lower end face of the second flange remains in contact with the first flange, thereby improving the measurement accuracy.

[0009] As an improvement, a third flange is connected to the upper end of the second flange. The third flange and the second flange are fixedly connected by fixing bolts. The second flange has a fourth through hole along its upper vertical edge for the first probe to pass through, and the third flange has a fifth through hole along its upper vertical edge. The first probe is fixedly connected in the fifth through hole. Several first threaded holes are distributed circumferentially along the upper edge of the third flange. Each first threaded hole is set vertically, and a second bolt is threaded into each first threaded hole. The second bolt abuts against the upper end face of the second flange. With this structure, the fixing bolts are used to fix the second flange and the third flange. By rotating the second bolt, the depth of the second bolt screwed into the first threaded hole can be changed, which can change the height of one side of the third flange. For example, if the second bolt on one side is screwed deeper, the third flange part at that point will be slightly lifted by the second bolt, thereby changing the pitch angle of the first probe. This allows the pitch angle of the first probe to be adjusted to a suitable position, improving measurement accuracy. Moreover, no spring is required, resulting in good vibration resistance and higher detection accuracy.

[0010] As an improvement, this utility model also includes a first sleeve and a first end cap. The first probe is inserted into the first sleeve, which is fixedly connected to the fifth through hole. The upper end face of the third flange is provided with a first connecting part, which is a frustum-shaped part with an upper outer diameter larger than the lower outer diameter. The first end cap is sleeved on the first sleeve and threadedly connected to the outer wall of the first sleeve. The first connecting part is located inside the first end cap, and the lower end face of the first end cap abuts against the upper end face of the third flange. A third bolt is threadedly connected to the side wall of the first end cap, and the third bolt abuts against the first connecting part. With this structure, the lower end of the first end cap is limited by the third flange and cannot move downward. Furthermore, due to the cooperation between the third bolt and the side wall of the first connecting part, the first end cap cannot move upward. Therefore, when the first end cap is rotated, the first sleeve will move vertically, thereby driving the first probe to move synchronously, changing the height of the first probe, improving the measurement accuracy, and eliminating the need for a spring, resulting in good vibration resistance and higher detection accuracy.

[0011] As an improvement, a fourth flange is connected to the lower end face of the lower clamping plate by fixing bolts. The fourth flange has a sixth through hole, and the second probe is fixedly connected in the sixth through hole. The fourth flange has a second threaded hole along its circumference, and each second threaded hole is vertically arranged. A fourth bolt is threaded into each second threaded hole, and the fourth bolt abuts against the lower end face of the lower clamping plate. With this structure, the fixing bolts are used to fix the fourth flange and the lower clamping plate. By rotating the fourth bolt, the depth of the fourth bolt screwed into the second threaded hole can be changed, which can change the height of one side of the fourth flange. For example, if the fourth bolt on one side is screwed deeper, the fourth flange part at that point will be slightly lifted by the fourth bolt, thereby changing the pitch angle of the second probe. This allows the pitch angle of the second probe to be adjusted to a suitable position, improving measurement accuracy. Moreover, no spring is required, resulting in good vibration resistance and higher detection accuracy.

[0012] As an improvement, this utility model also includes a second sleeve and a second end cap. The second probe is inserted into the second sleeve, which is fixedly connected to the sixth through hole. The lower end face of the fourth flange is provided with a second connecting part, which is a frustum-shaped part with an upper outer diameter smaller than the lower outer diameter. The second end cap is sleeved on the second sleeve and threadedly connected to the outer wall of the second sleeve. The second connecting part is located inside the second end cap, and the upper end face of the second end cap abuts against the lower end face of the fourth flange. A fifth bolt is threadedly connected to the side wall of the second end cap, and the fifth bolt abuts against the second connecting part. With this structure, the upper end of the second end cap is limited by the fourth flange and cannot move upward. Furthermore, due to the cooperation between the fifth bolt and the side wall of the second connecting part, the second end cap cannot move downward. Therefore, when the second end cap is rotated, the second sleeve will move vertically, thereby driving the second probe to move synchronously, changing the height of the second probe, improving the measurement accuracy, and eliminating the need for a spring, resulting in good vibration resistance and higher detection accuracy.

[0013] As an improvement, the cover plate is fixedly connected to the upper surface of the lower clamping plate, and the connecting structure includes a seventh through hole and a mounting groove at the bottom of the cover plate. The first probe detects the upper surface of the film through the first through hole and the seventh through hole, and the second probe detects the lower surface of the film through the second through hole and the mounting groove.

[0014] As an improvement, this utility model also includes a first connecting block and a second connecting block. The lower left end face of the upper clamping plate is fixedly connected to the upper left end face of the lower clamping plate through the first connecting block, and the lower right end face of the upper clamping plate is fixedly connected to the upper right end face of the lower clamping plate through the second connecting block. This structure has the advantages of simple structure and convenient connection.

[0015] As an improvement, a reinforcing plate is connected between the lower clamping plate and the mounting plate; this structure improves the connection strength between the lower clamping plate and the mounting plate, thereby improving the overall connection strength of the fixture. Attached Figure Description

[0016] Figure 1This is a cross-sectional view of the present invention.

[0017] Figure 2 for Figure 1 A magnified view of part A in the middle.

[0018] Figure 3 for Figure 1 A magnified view of part B in the middle.

[0019] Figure 4 This is a three-dimensional structural diagram of the present invention.

[0020] Reference numerals: 1. Mounting plate; 2. Upper clamping plate; 3. Lower clamping plate; 4. Cover plate; 5. First probe; 6. Second probe; 7. Mounting cavity; 8. Mounting groove; 9. First through hole; 10. Second through hole; 11. First flange; 12. Third through hole; 13. Mounting hole; 14. Second flange; 15. First bolt; 16. Third flange; 17. Fourth through hole; 18. Fifth through hole; 19. First threaded hole; 20. First sleeve; 21. First end cap; 22. First connecting part; 23. Third bolt; 24. Fourth flange; 25. Sixth through hole; 26. Second threaded hole; 27. Second sleeve; 28. Second end cap; 29. ​​Second connecting part; 30. Fifth bolt; 31. Seventh through hole; 32. First connecting block; 33. Second connecting block; 34. Reinforcing plate; 35. Upper cover; 36. Lower cover. Detailed Implementation

[0021] The following is a detailed description of an online anode and cathode thin film thickness detection fixture according to the present invention, with reference to the accompanying drawings.

[0022] like Figures 1 to 4 As shown, an online anode and cathode thin film thickness detection fixture includes a mounting plate 1, an upper clamping plate 2, a lower clamping plate 3, a cover plate 4, a first probe 5, and a second probe 6. The left side of the upper clamping plate 2 is fixedly connected to the left side of the lower clamping plate 3, and the right side of the upper clamping plate 2 is fixedly connected to the right side of the lower clamping plate 3. The right ends of both the upper clamping plate 2 and the lower clamping plate 3 are fixedly connected to the mounting plate 1. Specifically, this utility model also includes a first connecting block 32 and a second connecting block 33. The lower end face of the left side of the upper clamping plate 2 is fixedly connected to the upper end face of the left side of the lower clamping plate 3 through the first connecting block 32, and the lower end face of the right side of the upper clamping plate 2 is fixedly connected to the upper end face of the right side of the lower clamping plate 3 through the second connecting block 33. In addition, a reinforcing plate 34 is connected between the lower clamping plate 3 and the mounting plate 1.

[0023] like Figure 1As shown, a through mounting cavity 7 is formed between the upper clamping plate 2 and the lower clamping plate 3. In this embodiment, the mounting cavity 7 is formed by the height difference between the lower end face of the upper clamping plate 2 and the upper end face of the lower clamping plate 3 caused by the first connecting block 32 and the second connecting block 33 on the left and right. The cover plate 4 is located in the mounting cavity 7 and is fixedly connected to the upper clamping plate 2 or the lower clamping plate 3. The cover plate 4 is provided with a through mounting groove 8, which is used to accommodate the film and allow the film to move back and forth. The upper clamping plate 2 is provided with a first through hole 9 along its upper edge, and the lower clamping plate 3 is provided with a second through hole 10 along its upper edge. The cover plate 4 is provided with a connecting structure for vertically connecting the mounting groove 8 with the first through hole 9 and the second through hole 10. The first probe 5 is connected to the upper clamping plate 2, and the second probe 6 is connected to the lower clamping plate 3. The first probe 5 and the second probe 6 are coaxially arranged. The first probe 5 detects the upper surface of the film through the first through hole 9 and the connecting structure, and the second probe 6 detects the lower surface of the film through the second through hole 10 and the connecting structure. In this embodiment, the cover plate 4 is fixedly connected to the upper end face of the lower clamping plate 3, specifically by a magnetic connection. The connecting structure includes a seventh through hole 31 and a mounting groove 8 located at the bottom of the cover plate 4. Therefore, the seventh through hole 31 is only located above the mounting groove 8. The first probe 5 detects the upper surface of the film through the first through hole 9 and the seventh through hole 31, and the second probe 6 detects the lower surface of the film through the second through hole 10 and the mounting groove 8. In some other embodiments, the mounting groove 8 can be located in the middle of the cover plate 4, while the seventh through hole 31 is located on the upper and lower sides of the mounting groove 8, with the upper and lower seventh through holes 31 serving as a connecting structure. In another embodiment, the cover plate 4 is connected to the upper clamping plate 2, the mounting groove 8 is located on the upper end face of the cover plate 4, and the seventh through hole 31 is only located below the mounting groove 8, in which case the mounting groove 8 and the seventh through hole 31 serve as a connecting structure.

[0024] In addition, the mounting groove 8 forms two end faces on the left and right sides inside the cover plate 4. The film is confined within the left and right end faces of the mounting groove 8 to prevent the film from moving too far to the left and right during passage. The depth of the mounting groove 8 is slightly greater than the thickness of the film to ensure that the film can pass through smoothly.

[0025] like Figure 1 and Figure 2 As shown, the upper end face of the upper clamping plate 2 is connected to a first flange 11. The upper edge of the first flange 11 is provided with a third through hole 12 for the first probe 5 to pass through. The third through hole 12 and the first through hole 9 are preferably coaxially arranged. The upper end face of the first flange 11 is provided with a mounting hole 13, which is also coaxially arranged with the third through hole 12. A second flange 14 is provided in the mounting hole 13. The first probe 5 is connected to the second flange 14. Several first bolts 15 are connected to the side wall of the first flange 11 along the circumferential direction. The first bolts 15 abut against the outer circumferential wall of the second flange 14. In this embodiment, the first bolts 15 are equidistantly arranged along the circumferential direction, and there are a total of four first bolts 15. The second flange 14 is a frustum-shaped structure with an upper outer diameter smaller than the lower outer diameter.

[0026] In addition, a third flange 16 is connected to the upper end of the second flange 14. The third flange 16 and the second flange 14 are fixedly connected by fixing bolts. The second flange 14 is provided with a fourth through hole 17 along the upper edge for the first probe 5 to pass through. The third flange 16 is provided with a fifth through hole 18 along the upper edge. The first probe 5 is fixedly connected in the fifth through hole 18. Several first threaded holes 19 are distributed circumferentially along the upper edge of the third flange 16. Each first threaded hole 19 is arranged vertically. A second bolt is threaded into each first threaded hole 19. The second bolt abuts against the upper end face of the second flange 14. In this embodiment, four fixing bolts of the third flange 16 and the second flange 14 are arranged equidistantly along the circumferential direction. Two first threaded holes 19 are provided between every two fixing bolts.

[0027] This utility model also includes a first sleeve 20 and a first end cap 21. A first probe 5 is inserted into the first sleeve 20 and moves up and down synchronously with the first sleeve 20. The first sleeve 20 is fixedly connected to the fifth through hole 18. Specifically, the outer wall of the first sleeve 20 is in contact with the inner wall of the fifth through hole 18. The upper end face of the third flange 16 is provided with a first connecting part 22, which is also an annular structure. The first connecting part 22 is a frustum-shaped structure with an upper outer diameter larger than a lower outer diameter. The first end cap 21 is sleeved on the first sleeve 20 and... The outer wall of the first sleeve 20 is threaded, and the first connecting part 22 is located inside the first end cover 21. The lower end face of the first end cover 21 abuts against the upper end face of the third flange 16. The side wall of the first end cover 21 is threaded with a third bolt 23, which abuts against the first connecting part 22. Although the first sleeve 20 is fixedly connected in the fifth through hole 18, the first sleeve 20 will move up and down when the first end cover 21 is rotated. When the first end cover 21 is not rotated, the first sleeve 20 remains fixedly connected to the fifth through hole 18.

[0028] Specifically, in this embodiment, the lower end of the first probe 5 is located in the first through hole 9, and the inner diameters of the first through hole 9, the third through hole 12 and the fourth through hole 17 are all larger than the outer diameter of the first sleeve 20, so as to allow the first sleeve 20 and the first probe 5 to be positioned.

[0029] like Figure 1 and Figure 3 As shown, the lower end face of the lower clamping plate 3 is connected to a fourth flange 24 by fixing bolts. The fourth flange 24 is provided with a sixth through hole 25. The second probe 6 is fixedly connected in the sixth through hole 25. The fourth flange 24 is provided with a second threaded hole 26 along the circumferential direction. Each second threaded hole 26 is set vertically. A fourth bolt is threaded into each second threaded hole 26. The fourth bolt abuts against the lower end face of the lower clamping plate 3. Similarly, in this embodiment, four fixing bolts of the fourth flange 24 and the lower clamping plate 3 are set at equal intervals along the circumferential direction. Two second threaded holes 26 are provided between every two fixing bolts.

[0030] This utility model also includes a second sleeve 27 and a second end cap 28. A second probe 6 is inserted into the second sleeve 27 and moves up and down synchronously with the second sleeve 27. The second sleeve 27 is fixedly connected to the sixth through hole 25. Specifically, the outer wall of the second sleeve 27 is in contact with the inner wall of the sixth through hole 25. The lower end face of the fourth flange 24 is provided with a second connecting part 29, which is also annular in structure. The second connecting part 29 is a frustum-shaped structure with an upper outer diameter smaller than the lower outer diameter. The second end cap 28 is sleeved on the second sleeve 27 and... The outer wall of the second sleeve 27 is threaded, and the second connecting part 29 is located inside the second end cover 28. The upper end face of the second end cover 28 abuts against the lower end face of the fourth flange 24. A fifth bolt 30 is threaded on the side wall of the second end cover 28, and the fifth bolt 30 abuts against the second connecting part 29. Although the second sleeve 27 is fixedly connected to the sixth through hole 25, the second sleeve 27 will move up and down when the second end cover 28 is rotated, and the second sleeve 27 will remain fixedly connected to the sixth through hole 25 when the second end cover 28 is not rotated. In addition, this embodiment also provides an upper cover 35 and a lower cover 36. The upper cover 35 is connected to the upper end face of the upper clamping plate 2 and covers the first flange 11, the second flange 14, the third flange 16 and the first end cover 21, while the upper end of the first probe 5 extends from above the upper cover 35. The lower cover 36 is connected to the lower end face of the lower clamping plate 3 and covers the fourth flange 24 and the second end cover 28, while the lower end of the second probe 6 extends from below the lower cover 36.

[0031] In this invention, the anode and cathode films travel through the mounting groove 8. The first probe 5 detects the upper surface of the film, and the second probe 6 detects the lower surface of the film. The difference between the measurements taken by the first probe 5 and the second probe 6 is calculated to obtain the film thickness. As the film moves during the production process, the uniformity of the film thickness along the film movement direction can be detected in real time to ensure that it meets the requirements, thus achieving online detection. In addition, since the left and right parts of the upper clamping plate 2 and the lower clamping plate 3 are rigidly connected, it is ensured that when environmental vibrations are transmitted to the first probe 5 and the second probe 6, the phase is synchronized, thereby canceling out environmental vibrations and achieving high-precision online detection.

[0032] Furthermore, rotating the first bolt 15 moves the second flange 14 horizontally. For example, screwing in the first bolt 15 on the right side moves the second flange 14 to the left. This movement of the second flange 14 causes the first probe 5 to move synchronously. Using the second probe 6 as a reference, the horizontal position of the first probe 5 is adjusted to ensure coaxiality between the first probe 5 and the second probe 6, thus improving measurement accuracy. Rotating the second bolt changes the depth to which it is screwed into the first threaded hole 19, which alters the height of one side of the third flange 16. For example, screwing the second bolt deeper on one side slightly lifts that part of the third flange 16, thereby changing the pitch angle of the first probe 5. This adjusts the pitch angle of the first probe 5 to a suitable position, improving measurement accuracy. The principle for adjusting the pitch angle of the second probe 6 is the same. The details will not be elaborated here. The lower end of the first end cover 21 is limited by the third flange 16 and cannot move downward. Also, due to the cooperation between the third bolt 23 and the side wall of the first connecting part 22, the first end cover 21 cannot move upward. Therefore, when the first end cover 21 is rotated, the first sleeve 20 will move vertically, thereby driving the first probe 5 to move synchronously, changing the height of the first probe 5 and improving the measurement accuracy. The height adjustment principle of the second probe 6 is the same, and will not be elaborated here. The entire structure does not require the use of springs, has good vibration resistance, and higher detection accuracy. In the specific adjustment process, the reflective substrate is combined with software to adjust according to the spectrum. When the peak displayed in the software is a single peak and the amplitude is the strongest, it indicates that the positions of the first probe 5 and the second probe 6 are adjusted to the optimal state. The specific detection principle is existing technology and will not be elaborated here.

[0033] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above-described embodiment. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

Claims

1. A fixture for online detection of anode and cathode thin film thickness, characterized in that, The assembly includes a mounting plate (1), an upper clamping plate (2), a lower clamping plate (3), a cover plate (4), a first probe (5), and a second probe (6). The left side of the upper clamping plate (2) is fixedly connected to the left side of the lower clamping plate (3), and the right side of the upper clamping plate (2) is fixedly connected to the right side of the lower clamping plate (3). The right ends of both the upper clamping plate (2) and the lower clamping plate (3) are fixedly connected to the mounting plate (1). A through mounting cavity (7) is formed between the upper clamping plate (2) and the lower clamping plate (3). The cover plate (4) is located in the mounting cavity (7) and fixedly connected to either the upper clamping plate (2) or the lower clamping plate (3). The cover plate (4) has a through mounting groove (8) for accommodating... The upper clamping plate (2) has a first through hole (9) vertically along its upper edge, and the lower clamping plate (3) has a second through hole (10) vertically along its upper edge. The cover plate (4) has a connecting structure for vertically connecting the mounting groove (8) with the first through hole (9) and the second through hole (10). The first probe (5) is connected to the upper clamping plate (2), and the second probe (6) is connected to the lower clamping plate (3). The first probe (5) and the second probe (6) are coaxially arranged. The first probe (5) detects the upper surface of the film through the first through hole (9) and the connecting structure, and the second probe (6) detects the lower surface of the film through the second through hole (10) and the connecting structure.

2. The online thickness detection fixture for anode and cathode thin films according to claim 1, characterized in that, The upper clamping plate (2) is connected to a first flange (11). The first flange (11) has a third through hole (12) vertically arranged along its upper edge for the first probe (5) to pass through. The upper end face of the first flange (11) is provided with a mounting hole (13). The mounting hole (13) is provided with a second flange (14). The first probe (5) is connected to the second flange (14). Several first bolts (15) are circumferentially connected to the side wall of the first flange (11). The first bolts (15) abut against the outer peripheral wall of the second flange (14).

3. The online thickness detection fixture for anode and cathode thin films according to claim 2, characterized in that, The second flange (14) is a frustum-shaped structure with an upper outer diameter smaller than a lower outer diameter.

4. The online thickness detection fixture for anode and cathode thin films according to claim 2, characterized in that, The upper end of the second flange (14) is connected to a third flange (16), and the third flange (16) and the second flange (14) are fixedly connected by fixing bolts. The second flange (14) has a fourth through hole (17) vertically arranged on the upper edge for the first probe (5) to pass through. The third flange (16) has a fifth through hole (18) vertically arranged on the upper edge. The first probe (5) is fixedly connected in the fifth through hole (18). The third flange (16) has a plurality of first threaded holes (19) distributed circumferentially on the upper edge. Each first threaded hole (19) is arranged vertically. Each first threaded hole (19) is threaded with a second bolt. The second bolt abuts against the upper end face of the second flange (14).

5. The online thickness detection fixture for anode and cathode thin films according to claim 4, characterized in that, It also includes a first sleeve (20) and a first end cap (21). The first probe (5) is inserted into the first sleeve (20). The first sleeve (20) is fixedly connected in the fifth through hole (18). The upper end face of the third flange (16) is provided with a first connecting part (22). The first connecting part (22) is a frustum-shaped part with an upper outer diameter larger than the lower outer diameter. The first end cap (21) is sleeved on the first sleeve (20) and threadedly connected to the outer wall of the first sleeve (20). The first connecting part (22) is located inside the first end cap (21). The lower end face of the first end cap (21) abuts against the upper end face of the third flange (16). A third bolt (23) is threadedly connected to the side wall of the first end cap (21). The third bolt (23) abuts against the first connecting part (22).

6. The online thickness detection fixture for anode and cathode thin films according to claim 1, characterized in that, The lower end face of the lower clamping plate (3) is connected to a fourth flange (24) by fixing bolts. The fourth flange (24) is provided with a sixth through hole (25). The second probe (6) is fixedly connected in the sixth through hole (25). The fourth flange (24) is provided with a second threaded hole (26) along the circumferential direction. Each second threaded hole (26) is set vertically. Each second threaded hole (26) is threaded with a fourth bolt. The fourth bolt abuts against the lower end face of the lower clamping plate (3).

7. The online thickness detection fixture for anode and cathode thin films according to claim 6, characterized in that, It also includes a second sleeve (27) and a second end cap (28). The second probe (6) is inserted into the second sleeve (27). The second sleeve (27) is fixedly connected in the sixth through hole (25). The lower end face of the fourth flange (24) is provided with a second connecting part (29). The second connecting part (29) is a frustum-shaped part with an upper outer diameter smaller than the lower outer diameter. The second end cap (28) is sleeved on the second sleeve (27) and threadedly connected to the outer wall of the second sleeve (27). The second connecting part (29) is located inside the second end cap (28). The upper end face of the second end cap (28) abuts against the lower end face of the fourth flange (24). A fifth bolt (30) is threadedly connected to the side wall of the second end cap (28). The fifth bolt (30) abuts against the second connecting part (29).

8. The online thickness detection fixture for anode and cathode thin films according to claim 1, characterized in that, The cover plate (4) is fixedly connected to the upper end face of the lower clamping plate (3). The connecting structure includes a seventh through hole (31) and a mounting groove (8) located at the bottom end of the cover plate (4). The first probe (5) detects the upper surface of the film through the first through hole (9) and the seventh through hole (31), and the second probe (6) detects the lower surface of the film through the second through hole (10) and the mounting groove (8).

9. The online thickness detection fixture for anode and cathode thin films according to claim 1, characterized in that, It also includes a first connecting block (32) and a second connecting block (33). The lower left end face of the upper clamping plate (2) is fixedly connected to the upper left end face of the lower clamping plate (3) through the first connecting block (32), and the lower right end face of the upper clamping plate (2) is fixedly connected to the upper right end face of the lower clamping plate (3) through the second connecting block (33).

10. The online thickness detection fixture for anode and cathode thin films according to claim 1, characterized in that, A reinforcing plate (34) is connected between the lower clamping plate (3) and the mounting plate (1).

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