Cutting machine cooling water adjusting device adaptive to blade size

Abstract

The utility model discloses a cutting machine cooling water adjusting device adaptive to the size of a blade. The cutting machine cooling water adjusting device comprises an adjusting main seat, an adjusting auxiliary seat and an adjusting bolt, the adjusting main seat is fixedly installed on one side of a cutting machine blade, the adjusting bolt is vertically arranged and comprises a head adjusting end, a middle threaded end and a tail fixing end, the tail fixing end of the adjusting bolt is rotationally connected with the adjusting auxiliary seat, and the middle threaded end of the adjusting bolt is in threaded connection with the adjusting main seat; a cooling water pipe is fixed to the adjusting auxiliary base, and the water outlet end of the cooling water pipe is arranged on the side face of the cutting machine blade. Through the arrangement of the adjusting main seat, the adjusting auxiliary seat and the adjusting bolt, the adjusting position of the water outlet end of the cooling water pipe is adjusted to be far away from the cutting machine blade, so that the whole adjusting process is safe and easy to operate, the adjusting distance of the bolt is controllable, and certain adjusting precision is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and in particular to a cooling water regulating device for a cutting machine that is adapted to the size of the blade. Background Technology

[0002] In the semiconductor industry, thousands or even tens of thousands of chips are typically connected together on a single wafer. A certain gap exists between the chips; this gap is called a dicing track or dicing run. The process of separating each chip, which has independent electrical properties, is called dicing or cutting. Abrasive wheel cutting is a mainstream technology in the cutting process. It boasts low machine and consumable costs, mature technology, and high cost-effectiveness, thus enjoying a relatively high market share.

[0003] In abrasive wheel cutting, the abrasive wheel cutter rotates at 30,000 to 60,000 revolutions per minute to cut the kerf of the wafer. Simultaneously, the worktable carrying the wafer moves in a straight line at a certain speed along the tangent direction of the contact point between the blade and the wafer. This back-and-forth motion separates the chips on the wafer one by one. During the cutting process, the main purpose of the cutting water is to cool and clean the high-speed abrasive wheel cutter, while also washing away the debris generated during wafer cutting to prevent debris from remaining on the blade and contaminating the wafer. Therefore, the location of the cutting cooling water (the location of the water spray pipe) is particularly important.

[0004] Switching between different sized grinding wheels requires adjusting the water spray position. Improper adjustment can lead to minor issues like reduced cutting quality and shorter grinding wheel life, affecting cutting yield; more serious problems include water spray damaging the wafer, causing wafer scrap, or colliding with critical components like flanges or spindles, resulting in spare parts damage and equipment downtime. In actual production, the cooling water position (water spray position) needs manual adjustment. Because the distance between the water spray and the blades is short, the adjustment space is limited, making operation difficult and resulting in low precision.

[0005] Therefore, providing a cooling water regulating device for a cutting machine that adapts to the blade size is a technical problem that urgently needs to be solved in this field. Utility Model Content

[0006] The purpose of this invention is to overcome the shortcomings of the prior art and provide a cooling water regulating device for a cutting machine that is adapted to the size of the blade.

[0007] The objective of this utility model is achieved through the following technical solution:

[0008] In a first aspect, this utility model provides a cooling water regulating device for a cutting machine that is adapted to the size of the blade, including a main regulating seat, a secondary regulating seat, and an adjusting bolt;

[0009] The adjusting main seat is fixedly installed on one side of the cutter blade, the adjusting bolt is vertically arranged and comprises a head adjusting end, a middle threaded end and a tail fixed end, the tail fixed end of the adjusting bolt is rotationally connected with the adjusting auxiliary seat, and the middle threaded end of the adjusting bolt is threadedly connected with the adjusting main seat.

[0010] Further, the head adjusting end of the adjusting bolt is provided with a slot, and the adjusting main seat is provided with indication scale lines matched with the size of the cutter blade outside the adjusting threaded hole matched with the adjusting bolt.

[0011] Further, the adjusting main seat is in an inverted L shape and comprises a vertical fixing part and a horizontal adjusting part, one side of the adjusting auxiliary seat is abutted against the vertical fixing part of the adjusting main seat, and the middle threaded end of the adjusting bolt is installed on the horizontal adjusting part of the adjusting main seat.

[0012] Further, the vertical fixing part and the horizontal adjusting part of the adjusting main seat are integrally formed or fixedly connected through the mounting bolt.

[0013] Further, the vertical fixing part of the adjusting main seat is provided with a plurality of first fixing mounting holes distributed in a longitudinal direction along a horizontal direction towards the adjusting auxiliary seat, and the adjusting auxiliary seat is provided with second fixing mounting holes matched with the first fixing mounting holes.

[0014] Further, the first fixing mounting holes are 2*N, and the number N is the same as the number of the sizes of the cutter blades.

[0015] Further, the water outlet end of the cooling water pipe comprises a plurality of horizontally arranged water spray nozzles.

[0016] Further, the water outlet end of the cooling water pipe is arranged on the side of the cutting edge of the cutter blade.

[0017] Further, the size of the cutter blade comprises 2 inches, 3 inches and 5 inches.

[0018] The beneficial effects of the utility model are as follows:

[0019] In the example embodiment, the water outlet end of the cooling water pipe is adjusted to be away from the cutter blade through the arrangement of the adjusting main seat, the adjusting auxiliary seat and the adjusting bolt, so that the adjustment process is safe and easy to operate, the adjusting distance of the bolt is controllable, and the adjustment accuracy is improved. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 A front view of a cutting machine cooling water adjusting device adapted to the size of a cutter blade in one example embodiment of the utility model;

[0021] Figure 2 A side view of the cutting machine cooling water adjusting device of the present application is shown in the figure.

[0022] Figure 3 A top view of the cutting machine cooling water adjusting device of the present application is shown in the figure.

[0023] Figure 4 A front view of the cutting machine cooling water adjusting device of the present application is shown in the figure.

[0024] Figure 5 A side view of the cutting machine cooling water adjusting device of the present application is shown in the figure.

[0025] In the figure, 1 is the adjusting main seat, 101 is the indicating scale line, 102 is the vertical fixed part, 10201 is the first fixed mounting hole, 103 is the horizontal adjusting part, 104 is the mounting bolt, 2 is the adjusting auxiliary seat, 201 is the second fixed mounting hole, 202 is the supporting bolt, 3 is the adjusting bolt, 301 is the head adjusting end, 30101 is the slot, 302 is the middle threaded end, 303 is the tail fixed end, 4 is the cutting machine blade, 5 is the cooling water pipe, 501 is the water outlet end. DETAILED DESCRIPTION

[0026] The technical solutions of the present application will be described clearly and completely below in combination with the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0027] In the description of the present application, it should be noted that the directions or positional relationships indicated by "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like are based on the directions or positional relationships described in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as limiting the devices or elements indicated to have a specific orientation, to be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application.

[0028] In the description of the utility model, it is necessary to explain that, unless there is definite stipulation and limitation, belonging to "installation", "connection" should be understood in broad sense, for example, it can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be directly connected, also can be indirectly connected through intermediate medium, can be the communication inside two elements, for ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to specific circumstances.

[0029] The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in this application and the appended claims, the singular forms "a," "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "and / or," as used herein, refers to and encompasses any and all possible combinations of one or more of the associated listed items.

[0030] It will be understood that, although the terms first, second, third, etc. can be used herein to describe various information, but these information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, the first information can also be referred to as the second information, and similarly, the second information can also be referred to as the first information, without departing from the scope of the application. Depending on the context, the word "if" as used herein can be interpreted as "when" or "upon" or "in response to determining". In addition, "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0031] In addition, the technical features involved in the different embodiments of the utility model described below can be combined with each other as long as there is no conflict between them.

[0032] Referring to Figures 1-3 , Figures 1-3 The utility model discloses a cutting machine cooling water adjusting device of adapting blade size provides a kind of main view, side view sectional view and plan view in one of exemplary embodiment of the utility model, including adjusting main seat 1, adjusting vice seat 2 and adjusting bolt 3;

[0033] The adjusting main seat 1 is fixedly installed on one side of the cutting machine blade 4, the adjusting bolt 3 is vertically arranged and includes head adjusting end 301, middle threaded end 302 and tail fixed end 303, the tail fixed end 303 of adjusting bolt 3 is rotatably connected with adjusting vice seat 2, and the middle threaded end 302 of adjusting bolt 3 is threadedly connected with adjusting main seat 1;The cooling water pipe 5 is fixed on the adjusting vice seat 2, and the water outlet end 501 of the cooling water pipe 5 is arranged on the side surface of the cutting machine blade 4.

[0034] Specifically, the water outlet end 501 of the cooling water pipe 5 is used to cool and clean the cutting machine blade 4 in high-speed operation (or subsequent shutdown), and to flush away the debris generated by cutting the wafer on the cutting machine blade 4. However, as shown in the figure, the cutting machine blade 4 has different sizes, such as 2-inch grinding wheel cutter, 3-inch grinding wheel cutter, 5-inch grinding wheel cutter, so for cutting machine blades 4 of different sizes, if the water outlet end 501 of the cooling water pipe 5 is in the same position, the cooling and cleaning effect will be affected. At the same time, due to the close distance between the water outlet end 501 of the cooling water pipe 5 and the cutting machine blade 4, the debugging space is narrow, not easy to operate and the adjustment accuracy is low. Figure 1

[0035] In the present exemplary embodiment, the position of the cooling water pipe 5 is adjusted to be away from the cutting machine blade 4, that is, by adjusting the main seat 1, the adjusting screw 3 and the adjusting screw 3, in use: first, install the cutting machine blade 4 of the corresponding size, then rotate the adjusting screw 3 on the adjusting main seat 1, so as to further make the adjusting auxiliary seat 2 installed with the cooling water pipe 5 move up and down in the vertical direction, and then drive the water outlet end 501 of the cooling water pipe 5 to move up and down, so as to adjust the water spraying position.

[0036] Therefore, in the present exemplary embodiment, by adjusting the main seat 1, the adjusting auxiliary seat 2 and the adjusting screw 3, the position of the water outlet end 501 of the cooling water pipe 5 is adjusted to be away from the cutting machine blade 4, so that the whole adjustment process is safe and easy to operate, and the screw adjustment distance is controllable, which improves the adjustment accuracy.

[0037] ​It should be noted that in a specific example embodiment, the tail fixed end 303 of the adjusting bolt 3 is provided with a ball bearing structure, including an outer ring, an inner ring, balls and a retainer, a plurality of balls are arranged between the outer ring and the inner ring, and the balls are arranged on the retainer, the outer ring is fixedly connected with the adjusting secondary seat 2 (such as interference fit), the inner ring is fixedly connected with the tail fixed end 303 of the adjusting bolt 3 (such as interference fit), and at this time the inner ring rotates with the rotation of the adjusting bolt 3. A through threaded hole is formed in the adjusting primary seat 1, and the middle threaded end 302 of the adjusting bolt 3 is provided with a matching thread. During installation, first, the middle threaded end 302 of the adjusting bolt 3 is screwed into the adjusting primary seat 1, a blind hole adapted to the ball bearing structure is arranged on the adjusting secondary seat 2, the ball bearing structure is fixed into the blind hole (the outer ring is interference fit with the blind hole), and then the adjusting bolt 3 is inserted into the inner ring of the ball bearing structure, so as to realize the rotational connection between the tail of the adjusting bolt 3 and the ball bearing structure. At this time, rotating the adjusting bolt 3, the inner ring rotates with it, and the outer ring is fixed with the adjusting secondary seat 2, so the adjusting secondary seat 2 will perform a lifting action with the rotation of the adjusting bolt 3. In addition, in order to prevent the adjusting secondary seat 2 from rotating during lifting (to keep the outlet end 501 of the cooling water pipe 5 horizontally fixed), one side of the adjusting secondary seat 2 can be abutted against the adjusting primary seat 1.

[0038] More preferably, in an example embodiment, as shown in Figure 3 the head adjusting end 301 of the adjusting bolt 3 is provided with a one-way groove 30101, and the outer periphery of the adjusting threaded hole of the adjusting primary seat 1 matched with the adjusting bolt 3 is provided with an indication scale line 101 matched with the size of the blade.

[0039] Specifically, in the example embodiment, the head adjusting end 301 of the adjusting bolt 3 is provided with a one-way groove 30101, and the position of the adjusting secondary seat 2, i.e. the position of the cooling water pipe 5, is adjusted by rotating the one-way groove 30101. At the same time, the outer periphery of the adjusting threaded hole of the adjusting primary seat 1 matched with the adjusting bolt 3 is provided with an indication scale line 101 matched with the size of the blade, so as to distinguish and define the circumference according to different sizes of the grinding wheel of the cutting machine, so that different sizes correspond to the corresponding scale range, and then the water spraying position is adjusted according to different scale ranges, for example, the range of 2-inch blade is A~B, and the range of 3-inch blade is C~D, so as to avoid wafer scrapping or equipment loss caused by improper position.

[0040] In addition, in an example embodiment, the adjusting range of a circumference of the adjusting bolt 3 is consistent with the safety limit range of the equipment hardware.

[0041] More preferably, in an example embodiment, as shown in Figure 1 and 2As shown, the adjusting main seat 1 is in inverted L shape and comprises a vertical fixing part 102 and a horizontal adjusting part 103, one side of the adjusting auxiliary seat 2 abuts against the vertical fixing part 102 of the adjusting main seat 1, and the middle threaded end 302 of the adjusting bolt 3 is installed in the horizontal adjusting part 103 of the adjusting main seat 1.

[0042] Specifically, in the present exemplary embodiment, one preferred positional relationship between the adjusting main seat 1 and the adjusting auxiliary seat 2 is disclosed, the adjusting main seat 1 is in inverted L shape and comprises a vertical fixing part 102 and a horizontal adjusting part 103, wherein the vertical fixing part 102 is used for fixing the adjusting auxiliary seat 2, i.e. one side of the adjusting auxiliary seat 2 abuts against the vertical fixing part 102 of the adjusting main seat 1, and the horizontal adjusting part 103 is used for installing the adjusting bolt 3, i.e. the middle threaded end 302 of the adjusting bolt 3 is installed in the horizontal adjusting part 103 of the adjusting main seat 1.

[0043] In other exemplary embodiments, the adjusting auxiliary seat 2 can be directly arranged below the adjusting main seat 1, and the adjusting bolt 3 passes through the whole adjusting main seat 1. However, this way makes the length of the adjusting bolt 3 longer.

[0044] More preferably, in an exemplary embodiment, the vertical fixing part 102 and the horizontal adjusting part 103 of the adjusting main seat 1 are integrally formed, or are fixedly connected through mounting bolts 104 (as shown). Figure 5

[0045] More preferably, in an exemplary embodiment, as shown in Figure 4 and Figure 5 , the vertical fixing part 102 of the adjusting main seat 1 is provided with a plurality of longitudinally distributed first fixing installation holes 10201 in the horizontal direction towards the adjusting auxiliary seat 2, and the adjusting auxiliary seat 2 is provided with second fixing installation holes 201 matching the first fixing installation holes 10201.

[0046] Specifically, since the adjusting auxiliary seat 2 is installed with the cooling water pipe 5 and has a certain weight, only connecting and supporting through the adjusting bolt 3 will reduce the service life of the adjusting bolt 3, and the process misoperation will also cause height misadjustment. Therefore, in the present exemplary embodiment, the first fixing installation holes 10201 of the vertical fixing part 102 of the adjusting main seat 1 are provided with second fixing installation holes 201 matching the first fixing installation holes 10201 in the horizontal direction of the adjusting auxiliary seat 2, and after the position switching of the adjusting auxiliary seat 2 is completed, the adjusting auxiliary seat 2 is fixed on the adjusting main seat 1 by using the supporting bolt 202 passing through the first fixing installation holes 10201 and the second fixing installation holes 201, so as to reduce the stress of the adjusting bolt 3 and avoid the subsequent misoperation causing the rotation of the adjusting bolt 3.

[0047] ​It should be noted that the first fixed mounting hole 10201 of the adjusting sub-base 2 is matched with the size of the blade, and can correspond to the indicating scale line 101 of the adjusting main base 1. The first fixed mounting hole 10201 can be a threaded hole, and the second fixed mounting hole 201 can be a threaded hole or a through hole. When the second fixed mounting hole 201 is a through hole, a stepped structure can be arranged in the second fixed mounting hole 201, thereby fixing the head of the supporting bolt 202.

[0048] More preferably, in an exemplary embodiment, the first fixed mounting hole 10201 is 2*N, and the number N is the same as the number of blade sizes.

[0049] Specifically, in the present exemplary embodiment, in order to reduce the supporting force of one supporting bolt 202, two supporting bolts 202 can be arranged, and the corresponding first fixed mounting hole 10201 is 2*N, and the number N is the same as the number of blade sizes. If the second fixed mounting hole 201 is a through hole, one can be arranged, and if the second fixed mounting hole 201 is a through hole, two can be arranged.

[0050] More preferably, in an exemplary embodiment, the water outlet end 501 of the cooling water pipe 5 includes a plurality of horizontally arranged water nozzles.

[0051] Specifically, in the present exemplary embodiment, the water nozzles are horizontally arranged, so that the water spraying effect on the cutting machine blade 4 is better.

[0052] More preferably, in an exemplary embodiment, the water outlet end 501 of the cooling water pipe 5 is arranged on the side of the cutting edge of the cutting machine blade 4, so as to be aligned with the cutting edge. And the cooling water pipe 5 can be arranged in two, i.e. on both sides of the cutting machine blade 4.

[0053] In addition, it should be noted that the adjusting main base 1 can be directly fixed and installed on the ground by external supports, or can be hoisted. The adjusting sub-base 2 is provided with a cooling water pipe 5, and the adjusting sub-base 2 can be provided with a water tank, a water conveying motor and other equipment, or can be arranged externally.

[0054] Obviously, the above embodiments are only examples for clear illustration, and are not limitations on the embodiments. For those skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, all the embodiments need not and cannot be exhausted. The obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A cutting machine cooling water adjusting device for adapting to a blade size, characterized by: The adjusting main seat, the adjusting auxiliary seat and the adjusting bolt are included; The adjusting main seat is fixedly installed on one side of the cutting machine blade, the adjusting bolt is vertically arranged and includes a head adjusting end, a middle threaded end and a tail fixed end, the tail fixed end of the adjusting bolt is rotationally connected with the adjusting auxiliary seat, and the middle threaded end of the adjusting bolt is threadedly connected with the adjusting main seat; the adjusting auxiliary seat is fixedly provided with a cooling water pipe, and a water outlet end of the cooling water pipe is arranged on the side surface of the cutting machine blade.

2. A cutting machine cooling water regulating device that adapts to the size of the blade according to claim 1, characterized in that: The head adjusting end of the adjusting bolt is provided with a one-way slot, and the adjusting main seat is provided with an indication scale matching the size of the blade on the outer periphery of the adjusting threaded hole matched with the adjusting bolt.

3. A cutting machine cooling water regulating device that adapts to the size of the blade according to claim 1, characterized in that: The adjusting main seat is in an inverted L shape and includes a vertical fixing part and a horizontal adjusting part, one side of the adjusting auxiliary seat is abutted against the vertical fixing part of the adjusting main seat, and the middle threaded end of the adjusting bolt is installed on the horizontal adjusting part of the adjusting main seat.

4. A cutting machine cooling water regulating device that adapts to the size of the blade according to claim 3, characterized in that: The vertical fixing part and the horizontal adjusting part of the adjusting main seat are integrally formed or fixedly connected through mounting bolts.

5. A cutting machine cooling water regulating device for adapting the blade size according to claim 3, characterized in that: The vertical fixing part of the adjusting main seat is provided with a plurality of first fixing mounting holes distributed in the longitudinal direction along the horizontal direction towards the adjusting auxiliary seat, and the adjusting auxiliary seat is provided with second fixing mounting holes matched with the first fixing mounting holes.

6. A cutting machine cooling water regulating device that adapts to the size of the blade according to claim 5, characterized in that: The first fixing mounting holes are 2*N, and the number N is the same as the number of the sizes of the blades.

7. A cutting machine cooling water regulating device that adapts to the size of the blade according to claim 1, characterized in that: The water outlet end of the cooling water pipe includes a plurality of horizontally arranged water spray nozzles.

8. A cutting machine cooling water regulating device that adapts to the size of the blade according to claim 1, characterized in that: The water outlet end of the cooling water pipe is arranged on the side surface of the cutting edge of the cutting machine blade.

9. A cutting machine cooling water regulating device that adapts to the size of the blade according to claim 1, characterized in that: The sizes of the cutting machine blade include 2 inches, 3 inches and 5 inches.

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