Evaporation boat
By setting mesh grooves on the bottom wall of the evaporation boat, the problem of slow metal liquid spreading was solved, achieving rapid spreading and improving the evaporation effect.
Patent Information
- Application Number
- CN202520033643.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-07
- Publication Date
- 2025-12-09
- Estimated Expiration
- 2035-01-07
AI Technical Summary
The smooth bottom surface of existing evaporation boats causes the molten metal to spread slowly, affecting the evaporation effect.
An evaporation boat with mesh grooves on the bottom wall of the tank is designed. The width and spacing of the grooves range from 2 micrometers to 6 micrometers to form a hydrophobic structure and reduce the adhesion between the liquid metal and the bottom of the tank.
It enables rapid spreading of liquid metal, thus improving the evaporation effect.
Smart Images

Figure CN223646615U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to an evaporation boat. Background Technology
[0002] Currently, existing evaporation boats used for evaporating metals are often boat structures with a smooth bottom surface. In practice, the adhesion between the smooth bottom surface and the molten metal prevents the molten metal from spreading quickly, thus affecting the evaporation effect and resulting in poor evaporation performance. Utility Model Content
[0003] The purpose of this invention is to provide an evaporation boat that solves the technical problems of slow spreading and poor evaporation of liquid metal in existing technologies. The various technical effects of the preferred solutions among the many technical solutions provided by this invention are detailed below.
[0004] To achieve the above objectives, the present invention provides the following technical solution:
[0005] The evaporation boat provided by this utility model includes a boat body with a tank. The bottom wall of the tank body is provided with grooves. The grooves are arranged in a mesh pattern and protruding pillars are formed between the grooves. The width of the grooves ranges from 2 micrometers to 6 micrometers, and the interval between adjacent grooves ranges from 2 micrometers to 3 micrometers.
[0006] Preferably, the depth of the trench is in the range of 1 micrometer to 6 micrometers.
[0007] Preferably, the depth of the trench is in the range of 2 micrometers to 3 micrometers.
[0008] Preferably, the width of the trench is in the range of 3 micrometers to 5 micrometers.
[0009] Preferably, the trench includes a first trench and a second trench, wherein there are multiple first trenches arranged in parallel to each other, and there are multiple second trenches arranged in parallel to each other, and the first trenches and the second trenches are intersected.
[0010] Preferably, the included angle between the first groove and the second groove is in the range of 30 degrees to 90 degrees.
[0011] Preferably, the first groove and the second groove are perpendicular to each other.
[0012] Preferably, the protrusion is formed between two adjacent first grooves and two adjacent grooves, and the top of the protrusion is a plane or an arc surface.
[0013] The application employs the above technical solution and has at least the following beneficial effects:
[0014] The evaporation boat includes a boat body with a tank. The bottom wall of the tank body has grooves arranged in a mesh pattern, with protruding pillars between the grooves. By setting up the mesh structure, and with the width of the grooves ranging from 2 micrometers to 6 micrometers and the spacing between adjacent grooves ranging from 2 micrometers to 3 micrometers, a hydrophobic mechanism is formed at the bottom of the tank body, reducing the adhesion between the liquid metal and the bottom of the tank, so that the molten liquid metal can be quickly spread on the tank body.
[0015] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the overall structure of the evaporation boat provided in this embodiment of the utility model;
[0018] Figure 2 This is a top view schematic diagram of the evaporation boat structure provided in this embodiment of the utility model;
[0019] Figure 3 yes Figure 2 Schematic diagram of the AA section structure;
[0020] Figure 4 yes Figure 2 A magnified schematic diagram of part B in the middle section.
[0021] In the diagram: 1. Hull; 2. Groove; 3. First Groove; 4. Second Groove; 5. Protruding Post. Detailed Implementation
[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0023] A specific embodiment of this utility model provides an evaporation boat, combined with an attached... Figure 1As shown, the device includes a boat body 1 with a tank. The bottom wall of the tank body has grooves 2 arranged in a mesh pattern. Protrusions 5 are formed between the grooves 2. The mesh pattern of the grooves 2 ensures that the protrusions 5 are also evenly distributed on the bottom wall of the tank body. The width of the grooves 2 ranges from 2 micrometers to 6 micrometers, and the interval between adjacent grooves 2 ranges from 2 micrometers to 3 micrometers. Adjacent grooves 2 refer to parallel adjacent grooves 2. The mesh pattern of the grooves 2 in this application forms a hydrophobic structure at the bottom of the tank body, reducing the adhesion between the liquid metal and the bottom of the tank, and allowing the molten liquid metal to spread quickly on the tank body.
[0024] Specifically, the depth of the trench 2 in this application ranges from 1 micrometer to 6 micrometers.
[0025] In some embodiments, the width of the trench 2 ranges from 3 micrometers to 5 micrometers, for example, 3 micrometers, 3.5 micrometers, 4 micrometers, 4.5 micrometers, 5 micrometers, etc.; the depth of the trench 2 ranges from 2 micrometers to 3 micrometers, for example, 2 micrometers, 2.5 micrometers, 3 micrometers, etc.; and the spacing between adjacent trenches 2 ranges from 2 micrometers to 3 micrometers, for example, 2 micrometers, 2.5 micrometers, 3 micrometers, etc. This creates a hydrophobic structure at the bottom of the tank, further reducing the adhesion between the liquid metal and the tank bottom, allowing the molten liquid metal to spread rapidly on the tank.
[0026] In some embodiments, the groove 2 includes a first groove 3 and a second groove 4. There are multiple first grooves 3 arranged in parallel to each other, and there are multiple second grooves 4 arranged in parallel to each other. The first grooves 3 and the second grooves 4 are arranged intersectingly.
[0027] In some embodiments, the included angle between the first groove 3 and the second groove 4 is in the range of 30 degrees to 90 degrees.
[0028] In some embodiments, the first groove 3 and the second groove 4 are perpendicular to each other.
[0029] In some embodiments, a protrusion 5 is formed between two adjacent first grooves 3 and two adjacent grooves 2. The top of the protrusion 5 is a flat or arc-shaped surface, so that the surface tension of the liquid metal contacting the top of the protrusion 5 prevents the liquid metal from entering the groove 2.
[0030] In this utility model, the terms "one embodiment," "some embodiments," "example," "specific example," and "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0031] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.
Claims
1. An evaporation boat, characterized in that, The device includes a boat body with a trough. The bottom wall of the trough has grooves arranged in a mesh pattern. The grooves form protruding pillars between them. The width of the grooves ranges from 2 micrometers to 6 micrometers, and the interval between adjacent grooves ranges from 2 micrometers to 3 micrometers.
2. The evaporation boat according to claim 1, characterized in that, The depth of the trench ranges from 1 micrometer to 6 micrometers.
3. The evaporation boat according to claim 2, characterized in that, The depth of the trench ranges from 2 micrometers to 3 micrometers.
4. The evaporation boat according to claim 1, characterized in that, The width of the trench ranges from 3 micrometers to 5 micrometers.
5. The evaporation boat according to claim 1, characterized in that, The trench includes a first trench and a second trench. There are multiple first trenches arranged in parallel to each other, and there are multiple second trenches arranged in parallel to each other. The first trenches and the second trenches are intersected.
6. The evaporation boat according to claim 5, characterized in that, The included angle between the first groove and the second groove is in the range of 30 degrees to 90 degrees.
7. The evaporation boat according to claim 6, characterized in that, The first groove and the second groove are perpendicular to each other.
8. The evaporation boat according to claim 5, characterized in that, The protruding post is formed between two adjacent first grooves and two adjacent grooves, and the top of the protruding post is a flat surface or a circular arc surface.