Dual cathode shutter overlap structure

Abstract

The utility model discloses a double-cathode shutter overlapping structure which comprises two shutter blades, each shutter blade comprises a cover plate, the cross section outline of each cover plate is in an arc shape with an opening facing a cathode, and the axial direction of each cover plate is parallel to the length direction of a cathode body; the two side edges of each cover plate in the axial direction extend downwards in the direction close to the cathode to form a side baffle respectively; and when the two shutter blades are respectively positioned above the two parallel cathodes, an avoiding gap is formed between the baffle plates on the two adjacent sides of the two shutter blades. According to the utility model, the high-speed closing of each cathode shutter blade required in a high-precision multi-layer coating system can be kept, and the spreading of stray coating materials can be avoided by the shutter blades of each cathode under the non-contact condition.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a dual cathode shutter overlapping structure. Background Technology

[0002] In vacuum coating systems, the shutter blades of the cathode act as a shield during cathode closure, preventing cathode coating action. Especially in multilayer vacuum coating systems, when one cathode is closed while another is being actively coated, the closed cathode is shut down by a very fast shutter unit. For dual rotatable cathodes, the two shutter blades rotate from opposite sides to their corresponding cathodes in less than a second, allowing for a rapid transition of coating material from one layer to the next on the substrate. Typically, to prevent the two shutter blades from colliding at high speed, a gap of several millimeters is left between them. Through this gap, a small amount of stray coating material can still propagate onto the substrate and poison other currently coated layers. For complex multilayer coating designs, these problems ultimately degrade the coating quality of the device. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a dual-cathode shutter overlapping structure, which can maintain the high-speed closing of each cathode shutter blade required in a high-precision multilayer coating system, and also prevent the propagation of stray coating material under non-contact conditions.

[0004] The technical solution of this utility model is:

[0005] A dual-cathode shutter overlapping structure is characterized by comprising two shutter blades, each shutter blade comprising a cover plate, the cross-sectional profile of each cover plate being an arc shape with its opening facing the cathode, the axial direction of the cover plate being parallel to the length direction of the cathode body; each cover plate extending downward along its two sides in the axial direction toward the cathode to form a side baffle.

[0006] When the two shutter blades are each located above the two parallel cathodes, a clearance gap is provided between the adjacent side baffles of the two shutter blades.

[0007] Furthermore, one side baffle of one of the covers is bent outward and extends horizontally to form a closed edge, and when the two shutter blades are each located above the two parallel cathodes, one side baffle of one of the covers is located above the closed edge of the other cover.

[0008] Furthermore, the bottom surface of one side baffle of the other cover plate is bent outward and extends horizontally to form a closed edge, and when the two shutter blades are respectively located above the two parallel cathodes, the two closed edges are far apart.

[0009] Furthermore, the width of the closed edge is not less than the width of the clearance gap.

[0010] Furthermore, the length of each of the side baffles and each of the closed edges is adapted to the corresponding cathode coating range.

[0011] Furthermore, each of the aforementioned cover plates extends downward along its length direction with its two top ends facing the cathode direction, each forming an arc-shaped connecting lug.

[0012] Furthermore, each of the two shutter blades is connected to a rotating connecting plate on the same side of a connecting lug. Each rotating connecting plate is connected to the driving end of a rotating drive device, and each rotating drive device drives each shutter blade to rotate circumferentially around its corresponding cathode.

[0013] Furthermore, each of the two shutter blades is connected to a fixed plate on the other connecting lug on the same side, and a rotating shaft is fixedly connected to each fixed plate, and each rotating shaft is rotatably connected to the shaft seat.

[0014] Furthermore, each of the aforementioned rotary drive devices is electrically connected to the program control unit.

[0015] The beneficial technical effects of this utility model are as follows: The shutter blades of this utility model are provided with a closing edge. When the two shutter blades on the dual cathodes rotate at high speed and move to the closing point of their corresponding cathodes, the closing edge on one shutter blade is exactly sealed at the bottom end of the clearance gap left by the two shutter blades to avoid collision during high-speed rotation. This allows the utility model to maintain the high-speed closing of each cathode shutter blade required in the high-precision multilayer coating system, and also to prevent the spread of stray coating material by the shutter blades of each cathode under non-contact conditions. Attached Figure Description

[0016] Figure 1 This is an overall schematic diagram of the two shutter blades in Example 1 when they are at their closing point;

[0017] Figure 2 yes Figure 1 Another angle diagram;

[0018] Figure 3 This is a schematic diagram of any shutter blade in Example 1;

[0019] Figure 4 This is an overall schematic diagram of the two shutter blades when they are at their closing point in Example 2;

[0020] Figure 5 yes Figure 4 A schematic diagram from another angle.

[0021] in:

[0022] 100-Shutter blade, 101-Cover plate, 102-Side baffle, 103-Closed edge, 104-Connecting ear, 105-Rotating connecting plate, 106-Fixed plate, 107-Rotating shaft, 108-Shaft seat, 200-Rotating drive device, 300-Clearance clearance. Detailed Implementation

[0023] In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0024] Example 1

[0025] like Figures 1-3 As shown, this embodiment 1 provides a dual-cathode shutter overlapping structure, which is applied to two parallel cathodes in a vacuum coating apparatus, with the coating directions of the two cathodes being consistent. This embodiment 1 can block stray coating material on the two cathodes, achieving high-precision coating. It includes two shutter blades 100, each shutter blade 100 being rotatably connected to one cathode along the length direction of the cathode body.

[0026] In addition, for ease of description, this utility model defines the two cathodes as having their coating direction facing upwards, and the shutter blade 100 rotating to above its corresponding cathode as the closing point of that shutter blade 100 to that cathode.

[0027] Each shutter blade 100 includes a cover plate 101. The cross-sectional profile of each cover plate 101 is arc-shaped with its opening facing the cathode. The axial direction of each cover plate 101 is parallel to the length direction of the cathode body. Each cover plate 101 extends downward along its two sides in the axial direction towards the cathode, forming a long strip-shaped side baffle 102. When two shutter blades 100 are arranged parallel to each other on the two cathodes and each covers the top of its corresponding cathode, an appropriate clearance gap 300 is provided between the adjacent side baffles 102 of the two cover plates 101. This clearance gap 300 is to prevent the two cover plates 101 from contacting each other and colliding when rotating at high speed. However, this results in a small number of stray particles of the cathode material still spreading to the substrate through the clearance gap 300 when the two shutter blades 100 reach the cathode closing point at high speed, although most of the stray particles of the cathode material are blocked. This can poison other coating materials on the substrate.

[0028] Therefore, in this embodiment 1, the bottom surface of the side baffle 102 on the same side of the two cover plates 101 is bent outward and then extended horizontally to form a long strip closed edge 103. When the two shutter blades 100 are arranged parallel to each other on the two cathodes and each covers the top of its corresponding cathode, the side baffle 102 on one cover plate 101 is located above the closed edge 103 on the other cover plate 101, and the width of each closed edge 103 is greater than the width of the clearance gap 300.

[0029] Furthermore, the lengths of each side baffle 102 and each closed edge 103 are compatible with the length of their corresponding cathode body.

[0030] Each cover plate 101 extends downwards along its length, with its two top ends facing the cathode, forming an arc-shaped connecting lug 104. A rotating connecting plate 105 is connected to a connecting lug 104 on the same side of each of the two cover plates 101. Each rotating connecting plate 105 is connected to the driving end of the rotary drive device 200, while the fixed end of the rotary drive device 200 can be connected to its corresponding cathode or other fixed support component of the vacuum coating chamber. Each rotary drive device 200 drives each shutter blade 100 to rotate circumferentially around its corresponding cathode.

[0031] As a preferred embodiment, in order to make the circumferential rotation of each shutter blade 100 more stable, a fixed plate 106 is connected to each of the connecting ears 104 on the same side of the two cover plates 101. A rotating shaft 107 is fixedly connected to each fixed plate 106. Each rotating shaft 107 is rotatably connected to a bearing 108. Each bearing 108 is fixedly connected to other fixed support members of its corresponding cathode.

[0032] Each rotary drive device 200 is electrically connected to the program control unit. When the two cathodes are performing the coating operation, each shutter blade 100 is located opposite to each of the two cathodes. To prevent the two shutter blades 100 from colliding when they rotate at high speed to their closing point above their corresponding cathodes, the program control unit controls the two rotary drive devices 200 to rotate at high speed in opposite directions. The program control unit then controls the two rotary drive devices 200 to rotate 15 degrees before each shutter blade 100 reaches its closing point, causing the two shutter blades 100 to... The shutter blades 100 are decelerated at different values, so that one shutter blade 100 reaches the end point first, and the closing edge 103 of the shutter blade 100 is exactly located at the clearance gap 300. The other shutter blade 100 follows closely behind, and the side baffle 102 of the shutter blade 100 is exactly above the closing edge 103 of the shutter blade 100. This can maintain the high-speed closing of each cathode shutter blade required in the high-precision multilayer coating system, and also prevent the propagation of stray coating material by each cathode shutter blade under non-contact conditions.

[0033] Example 2

[0034] like Figures 4-5 As shown, the difference between Embodiment 2 and Embodiment 1 is that in Embodiment 1, both shutter blades 100 are provided with a closing edge 103, which makes the combination and installation, or the setting of their rotation direction and sequence, more flexible; in Embodiment 2, only the side baffle 102 of one shutter blade 100 is provided with a closing edge 103, and the other components and connections are the same. When each shutter blade 100 needs to rotate to its closing point, the program control unit of this embodiment 2 controls the two rotation drive devices 200 to rotate at high speed in opposite directions. When each shutter blade 100 is 15 degrees away from its closing point, the program control unit controls the two rotation drive devices 200 to decelerate the two shutter blades 100 at different values, so that the shutter blade 100 with the closing edge 103 reaches the end point first, and the closing edge 103 of the shutter blade 100 is exactly located at the clearance gap 300. The other shutter blade 100 follows closely behind, and the side baffle 102 of the shutter blade 100 is exactly above the closing edge 103 of the shutter blade 100.

[0035] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A dual-cathode shutter overlapping structure, characterized in that, It includes two shutter blades (100), each shutter blade (100) includes a cover plate (101), the cross-sectional profile of each cover plate (101) is an arc shape with the opening facing the cathode, the axial direction of the cover plate (101) is parallel to the length direction of the cathode body; each cover plate (101) extends downward along its two sides in the axial direction toward the cathode to form a side baffle (102). When the two shutter blades (100) are each located above the two parallel cathodes, a clearance gap (300) is provided between the adjacent side baffles (102) of the two shutter blades (100).

2. The dual-cathode shutter overlapping structure according to claim 1, characterized in that, One side baffle (102) of one of the cover plates (101) is bent outward and then extends horizontally to form a closed edge (103). When the two shutter blades (100) are respectively located above the two parallel cathodes, the side baffle (102) of one of the cover plates (101) is located above the closed edge (103) of the other cover plate (101).

3. The dual-cathode shutter overlapping structure according to claim 2, characterized in that, Another cover plate (101) has a side baffle (102) that bends outward and extends horizontally to form a closed edge (103). When the two shutter blades (100) are each located above the two parallel cathodes, the two closed edges (103) are far apart.

4. The dual-cathode shutter overlapping structure according to claim 2, characterized in that, The width of the closed edge (103) is not less than the width of the clearance gap (300).

5. The dual-cathode shutter overlapping structure according to claim 2, characterized in that, The length of each of the side baffles (102) and each of the closed edges (103) is adapted to the corresponding cathode coating range.

6. The dual-cathode shutter overlapping structure according to claim 1, characterized in that, Each of the aforementioned cover plates (101) extends downward along its length direction with its two top ends facing the cathode direction, each forming an arc-shaped connecting lug (104).

7. The dual-cathode shutter overlapping structure according to claim 6, characterized in that, Each of the two shutter blades (100) is connected to a rotating connecting plate (105) on a connecting ear (104) on the same side. Each rotating connecting plate (105) is connected to the driving end of the rotating driving device (200). Each rotating driving device (200) drives each shutter blade (100) to rotate circumferentially around its corresponding cathode.

8. The dual-cathode shutter overlapping structure according to claim 7, characterized in that, Each of the two shutter blades (100) has a fixed plate (106) connected to the other connecting ear (104) on the same side. Each fixed plate (106) has a rotating shaft (107) fixedly connected to it. Each rotating shaft (107) is rotatably connected to the bearing seat (108).

9. The dual-cathode shutter overlapping structure according to claim 8, characterized in that, Each of the rotary drive devices (200) is electrically connected to the program control unit.

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