High-temperature powder conveying device

Abstract

The utility model provides a high-temperature powder conveying device, and relates to the technical field of semiconductor equipment. Comprising a process tank body and further comprises a vacuum device, a material storage tank and an inert gas source, a discharging pipeline and a conveying pipeline are arranged at a discharging port of the process tank body so as to be connected to the material storage tank, the material storage tank is communicated to the vacuum device, and the inert gas source comprises a first channel and a second channel. Wherein the first channel is connected to the upper part of the process tank body so as to assist in pressing materials in the process tank body to a discharging pipeline, and the second channel is connected to the discharging pipeline so as to push the materials in the discharging pipeline into the material storage tank; a first high-temperature-resistant ball valve and a second high-temperature-resistant ball valve are respectively arranged on the discharging pipeline and the conveying pipeline and are respectively used for controlling the connection and disconnection of the discharging pipeline and the conveying pipeline. By means of the scheme, the high-temperature material conveying function is achieved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to a high-temperature powder conveying device. Background Technology

[0002] Currently, silicon-carbon anode coating processes typically employ a cooling-before-discharging method, and high-temperature discharge solutions are not yet available on the market. Traditional powder discharge methods include gravity feeding, screw conveying, and positive pressure conveying. However, the cooling process wastes a lot of time, resulting in low production efficiency. Furthermore, since some powder materials are sensitive to air, traditional conveying methods often cannot prevent the material from coming into contact with air, leading to contamination of the processed powder material and affecting the quality of the product. Utility Model Content

[0003] This utility model discloses a high-temperature powder conveying device to solve the problems mentioned above.

[0004] The present invention adopts the following solution:

[0005] A high-temperature powder conveying device includes a process tank, and further includes a vacuum device, a storage tank, and an inert gas source. The process tank has a discharge port with a discharge pipe and a conveying pipe connected to the storage tank. The storage tank is connected to the vacuum device. The inert gas source includes a first channel and a second channel. The first channel is connected to the top of the process tank to assist in pressing the material in the process tank out to the discharge pipe. The second channel is connected to the discharge pipe to push the material in the discharge pipe into the storage tank. A first high-temperature resistant ball valve and a second high-temperature resistant ball valve are respectively installed on the discharge pipe and the conveying pipe to control the on / off state of the discharge pipe and the conveying pipe, respectively.

[0006] Furthermore, the storage tank is equipped with a filter element backflushing device, and the inert gas source is provided with a third channel to be connected to the filter element backflushing device to provide backflushing air source.

[0007] Furthermore, a first valve is provided on the third channel to control the on / off state of the backflush air source.

[0008] Furthermore, a second valve is provided on the second channel to control the opening and closing of the second channel.

[0009] Furthermore, a third valve is installed on the pipeline between the vacuum device and the storage tank.

[0010] Furthermore, pressure switches are installed on the process tank, discharge pipeline, and storage tank.

[0011] Furthermore, the process tank is equipped with a stirring device, which rotates at a low speed during the discharge process.

[0012] Beneficial effects:

[0013] This solution enables high-temperature conveying of powder in an inert environment. The device employs a differential pressure high-temperature discharge scheme, ensuring that powder materials can be conveyed in a fully enclosed pipeline under an inert gas environment, making it suitable for conveying air-sensitive materials. Before powder conveying, the air inside the corresponding conveying pipelines and storage tanks can be extracted to ensure an inert conveying environment, while also removing residual process side reaction gases adsorbed on the powder. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of a high-temperature powder conveying device according to an embodiment of the present invention;

[0015] Chart: Process tank 1, Vacuum device 2, Storage tank 3, Filter backflushing device 4, Inert gas source 5, Discharge pipeline 6, Conveying pipeline 7, First channel 8, Second channel 9, Third channel 10, First valve V5, Second valve V3, Third valve V6, Fourth valve V1, First high temperature ball valve V2, Second high temperature ball valve V4, Discharge valve V7, First pressure switch PT1, Second pressure switch PT2, Third pressure switch PT3, Pressure reducing valve PRV1. Detailed Implementation

[0016] Combination Figure 1 This embodiment provides a high-temperature powder conveying device, including a process tank 1, a vacuum device 2, a storage tank 3, and an inert gas source 5. The process tank 1 has a discharge pipe 6 and a conveying pipe 7 connected to the storage tank 3. The storage tank 3 is connected to the vacuum device 2. The inert gas source 5 includes a first channel 8 and a second channel 9. The first channel 8 is connected to the top of the process tank 1 to assist in pressing the material in the process tank 1 to the discharge pipe 6. The second channel 9 is connected to the discharge pipe 6 to push the material in the discharge pipe 6 into the storage tank 3. The discharge pipe 6 and the conveying pipe 7 are respectively equipped with a first high-temperature resistant ball valve V2 and a second high-temperature resistant ball valve V4 to control the opening and closing of the discharge pipe 6 and the conveying pipe 7.

[0017] In this embodiment, a stirring device is installed inside the process tank 1, and the stirring device maintains a low-speed rotation during the discharge process. A first high-temperature resistant ball valve V2 is installed on the discharge pipeline 6, and a second high-temperature resistant ball valve V4 is installed on the conveying pipeline 7. A second valve V3 is installed on the second channel 9 to control the opening and closing of the second channel 9. A third valve V6 is installed on the pipeline between the vacuum device 2 and the storage tank 3. A fourth valve V1 is installed on the first channel 8 to control the opening and closing of the first channel 8. It should be noted that a pressure reducing valve PRV1 is also installed on the channel of the inert gas source 5 to control the pressure between the second channel 9 and the first channel 8. A discharge port is provided at the lower end of the storage tank 3, and a discharge valve V7 is installed at the discharge port.

[0018] Before discharging, turn on the vacuum device 2, open the second high-temperature ball valve V4 and the third valve V6 to evacuate the storage tank 3 and the conveying pipeline to prevent residual air in the storage tank 3 and the conveying pipeline 7 from affecting the powder.

[0019] During operation, after the air in storage tank 3 is evacuated, the opening of valve V6 (third valve) is adjusted first, and valve V3 on the second channel 9 is opened. Inert gas source 5 can then inject nitrogen or other inert gas into the conveying pipeline and storage tank 3 to a slightly negative pressure state. Next, valve V1 (fourth valve) and valve V2 (first high-temperature resistant ball valve) are opened, and the process tank 1 is adjusted to perform low-speed stirring. This allows the powder material to flow into storage tank 3 under the action of pressure difference and nitrogen flow, achieving powder conveying. The entire conveying process is under inert gas protection. It is important to note that both the conveying pipeline 7 and the discharge pipeline 6 use high-temperature resistant conveying pipes, and the first and second high-temperature resistant ball valves V2 and V4 passing through them have high-temperature resistance, ensuring high-temperature powder transmission. Furthermore, during the process gas conveying process, the inert gas also absorbs some heat, which is continuously carried away by the vacuum pump.

[0020] In one embodiment, the storage tank 3 is equipped with a filter cartridge backflushing device 4, and the inert gas source 5 is provided with a third channel 10 to connect to the filter cartridge backflushing device 4 to provide a backflushing air source. The filter cartridge backflushing device 4 adopts an existing mechanism, and a first valve V5 is provided on the third channel 10 to control the on / off of the backflushing air source. Meanwhile, pressure switches are installed on the process tank 1, the discharge pipe 6, and the storage tank 3. The pressure switch connected to the process tank 1 is defined as the first pressure switch PT1, the pressure switch connected to the discharge pipe 6 is defined as the second pressure switch PT2, and the pressure switch connected to the storage tank 3 is defined as the third pressure switch PT3. When the third pressure switch PT3 on the storage tank 3 exceeds the set value, the third and second high-temperature ball valves V4 are closed, the first valve V5 is opened, and the filter element is backflushed using inert gas flow. When the backflushing pressure reaches the set pressure value, the first valve V5 is closed, the opening of the third valve V6 is adjusted, and the pressure in the storage tank 3 is drawn to negative pressure. Then, the powder is continued to be conveyed until the powder is completely conveyed into the storage tank 3.

[0021] This embodiment of the solution ensures that powder materials can be transported under negative pressure in a fully enclosed pipeline and in an inert gas environment. It is suitable for transporting air-sensitive materials and can be transported at high temperatures. At the same time, it can remove residual process side reaction gases adsorbed on the powder.

[0022] It should be understood that the above are only preferred embodiments of the present utility model, and the protection scope of the present utility model is not limited to the above embodiments. All technical solutions that fall within the scope of the present utility model are protected by the present utility model.

[0023] The accompanying drawings used in the above description of the embodiments only show some embodiments of the present invention and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

Claims

1. A high-temperature powder conveying device, comprising a process tank, characterized in that, Also includes: The system includes a vacuum device, a storage tank, and an inert gas source. The process tank's outlet is equipped with a discharge pipe and a conveying pipe connected to the storage tank. The storage tank is connected to the vacuum device. The inert gas source includes a first channel and a second channel. The first channel is connected to the top of the process tank to assist in pressing the material inside the process tank out to the discharge pipe. The second channel is connected to the discharge pipe to push the material in the discharge pipe into the storage tank. The discharge pipe and the conveying pipe are respectively equipped with a first high-temperature resistant ball valve and a second high-temperature resistant ball valve to control the on / off state of the discharge pipe and the conveying pipe, respectively.

2. The high-temperature powder conveying device according to claim 1, characterized in that, The storage tank is equipped with a filter backflushing device, and the inert gas source is provided with a third channel to be connected to the filter backflushing device to provide backflushing air.

3. The high-temperature powder conveying device according to claim 2, characterized in that, The third channel is equipped with a first valve to control the on / off state of the backflush air source.

4. The high-temperature powder conveying device according to claim 1, characterized in that, A second valve is provided on the second channel to control the opening and closing of the second channel.

5. The high-temperature powder conveying device according to claim 1, characterized in that, A third valve is installed on the pipeline between the vacuum device and the storage tank.

6. The high-temperature powder conveying device according to claim 1, characterized in that, Pressure switches are installed on the process tank, discharge pipeline, and storage tank.

7. The high-temperature powder conveying device according to claim 1, characterized in that, The process tank is equipped with a stirring device, which rotates at a low speed during the discharge process.

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