Aluminum nitride manufacturing device

Abstract

The utility model provides an aluminum nitride manufacturing device, and relates to the technical field of aluminum nitride preparation. The aluminum nitride manufacturing device comprises a furnace body, an air inlet pipeline and an air outlet pipeline, the air inlet pipeline and the air outlet pipeline are at least partially contained in a cavity of the furnace body, at least part of the air inlet pipeline is bent in the cavity in a reciprocating mode, the air inlet pipeline is provided with a first through hole, and the first through hole is communicated with the interior of the air inlet pipeline and the cavity. At least part of the gas inlet pipeline is bent in the cavity in a reciprocating manner, so that the retention time of nitrogen in the gas inlet pipeline is relatively long, when the nitrogen escapes from the first through hole, the temperature can meet the reaction requirement, and the circulation speed of the nitrogen at each bending part is reduced, so that a to-be-reacted object is prevented from being blown away, and the reaction efficiency is improved. And the manufacturing efficiency and yield of the aluminum nitride powder can be improved.

Description

Technical Field

[0001] This application relates to the field of aluminum nitride preparation technology, and more particularly to an aluminum nitride manufacturing apparatus. Background Technology

[0002] Aluminum nitride possesses excellent properties such as high electrical insulation, high plasma resistance, and high thermal conductivity, making it widely used in insulating heat dissipation substrates and semiconductor manufacturing equipment materials. Aluminum nitride ceramics have become ideal heat dissipation and packaging materials for next-generation large-scale integrated circuits, semiconductor module circuits, and high-power devices. To obtain high-performance aluminum nitride ceramics, preparing high-performance aluminum nitride powder is the primary factor.

[0003] Currently, the main industrial production methods for aluminum nitride include direct nitriding of aluminum powder, carbothermic reduction of alumina, and self-propagating process. Among these, aluminum nitride prepared by the carbothermic reduction of alumina has the advantages of uniform particle size distribution, high purity, and excellent forming and sintering properties, and is therefore widely used. In existing technologies, nitrogen gas enters the chamber directly through a pipeline. The limited contact area of ​​the room-temperature gas within the pipeline and the short preheating time prevent the gas from reaching the required reaction temperature, thus affecting the efficiency and yield of aluminum nitride production. Utility Model Content

[0004] This application provides an aluminum nitride manufacturing apparatus. By accommodating at least a portion of the gas inlet pipe within the cavity of the furnace body and making it repeatedly bent, the residence time of nitrogen gas in the gas inlet pipe is extended. When the nitrogen gas escapes from the first through hole, the temperature can reach the reaction requirements. Furthermore, at each bend, the flow rate of nitrogen gas is reduced, thus preventing the reactants from being blown away.

[0005] In a first aspect, this application provides an aluminum nitride manufacturing apparatus, comprising:

[0006] The furnace body has a cavity;

[0007] An air intake pipe, at least a portion of which is housed within the cavity and bends repeatedly, the air intake pipe having an air inlet and a first through hole, the first through hole connecting the interior of the air intake pipe and the cavity, the air inlet being located outside the furnace body and connecting to the interior of the air intake pipe;

[0008] An exhaust pipe, at least a portion of which is housed within the cavity, the exhaust pipe having an exhaust port and a second through hole, the second through hole connecting the interior of the exhaust pipe and the cavity, the exhaust port being located outside the furnace body and connecting to the interior of the exhaust pipe.

[0009] In one possible implementation, the inner cross-sectional area of ​​the intake duct is S1, 0.02m. 2 ≥S1≥0.01m 2On the air intake pipe, the distance from the air inlet to the first through hole is L, where L ≥ 2m. This ensures that the nitrogen gas has a sufficiently long residence time in the air intake pipe, so that the temperature reaches the reaction requirements when the nitrogen gas escapes from the first through hole, thereby ensuring that the nitrogen gas can react promptly and fully when it comes into contact with the alumina powder and carbon.

[0010] In one possible implementation, the aluminum nitride manufacturing apparatus further includes at least two crucibles stacked sequentially along a first direction. At least a portion of the gas inlet pipe bends back and forth along the first direction. A first vent is provided between adjacent crucibles, connecting the interior of the crucible to the cavity. The projection of the first through-hole along a second direction coincides with the first vent, and the second direction is perpendicular to the first direction. That is, after nitrogen gas escapes from the first through-hole, it can directly enter the first vent, thereby contacting the alumina powder and carbon phase inside the crucible, preventing nitrogen gas from diffusing outside the crucible and affecting the efficiency and yield of aluminum nitride powder manufacturing.

[0011] In one possible implementation, the number of the first through holes is at least two, and the projection of each first vent along the second direction coincides with the projection of at least one first through hole along the second direction, ensuring that each crucible receives sufficient nitrogen gas continuously, guaranteeing that the alumina powder and carbon in each crucible can react fully.

[0012] In one possible implementation, the projections of at least two of the first through holes in the second direction coincide with a single first vent, allowing more nitrogen gas to enter the crucible simultaneously from the first vent, which is beneficial for the full reaction of alumina powder and carbon.

[0013] In one possible implementation, in the second direction, the sum of the areas of at least two first through holes projected onto a single first vent is S2; the area of ​​a single first vent is S3, and 60% of S3 ≤ S2; this allows a larger amount of nitrogen to enter the first vent, enabling the nitrogen to promptly push the reacted gas out of the crucible, ensuring that the alumina powder and carbon can react fully with the nitrogen in a timely manner, which is beneficial to improving the efficiency of aluminum nitride powder manufacturing.

[0014] In one possible implementation, a second vent is provided between two adjacent crucibles, the second vent connecting the interior of the crucible and the cavity. The first vent and the second vent are located on opposite sides of the crucible in the second direction. The exhaust pipe and the intake pipe are respectively arranged on opposite sides of the crucible in the second direction, which reduces the circulation of gas in the furnace after the reaction, thus affecting the purity of nitrogen and improving the efficiency of aluminum nitride powder manufacturing.

[0015] In one possible implementation, in the second direction, the projection of the first through-hole coincides with the projection of the first vent, and the projection of the second through-hole coincides with the projection of the second vent. This further reduces the movement distance of nitrogen gas between the first through-hole and the first vent, and the movement distance of the reacted gas between the second through-hole and the second vent, which is beneficial to improving the efficiency and yield of aluminum nitride powder manufacturing.

[0016] In one possible implementation, the exhaust pipe housed within the cavity is at least partially bent in the first direction, and the number of second through holes is at least two. The projections of the at least two second through holes in the opposite direction of the second direction coincide with a single second vent, thereby increasing the area on which the reacted gas can enter the exhaust pipe from the cavity. This further accelerates the rapid exit of the reacted gas from the furnace body, preventing the reacted gas from remaining in the furnace body and diluting the purity of the nitrogen. This ensures the continuous progress of the reaction, thereby improving the efficiency and yield of aluminum nitride powder manufacturing.

[0017] In one possible implementation, the exhaust port and the air inlet are located on opposite sides of the furnace body in the first direction, which reduces the circulation of nitrogen and post-reaction gases within the furnace body, allowing more nitrogen and less post-reaction gases to leave the furnace body through the exhaust pipe. Furthermore, this helps to save materials for the air inlet and exhaust pipes and simplifies their design.

[0018] In the above technical solution, the aluminum nitride manufacturing apparatus, by accommodating at least a portion of the gas inlet pipe within the cavity of the furnace body and subjecting it to reciprocating bends, allows for a longer length of the gas inlet pipe within the furnace body. This results in a longer residence time of nitrogen gas within the gas inlet pipe, ensuring that the temperature reaches the required reaction temperature when the nitrogen gas escapes from the first through-hole. This eliminates the need for installing a heating device at the gas inlet. Furthermore, after entering the gas inlet pipe from the inlet, the flow velocity of nitrogen gas decreases at each bend in the gas inlet pipe, resulting in a lower flow velocity when the nitrogen gas exits from the first through-hole. This prevents the nitrogen gas from blowing away the reactants and affecting the yield of aluminum nitride, thereby improving the efficiency and yield of aluminum nitride powder manufacturing. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic cross-sectional view of the aluminum nitride manufacturing apparatus in one implementation of this application;

[0021] Figure 2 This refers to the air intake pipe, exhaust pipe, and crucible in one implementation of this application;

[0022] Figure 3 yes Figure 2 A cross-sectional view along the AA direction.

[0023] Figure label:

[0024] 10-Furnace body, 11-Cavity;

[0025] 20 - Inlet pipe, 21 - Inlet port, 22 - First through hole;

[0026] 30 - Exhaust pipe, 31 - Exhaust port, 32 - Second through hole;

[0027] 40 - Crucible, 41 - First vent, 42 - Second vent. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below. Where specific conditions are not specified in the embodiments, conventional conditions or conditions recommended by the manufacturer shall apply. Reagents or instruments whose manufacturers are not specified are all conventional products that can be purchased commercially.

[0029] It should be understood that the term "and / or" as used in this application specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0030] When a component is said to be "set on" another component, it can be directly on the other component or it can be in a middle component. When a component is said to be "connected" to another component, it can be directly connected to the other component or it may be in a middle component.

[0031] In the description of this application, it should be understood that the terms "upper," "lower," "left," "middle," "right," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this application and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0032] Furthermore, in this application, unless otherwise expressly specified and limited, the terms "set up" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two elements or the interaction between two elements. Unless otherwise expressly limited, those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0033] It should be noted that the following embodiments are examples of this application and are used only to illustrate this application, and are not intended to limit this application. Other combinations and various modifications within the scope of this application are possible without departing from the spirit or scope of this application.

[0034] The aluminum nitride manufacturing apparatus provided in this application will be described in detail below.

[0035] The aluminum nitride manufacturing apparatus of this application embodiment includes a furnace body 10, an inlet pipe 20, and an exhaust pipe 30. Please refer to... Figure 1 and Figure 2 The furnace body 10 has a cavity 11. At least a portion of the air intake pipe 20 is housed within the cavity 11 and bends back and forth. The air intake pipe 20 has an air inlet 21 and a first through hole 22. The first through hole 22 connects the interior of the air intake pipe 20 and the cavity 11. The air inlet 21 is located outside the furnace body 10 and connects to the interior of the air intake pipe 20. Nitrogen gas enters the interior of the air intake pipe 20 through the air inlet 21 located outside the furnace body 10, then exits the air intake pipe 20 through the first through hole 22 and enters the cavity 11 of the furnace body 10. At least a portion of the exhaust pipe 30 is housed within the cavity 11. The exhaust pipe 30 has an exhaust port 31 and a second through hole 32. The second through hole 32 connects the interior of the exhaust pipe 30 and the cavity 11. The exhaust port 31 is located outside the furnace body 10 and connects to the interior of the exhaust pipe 30. The gas inside the cavity 11 of the furnace body 10 enters the interior of the exhaust pipe 30 through the second through hole 32, and then leaves the exhaust pipe 30 through the exhaust port 31 located on the outside of the furnace body 10, and goes to the outside of the furnace body 10.

[0036] The method for manufacturing aluminum nitride powder includes filling a mixed raw material consisting of alumina powder and carbon into the cavity 11 of a furnace body 10, heating the temperature inside the furnace body 10 to 1450-1800℃, and then introducing nitrogen gas into the aluminum nitride manufacturing apparatus, causing the alumina powder and carbon to react under the nitrogen atmosphere. The reaction formula is Al2O3(s) + N2(g) + 3C(s) →

[0037] 2AlN(s) + 3CO(g). To ensure alumina powder and carbon react fully with nitrogen, the nitrogen should be heated to 1450-1800℃ when in contact with the alumina powder and carbon.

[0038] Because at least a portion of the intake pipe 20 is housed within the cavity 11 and bends repeatedly, the space within the cavity 11 can be fully utilized, and the length of the intake pipe 20 within the furnace body 10 can be relatively long, allowing for a longer residence time of nitrogen within the intake pipe 20. This enables sufficient heat exchange between the nitrogen and the inner wall of the intake pipe 20. Simultaneously, the intake pipe 20 also exchanges heat with the gas within the cavity 11 of the furnace body 10, meaning the nitrogen can exchange heat with the gas within the cavity 11 of the furnace body 10, causing the nitrogen to heat up to 1450-1800℃ as it moves within the intake pipe 20. This eliminates the need to install a heating device at the intake port 21, and also ensures that the nitrogen reaches the required temperature when escaping from the first through-hole 22. This guarantees timely and sufficient reaction of the nitrogen with the alumina powder and carbon, which is beneficial for improving the efficiency of aluminum nitride powder manufacturing.

[0039] On the other hand, in order for nitrogen gas to flow from the inlet 21 through the first through-hole 22 into the cavity 11 of the furnace body 10, the flow velocity of nitrogen gas at the inlet 21 is relatively high. If the exhaust pipe 30 extends in a straight line, the flow rate of nitrogen gas out of the first through-hole 22 will be relatively high, causing the reactants in the cavity 11 to be blown away. By making at least part of the inlet pipe 20 bend back and forth, the flow velocity of nitrogen gas decreases at each bend after entering the inlet pipe 20 from the inlet 21. This results in a lower flow velocity of nitrogen gas when it flows out of the first through-hole 22, preventing nitrogen gas from blowing away the reactants and affecting the yield of aluminum nitride, and further improving the efficiency and yield of aluminum nitride powder manufacturing. The flow rate of nitrogen in the intake pipe 20 is in the range of 600-1200 L / min, preferably 800-1200 L / min, for example 800 L / min, 900 L / min, 1000 L / min, 1100 L / min, 1200 L / min.

[0040] By assembling the aluminum nitride manufacturing apparatus into a furnace body 10, an inlet pipe 20, and an exhaust pipe 30, with at least a portion of the inlet pipe 20 housed within the cavity 11 of the furnace body 10 and repeatedly bent, the length of the inlet pipe 20 within the furnace body 10 can be relatively long. This allows for a longer residence time of nitrogen gas within the inlet pipe 20 after it enters through the inlet port 21. When the nitrogen gas escapes through the first through-hole 22, the temperature reaches the reaction requirements, which eliminates the need to install a heating device at the inlet port 21. Furthermore, after entering the inlet pipe 20 through the inlet port 21, the flow velocity of the nitrogen gas decreases at each bend in the inlet pipe 20, resulting in a lower flow velocity when the nitrogen gas exits through the first through-hole 22. This prevents nitrogen gas from being blown away by the reactants, thus affecting the yield of aluminum nitride and improving the efficiency and yield of aluminum nitride powder manufacturing.

[0041] In one possible implementation, please refer to Figure 1 and Figure 2The inner cross-sectional area of ​​the intake pipe 20 is S1, 0.02m. 2 ≥S1≥0.01m 2 This ensures that sufficient nitrogen enters the intake pipe 20 per unit time. The inner cross-sectional shape of the intake pipe 20 includes triangle, parallelogram, pentagon, hexagon, and circle, preferably circle. When the intake pipe 20 is circular, its inner diameter can be 0.10m, 0.11m, 0.12m, 0.13m, 0.14m, etc.

[0042] On the inlet pipe 20, the distance from the inlet 21 to the first through hole 22 is L, where L ≥ 2m. This distance L represents the path length for nitrogen gas to move from the inlet 21 to the first through hole 22. This ensures a sufficiently long residence time for nitrogen gas within the inlet pipe 20, allowing it to heat up to 1450-1800℃. This guarantees that the nitrogen gas reaches the required temperature for reaction when escaping from the first through hole 22, thus ensuring timely and complete reaction when in contact with alumina powder and carbon. This improves the efficiency of aluminum nitride powder manufacturing.

[0043] Optionally, the inner cross-sectional area of ​​the exhaust pipe 30 is S4, 0.02m. 2 ≥S1≥0.01m 2 This allows the gas inside cavity 11 to be discharged from furnace body 10 at an appropriate speed. The inner cross-sectional shape of exhaust pipe 30 includes triangle, parallelogram, pentagon, hexagon, and circle, preferably circle. When the shape of exhaust pipe 30 is circular, the inner diameter of exhaust pipe 30 can be 0.1m, 0.11m, 0.12m, 0.13m, 0.14m, etc.

[0044] In one possible implementation, please refer to Figure 2 and Figure 3 The aluminum nitride manufacturing apparatus also includes at least two crucibles 40, with alumina powder and carbon placed inside each crucible 40. The at least two crucibles 40 are stacked sequentially along a first direction, which is... Figure 2 In the X direction, there is a first vent 41 between two adjacent crucibles 40. The first vent 41 connects the inside of the crucible 40 and the cavity 11, so that nitrogen gas can enter the inside of the crucible 40 from the first vent 41 and react with alumina powder and carbon.

[0045] At least a portion of the gas inlet pipe 20 is bent back and forth in the first direction, so that the gas inlet pipe 20 can be flush with the crucible 40 in the first direction. This facilitates faster entry of nitrogen into the crucible 40, ensuring the continuous progress of the reaction. The second direction is perpendicular to the first direction. Figure 2In the Y direction, the projection of the first through hole 22 along the second direction coincides with the first vent 41. That is, after nitrogen escapes from the first through hole 22, it can directly enter the first vent 41, thereby contacting the alumina powder and carbon phase in the crucible 40, avoiding the diffusion of nitrogen outside the crucible 40, which would affect the efficiency and yield of aluminum nitride powder manufacturing.

[0046] In one possible implementation, please refer to Figure 2 The number of first through holes 22 is at least two. The projection of each first vent 41 along the second direction coincides with the projection of at least one first through hole 22 along the second direction. This increases the number of first through holes 22, thereby increasing the area on which nitrogen can escape from the inlet pipe 20. This ensures that each crucible 40 has enough nitrogen to continuously enter, guaranteeing that the alumina powder and carbon in each crucible 40 can fully react, which is beneficial to improving the efficiency and yield of aluminum nitride powder manufacturing.

[0047] Optional, please refer to Figure 2 At least two first through holes 22 are projected in the second direction and coincide with a single first vent 41, meaning that more nitrogen gas can enter the crucible 40 from the first vent 41 at the same time, which is beneficial for the full reaction of alumina powder and carbon, thereby improving the efficiency and yield of aluminum nitride powder manufacturing.

[0048] Optional, please refer to Figure 2 In the second direction, the sum of the areas of at least two first through holes 22 projected onto a single first vent 41 is S2; the area of ​​a single first vent 41 is S3, where 60% S3 ≤ S2. When the sum of the areas of at least two first through holes 22 projected onto a single first vent 41 is small, the amount of nitrogen entering the first vent 41 is small. In this case, there is insufficient nitrogen to react with the alumina powder and carbon, resulting in low efficiency in aluminum nitride powder manufacturing. When the sum of the areas of at least two first through holes 22 projected onto a single first vent 41 is large, the amount of nitrogen entering the first vent 41 is large. The nitrogen can promptly push the reacted gas out of the crucible 40, ensuring that the alumina powder and carbon can react fully with the nitrogen in a timely manner, which is beneficial for improving the efficiency of aluminum nitride powder manufacturing.

[0049] In one possible implementation, please refer to Figure 2 and Figure 3 Each of the two adjacent crucibles 40 has a second vent 42, which connects the interior of the crucible 40 and the cavity 11, so that the gas generated after the reaction of alumina powder and carbon can enter the interior of the crucible 40 through the second vent 42 and then be discharged from the furnace body 10 through the exhaust pipe 30.

[0050] The first vent 41 and the second vent 42 are located on opposite sides of the crucible 40 in the second direction. The exhaust pipe 30 and the inlet pipe 20 are also located on opposite sides of the crucible 40 in the second direction. This means that after nitrogen escapes from the first through-hole 22, it can directly enter the crucible 40 through the first vent 41, then diffuse linearly to the second vent 42, and then enter the exhaust pipe 30 through the second through-hole 32, exiting the furnace body 10 through the exhaust port 31. By arranging the inlet pipe 20, the crucible 40, and the exhaust pipe 30 in a straight line, the circulation of gas within the furnace body 10 after the reaction is reduced, which affects the purity of the nitrogen and thus improves the efficiency of aluminum nitride powder manufacturing.

[0051] For preferred options, please refer to [link / reference]. Figure 2 and Figure 3 In the second direction, the projection of the first through hole 22 coincides with the projection of the first vent 41, and the projection of the second through hole 32 coincides with the projection of the second vent 42. This further reduces the movement distance of nitrogen between the first through hole 22 and the first vent 41, and the movement distance of the gas after reaction between the second through hole 32 and the second vent 42. This facilitates the rapid exit of the gas after reaction from the furnace body 10, avoiding the gas after reaction from remaining in the furnace body 10 and diluting the purity of nitrogen. This ensures the continuous progress of the reaction and thus helps to improve the efficiency and yield of aluminum nitride powder manufacturing.

[0052] Optional, please refer to Figure 2 and Figure 3 The exhaust pipe 30, which is housed in the cavity 11, is bent back and forth in the first direction at least in part, so that the position of each second through hole 32 corresponds to the position of the second vent 42. This helps to reduce the movement distance of the gas after the reaction between the second through hole 32 and the second vent 42, and the gas after the reaction leaves the furnace body 10 quickly. This avoids the gas after the reaction from staying in the furnace body 10 and diluting the purity of the nitrogen, thereby ensuring that the reaction continues and thus improving the efficiency and yield of aluminum nitride powder manufacturing.

[0053] The number of second through holes 32 is at least two. The projection of at least two second through holes 32 in the opposite direction of the second direction coincides with a single second vent 42, which increases the number of second through holes 32. This increases the area on which the gas after reaction can enter the exhaust pipe 30 from the cavity 11, further accelerating the gas after reaction to leave the furnace body 10 quickly. This avoids the gas after reaction remaining in the furnace body 10 and diluting the purity of nitrogen, thus ensuring the continuous reaction and improving the efficiency and yield of aluminum nitride powder manufacturing.

[0054] Preferably, the number of first through holes 22 and the number of second through holes 32 are equal. In the second direction, the projections of the first through holes 22 and the second through holes 32 coincide, and the projection of the first vent 41 coincides with the second vent 42. That is, the number and area of ​​the first through holes 22, the number and area of ​​the second through holes 32 are all equal, and the area of ​​the first vent 41 and the area of ​​the second vent 42 are equal. This ensures that the flow rate and volume of nitrogen entering the cavity 11 are equal to the flow rate and volume of the gas leaving the cavity 11 after the reaction. This helps to maintain the pressure balance within the furnace body 10 and does not affect the reaction conditions. Furthermore, nitrogen can escape in a straight line from the first through hole 22 and directly enter the first vent 41, and push the gas after the reaction in a straight line from the second vent 42 directly into the second through hole 32. This helps to accelerate the rapid exit of the gas after the reaction from the furnace body 10, avoiding the dilution of nitrogen purity by the gas remaining in the furnace body 10. This ensures the continuous progress of the reaction and thus helps to improve the efficiency and yield of aluminum nitride powder manufacturing.

[0055] Optionally, the exhaust port 31 and the air inlet 21 are located on opposite sides of the furnace body 10, which reduces the circulation of nitrogen and post-reaction gases within the furnace body 10, allowing more nitrogen and less post-reaction gases to leave the furnace body 10 through the exhaust pipe 30. This helps to improve the utilization rate of nitrogen and increase the efficiency and yield of aluminum nitride powder manufacturing.

[0056] For preferred options, please refer to [link / reference]. Figure 1 and Figure 2 The exhaust port 31 and the air inlet 21 are located on both sides of the furnace body 10 in the first direction. Since the air inlet pipe 20 and the exhaust pipe 30 both bend back and forth in the first direction, setting the exhaust port 31 and the air inlet 21 on both sides of the furnace body 10 in the first direction is beneficial to save the material of the air inlet pipe 20 and the exhaust pipe 30 and simplify the design of the air inlet pipe 20 and the exhaust pipe 30.

[0057] Although the embodiments of this application have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for this application. For those skilled in the art, other modifications can be easily made. Therefore, without departing from the general concept defined by the claims and their equivalents, this application is not limited to the specific details and embodiments shown and described herein.

Claims

1. An aluminum nitride manufacturing apparatus, characterized in that, include: The furnace body has a cavity; An air intake pipe, at least a portion of which is housed within the cavity and bends repeatedly, the air intake pipe having an air inlet and a first through hole, the first through hole connecting the interior of the air intake pipe and the cavity, the air inlet being located outside the furnace body and connecting to the interior of the air intake pipe; An exhaust pipe, at least a portion of which is housed within the cavity, the exhaust pipe having an exhaust port and a second through hole, the second through hole connecting the interior of the exhaust pipe and the cavity, the exhaust port being located outside the furnace body and connecting to the interior of the exhaust pipe.

2. The aluminum nitride manufacturing apparatus as described in claim 1, characterized in that, The inner cross-sectional area of ​​the air intake pipe is S1, 0.02m. 2 ≥S1≥0.01m 2 On the air intake pipe, the distance from the air intake port to the first through hole is L, where L ≥ 2m.

3. The aluminum nitride manufacturing apparatus as described in claim 2, characterized in that, The aluminum nitride manufacturing apparatus further includes at least two crucibles, which are stacked sequentially along a first direction. At least a portion of the air inlet pipe bends back and forth in the first direction. A first vent is provided between two adjacent crucibles. The first vent connects the interior of the crucible and the cavity. The projection of the first through hole along a second direction coincides with the first vent. The second direction is perpendicular to the first direction.

4. The aluminum nitride manufacturing apparatus as described in claim 3, characterized in that, The number of the first through holes is at least two, and the projection of each first vent along the second direction coincides with the projection of at least one first through hole along the second direction.

5. The aluminum nitride manufacturing apparatus as described in claim 4, characterized in that, The projections of at least two of the first through holes in the second direction coincide with a single first vent.

6. The aluminum nitride manufacturing apparatus as described in claim 5, characterized in that, In the second direction, the sum of the areas of at least two first through holes projected onto a single first vent is S2; the area of ​​a single first vent is S3, and 60% of S3 ≤ S2.

7. The aluminum nitride manufacturing apparatus according to any one of claims 3-6, characterized in that, A second vent is provided between two adjacent crucibles, the second vent connecting the interior of the crucible and the cavity. The first vent and the second vent are respectively located on opposite sides of the crucible in the second direction. The exhaust pipe and the intake pipe are respectively provided on opposite sides of the crucible in the second direction.

8. The aluminum nitride manufacturing apparatus as described in claim 7, characterized in that, In the second direction, the projection of the first through hole coincides with the projection of the first vent, and the projection of the second through hole coincides with the projection of the second vent.

9. The aluminum nitride manufacturing apparatus as described in claim 8, characterized in that, The exhaust pipe housed within the cavity is at least partially bent in the first direction, and the number of second through holes is at least two, with the projections of at least two second through holes in the opposite direction of the second direction coinciding with a single second vent.

10. The aluminum nitride manufacturing apparatus as described in claim 7, characterized in that, The exhaust port and the air inlet are located on both sides of the furnace body in the first direction.

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