Special gas conveying component performance test system and semiconductor process equipment

Abstract

The utility model relates to a special gas conveying component performance test system and semiconductor process equipment. The special gas conveying component performance test system comprises a first gas supply module, at least one test module and a vacuum module. The device has the advantages that the test module is respectively communicated with the first gas supply module and the vacuum module, so that the test module can carry out leakage detection on the special gas conveying component; besides, various components such as a manual diaphragm valve, a pneumatic diaphragm valve, a vacuum transmitter, a one-way valve, a pressure regulating valve and the like can also be mounted on the test module, so that the system can test various products, and the applicability of the whole test system is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to special gas component detection technical field especially relates to a special gas delivery component performance test system and semiconductor technology equipment. BACKGROUND

[0002] In the field of semiconductor production, the performance of products is not only an important indicator of the advancement of technology, but also a key factor directly affecting the quality of semiconductor products. The performance of semiconductor products includes, but is not limited to, electrical characteristics, thermal stability, reliability and durability, and accurate control of these performance parameters is crucial to ensuring the quality and reliability of the final product.

[0003] In order to effectively monitor and optimize the performance of semiconductor products, the industry generally adopts a series of precise testing methods. Among them, the detection of special gas delivery components is particularly critical. Special gas delivery components, as an integral part of the semiconductor manufacturing process, are responsible for accurately controlling and delivering various types of special gases (such as doping gases, etching gases, etc.) to various links of the production line. The purity, flow rate and stability of these gases directly affect the manufacturing precision and performance of semiconductor devices.

[0004] The detection equipment for special gas delivery components in the prior art usually only detects one type of product (such as valve bodies, etc.), but in the case of needing to detect different special gas delivery components, different detection equipment needs to be replaced, which has low practical applicability. In addition, although the detection equipment of some related semiconductor enterprises can adapt to multiple special gas delivery components, this type of detection equipment can only detect one performance of the special gas delivery component (i.e. flow rate, pressure, temperature, etc.), and cannot comprehensively detect the performance of the special gas delivery component, which has limitations.

[0005] At present, there is no effective solution to the problems of existing detection equipment in the related art that cannot adapt to different special gas delivery components for detection and cannot comprehensively detect multiple performances of the special gas delivery component. UTILITY MODEL CONTENT

[0006] The utility model aims at the shortage in the prior art, provides a kind of special gas delivery component performance test system and semiconductor technology equipment, to solve the problems such as the existing detection equipment in the related art that cannot adapt to different special gas delivery components for detection and cannot comprehensively detect multiple performances of the special gas delivery component.

[0007] To achieve the above-mentioned purpose, the technical scheme adopted by the utility model is:

[0008] In the first aspect, the utility model provides a special gas delivery component performance test system, comprising:

[0009] The first gas supply module is connected to a high-pressure nitrogen source and is used to supply high-pressure nitrogen for external leakage detection.

[0010] At least one test module is provided, which is located downstream of the first gas supply module and connected to the first gas supply module, and is used to cooperate with the first gas supply module to perform external leakage detection.

[0011] A vacuum module is located downstream of and connected to the test module, and is used to discharge test exhaust gas.

[0012] In some embodiments, the first gas supply module includes:

[0013] A first gas supply element is connected to a high-pressure nitrogen source and the test module, respectively, and is used to supply high-pressure nitrogen to the test module;

[0014] A purification element is disposed on the first gas supply element and is used to purify high-pressure nitrogen to improve the purity of high-pressure nitrogen and reduce the humidity of high-pressure nitrogen;

[0015] A filter element is disposed on the first gas supply element and located downstream of the purification element, for filtering high-pressure nitrogen to remove particulate matter from the high-pressure nitrogen.

[0016] In some embodiments, the first gas supply module further includes:

[0017] A first manual control element is disposed on the first gas supply element and located downstream of the filter element, for manually controlling the opening and closing of the first gas supply element;

[0018] A first automatic control element is disposed on the first gas supply element and located downstream of the first manual control element, for automatically controlling the opening and closing of the first gas supply element;

[0019] The first detection element is disposed on the first gas supply element and located downstream of the first automatic control element, and is used to detect the temperature and pressure of the first gas supply element.

[0020] In some embodiments, the test module includes:

[0021] The first test gas input element is connected to the first gas supply module and is used to obtain high-pressure nitrogen.

[0022] A test disc element, which is connected to the first test gas input element, is used for external leakage detection;

[0023] The first test gas output element is connected to the test disk element and the vacuum module respectively, and is used to output test exhaust gas.

[0024] In some embodiments, the test module further includes:

[0025] A first heat-insulating element is disposed on the first test gas input element for heat preservation;

[0026] The second heat-insulating element is disposed on the first test gas output element and is used for heat preservation.

[0027] A second manual control element is disposed on the first test gas input element and is used to manually control the opening and closing of the first test gas input element;

[0028] The second automatic control element is disposed on the first test gas input element and located upstream of the second manual control element, and is used to automatically control the opening and closing of the first test gas input element;

[0029] The second detection element is disposed at the first test gas input element and located downstream of the second manual control element, and is used to detect the temperature and pressure of the first test gas input element;

[0030] A third detection element is disposed on the first test gas output element and is used to detect the temperature and pressure of the first test gas output element.

[0031] A third manual control element is disposed on the first test gas output element and located downstream of the third detection element, and is used to manually control the opening and closing of the test gas output element.

[0032] A third automatic control element is disposed on the first test gas output element and located downstream of the third manual control element, and is used to automatically control the opening and closing of the first test gas output element.

[0033] A fourth detection element is disposed on the first test gas output element and located downstream of the third automatic control element, and is used to detect the temperature and pressure of the first test gas output element.

[0034] In some embodiments, the vacuum module includes:

[0035] A first emission gas delivery element is disposed downstream of the test module and connected to the test module for emitting test exhaust gas.

[0036] A first vacuum element is disposed on the first exhaust gas delivery element to create a vacuum environment in the first exhaust gas delivery element.

[0037] In some embodiments, the vacuum module further includes:

[0038] A fourth manual control element is disposed on the first exhaust gas conveying element and is used to manually control the opening and closing of the first exhaust gas conveying element;

[0039] A fourth automatic control element is disposed on the first exhaust gas conveying element and located downstream of the fourth manual control element, and is used to automatically control the opening and closing of the first exhaust gas conveying element.

[0040] The first unidirectional element is disposed on the first exhaust gas conveying element and located downstream of the fourth manual control element and upstream of the first vacuum element, for causing the test exhaust gas to flow in one direction.

[0041] In some of these embodiments, it also includes:

[0042] A purging module is located downstream of the first gas supply module and upstream of the test module, and is connected to the first gas supply module, the test module, and the waste gas treatment equipment, respectively. It is used to obtain high-pressure nitrogen, process the high-pressure nitrogen to obtain low-pressure nitrogen, and use the low-pressure nitrogen to purge the test module and discharge the purging waste gas to the waste gas treatment equipment.

[0043] In some embodiments, the first gas supply module further includes:

[0044] The second gas supply element is connected to the first gas supply element of the first gas supply module and is used to obtain and deliver high-pressure nitrogen.

[0045] A third gas supply element is connected to the second gas supply element, the purging module, and the test module, respectively, and is used to acquire and deliver high-pressure nitrogen and low-pressure nitrogen to the test module.

[0046] In some embodiments, the first gas supply module further includes:

[0047] A fifth manual control element is disposed on the second gas supply element and is used to manually control the opening and closing of the second gas supply element;

[0048] A fifth automatic control element is disposed on the second gas supply element and upstream of the fifth manual control element, and is used to automatically control the opening and closing of the second gas supply element;

[0049] The fifth detection element is disposed on the third gas supply element and is used to detect the temperature and pressure of the third gas supply element;

[0050] A sixth manual control element is disposed on the third gas supply element and located downstream of the fifth detection element, and is used to manually control the opening and closing of the third gas supply element;

[0051] A sixth automatic control element is disposed on the third gas supply element and located upstream of the sixth manual control element, and is used to automatically control the opening and closing of the third gas supply element.

[0052] In some embodiments, the purging module includes:

[0053] A purge gas delivery element is placed downstream of the first gas supply module and upstream of the test module, and is connected to the first gas supply module and the test module respectively, for obtaining high-pressure nitrogen and delivering low-pressure nitrogen to the test module;

[0054] A first pressure regulating element is disposed on the purge gas delivery element and is used to regulate the pressure of high-pressure nitrogen to obtain low-pressure nitrogen.

[0055] The second emission gas delivery element is located downstream of the test module and is connected to the test module for emitting purge exhaust gas.

[0056] A second vacuum element is disposed on the second exhaust gas delivery element to create a vacuum environment for the second exhaust gas delivery element.

[0057] A power gas delivery element is connected to a power gas source and a second vacuum element, respectively, and is used to deliver power gas to the second vacuum element.

[0058] In some embodiments, the purging module further includes:

[0059] A seventh manual control element is disposed on the purge gas delivery element and located downstream of the first pressure regulating element, and is used to manually control the opening and closing of the purge gas delivery element;

[0060] A seventh automatic control element is disposed on the purge gas delivery element and located downstream of the first pressure regulating element and upstream of the seventh manual control element, for automatically controlling the opening and closing of the purge gas delivery element;

[0061] The eighth manual control element is disposed on the second exhaust gas conveying element and is used to manually control the opening and closing of the second exhaust gas conveying element;

[0062] The eighth automatic control element is disposed on the second exhaust gas conveying element and located downstream of the eighth manual control element, and is used to automatically control the opening and closing of the second exhaust gas conveying element;

[0063] The second unidirectional element is disposed on the second exhaust gas conveying element and located downstream of the eighth automatic control element and upstream of the second vacuum element, for making the purge exhaust gas flow in one direction.

[0064] A ninth manual control element is disposed on the power gas delivery element and is used to manually control the opening and closing of the power gas delivery element;

[0065] The sixth detection element is disposed on the power gas delivery element and located downstream of the ninth manual control element, and is used to detect the temperature and pressure of the power gas delivery element;

[0066] The third unidirectional element is disposed in the power gas delivery element and located downstream of the sixth detection element, and is used to enable the power gas to flow in one direction.

[0067] In some of these embodiments, it also includes:

[0068] The second gas supply module is connected to the high-pressure helium source and the test module respectively, and is used to deliver high-pressure helium for internal leak detection.

[0069] The test module works in conjunction with the second gas supply module to perform internal leak detection.

[0070] In some embodiments, the second gas supply module includes:

[0071] A fourth gas supply element is connected to both a high-pressure helium source and the test module, and is used to supply high-pressure helium to the test module.

[0072] In some embodiments, the second gas supply module further includes:

[0073] A tenth manual control element is disposed on the fourth gas supply element and is used to manually control the opening and closing of the fourth gas supply element;

[0074] The second pressure regulating element is disposed in the fourth gas supply element and located downstream of the tenth manual control element, and is used to regulate the pressure of high-pressure helium to obtain low-pressure helium.

[0075] A ninth automatic control element is disposed on the fourth gas supply element and located downstream of the second pressure regulating element, and is used to automatically control the opening and closing of the fourth gas supply element;

[0076] A microleak control element is disposed on the fourth gas supply element and located downstream of the ninth automatic control element.

[0077] In some of these embodiments, it also includes:

[0078] A pressurization module is connected to the first gas supply module and the test module, respectively, and is used to pressurize the test gas and deliver the pressurized test gas to the test module.

[0079] In some embodiments, the test module further includes:

[0080] The second test gas input element is connected to the first test gas output element of the test module and is used to acquire the test gas.

[0081] A helium testing element, which is connected to the second test gas input element, is used for internal leakage detection.

[0082] In some embodiments, the test module further includes:

[0083] The second test gas output element is connected to the first test gas output element of the test module and the vacuum module, respectively, and is used to output test exhaust gas.

[0084] In some embodiments, the booster module includes:

[0085] The fifth gas supply element is connected to the first test gas input element of the test module and is used to acquire test gas;

[0086] A pressurizing element, which is disposed on the fifth delivery element, is used to pressurize the test gas.

[0087] In some of these embodiments, it also includes:

[0088] A first flow detection module, which is connected to the test module, is used to detect the gas flow rate input to the test module;

[0089] The second flow detection module is connected to the test module and is used to detect the gas flow rate output by the test module.

[0090] In some embodiments, the first traffic detection module includes:

[0091] A sixth gas supply element is connected to the test module and the second gas supply module respectively, and is used to acquire test gas;

[0092] A first flow detection element is disposed on the sixth gas supply element and is used to detect the gas flow rate input to the test module.

[0093] In some embodiments, the second flow detection module includes:

[0094] A seventh gas supply element, which is connected to the test module, is used to acquire test gas;

[0095] The second flow detection element is disposed on the seventh gas supply element and is used to detect the low-pressure gas flow rate output by the test module;

[0096] An eighth gas supply element, which is connected to the test module, is used to acquire test gas;

[0097] The third flow detection element is disposed on the eighth gas supply element and is used to detect the high-pressure gas flow rate output by the test module.

[0098] Secondly, this utility model also provides a semiconductor process apparatus, comprising:

[0099] The performance testing system for special gas delivery components as described in the first aspect.

[0100] The present invention adopts the above technical solution and has the following technical effects compared with the prior art:

[0101] This utility model discloses a performance testing system for special gas delivery components and semiconductor process equipment. By connecting the testing module to a first gas supply module and a vacuum module respectively, the testing module can perform external leakage detection on special gas delivery components. In addition, various components such as manual diaphragm valves, pneumatic diaphragm valves, vacuum transmitters, one-way valves, and pressure regulating valves can be installed on the testing module, thereby enabling the system to test a variety of products and improving the applicability of the overall testing system. Attached Figure Description

[0102] Figure 1 This is a schematic diagram of a performance testing system for special gas conveying components according to an embodiment of the present utility model;

[0103] Figure 2 This is a schematic diagram of the structure of the first gas supply module, the testing module, and the vacuum module according to an embodiment of the present utility model;

[0104] Figure 3 This is a schematic diagram of the purging module according to an embodiment of the present utility model;

[0105] Figure 4 This is a schematic diagram of the structure of the second gas supply module according to an embodiment of the present utility model;

[0106] Figure 5 This is a schematic diagram of the booster module according to an embodiment of the present utility model;

[0107] Figure 6 This is a schematic diagram of the structure of the first flow detection module and the second flow detection module according to an embodiment of the present utility model;

[0108] Figure 7 This is a schematic diagram of the structure of multiple test modules according to an embodiment of the present utility model.

[0109] The reference numerals in the accompanying drawings are as follows: 100, First gas supply module; 101, First gas supply element; 102, Purification element; 103, Filtering element; 104, First manual control element; 105, First automatic control element; 106, First detection element; 107, Second gas supply element; 108, Third gas supply element; 109, Fifth manual control element; 110, Fifth automatic control element; 111, Fifth detection element; 112, Sixth manual control element; 113, Sixth automatic control element;

[0110] 200. Test module; 201. First test gas input element; 202. Test disk element; 203. First test gas output element; 204. Second manual control element; 205. Second automatic control element; 206. Second detection element; 207. Third detection element; 208. Third manual control element; 209. Third automatic control element; 210. Fourth detection element; 211. Second test gas input element; 212. Helium test element; 213. Second test gas output element; 214. Eleventh manual control element; 215. Tenth automatic control element; 216. Seventeenth automatic control element; 217. Eighteenth manual control element; 218. Eighteenth automatic control element; 219. Nineteenth manual control element;

[0111] 300. Vacuum module; 301. First exhaust gas delivery element; 302. First vacuum element; 303. Fourth manual control element; 304. Fourth automatic control element; 305. First unidirectional element;

[0112] 400. Purge module; 401. Purge gas delivery element; 402. First pressure regulating element; 403. Second exhaust gas delivery element; 404. Second vacuum element; 405. Power gas delivery element; 406. Seventh manual control element; 407. Seventh automatic control element; 408. Eighth manual control element; 409. Eighth automatic control element; 410. Second one-way element; 411. Ninth manual control element; 412. Sixth detection element; 413. Third one-way element;

[0113] 500. Second gas supply module; 501. Fourth gas supply element; 502. Tenth manual control element; 503. Second pressure regulating element; 504. Ninth automatic control element; 505. Micro-leakage control element;

[0114] 600. Boosting module; 601. Fifth gas supply element; 602. Boosting element; 603. Twelfth manual control element; 604. Eleventh automatic control element; 605. Thirteenth manual control element; 606. Twelfth automatic control element;

[0115] 700. First flow detection module; 701. Sixth gas supply element; 702. First flow detection element; 703. Fourteenth manual control element; 704. Thirteenth automatic control element; 705. Fifteenth manual control element; 706. Fourteenth automatic control element;

[0116] 800. Second flow detection module; 801. Seventh gas supply element; 802. Second flow detection element; 803. Eighth gas supply element; 804. Third flow detection element; 805. Sixteenth manual control element; 806. Fifteenth automatic control element; 807. Third pressure regulating element; 808. Fourth unidirectional element; 809. Seventeenth manual control element; 810. Sixteenth automatic control element; 811. Fifth unidirectional element. Detailed Implementation

[0117] To make the objectives, technical solutions, and advantages of this application clearer, the application is described and illustrated below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application. All other embodiments obtained by those skilled in the art based on the embodiments provided in this application without inventive effort are within the scope of protection of this application.

[0118] Obviously, the accompanying drawings described below are merely some examples or embodiments of this application. Those skilled in the art can apply this application to other similar scenarios based on these drawings without any inventive effort. Furthermore, it is understood that although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this application, any changes to design, manufacturing, or production based on the technical content disclosed in this application are merely conventional technical means and should not be construed as insufficient disclosure of the content of this application.

[0119] Example 1

[0120] This embodiment relates to a performance testing system for special gas conveying components in this utility model.

[0121] An illustrative embodiment of this utility model, such as Figure 1 As shown, a performance testing system for special gas delivery components includes a first gas supply module 100, at least one testing module 200, and a vacuum module 300. The first gas supply module 100 is connected to a high-pressure nitrogen source and is used to supply high-pressure nitrogen for external leakage detection. The testing module 200 is located downstream of and connected to the first gas supply module 100, and works in conjunction with the first gas supply module 100 to perform external leakage detection. The vacuum module 300 is located downstream of and connected to the testing module 200, and is used to discharge test waste gas.

[0122] It should be noted that the first end and the second end in this utility model are respectively the two ends in the length direction.

[0123] likeFigure 2 As shown, the first gas supply module 100 includes a first gas supply element 101, a purification element 102, and a filter element 103. The first gas supply element 101 is connected to both a high-pressure nitrogen source and a test module 200, and is used to supply high-pressure nitrogen to the test module 200. The purification element 102 is disposed on the first gas supply element 101 and is used to purify the high-pressure nitrogen to improve its purity and reduce its humidity. The filter element 103 is disposed on the first gas supply element 101 and located downstream of the purification element 102, and is used to filter the high-pressure nitrogen to remove particulate matter.

[0124] Specifically, the first end of the first gas supply element 101 is connected to the high-pressure nitrogen pipeline, and the second end of the first gas supply element 101 is connected to the test module 200.

[0125] In some of these embodiments, the first gas supply element 101 includes, but is not limited to, a stainless steel tube.

[0126] Specifically, the purification element 102 can purify the high-pressure nitrogen gas supplied by the first gas supply element 101 to remove moisture and oxygen from the high-pressure nitrogen gas.

[0127] In some of these embodiments, the purification element 102 includes, but is not limited to, a high-pressure purifier.

[0128] Specifically, the filter element 103 can filter the high-pressure nitrogen gas after it has been treated by the purification element 102, thereby removing particulate matter from the high-pressure nitrogen gas.

[0129] In some of these embodiments, the filter element 103 includes, but is not limited to, a particulate filter.

[0130] Furthermore, the first gas supply module 100 also includes a first manual control element 104, a first automatic control element 105, and a first detection element 106. The first manual control element 104 is disposed on the first gas supply element 101 and located downstream of the filter element 103, and is used to manually control the opening and closing of the first gas supply element 101. The first automatic control element 105 is disposed on the first gas supply element 101 and located downstream of the first manual control element 104, and is used to automatically control the opening and closing of the first gas supply element 101. The first detection element 106 is disposed on the first gas supply element 101 and located downstream of the first automatic control element 105, and is used to detect the temperature and pressure of the first gas supply element 101.

[0131] In some of these embodiments, the first manual control element 104 includes, but is not limited to, a manual diaphragm valve.

[0132] In some of these embodiments, the first automatic control element 105 includes, but is not limited to, a pneumatic diaphragm valve.

[0133] In some of these embodiments, the first detection element 106 includes, but is not limited to, a temperature and pressure sensor.

[0134] like Figure 2 As shown, the test module 200 includes a first test gas input element 201, a test disk element 202, and a first test gas output element 203. The first test gas input element 201 is connected to the first gas supply module 100 and is used to obtain high-pressure nitrogen gas; the test disk element 202 is connected to the first test gas input element 201 and is used for external leakage detection; the first test gas output element 203 is connected to both the test disk element 202 and the vacuum module 300 and is used to output test waste gas.

[0135] Specifically, the first end of the first test gas input element 201 is connected to the first gas supply element 101, and the second end of the first test gas input element 201 is connected to the test disk element 202.

[0136] In some of these embodiments, the first test gas input element 201 includes, but is not limited to, a stainless steel tube.

[0137] Specifically, the test disk element 202 can be connected to the first test gas input element 201 and the first test gas output element 203. The test disk element 202 can be used to install components such as manual diaphragm valves, pneumatic diaphragm valves, vacuum transmitters, check valves, and pressure regulating valves.

[0138] In some of these embodiments, the test disk element 202 includes, but is not limited to, a test bench.

[0139] Specifically, the first end of the first test gas output element 203 is connected to the test disk element 202, and the second end of the first test gas output element 203 is connected to the vacuum module 300.

[0140] In some of these embodiments, the first test gas output element 203 includes, but is not limited to, a stainless steel tube.

[0141] Furthermore, the test module 200 also includes a first insulation element, a second insulation element, a second manual control element 204, a second automatic control element 205, a second detection element 206, a third detection element 207, a third manual control element 208, a third automatic control element 209, and a fourth detection element 210. Specifically, the first insulation element is disposed on the first test gas input element 201 for insulation; the second insulation element is disposed on the first test gas output element 203 for insulation; the second manual control element 204 is disposed on the first test gas input element 201 for manual control of the opening and closing of the first test gas input element 201; the second automatic control element 205 is disposed on the first test gas input element 201 and located upstream of the second manual control element 204 for automatic control of the opening and closing of the first test gas input element 201; and the second detection element 206 is disposed on the first test gas input element 201 and located downstream of the second manual control element 204 for detecting the temperature and pressure of the first test gas input element 201. Three detection elements 207 are disposed on the first test gas output element 203 for detecting the temperature and pressure of the first test gas output element 203; a third manual control element 208 is disposed on the first test gas output element 203 and located downstream of the third detection element 207 for manually controlling the opening and closing of the test gas output element; a third automatic control element 209 is disposed on the first test gas output element 203 and located downstream of the third manual control element 208 for automatically controlling the opening and closing of the first test gas output element 203; and a fourth detection element 210 is disposed on the first test gas output element 203 and located downstream of the third automatic control element 209 for detecting the temperature and pressure of the first test gas output element 203.

[0142] Specifically, the first heat-insulating element covers the outer wall of the first test gas input element 201 to keep the first test gas input element 201 warm.

[0143] In some of these embodiments, the first insulation element includes, but is not limited to, an insulation sleeve.

[0144] Specifically, the second insulation element covers the outer wall of the first test gas output element 203 to insulate the first test gas output element 203.

[0145] In some of these embodiments, the second insulation element includes, but is not limited to, an insulation sleeve.

[0146] In some of these embodiments, the second manual control element 204 includes, but is not limited to, a manual diaphragm valve.

[0147] In some of these embodiments, the second automatic control element 205 includes, but is not limited to, a pneumatic diaphragm valve.

[0148] In some of these embodiments, the second detection element 206 includes, but is not limited to, a temperature and pressure sensor.

[0149] In some of these embodiments, the third detection element 207 includes, but is not limited to, a temperature and pressure sensor.

[0150] In some of these embodiments, the third manual control element 208 includes, but is not limited to, a manual diaphragm valve.

[0151] In some of these embodiments, the third automatic control element 209 includes, but is not limited to, an automatic diaphragm valve.

[0152] In some of these embodiments, the fourth detection element 210 includes, but is not limited to, a temperature and pressure sensor.

[0153] like Figure 2 As shown, the vacuum module 300 includes a first exhaust gas delivery element 301 and a first vacuum element 302. The first exhaust gas delivery element 301 is located downstream of the test module 200 and is connected to the test module 200 for discharging test exhaust gas; the first vacuum element 302 is located on the first exhaust gas delivery element 301 for creating a vacuum environment in the first exhaust gas delivery element 301.

[0154] Specifically, the first end of the first emission gas delivery element 301 is connected to the first test gas output element 203, and the second end of the first emission gas delivery element 301 is connected to the exhaust port.

[0155] In some of these embodiments, the first exhaust gas delivery element 301 includes, but is not limited to, a stainless steel tube.

[0156] Specifically, the first vacuum element 302 is used to provide a vacuum negative pressure at the end of the first exhaust gas delivery element 301, thereby venting the test exhaust gas inside the first exhaust gas delivery element 301.

[0157] In some of these embodiments, the first vacuum element 302 includes, but is not limited to, a vacuum pump.

[0158] Furthermore, the vacuum module 300 also includes a fourth manual control element 303, a fourth automatic control element 304, and a first unidirectional element 305. The fourth manual control element 303 is disposed on the first exhaust gas conveying element 301 and is used to manually control the opening and closing of the first exhaust gas conveying element 301. The fourth automatic control element 304 is disposed on the first exhaust gas conveying element 301 and located downstream of the fourth manual control element 303, and is used to automatically control the opening and closing of the first exhaust gas conveying element 301. The first unidirectional element 305 is disposed on the first exhaust gas conveying element 301 and located downstream of the fourth manual control element 303 and upstream of the first vacuum element 302, and is used to ensure unidirectional flow of the test exhaust gas.

[0159] In some of these embodiments, the fourth manual control element 303 includes, but is not limited to, a manual diaphragm valve.

[0160] In some of these embodiments, the fourth automatic control element 304 includes, but is not limited to, a pneumatic diaphragm valve.

[0161] In some of these embodiments, the first one-way element 305 includes, but is not limited to, a one-way valve.

[0162] The usage method of this embodiment is as follows:

[0163] In the actual test, the staff manually opened all the manual diaphragm valves in the entire test system and kept all the pneumatic diaphragm valves closed through the system to complete the preparation work before the system test.

[0164] Subsequently, the system activates the first automatic control element 105, which causes the purification element 102 and the filter element 103 to filter the high-pressure nitrogen gas delivered by the upstream high-pressure nitrogen pipeline to remove moisture, oxygen and particulate matter from the high-pressure nitrogen gas.

[0165] Then, the system activates the second automatic control element 205, causing the first gas supply element 101 to deliver high-pressure nitrogen to the test panel element 202. The external leakage detection of the special gas delivery element is performed by observing the changes in the values ​​of the second detection element 206 and the third detection element 207.

[0166] Finally, after the external leakage detection is completed, the system activates the third automatic control element 209, the fourth automatic control element 304, and the first vacuum element 302, so that the test exhaust gas can be discharged through the first exhaust gas delivery element 301.

[0167] The advantage of this embodiment is that by connecting the test module to the first gas supply module and the vacuum module respectively, the test module can perform external leakage detection on special gas delivery components. In addition, various components such as manual diaphragm valves, pneumatic diaphragm valves, vacuum transmitters, check valves, and pressure regulating valves can be installed on the test module, thereby enabling the system to test a variety of products and improving the applicability of the overall test system.

[0168] Example 2

[0169] This embodiment is a modified embodiment of embodiment 1. The difference between this embodiment and embodiment 1 is that the structure of the first gas supply module 100 is different and the special gas delivery component performance testing system also includes a purging module 400.

[0170] like Figure 3 As shown, a performance testing system for special gas delivery components also includes a purging module 400. The purging module 400 is located downstream of the first gas supply module 100 and upstream of the testing module 200, and is connected to the first gas supply module 100, the testing module 200, and the waste gas treatment equipment, respectively. It is used to obtain high-pressure nitrogen, process the high-pressure nitrogen to obtain low-pressure nitrogen, and use the low-pressure nitrogen to purge the testing module 200 and discharge the purging waste gas to the waste gas treatment equipment.

[0171] It should be noted that when replacing the special gas delivery components on the test module 200, the pipelines in the entire test system need to be purged. This is achieved by setting up a purging module 400 and cooperating with the first gas supply module 100 to perform the purging operation on the pipelines in the entire test system.

[0172] like Figure 3 As shown, the first gas supply module 100 also includes a second gas supply element 107 and a third gas supply element 108. The second gas supply element 107 is connected to the first gas supply element 101 of the first gas supply module 100 and is used to acquire and deliver high-pressure nitrogen. The third gas supply element 108 is connected to the second gas supply element 107, the purging module 400, and the testing module 200, respectively, and is used to acquire and deliver high-pressure nitrogen and low-pressure nitrogen to the testing module 200.

[0173] Specifically, the first end of the second gas supply element 107 is connected to the first gas supply element 101, and the connection between the first end of the second gas supply element 107 and the first gas supply element 101 is located downstream of the first detection element 106. The second end of the second gas supply element 107 is connected to the third gas supply element 108.

[0174] In some of these embodiments, the second gas supply element 107 includes, but is not limited to, a stainless steel tube.

[0175] Specifically, the first end of the third gas supply element 108 is connected to the second end of the second gas supply element 107 and the purging module 400, respectively, and the second end of the third gas supply element 108 is connected to the first test gas input element 201.

[0176] In some of these embodiments, the third gas supply element 108 includes, but is not limited to, a stainless steel tube.

[0177] Furthermore, the first gas supply element 101 also includes a fifth manual control element 109, a fifth automatic control element 110, a fifth detection element 111, a sixth manual control element 112, and a sixth automatic control element 113. Specifically, the fifth manual control element 109 is disposed on the second gas supply element 107 and is used to manually control the opening and closing of the second gas supply element 107; the fifth automatic control element 110 is disposed on the second gas supply element 107 and upstream of the fifth manual control element 109, and is used to automatically control the opening and closing of the second gas supply element 107; the fifth detection element 111 is disposed on the third gas supply element 108 and is used to detect the temperature and pressure of the third gas supply element 108; the sixth manual control element 112 is disposed on the third gas supply element 108 and downstream of the fifth detection element 111, and is used to manually control the opening and closing of the third gas supply element 108; the sixth automatic control element 113 is disposed on the third gas supply element 108 and upstream of the sixth manual control element 112, and is used to automatically control the opening and closing of the third gas supply element 108.

[0178] In some of these embodiments, the fifth manual control element 109 includes, but is not limited to, a manual diaphragm valve.

[0179] In some of these embodiments, the fifth automatic control element 110 includes, but is not limited to, a pneumatic diaphragm valve.

[0180] In some of these embodiments, the fifth detection element 111 includes, but is not limited to, a temperature and pressure sensor.

[0181] In some of these embodiments, the sixth manual control element 112 includes, but is not limited to, a manual diaphragm valve.

[0182] In some of these embodiments, the sixth automatic control element 113 includes, but is not limited to, a pneumatic diaphragm valve.

[0183] like Figure 3As shown, the purging module 400 includes a purging gas delivery element 401, a first pressure regulating element 402, a second exhaust gas delivery element 403, a second vacuum element 404, and a power gas delivery element 405. The purging gas delivery element 401 is located downstream of the first gas supply module 100 and upstream of the test module 200, and is connected to both the first gas supply module 100 and the test module 200, respectively, for obtaining high-pressure nitrogen and delivering low-pressure nitrogen to the test module 200; the first pressure regulating element 402 is located on the purging gas delivery element 401, for regulating the pressure of the high-pressure nitrogen to obtain low-pressure nitrogen; the second exhaust gas delivery element 403 is located downstream of the test module 200 and is connected to the test module 200, for discharging purging exhaust gas; the second vacuum element 404 is located on the second exhaust gas delivery element 403, for creating a vacuum environment in the second exhaust gas delivery element 403; and the power gas delivery element 405 is connected to both the power gas source and the second vacuum element 404, for delivering power gas to the second vacuum element 404.

[0184] Specifically, the first end of the purge gas delivery element 401 is connected to the second end of the first gas supply element 101, and the second end of the purge gas delivery element 401 is connected to the first end of the third gas supply element 108.

[0185] In some of these embodiments, the purge gas delivery element 401 includes, but is not limited to, a stainless steel tube.

[0186] Specifically, the first pressure regulating element 402 can adjust the gas pressure inside the purge gas delivery element 401 of the first gas supply element 101, thereby adjusting the high-pressure nitrogen in the first gas supply element 101 to low-pressure nitrogen.

[0187] In some of these embodiments, the first pressure regulating element 402 includes, but is not limited to, a pressure regulating valve.

[0188] Specifically, the first end of the second exhaust gas delivery element 403 is connected to the first exhaust gas delivery element 301, and the connection between the second exhaust gas delivery element 403 and the first exhaust gas delivery element 301 is located between the fourth detection element 210 and the sixth manual control element 112. The second end of the second exhaust gas delivery element 403 is connected to the exhaust port.

[0189] In some of these embodiments, the second exhaust gas delivery element includes, but is not limited to, a stainless steel pipe.

[0190] Specifically, the second vacuum element 404 can form a vacuum negative pressure at the end of the second exhaust gas delivery element 403, so that the gas in each pipeline of the test system can be quickly discharged through the second exhaust gas delivery element 403.

[0191] In some of these embodiments, the second vacuum element 404 includes, but is not limited to, a Venturi vacuum pump.

[0192] Specifically, the first end of the power gas delivery element 405 is connected to the low-pressure nitrogen pipeline, and the second end of the power gas delivery element 405 is connected to the second vacuum element 404.

[0193] In some of these embodiments, the power gas delivery element 405 includes, but is not limited to, a stainless steel tube.

[0194] Furthermore, the purging module 400 also includes a seventh manual control element 406, a seventh automatic control element 407, an eighth manual control element 408, an eighth automatic control element 409, a second one-way element 410, a ninth manual control element 411, a sixth detection element 412, and a third one-way element 413. Specifically, the seventh manual control element 406 is disposed on the purging gas delivery element 401 and located downstream of the first pressure regulating module, for manually controlling the opening and closing of the purging gas delivery element 401; the seventh automatic control element 407 is disposed on the purging gas delivery element 401 and located downstream of the first pressure regulating module and upstream of the seventh manual control element 406, for automatically controlling the opening and closing of the purging gas delivery element 401; the eighth manual control element 408 is disposed on the second exhaust gas delivery element 403 and is used to manually control the opening and closing of the second exhaust gas delivery element 403; the eighth automatic control element 409 is disposed on the second exhaust gas delivery element 403 and located downstream of the eighth manual control element 408, for automatically controlling the second exhaust gas delivery element 403. The gas conveying element 403 is opened and closed; the second unidirectional element 410 is disposed on the second exhaust gas conveying element 403 and is located downstream of the eighth automatic control element 409 and upstream of the second vacuum element 404, for making the purge exhaust gas flow in one direction; the ninth manual control element 411 is disposed on the power gas conveying element 405 and is used to manually control the opening and closing of the power gas conveying element 405; the sixth detection element 412 is disposed on the power gas conveying element 405 and is located downstream of the ninth manual control element 411, for detecting the temperature and pressure of the power gas conveying element 405; the third unidirectional element 413 is disposed on the power gas conveying element 405 and is located downstream of the sixth detection element 412, for making the power gas flow in one direction.

[0195] In some of these embodiments, the seventh manual control element 406 includes, but is not limited to, a manual diaphragm valve.

[0196] In some of these embodiments, the seventh automatic control element 407 includes, but is not limited to, a pneumatic diaphragm valve.

[0197] In some of these embodiments, the eighth manual control element 408 includes, but is not limited to, a manual diaphragm valve.

[0198] In some of these embodiments, the eighth automatic control element 409 includes, but is not limited to, a pneumatic diaphragm valve.

[0199] In some of these embodiments, the second one-way element 410 includes, but is not limited to, a one-way valve.

[0200] In some of these embodiments, the ninth manual control element 411 includes, but is not limited to, a manual diaphragm valve.

[0201] In some of these embodiments, the ninth automatic control element 504 includes, but is not limited to, a pneumatic diaphragm valve.

[0202] In some of these embodiments, the sixth detection element 412 includes, but is not limited to, a temperature and pressure sensor.

[0203] In some of these embodiments, the third one-way element 413 includes, but is not limited to, a one-way valve.

[0204] The usage method of this embodiment is as follows:

[0205] After testing a special gas delivery component, in actual work, the staff manually opened all the manual diaphragm valves in the entire testing system and kept all the pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0206] Subsequently, the system activates the second automatic control element 205, the third automatic control element 209, the fourth automatic control element 304, the sixth automatic control element 113, the seventh automatic control element 407, and the eighth automatic control element 409, and deactivates the first automatic control element 105. The second vacuum element 404 provides a vacuum negative pressure at the end of the second exhaust gas delivery element 403, thereby making the pipeline in the entire test system a vacuum state.

[0207] Then, the system activates the first automatic control element 105 and deactivates the eighth automatic control element 409, so that the high-pressure nitrogen is converted into low-pressure nitrogen through the first pressure regulating element 402, and the low-pressure nitrogen fills the entire test system pipeline, and the gas pressure in the pipeline reaches the standard requirement and is maintained for a period of time.

[0208] Finally, the system shuts down the first automatic control element 105 and turns on the eighth automatic control element 409. The second vacuum element 404 provides a vacuum negative pressure at the end of the second exhaust gas delivery element 403, thereby venting the gas in the pipeline of the entire test system.

[0209] The advantage of this embodiment is that by setting up a purging module and cooperating with the first gas supply module, the pipelines in the entire test system can be purged, thereby improving the accuracy of subsequent special gas delivery component testing.

[0210] Example 3

[0211] This embodiment is a modified embodiment of Embodiments 1-2. The difference between this embodiment and Embodiments 1-2 is that the performance testing system for special gas delivery components also includes a second gas supply module 500 and a testing module 200 with different structures.

[0212] like Figure 4 As shown, a performance testing system for special gas delivery components further includes a second gas supply module 500. The second gas supply module 500 is connected to both a high-pressure helium source and a testing module 200, and is used to supply high-pressure helium for internal leak detection; the testing module 200 cooperates with the second gas supply module 500 to perform internal leak detection.

[0213] like Figure 4 As shown, the second gas supply module 500 includes a fourth gas supply element 501. The fourth gas supply element 501 is connected to both a high-pressure helium source and a test module 200, and is used to supply high-pressure helium to the test module 200.

[0214] Specifically, the first end of the fourth gas supply element 501 is connected to the high-pressure helium pipeline, and the second end of the fourth gas supply element 501 is connected to the first end of the first test gas input element 201.

[0215] In some of these embodiments, the fourth gas supply element 501 includes, but is not limited to, a stainless steel tube.

[0216] Furthermore, the second gas supply module 500 also includes a tenth manual control element 502, a second pressure regulating element 503, a ninth automatic control element 504, and a micro-leakage control element 505. Specifically, the tenth manual control element 502 is disposed on the fourth gas supply element 501 and is used to manually control the opening and closing of the fourth gas supply element 501; the second pressure regulating element 503 is disposed on the fourth gas supply element 501 and located downstream of the tenth manual control element 502, and is used to regulate the pressure of high-pressure helium to obtain low-pressure helium; the ninth automatic control element 504 is disposed on the fourth gas supply element 501 and located downstream of the second pressure regulating element 503, and is used to automatically control the opening and closing of the fourth gas supply element 501; and the micro-leakage control element 505 is disposed on the fourth gas supply element 501 and located downstream of the ninth automatic control element 504.

[0217] In some embodiments, the tenth manual control element 502 includes, but is not limited to, a manual diaphragm valve.

[0218] In some of these embodiments, the second pressure regulating element 503 includes, but is not limited to, a pressure regulating valve.

[0219] In some of these embodiments, the ninth automatic control element 504 includes, but is not limited to, a pneumatic diaphragm valve.

[0220] In some of these embodiments, the microleak control element 505 includes, but is not limited to, a microleak valve.

[0221] like Figure 4 As shown, the test module 200 also includes a second test gas input element 211 and a helium test element 212. The second test gas input element 211 is connected to the first test gas output element 203 of the test module 200 and is used to acquire test gas; the helium test element 212 is connected to the second test gas input element 211 and is used for internal leakage detection.

[0222] Specifically, the first end of the second test gas input element 211 is connected to the second end of the first test gas output element 203, and the second end of the second test gas input element 211 is connected to the helium test element 212.

[0223] In some of these embodiments, the second test gas input element 211 includes, but is not limited to, a stainless steel tube.

[0224] In some of these embodiments, the helium testing element 212 includes, but is not limited to, a helium detector.

[0225] Furthermore, the test module 200 also includes an eleventh manual control element 214 and a tenth automatic control element 215. The eleventh manual control element 214 is disposed on the second test gas input element 211 and is used to manually control the opening and closing of the second test gas input element 211. The tenth automatic control element 215 is disposed on the second test gas input element 211 and located downstream of the eleventh manual control element 214, and is used to automatically control the opening and closing of the second test gas input element 211.

[0226] In some embodiments, the eleventh manual control element 214 includes, but is not limited to, a manual diaphragm valve.

[0227] In some of these embodiments, the tenth automatic control element 215 includes, but is not limited to, a pneumatic diaphragm valve.

[0228] like Figure 4 As shown, the test module 200 also includes a second test gas output element 213. The second test gas output element 213 is connected to the first test gas output element 203 and the vacuum module 300 of the test module 200, respectively, and is used to output test exhaust gas.

[0229] Specifically, the first end of the second test gas output element 213 is connected to the second end of the first test gas output element 203, and the second end of the second test gas output element 213 is connected to the first end of the first emission gas delivery element 301 and the second end of the second emission gas delivery element 403.

[0230] In some of these embodiments, the second test gas output element 213 includes, but is not limited to, a stainless steel tube.

[0231] The usage method of this embodiment is as follows:

[0232] In practice, staff manually open all manual diaphragm valves in the entire testing system and keep all pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0233] Subsequently, the system activates the second pressure regulating element 503, thereby converting the high-pressure helium into low-pressure helium.

[0234] Then, the system activates the ninth automatic control element 504, the micro-leakage control element 505, the second automatic control element 205, the third automatic control element 209, and the tenth automatic control element 215, thereby allowing low-pressure helium gas to enter the helium gas testing element 212 through the first test gas input element 201, the first test gas output element 203, and the second test gas input element 211.

[0235] Finally, the staff sprayed gas towards the special gas delivery components and observed the changes in the values ​​of the helium detection element, thereby realizing the internal leakage detection of the special gas delivery components.

[0236] The advantage of this embodiment is that by connecting the second gas supply module with the test module, controlling the opening and closing of the diaphragm valve at the front end of the test disk element, and observing the numerical change of the helium detection element, the internal leakage detection of the special gas delivery component can be achieved.

[0237] Example 4

[0238] This embodiment is a modified embodiment of Embodiments 1 to 3. The difference between this embodiment and Embodiments 1 to 3 is that the performance testing system for special gas conveying components also includes a pressurization module 600.

[0239] like Figure 5 As shown, a performance testing system for special gas delivery components further includes a pressurization module 600. The pressurization module 600 is connected to both the first gas supply module 100 and the testing module 200, and is used to pressurize the test gas and deliver the pressurized test gas to the testing module 200.

[0240] like Figure 5As shown, the pressurization module 600 includes a fifth gas supply element 601 and a pressurization element 602. The fifth gas supply element 601 is connected to the first test gas input element 201 of the test module 200 and is used to acquire test gas; the pressurization element 602 is disposed on the fifth gas supply element 601 and is used to pressurize the test gas.

[0241] Specifically, the first end of the fifth gas supply element 601 is connected to the first end of the first test gas input element 201, the second end of the fifth gas supply element 601 is connected to the first test gas input element 201, and the connection between the fifth gas supply element 601 and the first test gas input element 201 is located downstream of the second automatic control element 205 and upstream of the second detection element 206.

[0242] In some of these embodiments, the fifth gas supply element 601 includes, but is not limited to, a stainless steel tube.

[0243] In some of these embodiments, the booster element 602 includes, but is not limited to, a booster pump.

[0244] Furthermore, the booster module 600 also includes a twelfth manual control element 603, an eleventh automatic control element 604, a thirteenth manual control element 605, and a twelfth automatic control element 606. The twelfth manual control element 603 is located upstream of the fifth gas supply element 601 and the booster element 602, and is used to manually control the opening and closing of the fifth gas supply element 601. The eleventh automatic control element 604 is located upstream of the twelfth manual control element 603 and the fifth gas supply element 601, and is used to automatically control the opening and closing of the fifth gas supply element 601. The thirteenth manual control element 605 is located downstream of the fifth gas supply element 601 and the booster element 602, and is used to manually control the opening and closing of the fifth gas supply element 601. The twelfth automatic control element 606 is located downstream of the fifth gas supply element 601 and upstream of the thirteenth manual control element 605, and is used to automatically control the opening and closing of the fifth gas supply element 601.

[0245] In some of these embodiments, the twelfth manual control element 603 includes, but is not limited to, a manual diaphragm valve.

[0246] In some of these embodiments, the eleventh automatic control element 604 includes, but is not limited to, a pneumatic diaphragm valve.

[0247] In some of these embodiments, the thirteenth manual control element 605 includes, but is not limited to, a manual diaphragm valve.

[0248] In some of these embodiments, the twelfth automatic control element 606 includes, but is not limited to, a pneumatic diaphragm valve.

[0249] The usage method of this embodiment is as follows:

[0250] In actual work, when conducting overpressure and pressure holding tests on special gas transmission components, the staff manually open all manual diaphragm valves in the entire test system and keep all pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0251] Subsequently, the system activates the first automatic control element 105, the fifth automatic control element 110, and the sixth automatic control element 113, thereby allowing the test gas to be pressure-regulated by the pressurizing element 602, so that the pressure of the test gas exceeds the cylinder outlet pressure, and thus high-pressure test gas can be input into the front end of the test panel element 202.

[0252] Then, the system activates the second vacuum element 404, the third automatic control element 209, and the eighth automatic control element 409, thereby making the rear end of the test disk element 202 a vacuum state.

[0253] Finally, by observing the changes in the values ​​of the second detection element 206 and the third detection element 207, the staff can perform overpressure holding tests on the special gas conveying components.

[0254] The advantage of this embodiment is that the pressure of the test gas entering the test module can be adjusted by setting a pressurization module, thereby enabling the special gas delivery component performance testing system to test a variety of special gas delivery components.

[0255] Example 5

[0256] This embodiment is a modified embodiment of embodiments 1 to 4. The difference between this embodiment and embodiments 1 to 4 is that the performance testing system for special gas conveying components also includes a first flow detection module 700 and a second flow detection module 800.

[0257] like Figure 6 As shown, a performance testing system for special gas delivery components further includes a first flow detection module 700 and a second flow detection module 800. The first flow detection module 700 is connected to the test module 200 and is used to detect the gas flow rate input to the test module 200; the second flow detection module 800 is connected to the test module 200 and is used to detect the gas flow rate output from the test module 200.

[0258] like Figure 6As shown, the first flow detection module 700 includes a sixth gas supply element 701 and a first flow detection element 702. The sixth gas supply element 701 is connected to the test module 200 and is used to acquire test gas; the first flow detection element 702 is disposed on the sixth gas supply element 701 and is used to detect the gas flow rate input to the test module 200.

[0259] Specifically, the first end of the sixth gas supply element 701 is connected to the first end of the first test gas input element 201, the second end of the sixth gas supply element 701 is connected to the first test gas input element 201, and the connection between the sixth gas supply element 701 and the first test gas input element 201 is located downstream of the second automatic control element 205 and upstream of the second detection element 206.

[0260] In some of these embodiments, the sixth gas supply element 701 includes, but is not limited to, a stainless steel tube.

[0261] In some of these embodiments, the first flow detection element 702 includes, but is not limited to, a flow controller.

[0262] Furthermore, the first flow detection module 700 also includes a fourteenth manual control element 703, a thirteenth automatic control element 704, a fifteenth manual control element 705, and a fourteenth automatic control element 706. Specifically, the fourteenth manual control element 703 is disposed on the sixth gas supply element 701 and upstream of the first flow detection element 702, and is used to manually control the opening and closing of the sixth gas supply element 701; the thirteenth automatic control element 704 is disposed on the sixth gas supply element 701 and upstream of the fourteenth manual control element 703, and is used to automatically control the opening and closing of the sixth gas supply element 701; the fifteenth manual control element 705 is disposed on the sixth gas supply element 701 and downstream of the first flow detection element 702, and is used to manually control the opening and closing of the sixth gas supply element 701; the fourteenth automatic control element 706 is disposed on the sixth gas supply element 701 and downstream of the first flow detection element 702 and upstream of the fifteenth manual control element 705, and is used to automatically control the opening and closing of the sixth gas supply element 701.

[0263] In some of these embodiments, the fourteenth manual control element 703 includes, but is not limited to, a manual diaphragm valve.

[0264] In some of these embodiments, the thirteenth automatic control element 704 includes, but is not limited to, an automatic diaphragm valve.

[0265] In some embodiments, the fifteenth manual control element 705 includes, but is not limited to, a manual diaphragm valve.

[0266] In some of these embodiments, the fourteenth automatic control element 706 includes, but is not limited to, an automatic diaphragm valve.

[0267] like Figure 6 As shown, the second flow detection module 800 includes a seventh gas supply element 801, a second flow detection element 802, an eighth gas supply element 803, and a third flow detection element 804. The seventh gas supply element 801 is connected to the test module 200 and is used to acquire test gas; the second flow detection element 802 is disposed on the seventh gas supply element 801 and is used to detect the low-pressure gas flow rate output by the test module 200; the eighth gas supply element 803 is connected to the test module 200 and is used to acquire test gas; the third flow detection element 804 is disposed on the eighth gas supply element 803 and is used to detect the high-pressure gas flow rate output by the test module 200.

[0268] Specifically, the first end of the seventh gas supply element 801 is connected to the first test gas output element 203, and the connection between the first end of the seventh gas supply element 801 and the first test gas output element 203 is located downstream of the third detection element 207 and upstream of the third manual control element 208. The second end of the seventh gas supply element 801 is connected to the second end of the first test gas output element 203.

[0269] In some of these embodiments, the seventh gas supply element 801 includes, but is not limited to, a stainless steel tube.

[0270] In some of these embodiments, the second flow detection element 802 includes, but is not limited to, a low-pressure mass flow meter.

[0271] Specifically, the first end of the eighth gas supply element 803 is connected to the first test gas output element 203, and the connection between the first end of the eighth gas supply element 803 and the first test gas output element 203 is located downstream of the third detection element 207 and upstream of the third manual control element 208. The second end of the eighth gas supply element 803 is connected to the second end of the first test gas output element 203.

[0272] In some of these embodiments, the eighth gas supply element 803 includes, but is not limited to, a stainless steel tube.

[0273] In some of these embodiments, the third flow detection element 804 includes, but is not limited to, a high-pressure flow meter.

[0274] Furthermore, the second flow detection module 800 also includes a sixteenth manual control element 805, a fifteenth automatic control element 806, a third pressure regulating element 807, a fourth one-way element 808, a seventeenth manual control element 809, a sixteenth automatic control element 810, and a fifth one-way element 811. Specifically, the sixteenth manual control element 805 is located upstream of the seventh gas supply element 801 and is used to manually control the opening and closing of the seventh gas supply element 801; the fifteenth automatic control element 806 is located downstream of the seventeenth manual control element 805 and upstream of the second flow detection element 802 and is used to automatically control the opening and closing of the seventh gas supply element 801; the third pressure regulating element 807 is located downstream of the seventh gas supply element 801 and is used to regulate the internal gas pressure of the seventh gas supply element 801; and the fourth one-way element 808 is located downstream of the seventh gas supply element 801. 801, located downstream of the third pressure regulating element 807, is used to make the test exhaust gas flow in one direction; the seventeenth manual control element 809 is located upstream of the eighth gas supply element 803 and upstream of the third flow detection element 804, and is used to manually control the opening and closing of the eighth gas supply element 803; the sixteenth automatic control element 810 is located downstream of the eighth gas supply element 803 and upstream of the third flow detection element 804, and is used to automatically control the opening and closing of the eighth gas supply element 803; the fifth unidirectional element 811 is located downstream of the eighth gas supply element 803 and downstream of the third flow detection element 804, and is used to make the test exhaust gas flow in one direction.

[0275] In some of these embodiments, the sixteenth manual control element 805 includes, but is not limited to, a manual diaphragm valve.

[0276] In some of these embodiments, the fifteenth automatic control element 806 includes, but is not limited to, an automatic diaphragm valve.

[0277] In some of these embodiments, the third pressure regulating element 807 includes, but is not limited to, a pressure regulating valve.

[0278] In some of these embodiments, the fourth one-way element 808 includes, but is not limited to, a one-way valve.

[0279] In some of these embodiments, the seventeenth manual control element 809 includes, but is not limited to, a manual diaphragm valve.

[0280] In some of these embodiments, the sixteenth automatic control element 810 includes, but is not limited to, an automatic diaphragm valve.

[0281] In some of these embodiments, the fifth one-way element 811 includes, but is not limited to, a one-way valve.

[0282] The usage method of this embodiment is as follows:

[0283] In practice, staff manually open all manual diaphragm valves in the entire testing system and keep all pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0284] Subsequently, the system activates the first automatic control element 105, the seventh automatic control element 407, the sixth automatic control element 113, the thirteenth automatic control element 704, the fourteenth automatic control element 706, the fifteenth automatic control element 806, and the fourth automatic control element 304, so that the low-pressure test gas can pass through the first flow detection element 702, the second detection element 206, the test disk element 202, the third detection element 207, and the second flow detection element 802 in sequence, thereby obtaining the pressure and temperature of the low-pressure test gas at the front and rear ends of the test disk element 202;

[0285] Then, the steps described in Example 2 are performed to purge the entire system's pipeline to keep the pipeline clean;

[0286] Then, the system shuts down the seventh automatic control element 407 and the fifteenth automatic control element 806, and turns on the fifth automatic control element 110 and the sixteenth automatic control element 810, so that the high-pressure test gas can pass through the first flow detection element 702, the second detection element 206, the test disk element 202, the third detection element 207, and the third flow detection element 804 in sequence, thereby obtaining the pressure and temperature of the high-pressure test gas at the front and rear ends of the test disk element 202;

[0287] Finally, based on the pressure and temperature of the low-pressure test gas at the front and rear ends of the test disc element 202, and the pressure and temperature of the high-pressure test gas at the front and rear ends of the test disc element 202, the staff can obtain the CV value of the special gas delivery component installed on the test disc element 202.

[0288] The advantage of this embodiment is that by connecting the first flow detection module and the second flow detection module with the test module, the CV value of the special gas delivery components installed on the test module can be tested, so that the entire system can test different performance of the special gas delivery components.

[0289] Example 6

[0290] This embodiment is a modified embodiment of embodiments 1 to 5. The difference between this embodiment and embodiments 1 to 5 is that the structure of the test module 200 is different.

[0291] like Figure 7 As shown, in this embodiment, there are two test modules 200, and the two test modules 200 are arranged in parallel.

[0292] It should be noted that the number of test modules 200 can also be 3, 4, etc. The number of test modules 200 can be set according to actual testing needs, and no further restrictions are imposed here.

[0293] Furthermore, in the case of multiple test modules 200, in order to control the test gas entering different test modules 200, the test module 200 also includes a seventeenth automatic control element 216, an eighteenth manual control element 217, an eighteenth automatic control element 218, and a nineteenth manual control element 219. The seventeenth automatic control element 216 is located downstream of the first test gas input element 201 and upstream of the second detection element 206 where the two first test gas input elements 201 are connected in parallel, and is used to manually control the opening and closing of the first test gas input element 201; the eighteenth manual control element 217 is located downstream of the first test gas input element 201 and upstream of the second detection element 206 where the seventeenth automatic control element 216 is connected in parallel, and is used to automatically control the opening and closing of the first test gas input element 201; the eighteenth automatic control element 218 is located downstream of the first test gas output element 203 and upstream of the second detection element 203 where the two first test gas output elements 203 are connected in parallel, and is used to automatically control the opening and closing of the first test gas output element 203; the nineteenth manual control element 219 is located downstream of the first test gas output element 203 and upstream of the second detection element 203 where the eighteenth automatic control element 218 is connected in parallel, and is used to manually control the opening and closing of the first test gas output element 203.

[0294] In some of these embodiments, the seventeenth automatic control element 216 includes, but is not limited to, a pneumatic diaphragm valve.

[0295] In some of these embodiments, the eighteenth manual control element 217 includes, but is not limited to, a manual diaphragm valve.

[0296] In some of these embodiments, the eighteenth automatic control element 218 includes, but is not limited to, a pneumatic diaphragm valve.

[0297] In some of these embodiments, the nineteenth manual control element 219 includes, but is not limited to, a manual diaphragm valve.

[0298] The usage method and advantages of this embodiment are the same as those of the above embodiments, and will not be repeated here.

[0299] Example 7

[0300] This embodiment relates to semiconductor process equipment of this utility model.

[0301] A semiconductor process apparatus includes a performance testing system for special gas delivery components as described in Examples 1 to 6.

[0302] It should be noted that the semiconductor process equipment also includes a high-pressure nitrogen supply device, a high-pressure helium supply device, and a low-pressure nitrogen supply device. Specifically, the high-pressure nitrogen supply device is connected to the first gas supply module 100 of the special gas delivery component performance testing system; the high-pressure helium supply device is connected to the second gas supply module 500 of the special gas delivery component performance testing system; and the low-pressure nitrogen supply device is connected to the second vacuum element 404 of the special gas delivery component performance testing system.

[0303] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0304] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A performance testing system for special gas conveying components, characterized in that, include: The first gas supply module is connected to a high-pressure nitrogen source and is used to supply high-pressure nitrogen for external leakage detection. At least one test module is provided, which is located downstream of the first gas supply module and connected to the first gas supply module, and is used to cooperate with the first gas supply module to perform external leakage detection. A vacuum module is located downstream of and connected to the test module, and is used to discharge test exhaust gas.

2. The performance testing system for special gas conveying components according to claim 1, characterized in that, The first gas supply module includes: A first gas supply element is connected to a high-pressure nitrogen source and the test module, respectively, and is used to supply high-pressure nitrogen to the test module; A purification element is disposed on the first gas supply element and is used to purify high-pressure nitrogen to improve the purity of high-pressure nitrogen and reduce the humidity of high-pressure nitrogen; A filter element, disposed in the first gas supply element and downstream of the purification element, is used to filter high-pressure nitrogen to remove particulate matter from the high-pressure nitrogen; and / or The testing module includes: The first test gas input element is connected to the first gas supply module and is used to obtain high-pressure nitrogen. A test disc element, which is connected to the first test gas input element, is used for external leakage detection; A first test gas output element, which is connected to the test disk element and the vacuum module respectively, is used to output test exhaust gas; and / or The vacuum module includes: A first emission gas delivery element is disposed downstream of the test module and connected to the test module for emitting test exhaust gas. A first vacuum element is disposed on the first exhaust gas delivery element to create a vacuum environment in the first exhaust gas delivery element.

3. The performance testing system for special gas conveying components according to claim 2, characterized in that, The first gas supply module also includes: A first manual control element is disposed on the first gas supply element and located downstream of the filter element, for manually controlling the opening and closing of the first gas supply element; A first automatic control element is disposed on the first gas supply element and located downstream of the first manual control element, for automatically controlling the opening and closing of the first gas supply element; A first detection element is disposed on the first gas supply element and located downstream of the first automatic control element, for detecting the temperature and pressure of the first gas supply element; and / or The testing module also includes: A first heat-insulating element is disposed on the first test gas input element for heat preservation; The second heat-insulating element is disposed on the first test gas output element and is used for heat preservation. A second manual control element is disposed on the first test gas input element and is used to manually control the opening and closing of the first test gas input element; The second automatic control element is disposed on the first test gas input element and located upstream of the second manual control element, and is used to automatically control the opening and closing of the first test gas input element; The second detection element is disposed at the first test gas input element and located downstream of the second manual control element, and is used to detect the temperature and pressure of the first test gas input element; A third detection element is disposed on the first test gas output element and is used to detect the temperature and pressure of the first test gas output element. A third manual control element is disposed on the first test gas output element and located downstream of the third detection element, and is used to manually control the opening and closing of the test gas output element. A third automatic control element is disposed on the first test gas output element and located downstream of the third manual control element, and is used to automatically control the opening and closing of the first test gas output element. A fourth detection element, disposed at the first test gas output element and downstream of the third automatic control element, is used to detect the temperature and pressure of the first test gas output element; and / or The vacuum module also includes: A fourth manual control element is disposed on the first exhaust gas conveying element and is used to manually control the opening and closing of the first exhaust gas conveying element; A fourth automatic control element is disposed on the first exhaust gas conveying element and located downstream of the fourth manual control element, and is used to automatically control the opening and closing of the first exhaust gas conveying element. The first unidirectional element is disposed on the first exhaust gas conveying element and located downstream of the fourth manual control element and upstream of the first vacuum element, for causing the test exhaust gas to flow in one direction.

4. The performance testing system for special gas conveying components according to any one of claims 1 to 3, characterized in that, Also includes: A purging module, disposed downstream of the first gas supply module and upstream of the test module, and connected to the first gas supply module, the test module, and the waste gas treatment equipment, respectively, is used to obtain high-pressure nitrogen, process the high-pressure nitrogen to obtain low-pressure nitrogen, and use the low-pressure nitrogen to purge the test module and discharge the purging waste gas to the waste gas treatment equipment; and / or The second gas supply module is connected to the high-pressure helium source and the test module respectively, and is used to deliver high-pressure helium for internal leak detection. The test module works in conjunction with the second gas supply module to perform internal leak detection.

5. The performance testing system for special gas conveying components according to claim 4, characterized in that, The first gas supply module also includes: The second gas supply element is connected to the first gas supply element of the first gas supply module and is used to obtain and deliver high-pressure nitrogen. A third gas supply element, which is connected to the second gas supply element, the purging module, and the test module, is used to acquire and supply high-pressure nitrogen and low-pressure nitrogen to the test module; and / or The purging module includes: A purge gas delivery element is placed downstream of the first gas supply module and upstream of the test module, and is connected to the first gas supply module and the test module respectively, for obtaining high-pressure nitrogen and delivering low-pressure nitrogen to the test module; A first pressure regulating element is disposed on the purge gas delivery element and is used to regulate the pressure of high-pressure nitrogen to obtain low-pressure nitrogen. The second emission gas delivery element is located downstream of the test module and is connected to the test module for emitting purge exhaust gas. A second vacuum element is disposed on the second exhaust gas delivery element to create a vacuum environment for the second exhaust gas delivery element. A power gas delivery element, wherein the power gas delivery element is connected to a power gas source and a second vacuum element respectively, and is used to deliver power gas to the second vacuum element; and / or The second gas supply module includes: A fourth gas supply element is connected to both a high-pressure helium source and the test module, and is used to supply high-pressure helium to the test module.

6. The performance testing system for special gas conveying components according to claim 5, characterized in that, The first gas supply module also includes: A fifth manual control element is disposed on the second gas supply element and is used to manually control the opening and closing of the second gas supply element; A fifth automatic control element is disposed on the second gas supply element and upstream of the fifth manual control element, and is used to automatically control the opening and closing of the second gas supply element; The fifth detection element is disposed on the third gas supply element and is used to detect the temperature and pressure of the third gas supply element; A sixth manual control element is disposed on the third gas supply element and located downstream of the fifth detection element, and is used to manually control the opening and closing of the third gas supply element; A sixth automatic control element, disposed upstream of the third gas supply element and located upstream of the sixth manual control element, is used to automatically control the opening and closing of the third gas supply element; and / or The purging module further includes: A seventh manual control element is disposed on the purge gas delivery element and located downstream of the first pressure regulating element, and is used to manually control the opening and closing of the purge gas delivery element; A seventh automatic control element is disposed on the purge gas delivery element and located downstream of the first pressure regulating element and upstream of the seventh manual control element, for automatically controlling the opening and closing of the purge gas delivery element; The eighth manual control element is disposed on the second exhaust gas conveying element and is used to manually control the opening and closing of the second exhaust gas conveying element; The eighth automatic control element is disposed on the second exhaust gas conveying element and located downstream of the eighth manual control element, and is used to automatically control the opening and closing of the second exhaust gas conveying element; The second unidirectional element is disposed on the second exhaust gas conveying element and located downstream of the eighth automatic control element and upstream of the second vacuum element, for making the purge exhaust gas flow in one direction. A ninth manual control element is disposed on the power gas delivery element and is used to manually control the opening and closing of the power gas delivery element; The sixth detection element is disposed on the power gas delivery element and located downstream of the ninth manual control element, and is used to detect the temperature and pressure of the power gas delivery element; A third unidirectional element, disposed in the motive gas delivery element and downstream of the sixth detection element, is used to ensure unidirectional flow of the motive gas; and / or The second gas supply module also includes: A tenth manual control element is disposed on the fourth gas supply element and is used to manually control the opening and closing of the fourth gas supply element; The second pressure regulating element is disposed in the fourth gas supply element and located downstream of the tenth manual control element, and is used to regulate the pressure of high-pressure helium to obtain low-pressure helium. A ninth automatic control element is disposed on the fourth gas supply element and located downstream of the second pressure regulating element, and is used to automatically control the opening and closing of the fourth gas supply element; A microleak control element is disposed on the fourth gas supply element and located downstream of the ninth automatic control element.

7. The performance testing system for special gas conveying components according to any one of claims 1 to 3, characterized in that, Also includes: A pressurization module is connected to the first gas supply module and the test module respectively, and is used to pressurize the test gas and deliver the pressurized test gas to the test module. and / or A first flow detection module, which is connected to the test module, is used to detect the gas flow rate input to the test module; The second flow detection module is connected to the test module and is used to detect the gas flow rate output by the test module.

8. The performance testing system for special gas conveying components according to claim 7, characterized in that, The testing module also includes: The second test gas input element is connected to the first test gas output element of the test module and is used to acquire the test gas. A helium testing element, wherein the helium testing element is connected to the second test gas input element, for internal leak detection; and / or The testing module also includes: A second test gas output element, which is connected to the first test gas output element of the test module and the vacuum module respectively, is used to output test exhaust gas; and / or The booster module includes: The fifth gas supply element is connected to the first test gas input element of the test module and is used to acquire test gas; A pressurizing element, disposed in the fifth gas supply element, is used to pressurize the test gas; and / or The first flow detection module includes: A sixth gas supply element, which is connected to the test module, is used to acquire test gas; A first flow detection element, disposed on the sixth gas supply element, is used to detect the gas flow rate input to the test module; and / or The second flow detection module includes: A seventh gas supply element, which is connected to the test module, is used to acquire test gas; The second flow detection element is disposed on the seventh gas supply element and is used to detect the low-pressure gas flow rate output by the test module; An eighth gas supply element, which is connected to the test module, is used to acquire test gas; The third flow detection element is disposed on the eighth gas supply element and is used to detect the high-pressure gas flow rate output by the test module.

9. The performance testing system for special gas conveying components according to claim 8, characterized in that, The testing module also includes: The eleventh manual control element is disposed on the second test gas input element and is used to manually control the opening and closing of the second test gas input element; A tenth automatic control element, disposed on the second test gas input element and located downstream of the eleventh manual control element, is used to automatically control the opening and closing of the second test gas input element; and / or The booster module also includes: The twelfth manual control element is disposed on the fifth gas supply element and located upstream of the pressurization element, and is used to manually control the opening and closing of the fifth gas supply element; The eleventh automatic control element is disposed on the fifth gas supply element and located upstream of the twelfth manual control element, and is used to automatically control the opening and closing of the fifth gas supply element; The thirteenth manual control element is disposed on the fifth gas supply element and located downstream of the pressurization element, and is used to manually control the opening and closing of the fifth gas supply element; A twelfth automatic control element, disposed downstream of the fifth gas supply element and upstream of the thirteenth manual control element, is used to automatically control the opening and closing of the fifth gas supply element; and / or The first flow detection module also includes: The fourteenth manual control element is disposed on the sixth gas supply element and located upstream of the first flow detection element, and is used to manually control the opening and closing of the sixth gas supply element; The thirteenth automatic control element is disposed on the sixth gas supply element and located in the... Upstream of the fourteenth manual control element, it is used to automatically control the opening and closing of the sixth gas supply element; The fifteenth manual control element is disposed on the sixth gas supply element and located downstream of the first flow detection element, and is used to manually control the opening and closing of the sixth gas supply element; A fourteenth automatic control element, disposed downstream of the sixth gas supply element and upstream of the fifteenth manual control element, is used to automatically control the opening and closing of the sixth gas supply element; and / or The second flow detection module also includes; The sixteenth manual control element is disposed on the seventh gas supply element and located upstream of the second flow detection element, and is used to manually control the opening and closing of the seventh gas supply element; The fifteenth automatic control element is disposed on the seventh gas supply element and located downstream of the sixteenth manual control element and upstream of the second flow detection element, and is used to automatically control the opening and closing of the seventh gas supply element; The third pressure regulating element is disposed in the seventh gas supply element and located downstream of the second flow detection element, and is used to regulate the gas pressure inside the seventh gas supply element; A fourth unidirectional element is disposed on the seventh gas supply element and located downstream of the third pressure regulating element, for making the test exhaust gas flow in one direction; The seventeenth manual control element is disposed on the eighth gas supply element and located upstream of the third flow detection element, and is used to manually control the opening and closing of the eighth gas supply element; The sixteenth automatic control element is disposed on the eighth gas supply element and located downstream of the seventeenth manual control element and upstream of the third flow detection element, and is used to automatically control the opening and closing of the eighth gas supply element; The fifth unidirectional element is disposed in the eighth gas supply element and located downstream of the third flow detection element, for making the test exhaust gas flow in one direction.

10. A semiconductor process apparatus, characterized in that, include: The performance testing system for special gas delivery components as described in any one of claims 1 to 9.

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