Cleaning device

Abstract

The utility model provides a cleaning device. The cleaning device comprises a cleaning cavity; the at least one bearing table is located in the cleaning cavity, and the bearing table is used for bearing and fixing a part to be cleaned; the liquid inlet assembly comprises at least one first liquid outlet spray head and at least one second liquid outlet spray head, the first liquid outlet spray heads are arranged above the bearing table and used for spraying the cleaning liquid towards the upper surface of the to-be-cleaned part, and the second liquid outlet spray heads are arranged on the side edge of the bearing table and used for spraying the cleaning liquid towards the upper surface of the to-be-cleaned part. The spraying device is used for spraying the cleaning liquid towards the side face of the to-be-cleaned part; and the air inlet assembly is arranged on at least one side of the bearing table and used for blowing air to the to-be-cleaned part. According to the cleaning device, the photomask box can be cleaned, attachment of small particles inside and outside the photomask box is reduced, and pollution of the small particles to the photomask is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a cleaning device. BACKGROUND

[0002] The photomask used in lithography is usually stored in a photomask box when not in use. However, after long-term use, the photomask box has many small particles on the inside and surface. During the movement of the photomask box, the small particles attached to the inside and surface of the photomask box will fall onto the surface of the photomask, causing contamination of the photomask.

[0003] Therefore, it is necessary to develop a cleaning device for cleaning the photomask box to reduce the attachment of small particles on the inside and surface of the photomask box and avoid contamination of the photomask by small particles. CONTENT OF THE INVENTION

[0004] The purpose of the present application is to provide a cleaning device for cleaning the photomask box to reduce the attachment of small particles on the inside and surface of the photomask box and avoid contamination of the photomask by small particles.

[0005] The cleaning device provided by the embodiments of the present application comprises a cleaning cavity, at least one supporting table located in the cleaning cavity, the supporting table being used for supporting and fixing a to-be-cleaned piece, a liquid inlet assembly comprising at least one first liquid outlet nozzle and at least one second liquid outlet nozzle, the first liquid outlet nozzle being arranged above the supporting table and used for spraying the cleaning liquid towards the upper surface of the to-be-cleaned piece, the second liquid outlet nozzle being arranged at the side of the supporting table and used for spraying the cleaning liquid towards the side surface of the to-be-cleaned piece, and an air inlet assembly arranged at at least one side of the supporting table and used for blowing air towards the to-be-cleaned piece.

[0006] In some embodiments, the liquid inlet assembly further comprises a first liquid delivery pipeline, the input end of the first liquid delivery pipeline being connected with a liquid source, the output end of the first liquid delivery pipeline being divided into at least one and connected with at least one first liquid outlet nozzle respectively, and at least one second liquid delivery pipeline, the input end of the second liquid delivery pipeline being connected with the liquid source, and the output end of the second liquid delivery pipeline being connected with any one second liquid outlet nozzle.

[0007] In some embodiments, the liquid inlet assembly further comprises a first fixed support and a second fixed support, the first end of the first fixed support is fixed in the cleaning cavity, the second end of the first fixed support is connected to at least one first extension arm, the first extension arm extends above the carrier table, and the output end of the first liquid delivery pipeline is fixed on the first extension arm; the first end of the second fixed support is fixed in the cleaning cavity, the second end of the second fixed support is connected to a second extension arm, the second extension arm extends to the side of the carrier table, and the output end of the second liquid delivery pipeline is fixed on the second extension arm.

[0008] In some embodiments, the gas inlet assembly comprises at least one gas outlet nozzle, the number of the gas outlet nozzles is the same as the number of the carrier tables, and the gas outlet of each gas outlet nozzle faces the corresponding carrier table.

[0009] In some embodiments, the gas inlet assembly further comprises a gas delivery pipeline, the input end of the gas delivery pipeline is connected to a gas source, the output end of the gas delivery pipeline is divided into at least one, and each output end is connected to at least one gas outlet nozzle; and a third fixed support, the first end of the third fixed support is fixed in the cleaning cavity, the second end of the third fixed support is connected to at least one third extension arm, the third extension arm extends above the carrier table, and the output end of the gas delivery pipeline is fixed on the third extension arm.

[0010] In some embodiments, the number of the carrier tables is two, the first fixed support is arranged between the two carrier tables, the number of the second fixed supports is two, and each second fixed support is arranged at the side of the corresponding carrier table; and the third fixed support is arranged between the two carrier tables and opposite to the first fixed support.

[0011] In some embodiments, the first liquid delivery pipeline, the second liquid delivery pipeline, and the gas delivery pipeline are respectively provided with a first flow control meter, a second flow control meter, and a third flow control meter.

[0012] In some embodiments, the cleaning device further comprises a liquid discharge pipeline, and the liquid discharge pipeline is arranged at the bottom of the cleaning cavity away from the carrier tables.

[0013] In some embodiments, the cleaning cavity comprises a cavity with an open top and a cover body matched with the opening, and the opening is used for the to-be-cleaned piece to enter or exit the cavity.

[0014] In some embodiments, the outer wall of the cover body is fixedly connected with a handle.

[0015] In some embodiments, the top surface of the carrier table is provided with a plurality of fixed clamps to clamp the to-be-cleaned piece.

[0016] The cleaning device provided by the present application has the following advantages, but is not limited to the following:

[0017] The cleaning device provided by the present application can clean the upper surface and the side surface of the to-be-cleaned piece at the same time. When the to-be-cleaned piece is a reticle box, the inner surface of the reticle box can be upward, that is, the cleaning of the inner surface and the outer sidewall of the reticle box can be completed. The cleaning device provided by the present application is further provided with an air inlet assembly. By blowing gas to the to-be-cleaned piece, the drying of the to-be-cleaned piece can be completed. In addition, the bearing table provided by the present application can be multiple, and the cleaning of multiple to-be-cleaned pieces can be realized, that is, the top cover and the bottom cover of the reticle box can be cleaned at the same time. BRIEF DESCRIPTION OF DRAWINGS

[0018] The following drawings in detail describe the exemplary embodiments disclosed in the present application. The same reference signs in the drawings represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of the present application, and other embodiments can also achieve the same purpose of the application in the present application. It should be understood that the drawings are not drawn to scale.

[0019] Wherein:

[0020] Figure 1 FIG. 1 is a structural schematic diagram of a cleaning device according to some embodiments of the present application;

[0021] Figure 2 FIG. 2 is a structural schematic diagram of a cleaning device according to some embodiments of the present application after the cover is closed;

[0022] Figure 3 FIG. 3 is a structural schematic diagram of the internal structure of a cleaning device according to some embodiments of the present application; and

[0023] Figure 4 FIG. 4 is a right view of the cleaning device. Figure 3 The cleaning device provided by the present application has the following advantages, but is not limited to the following: DETAILED DESCRIPTION

[0024] The following description provides specific application scenarios and requirements of the present application, so that those skilled in the art can manufacture and use the content of the present application. Various local modifications of the disclosed embodiments are obvious to those skilled in the art, and the general principles defined herein can be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the shown embodiments, but is consistent with the widest scope of the claims.

[0025] The application provides a cleaning device, which comprises a cleaning cavity, at least one bearing table located in the cleaning cavity, the bearing table being used for bearing and fixing a piece to be cleaned, a liquid inlet assembly, the liquid inlet assembly comprising at least one first liquid outlet nozzle and at least one second liquid outlet nozzle, the first liquid outlet nozzle being arranged above the bearing table and used for spraying the cleaning liquid towards the upper surface of the piece to be cleaned, the second liquid outlet nozzle being arranged at the side of the bearing table and used for spraying the cleaning liquid towards the side surface of the piece to be cleaned, and an air inlet assembly arranged at least at one side of the bearing table and used for blowing air towards the piece to be cleaned.

[0026] The cleaning device provided by the application can clean the upper surface and the side surface of the piece to be cleaned simultaneously, when the piece to be cleaned is a reticle box, the inner surface of the reticle box can be upward, and the cleaning of the inner surface and the outer sidewall of the reticle box can be completed. The cleaning device provided by the application is further provided with the air inlet assembly, and the drying of the piece to be cleaned can be completed by blowing air towards the piece to be cleaned. In addition, the bearing table provided by the application can be multiple, and the cleaning of multiple pieces to be cleaned can be realized.

[0027] The cleaning device provided by the application will be described in detail below in combination with embodiments and drawings.

[0028] Reference Figures 1 to 4 The application provides a cleaning device, which comprises a cleaning cavity 100, at least one bearing table 200, a liquid inlet assembly and an air inlet assembly.

[0029] In some embodiments, reference Figure 1 and Figure 2 The cleaning cavity 100 comprises a cavity 110 with a top opening and a cover 120 matched with the opening, the opening being used for the piece to be cleaned to enter and exit the cavity 110. When the piece to be cleaned needs to be cleaned, an operator moves the cover 120 to expose the opening and places the piece to be cleaned into the cavity 110, then covers the cover 120 to the opening, starts the cleaning work, and again moves the cover 120 to take out the piece to be cleaned from the cavity 110 after the cleaning is completed.

[0030] In some embodiments, the cleaning cavity 100 further comprises an operation plate 130 arranged outside the cavity 110 and integrally connected with the bottom of the cavity 110.

[0031] In some embodiments, the outer wall of the cover 120 is fixedly connected with a handle 121, and an operator can move the cover 120 by holding the handle 121.

[0032] Reference Figure 1 and Figures 3-4The bearing table 200 provided by the application is located in the cavity 110 and is used for bearing and fixing the cleaning object.

[0033] In some embodiments, the bearing table 200 is provided with a plurality of fixing clamps on the top surface thereof, so as to clamp the cleaning object. Figure 3

[0034] In some embodiments, the fixing clamp comprises a first clamping plate 211 and a second clamping plate 212, the first clamping plate 211 is fixedly connected with the top surface of the bearing table 200, the second clamping plate 212 is located on the side of the first clamping plate 211 away from the bearing table 200, and the first clamping plate 211 and the second clamping plate 212 are connected through a torsion spring (not shown in the figure). Figure 4

[0035] In the natural state, the first end of the second clamping plate 212 is in contact with the first clamping plate 211, and pressing the second end of the second clamping plate 212 can make the first end of the second clamping plate 212 move away from the first clamping plate 211. When it is needed to clamp the cleaning object, the second end of the second clamping plate 212 is pressed, the cleaning object is placed between the first end of the second clamping plate 212 and the first clamping plate 211, and the second end of the second clamping plate 212 is released, so that the clamping of the cleaning object is completed.

[0036] The number of the fixing clamps can be two, three or four, etc. For example, in some embodiments, the number of the fixing clamps is four, so as to clean the square cleaning object, such as a mask box.

[0037] In some embodiments, the bearing table 200 is connected with a motor 220 for driving the bearing table 200 to rotate. The bearing table 200 is rotated, so as to drive the cleaning object to rotate.

[0038] The number of the bearing tables 200 can be one, two, three or four, etc. In some embodiments, the number of the bearing tables 200 is two. When the cleaning object is a mask box, the bottom cover and the top cover of the mask box can be fixed to the two bearing tables 200 respectively, and the bottom cover and the top cover are cleaned at the same time.

[0039] In some embodiments, the bearing table 200 is provided with a plurality of fixing clamps on the top surface thereof, so as to clamp the cleaning object. Figure 1 Figures 3-4 The liquid inlet assembly comprises at least one first liquid outlet nozzle 310, the first liquid outlet nozzle 310 is arranged above the bearing table 200 and is used for spraying the cleaning liquid towards the upper surface of the cleaning object.

[0040] ​​​When the to-be-cleaned piece is a reticle box, the inner surface of the top cover or the bottom cover of the reticle box is arranged towards the first liquid outlet nozzle 310 during cleaning, so that the inside of the reticle box can be cleaned.

[0041] In some embodiments, the number of the first liquid outlet nozzles 310 is the same as the number of the bearing tables 200, and the first liquid outlet nozzles 310 are matched with the bearing tables 200 one by one, respectively towards the upper side of the corresponding bearing tables 200.

[0042] The liquid inlet assembly further comprises at least one second liquid outlet nozzle 410 arranged at the side of the bearing table 200, for spraying the cleaning liquid towards the side surface of the to-be-cleaned piece. For example, the second liquid outlet nozzle 410 is arranged between the bearing table 200 and the wall of the cavity 110, and the second liquid outlet nozzle 410 is arranged towards the bearing table 200.

[0043] In some embodiments, the number of the second liquid outlet nozzles 410 is the same as the number of the bearing tables 200.

[0044] By arranging the first liquid outlet nozzles 310 and the second liquid outlet nozzles 410 with different liquid outlet directions, the upper surface and the side surface of the to-be-cleaned piece can be cleaned at the same time.

[0045] In some embodiments, the liquid inlet assembly further comprises a first liquid conveying pipeline 320 and at least one second liquid conveying pipeline 420.

[0046] The input end of the first liquid conveying pipeline 320 is connected with a liquid source (for example, a deionized water source), and the output end of the first liquid conveying pipeline 320 is divided into at least one, respectively connected with at least one first liquid outlet nozzle 310, that is, the number of the output end of the first liquid conveying pipeline 320 is the same as the number of the first liquid outlet nozzles 310.

[0047] In some embodiments, the input end of the second liquid conveying pipeline 420 is connected with the liquid source, and the output end of the second liquid conveying pipeline 420 is connected with any one of the second liquid outlet nozzles 410.

[0048] In some embodiments, the number of the second liquid conveying pipelines 420 is the same as the number of the second liquid outlet nozzles 410.

[0049] In some embodiments, the liquid inlet assembly further comprises a first fixed support 330 and a second fixed support 430.

[0050] The first end of the first fixed support 330 is fixed in the cavity 110, for example, at the bottom of the cavity 110, and the second end of the first fixed support 330 is connected to at least one first extending arm 331, which extends above the carrier table 200, and the output end of the first liquid delivery pipeline 320 is fixed on the first extending arm 331.

[0051] In some embodiments, the number of the first extending arms 331 is the same as the number of the output ends of the first liquid delivery pipeline 320. For example, referring to Figure 3 and 4 , the first fixed support 330 is arranged between two carrier tables 200, the first fixed support 330 is in a substantially T shape, and the number of the first extending arms 331 is two.

[0052] The first end of the second fixed support 430 is fixed in the cavity 110, and the second end of the second fixed support 430 is connected to a second extending arm 431, which extends to the side edge of the carrier table 200; and the output end of the second liquid delivery pipeline is fixed on the second extending arm 431.

[0053] In some embodiments, the number of the second fixed support 430 is the same as the number of the output ends of the second liquid delivery pipeline. For example, referring to Figure 3 and 4 , the number of the second fixed support 430 is two. In some embodiments, two second fixed supports 430 are respectively fixed between different carrier tables 200 and the cavity wall of the cavity 110.

[0054] In some embodiments, the cleaning device further comprises an air inlet assembly arranged on at least one side of the carrier table 200 for blowing gas to the to-be-cleaned piece.

[0055] In some embodiments, referring to Figure 3 and 4 , the cleaning assembly comprises at least one air outlet nozzle 510, the number of the air outlet nozzles 510 is the same as the number of the carrier tables 200, and the air outlet of each air outlet nozzle 510 is respectively directed to the carrier table 200.

[0056] In some embodiments, referring to Figure 3 and 4 , the air inlet assembly further comprises a gas delivery pipeline 520 and a third fixed support 530.

[0057] The input end of the gas delivery pipeline 520 is connected with a gas source (for example, a compressed air source), and the output end of the gas delivery pipeline 520 is divided into at least one, and each is connected with at least one of the gas outlet nozzles 510.

[0058] In some embodiments, the number of gas delivery ends is the same as the number of the gas outlet nozzles 510.

[0059] In some embodiments, referring to Figure 3 and 4 , the first end of the third fixed support 530 is fixed in the cavity 110, the second end of the third fixed support 530 is connected with at least one third extending arm 531, the third extending arm 531 extends above the carrying table 200, and the output end of the gas delivery pipeline 520 is fixed on the third extending arm 531.

[0060] In some embodiments, the third fixed support 530 is arranged between two carrying tables 200 and opposite to the first fixed support 330.

[0061] In some embodiments, the number of the third extending arms 531 is the same as the number of the output ends of the gas delivery pipeline 520. For example, referring to Figure 3 , the third fixed support 530 is in a substantially T shape, and the number of the third extending arms 531 is two.

[0062] In some embodiments, referring to Figure 3 , the first liquid delivery pipeline 320, the second liquid delivery pipeline 420 and the gas delivery pipeline 520 are respectively provided with a first flow control meter 610, a second flow control meter 620 and a third flow control meter 630. It should be noted that, in order to make the drawings simple and clear, the connection between the first liquid delivery pipeline 320, the second liquid delivery pipeline 420 and the gas delivery pipeline 520 and the first flow control meter 610, the second flow control meter 620 and the third flow control meter 630 is not shown in the drawings.

[0063] In some embodiments, the first flow control meter 610, the second flow control meter 620 and the third flow control meter 630 are fixed on the operation plate 130.

[0064] In some embodiments, referring to Figure 2 , the first liquid delivery pipeline 320, the second liquid delivery pipeline 420 and the gas delivery pipeline 520 enter the inside of the cavity 110 through the through holes 111 opened in the side wall of the cavity 110.

[0065] In some embodiments, referring to Figure 1and Figure 3 The cleaning device further comprises a liquid discharge pipeline 700, which is arranged at the bottom of the cavity 110 away from the support table 200. The waste liquid generated during the cleaning process flows out of the cavity 110 through the liquid discharge pipeline 700.

[0066] In some embodiments, the cleaning process of the reticle box using the cleaning device provided in the present application is as follows:

[0067] The cover 120 is moved to expose the opening of the cavity 110, the top cover and the bottom cover of the reticle box are respectively fixed on the two support tables 200, and the inner surfaces of the top cover and the bottom cover are arranged towards the first liquid outlet nozzle 310. The cover 120 is moved again to close the cavity 110.

[0068] The motor 220 is turned on to drive the rotation of the support table 200, thereby driving the rotation of the top cover and the bottom cover.

[0069] The first flow controller 610 and the second flow controller 620 are adjusted to make the cleaning liquid (for example, deionized water) flow to the first liquid outlet nozzle 310 and the second liquid outlet nozzle 410 through the first liquid delivery pipeline 320 and the second liquid delivery pipeline 420 respectively, and to clean the inner surfaces and the side walls of the top cover and the bottom cover respectively. The water flow rate can be set to be, for example, 500 mL / min, and the rotation speed of the motor 220 can be set to be 100 rpm.

[0070] After a period of cleaning, for example, 5 minutes, the first flow controller 610 and the second flow controller 620 are adjusted to stop delivering the cleaning liquid, and the third flow controller 630 is adjusted to make the gas (for example, compressed air) flow to the gas outlet nozzle 510 through the gas delivery pipeline 520, and to dry the inner surfaces of the top cover and the bottom cover. The gas flow rate can be set to be 1000 mL / min, the rotation speed of the motor 220 can be set to be 1000 rpm, and the air blowing time can be set to be 15 min. Subsequently, the third flow controller 630 is adjusted to stop the gas flow, and the cleaning is completed.

[0071] The beneficial effects of the cleaning device provided in the present application include but are not limited to the following:

[0072] The cleaning device provided by the application can clean the upper surface and the side surface of the to-be-cleaned piece at the same time, and when the to-be-cleaned piece is a mask box, the inner surface of the mask box can be upward, so that the cleaning of the inner surface and the outer side wall of the mask box can be completed. The cleaning device provided by the application is further provided with an air inlet assembly, and the drying of the to-be-cleaned piece can be completed by blowing gas to the to-be-cleaned piece. In addition, the bearing table provided by the application can be multiple, and the cleaning of multiple to-be-cleaned pieces can be realized, that is, the top cover and the bottom cover of the mask box can be cleaned at the same time.

[0073] It should be noted that different embodiments can produce different beneficial effects, and in different embodiments, the beneficial effects that can be produced can be any one or a combination of the above, or any other beneficial effects that can be obtained.

[0074] The above has described the basic concept, and it is obvious that the above detailed disclosure is only used as an example and does not limit the present application. Although the modifications, improvements and corrections of the present application are not explicitly described, the skilled in the art can make various modifications, improvements and corrections. Such modifications, improvements and corrections are suggested in the present application, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of the present application.

[0075] It should be noted that in the description of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting", "fixing" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be rotary connection, or sliding connection; it can be direct connection, or indirect connection through intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood in combination with the specific circumstances.

[0076] In addition, when the terms "first", "second", "third" and the like are used to describe various features in the present application, these terms are only used to distinguish these features, and cannot be understood as indicating or implying the relevance, relative importance between the features, or implicitly indicating the number of the indicated features.

[0077] In addition, the description herein makes reference to idealized illustrative cross-sectional and / or plan and / or elevational views. Accordingly, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and / or tolerances, are to be expected. Thus, examples of the embodiments should not be construed as limited to the precise shapes illustrated herein but are to include deviations in shapes that result from such

[0078] Also, the use of "an" or "the" to refer to an element or class of elements, along with the

[0079] Also, the use of "an" or "the" to refer to an element or class of elements, along with the

[0080] Finally, it should be understood that the embodiments described herein are intended to be illustrative only and that the scope of the present application is properly determined by a fair reading (and a fair construction) of the claims that follow. Thus, although the present application has been described in detail with respect to specific embodiments thereof, it will be apparent to those skilled in the art that various alterations, modifications, and improvements can be made.

Claims

1. A cleaning device, characterized in that, The application relates to a cleaning device, comprising: a cleaning cavity; at least one supporting table in the cleaning cavity, the supporting table being used for supporting and fixing a cleaning object; a liquid inlet assembly, the liquid inlet assembly comprising at least one first liquid outlet nozzle and at least one second liquid outlet nozzle, the first liquid outlet nozzle being arranged above the supporting table and used for spraying cleaning liquid towards the upper surface of the cleaning object, and the second liquid outlet nozzle being arranged at the side of the supporting table and used for spraying the cleaning liquid towards the side surface of the cleaning object; and an air inlet assembly arranged at least at one side of the supporting table and used for blowing air towards the cleaning object.

2. The cleaning apparatus of claim 1, wherein The liquid inlet assembly further comprises: a first liquid conveying pipeline, the input end of the first liquid conveying pipeline being connected with a liquid source, and the output end of the first liquid conveying pipeline being divided into at least one and connected with at least one first liquid outlet nozzle respectively; and at least one second liquid conveying pipeline, the input end of the second liquid conveying pipeline being connected with the liquid source, and the output end of the second liquid conveying pipeline being connected with any one second liquid outlet nozzle.

3. The cleaning apparatus of claim 2, wherein The liquid inlet assembly further comprises a first fixed support and a second fixed support, the first end of the first fixed support being fixed in the cleaning cavity, the second end of the first fixed support being connected with at least one first extending arm, the first extending arm extending above the supporting table, and the output end of the first liquid conveying pipeline being fixed on the first extending arm; the first end of the second fixed support being fixed in the cleaning cavity, the second end of the second fixed support being connected with a second extending arm, and the second extending arm extending to the side of the supporting table; and the output end of the second liquid conveying pipeline being fixed on the second extending arm. The air inlet assembly comprises:

4. The cleaning apparatus of claim 3, wherein at least one air outlet nozzle, the number of the air outlet nozzles being the same as the number of the supporting tables, and the air outlet of each air outlet nozzle being arranged towards the supporting table. The air inlet assembly further comprises:

5. The cleaning apparatus of claim 4, wherein a gas conveying pipeline, the input end of the gas conveying pipeline being connected with a gas source, and the output end of the gas conveying pipeline being divided into at least one and connected with at least one air outlet nozzle respectively; and a third fixed support, the first end of the third fixed support being fixed in the cleaning cavity, the second end of the third fixed support being connected with at least one third extending arm, the third extending arm extending above the supporting table, and the output end of the gas conveying pipeline being fixed on the third extending arm. The number of the supporting tables is two, the first fixed support is arranged between the two supporting tables, the number of the second fixed supports is two and arranged at the side of the two supporting tables respectively, and the third fixed support is arranged between the two supporting tables and opposite to the first fixed support.

6. The cleaning apparatus of claim 5, wherein The first liquid conveying pipeline, the second liquid conveying pipeline and the gas conveying pipeline are respectively provided with a first flow control meter, a second flow control meter and a third flow control meter.

7. The cleaning apparatus of claim 5, wherein A liquid discharge pipeline is further arranged at the bottom of the cleaning cavity and away from the supporting table.

8. The cleaning apparatus of claim 1, wherein ​ 9. The cleaning apparatus of claim 1, wherein The cleaning cavity comprises a cavity with a top opening and a cover body matched with the opening, and the opening is used for the to-be-cleaned piece to enter or exit the cavity.

10. The cleaning apparatus of claim 9, wherein An outer wall of the cover body is fixedly connected with a handle.

11. The cleaning apparatus of claim 1, wherein A top surface of the bearing table is provided with a plurality of fixed clamps to clamp the to-be-cleaned piece.

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