Water cooling screen for changing local cooling position

Abstract

The utility model relates to the technical field of semiconductor material production equipment, and discloses a water-cooling screen for changing a local cooling position, which comprises a water-cooling screen shell, and an upper layer independent cooling water channel is arranged above the inner side of the water-cooling screen shell. According to the water cooling screen for changing the local cooling position, the cooling position can be rapidly switched by controlling opening and closing of the pressure regulating valve, the requirement for rapid temperature regulation in the monocrystalline silicon production process is met, the water cooling screen has the advantage of being rapid in response, the temperature sensor and the controller are combined, accurate control over the cooling process is achieved, and the production efficiency is improved. The temperature stability in the monocrystalline silicon growth process is ensured, the cooling strength can be adjusted according to actual needs when the water-cooling screen is used, unnecessary energy consumption is reduced, the production efficiency is improved, the water-cooling screen adopts a modular design, so that all parts are easy to disassemble and replace and convenient to maintain, and the practicability of the water-cooling screen is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor material production equipment, specifically to a water cooling screen for changing local cooling position. BACKGROUND

[0002] In the single crystal pulling process, the crystallization latent heat generated by the phase change of the object can destroy the ideal balance state of the melt in the single crystal furnace crucible and the crystallization surface, and this part of the crystallization latent heat is mainly transmitted to the water cooling screen in the form of heat radiation and absorbed by the water cooling screen to achieve the ideal crystallization state. Controlling the crystal growth temperature is the key to ensuring the quality and production efficiency of the crystal.

[0003] The existing technology authorization announcement number CN219470270U patent document provides a water cooling screen structure, the field of view part of the opening design makes the image acquisition equipment capture the field of view of the crystal bar not affected, the water cooling screen and the pipeline part carry out double cooling to the crystal bar, therefore improve the cooling effect of the water cooling screen structure, thereby improve the growth speed of the crystal bar.

[0004] However, the existing water cooling screen is not convenient for quick adjustment of liquid temperature and accurate control of local cooling position according to use requirements when in use, which limits the flexibility and efficiency of the single crystal silicon production process to some extent, therefore, we need to provide a water cooling screen capable of realizing quick adjustment of liquid temperature and accurate control of local cooling position. UTILITY MODEL CONTENT

[0005] (I) Technical problem solved

[0006] The utility model aims at providing a water cooling screen for changing local cooling position to solve the problem that the existing water cooling screen is not convenient for quick adjustment of liquid temperature and accurate control of local cooling position according to use requirements when in use in the above background technology.

[0007] (II) Technical scheme

[0008] To achieve the above purpose, the utility model provides the following technical scheme: a water cooling screen for changing local cooling position, including water cooling screen shell, the upper side of water cooling screen shell inside is provided with upper layer independent cooling water channel, the lower side of water cooling screen shell inside is provided with lower layer independent cooling water channel, pressure regulating valve is set between upper layer independent cooling water channel and lower layer independent cooling water channel;

[0009] The upper side of water cooling screen shell is provided with conveying mechanism, and the outer side of water cooling screen shell is provided with temperature control mechanism and driving mechanism.

[0010] Preferably, the conveying mechanism includes a water inlet pipe, the water inlet pipe is fixedly installed on one side of the upper surface of the water cooling screen shell, and the water inlet pipe is connected with the upper layer independent cooling water channel.

[0011] Preferably, the upper surface of the water-cooled screen housing is fixedly provided with a water outlet main pipe on the side away from the water inlet pipe, the bottom end of the water outlet main pipe extends into the upper independent cooling water channel, and the outer side of the water outlet main pipe is fixedly connected with a water outlet branch pipe, and the bottom end of the water outlet branch pipe extends into the lower independent cooling water channel.

[0012] Preferably, the temperature control mechanism comprises a support plate fixedly arranged on the outer surface of the water-cooled screen housing, and a controller fixedly arranged on the upper surface of the support plate and electrically connected with the pressure regulating valve.

[0013] Preferably, the outer surface of the water-cooled screen housing is provided with a first temperature sensor, and the sensing probe of the first temperature sensor is located in the upper independent cooling water channel and electrically connected with the controller.

[0014] Preferably, the outer surface of the water outlet main pipe is provided with a second temperature sensor, and the sensing probe of the second temperature sensor is located in the water outlet main pipe and electrically connected with the controller.

[0015] Preferably, the driving mechanism comprises a driving water pump fixedly arranged on the upper surface of the support plate, a communication pipe fixedly connected with the driving water pump on the side away from the support plate, and a discharge pipe fixedly connected with the outer surface of the driving water pump.

[0016] Compared with the prior art, the water-cooled screen has the advantages that:

[0017] The water-cooled screen for changing the local cooling position can quickly switch the cooling position by controlling the opening and closing of the pressure regulating valve, meets the demand for rapid temperature adjustment in the single crystal silicon production process, has the characteristics of rapid response, realizes the accurate control of the cooling process in combination with the temperature sensor and the controller, ensures the temperature stability in the single crystal silicon growth process, can adjust the cooling intensity according to the actual needs during use, reduces unnecessary energy consumption, improves the production efficiency, and the modular design of the water-cooled screen makes the components easy to disassemble and replace, facilitates the maintenance and maintenance, and improves the practicability of the water-cooled screen. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a three-dimensional structure schematic view of the utility model;

[0019] Figure 2 is a water-cooled screen housing cross-section structure schematic view of the utility model;

[0020] Figure 3A three-dimensional structure schematic diagram of the driving mechanism of the utility model;

[0021] Figure 4 A local detail enlarged structure schematic diagram of the branch pipe of the water outlet pipe of the utility model;

[0022] Figure 5 A sectional structure schematic diagram of the second temperature sensor of the utility model.

[0023] In the drawing: 1, water cooling screen shell; 2, upper layer independent cooling water channel; 3, lower layer independent cooling water channel; 4, pressure regulating valve; 5, conveying mechanism; 501, water inlet pipe; 502, water outlet pipe main pipe; 503, water outlet pipe branch pipe; 6, temperature control mechanism; 601, support plate; 602, controller; 603, first temperature sensor; 604, second temperature sensor; 7, driving mechanism; 701, driving water pump; 702, communication pipe; 703, leading-out pipe. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0025] Please refer to Figure 1 - Figure 5The utility model provides a technical scheme: a water cooling screen for changing local cooling position, including water cooling screen shell 1, the upper portion of water cooling screen shell 1 inside is provided with upper layer independent cooling water channel 2, the lower portion of water cooling screen shell 1 inside is provided with lower layer independent cooling water channel 3, is provided with pressure regulating valve 4 between upper layer independent cooling water channel 2 and lower layer independent cooling water channel 3, the upper portion of water cooling screen shell 1 is provided with conveying mechanism 5, the outside of water cooling screen shell 1 is provided with temperature control mechanism 6 and drive mechanism 7, this water cooling screen shell 1 adopts high strength, high temperature resistance, corrosion -resistant material and is made to bear the high temperature environment in the single crystal silicon growth process, upper layer independent cooling water channel 2 and lower layer independent cooling water channel 3 are two independent cooling water channels, correspond to the upper portion and lower portion of water cooling screen respectively, upper layer independent cooling water channel 2 and lower layer independent cooling water channel 3 realize the isolation and switching of water flow through specific connecting structure, install pressure regulating valve 4 at the entrance of lower layer independent cooling water channel 3, this pressure regulating valve 4 has the preset opening pressure value, when cooling water pressure reaches or exceeds the value, pressure regulating valve 4 opens, allows cooling water to flow into lower layer independent cooling water channel 3 and carries out overall cooling, when pressure reduces to below the preset value, pressure regulating valve 4 closes, prevents cooling water to continue flowing into lower layer independent cooling water channel 3, upper layer independent cooling water channel 2 plays the cooling effect through other ways (such as the output of water outlet pipe main pipe 502 or the delivery of drive water pump 701) at this time, in the single crystal silicon growth initial stage or the need fast promotion liquid temperature, through increasing the pressure of cooling water system, make pressure regulating valve 4 open, and cooling water mainly flows through lower layer independent cooling water channel 3 of water cooling screen, realizes the fast cooling of overall, helps the fast promotion liquid temperature to the set range, along with the single crystal silicon growth, when needing accurate control local cooling position or reducing liquid temperature, through reducing the pressure of cooling water system, make pressure regulating valve 4 close, cut off the cooling water supply of lower layer independent cooling water channel 3, at this time, upper layer independent cooling water channel 2 continues to play the cooling effect through natural convection or the delivery of drive water pump 701, realizes the local cooling of specific area.

[0026] The conveying mechanism 5 comprises a water inlet pipe 501 fixedly installed on one side of the upper surface of the water-cooled screen shell 1, the water inlet pipe 501 is in communication with the upper layer independent cooling water channel 2, the upper surface of the water-cooled screen shell 1 is fixedly installed with a water outlet pipe main pipe 502 away from the water inlet pipe 501, the bottom end of the water outlet pipe main pipe 502 extends to the inside of the upper layer independent cooling water channel 2, the outer side of the water outlet pipe main pipe 502 is fixedly connected with a water outlet pipe branch pipe 503, the bottom end of the water outlet pipe branch pipe 503 extends to the inside of the lower layer independent cooling water channel 3, the temperature control mechanism 6 comprises a support plate 601 fixedly installed on the outer surface of the water-cooled screen shell 1, the upper surface of the support plate 601 is fixedly installed with a controller 602, the controller 602 is electrically connected with the pressure regulating valve 4, the outer surface of the water-cooled screen shell 1 is provided with a first temperature sensor 603, the sensing probe of the first temperature sensor 603 is located in the inside of the upper layer independent cooling water channel 2, the first temperature sensor 603 is electrically connected with the controller 602, the outer surface of the water outlet pipe main pipe 502 is provided with a second temperature sensor 604, the sensing probe of the second temperature sensor 604 is located in the inside of the water outlet pipe main pipe 502, the second temperature sensor 604 is electrically connected with the controller 602, the driving mechanism 7 comprises a driving water pump 701 fixedly installed on the upper surface of the support plate 601, the driving water pump 701 is fixedly connected with a communication pipe 702 away from the support plate 601, one end of the communication pipe 702 away from the driving water pump 701 is fixedly connected with the water outlet pipe main pipe 502, the outer surface of the driving water pump 701 is fixedly connected with a leading-out pipe 703, the driving water pump 701 works, the cooling water in the upper layer independent cooling water channel 2 after absorbing heat is conveyed to the leading-out pipe 703 through the communication pipe 702 and led out, the first temperature sensor 603 monitors the temperature in the water-cooled screen shell 1 in real time and uploads the data to the controller 602, the second temperature sensor 604 monitors the temperature in the water outlet pipe main pipe 502 in real time and transmits the data to the controller 602, the controller 602 automatically adjusts the pressure of the cooling water system according to the preset temperature control strategy and the real-time temperature data, so as to control the opening and closing of the pressure regulating valve 4.

[0027] Working principle: the water-cooled screen shell 1 is made of high-strength, high-temperature-resistant and corrosion-resistant material to withstand the high-temperature environment during the growth of single crystal silicon, the upper independent cooling water channel 2 and the lower independent cooling water channel 3 are two independent cooling water channels corresponding to the upper and lower parts of the water-cooled screen respectively, the upper independent cooling water channel 2 and the lower independent cooling water channel 3 realize the isolation and switching of water flow through a specific connecting structure, a pressure regulating valve 4 is installed at the inlet of the lower independent cooling water channel 3, the pressure regulating valve 4 has a preset opening pressure value, when the cooling water pressure reaches or exceeds the value, the pressure regulating valve 4 opens to allow the cooling water to flow into the lower independent cooling water channel 3 for overall cooling, and the heat-absorbed cooling water enters the water outlet pipe main pipe 502 through the water outlet pipe branch pipe 503 for output; when the pressure decreases below the preset value, the pressure regulating valve 4 is closed to prevent the cooling water from continuing to flow into the lower independent cooling water channel 3, at this time the upper independent cooling water channel 2 plays a cooling role through other ways (such as the output of the water outlet pipe main pipe 502 or the work of the driven water pump 701, the heat-absorbed cooling water in the upper independent cooling water channel 2 is transported to the guide-out pipe 703 through the communication pipe 702), the first temperature sensor 603 monitors the temperature inside the water-cooled screen shell 1 in real time and uploads the data to the controller 602, the second temperature sensor 604 monitors the temperature inside the water outlet pipe main pipe 502 in real time and transmits the data to the controller 602, the controller 602 automatically adjusts the pressure of the cooling water system according to the preset temperature control strategy and real-time temperature data, so as to control the opening and closing of the pressure regulating valve 4, in the initial stage of single crystal silicon growth or when it is needed to quickly raise the liquid temperature, the pressure of the cooling water system is increased to make the pressure regulating valve 4 open, the cooling water mainly flows through the lower independent cooling water channel 3 of the water-cooled screen to realize overall rapid cooling, which helps to quickly raise the liquid temperature to the set range, as the single crystal silicon growth proceeds, when it is needed to accurately control the local cooling position or reduce the liquid temperature, the pressure of the cooling water system is reduced to make the pressure regulating valve 4 close, cutting off the cooling water supply of the lower independent cooling water channel 3, at this time, the upper independent cooling water channel 2 continues to play a cooling role through natural convection or the transportation of the driven water pump 701 to realize local cooling of a specific area.

[0028] Finally, it should be noted that the above content is only used to illustrate the technical scheme of the present application, and is not a limitation on the protection scope of the present application, and simple modifications or equivalent replacements of the technical scheme of the present application by ordinary skilled in the art do not deviate from the essence and scope of the technical scheme of the present application.

Claims

1. A water-cooled screen for changing the local cooling position, comprising a water-cooled screen housing (1), characterized in that: An upper independent cooling water channel (2) is provided on the upper part of the inner side of the water-cooled screen shell (1), and a lower independent cooling water channel (3) is provided on the lower part of the inner side of the water-cooled screen shell (1). A pressure regulating valve (4) is provided between the upper independent cooling water channel (2) and the lower independent cooling water channel (3). A conveying mechanism (5) is provided on the top of the water-cooled screen housing (1), and a temperature control mechanism (6) and a driving mechanism (7) are provided on the outside of the water-cooled screen housing (1).

2. A water-cooled screen for changing the local cooling position according to claim 1, characterized in that: The conveying mechanism (5) includes a water inlet pipe (501), which is fixedly installed on one side of the upper surface of the water-cooled screen shell (1). The water inlet pipe (501) is connected to the upper independent cooling water channel (2).

3. A water-cooled screen for changing the local cooling position according to claim 2, characterized in that: A main outlet pipe (502) is fixedly installed on the upper surface of the water-cooled screen housing (1) away from the water inlet pipe (501). The bottom end of the main outlet pipe (502) extends into the interior of the upper independent cooling water channel (2). A branch outlet pipe (503) is fixedly connected to the outside of the main outlet pipe (502). The bottom end of the branch outlet pipe (503) extends into the interior of the lower independent cooling water channel (3).

4. A water-cooled screen for changing the local cooling position according to claim 3, characterized in that: The temperature control mechanism (6) includes a support plate (601), which is fixedly installed on the outer surface of the water-cooled screen shell (1). A controller (602) is fixedly installed on the upper surface of the support plate (601), and the controller (602) is electrically connected to the pressure regulating valve (4).

5. A water-cooled screen for changing the local cooling position according to claim 4, characterized in that: The outer surface of the water-cooled screen housing (1) is provided with a first temperature sensor (603). The sensing probe of the first temperature sensor (603) is located inside the upper independent cooling water channel (2). The first temperature sensor (603) is electrically connected to the controller (602).

6. A water-cooled screen for changing the local cooling position according to claim 5, characterized in that: A second temperature sensor (604) is provided on the outer surface of the main outlet pipe (502). The sensing probe of the second temperature sensor (604) is located inside the main outlet pipe (502). The second temperature sensor (604) is electrically connected to the controller (602).

7. A water-cooled screen for changing the local cooling position according to claim 6, characterized in that: The driving mechanism (7) includes a driving water pump (701), which is fixedly installed on the upper surface of the support plate (601). A connecting pipe (702) is fixedly connected to the side of the driving water pump (701) away from the support plate (601). The end of the connecting pipe (702) away from the driving water pump (701) is fixedly connected to the main outlet pipe (502). An outlet pipe (703) is fixedly connected to the outer surface of the driving water pump (701).

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