Single crystal furnace thermal field thermal insulation cylinder clamp and single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnace thermal fields, in particular to a single crystal furnace thermal field thermal insulation cylinder clamp and a single crystal furnace, which comprise a net structure, the net structure has toughness and can be bent, and two opposite ends of the net structure are respectively a first end and a second end. The first end is provided with a plurality of buckles side by side in the width direction of the net-shaped structure, the second end is provided with a plurality of penetrating strips side by side in the width direction of the net-shaped structure, the number of the buckles is the same as that of the penetrating strips, the buckles and the penetrating strips are arranged in a one-to-one correspondence mode, and the buckles are used for locking the penetrating strips. In the felt wrapping process of the heat preservation cylinder, soft felt can be fixed, the outer portion of the heat preservation cylinder is evenly stressed, the soft felt is effectively protected against damage, in the carrying process of the heat preservation cylinder, it can be guaranteed that the soft felt is not prone to displacement, and the completeness and stability of the heat preservation cylinder are better protected.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal furnace heat field technical field, specifically, relate to a single crystal furnace heat field heat preservation cylinder clamp and single crystal furnace. BACKGROUND

[0002] In the single crystal silicon manufacturing industry, most of them use the Czochralski method to produce single crystals in a single crystal furnace. This production method requires precise control of temperature distribution to ensure the quality and performance of single crystal silicon. In order to achieve this goal, a multi-layer heat preservation structure is usually used, including an upper heat preservation cylinder, a middle heat preservation cylinder and a lower heat preservation cylinder, which maintain the required temperature environment through heat conduction and radiation. In the process of preparing single crystal silicon by the Czochralski method, the stability and uniformity of the heat field are crucial, as they directly affect the uniformity of crystal growth and the quality of the final product.

[0003] At present, the main method of fixing the heat preservation cylinder is to use strip-shaped clamps. Specifically, the upper heat preservation cylinder is usually fixed with two clamps (the two clamps are narrow in width, and are generally distributed in an up-down manner on the outside of the upper heat preservation cylinder), while the middle heat preservation cylinder and the lower heat preservation cylinder are fixed with three clamps (the three clamps are generally distributed in an up-middle-down manner). This method can meet the basic needs of single crystal silicon production to some extent, but also has some limitations and problems. Since the clamps are narrow in size, they can only fix the local soft felt on the outside of the heat preservation cylinder, while the soft felt between each clamp is not fixed. This design and installation method of the clamps may affect the fixing effect of the soft felt, and thus affect the stability and uniformity of the heat field. In addition, if the clamps are designed unreasonably or installed improperly, it may cause excessive or insufficient local stress, affecting the heat preservation effect and the stability of the heat field. SUMMARY

[0004] The utility model aims at providing a single crystal furnace heat field heat preservation cylinder clamp, which can fix the soft felt during the process of wrapping the heat preservation cylinder with felt, so that the external part of the heat preservation cylinder is uniformly stressed, effectively protecting the soft felt from damage, and ensuring that the soft felt is not easily displaced during the process of lifting the heat preservation cylinder, thus better protecting the integrity and stability of the heat preservation cylinder.

[0005] Another purpose of the utility model is to provide a single crystal furnace, which uses the single crystal furnace heat field heat preservation cylinder clamp to fix the soft felt during the process of wrapping the heat preservation cylinder with felt, so that the external part of the heat preservation cylinder is uniformly stressed, effectively protecting the soft felt from damage, and ensuring that the soft felt is not easily displaced during the process of lifting the heat preservation cylinder, thus better protecting the integrity and stability of the heat preservation cylinder.

[0006] The technical solution of the utility model is as follows:

[0007] A single crystal furnace heat field heat preservation cylinder clamp, comprising a net structure, the net structure itself has flexibility and can be bent, opposite ends of the net structure are a first end and a second end respectively, a plurality of buckles are arranged side by side along the width direction of the net structure at the first end, a plurality of through strips are arranged side by side along the width direction of the net structure at the second end, the number of the buckles is the same as that of the through strips and the buckles are arranged one by one in correspondence with the through strips, and the buckles are used for locking the through strips.

[0008] Further, the net structure as a whole is rectangular, the width of the net structure matches the height of the single crystal furnace heat preservation cylinder, and the length of the net structure matches the circumference of the single crystal furnace heat preservation cylinder.

[0009] Further, the net structure comprises a plurality of mesh holes, and the mesh holes are rectangular mesh holes.

[0010] Further, the length direction of the rectangular mesh hole is consistent with the length direction of the net structure.

[0011] Further, the net structure comprises a plurality of rows of the rectangular mesh holes, and the rectangular mesh holes of adjacent two rows are arranged in interlaced mode.

[0012] Further, the width of the rectangular mesh hole is L1, and the length is L2, and the following conditions are met: 150mm≤L1≤200mm, and 220mm≤L2≤300mm.

[0013] Further, a plurality of connecting bands are arranged side by side along the width direction of the net structure at the first end, the connecting bands are arranged one by one in correspondence with the length direction of the through strips, and the buckles are fixedly arranged on the connecting bands.

[0014] Further, the connecting band, the through strip and the net structure are an integral forming structure.

[0015] Further, the width of the net structure is L3, and the length is L4, and the following conditions are met: 500mm≤L3≤600mm, and 4000mm≤L4≤5000mm.

[0016] A single crystal furnace, comprising a heat preservation cylinder, the outer side of the lower heat preservation cylinder is covered with soft felt to form a soft felt layer, and further comprising the single crystal furnace heat field heat preservation cylinder clamp, the outer side of the soft felt layer of the heat preservation cylinder is respectively provided with the single crystal furnace heat field heat preservation cylinder clamp, and the through strip is arranged in the buckle and locked by the buckle to tighten the soft felt layer.

[0017] Compared with the prior art, the single crystal furnace heat field heat preservation cylinder clamp has the following beneficial effects:

[0018] The application provides a single crystal furnace heat field heat preservation cylinder clamp, after the soft felt outside the heat preservation cylinder is wrapped, the net structure can be folded due to the flexibility of the net structure, the net structure is covered outside the soft felt (the height of the net structure can be adjusted according to the height of the heat preservation cylinder, that is, the width of the net structure is matched with the height of the heat preservation cylinder), and all the rods are inserted into the corresponding buckles, when the rods are inserted into the buckles and reach the limit position, the buckle is locked to lock the rod, when all the rods are locked by the buckle, the soft felt outside the heat preservation cylinder is covered and fixed, the clamp can uniformly disperse the pressure due to the design of the net structure, the heat preservation cylinder is uniformly stressed outside, the soft felt is effectively protected and damaged, the soft felt is not easily displaced during the lifting of the heat preservation cylinder, the integrity and stability of the heat preservation cylinder are better protected, the possibility of deformation or displacement of the heat preservation cylinder due to uneven pressure is reduced, the accurate position of the heat preservation cylinder in the single crystal furnace is maintained, and the stability of the heat preservation effect of the heat preservation cylinder is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments, and it should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation to the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0020] Figure 1 It is a front view structural schematic diagram of the single crystal furnace heat field heat preservation cylinder clamp of the present application.

[0021] Figure 2 It is a structural schematic diagram of the single crystal furnace heat field heat preservation cylinder clamp of the present application.

[0022] In the drawings:

[0023] 10-clamp; 1-net structure; 101-rectangular mesh;

[0024] 2-rod; 3-buckle; 4-connection belt; 5-heat preservation cylinder. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical scheme in the embodiments of the present application, and obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the application provided in the drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based upon the embodiments of the application, all other embodiments that would be obvious to one of ordinary skill in the art and that are within the scope of the application belong to the scope of the application.

[0027] It should be noted that similar reference numbers and letters refer to similar items in the following drawings, and therefore, once an item is defined in one drawing, it need not be further defined and explained in subsequent drawings.

[0028] In the description of the application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the application is usually placed, and are merely for the convenience of describing the application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the application. In addition, the terms "first", "second", "third", and the like are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0029] In addition, the terms "horizontal", "vertical", "overhanging", and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0030] In the description of the application, it should also be noted that unless otherwise explicitly specified and limited, the terms "provided", "mounted", "connected", "connected" should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0031] Some embodiments of the application will be described in detail below with reference to the accompanying drawings. In the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

[0032] Embodiment 1

[0033] The single crystal furnace insulation cylinder is a key component used in the process of manufacturing semiconductor materials. In the production of semiconductor materials such as single crystal silicon, crystal growth is carried out through a single crystal furnace. The single crystal furnace is a device that can accurately control temperature and environment, ensuring that the crystal can grow under highly pure and stable conditions.

[0034] The insulation cylinder (also known as an insulation cover or insulation sleeve) is a component within the single crystal furnace, and its main function is to maintain a high-temperature environment during growth, ensuring that the single crystal silicon rod can grow at a constant speed. It is usually made of materials that can withstand high temperatures and have excellent heat insulation properties, such as graphite, silicon carbide, or ceramics. The design of the insulation cylinder must be able to withstand extremely high temperatures while maintaining uniform temperature distribution, which is crucial for ensuring crystal quality.

[0035] The functions of the insulation cylinder include:

[0036] 1. Maintaining high temperature: Ensuring that the interior of the single crystal furnace is maintained at the required high temperature, which is critical for the growth of silicon crystals.

[0037] 2. Temperature uniformity: Providing a uniform heating environment, reducing temperature fluctuations, and improving crystal quality.

[0038] 3. Heat insulation: Reducing heat loss, reducing energy consumption, and also protecting the external environment from high temperatures.

[0039] In summary, the single crystal furnace insulation cylinder is a crucial component that directly affects the quality and production efficiency of semiconductor materials. The insulation cylinder is generally divided into upper, middle, and lower insulation cylinders (as described in the background art).

[0040] In order to solve the technical problems existing in the prior art, the present embodiment provides a single crystal furnace thermal field insulation cylinder clamp (hereinafter referred to as clamp 10), which comprises a net structure 1, the net structure 1 itself has flexibility and can be bent, the opposite ends of the net structure 1 are respectively a first end and a second end, a plurality of buckles 3 are arranged side by side along the width direction of the net structure 1 at the first end, a plurality of bars 2 are arranged side by side along the width direction of the net structure 1 at the second end, the number of buckles 3 and bars 2 is the same and one-to-one correspondence is arranged, the buckle 3 is used for locking the bar 2, the bar 2 is inserted into the buckle 3 and locked and fixed by the buckle 3, so as to realize the function of the clamp.

[0041] In this embodiment, the net structure 1 is overall rectangular, the width of the net structure 1 matches the height of the single crystal furnace insulation cylinder 5, and the length of the net structure 1 matches the circumference of the single crystal furnace insulation cylinder 5. When the clamp 10 is wrapped outside the insulation cylinder 5, the width of the net structure 1 of the clamp 10 is equivalent to the height of the insulation cylinder 5, which can uniformly fix the soft felt outside the insulation cylinder 5 compared with the prior art, and can uniformly disperse the pressure, so that the soft felt outside the insulation cylinder 5 is uniformly stressed, and the fixing effect of the soft felt outside the insulation cylinder 5 is improved.

[0042] The net structure 1 includes a plurality of mesh holes, and the shape of the mesh holes of the net structure 1 can adopt various shapes, such as circular, regular polygon, irregular polygon or other irregular shape, but it is necessary to try to meet the condition that the shapes of all mesh holes of the net structure 1 are the same and the sizes of all mesh holes of the net structure 1 are the same (except for the mesh holes at both ends of the net structure 1).

[0043] This embodiment provides a preferred embodiment, the mesh holes of the net structure 1 adopt rectangular mesh holes 101, and the length direction of the rectangular mesh holes 101 is consistent with the length direction of the net structure 1, the net structure 1 includes a plurality of rows of the rectangular mesh holes 101, and the adjacent two rows of the rectangular mesh holes 101 are arranged staggered with each other, as shown in Figure 1 The benefits of designing the mesh holes of the net structure 1 as the rectangular mesh holes 101 are as follows:

[0044] 1. Uniform temperature distribution

[0045] Uniform heat conduction: The rectangular mesh holes 101 can better control the heat transfer path, ensuring uniform distribution of heat inside the insulation cylinder 5. This helps to reduce local overheating or cold spots, thereby improving the temperature uniformity of the entire system.

[0046] Reducing thermal stress: Uniform temperature distribution can reduce thermal stress caused by temperature gradient, prolonging the service life of the insulation cylinder 5.

[0047] 2. Optimized airflow management

[0048] Airflow control: The rectangular mesh holes 101 can more accurately control the direction and speed of airflow, helping to maintain a stable gas environment, which is very important for atmosphere control during single crystal growth.

[0049] Reducing turbulence: The rectangular mesh holes 101 can reduce the turbulence phenomenon of airflow compared with circular or other shaped mesh holes, making the airflow more stable, which helps to improve the quality of crystal growth.

[0050] 3. Structural strength

[0051] Mechanical stability: The rectangular mesh 101 can provide better structural support, increasing the overall rigidity and mechanical strength of the insulation cylinder 5. This helps to resist deformation and damage under high temperatures.

[0052] Ease of processing: The rectangular mesh 101 is relatively simple to process, allowing the use of standardized processing tools and processes, reducing manufacturing costs.

[0053] 4. Thermal radiation characteristics

[0054] Optimized thermal radiation: The geometry of the rectangular mesh 101 can optimize the path of thermal radiation, reducing unnecessary heat loss and improving thermal efficiency.

[0055] Reduced reflection: The rectangular mesh 101 can reduce the reflection of thermal radiation on the internal surface, further improving the uniformity and stability of the temperature.

[0056] 5. Easy maintenance and cleaning

[0057] Easy to clean: The shape of the rectangular mesh 101 makes cleaning and maintenance more convenient, allowing for easier removal of accumulated impurities and residues, maintaining the cleanliness and efficient operation of the insulation cylinder 5.

[0058] 6. Strong adaptability

[0059] Flexibility: The rectangular mesh 101 can be adjusted according to different application scenarios and requirements, such as changing the size and spacing of the mesh, to adapt to different temperature and airflow requirements.

[0060] In the single crystal furnace insulation cylinder 5, the design of the rectangular mesh 101 can significantly improve the uniformity of temperature and the stability of airflow, thereby improving the growth quality and yield of single crystal silicon rods. In summary, the rectangular mesh 101 design in the single crystal furnace insulation cylinder 5 provides multiple advantages, including uniform temperature distribution, optimized airflow management, enhanced structural strength, good thermal radiation characteristics, and easy maintenance features, making the rectangular mesh 101 a preferred design choice.

[0061] In this embodiment, the width of the rectangular mesh 101 is L1, and the length is L2, satisfying: 150mm≤L1≤200mm, 220mm≤L2≤300mm.

[0062] A plurality of connection strips 4 are arranged side by side along the width direction of the mesh structure 1, the connection strips 4 are arranged in one-to-one correspondence with the length direction of the through strips 2, and the buckles 3 are fixedly arranged on the connection strips 4. Preferably, the buckle 3 structure can be fixed on the connection strip 4 by screws. The function of the buckle 3 is to pass through the through strip 2 and lock and fix the clamping strip after the clamping strip is in place. The structure of the buckle 3 belongs to the conventional prior art, and its structure will not be described here.

[0063] The connecting strip 4, the threading strip 2, and the mesh structure 1 are integrally formed or welded together. They are made of the same material and can be made of stainless steel or carbon steel.

[0064] The mesh structure 1 has a width of L3 and a length of L4, satisfying the following conditions: 500mm≤L3≤600mm, 4000mm≤L4≤5000mm. It should be emphasized that the width and length of the mesh structure 1 can be flexibly designed according to the height and circumference of the single crystal furnace insulation cylinder 5 to make it suitable.

[0065] This embodiment is a preferred implementation, such as... Figure 1 As shown (all dimensions in the figure are in millimeters), L1 = 170mm, L2 = 285mm, L3 = 4260mm, L4 = 580mm, the distance between two adjacent rows of rectangular mesh 101 in the mesh structure 1 is 18mm, and the distance between adjacent rectangular mesh 101 in each row is 18mm, the total length of the clamp 10 is 4700mm, and the length of the threading strip 2 is 390mm.

[0066] Working principle: This application provides a clamp 10 for the insulation cylinder 5 of a single crystal furnace hot zone. After the insulation cylinder 5 is wrapped with soft felt, the mesh structure 1 is flexible and can be bent. The mesh structure 1 is wrapped around the soft felt (the height of the mesh structure 1 can be adjusted appropriately according to the height of the insulation cylinder 5, i.e., the width of the mesh structure 1 is adapted to the height of the insulation cylinder 5). Then, all the threading strips 2 are inserted into their corresponding buckles 3. When the threading strip 2 is inserted into the buckle 3 and reaches the limit position, i.e., when the threading strip 2 is in place, the buckle 3 is locked to lock and fix the threading strip 2. After all the strips 2 are locked and fixed with the buckles 3, the outer layer of soft felt of the insulation cylinder 5 is covered and fixed. The clamp 10, due to its mesh structure 1, can evenly distribute the pressure, so that the outside of the insulation cylinder 5 is evenly stressed. This not only effectively protects the soft felt from damage, but also ensures that the soft felt is not easily displaced during the lifting of the insulation cylinder 5. This better protects the integrity and stability of the insulation cylinder 5, reduces the possibility of deformation or displacement of the insulation cylinder 5 due to uneven pressure, and helps to maintain the accurate position of the insulation cylinder 5 in the single crystal furnace, thereby ensuring the stability of the insulation effect of the insulation cylinder 5.

[0067] Example 2

[0068] A single crystal furnace includes an insulation cylinder 5, the outer side of which is covered with soft felt to form a soft felt layer, and also includes the single crystal furnace hot zone insulation cylinder clamp 10. The single crystal furnace hot zone insulation cylinder clamp 10 is respectively provided on the outer side of the soft felt layer of the insulation cylinder 5, and the through strip 2 is passed through the buckle 3 and locked by the buckle 3 to tighten the soft felt layer.

[0069] The insulation cylinder 5 includes an upper insulation cylinder, a middle insulation cylinder, and a lower insulation cylinder. The lower insulation cylinder, the middle insulation cylinder, and the upper insulation cylinder are stacked sequentially from bottom to top. The outer sides of the upper insulation cylinder, the middle insulation cylinder, and the lower insulation cylinder are respectively covered with soft felt to form soft felt layers. The outer sides of the soft felt layers of the upper insulation cylinder, the middle insulation cylinder, and the lower insulation cylinder are respectively provided with single crystal furnace hot zone insulation cylinder clamps 10. The clamps 10 are correspondingly surrounded on the outer side of the insulation cylinder 5 (e.g., Figure 2 Then, each threading strip 2 is inserted into its corresponding buckle 3. When the threading strip 2 is inserted into the buckle 3 and reaches its limit position, that is, when the threading strip 2 is in place, the buckle 3 is locked to lock and fix the threading strip 2. After all the threading strips 2 are locked and fixed by the buckles 3, the outer layer of soft felt of the insulation cylinder 5 is covered and fixed. Moreover, due to the design of its mesh structure 1, the clamp 10 can evenly distribute the pressure, so that the outside of the insulation cylinder 5 is evenly stressed. This not only effectively protects the soft felt from damage, but also ensures that the soft felt is not easily displaced during the lifting of the insulation cylinder 5, thus better protecting the integrity and stability of the insulation cylinder 5 and reducing the possibility of deformation or displacement of the insulation cylinder 5 due to uneven pressure. This helps to maintain the accurate position of the insulation cylinder 5 in the single crystal furnace, thereby ensuring the stability of the insulation effect of the insulation cylinder 5.

[0070] The beneficial effects of the technical solution of this utility model are:

[0071] This utility model proposes an external clamp 10 for a mesh-type single crystal furnace thermal insulation cylinder 5, which has the following advantages:

[0072] Uniform pressure distribution: The mesh structure 1 can distribute the clamping pressure relatively evenly on the circumference of the insulation cylinder 5, so that the clamping force on each part of the insulation cylinder 5 is relatively balanced, avoiding the situation of excessive or insufficient local pressure. This can ensure the stability of the installation of the insulation cylinder 5, reduce the possibility of deformation or displacement of the insulation cylinder 5 due to uneven pressure, help maintain the accurate position of the insulation cylinder 5 in the single crystal furnace, and ensure the stability of its insulation effect.

[0073] Good elasticity and adaptability: It has a certain degree of elasticity, which can adapt to minor dimensional changes of the insulation cylinder 5 caused by thermal expansion and contraction or other factors. When the insulation cylinder 5 expands due to heat, the mesh clamp 10 can deform elastically within a certain range, still maintaining an effective fastening to the insulation cylinder 5, without becoming excessively loose or losing its fastening effect due to the expansion of the insulation cylinder 5; when the insulation cylinder 5 cools and contracts, the clamp 10 can also contract accordingly, always tightly fitting the insulation cylinder 5, ensuring that the insulation performance is not affected.

[0074] Easy installation and disassembly: Compared to some complex fastening devices, the mesh clamp 10 has a relatively simple structure, requiring no complicated tools or cumbersome operating procedures during installation and disassembly. This allows operators to quickly and easily install and replace the insulation cylinder 5, improving work efficiency. This convenience is especially important when frequent maintenance or replacement of the insulation cylinder 5 is required.

[0075] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

[0076] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A clamp for a single crystal furnace thermal insulation cylinder, characterized in that, The device includes a mesh structure (1), which is flexible and can be bent. The two ends of the mesh structure (1) are a first end and a second end, respectively. Multiple buckles (3) are arranged side by side along the width direction of the mesh structure (1) at the first end, and multiple thread strips (2) are arranged side by side along the width direction of the mesh structure (1) at the second end. The number of buckles (3) and thread strips (2) are the same and they are arranged in a one-to-one correspondence. The buckles (3) are used to lock the thread strips (2).

2. The single crystal furnace thermal insulation cylinder clamp according to claim 1, characterized in that, The mesh structure (1) is rectangular in shape. The width of the mesh structure (1) matches the height of the single crystal furnace insulation cylinder (5), and the length of the mesh structure (1) matches the perimeter of the single crystal furnace insulation cylinder (5).

3. The single crystal furnace thermal insulation cylinder clamp according to claim 2, characterized in that, The mesh structure (1) includes multiple mesh openings, which are rectangular mesh openings (101).

4. The single crystal furnace thermal insulation cylinder clamp according to claim 3, characterized in that, The length direction of the rectangular mesh (101) is consistent with the length direction of the mesh structure (1).

5. The single crystal furnace thermal insulation cylinder clamp according to claim 3, characterized in that, The mesh structure (1) includes multiple rows of rectangular mesh holes (101), and the rectangular mesh holes (101) in adjacent rows are staggered.

6. The single crystal furnace thermal insulation cylinder clamp according to claim 3, characterized in that, The rectangular mesh (101) has a width of L1 and a length of L2, satisfying the following conditions: 150mm≤L1≤200mm, 220mm≤L2≤300mm.

7. The single crystal furnace thermal insulation cylinder clamp according to claim 1, characterized in that, Multiple connecting straps (4) are arranged side by side along the width direction of the mesh structure (1) at the first end. The connecting straps (4) are aligned with the length direction of the threading strip (2) and are arranged in a one-to-one correspondence. The buckle (3) is fixedly arranged on the connecting straps (4).

8. The single crystal furnace thermal insulation cylinder clamp according to claim 7, characterized in that, The connecting strip (4), the threading strip (2), and the mesh structure (1) are integrally formed.

9. The single crystal furnace thermal insulation cylinder clamp according to claim 8, characterized in that, The width of the mesh structure (1) is L3 and the length is L4, satisfying: 500mm≤L3≤600mm, 4000mm≤L4≤5000mm.

10. A single-crystal furnace, comprising an insulation cylinder (5), wherein the outer side of the insulation cylinder (5) is covered with a soft felt to form a soft felt layer, characterized in that, It also includes the single crystal furnace hot zone insulation cylinder clamps according to any one of claims 1-9, wherein the single crystal furnace hot zone insulation cylinder clamps are respectively provided on the outer side of the soft felt layer of the insulation cylinder (5), and the threading strip (2) is threaded through the buckle (3) and locked by the buckle (3) to tighten the soft felt layer.

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