Coating ring for silicon carbide growth device
By creating blind holes and embedding fixing posts on the inner edge of the coating ring in the silicon carbide growth apparatus, the problem of byproducts sticking to the substrate edge was solved, extending the service life of the coating ring and reducing the replacement frequency and cost.
Patent Information
- Application Number
- CN202423075614.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-13
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2034-12-13
AI Technical Summary
In existing silicon carbide growth equipment, byproducts from the graphite-coated ring easily adhere to the substrate edge during epitaxial growth, leading to breakage. Furthermore, the inner circle shrinks after long-term use, causing carding and increasing replacement costs.
A coating ring is designed with blind holes on the inner edge of the ring and embedded fixing posts. The three-point fixing principle is used to reduce the contact area between the substrate and the inner edge of the coating ring, and the fixing posts are detachable for easy maintenance.
This effectively prevents byproducts from sticking to the substrate edge, extends the service life of the coating ring, and reduces replacement frequency and cost.
Smart Images
Figure CN223660288U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of semiconductor silicon carbide epitaxial growth, in particular, especially relates to a coating ring for silicon carbide growth device. BACKGROUND
[0002] At present, the graphite coating ring of silicon carbide growth auxiliary accessory is a kind of inlaying shape, substrate is inlaid in coating ring and will not be thrown in the rotating process of growth, but there are the following problems in the above scheme:
[0003] 1, the byproduct grown in the coating ring inner edge in epitaxial growth process can be stuck with substrate edge, and it can cause substrate fragmentation when taking out epitaxial wafer subsequently.
[0004] 2, the inner circle of coating ring inner edge will gradually shrink to cause card after long-term growth of byproduct, at this time, coating ring needs to be replaced, leading to higher cost. UTILITY MODEL CONTENTS
[0005] The utility model aims at at least one of the technical problems existing in the prior art. To this end, the utility model provides a graphite coating ring for silicon carbide growth device, to improve the wafer fragment phenomenon and prolong the service life of coating ring.
[0006] To achieve the above object, the utility model adopts the following technical scheme: a coating ring for silicon carbide growth device, comprising: ring body, the front surface of the ring body is horizontal plane, and the middle part of the ring body is provided with through slot, the through slot is embedded with the convex part of graphite tray to form a carrier suitable for carrying substrate together;The inner edge of the ring body includes arc surface and vertical surface, the arc surface is connected to the both ends of the vertical surface, and the vertical surface of the ring body forms the positioning flat edge in contact with the flat edge of the convex part of the graphite tray;Four blind holes are arranged at the position close to the inner edge of the ring body, two of which are close to the two flat edge angles of the ring body, and the other two are close to the arc surface of the ring body;Four fixing columns are embedded in the four blind holes respectively, and the edges of the four fixing columns form two tangent circle structures with the edges of the substrate to position the substrate on the horizontal plane of the ring body, so as to reduce the contact surface between the outer edge of the substrate and the inner edge of the ring body.
[0007] As preferred: the positioning flat edge of the through slot is located between clock 5 and 7.
[0008] As preferred: the two blind holes close to the arc surface of the through slot are located between clock 10 and 11 and between clock 1 and 2 respectively.
[0009] As preferred: the back side of the ring body is formed with a flange extending downward, which is used to combine with the edge of the graphite tray.
[0010] As preferred: the embedded mode of the fixing column and the blind hole is detachable.
[0011] As preferred: the shape of the blind hole is circular or regular polygon.
[0012] As preferred: the shape of the fixing column is cylindrical or regular polygon column.
[0013] As preferred: the shape of the fixing column is cylindrical or regular polygon column.
[0014] The utility model discloses a coating ring for silicon carbide growth device, which has the following advantages:
[0015] 1. The utility model discloses a coating ring for silicon carbide growth device, which has the following advantages:
[0016] 2. The utility model discloses a coating ring for silicon carbide growth device, which has the following advantages:
[0017] 3. The utility model discloses a coating ring for silicon carbide growth device, which has the following advantages: BRIEF DESCRIPTION OF DRAWINGS
[0018] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The accompanying drawings are included to provide a description of the preferred embodiments and are not intended to limit the scope of the present application. Throughout the drawings, like reference numerals will be used to refer to like components. In the drawings:
[0019] Figure 1 FIG. 1 is a top view of a coating ring for silicon carbide growth device according to an embodiment of the present application;
[0020] Figure 2 FIG. 2 is a side view of a coating ring for silicon carbide growth device according to the embodiment of the present application.
[0021] The reference numerals in the drawings are as follows:
[0022] 1-cyclic body; 2-fixing column; 3-through groove; 4-positioning flat edge; 5-blind hole; 6-flange. DETAILED DESCRIPTION
[0023] In order to make the purpose, technical scheme and advantages of the present application more clear, the specific embodiments of the present application will be further described in combination with the drawings. Although the exemplary embodiments of the present application are shown in the drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present application and to fully convey the scope of the present application to those skilled in the art.
[0024] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.
[0025] In addition, the terms "first" and "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features referred to. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.
[0026] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication or interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0027] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.
[0028] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, the skilled in the art can combine and combine the different embodiments or examples described in the present application and the features of the different embodiments or examples without contradiction.
[0029] The coating ring for silicon carbide growth device provided by the present application comprises: a ring body, the front surface of which is a horizontal plane, a through groove for embedding a graphite tray is formed in the middle of the ring body; the inner edge of the ring body comprises a circular arc surface and a vertical surface, the vertical surface of the ring body forms a positioning flat edge in contact with the flat edge of the convex part of the graphite tray; four blind holes are formed at the position close to the inner edge of the ring body, two of which are close to the two flat edge corners of the ring body, and the other two are close to the circular arc surface of the ring body; four fixed columns are embedded in the four blind holes respectively, and the edges of the four fixed columns and the edges of the substrate form two tangent circle structures to position the substrate on the horizontal plane of the ring body, thereby reducing the contact surface between the outer edge of the substrate and the inner edge of the ring body. The present application can avoid the adhesion of by-products and substrate edges and the gradual reduction of the inner circle of the coating ring during epitaxial growth, and the cost is significantly reduced.
[0030] Next, the coating ring for silicon carbide growth device provided by the embodiment of the present application will be described in detail in combination with the drawings.
[0031] Please refer to Figure 1 , Figure 2The coating ring for silicon carbide growth device provided by the embodiment comprises a ring body 1 and a fixing column 2. The front surface of the ring body 1 is a horizontal surface, and a through groove 3 is arranged in the middle of the ring body 1, which is used to be embedded with a convex part of a graphite tray (not shown in the figure) to jointly form a carrier suitable for carrying a substrate. The inner edge of the ring body 1 comprises a circular arc surface and a vertical surface, the two ends of the circular arc surface are connected with the two ends of the vertical surface, and the vertical surface of the ring body 1 forms a positioning flat edge 4 which is in contact with the flat edge of the convex part of the graphite tray. Four blind holes 5 are arranged near the inner edge of the ring body 1, two of which are near the two flat edge corners of the ring body 1, and the other two are near the circular arc surface of the ring body 1. Four fixing columns 2 are embedded in the four blind holes 5 respectively, and the edges of the four fixing columns 2 and the edges of the substrate form two tangent circle structures to position the substrate on the horizontal surface of the ring body 1, thereby reducing the contact surface between the outer edge of the substrate and the inner edge of the ring body 1.
[0032] In the above embodiment, preferably, the positioning flat edge 4 of the ring body 1 is located between 5 o'clock and 7 o'clock.
[0033] In the above embodiment, preferably, the two blind holes 5 near the circular arc surface of the ring body 1 are located between 10 o'clock and 11 o'clock and between 1 o'clock and 2 o'clock respectively.
[0034] In the above embodiment, preferably, a flange 6 extending downward is formed on one side of the back surface of the ring body 1, which is used to be combined with the edge of the graphite tray, so that the ring body 1 can be stably combined with the graphite tray during subsequent rotation and will not fly off.
[0035] In the above embodiment, preferably, the embedding mode of the fixing column 2 and the blind hole 5 is detachable, so as to facilitate disassembly and replacement during subsequent maintenance.
[0036] In the above embodiment, preferably, the shape of the blind hole 5 can be circular, square or other regular shape.
[0037] In the above embodiment, preferably, the shape of the fixing column 2 can be a cylindrical body, a square column body or other regular column body.
[0038] In the above embodiment, preferably, the ring body 1 is made of graphite material.
[0039] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than limit them. Although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that the technical solutions recorded in the foregoing embodiments can be modified, or some or all of the technical features can be replaced equivalently. Such modifications or replacements do not change the essence of the corresponding technical solutions, which should be covered in the scope of the claims and the specification of the present application. In particular, the technical features mentioned in each embodiment can be combined in any manner as long as there is no structural conflict. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.
Claims
1. A coated susceptor ring for a silicon carbide growth apparatus, characterized by, Comprise: A ring body, the front of which is a horizontal plane, and a through slot is provided in the middle of the ring body, which is used to embed the convex part of the graphite tray to form a carrier suitable for carrying the substrate together; the inner edge of the ring body includes a circular arc surface and a vertical surface, the two ends of the circular arc surface are connected to the two ends of the vertical surface, and the vertical surface of the ring body forms a positioning flat edge in contact with the flat edge of the convex part of the graphite tray; four blind holes are provided near the inner edge of the ring body, two of which are near the two flat edge corners of the ring body, and the other two are near the circular arc surface of the ring body; Four fixed columns are embedded in the four blind holes respectively, and the edges of the four fixed columns and the edges of the substrate form two tangent circle structures to position the substrate on the horizontal plane of the ring body, thereby reducing the contact area between the outer edge of the substrate and the inner edge of the ring body.
2. The coating ring of claim 1, wherein The positioning flat edge of the through slot is located between 5 o'clock and 7 o'clock.
3. The coating ring of claim 2, wherein, The two blind holes near the circular arc surface of the through slot are located between 10 o'clock and 11 o'clock and between 1 o'clock and 2 o'clock respectively.
4. The coating ring of claim 1, wherein The back side of the ring body forms a downward extending flange, which is used to combine with the edge of the graphite tray.
5. The coating ring of claim 1, wherein The embedded way of the fixed column and the blind hole is detachable.
6. The coating ring of claim 1, wherein The shape of the blind hole is circular or regular polygon.
7. The coating ring of claim 6, wherein, The shape of the fixed column is a cylindrical body or a regular polygonal column.