Wave plate adjusting device, acousto-optic deflector system and circuit board processing equipment

Abstract

The utility model relates to a wave plate adjusting device, an acousto-optic deflector system and circuit board processing equipment. The wave plate adjusting device comprises a first fixing seat; the first adjusting seat is rotationally connected with the first fixed seat, and the first adjusting seat is used for mounting a lens; and the first rotating mechanism is mounted on the first fixing seat, is connected with the first adjusting seat and is used for driving the first adjusting seat to rotate around the X axis so as to adjust the deflection angle of the lens. According to the wave plate adjusting device, the acousto-optic deflector system and the circuit board processing equipment, the first adjusting seat used for installing the lens is rotationally arranged on the first fixing seat, the first adjusting seat can be driven to rotate around the X axis through the first rotating mechanism so as to adjust the deflection angle of the lens, and compared with a pure manual adjusting mode, the deflection angle of the lens can be adjusted more conveniently. The device has the advantages of easy adjustment, high adjustment precision and the like, thereby facilitating improvement of circuit board processing efficiency and production quality.

Description

Technical Field

[0001] This application relates to the field of circuit board processing technology, and in particular to waveplate adjustment devices, acoustic-optical deflector systems, and circuit board processing equipment. Background Technology

[0002] Lasers are commonly used to process workpieces during the production of printed circuit boards.

[0003] During laser processing of workpieces, it is necessary to adjust the angles of optical components such as lenses (e.g., quarter-wave plates) and acousto-optic deflectors (AODs). However, common circuit board processing equipment usually does not have the function of adjusting the angles of optical components, or relies entirely on manual adjustment, which leads to problems such as high adjustment difficulty, low adjustment accuracy, and low adjustment efficiency, which is not conducive to improving production efficiency and quality. Utility Model Content

[0004] Therefore, it is necessary to provide a waveplate adjustment device, an acousto-optic deflector system, and circuit board processing equipment to address the problem of difficulty in adjusting the angle of optical components during circuit board production.

[0005] This application provides a waveplate adjustment device, comprising: a first fixed base; a first adjustment base rotatably connected to the first fixed base, the first adjustment base being used to mount a lens; and a first rotating mechanism mounted on the first fixed base and connected to the first adjustment base, used to drive the first adjustment base to rotate around the X-axis to adjust the deflection angle of the lens.

[0006] According to one embodiment of this application, it further includes: a pre-tightening mechanism connecting the first fixed seat and the first adjusting seat, the pre-tightening mechanism being used to provide an elastic pre-tightening force to the first adjusting seat toward the first fixed seat.

[0007] According to one embodiment of this application, the pre-tightening mechanism includes: a first connecting member fixedly connected to the first fixed seat; a second connecting member fixedly connected to the first adjusting seat; and a pre-tightening elastic member, one end of which is connected to the first connecting member and the other end of which is connected to the second connecting member, adapted to provide an elastic tension that brings the first connecting member and the second connecting member closer to each other.

[0008] According to one embodiment of this application, the first adjusting seat is provided with a guide hole, the guide hole penetrates the first adjusting seat along the X-axis direction, and the guide hole extends circumferentially around the X-axis. The waveplate adjusting device further includes a guide bolt, the guide bolt passes through the guide hole and is threadedly connected to the first fixing seat.

[0009] According to one embodiment of the present application, one of the first fixed seat and the first adjusting seat is provided with a scale line arranged circumferentially around the rotation axis of the first adjusting seat, and the other of the first fixed seat and the first adjusting seat is provided with an indication line, which, in combination with the scale line, indicates the rotation angle of the first adjusting seat.

[0010] The present application also provides an acousto-optic deflector system, comprising: two wave plate adjusting devices according to the above-mentioned embodiments, which are spaced apart along the X-axis direction; two mirrors, which are respectively installed on the two wave plate adjusting devices; a first acousto-optic deflector, which is located between the two wave plate adjusting devices; and a second acousto-optic deflector, which is located on the side of one of the wave plate adjusting devices away from the first acousto-optic deflector; wherein the deflection directions of the first acousto-optic deflector and the second acousto-optic deflector are perpendicular.

[0011] According to one embodiment of the present application, the system further comprises: a first AOD adjusting device connected to the first acousto-optic deflector, for adjusting the position of the first acousto-optic deflector along the Y-axis direction and adjusting the pitch angle of the first acousto-optic deflector around the Z-axis; and / or a second AOD adjusting device connected to the second acousto-optic deflector, for adjusting the position of the second acousto-optic deflector along the Z-axis direction and adjusting the pitch angle of the second acousto-optic deflector around the X-axis; wherein the X-axis, the Y-axis and the Z-axis are perpendicular to each other.

[0012] According to one embodiment of the present application, the first AOD adjusting device comprises: a second fixed seat; a first sliding member slidingly connected to the second fixed seat along the Y-axis direction; a first moving mechanism connected to the first sliding member, for driving the first sliding member to reciprocally move along the Y-axis direction; a second adjusting seat fixedly connected to the first sliding member; a first rotating seat rotatably connected to the second adjusting seat and fixedly connected to the first acousto-optic deflector, the rotation axis of the first rotating seat being along the Z-axis direction; and a second rotating mechanism installed on the second adjusting seat and connected to the first rotating seat, the second rotating mechanism being used for driving the first rotating seat to rotate relative to the second adjusting seat.

[0013] According to one embodiment of the present application, the second AOD adjusting device comprises: a third fixed seat; a second sliding member in sliding connection with the third fixed seat along the Z-axis direction; a third adjusting seat fixedly connected with the second sliding member; a second moving mechanism connecting the third fixed seat and the second sliding member, and configured to drive the second sliding member to slide along the Z-axis direction; a second rotating seat in rotational connection with the third adjusting seat, and fixedly connected with the second acousto-optic deflector, the rotating axis of the second rotating seat being along the Y-axis direction; and a third rotating mechanism installed on the third adjusting seat and connected with the second rotating seat, and configured to drive the second rotating seat to rotate relative to the third adjusting seat.

[0014] According to one embodiment of the present application, the first AOD adjusting device comprises a second rotating mechanism, and the second AOD adjusting device comprises a third rotating mechanism, at least one of the first rotating mechanism, the second rotating mechanism and the third rotating mechanism being configured to comprise: a rotating adjusting knob connected with the first adjusting seat, the first rotating seat or the second rotating seat, and configured to provide a driving force in a first direction for the first adjusting seat, the first rotating seat or the second rotating seat; and a first elastic reset structure connected with the first adjusting seat, the first rotating seat or the second rotating seat, and configured to provide an elastic reset force in a second direction for the first adjusting seat, the first rotating seat or the second rotating seat; wherein the second direction is opposite to the first direction.

[0015] According to one embodiment of the present application, the first AOD adjusting device comprises a first moving mechanism, and the second AOD adjusting device comprises a second moving mechanism, at least one of the first moving mechanism and the second moving mechanism being configured to comprise: a moving adjusting knob connected with the first sliding member or the second sliding member, and configured to provide a driving force for translation of the first sliding member or the second sliding member; and a positioning adjusting knob connected with the first sliding member or the second sliding member, and configured to provide a pre-tightening force for positioning of the first sliding member or the second sliding member.

[0016] The present application also provides a circuit board processing device, comprising the wave plate adjusting device according to the above embodiments, or the acousto-optic deflector system according to the above embodiments.

[0017] The wave plate adjusting device, the acousto-optic deflector system and the circuit board processing device are configured to rotate the first adjusting seat of the lens on the first fixed seat, and the first adjusting seat can be driven to rotate around the X-axis by the first rotating mechanism to adjust the deflection angle of the lens, which has the advantages of easy adjustment and high adjustment precision compared with a purely manual adjustment form, and thus is beneficial to improving the efficiency and production quality of the circuit board processing. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 Fig. 1 is a perspective view of a wave plate adjusting device according to an embodiment of the present application.

[0019] Figure 2 Fig. 2 is a schematic view of the internal structure of the wave plate adjusting device according to an embodiment of the present application.

[0020] Figure 3 Fig. 3 is a schematic view of the correspondence between the scale line and the indication line in the wave plate adjusting device according to an embodiment of the present application.

[0021] Figure 4 Fig. 4 is a perspective view of an acousto-optic deflector system according to an embodiment of the present application.

[0022] Figure 5 Fig. 5 is a perspective view of a first AOD adjusting device in the acousto-optic deflector system according to an embodiment of the present application.

[0023] Figure 6 Fig. 6 is a schematic view of the internal structure of the first AOD adjusting device in the acousto-optic deflector system according to an embodiment of the present application.

[0024] Figure 7 Fig. 7 is a perspective view of a second AOD adjusting device in the acousto-optic deflector system according to an embodiment of the present application.

[0025] Figure 8 Fig. 8 is a schematic view of the internal structure of the second AOD adjusting device in the acousto-optic deflector system according to an embodiment of the present application.

[0026] Reference signs:

[0027] 100, wave plate adjusting device;

[0028] 110, first fixed seat; 111, mounting groove; 112, mounting piece; 113, scale line;

[0029] 120, first adjusting seat; 121, guide hole; 122, first poking piece; 123, indication line;

[0030] 130, first rotating mechanism; 131, rotating adjusting knob; 132, first elastic reset structure; 133, extrusion bolt; 134, first compression spring;

[0031] 140, pre-tightening mechanism; 141, first connecting piece; 142, second connecting piece; 143, pre-tightening elastic piece;

[0032] 150, guide bolt;

[0033] 200, first AOD adjusting device; 210, second fixed seat; 220, first sliding piece; 230, first moving mechanism; 231, moving adjusting knob; 232, second elastic reset structure; 233, positioning adjusting knob; 240, second adjusting seat; 250, first rotating seat; 260, second rotating mechanism;

[0034] 300, second AOD adjusting device; 310, third fixed seat; 320, second sliding piece; 321, second shifting piece; 330, third adjusting seat; 340, second moving mechanism; 350, second rotating seat; 360, third rotating mechanism;

[0035] 400, first acousto-optic deflector;

[0036] 500, second acousto-optic deflector. DETAILED DESCRIPTION

[0037] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a number of ways other than those described herein without departing from the spirit of the present application. It is therefore intended that the present application not be limited to the embodiments disclosed for purposes of disclosure.

[0038] In the description of the present application, it should be understood that if these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0039] In addition, if these terms "first", "second" appear, these terms are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implying the number of technical features indicated. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, if the term "multiple" appears, the meaning of "multiple" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0040] In the present application, unless specifically defined otherwise, if there is an appearance of the term "installation", "connection", "connection", "fixation" and the like, these terms should be broadly understood. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically defined. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0041] In the present application, unless specifically defined otherwise, if there is a description of the first feature "on" or "below" the second feature and the like, it means that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be the first feature directly above or obliquely above the second feature, or it can only mean that the first feature is higher than the second feature in horizontal height. The first feature "below", "below" and "below" the second feature can be the first feature directly below or obliquely below the second feature, or it can only mean that the first feature is less than the second feature in horizontal height.

[0042] It should be noted that if an element is referred to as "fixed to" or "provided on" another element, it can be directly on another element or there can be a middle element. If an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. If present, the terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used in the present application are for illustrative purposes only and do not represent the only implementation.

[0043] Referring to Figure 1 , Figure 1 The wave plate adjusting device 100 provided by the embodiment of the present application includes a first fixed seat 110, a first adjusting seat 120 and a first rotating mechanism 130. The first adjusting seat 120 is rotatably connected to the first fixed seat 110, and the first adjusting seat 120 is used to install the lens. The first rotating mechanism 130 is installed on the first fixed seat 110 and connected to the first adjusting seat 120, and is used to drive the first adjusting seat 120 to rotate around the X-axis to adjust the deflection angle of the lens.

[0044] The lens in the embodiment can be a 1 / 2 wave plate or a 1 / 4 wave plate, etc. When the first fixed seat 110 is driven to rotate by the first rotating mechanism 130, the first fixed seat 110 drives the lens to rotate. Compared with manually adjusting the angle of the lens, the lens has the advantage of being easy to adjust, and the adjustment accuracy is higher, which better meets the angle adjustment requirement in the production process of the circuit board, and is beneficial to improve the production efficiency and production quality.

[0045] Optionally, the first fixed seat 110 is provided with an adapter hole, the axis direction of the adapter hole is along the X-axis direction, the first adjusting seat 120 includes a body and a plug-in part fixedly connected with the body, the plug-in part protrudes from one side of the body, the first adjusting seat 120 has a light transmission hole, the light transmission hole penetrates through the body and the plug-in part along the X-axis direction, and the plug-in part is rotatably arranged in the adapter hole, and one side of the body is in sliding contact with the first fixed seat 110.

[0046] Through the cooperation of the plug-in part and the adapter hole, the limiting of the first fixed seat 110 and the first adjusting seat 120 in the vertical direction of the X-axis can be formed, so that the first adjusting seat 120 can stably rotate.

[0047] In combination Figure 1 and Figure 2 Optionally, the first adjusting seat 120 is provided with a guide hole 121, the guide hole 121 extends around the X-axis and penetrates through the first adjusting seat 120 along the X-axis direction, and the wave plate adjusting device 100 further includes a guide bolt 150, the guide bolt 150 is arranged along the X-axis direction, the guide bolt 150 is arranged in the guide hole 121, and the guide bolt 150 is threadedly connected with the first fixed seat 110.

[0048] Through the cooperation of the guide bolt 150 and the guide hole 121, on the one hand, the rotation of the first adjusting seat 120 can be more stable, and on the other hand, the first adjusting seat 120 can be prevented from sliding away from the first fixed seat 110 along the X-axis direction.

[0049] Optionally, the guide hole 121 is a stepped hole, and the head of the guide bolt 150 is located in the guide hole 121.

[0050] In this way, the head of the guide bolt 150 can be hidden in the guide hole 121, so as to avoid interference with other components, and the head of the guide bolt 150 cooperates with the inner wall of the guide hole 121, so as to achieve better guiding and limiting effects.

[0051] Optionally, the first adjusting seat 120 is provided with a plurality of guide holes 121, and the number of the guide bolts 150 is a plurality, and the plurality of guide bolts 150 are arranged in the positions of the plurality of guide holes 121 one by one. Further, the plurality of guide holes 121 are arranged uniformly in the circumferential direction around the X-axis.

[0052] In the embodiment, the guide bolt 150 has a gap between the side close to the first fixing seat 110 and the first adjusting seat 120, so as to avoid the position of the first adjusting seat 120 from being locked, and to create conditions for the angle adjustment of the lens installed on the first adjusting seat 120.

[0053] In some embodiments, the wave plate adjusting device 100 further comprises a pre-tightening mechanism 140 connected between the first fixing seat 110 and the first adjusting seat 120, and the pre-tightening mechanism 140 is used to provide an elastic pre-tightening force to the first adjusting seat 120 towards the first fixing seat 110.

[0054] The force of the pre-tightening mechanism 140 to the first adjusting seat 120 is an elastic force, so that the first adjusting seat 120 can rotate while being attached to the first fixing seat 110, improve the stability of rotation, and avoid the first adjusting seat 120 from producing axial movement. In addition, the force of the pre-tightening mechanism 140 can increase the friction between the first adjusting seat 120 and the first fixing seat 110, so as to avoid the first adjusting seat 120 from affecting the angle adjustment accuracy due to inertia transitional rotation when performing angle adjustment.

[0055] Exemplarily, the pre-tightening mechanism 140 comprises a first connecting piece 141, a second connecting piece 142 and a pre-tightening elastic piece 143, and the first connecting piece 141 and the second connecting piece 142 are both arranged along the vertical direction of the X axis, wherein the first connecting piece 141 is fixedly connected with the first fixing seat 110, the second connecting piece 142 is fixedly connected with the first adjusting seat 120, one end of the pre-tightening elastic piece 143 is connected with the first connecting piece 141, and the other end is connected with the second connecting piece 142, and the pre-tightening elastic piece 143 is adapted to provide an elastic pulling force to the first connecting piece 141 and the second connecting piece 142 to move closer to each other.

[0056] The pre-tightening elastic piece 143 can be a tensile spring or an elastic band, and preferably is a tensile spring. When the pre-tightening elastic piece 143 is connected with the first connecting piece 141 and the second connecting piece 142, it is in a tensile state, so as to provide an elastic pre-tightening force to the first adjusting seat 120 and the first fixing seat 110 to move closer to each other. When the first adjusting seat 120 moves away from the first fixing seat 110, the elastic deformation of the pre-tightening elastic piece 143 increases, and the elastic force increases, so as to ensure the tightness between the first adjusting seat 120 and the first fixing seat 110.

[0057] Optionally, the wave plate adjusting device 100 is provided with a plurality of pre-tightening mechanisms 140, and the plurality of pre-tightening mechanisms 140 are arranged uniformly in the circumferential direction around the X axis, so as to form good limiting for the first adjusting seat 120 at different positions in the circumferential direction.

[0058] It is worth mentioning that the pre-tightening elastic member 143 can change the length to adapt to the relative position change of the first connecting member 141 and the second connecting member 142 when the first adjusting seat 120 rotates, and will not limit the angle adjustment. In addition, since the angle adjustment of the lens is usually high-precision and small-angle adjustment, the pre-tightening elastic member 143 can fully meet the angle adjustment requirements.

[0059] In combination Figure 3 In some embodiments, one of the first fixed seat 110 and the first adjusting seat 120 is provided with a scale line 113 arranged circumferentially around the rotation axis of the first adjusting seat 120, and the other of the first fixed seat 110 and the first adjusting seat 120 is provided with an indication line 123, which indicates the rotation angle of the first adjusting seat 120 in combination with the scale line 113.

[0060] For example, the first fixed seat 110 is provided with a scale line 113 on one side in the X-axis direction, and the first adjusting seat 120 has an indication line 123 on the same direction side, and the corresponding relationship between the indication line 123 and the scale line 113 can be changed by rotating the first adjusting seat 120, thereby indicating the rotation angle of the first adjusting seat 120, providing a reference for the angle adjustment of the lens, and achieving the purpose of accurate adjustment.

[0061] In combination Figure 4 The embodiments of the present application also provide an acousto-optic deflector system, which comprises the wave plate adjusting device 100, the lens, the first acousto-optic deflector 400 and the second acousto-optic deflector 500. Wherein, the wave plate adjusting device 100 and the lens are both provided with two, the two wave plate adjusting devices 100 are arranged in the X-axis direction, and the two lenses are respectively installed on the two wave plate adjusting devices 100. The first acousto-optic deflector 400 is located between the two wave plate adjusting devices 100, and the second acousto-optic deflector 500 is located on the side of one of the wave plate adjusting devices 100 away from the first acousto-optic deflector 400. Wherein, the deflection directions of the first acousto-optic deflector 400 and the second acousto-optic deflector 500 are perpendicular.

[0062] In the embodiment, the light passes through one of the lenses, the first acousto-optic deflector, the other lens and the second acousto-optic deflector in sequence, and the deflection of the light beam can be controlled according to the specified track, wherein the deflection track of the light beam covers the preset plane, so as to meet the processing requirements of the workpiece.

[0063] In the embodiment, the two lenses are both installed on the corresponding wave plate adjusting device 100, so that accurate angle adjustment can be realized, which is beneficial to guarantee the light output effect and the product processing precision, and has the advantages of more flexible and convenient adjustment process.

[0064] In some embodiments, the acousto-optic deflector system further includes a first AOD adjustment device 200 and / or a second AOD adjustment device 300. The first AOD adjustment device 200 is connected to a first acousto-optic deflector 400 and is used to adjust the position of the first acousto-optic deflector 400 along the Y-axis and to adjust the pitch angle of the first acousto-optic deflector 400 about the Z-axis. The second AOD adjustment device 300 is connected to a second acousto-optic deflector 500 and is used to adjust the position of the second acousto-optic deflector 500 along the Z-axis and to adjust the pitch angle of the second acousto-optic deflector 500 about the X-axis. The X-axis, Y-axis, and Z-axis are mutually perpendicular; exemplarily, the X-axis and Y-axis are mutually perpendicular horizontal directions, and the Z-axis is a vertical direction. Preferably, the acousto-optic deflector system includes a first AOD adjustment device 200 and a second AOD adjustment device 300.

[0065] In this embodiment, the first AOD adjustment device 200 and the second AOD adjustment device 300 can respectively realize the position and angle adjustment of the first acousto-optic polarizer and the second acousto-optic polarizer, making the position and angle adjustment of the first acousto-optic polarizer and the second acousto-optic polarizer more convenient, adapting to different operating conditions, having better applicability, and having higher adjustment accuracy, which can further improve product quality.

[0066] In addition, the position and angle adjustment requirements of the first and second acousto-optic polarizers are different. In this embodiment, the first AOD adjustment device 200 and the second AOD adjustment device 300 only retain the corresponding adjustment functions, which can remove redundant structures, simplify the overall structure of the acousto-optic deflector system, reduce production and usage costs, and improve the reliability of the acousto-optic deflector system.

[0067] Optionally, the first AOD adjustment device 200 includes a second fixed base 210, a first sliding member 220, a first moving mechanism 230, a second adjusting base 240, a first rotating base 250, and a second rotating mechanism 260. The second fixed base 210 is fixed in position, providing conditions for adjusting the position and angle of the first acousto-optic polarizer. The first sliding member 220 is slidably connected to the second fixed base 210 along the Y-axis. The sliding between the first sliding member 220 and the second fixed base 210 can be achieved through a structure such as a slide rail assembly, which is not specifically limited here. The first moving mechanism 230 is connected to the first sliding member 220 and is used to drive the first sliding member 220 to reciprocate along the Y-axis. The second adjusting base 240 is fixedly connected to the first sliding member 220 and is adapted to reciprocate along the Y-axis with the first sliding member 220. The first rotating base 250 is rotatably connected to the second adjusting base 240 and fixedly connected to the first acousto-optic deflector 400. The rotation axis of the first rotating base 250 is along the Z-axis. The second rotating mechanism 260 is mounted on the second adjusting seat 240 and connected to the first rotating seat 250. The second rotating mechanism 260 is used to drive the first rotating seat 250 to rotate relative to the second adjusting seat 240.

[0068] When the first moving mechanism 230 drives the first sliding member 220 to slide along the Y-axis, it can drive the second adjusting seat 240, the first rotating seat 250 and the first acoustic-optical deflector 400 to move synchronously, thereby adjusting the position of the first acoustic-optical deflector 400 along the Y-axis. When the second rotating mechanism 260 drives the first rotating seat 250 to rotate relative to the second adjusting seat 240, it can drive the first acoustic-optical deflector 400 to rotate synchronously around the Z-axis, thereby adjusting the angle of the first acoustic-optical deflector 400 around the Z-axis.

[0069] Optionally, the second AOD adjustment device 300 includes a third fixed base 310, a second sliding member 320, a third adjusting base 330, a second moving mechanism 340, a second rotating base 350, and a third rotating mechanism 360. The second sliding member 320 is slidably connected to the third fixed base 310 along the Z-axis. The third adjusting base 330 is fixedly connected to the second sliding member 320. The second moving mechanism 340 connects the third fixed base 310 and the second sliding member 320, and drives the second sliding member 320 to slide along the Z-axis. The second rotating base 350 is rotatably connected to the third adjusting base 330, and the rotation axis of the second rotating base 350 is along the Y-axis. The third rotating mechanism 360 is mounted on the third adjusting base 330 and connected to the second rotating base 350, and drives the second rotating base 350 to rotate relative to the third adjusting base 330.

[0070] When the second moving mechanism 340 drives the second sliding member 320 to slide along the Z-axis, it can drive the third adjusting seat 330, the second rotating seat 350 and the second acoustic-optical deflector 500 to move synchronously, thereby adjusting the position of the second acoustic-optical deflector 500 along the Z-axis. When the third rotating mechanism 360 drives the second rotating seat 350 to rotate relative to the third adjusting seat 330, it can drive the second acoustic-optical deflector 500 to rotate synchronously around the Y-axis, thereby adjusting the angle of the first acoustic-optical deflector 400 around the Y-axis.

[0071] In some embodiments, at least one of the first rotating mechanism 130, the second rotating mechanism 260, and the third rotating mechanism 360 is configured to include a rotating adjustment knob 131 and a first elastic reset structure 132. The rotating adjustment knob 131 is connected to the first adjusting seat 120, the first rotating seat 250, or the second rotating seat 350, and is used to provide a driving force for rotation in a first direction to the first adjusting seat 120, the first rotating seat 250, or the second rotating seat 350. The first elastic reset structure 132 is connected to the first adjusting seat 120, the first rotating seat 250, or the second rotating seat 350, and is used to provide an elastic reset force for rotation in a second direction to the first adjusting seat 120, the first rotating seat 250, or the second rotating seat 350, wherein the second direction is opposite to the first direction.

[0072] In this embodiment, the driving direction of the rotary adjustment knob 131 is opposite to the direction of the elastic reset force of the first elastic reset structure 132. Therefore, when the rotary adjustment knob 131 pushes the first adjustment seat 120, the first rotating seat 250, or the second rotating seat 350 to rotate in the first direction, the elastic deformation of the first elastic reset structure 132 increases. When the rotary adjustment knob 131 rotates backward in the opposite direction, the first elastic reset structure 132 can drive the first adjustment seat 120, the first rotating seat 250, or the second rotating seat 350 to rotate in the second direction. At this time, the elastic deformation of the first elastic reset structure 132 decreases.

[0073] In this embodiment, the rotary adjustment knob 131 and the first elastic reset structure 132 work together to achieve forward and reverse adjustment simply by rotating the rotary adjustment knob 131, which has the advantage of convenient operation. Furthermore, the limiting effect of the rotary adjustment knob 131 and the pressing effect of the first elastic reset structure 132 can ensure the stability of the angle, thereby ensuring production quality.

[0074] For example, the first elastic reset structure 132 uses a torsion spring, tension spring or compression spring as the elastic element.

[0075] Optionally, the contact positions of the first fixed seat 110 and the first adjusting seat 120 and / or the contact positions of the second adjusting seat 240 and the first rotating seat 250 and / or the contact positions of the third adjusting seat 330 and the second rotating seat 350 are provided with arc-shaped mounting grooves 111, and the elastic element of the first elastic reset structure 132 is located in the mounting groove 111.

[0076] Optionally, the first elastic reset structure 132 includes a compression bolt 133 and a first compression spring 134. The compression bolt 133 is threadedly connected to the first adjusting seat 120, the first rotating seat 250, or the second rotating seat 350. One end of the compression bolt 133 extends into the mounting groove 111 and abuts against one end of the first compression spring 134. The other end of the first compression spring 134 abuts against the side wall of one end of the mounting groove 111. When the first adjusting seat 120, the first rotating seat 250, or the second rotating seat 350 rotates, the compression bolt 133 connected to the first adjusting seat 120, the first rotating seat 250, or the second rotating seat 350 rotates synchronously, thereby compressing the first compression spring 134 or releasing the first compression spring 134.

[0077] In this embodiment, by setting the mounting groove 111 and placing the elastic element of the first elastic reset structure 132 in the mounting groove 111, the deformation of the elastic element of the first elastic reset structure 132 can be made more stable, and the elastic element of the first elastic reset structure 132 can also be shielded and protected.

[0078] Optionally, the first fixed seat 110, the second adjusting seat 240, and / or the third adjusting seat 330 are provided with mounting parts 112, and the rotary adjusting knob 131 is threadedly connected to the mounting parts 112. By providing the mounting parts 112, the installation of the rotary adjusting knob 131 can be facilitated, and the rotary adjusting knob 131 can be rotated more easily.

[0079] Optionally, the first adjusting seat 120, the first rotating seat 250, and / or the second rotating seat 350 are provided with a first actuating member 122, and the end of the rotating adjusting knob 131 abuts against the first actuating member 122. The first actuating member 122 facilitates the cooperation with the rotating adjusting knob 131 on the one hand, and increases the driving arm of the rotating adjusting knob 131 on the other hand, reducing the resistance during adjustment.

[0080] The aforementioned mounting component 112 and the first actuating component 122 can both be configured as plate-shaped or block-shaped, and can be flexibly selected according to the actual installation position and installation space. No specific limitation is made here.

[0081] Combination Figures 5 to 8In some embodiments, at least one of the first moving mechanism 230 and the second moving mechanism 340 is configured to include a movement adjustment knob 231 and a positioning adjustment knob 233. The movement adjustment knob 231 is connected to the first slider 220 or the second slider 320 and is used to provide a translational driving force for the first slider 220 or the second slider 320. The positioning adjustment knob 233 is connected to the first slider 220 or the second slider 320 and is used to provide a preload force for positioning the first slider 220 or the second slider 320.

[0082] In this embodiment, the movable adjustment knob 231 is installed on the second fixed base 210 or the third fixed base 310, and directly or indirectly abuts against the corresponding first sliding member 220 or second sliding member 320. By rotating the movable adjustment knob 231, the movement of the first sliding member 220 or the second sliding member 320 can be driven. Its working principle and structure are similar to the rotary adjustment knob 131 described above, the only difference being the installation position and angle, which will not be elaborated here.

[0083] In this embodiment, the positioning adjustment knob 233 is installed on the second fixed base 210 or the third fixed base 310 and directly or indirectly abuts against the first sliding member 220 or the second sliding member 320. The axial direction of the positioning adjustment knob 233 intersects the sliding direction of its corresponding first sliding member 220 or second sliding member 320. Preferably, the axial direction of the positioning adjustment knob 233 is perpendicular to the sliding direction of its corresponding first sliding member 220 or second sliding member 320. The positioning adjustment knob 233 can provide a certain pressure to its corresponding first sliding member 220 or second sliding member 320, thereby facilitating the positional stability of its corresponding first sliding member 220 or second sliding member 320.

[0084] It is worth noting that the positioning adjustment knob 233 can be configured to provide pressure within a preset range so as to achieve positioning without affecting the movement adjustment function. It can also be configured to switch between locked and unlocked states by rotating it. In the unlocked state, the position of the first slider 220 or the second slider 320 can be adjusted, and in the locked state, the first slider 220 or the second slider 320 can be positioned.

[0085] Optionally, the first moving mechanism 230 further includes a second elastic reset structure 232. The second elastic reset structure 232 connects the second fixed base 210 and the first sliding member 220, and is used to provide the first sliding member 220 with an elastic reset force opposite to the driving direction of the moving adjustment knob 231 connected to the first sliding member 220. Its working principle is similar to that of the first elastic reset structure 132, and will not be described in detail here. By setting the second elastic reset structure 232, not only can the operation difficulty be reduced, but the accuracy of adjusting the position of the first acoustic-optical deflector 400 is further improved.

[0086] Optionally, the adjustment knob 231 of the first moving mechanism 230 is arranged along the Z-axis direction, and a second actuating member 321 is provided on one side of the second sliding member 320. The top of the adjustment knob 231 of the first moving mechanism 230 abuts against the lower side of the second actuating member 321. Thus, the gravity of the second sliding member 320 and other components can be used to generate a reaction force on the adjustment knob 231 of the first moving mechanism 230. By rotating the adjustment knob 231 of the first moving mechanism 230 in both directions, the function of adjusting the position of the second sliding member 320 along the Z-axis direction can be realized, and the position of the second sliding member 320 can be stabilized.

[0087] Combination Figure 1 and Figure 2 In some embodiments, the first rotating mechanism 130 and the second rotating mechanism 260 (see...) Figure 6 ) and the third rotating mechanism 360 (see Figure 8 Both the first and second moving mechanisms are configured to include a rotary adjustment knob 131 and a first elastic reset structure 132. The first moving mechanism 230 and the second moving mechanism 340 are both configured to include a moving adjustment knob 231 and a positioning adjustment knob 233. This improves the uniformity of the adjustment components at different positions, reduces production difficulty and costs, and also reduces overall operational complexity.

[0088] This embodiment also provides a circuit board processing equipment, including the waveplate adjustment device 100 described above, or the acousto-optic deflector system described above.

[0089] Furthermore, the circuit board processing equipment in this embodiment may also include other components such as a light source, which are not specifically limited here.

[0090] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0091] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A waveplate adjustment device, characterized in that, include: First fixed seat; A first adjusting seat is rotatably connected to the first fixed seat, and the first adjusting seat is used to install a lens. A first rotating mechanism is mounted on the first fixed base and connected to the first adjusting base. It is used to drive the first adjusting base to rotate around the X-axis to adjust the deflection angle of the lens.

2. The waveplate adjustment device according to claim 1, characterized in that, Also includes: A pre-tightening mechanism connects the first fixed seat and the first adjusting seat, the pre-tightening mechanism being used to provide an elastic pre-tightening force to the first adjusting seat toward the first fixed seat.

3. The waveplate adjustment device according to claim 2, characterized in that, The pre-tightening mechanism includes: The first connector is fixedly connected to the first fixed base; The second connector is fixedly connected to the first adjusting seat; A pre-tensioning elastic element, one end of which is connected to the first connecting member and the other end of which is connected to the second connecting member, is adapted to provide an elastic tension that brings the first connecting member and the second connecting member closer to each other.

4. The waveplate adjustment device according to any one of claims 1 to 3, characterized in that, The first adjusting seat is provided with a guide hole, which penetrates the first adjusting seat along the X-axis and extends circumferentially around the X-axis. The waveplate adjusting device further includes: A guide bolt passes through the guide hole and is threadedly connected to the first fixed seat.

5. The waveplate adjustment device according to any one of claims 1 to 3, characterized in that, One of the first fixed seat and the first adjusting seat is provided with a scale line, which is arranged circumferentially around the rotation axis of the first adjusting seat. The other of the first fixed seat and the first adjusting seat is provided with an indicator line, which, together with the scale line, indicates the rotation angle of the first adjusting seat.

6. An acousto-optic deflector system, characterized in that, include: The waveplate adjustment device according to any one of claims 1 to 5, wherein two waveplate adjustment devices are spaced apart along the X-axis direction; Two lenses are respectively mounted on the two waveplate adjustment devices; The first acousto-optic deflector is located between the two waveplate adjustment devices; The second acousto-optic deflector is located on the side of one of the waveplate adjustment devices that is away from the first acousto-optic deflector; The deflection directions of the first and second acousto-optic deflectors are perpendicular.

7. The acousto-optic deflector system according to claim 6, characterized in that, Also includes: The first AOD adjustment device is connected to the first acousto-optic deflector and is used to adjust the position of the first acousto-optic deflector along the Y-axis and to adjust the pitch angle of the first acousto-optic deflector around the Z-axis. And / or, a second AOD adjustment device, connected to the second acousto-optic deflector, for adjusting the position of the second acousto-optic deflector along the Z-axis and adjusting the pitch angle of the second acousto-optic deflector around the X-axis; The X-axis, Y-axis, and Z-axis are perpendicular to each other.

8. The acousto-optic deflector system according to claim 7, characterized in that, The first AOD adjustment device includes: Second fixed seat; The first sliding member is slidably connected to the second fixed base along the Y-axis direction; A first moving mechanism is connected to the first sliding member and is used to drive the first sliding member to reciprocate along the Y-axis direction. The second adjusting seat is fixedly connected to the first sliding member; The first rotating seat is rotatably connected to the second adjusting seat and fixedly connected to the first acoustic-optical deflector. The rotation axis of the first rotating seat is along the Z-axis. The second rotating mechanism is mounted on the second adjusting seat and connected to the first rotating seat. The second rotating mechanism is used to drive the first rotating seat to rotate relative to the second adjusting seat.

9. The acousto-optic deflector system according to claim 7 or 8, characterized in that, The second AOD regulating device includes: Third fixed seat; The second sliding member is slidably connected to the third fixed base along the Z-axis direction; The third adjusting seat is fixedly connected to the second sliding member; The second moving mechanism connects the third fixed base and the second sliding member, and is used to drive the second sliding member to slide along the Z-axis direction; The second rotating seat is rotatably connected to the third adjusting seat and fixedly connected to the second acoustic-optical deflector. The rotation axis of the second rotating seat is along the Y-axis. A third rotating mechanism is installed on the third adjusting seat and connected to the second rotating seat, for driving the second rotating seat to rotate relative to the third adjusting seat.

10. The acousto-optic deflector system according to claim 9, characterized in that, The first AOD adjustment device includes a second rotating mechanism, the second AOD adjustment device includes a third rotating mechanism, and at least one of the first rotating mechanism, the second rotating mechanism, and the third rotating mechanism is configured to include: Rotate the adjustment knob to connect the first adjustment seat, the first rotating seat or the second rotating seat, and use it to provide a driving force for the first adjustment seat, the first rotating seat or the second rotating seat to rotate in the first direction; A first elastic reset structure is connected to the first adjusting seat, the first rotating seat, or the second rotating seat, and is used to provide an elastic reset force for the first adjusting seat, the first rotating seat, or the second rotating seat to rotate in a second direction. The second direction is opposite to the first direction.

11. The acousto-optic deflector system according to claim 9, characterized in that, The first AOD adjustment device includes a first moving mechanism, and the second AOD adjustment device includes a second moving mechanism. At least one of the first moving mechanism and the second moving mechanism is configured to include: The adjustment knob is moved and connected to the first or second slider to provide a translational driving force for the first or second slider. A positioning adjustment knob is connected to the first sliding member or the second sliding member and is used to provide a preload force for the first sliding member or the second sliding member to achieve positioning.

12. A circuit board processing equipment, characterized in that, include: The waveplate adjustment device as described in any one of claims 1 to 5; Alternatively, the acousto-optic deflector system as described in any one of claims 6 to 11.

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