Stirring mechanism matched with crystal pulling process production

Abstract

The utility model discloses a stirring mechanism matched with crystal pulling process production and belongs to the technical field of crystal pulling process equipment. The problems that in the crystal pulling production process, filtering equipment needs to sufficiently and slowly oxidize volatile substances to prevent the volatile substances from being burnt and exploded when making contact with outside air, however, the volatile substances filtered out of an ash bin are oxidized slowly, and the production efficiency cannot be improved easily are solved. The stirring mechanism comprises an air cylinder fixing barrel, a double-rocker mechanism and an efficient mixing assembly, an air cylinder is arranged in the air cylinder fixing barrel, and a cylinder rod connector is arranged at the end of a cylinder rod of the air cylinder. The double-rocker mechanism converts linear motion of the air cylinder into rotary motion to drive the rotary arm to rotate. And the efficient mixing assembly is arranged on the rotating arm and consists of a chain and an irregular balancing weight. The mechanism enables combustibles in the ash bin to be fully oxidized, prevents deflagration, accelerates the oxidation speed, shortens the preparation time and improves the production safety and efficiency, all parts are tightly connected and easy to disassemble, and the mechanism is suitable for a crystal pulling process and other stirring occasions.

Description

TECHNICAL FIELD

[0001] The utility model relates to crystal pulling process equipment technical field especially relates to a kind of agitating mechanism of matching crystal pulling process production. BACKGROUND

[0002] Crystal pulling process is mainly through high-temperature melting polycrystalline silicon and controls its crystallization process to obtain high-quality single crystal silicon rod, and this process has decisive effect on subsequent chip manufacturing, because the purity, uniformity and size of single crystal silicon directly affect the performance and cost of chip, and crystal pulling process is an indispensable link in semiconductor manufacturing, and the quality and production efficiency of single crystal silicon rod can be improved by continuously optimizing and innovating crystal pulling process, thereby promoting the sustained development of semiconductor industry.

[0003] In the crystal pulling production process, process inert gas needs to be filtered and recovered, and a part of impurities will volatilize with inert gas when crucible heats silicon material, and these impurities need to be filtered out in the production process, and these substances will cause combustion and explosion when contacting external air, which is easy to cause safety accidents, so the filtering equipment needs to fully and slowly oxidize these volatile substances to prevent combustion and explosion when contacting external air, but the volatile substances filtered out in ash bin are slowly oxidized, which is not conducive to improving production efficiency.

[0004] In view of the above problems, the utility model file proposes a kind of agitating mechanism of matching crystal pulling process production, to solve the problems proposed above. SUMMARY

[0005] The utility model provides a kind of agitating mechanism of matching crystal pulling process production, solve the drawback that the existing technology exists in the crystal pulling production process, filtering equipment needs to fully and slowly oxidize volatile substance, prevent combustion and explosion when contacting external air, but the volatile substances filtered out in ash bin are slowly oxidized, which is not conducive to improving production efficiency.

[0006] The utility model provides the following technical scheme:

[0007] A kind of agitating mechanism of matching crystal pulling process production, comprising:

[0008] Cylinder fixed cylinder, the cylinder fixed cylinder is fixedly installed with cylinder by several screws in, the end of cylinder rod is fixedly arranged with cylinder rod joint, the lower portion of the cylinder is provided with rotating arm;

[0009] Double rocker mechanism, be located on cylinder, for converting the linear motion of cylinder into rotary motion, drive rotating arm rotation;

[0010] Efficient mixing assembly, be located on rotating arm, for improving the oxidation efficiency of volatile substance filtered out in ash bin.

[0011] In a possible design, the double-rocker mechanism comprises a connecting rod connected to the cylinder rod joint, a ratchet mechanism connected to the connecting rod through a pin, a cantilever fixedly installed on the end face of the cylinder fixing cylinder through a screw, and a bearing installed at the end of the cantilever, wherein the core shaft in the bearing is arranged through the bearing.

[0012] In a possible design, the ratchet mechanism and the rotating arm pass through the core shaft from the lower part and are locked by a nut.

[0013] In a possible design, the high-efficiency mixing assembly comprises a plurality of chains fixedly arranged at the bottom of the rotating arm through corresponding split pins, and the plurality of chains are arranged at equal distances.

[0014] In a possible design, the other end of the chain is fixedly provided with a counterweight through a corresponding split pin.

[0015] In a possible design, the plurality of counterweights are irregularly composed of positive and negative trapezoidal blades and an elliptical blade.

[0016] In a possible design, another set of ratchet mechanisms for preventing reverse rotation are installed on the cantilever and the core shaft.

[0017] In a possible design, an O-shaped sealing ring is sleeved on the base of the cylinder for improving the sealing performance of the connection between the cylinder and the cylinder fixing cylinder.

[0018] It should be understood that the foregoing general description and the following detailed description are only exemplary and cannot limit the utility model.

[0019] The beneficial effects of the utility model are as follows:

[0020] The utility model makes the combustible material in the ash bin fully oxidized, prevents the danger of deflagration, accelerates the oxidation speed, shortens the preparation time of the process, and improves the production safety and efficiency.

[0021] The irregular shape of the counterweight effectively increases the contact between oxygen and combustible material during the stirring process, thereby significantly improving the oxidation efficiency of the volatile substances filtered out in the ash bin.

[0022] The whole stirring mechanism is compact in design, the components are connected closely and easy to disassemble, subsequent maintenance and replacement are facilitated, the stirring mechanism is particularly suitable for the production process matched with the crystal pulling process, production efficiency and product quality can be effectively improved, and the stirring mechanism has certain universality and can be applied to other occasions requiring efficient stirring and mixing. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 A front view structural schematic diagram of the stirring mechanism matched with the crystal pulling process production provided by the utility model embodiment;

[0024] Figure 2 A bottom view structural schematic diagram of the stirring mechanism matched with the crystal pulling process production provided by the utility model embodiment;

[0025] Figure 3 A partial structural schematic diagram of the stirring mechanism matched with the crystal pulling process production provided by the utility model embodiment;

[0026] Figure 4 An explosion view of the stirring mechanism matched with the crystal pulling process production provided by the utility model embodiment.

[0027] The drawings show that: 1, cylinder fixed cylinder; 2, cylinder; 3, connecting rod; 4, ratchet mechanism; 5, cylinder rod joint; 6, cantilever; 7, bearing; 8, mandrel; 9, nut; 10, screw; 11, pin; 12, rotating arm; 13, chain; 14, counterweight; 15, split pin; 16, O-shaped sealing ring. DETAILED DESCRIPTION

[0028] The utility model embodiments are described below with reference to the drawings.

[0029] In the description of the utility model embodiments, it should be explained that, unless otherwise explicitly specified and limited, the terms "connection", "installation" should be understood broadly, for example, "connection" can be detachably connected, can also be non-detachably connected, can be directly connected, also can be indirectly connected through intermediate medium.In addition, "communication" can be directly communicated, also can be indirectly communicated through intermediate medium. Among them, "fixing" refers to the relative position relationship of each other after connection and does not change. The orientation language mentioned in the utility model embodiments, for example, "in", "out", "top", "bottom" and the like, is only the direction of reference drawing, therefore, the orientation language used is for better, more clearly illustrate and understand the utility model embodiments, and is not indicated or implied that the indicated or element must have a particular orientation, a particular orientation structure and operation, therefore, can not be understood as the limitation of the utility model embodiments.

[0030] In the embodiments of the present application, the terms "first", "second" are only used for description purpose, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features with "first" and "second" can explicitly or implicitly include one or more of the features.

[0031] In the embodiments of the present application, "and / or" is only a description of the association relationship of the associated objects, which means that there can be three kinds of relationships, for example, A and / or B can represent: A exists alone, A and B exist together, and B exists alone. In addition, the character " / " in this paper generally represents that the front and rear associated objects are a "or" relationship.

[0032] In the present application, the reference "one embodiment" or "some embodiments" means that in one or more embodiments of the present application, the specific features, structures or characteristics described in connection with the embodiment are included. Therefore, the statements "in one embodiment", "in some embodiments", "in other some embodiments", "in other some embodiments" and the like appearing in the present application do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized. The terms "include", "contain", "have" and their variants mean "include but not limited to", unless otherwise specifically emphasized.

[0033] Embodiment one

[0034] Please refer to Figures 1-4 A stirring mechanism, comprising:

[0035] A cylinder fixing cylinder 1, which is used as the basic support structure of the whole stirring mechanism. Inside the cylinder fixing cylinder 1, the cylinder 2 is firmly fixed and installed through a plurality of uniformly distributed screws 10. The cylinder rod end of the cylinder 2 is fixedly connected with a cylinder rod joint 5, which is used for transmitting the power of the cylinder. The lower part of the cylinder 2 is provided with a rotating arm 12.

[0036] In order to realize the one-way rotation of the rotating arm 12, a double rocker mechanism is designed, which is mainly composed of a connecting rod 3, a ratchet mechanism 4 and auxiliary components. Specifically, one end of the connecting rod 3 is connected with the cylinder rod joint 5 through a pin 11, and the other end is connected with the ratchet mechanism 4. At one end of the cylinder fixing cylinder 1, a cantilever 6 is installed through a screw 10. The end of the cantilever 6 is provided with a bearing 7, and a core shaft 8 is arranged in the bearing 7. The ratchet mechanism 4 and the rotating arm 12 pass through the lower part of the core shaft 8 respectively and are locked outside by a nut 9 to ensure the stability of the structure. When the cylinder rod of the cylinder 2 works, the connecting rod 3 is pushed through the cylinder rod joint 5, and then the ratchet mechanism 4 is driven to swing left and right. Because of the one-way rotation characteristic of the ratchet mechanism 4, the core shaft 8 drives the rotating arm 12 to rotate only in one direction, starting the stirring process.

[0037] In order to further ensure the one-way rotation of the rotating arm 12, an additional ratchet mechanism 4 is installed on the cantilever 6 and the core shaft 8, which plays a role in preventing reverse rotation, and is responsible for bringing the cantilever back when the cylinder retracts, preventing the friction of the ratchet mechanism 4 from driving the core shaft 8 and the rotating arm 12 to reverse when the ratchet mechanism 4 swings in empty stroke.

[0038] In order to improve the oxidation efficiency of volatile substances in the ash bin, a high-efficiency mixing assembly is designed, which is mainly composed of a plurality of chains 13 and counterweights 14. The chains 13 are fixedly installed at the bottom of the rotating arm 12 through split pins 15 at equal intervals, and the other end is connected with the counterweight 14 through the split pin 15. The counterweight 14 is designed with unique ingenuity, which is composed of regular combination of positive and negative trapezoidal blades and elliptical blades. Such design can increase the contact between oxygen and combustible substances during stirring, thereby improving the oxidation efficiency of volatile substances.

[0039] The present application can be used in the production of crystal pulling process, and can also be used in other fields suitable for the present application.

[0040] Example two

[0041] Based on the improvement of example one:

[0042] A stirring mechanism matched with the production of crystal pulling process is applied in the field of crystal pulling process equipment.

[0043] Reference Figure 4 In order to improve the sealing performance of the connection between the cylinder 2 and the cylinder fixing cylinder 1, and avoid gas leakage or dust entering, an O-shaped sealing ring 16 is specially provided on the base of the cylinder 2. The sealing ring can effectively prevent external gas or impurities from entering the internal mechanism, and prevent internal gas from leaking outside, ensuring the stable operation of the stirring mechanism under harsh working conditions.

[0044] To sum up, the stirring mechanism in the embodiment has high efficiency in stirring and oxidizing volatile substances in the ash bin, improves the overall process efficiency and product quality, and ensures the reliability and durability of the stirring mechanism in a complex environment through the increased sealing and non-return device.

[0045] However, as known by those skilled in the art, the working principle and wiring method of the air cylinder 2 and the ratchet mechanism 4 are common, which belong to conventional means or common general knowledge, and will not be described here again.

[0046] The working principle and use process of the technical solution are as follows:

[0047] In use, the air cylinder 2, the connecting rod 3, the ratchet mechanism 4 and the cantilever 6 constitute a double rocker mechanism, the air cylinder 2 is started by connecting the gas source or the power source, the cylinder rod of the air cylinder 2 starts to extend, the connecting rod 3 is pushed by the cylinder rod joint 5, and the ratchet mechanism 4 is driven to swing left and right, because of the one-way rotation characteristic of the ratchet mechanism 4, the mandrel 8 can only rotate in one direction to drive the rotating arm 12 to start the stirring process, the rotating arm 12 drives the high-efficiency mixing assembly to rotate in the ash bin, the combination of the chain 13 and the counterweight 14 mixes and stirs the materials in the ash bin, and the special shape (forward and reverse trapezoidal scrapers and oval scrapers) of the counterweight 14 increases the complexity and efficiency of stirring, which helps to improve the oxidation efficiency of volatile substances.

[0048] In order to prevent the friction of the ratchet mechanism 4 from driving the mandrel 8 and the rotating arm 12 to reverse when the ratchet mechanism 4 swings in the idle stroke, another ratchet mechanism 4 installed on the cantilever 6 and the mandrel 8 can prevent the reverse rotation, and maintain the stirring effect, when the predetermined stirring time or effect is reached, the power source or gas source of the air cylinder 2 is turned off, the rotating arm 12 stops rotating, and the stirring process is completed.

[0049] The above is only a specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can easily think of changes or replacements within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model; in the case of no conflict, the embodiments and the features in the embodiments of the utility model can be combined with each other. Therefore, the protection scope of the utility model should be subject to the protection scope of the claims.

Claims

1. A stir mechanism for a puller process, characterized in that, Include: The cylinder fixed cylinder (1), the cylinder (2) is fixedly installed in the cylinder fixed cylinder (1) through a plurality of screws (10), the end of the cylinder rod of the cylinder (2) is fixedly provided with a cylinder rod joint (5), the lower portion of the cylinder (2) is provided with a rotating arm (12); Double rocker mechanism, set on the cylinder (2), for converting the linear motion of the cylinder (2) into rotary motion, driving the rotating arm (12) to rotate; Efficient mixing assembly, provided on the rotating arm (12), for improving the oxidation efficiency of volatile substances filtered out in the ash bin.

2. A stir mechanism produced by a complete Czochralski process according to claim 1, characterized in that: The double rocker mechanism includes a connecting rod (3) connected to the cylinder rod joint (5), a ratchet mechanism (4) connected to the connecting rod (3) through a pin (11), a cantilever (6) fixedly installed on the end face of the cylinder fixed cylinder (1) through a screw (10), a bearing (7) installed on the end of the cantilever (6), and a core shaft (8) in the bearing (7) in a penetrating manner.

3. A stir mechanism produced by a complete Czochralski process according to claim 2, characterized in that: The ratchet mechanism (4) and the rotating arm (12) pass through the core shaft (8) from the lower portion and are locked by a nut (9).

4. A stir mechanism produced by a complete Czochralski process according to claim 1, characterized in that: The efficient mixing assembly includes a plurality of chains (13) fixedly provided at the bottom of the rotating arm (12) through corresponding split pins (15), and the plurality of chains (13) are equidistantly arranged.

5. A stir mechanism produced by a complete Czochralski process according to claim 4, characterized in that: The other end of the chain (13) is fixedly provided with a counterweight (14) through a corresponding split pin (15).

6. A stir mechanism produced by a complete Czochralski process according to claim 2, characterized in that: Another set of ratchet mechanisms (4) for preventing reverse rotation are installed on the cantilever (6) and the core shaft (8).

7. A stir mechanism produced by a complete Czochralski process according to claim 1, characterized in that: An O-shaped sealing ring (16) is sleeved on the base of the cylinder (2) to improve the sealing performance of the connection between the cylinder (2) and the cylinder fixed cylinder (1).

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