Mask observation mechanism of large-size mask production line

Abstract

The utility model relates to the technical field of mask production lines, and discloses a mask observation mechanism of a large-size mask production line, which comprises a blanking robot and a blanking clamping jaw arranged at the movable end of the blanking robot, and the blanking clamping jaw is provided with a camera identification assembly matched with the movable clamping jaw. The camera recognition assembly is used for recognizing and positioning the position of a Box, an observation table is arranged on one side of the discharging robot, a vertical plate clamping assembly is arranged on the observation table, and the vertical plate clamping assembly comprises a pair of vertical beams and a supporting base, the vertical beams can synchronously move face to face or back to back, and the supporting base can move in the vertical direction. When the mask placing device is in butt joint with an upstream discharging robot, the mask is in a vertical state, the dust falling risk is small, workers can observe the mask face and the mirror face on the two sides of the mask respectively, manual face turning is not needed, the mask placing precision is greatly improved, the collision risk is small, the burden of the workers is relieved, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to mask production line technical field, concretely is a mask observation mechanism of large size mask production line. BACKGROUND

[0002] When the photomask is discharged, the two sides of the mask need to be visually inspected, and the existing photomask discharge mechanism is placed flat by the upstream robot, which requires personnel to inspect the film surface on the discharge mechanism, and then manually turn over the mask to inspect the mirror surface, which has a risk of collision, and the personnel are close to the mask, which is in a horizontal state, and the risk of dust falling is large, and the existing discharge mechanism needs personnel to manually adjust the position of the four edge clamps when receiving the mask transported by the upstream robot, and the mask loading precision is poor. SUMMARY

[0003] (I) Technical problem solved

[0004] In view of the defects of the prior art, the utility model provides a mask observation mechanism of large size mask production line, which solves the problem that personnel cannot observe the mask before discharging and loading in the prior art, the mask is easily knocked, the risk of dust falling during observation is large, and the loading precision is poor.

[0005] (II) Technical scheme

[0006] In order to achieve the above purpose, the utility model is realized by the following technical scheme:

[0007] A mask observation mechanism of large size mask production line, comprising a discharging robot and a discharging clamp provided on the movable end of the discharging robot, a camera recognition component matched with the movable clamp is provided on the discharging clamp, the camera recognition component is used to identify and position the position of the mask Box, one side of the discharging robot is provided with an observation table, a vertical mask clamping assembly is provided on the observation table, the vertical mask clamping assembly comprises a pair of vertical beams capable of moving synchronously towards or away from each other and a support base capable of moving along the vertical direction, a plurality of V-shaped clamping blocks are uniformly arranged on the opposite end faces of the two vertical beams, and the V-shaped clamping blocks are clamped and fixed to the mask, and the support base is used to support the lower end face of the mask.

[0008] Preferably, the vertical mask clamping assembly comprises a mounting base and a pair of first linear drive modules fixedly arranged on the mounting base, the movable end of the first linear drive module is drivingly connected with a sliding base, the vertical beam is fixedly arranged on the sliding base, and a photoelectric switch component is arranged between the sliding base and the first linear drive module to constrain the maximum movement stroke of the sliding base.

[0009] Preferably, the mounting base is fixedly provided with a second linear drive module, the movable end of the second linear drive module is fixedly connected with the support base, and the support base is symmetrically provided with support wheels which are rotationally arranged on the support base.

[0010] Preferably, the lower parts of the end faces of the vertical beams close to each other are rotationally provided with support wheels.

[0011] Preferably, the support base is fixedly connected with a stabilizing frame, the mounting base is fixedly provided with a vertical frame, and the stabilizing frame and the vertical frame are movably connected through a matching drag chain.

[0012] Preferably, the upper end face of the mounting base is provided with the matching drag chain movably connected with the sliding base.

[0013] (Three) beneficial effects

[0014] The utility model has the following beneficial effects:

[0015] The mask observation mechanism of the large-size mask production line, through the vertical mask clamping assembly, the upstream blanking robot places the mask between the vertical beams, the left and right V-shaped clamping blocks are shrunk and clamped, then the lower support base rises to support the mask, the stroke of the vertical beam and the support base is different for different sizes of masks, so that the mask center is consistent for different sizes of masks, and stable vertical clamping and placement of the mask are ensured, the mask is in a vertical state during observation, and the dust falling risk is small; through the observation table, personnel can observe the film surface mirror on both sides of the mask, without manual turning, and the production efficiency is improved. The whole unit of the utility model is linked through PLC, the repeatability of each mechanism is high, the mask placing precision is greatly improved, the collision risk is small, the delivery quality is greatly improved, the personnel burden is reduced, and the production efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a whole structure schematic view of the utility model;

[0017] Figure 2 It is a vertical mask clamping assembly layout structure schematic view of the utility model;

[0018] Figure 3 It is a support base and vertical beam layout structure schematic view of the utility model;

[0019] Figure 4 It is a first linear module and mounting base split structure schematic view of the utility model.

[0020] In the figure: 1, blanking robot; 2, blanking gripper; 3, camera recognition assembly; 4, mask plate; 5, observation platform; 6, vertical mask plate clamping assembly; 61, mounting base; 62, first linear drive module; 63, sliding base; 64, photoelectric switch assembly; 65, vertical beam; 66, V-shaped clamping block; 67, second linear drive module; 68, support base; 69, support wheel; 610, stabilizing frame; 611, vertical frame; 612, matching drag chain. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0022] Please refer to Figure 1 The utility model provides a kind of technical solutions: a mask plate 4 observation mechanism of large-size mask plate 4 production line, including blanking robot 1 and being set in the movable end of blanking robot 1 blanking gripper 2, blanking gripper 2 is provided with the camera recognition assembly 3 matched with movable gripper, camera recognition assembly 3 is used to identify the position of mask plate 4Box, one side of blanking robot 1 is provided with observation platform 5, observation platform 5 is provided with vertical mask plate clamping assembly 6, vertical mask plate clamping assembly 6 includes a pair of vertical beam 65 capable of moving synchronously towards or away from each other and support base 68 capable of moving along vertical direction, several V-shaped clamping blocks 66 are uniformly arranged on the opposite end faces of two vertical beams 65, two V-shaped clamping blocks 66 are clamped and fixed mask plate 4, support base 68 is used to support the lower end surface of mask plate 4.

[0023] The utility model, by being provided with vertical mask plate clamping assembly 6, upstream blanking robot 1 is placed between vertical beam 65 to mask plate 4, left and right V-shaped clamping block 66 is shrunk and clamped, and then lower support base 68 is raised, and mask plate 4 is supported, for different size mask plate 4, the stroke of vertical beam 65 and support base 68 is different, so that the center of different size mask plate 4 is placed consistently, and stable vertical clamping placement for mask plate 4 is guaranteed, mask plate 4 is in vertical state during observation, and the risk of dust falling is smaller;By being provided with observation platform 5, personnel can observe film surface mirror on both sides of mask plate 4 respectively, without manually turning over, improve production efficiency.The whole unit of the application is linked by PLC, the repeat accuracy of each mechanism is high, the placing accuracy is greatly improved, the risk of collision is smaller, the delivery quality is greatly improved, the personnel burden is reduced, and the production efficiency is improved.

[0024] Refer to Figure 2 And3 As shown, in the embodiment, the vertical mask clamping assembly includes a mounting base 61 and a pair of first linear drive modules 62 fixedly arranged on the mounting base 61, the movable end of the first linear drive module 62 is drivingly connected with a sliding base 63, a vertical beam 65 is fixedly arranged on the sliding base 63, and a photoelectric switch assembly 64 is arranged between the sliding base 63 and the first linear drive module 62 to constrain the maximum movement stroke of the sliding base 63. Through the first linear drive module 62 and the photoelectric switch assembly 64, the stable and accurate driving of the vertical beam 65 can be ensured, and thus the accurate positioning and clamping of the mask plate 4 of different sizes can be realized, which facilitates the subsequent personnel to observe the clamped mask plate 4 and ensures the production efficiency.

[0025] Referring to Figure 3 With 4 As shown, in the embodiment, the mounting base 61 is fixedly provided with a second linear drive module 67, the movable end of the second linear drive module 67 is fixedly connected with a support base 68, the support base 68 is symmetrically arranged with support wheels 69, and the support wheels 69 are rotatably arranged on the support base 68. Through the second linear drive module 67, the support base 68 arranged at the movable end can be freely moved in the vertical direction, and thus the clamping and positioning of the mask plate 4 of different sizes can be realized in cooperation with the first linear drive module 62, and the mask plate 4 of various sizes can be accurately centered and aligned, which facilitates the downstream unloading robot 1 to unload the mask plate 4. Through the support wheels 69, the contact area of the lower end surface of the mask plate 4 and the support part can be reduced, and the support part can be prevented from damaging the mask plate 4.

[0026] In the embodiment, the lower part of each end surface of the vertical beams 65 is rotatably provided with a support wheel 69.

[0027] In the embodiment, the support base 68 is fixedly connected with a stabilizing frame 610, the mounting base 61 is fixedly provided with a vertical frame 611, and the stabilizing frame 610 and the vertical frame 611 are movably connected through a cooperating drag chain 612.

[0028] Referring to Figure 4 As shown, in the embodiment, the upper end surface of the mounting base 61 is provided with the cooperating drag chain 612 movably connected with the sliding base 63. Through the cooperating drag chain 612, the high-precision, high-speed and high-reliability movement of the sliding base 63 and the support base 68 can be ensured, and thus the mask plate 4 to be clamped can be efficiently and accurately positioned and clamped.

[0029] It is to be noted that, in the present document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises a... " does not, without more constraints, foreclose the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0030] While embodiments of the present application have been shown and described with reference to the figures, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and alterations can be made thereto without departing from the spirit and scope of the present application, which should be limited only by the scope of the appended claims and the equivalents thereof.

Claims

1. A mask viewing mechanism of a large-size mask production line, comprising a blanking robot and a blanking gripper arranged at a movable end of the blanking robot, characterized in that: The blanking gripper is provided with a camera identification assembly matched with the movable gripper, which is used to identify the position of the positioning mask Box, one side of the blanking robot is provided with an observation platform, the observation platform is provided with a vertical mask clamping assembly, the vertical mask clamping assembly comprises a pair of vertical beams capable of moving towards or away from each other synchronously and a support base capable of moving along the vertical direction, a plurality of V-shaped clamping blocks are uniformly arranged on the opposite end faces of the two vertical beams, and the V-shaped clamping blocks are used for clamping and fixing the mask, and the support base is used to support the lower end face of the mask.

2. The mask viewing mechanism of a large mask production line according to claim 1, wherein: The vertical mask clamping assembly comprises a mounting base and a pair of first linear drive modules fixedly arranged on the mounting base, the movable end of the first linear drive module is drivingly connected with a sliding base, the vertical beam is fixedly arranged on the sliding base, and a photoelectric switch assembly is arranged between the sliding base and the first linear drive module, so as to constrain the maximum movement stroke of the sliding base.

3. The mask viewing mechanism of a large mask production line according to claim 2, wherein: The mounting base is fixedly provided with a second linear drive module, the movable end of the second linear drive module is fixedly connected with the support base, the support base is symmetrically arranged with a support wheel, and the support wheel is rotatably arranged on the support base.

4. The mask viewing mechanism of a large mask production line according to claim 3, wherein: The lower part of the end face of the vertical beam is rotatably provided with a support wheel.

5. The mask viewing mechanism of a large mask production line according to claim 3, wherein: The support base is fixedly connected with a stabilizing frame, the mounting base is fixedly provided with a vertical frame, and the stabilizing frame and the vertical frame are movably connected through a matched drag chain.

6. The mask viewing mechanism of a large mask production line according to claim 5, wherein: The upper end face of the mounting base is provided with the matched drag chain movably connected with the sliding base.

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