Wafer rack

Abstract

The embodiment of the utility model provides a wafer rack. The wafer rack comprises a supporting base and a clamping jaw, one end of the supporting base is supported on a plane; one end of each clamping jaw is arranged at the other end of the supporting base, the other end of each clamping jaw obliquely extends back to the supporting base, and the at least three clamping jaws are evenly arranged around the supporting base to form a clamping space. Through the arrangement of the embodiment of the invention, the wafer rack which is convenient to clamp the wafer, stable in clamping and convenient for visual inspection of the wafer is provided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer racks, in particular to a wafer rack. BACKGROUND

[0002] Wafer refers to the wafer used for semiconductor integrated circuit manufacturing. Since its shape is circular, it is called wafer. For example, the third generation of semiconductor material represented by silicon carbide wafer has the advantages of wide band gap, strong thermal stability, high thermal conductivity and strong radiation resistance, and is known for its high temperature resistance, high pressure resistance and high frequency. It has a wide application prospect in the field of power semiconductors and becomes the forefront of technical research and the focus of industrial competition of semiconductor materials.

[0003] The production process of silicon carbide wafer includes a series of complex steps such as crystal growth, cutting, grinding, polishing, cleaning and detection. In the above multiple steps, there is a step of visually inspecting the wafer to preliminarily judge the wafer surface defects. During visual inspection, the wafer is usually vacuum adsorbed by a suction pen and adsorbed on the suction port of the suction pen.

[0004] However, the whole wafer cannot be checked at one time due to the shielding of the suction pen to the wafer. Utility model content

[0005] The embodiment of the present application provides a wafer rack to solve the technical problem that the whole wafer cannot be checked at one time due to the shielding of the suction pen to the wafer in the related art.

[0006] The embodiment of the present application provides a wafer rack, which comprises a supporting base and a clamping jaw.

[0007] One end of the supporting base is supported on a plane;

[0008] The other end of the clamping jaw is disposed on the other end of the supporting base, and the other end of the clamping jaw extends obliquely away from the supporting base. At least two clamping jaws are evenly arranged around the supporting base to form a clamping space.

[0009] In a feasible implementation manner, the wafer rack further comprises an elastic mechanism, the elastic mechanism is arranged at one end of the at least one clamping jaw, and the elastic mechanism is configured to drive the at least one clamping jaw to move towards the center of the clamping space or away from the center of the clamping space, so that the side wall of the clamping jaw abuts against the side wall of the wafer.

[0010] In a feasible implementation manner, the other end of the supporting base is provided with a movable cavity, and the supporting base is further provided with a first through hole and a second through hole communicating with the movable cavity. The first through hole, the center of the clamping space and the second through hole are located on the same straight line.

[0011] One end of the elastic mechanism sequentially passes through the first through hole, the movable cavity and the second through hole, and is connected with one end of the clamping jaw, and the elastic mechanism is slidingly arranged in the movable cavity.

[0012] In an implementation, the elastic mechanism comprises a movable rod and an elastic member.

[0013] One end of the movable rod is connected to one end of the second through hole and one end of the claw, the other end of the movable rod extends towards the first through hole and is capable of abutting against the second through hole, the elastic member is sleeved on the movable rod, one end of the elastic member abuts against the end wall of the movable cavity close to the claw, the other end of the elastic member extends along the movable rod and is fixed to the side wall of the movable rod, and the elastic member is arranged in the movable cavity.

[0014] In an implementation, the elastic mechanism further comprises a stopper and a movable button, the stopper is arranged on the side wall of the movable rod, the radial dimension of the stopper is greater than the radial dimension of the first through hole, and the other end of the elastic member is fixed to the stopper.

[0015] One end of the movable button is arranged on the stopper, and the other end of the movable button extends away from the stopper and passes through the first through hole.

[0016] In an implementation, the support base comprises a lifting assembly, the lifting assembly comprises a first support rod and a second support rod, and one end of the first support rod is provided with an adjusting cavity.

[0017] One end of the second support rod is supported on the plane, the other end of the second support rod extends towards the adjusting cavity, and the second support rod is slidingly arranged in the adjusting cavity.

[0018] In an implementation, the other end of the first support rod is provided with an arc-shaped groove.

[0019] The support base further comprises an angle adjusting assembly, one end of the angle adjusting assembly is provided with a universal joint which is mutually adapted to the arc-shaped groove, and the other end of the angle adjusting assembly is provided with a claw.

[0020] In an implementation, the angle adjusting assembly further comprises a first fastener, the first support rod is provided with a third through hole which penetrates the arc-shaped groove, and the first fastener is capable of abutting against the universal joint through the third through hole.

[0021] In an implementation, the lifting assembly further comprises a second fastener, the first support rod is further provided with a fourth through hole which penetrates the adjusting cavity, and the second fastener is capable of abutting against the second support rod through the fourth through hole.

[0022] In an implementation, the other end of the claw is provided with a limiting protrusion which extends away from the support base by the side wall of the claw.

[0023] This application provides a wafer rack. Through the arrangement of jaws, a clamping space is formed to hold the wafer. Within this clamping space, the sidewalls of the jaws abut against the sidewalls of the wafer, thus confining the wafer within the clamping space. This allows for unobstructed observation of both the top and bottom surfaces of the wafer during visual inspection, facilitating a single, simultaneous inspection of both sides. Furthermore, this application provides a support base that stably supports the jaws on a flat surface, further facilitating visual inspection of the wafer on the jaws. Through the design of this application, a wafer rack is provided that facilitates easy and stable wafer clamping and allows for convenient visual inspection. Attached Figure Description

[0024] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0025] Figure 1 This is a schematic diagram of a wafer rack structure provided in one embodiment of this application. Figure 1 ;

[0026] Figure 2 This is a schematic diagram of a wafer rack structure provided in one embodiment of this application. Figure 2 ;

[0027] Figure 3 yes Figure 2 A schematic diagram of the assembly of a wafer rack and a wafer;

[0028] Figure 4 yes Figure 3 A sectional view.

[0029] Explanation of reference numerals in the attached figures:

[0030] 100 - Wafer; 200 - Support base; 300 - Claw; 400 - Flexible mechanism;

[0031] 210 - Lifting assembly; 211 - First support rod; 211a - Arc groove; 211b - Adjustment cavity; 212 - Second support rod; 213 - Support platform; 220 - Angle adjustment assembly; 221 - Universal joint; 222 - First fastener; 223 - Movable cavity; 230 - Second fastener;

[0032] 310 - Clamping space; 320 - Limiting protrusion;

[0033] 410 - Movable lever; 420 - Elastic element; 430 - Stop; 440 - Movable button; 450 - First guide block; 460 - Second guide block. Detailed Implementation

[0034] In order to better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described in the following with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts should fall within the scope of protection of the present application.

[0035] It should be noted that in the following description, many specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced according to other embodiments that are not explicitly described or illustrated herein. In other instances, well-known methods, procedures and components have not been described in detail so as not to unnecessarily obscure aspects of the present application.

[0036] In the description of the present application, it should be understood that the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship shown in the drawings based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium.

[0037] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be direct connection, or indirect connection through an intermediate medium; it can be internal communication of two elements or interaction relationship between two elements. However, it is noted that direct connection means that the connection between the two main bodies does not form a connection relationship through an excessive structure, but is connected to form a whole only through the connection structure. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0038] In the present application, the description such as "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features.

[0039] Wafer refers to the wafer used for silicon semiconductor integrated circuit manufacturing. Since its shape is circular, it is called wafer. For example, the third generation of semiconductor material represented by silicon carbide wafer has the advantages of wide band gap, strong thermal stability, high thermal conductivity and strong radiation resistance, and is known for high temperature resistance, high pressure and high frequency. It has a wide application prospect in the field of power semiconductors, and becomes the technical research frontier and industrial competition focus of semiconductor materials.

[0040] The production process of silicon carbide wafer includes crystal growth, cutting, grinding, polishing, cleaning, detection and a series of complex steps. In the above multiple steps, a step of visually inspecting and preliminarily judging the wafer surface defects is needed. During visual inspection, the wafer is usually vacuum adsorbed by a suction pen, and the wafer is adsorbed on the suction port of the suction pen.

[0041] However, the wafer cannot be checked at one time due to the shielding of the suction pen.

[0042] Therefore, the wafer holder provided by the embodiments of the present application solves the technical problem that the whole wafer cannot be checked at one time due to the shielding of the suction pen in the related art.

[0043] Figure 1 is a structure diagram of a wafer holder provided by an embodiment of the present application Figure 1 .

[0044] The embodiments of the present application provide a wafer holder, referring to Figure 1 , comprising a support base 200 and a clamping jaw 300;

[0045] One end of the support base 200 is supported on a plane;

[0046] One end of the clamping jaw 300 is arranged at the other end of the support base 200, and the other end of the clamping jaw 300 extends obliquely away from the support base 200, and at least three clamping jaws 300 are evenly arranged around the support base 200 to form a clamping space 310 for carrying the wafer 100.

[0047] For example, the three clamping jaws 300 are respectively a first clamping jaw, a second clamping jaw and a third clamping jaw. Among them, the first clamping jaw 300, the second clamping jaw 300 and the third clamping jaw 300 are evenly arranged around the support mechanism to form a conical clamping space 310.

[0048] From the above description, it can be seen that the present scheme achieves the following technical effects:

[0049] This application provides a wafer rack. Through the arrangement of jaws 300, a clamping space 310 is formed for holding a wafer 100. The wafer 100 is placed within the clamping space 310, and the sidewalls of the jaws 300 abut against the sidewalls of the wafer 100, thus confining the wafer 100 within the clamping space 310. This facilitates visual inspection of the top and bottom surfaces of the wafer 100, allowing for simultaneous visual inspection of both surfaces. Furthermore, the application provides a support base 200, which stably supports the jaws 300 on a flat surface, facilitating visual inspection of the wafer on the jaws. Through the design of this application, a wafer rack is provided that facilitates easy and stable clamping of wafers and allows for convenient visual inspection of the wafer 100.

[0050] Figure 2 This is a schematic diagram of a wafer rack structure provided in one embodiment of this application. Figure 3 ; Figure 2 yes Figure 4 A schematic diagram of the assembly of a wafer rack and a wafer; Figure 3 yes Figures 2 to 4 A sectional view.

[0051] In some examples, refer to ​ The wafer rack also includes an elastic mechanism 400, which is disposed at one end of at least one claw 300. The elastic mechanism 400 is configured to drive at least one claw 300 to move toward or away from the center of the clamping space 310, so that the sidewall of the claw 300 abuts against the sidewall of the wafer 100.

[0052] For example, the elastic mechanism 400 may include a spring and a connecting portion. One end of the spring is fixed to the surface of the support base 200 where the claw 300 is located, and the other end of the spring is connected to one end of the connecting portion. The other end of the connecting portion is connected to the first claw 300. In a specific implementation, the centers of the spring, the connecting portion, and the clamping space 310 are located on the same straight line.

[0053] In specific implementation, when it is necessary to clamp the wafer 100, the elastic mechanism 400 drives at least one claw 300 to move away from the center of the clamping space 310. After the wafer 100 is placed in the clamping space 310, the elastic mechanism 400 drives at least one claw 300 to move closer to the center of the clamping space 310, so that the sidewalls of all claws 300 abut against the sidewalls of the wafer 100.

[0054] The wafer holder provided by the embodiments of the present application can drive the at least one claw 300 to move away from the center of the clamping space 310, so as to clamp the wafer 100 in the clamping space 310. The wafer holder provided by the embodiments of the present application can drive the at least one claw 300 to move towards the center of the clamping space 310, so as to fix the wafer 100 in the clamping space 310. Further, the wafer 100 is fixed by the claw 300 with the side wall of the wafer 100, so that the staff can observe the upper and lower surfaces of the wafer 100 without obstruction during the visual inspection, and the visual inspection of the wafer 100 is facilitated.

[0055] In some examples, the other end of the support base 200 is provided with a movable cavity 223, and the support base 200 is further provided with a first through hole and a second through hole communicating with the movable cavity 223, wherein the first through hole, the center of the clamping space 310 and the second through hole are located on the same straight line.

[0056] One end of the elastic mechanism 400 sequentially passes through the first through hole, the movable cavity 223 and the second through hole, and is connected to one end of the claw 300, and the elastic mechanism 400 is slidingly arranged in the movable cavity 223.

[0057] The embodiments of the present application provide the movable cavity 223 at the other end of the support base 200, and the support base 200 is further provided with the first through hole and the second through hole communicating with the movable cavity 223. The elastic mechanism 400 can reciprocate along the first through hole, the movable cavity 223 and the second through hole, so as to drive one of the claws 300 to move towards or away from the center of the clamping space 310, so as to facilitate the taking and placing of the wafer 100, and stably fix the wafer 100 in the wafer holder.

[0058] For example, the elastic mechanism 400 includes a movable rod 410 and an elastic member 420.

[0059] One end of the movable rod 410 passes through the second through hole and is connected to one end of the claw 300, and the other end of the movable rod 410 extends towards the first through hole and can abut against the second through hole. The elastic member 420 is sleeved on the movable rod 410, one end of the elastic member 420 abuts against the end wall of the movable cavity 223 close to the claw 300, the other end of the elastic member 420 extends along the movable rod 410 and is fixed to the side wall of the movable rod 410, and the elastic member 420 is arranged in the movable cavity 223.

[0060] For example, the elastic member 420 can be a spring. Of course, the elastic member 420 can also be an elastic bellows, which is not limited here.

[0061] For example, when the elastic member 420 is a spring, it can be a compression spring.

[0062] For another example, the other end of the movable rod 410 can pass through the first through hole.

[0063] The embodiment of the present application sets the movable rod 410 and the elastic member 420, when the elastic member 420 is elongated or compressed, to drive the movable rod 410 to reciprocate along the line connecting the first through hole, the movable cavity 223 and the second through hole, and further drive the clamping jaw 300 to reciprocate towards or away from the center of the clamping space 310.

[0064] For example, the elastic mechanism 400 further includes a stopper 430 and a movable button 440, the stopper 430 is arranged on the side wall of the movable rod 410, and the radial dimension of the stopper 430 is greater than the radial dimension of the first through hole, and the other end of the elastic member 420 is fixed to the stopper 430.

[0065] One end of the movable button 440 is arranged on the stopper 430, and the other end of the movable button 440 extends away from the stopper 430 and passes through the first through hole.

[0066] For example, the elastic mechanism 400 further includes a first guide block 450 and a second guide block 460, the first guide block 450 is arranged on the end of the elastic member 420 close to the clamping jaw 300, the second guide block 460 is arranged between the stopper 430 and the first through hole, and the movable rod 410 passes through the first guide block 450 and the second guide block 460 in sequence and is connected by the stopper 430 and the movable button 440.

[0067] The embodiment of the present application sets the movable button 440, when the clamping jaw 300 needs to move away from the clamping center, the movable button 440 is pushed to move towards the corresponding clamping jaw 300, which facilitates the movement of the clamping jaw 300.

[0068] In some other implementations, the support base 200 includes a lifting assembly 210, the lifting assembly 210 includes a first support rod 211 and a second support rod 212, one end of the first support rod 211 is provided with an adjusting cavity 211b.

[0069] One end of the second support rod 212 is supported on the plane, the other end of the second support rod 212 extends towards the adjusting cavity 211b, and the second support rod 212 is slidingly arranged in the adjusting cavity 211b.

[0070] For example, one end of the second support rod 212 is provided with a support platform 213, and the outer diameter of the support platform 213 is larger, so as to stably support the clamping jaw 300.

[0071] The embodiment of the present application realizes the reciprocating movement of the second supporting rod 212 along the extension direction of the adjusting cavity 211b by setting the adjusting cavity 211b at one end of the first supporting rod 211, extending the other end of the second supporting rod 212 to the adjusting cavity 211b, and slidingly arranging the second supporting rod 212 in the adjusting cavity 211b, so that the height adjustment of the clamping jaw 300 can be realized by the cooperation of the first supporting rod 211 and the second supporting rod 212, and the height adjustment of the wafer 100 is further realized, and then the staff can conveniently perform the visual inspection on the wafer 100.

[0072] In some other examples, the other end of the first supporting rod 211 is provided with an arc-shaped groove 211a, and the support base 200 further comprises an angle adjusting assembly 220; one end of the angle adjusting mechanism is provided with a universal joint 221 which is mutually matched with the arc-shaped groove 211a, and the other end of the angle adjusting mechanism is provided with the clamping jaw 300.

[0073] The embodiment of the present application can adjust the angle of the clamping jaw 300 by adjusting the angle of the angle adjusting assembly 220 through the cooperation of the universal joint 221 and the arc-shaped groove 211a, and then the angle of the wafer 100 is adjusted, so that the staff can conveniently perform the visual inspection on the wafer 100 from various angles.

[0074] For example, the first fastener 222 can be a first bolt which abuts against the universal joint 221 through the third through hole.

[0075] For example, the first fastener 222 can be a first bolt which abuts against the universal joint 221 through the third through hole.

[0076] The embodiment of the present application can fix the universal joint 221 by adjusting the first fastener 222 to pass through the third through hole and abut against the universal joint 221, so that the angle adjusting assembly 220 is fixed at a certain angle, and the visual inspection on the wafer 100 is facilitated.

[0077] For example, the first fastener 222 can be a first bolt which abuts against the universal joint 221 through the third through hole.

[0078] For example, the second fastener 230 can be a second bolt which abuts against the second supporting rod 212 through the fourth through hole.

[0079] The second fastener 230 is arranged to pass through the fourth through hole and abut against the second support rod 212, so that the second support rod 212 is fixed at a certain fixed height, i.e., the claw 300 is fixed at a certain height, thereby facilitating the visual inspection of the wafer 100.

[0080] For example, the other end of the claw 300 is arranged with a limiting protrusion 320 extending from the sidewall of the claw 300 away from the support base 200.

[0081] The limiting protrusion 320 is arranged to limit the wafer 100, thereby preventing the wafer 100 from falling off the clamping space 310 and improving the stability of the wafer 100 in the clamping space 310.

[0082] It is easy to understand that, based on the several embodiments provided by the present application, other embodiments can be obtained by combining, splitting, recombining, etc. of the embodiments of the present application, and these embodiments do not exceed the protection scope of the present application.

[0083] The above detailed description of the embodiments of the present application further describes the purposes, technical solutions and beneficial effects of the embodiments of the present application. It should be understood that the above is only a specific implementation of the embodiments of the present application, and is not used to limit the protection scope of the embodiments of the present application. Any modification, equivalent replacement, improvement, etc. made on the basis of the technical solutions of the embodiments of the present application should be included in the protection scope of the embodiments of the present application.

Claims

1. A wafer rack, characterized by, The support base and the clamping jaw are provided; One end of the clamping jaw is provided on the support base; The other end of the clamping jaw is inclined to extend away from the support base, and at least three clamping jaws are uniformly provided around the support base to form a circular clamping space for clamping the sidewall of the wafer.

2. The wafer carrier of claim 1, wherein, The wafer holder further comprises an elastic mechanism provided at one end of at least one clamping jaw, and the elastic mechanism is configured to drive at least one clamping jaw to move towards or away from the center of the clamping space, so that the sidewall of the clamping jaw abuts against the sidewall of the wafer.

3. The wafer rack of claim 2, wherein, The other end of the support base is provided with a movable cavity, and the support base is further provided with a first through hole and a second through hole communicating with the movable cavity, wherein the first through hole, the center of the clamping space and the second through hole are located on the same straight line. One end of the elastic mechanism sequentially passes through the first through hole, the movable cavity and the second through hole, and is connected to one end of one of the clamping jaws, and the elastic mechanism is slidingly arranged in the movable cavity.

4. The wafer rack of claim 3, wherein, The elastic mechanism comprises a movable rod and an elastic member. One end of the movable rod passes through the second through hole and is connected to one end of one of the clamping jaws, the other end of the movable rod extends towards the first through hole and can abut against the second through hole, the elastic member is sleeved on the movable rod, one end of the elastic member abuts against the end wall of one of the clamping jaws in the movable cavity, the other end of the elastic member extends along the movable rod and is fixed to the sidewall of the movable rod, and the elastic member is arranged in the movable cavity.

5. The wafer carrier of claim 4, wherein, The elastic mechanism further comprises a stop portion and a movable button, the stop portion is arranged on the sidewall of the movable rod, and the radial dimension of the stop portion is greater than the radial dimension of the first through hole, and the other end of the elastic member is fixed to the stop portion; One end of the movable button is arranged on the stop portion, and the other end of the movable button extends away from the stop portion and passes through the first through hole.

6. A wafer carrier according to any one of claims 1-5, wherein, The support base comprises a lifting assembly, the lifting assembly comprises a first support rod and a second support rod, and one end of the first support rod is provided with an adjusting cavity. One end of the second support rod is supported on a plane, the other end of the second support rod extends towards the adjusting cavity, and the second support rod is slidingly arranged in the adjusting cavity.

7. The wafer carrier of claim 6, wherein: The other end of the first support rod is provided with an arc-shaped groove. The support base further comprises an angle adjusting assembly, one end of the angle adjusting assembly is provided with a universal joint matched with the arc-shaped groove, and the other end of the angle adjusting assembly is provided with the clamping jaw.

8. The wafer rack of claim 7, wherein, The angle adjusting assembly further comprises a first fastener, the first support rod is provided with a third through hole penetrating through the arc-shaped groove, and the first fastener can pass through the third through hole to abut against the universal joint.

9. The wafer carrier of claim 6, wherein, The lifting assembly further comprises a second fastener, the first support rod is further provided with a fourth through hole penetrating through the adjusting cavity, and the second fastener can pass through the fourth through hole to abut against the second support rod.

10. A wafer holder according to any one of claims 1-5, wherein The other end of the clamping jaw is provided with a limiting protrusion extending away from the support base.

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