Furnace body structure for growing gallium nitride single crystal by HVPE method

Abstract

The utility model relates to the technical field of furnace bodies of gallium nitride single crystals, in particular to a furnace body structure for growing the gallium nitride single crystals by an HVPE method, which comprises a lifting box, rotating rods are symmetrically and rotatably mounted in the lifting box, a rotating shaft is fixedly mounted at one end of each rotating rod, a mounting groove is formed in each rotating shaft, and the rotating rods are fixedly mounted in the mounting grooves. A plurality of rectangular openings are formed in the surface of the rotating shaft, and a plurality of material passing pipes are mounted on the rotating shaft; a rotating ring is mounted in the mounting groove, and a discharging pipe is mounted in the through opening. When two rotating shafts drive a plurality of stirring rods to rotate, materials in a lifting box can intermittently enter two mounting grooves at the moment and then are thrown out from a plurality of material passing pipes under the action of centrifugal force, and the thrown-out materials can achieve a turbulent flow effect, so that the working efficiency of material mixing is improved, and the working efficiency of material mixing is improved. Meanwhile, the thrown-out materials can be transferred to other positions including the area away from the stirring rod, and the mixing area can be enlarged.

Description

TECHNICAL FIELD

[0001] The utility model relates to the furnace body technical field of gallium nitride single crystal, especially to a furnace body structure of HVPE method growth gallium nitride single crystal. BACKGROUND

[0002] Gallium nitride is a kind of semiconductor with larger band gap, belongs to the wide band gap semiconductor, and gallium nitride is excellent material of microwave power transistor, is the new type semiconductor material of developing microelectronic device, optoelectronic device, has wide direct band gap, strong atomic bond, high thermal conductivity, good chemical stability and strong anti-radiation, high temperature resistance, high pressure resistance.

[0003] The patent with the publication number CN221440933U discloses a furnace body structure of HVPE method growth gallium nitride single crystal, which can observe the state of internal materials during work, adjust the heating position of materials according to needs, and mix materials conveniently, thereby effectively improving work efficiency.

[0004] The above patent document only uses multiple stirring rods with single rotating direction to mix materials, which needs a long time to realize material mixing and has slow mixing efficiency. UTILITY MODEL CONTENT

[0005] The utility model discloses a kind of furnace body structures of HVPE method growth gallium nitride single crystal, to solve the following shortcomings in prior art, the furnace body of existing technology is only used to mix material by multiple stirring rods with single rotating direction, needs to spend long time to realize material mixing, mixing efficiency is slow, and the furnace body structure of HVPE method growth gallium nitride single crystal is proposed.

[0006] To achieve the above object, the utility model adopts the following technical scheme:

[0007] A kind of furnace body structure of HVPE method growth gallium nitride single crystal, including lifting box, the lifting box is symmetrically rotated and is installed with rotating rod, one end of the rotating rod is fixedly installed with rotating shaft, two rotating rods are controlled relative rotation by drive assembly, the surface of the rotating shaft is fixedly installed with multiple stirring rods in the form of circumference, the end of the rotating shaft away from rotating rod is provided with installation slot, the surface of the rotating shaft is provided with multiple rectangular ports that are communicated with installation slot, the surface of the rotating shaft is fixedly installed with multiple material pipes that are respectively covered multiple rectangular ports;

[0008] The slot mouth of the mounting slot is sealingly rotatably provided with a rotating ring, a circular opening is formed in the center of the rotating ring, a mounting rod is sealingly rotatably arranged in the circular opening, one end of the mounting rod in the mounting slot is fixedly connected with the slot wall of the mounting slot through a connecting component, the rotating ring is rotatably limited by a limiting component, a through opening is formed in the surface of the rotating ring, a discharge pipe is fixedly arranged in the through opening, a straight rod is fixedly arranged at one end of the discharge pipe, an inlet slot is formed at one end of the straight rod, a piston rod is sealingly arranged in the inlet slot, a reciprocating thread is formed in the surface of the mounting rod, a sliding plate is threadedly sleeved on the mounting rod, the two sliding plates are fixedly connected with the two piston rods respectively, a feeding pipe is fixedly arranged on the lower surface of the straight rod, and one-way valves are arranged in the feeding pipe, the discharge pipe and the material pipe.

[0009] Preferably, the one-way valve in the discharge pipe is arranged to be open from the inlet slot to the mounting slot, the one-way valve in the feeding pipe is arranged to be open from the lifting box to the inlet slot, and the one-way valve in the material pipe is arranged to be open from the mounting slot to the lifting box.

[0010] Preferably, the driving assembly comprises a driving motor and two gears fixedly sleeved on the two rotating rods, the two gears are meshingly connected, an installation shell is fixedly arranged on the inner wall of the lifting box, symmetrical through openings are formed in the surface of the installation shell, the two rotating rods are sealingly rotatably arranged in the two through openings respectively, the driving motor is fixedly arranged in the installation shell, and the output shaft is fixedly connected with one of the rotating rods.

[0011] Preferably, the connecting component comprises an installation ring fixedly sleeved on the mounting rod and a connecting rod fixedly arranged on the outer ring wall of the installation ring, and one end of the connecting rod is fixedly connected with the slot wall of the mounting slot.

[0012] Preferably, the limiting component comprises a fixed rod, and the two ends of the fixed rod are fixedly connected with the inner wall of the lifting box and the surface of the rotating ring respectively.

[0013] Preferably, a space for preventing the stirring rods from colliding is reserved between the two rotating shafts.

[0014] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0015] When the two rotating shafts rotate with the plurality of stirring rods, the material in the lifting box will intermittently enter the two mounting slots, and then be thrown out of the plurality of material pipes under the action of centrifugal force, the thrown material can play a turbulence effect, thereby accelerating the working efficiency of material mixing, and the thrown material can be transferred to other positions, including areas far away from the stirring rods, so that the mixing area can be expanded. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1A front perspective structure schematic view of the furnace body structure for growing gallium nitride single crystal by HVPE method is provided in the utility model.

[0017] Figure 2 A top perspective structure schematic view of the furnace body structure for growing gallium nitride single crystal by HVPE method is provided in the utility model.

[0018] Figure 3 A partial perspective sectional structure schematic view of the rotating shaft, rotating rod, mounting rod and driving assembly in the furnace body structure for growing gallium nitride single crystal by HVPE method is provided in the utility model.

[0019] Figure 4 A partial perspective sectional structure schematic view of the rotating shaft and mounting rod in the furnace body structure for growing gallium nitride single crystal by HVPE method is provided in the utility model.

[0020] Figure 5 For Figure 4 An enlarged view of structure A in the middle.

[0021] In the figure: 1 lifting box, 2 fixed rod, 3 connecting rod, 4 rotating rod, 5 rotating shaft, 6 stirring rod, 7 mounting groove, 8 rotating ring, 9 mounting rod, 10 discharge pipe, 11 straight rod, 12 feeding slot, 13 piston rod, 14 sliding plate, 15 feeding pipe, 16 rectangular port, 17 material pipe, 18 driving motor, 19 gear, 20 mounting shell, 21 mounting ring. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments.

[0023] The terms such as "upper", "lower", "left", "right", "middle" and "one" cited in the utility model are only for the convenience of clear description, rather than to limit the scope of the utility model that can be implemented. The change or adjustment of the relative relationship, without substantial change of the technical content, is also regarded as the scope of the utility model that can be implemented.

[0024] Refer to Figures 1-5The application discloses a furnace body structure for growing gallium nitride single crystal by HVPE method, which comprises a lifting box 1, a rotating shaft 4 symmetrically installed in the lifting box 1, a rotating shaft 5 fixedly installed at one end of the rotating shaft 4, two rotating shafts 4 controlled to relatively rotate through a driving assembly, a plurality of stirring rods 6 fixedly installed on the surface of the rotating shaft 5 in a circumferential manner, a space reserved between the two rotating shafts 5 for preventing the stirring rods 6 from colliding, an installation groove 7 formed at the end of the rotating shaft 5 away from the rotating shaft 4, a plurality of rectangular openings 16 formed on the surface of the rotating shaft 5 and communicated with the installation groove 7, and a plurality of material feeding pipes 17 fixedly installed on the surface of the rotating shaft 5 and respectively covering the plurality of rectangular openings 16.

[0025] A rotating ring 8 is sealingly and rotatably installed at the groove of the installation groove 7, a circular opening is formed at the center of the rotating ring 8, an installation rod 9 is sealingly and rotatably installed in the circular opening, one end of the installation rod 9 located in the installation groove 7 is fixedly connected with the groove wall of the installation groove 7 through a connecting component, the connecting component comprises an installation ring 21 fixedly sleeved on the installation rod 9 and a connecting rod 3 fixedly installed on the outer ring wall of the installation ring 21, one end of the connecting rod 3 is fixedly connected with the groove wall of the installation groove 7, the rotating ring 8 is limited to rotate through a limiting component, the limiting component comprises a fixed rod 2, both ends of the fixed rod 2 are fixedly connected with the inner wall of the lifting box 1 and the surface of the rotating ring 8, a through opening is formed on the surface of the rotating ring 8, a discharge pipe 10 is fixedly installed in the through opening, a straight rod 11 is fixedly installed at one end of the discharge pipe 10, an inlet groove 12 is formed at one end of the straight rod 11, a piston rod 13 is sealingly inserted into the inlet groove 12, a reciprocating thread is formed on the surface of the installation rod 9, a sliding plate 14 is threadedly sleeved on the installation rod 9, both sliding plates 14 are fixedly connected with the two piston rods 13, an inlet pipe 15 is fixedly installed on the lower surface of the straight rod 11, a one-way valve is arranged in each of the inlet pipe 15, the discharge pipe 10 and the material feeding pipe 17, the one-way valve in the discharge pipe 10 is communicated from the inlet groove 12 to the installation groove 7, the one-way valve in the inlet pipe 15 is communicated from the lifting box 1 to the inlet groove 12, and the one-way valve in the material feeding pipe 17 is communicated from the installation groove 7 to the lifting box 1.

[0026] When the material in the lifting box 1 needs to be mixed, the two rotating rods 4 and the two rotating shafts 5 are controlled to rotate by the driving assembly, and in the rotating process, the plurality of stirring rods 6 will stir and mix the material in the lifting box 1, and the mounting rod 9 will also rotate, and the rotating ring 8 will not rotate with the rotating shaft 5 due to the action of the fixing rod 2, and the sliding plate 14 threaded on the mounting rod 9 will take the piston rod 13 to move transversely, and in the moving process, the space between the end of the piston rod 13 and the groove wall of the feeding groove 12 will change from small to large and then from large to small, when the space size increases, the pressure decreases, and the material in the lifting box 1 will enter the feeding groove 12 from the feeding pipe 15, and when the space size decreases, the pressure increases, and the material in the feeding groove 12 will enter the mounting groove 7 from the discharge pipe 10, that is, inside the rotating shaft 5, and then the material in the mounting groove 7 will be extruded into the plurality of material pipes 17 from the plurality of rectangular openings 16 under the action of the centrifugal force, and then be thrown into the lifting box 1 again, the thrown material can play a turbulence effect, thereby accelerating the working efficiency of material mixing, and the thrown material can be transferred to other positions, including the area far away from the stirring rod 6, so as to expand the mixing area.

[0027] The driving assembly comprises a driving motor 18 and two gears 19 fixedly sleeved on the two rotating rods 4, the two gears 19 are engaged and connected, the mounting shell 20 is fixedly installed on the inner wall of the lifting box 1, the surface of the mounting shell 20 is symmetrically provided with a through hole, the two rotating rods 4 are sealingly and rotatably installed in the two through holes respectively, and the driving motor 18 is fixedly installed in the mounting shell 20 and the output shaft is fixedly connected with one of the rotating rods 4.

[0028] The driving motor 18 is started, and under the meshing action of the two gears 19, the two rotating rods 4 and the two rotating shafts 5 will relatively rotate, and the mounting shell 20 is used to protect the driving assembly and avoid direct contact between the driving assembly and the material.

[0029] At the same time, since the two rotating shafts 5 relatively rotate, part of the material thrown from the material pipe 17 will be relatively in the direction, so that forced convection is formed, the direction of the forced convection and the convection generated by stirring are intersected and superposed, the multi-directional convection can make liquid molecules move faster in the whole container, break through the local flow limitation that may exist in pure stirring, greatly improve the probability of contact between different liquids, and thus accelerate the mixing efficiency.

[0030] In this invention, when it is necessary to mix the materials located in the lifting box 1, the two rotating rods 4 and two rotating shafts 5 are controlled to rotate by the drive assembly. During the rotation, multiple stirring rods 6 will stir and mix the materials located in the lifting box 1. At the same time, the mounting rod 9 will also rotate, while the rotating ring 8 will not rotate with the rotating shaft 5 due to the effect of the limiting component. The sliding plate 14, which is threaded onto the mounting rod 9, will move the piston rod 13 laterally back and forth. During the movement, the space between the end of the piston rod 13 and the wall of the feed trough 12... The dimensions of the space will continuously change from small to large and then from large to small, so that the material located in the lifting box 1 can be intermittently transported to the mounting groove 7, that is, inside the rotating shaft 5. Then, as the rotating shaft 5 rotates, the material located in the mounting groove 7 will be squeezed from multiple rectangular openings 16 into multiple feed pipes 17 under the action of centrifugal force, and then thrown out again into the lifting box 1. The thrown material can play a turbulence effect, thereby accelerating the mixing efficiency of the material. At the same time, the thrown material can be transferred to other positions, including areas away from the stirring rod 6, which can expand the mixing area.

[0031] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "connection", "linking", "fixing", etc., should be interpreted broadly.

[0032] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A furnace structure for growing a gallium nitride single crystal by an HVPE method, comprising a lift-off cassette (1), characterized in that, Symmetrically rotatingly installed in the lifting box (1) are rotating rods (4), one end of each of the rotating rods (4) is fixedly installed with a rotating shaft (5), the two rotating rods (4) are controlled to relatively rotate through a driving assembly, the surface of the rotating shaft (5) is fixedly installed with a plurality of stirring rods (6) in a circumferential manner, one end of the rotating shaft (5) away from the rotating rod (4) is provided with an installation groove (7), the surface of the rotating shaft (5) is provided with a plurality of rectangular openings (16) in communication with the installation groove (7), and the surface of the rotating shaft (5) is fixedly installed with a plurality of material passing pipes (17) respectively covering the plurality of rectangular openings (16). A rotating ring (8) is sealingly and rotatably installed at the opening of the installation groove (7), a circular opening is formed at the center of the rotating ring (8), an installation rod (9) is sealingly and rotatably installed in the circular opening, one end of the installation rod (9) located in the installation groove (7) is fixedly connected with the groove wall of the installation groove (7) through a connecting component, the rotating ring (8) is limited to rotate through a limiting component, a through opening is formed in the surface of the rotating ring (8), the through opening is fixedly installed with a discharging pipe (10), one end of the discharging pipe (10) is fixedly installed with a straight rod (11), one end of the straight rod (11) is provided with a feeding groove (12), the feeding groove (12) is sealingly and insertingly provided with a piston rod (13), the surface of the installation rod (9) is provided with reciprocating threads, a sliding plate (14) is threadedly connected on the installation rod (9), the two sliding plates (14) are fixedly connected with the two piston rods (13) respectively, the lower surface of the straight rod (11) is fixedly installed with a feeding pipe (15), and the feeding pipe (15), the discharging pipe (10) and the material passing pipe (17) are all provided with one-way valves.

2. The furnace structure for growing a gallium nitride single crystal by an HVPE method according to claim 1, wherein The one-way valve in the discharging pipe (10) is in a conduction direction from the feeding groove (12) to the installation groove (7), the one-way valve in the feeding pipe (15) is in a conduction direction from the lifting box (1) to the feeding groove (12), and the one-way valve in the material passing pipe (17) is in a conduction direction from the installation groove (7) to the lifting box (1).

3. The furnace structure for growing a gallium nitride single crystal by an HVPE method according to claim 1, wherein The driving assembly comprises a driving motor (18) and two gears (19) fixedly connected on the two rotating rods (4) respectively, the two gears (19) are meshingly connected, an installation shell (20) is fixedly installed on the inner wall of the lifting box (1), the surface of the installation shell (20) is symmetrically provided with through openings, the two rotating rods (4) are sealingly and rotatably installed in the two through openings respectively, the driving motor (18) is fixedly installed in the installation shell (20), and the output shaft is fixedly connected with one of the rotating rods (4).

4. The furnace structure for growing a gallium nitride single crystal by an HVPE method according to claim 1, wherein The connecting component comprises an installation ring (21) fixedly connected on the installation rod (9) and a connecting rod (3) fixedly installed on the outer ring wall of the installation ring (21), and one end of the connecting rod (3) is fixedly connected with the groove wall of the installation groove (7).

5. The furnace structure for growing a gallium nitride single crystal by an HVPE method according to claim 1, wherein The limiting component comprises a fixed rod (2), and the two ends of the fixed rod (2) are fixedly connected with the inner wall of the lifting box (1) and the surface of the rotating ring (8) respectively.

6. The furnace structure for growing a gallium nitride single crystal by an HVPE method according to claim 1, wherein A space for preventing the stirring rods (6) from colliding is reserved between the two rotating shafts (5).

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